WO2009110518A1 - 電子部品検査方法およびそれに用いられる装置 - Google Patents

電子部品検査方法およびそれに用いられる装置 Download PDF

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Publication number
WO2009110518A1
WO2009110518A1 PCT/JP2009/054092 JP2009054092W WO2009110518A1 WO 2009110518 A1 WO2009110518 A1 WO 2009110518A1 JP 2009054092 W JP2009054092 W JP 2009054092W WO 2009110518 A1 WO2009110518 A1 WO 2009110518A1
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WIPO (PCT)
Prior art keywords
imaging
electronic component
focal length
stage
focusing
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PCT/JP2009/054092
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English (en)
French (fr)
Japanese (ja)
Inventor
仁彦 津田
春生 張
哲 後藤
衛紅 郭
Original Assignee
有限会社共同設計企画
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Application filed by 有限会社共同設計企画 filed Critical 有限会社共同設計企画
Priority to CN2009801075498A priority Critical patent/CN101960295B/zh
Priority to KR1020107019709A priority patent/KR101505702B1/ko
Publication of WO2009110518A1 publication Critical patent/WO2009110518A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

Definitions

  • the present invention relates to a method for inspecting various electronic components for minute defects and foreign matter, and an apparatus used therefor.
  • an LCD module can be obtained by mounting a driving chip on the edge of a glass substrate of a liquid crystal panel by a COG method and connecting it to an external circuit via a flexible printed circuit board (FPC) or the like.
  • FPC flexible printed circuit board
  • the electrode pad 2 formed on the glass substrate 1 and the electrode 4 of the driving chip 3 are connected via the bumps 5 and the conductive particles 7 in the anisotropic conductive film 6. It is important that current can be passed in the thickness direction.
  • an electronic component is placed on an inspection stage, and the electronic component is moved in the X direction or the Y direction so as to be positioned on an imaging unit of a fixed microscope. Therefore, when the number of inspection parts is large or the electronic parts are large like a large LCD panel, it takes time to move the stage for inspection, and it takes time to position the electronic parts on the stage. There is a problem that it takes. In addition, the larger the product to be inspected, the larger the horizontal space is required to move and inspect it horizontally, so there is also a problem that a large space is required as the installation space for the apparatus. .
  • the present invention has been made in view of such circumstances, and can be used for an excellent inspection method capable of easily and quickly performing a precise and accurate inspection on a fine part of an electronic component at a low cost.
  • the purpose is to provide a device.
  • the present invention provides a microscope function and an image data output function at an appropriate position for imaging a predetermined part of the electronic component and a step of placing the electronic component on an inspection stage.
  • a step of moving and positioning the image pickup means provided; a step of moving the objective lens in the microscope function of the image pickup means toward and away from a predetermined part of the electronic component, and positioning and focusing at an appropriate focal length; and
  • the inspection method the step of imaging the predetermined part of the electronic component by the focused imaging means and inputting the image data to the information processing means and inspecting the quality of the imaging part in order is repeated.
  • An image is picked up while changing the distance L between the objective lens and the predetermined part of the electronic component, and the information processing means In this case, the optimum focal length is narrowed down, and the distance L is changed and the imaging is repeated until the optimum focal length is determined.
  • the first time the electronic component placed on the stage is focused.
  • the distance L between the objective lens and the predetermined part of the electronic component is first set to a predetermined distance, and the distance change and imaging are repeated until the optimum focal length is determined,
  • the determined optimum focal length is stored in the information processing means, and when the electronic component placed on the stage is focused next time, the information processing means stores the information before the previous time.
  • a predicted value of the optimum focal length is derived, and the distance L between the objective lens and a predetermined part of the electronic component is first set to the predicted optimum focal length.
  • the optimum focal length thereof is determined, the first aspect of the electronic component inspection method so as to be stored in the information processing means.
  • the present invention provides a single or a plurality of electronic components mounted on the stage, particularly with the imaging means attached to the stage surface so as to be movable in at least one of the X direction and the Y direction.
  • a second gist is an electronic component inspection method in which focusing and imaging are sequentially performed at a plurality of different positions while moving the imaging means.
