WO2010079658A1 - レーザ加工装置 - Google Patents
レーザ加工装置 Download PDFInfo
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- WO2010079658A1 WO2010079658A1 PCT/JP2009/070401 JP2009070401W WO2010079658A1 WO 2010079658 A1 WO2010079658 A1 WO 2010079658A1 JP 2009070401 W JP2009070401 W JP 2009070401W WO 2010079658 A1 WO2010079658 A1 WO 2010079658A1
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- Prior art keywords
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- optical system
- workpiece
- processing apparatus
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0736—Shaping the laser spot into an oval shape, e.g. elliptic shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
- B23K26/0613—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis
- B23K26/0617—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis and with spots spaced along the common axis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0738—Shaping the laser spot into a linear shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
Definitions
- the present invention relates to a laser processing apparatus.
- the laser processing apparatus as described above is extremely effective because a processing region can be formed so as to extend in one direction with respect to the processing target, and further technical development is expected.
- the present invention has been made in view of such circumstances, and an object thereof is to provide a laser processing apparatus capable of forming a processing region in a desired shape.
- a laser processing apparatus includes a laser light source that emits laser light, a support that supports a workpiece that is transparent to the laser light, and parallel light that is transmitted through an optical axis.
- a first optical system that diverges or converges laser light emitted from a laser light source in a predetermined direction, and converges parallel light at one point on the optical axis.
- a laser beam emitted from the first optical system is converged to a first point in a first direction orthogonal to the optical axis, and a second orthogonal to the optical axis and the first direction.
- a second optical system that converges to a second point in the direction, a first moving mechanism that moves the first optical system relative to the second optical system along the optical axis, and a second Second moving the support base relative to the optical system along the optical axis
- a first moving mechanism and a second moving mechanism the first point is positioned outside the workpiece, and the second point is positioned on the outer surface or inside of the workpiece.
- the processing object is irradiated with laser light.
- the cross-sectional shape of the laser beam is a long shape extending in the second direction at the first point, and is a long shape extending in the first direction at the second point. Therefore, the first movement mechanism and the second movement mechanism are used to position the first point on the outside of the workpiece and to place the second point on the outer surface or inside of the workpiece.
- An elongated processing region extending in the first direction can be formed at a portion where the second point is located on the outer surface or inside of the object. Therefore, according to this laser processing apparatus, it is possible to form a processing region in a desired shape.
- the second point is preferably a point at which a light beam that has not been diverged or converged by the first optical system among the light beam bundle of the laser light is converged by the second optical system.
- the width of the processing region in the second direction is increased. Can be thinned.
- the second moving mechanism moves the support base relative to the second optical system in the first direction.
- the machining area has a long shape extending in the first direction
- the machining area can be efficiently formed on the outer surface or inside of the workpiece along the machining line parallel to the first direction. it can.
- the second moving mechanism moves the support base relative to the second optical system in the second direction.
- the processing region has an elongated shape extending in the first direction
- a wide processing region can be formed on the outer surface or inside of the processing object along the processing line perpendicular to the first direction. it can.
- An optical member that reflects laser light is disposed on the optical axis between the first optical system and the second optical system, and the optical member transmits observation light for observing the workpiece. It is preferable to make it. According to this configuration, the object to be processed can be observed via the second optical system having a function of converging parallel light to one point on the optical axis without being affected by the first optical system. .
- FIG. 1 is a configuration diagram of an embodiment of a laser processing apparatus according to the present invention.
- a laser processing apparatus 1 includes a laser oscillator (laser light source) 2 that emits a laser beam L1, and a support base 3 that supports a workpiece S that is transparent to the laser beam L1.
- laser oscillator laser light source
- support base 3 that supports a workpiece S that is transparent to the laser beam L1.
- the XYZ stage 7 supports not only the optical axis direction of the objective lens 5, that is, the Z-axis direction, but also the X-axis direction orthogonal to the Z-axis direction and the Y-axis direction orthogonal to the Z-axis direction and the X-axis direction. 3 is moved.
- the laser processing apparatus 1 further receives an illumination unit 8 that projects an observation light L2 for observing the processing object S, and a reflected light of the observation light L2 reflected by the processing object S to receive the processing object. And an imaging unit 9 that acquires an image of S. Thereby, the surface, the inside, or the back surface of the workpiece S can be observed.
- the laser light L 1 emitted from the laser oscillator 2 travels on the optical axis of the cylindrical lens 4, is then reflected by the dichroic mirror (optical member) 11, and travels on the optical axis of the objective lens 5. It advances and is irradiated to the workpiece S on the support 3.
- the observation light L ⁇ b> 2 projected by the illumination unit 8 is reflected by the dichroic mirror 12, passes through the dichroic mirror 11, travels on the optical axis of the objective lens 5, and is a workpiece on the support base 3. S is irradiated.
- the reflected light of the observation light L2 reflected by the processing object S travels on the optical axis of the objective lens 5, passes through the dichroic mirrors 11 and 12, and is received by the imaging unit 9.
- the laser processing apparatus 1 In the laser processing apparatus 1, the laser oscillator 2, the cylindrical lens 4, the objective lens 5, the moving mechanism 6, the illumination unit 8, the imaging unit 9, the dichroic mirror 11, and the dichroic mirror 12 are arranged in the housing, and laser irradiation is performed.
- a device 10 is configured.
- the laser processing apparatus 1 is provided with a control unit 20 that controls the entire apparatus such as the laser oscillator 2, the moving mechanism 6, the illumination unit 8, the imaging unit 9, and the XYZ stage 7.
- the control unit 20 controls the moving mechanism 6 to move the cylindrical lens 4 relative to the objective lens 5 along the optical axis, or supports the support 3 (that is, the object to be processed) with respect to the objective lens 5.
- the XYZ stage 7 is controlled to move S) relatively along the optical axis.
- the distance between the objective lens 5 and the support base 3 may be adjusted by moving the support base 3 in the Z-axis direction (optical axis direction).
- the laser irradiation device 10 including the lens 5 or the objective lens 5 may be moved in the Z-axis direction, or both may be controlled to move.
- the control unit 20 controls the laser oscillator 2 and the illumination unit 8 or operates the XYZ stage 7 based on the image acquired by the imaging unit 9 to control the focal position of the laser light L1 with respect to the workpiece S.
- 2 and 3 are diagrams showing an optical path of laser light in the laser processing apparatus of FIG. 2 and 3, the illustration of the dichroic mirror 11 is omitted for convenience of explanation.
- the cylindrical lens 4 diverges the laser light L1 emitted from the laser oscillator 2 in the Y-axis direction (predetermined direction) (that is, in the YZ plane), and the X-axis direction ( That is, it does not diverge and converge in the ZX plane.
- the objective lens 5 converges the laser light L1 emitted from the cylindrical lens 4 to the first point P1 in the Y-axis direction (first direction) (that is, in the YZ plane), and the X-axis direction (first 2) (that is, in the ZX plane), it converges to the second point P2.
- the cross-sectional shape of the laser beam L1 becomes a long shape extending in the X-axis direction at the point P1, and becomes a long shape extending in the Y-axis direction at the point P2.
- the focal length of the cylindrical lens 4 is A
- the divergence point distance (the distance between the focal point of the cylindrical lens 4 and the principal point of the objective lens 5)
- the focal length of the objective lens 5 is C
- the refraction of the workpiece S is performed.
- the focal point distance in the YZ plane (the distance between the principal point of the objective lens 5 and the first point P1) is the focal point in the Z1 and ZX planes.
- the light spot distance (distance between the principal point of the objective lens 5 and the second point P2) Z2 is expressed by the following equations (1) and (2), respectively.
- Z1 (GH) + d + (nH-d) / n
- Z2 (CE) + nE (2)
- n 1.
- the focal point distance Z1 in the YZ plane depends on the divergence point distance B, and the focal point distance Z2 in the ZX plane does not depend on the divergence point distance B.
- the focal point distance Z2 in the ZX plane does not change, and the focal point distance Z1 in the YZ plane is extended.