  • the present invention includes, in particular, as the imaging means, a first imaging means that can move in the X direction with respect to the stage surface, and a second imaging means that can move in the Y direction with respect to the stage surface.
  • a third gist is an electronic component inspection method in which the second image pickup means is moved in the Y direction while focusing and image pickup are sequentially performed at a plurality of different positions.
  • this invention is an apparatus used for the electronic component test
  • inspection method which is the said 1st summary, Comprising: The stage for mounting an electronic component, and the electronic component mounted on the said stage for every test
  • An imaging unit set to be moved and positioned to an appropriate position for imaging a predetermined part of the image and a setting to inspect the quality of the imaged part based on the image data obtained by the imaging unit
  • the information processing means, and the imaging means includes a microscope section set so that the objective lens can move forward and backward toward the imaging target, and an enlarged image captured by the microscope section.
  • An image data output unit for outputting to the microscope, and focusing in the microscope unit captures an image while changing a distance L between the objective lens and a predetermined part of the electronic component.
  • the information processing means narrows down the optimum focal length and repeats the change of the distance L and imaging until the optimum focal length is determined.
  • the distance L between the objective lens and the predetermined part of the electronic component is first set to a predetermined distance, and the distance is changed until the optimum focal length is determined.
  • the determined optimum focal length is stored in the information processing unit, and the next time, the focusing on the electronic component placed on the stage is performed in the information processing unit.
  • the predicted value of the optimum focal length is derived, and the objective lens and the electronic component are predetermined. First, the distance L is set to the predicted optimum focal length, and the distance change and imaging are repeated until the optimum focal length is determined.
  • An electronic component inspection apparatus that is stored in the processing means is a fourth gist.
  • the present invention includes, in particular, the image pickup unit that is movably attached to at least one of the X direction and the Y direction with respect to the stage surface, and is single or plural mounted on the stage.
  • a fifth aspect is an electronic component inspection apparatus that sequentially performs focusing and imaging at a plurality of locations at different positions while the imaging means moves with respect to an electronic component.
  • the present invention includes, in particular, as the imaging means, a first imaging means that can move in the X direction with respect to the stage surface, and a second imaging means that can move in the Y direction with respect to the stage surface.
  • the first imaging means moves in the X direction with respect to a single or a plurality of electronic components placed on the stage, and sequentially focuses and images at a plurality of positions at different positions.
  • a sixth aspect is an electronic component inspection apparatus in which the second image pickup unit moves in the Y direction and sequentially performs focusing and image pickup at a plurality of positions having different positions.
  • the inspection target portion of the electronic component placed on the stage surface is not moved and positioned to the imaging unit of the fixed imaging means. Since the means is moved to the inspection target part of the electronic component to perform the inspection, the apparatus can be designed in a compact manner and the operation can be speeded up. In particular, by combining an imaging unit that moves in the X direction and an imaging unit that moves in the Y direction, it is possible to further reduce the size of the apparatus and increase the operation speed.
  • the focusing is not performed from the beginning every time by an autofocus function using a displacement sensor or the like.
  • the optimum focal length is narrowed down from the image data obtained by repeating the imaging while changing the distance L to the predetermined part (inspection target part) of the electronic component, and is set in advance only once.
  • the optimum focal length is searched from the predetermined distance, but the next and subsequent optimum focal lengths are stored and the optimum focal length is derived from the predicted optimum focal length derived from the stored optimum focal length. If the quality of electronic parts to be inspected continuously is complete, the optimum focal length can be obtained immediately and focused after the next time. The time required can be reduced significantly.
  • accurate inspection based on a clear image can be performed at high speed.
  • a certain tendency is extracted from the variation in the optimum focal length stored before the previous time, and a correction corresponding to the variation is added to derive the predicted optimum focal length.
  • focusing according to the variation tendency of the target electronic component can be performed more quickly, and the overall time can be significantly reduced.
  • the electronic component inspection method can be carried out efficiently and relatively inexpensively.