- FIGS. 4 and 5 are views showing a processing object in which a processing region is formed by the laser processing apparatus of FIG.
- the laser beam L ⁇ b> 1 that is a pulse wave is irradiated along the processing line PL of the processing target S that is a glass substrate, and the crack region is the starting point of cutting.
- CR is formed inside the workpiece S as a processing region.
- the XYZ stage 7 causes the second point P2 to be located inside the workpiece S (a predetermined distance from the surface of the workpiece S).
- the support base 3 is moved in the Z-axis direction (see the above formula (2)).
- the moving mechanism 6 causes the cylindrical lens 4 to move to the optical axis so that the first point P1 is located outside (below) the workpiece S. (See the above formula (1)).
- the peak power density of the laser light L1 at the second point P2 positioned inside the processing object S exceeds a processing threshold (for example, a threshold at which multiphoton absorption or other light absorption can occur).
- a processing threshold for example, a threshold at which multiphoton absorption or other light absorption can occur.
- the laser beam L1 is emitted from the laser oscillator 2, and the support base 3 is moved in the Y-axis direction by the XYZ stage 7, and the laser beam L1 is irradiated along the processing line PL.
- a crack region CR is formed for each irradiation of one pulse of the laser light L1 in the portion where the point P2 is located inside the workpiece S.
- each crack region CR is a long shape in which the cross-sectional shape of the laser beam L1 extends in the Y-axis direction at the point P2, so when viewed from the incident direction of the laser beam L1 with respect to the workpiece S, It becomes a long shape extending along the processing line PL.
- the crack region CR becomes a starting point of cutting, so the processing object S can be accurately moved along the processing line PL. Can be cut. And since the crack area
- the cross-sectional shape of the laser beam L1 is a long shape extending in the X-axis direction at the first point P1, and a long shape extending in the Y-axis direction at the second point P2. It becomes. Therefore, the point P2 is positioned inside the workpiece S by positioning the point P1 outside the workpiece S and the point P2 inside the workpiece S by the moving mechanism 6 and the XYZ stage 7. An elongated processing region extending in the Y-axis direction can be formed in the portion that has been made. Therefore, according to the laser processing apparatus 1, it is possible to form a processing region in a desired shape.
- the point at which the beam bundle in the XZ plane that is not diverged by the cylindrical lens 4 out of the beam bundle of the laser beam L1 is converged by the objective lens 5 is defined as a second point P2. Processing is performed at the point P2 (see FIG. 3B). For this reason, a point where the ray bundle in the YZ plane diverged by the cylindrical lens 4 is converged by the objective lens 5 is defined as a point P2, and the width of the processing region in the X-axis direction is compared with the case where the processing is performed at the point P2. Can be made thinner.
- the point P2 is a point where the light bundle in the YZ plane diverged by the cylindrical lens 4 is converged by the objective lens 5, and the point P2
- the processing may be performed by the above.
- the XYZ stage 7 moves the support base 3 in the Y-axis direction with respect to the objective lens 5.
- the machining area has a long shape extending in the Y-axis direction
- the machining area can be efficiently formed inside the workpiece S along the machining line PL parallel to the Y-axis direction.
- the processing region becomes a long shape extending in the Y-axis direction, so that the processing line PL parallel to the X-axis direction is obtained.
- a wide processing region can be formed inside the processing object S along the line.
- a dichroic mirror 11 that reflects the laser light L1 and transmits the observation light L2 is disposed on the optical axis between the cylindrical lens 4 and the objective lens 5. Thereby, the surface, the inside, or the back surface of the workpiece S can be observed through the objective lens 5 having the function of converging parallel light to one point on the optical axis without being affected by the cylindrical lens 4. .
- FIG. 6 is a view showing a photograph of a processing object in which a crack region is formed by the embodiment of the laser processing apparatus according to the present invention.
- 6A is a cross-sectional photograph of the object to be processed along the processing line
- FIG. 6B is a photograph when the observation light is focused on the surface of the object to be processed
- FIG. 6C is the object to be processed.