  • this apparatus does not move and position the inspection target portion of the electronic component placed on the stage surface to the image pickup unit of the fixed image pickup means, but places the image pickup means in the inspection target of the electronic component. Since the inspection is performed by moving to a part, it is not necessary to take a large stage, the whole is compact, and space saving and high-speed operation can be realized.
  • the image data itself picked up by the image pickup means is used at the time of focusing instead of an expensive displacement sensor, so that the manufacturing cost is kept relatively low.
  • the image pickup means can be made slim and lightweight, and even if the image pickup means is moved and positioned as described above.
  • the imaging means is less susceptible to vibration and blurring, and has the advantage that the imaging means can be moved, stopped, and photographed repeatedly in a short time.
  • FIG. 1 is an external perspective view showing an embodiment of an electronic component inspection apparatus of the present invention.
  • the inspection apparatus 10 is installed on the side of the conveyor 11 connected to the LCD module production line, and the manufactured LCD modules are sequentially taken from the conveyor 11 into the stage in the inspection apparatus 10 for inspection. And return to the conveyor 11 again.
  • Reference numeral 20 denotes a monitor screen for displaying an image obtained at the time of the above inspection
  • reference numeral 21 denotes a main body unit incorporating control management means for controlling the operation of the apparatus and information processing means for inspection. is there.
  • two stages 12 and 13 for inspection are provided side by side along the transport direction of the transport conveyor 11.
  • the LCD module can be inspected at the same time.
  • the LCD module (1) sent to the position of the point P by the conveyor 11 is placed at the point Q on the front side of the apparatus by the transfer means 16 with the suction pad provided above. Transferred onto the first stage 12.
  • the LCD module (0) that has been inspected at the inspection point R in the previous stage is transferred to the second stage 13 disposed on the back side by the transfer means 17 and positioned at the inspection point S. Is done.
  • the LCD module ( ⁇ 1) arranged at the point T on the front side of the apparatus is transferred onto the conveyor 11 by the transfer means 18.
  • the LCD module (1) moves to the back side while being placed on the first stage 12, is positioned at the inspection point R, and is positioned at the inspection point S. Inspection is performed with the LCD module (0).
  • the movement of the conveyor 11 positions the next LCD module (2) at the point P of the conveyor 11, and the LCD module (-1) taken out on the conveyor 11 is sent downstream. It is supposed to be.
  • the LCD module (0) that has been inspected moves to the point T on the near side while being placed on the second stage 13, and the next step (step of FIG. 2A).
  • the empty second stage 13 returns to the inspection point S on the back side, and the LCD module (1) is transferred thereon. Thereafter, the above-described series of operations are repeated, so that two LCD modules are successively inspected.
  • the LCD module to be inspected includes an LCD 30, ten source chips 31 arranged in a horizontal row at the upper edge of the LCD 30 (the rear edge when the LCD 30 is horizontally placed), Similarly, it is composed of four gate chips 32 arranged in a vertical line on the left edge of the LCD 30, and a drive circuit board (FPC) 34 for connecting these chips 31, 32 and the control board 33.
  • Each chip 31 and 32 has a bump bonded to an electrode pad on the LCD 30 side through an anisotropic conductive film (not shown), similar to that shown in FIG.
  • the inspection of the driving circuit board 34 of the LCD module is performed in the first stage 12 of the inspection apparatus, and the inspection of the mounting portions of the chips 31 and 32 of the LCD module is performed in the second stage 13. To be done.
  • the inspection on the first stage 12 is performed at the position indicated by the inspection point R in FIG. 2B, as shown in FIG. 5A and FIG. 7 which is a cross-sectional view taken along the line AA ′.
  • This image pickup means 40 is a combination of a differential interference microscope 44 having an objective lens 41, a differential interference prism 42 and a mirror 43 with a coaxial incident illumination, and a CCD camera 45 having an image data output function. An enlarged image can be taken for each predetermined point while moving in the X direction from the back side of the drive circuit board 34.
  • the differential interference microscope 44 has a feature that the differential interference prism 42 can change the refractive index and thickness of the subject into an interference color change and contrast between light and dark and can be observed.