- (d) is an observation on the portion where the first point P1 is located inside the workpiece. It is a photograph when the light is focused.
- the processing conditions in this example are as follows.
- Polarization characteristics linearly polarized light
- Transmittance for laser light 70%
- a long crack region CR2 extending in the Y-axis direction is formed in the portion where the second point P2 is positioned inside the workpiece.
- an elongated crack region CR1 extending in the X-axis direction is formed in the portion where the first point P1 is positioned inside the workpiece.
- the point P1 is located outside the workpiece, and the point P2 is located inside the workpiece, thereby preventing the machining of the workpiece at the point P1.
- the present invention is not limited to the embodiment described above.
- a cylindrical lens 4 having a function of converging parallel light in a predetermined direction orthogonal to the optical axis by a cylindrical convex surface may be used.
- the laser beam L1 may be incident on the objective lens 5 in a diverging state, or the laser beam L1 is incident on the objective lens 5 in a converged state as shown in FIG. You may let them.
- the objective lens 5 is moved, or both the cylindrical lens 4 and the objective lens 5 are moved. You may apply what moves relatively along an axis
- the objective lens 5 (or the laser irradiation apparatus 10 including the objective lens 5) is moved, or the support base 3 and the objective lens 5 (or the objective lens 5).
- a device that moves the support 3 relative to the objective lens 5 along the optical axis may be applied, such as moving both of the laser irradiation devices 10).
- optical systems such as those composed of a plurality of lenses may be used instead of the cylindrical lens 4 as long as it has a function of diverging or converging parallel light in a predetermined direction orthogonal to the optical axis. May be.
- other optical systems such as one constituted by a plurality of lenses may be applied instead of the objective lens 5.
- the use of the crack region is not limited to that which is the starting point of cutting.
- Other applications include optical waveguides, micro-channels, micro-TAS (Total Analysis Systems), etc. that are configured by a plurality of continuous crack regions.
- the processing region may be formed on the outer surface of the processing object S by positioning the second point P2 on the outer surface (for example, the front surface or the back surface) of the processing object S.
- the processing area is not limited to the crack area.
- the processing region includes a crack region and a dielectric breakdown region (for example, when the processing target is made of a piezoelectric material such as glass or LiTaO 3 ), and a melt processing region (for example, the processing target is made of a semiconductor material such as silicon). ), A refractive index change region (for example, when the object to be processed is made of glass) and the like, and there are also regions where these are mixed.
- SYMBOLS 1 Laser processing apparatus, 2 ... Laser oscillator (laser light source), 3 ... Support stand, 4 ... Cylindrical lens (1st optical system), 5 ... Objective lens (2nd optical system), 6 ... Moving mechanism (1st) 1... XYZ stage (second movement mechanism), 11... Dichroic mirror (optical member).
Abstract
Description
びX軸方向と直交するY軸方向にも、支持台3を移動させる。
Z1=(G-H)+d+(nH-d)/n…(1)
Z2=(C-E)+nE…(2)
(A)加工対象物:パイレックス(登録商標)ガラス(厚さ700μm)
(B)レーザ
光源:Yb:KGW超短パルスレーザ
波長:1030nm
発振形態:再生増幅
繰り返し周波数:3kHz
パルス幅:3ps
出射レーザエネルギ:100μJ/パルス
出射レーザ光品質:TEM00
偏光特性:直線偏光
(C)対物レンズ
開口数(NA):0.55
レーザ光に対する透過率:70%
(D)照射条件
第2の点P2でのレーザ光の断面形状:100μm(Y軸方向の最大長さ)×5μm(X軸方向の最大長さ)
第2の点P2でのレーザ光の断面積:5×10-6cm2
第2の点P2でのレーザ光のピークパワー密度:5.1×1012W/cm2
第1の点P1でのレーザ光の断面形状:7μm(Y軸方向の最大長さ)×50μm(X軸方向の最大長さ)
第1の点P1でのレーザ光の断面積:3.5×10-6cm2
第1の点P1でのレーザ光のピークパワー密度:1×1012W/cm2
(E)対物レンズに対する支持台の移動速度:300mm/s
Claims (5)
- レーザ光を出射するレーザ光源と、
前記レーザ光に対して透過性を有する加工対象物を支持する支持台と、
平行光を光軸と直交する所定の方向において発散又は収束させる機能を有し、前記レーザ光源から出射された前記レーザ光を前記所定の方向において発散又は収束させる第1の光学系と、
平行光を光軸上の一点に収束させる機能を有し、前記第1の光学系から出射された前記レーザ光を、光軸と直交する第1の方向において第1の点に収束させ、光軸及び前記第1の方向と直交する第2の方向において第2の点に収束させる第2の光学系と、
前記第2の光学系に対して前記第1の光学系を光軸に沿って相対的に移動させる第1の移動機構と、
前記第2の光学系に対して前記支持台を光軸に沿って相対的に移動させる第2の移動機構と、を備え、
前記第1の移動機構及び前記第2の移動機構によって、前記第1の点を前記加工対象物の外部に位置させ、前記第2の点を前記加工対象物の外表面又は内部に位置させて、前記加工対象物に前記レーザ光を照射することを特徴とするレーザ加工装置。 - 前記第2の点は、前記レーザ光の光線束のうち前記第1の光学系によって発散又は収束させられなかった光線束が前記第2の光学系によって収束させられる点であることを特徴とする請求項1記載のレーザ加工装置。
- 前記第2の移動機構は、前記第2の光学系に対して前記支持台を前記第1の方向に相対的に移動させることを特徴とする請求項1記載のレーザ加工装置。
- 前記第2の移動機構は、前記第2の光学系に対して前記支持台を前記第2の方向に相対的に移動させることを特徴とする請求項1記載のレーザ加工装置。
- 前記第1の光学系と前記第2の光学系との間の光軸上には、前記レーザ光を反射する光学部材が配置され、
前記光学部材は、前記加工対象物を観察するための観察光を透過させることを特徴とする請求項1記載のレーザ加工装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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CN200980153474.7A CN102271859B (zh) | 2009-01-09 | 2009-12-04 | 激光加工装置 |
EP09837544.7A EP2388103B1 (en) | 2009-01-09 | 2009-12-04 | Laser beam working machine |
US13/143,604 US8841580B2 (en) | 2009-01-09 | 2009-12-04 | Laser beam working machine |
KR1020117011528A KR101798172B1 (ko) | 2009-01-09 | 2009-12-04 | 레이저 가공장치 |
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JP2009-003945 | 2009-01-09 | ||
JP2009003945A JP5241525B2 (ja) | 2009-01-09 | 2009-01-09 | レーザ加工装置 |
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US (1) | US8841580B2 (ja) |
EP (1) | EP2388103B1 (ja) |
JP (1) | JP5241525B2 (ja) |
KR (1) | KR101798172B1 (ja) |
CN (1) | CN102271859B (ja) |
TW (1) | TWI505891B (ja) |
WO (1) | WO2010079658A1 (ja) |
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JP4659300B2 (ja) | 2000-09-13 | 2011-03-30 | 浜松ホトニクス株式会社 | レーザ加工方法及び半導体チップの製造方法 |
CN1328002C (zh) | 2002-03-12 | 2007-07-25 | 浜松光子学株式会社 | 加工对象物切割方法 |
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Also Published As
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EP2388103A1 (en) | 2011-11-23 |
JP2010158713A (ja) | 2010-07-22 |
CN102271859B (zh) | 2014-07-09 |
KR101798172B1 (ko) | 2017-11-15 |
CN102271859A (zh) | 2011-12-07 |
EP2388103A4 (en) | 2015-07-29 |
US20110274128A1 (en) | 2011-11-10 |
US8841580B2 (en) | 2014-09-23 |
KR20110112282A (ko) | 2011-10-12 |
TWI505891B (zh) | 2015-11-01 |
EP2388103B1 (en) | 2017-08-02 |
TW201039955A (en) | 2010-11-16 |
JP5241525B2 (ja) | 2013-07-17 |
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