  • a blue light emitting diode is used for illumination of the differential interference microscope 44. This is because the illuminance is high and there is no heat generation.
  • Numeral 46 is an X direction moving means for moving the image pickup means 40 in the X direction. Specifically, a linear servo actuator capable of high speed stop is used.
  • Reference numeral 47 denotes a Z-direction adjusting means for moving the imaging means 40 in the Z direction to perform focusing. Specifically, the height of the imaging means 40 can be adjusted in units of micrometers ( ⁇ m). A linear stepping actuator is used.
  • the portion including the center of gravity G of the image pickup means 40 does not affect the image pickup even if the image pickup means 40 moves in the X direction and repeats high-speed stop so that the image pickup is not affected. 47 is firmly fixed.
  • the objective lens 41 disposed at the upper end portion of the image pickup means 40 and the outer cylinder portion of the CCD camera 45 disposed at the lower end portion are also fixed by the guide blocks 48a and 48b so as not to wobble during movement. ing.
  • Reference numeral 49 denotes a base plate for supporting various components for inspection including the first stage 12 and the second stage 13, and a super-rigid steel plate having a thickness of 12 mm or more, particularly preferably 16 mm or more is used. Thus, it is stable against vibration, temperature change, and humidity change due to movement of the imaging means 40, and the inspection is performed stably with time.
  • An image obtained by the differential interference microscope 44 of the image pickup means 40 is picked up by a CCD camera 45 and input to the information processing means of the main body 21 (see FIG. 1) of the apparatus as image data. .
  • the image data input from the imaging means 40 is converted by a predetermined calculation program corresponding to the inspection item (for example, converted into luminance distribution data based on a 256-gradation luminance scale). Then, this is compared with the reference data set for each inspection item, and those that deviate from the reference are detected as defective. The comparison data is printed out periodically or as necessary.
  • a predetermined calculation program corresponding to the inspection item for example, converted into luminance distribution data based on a 256-gradation luminance scale.
  • the image data input to the information processing means is sequentially displayed on the monitor screen 20 (see FIG. 1) of the apparatus together with the inspection result.
  • the enlarged image of the inspection target part is displayed in a state where the specific area used for comparison with the reference data is marked, and for the part where the defect is detected, the color of the marking part is the normal color.
  • the specific area is surrounded by a green frame, and when it is defective, it is displayed by being surrounded by a red frame).
  • the information processing means is provided with an optimum focal length calculation unit and an optimum focal length storage unit as part of a calibration system for focusing described below. That is, according to this system, when sequentially inspecting the LCD modules, prior to the inspection, for the first LCD module, imaging for focusing is repeated a plurality of times at the same inspection point, Based on the obtained image data, the optimum focal length is calculated, and the imaging means 40 (the objective lens 41) is moved in the Z direction according to the value, and focusing is performed. In this state, imaging for inspection is performed. In addition, the optimum focal length calculated at the time of focusing is stored in the information processing means.
  • the focal length is not narrowed down from a separately provided reference value or random value, but the predicted optimum focal length is determined from the stored optimum focal length according to a predetermined algorithm.
  • the initial position in the Z direction of the image pickup means 40 is determined according to the distance, and focusing is automatically performed from that position.
  • the LCD module to be inspected is warped or distorted by heating or tension at the time of manufacture, as shown exaggeratedly in FIG. 6, for example, and the inspection points (for example, 12 points indicated by arrows in FIG. 6). ) For each inspection point by calibrating the next focal length based on the data of the 12 proper focal lengths stored at the time of the first focusing.
  • Each of them has an advantage that a predicted optimum focal length that is closer to the actual optimum focal length (which is likely) can be set, focusing can be performed efficiently from that position, and shooting operation can be started in a short time. .
  • the optimum focal length at the time of focusing can be stored, and the variation tendency of the shape of the LCD module to be inspected can be grasped from the stored optimum focal length. If a certain tendency is extracted from the variation in the optimal focal length stored before the previous time, and the predicted optimal focal length is derived by adding a correction corresponding to the variation, Focusing according to the variation tendency of a certain electronic component can be performed more quickly, and the overall time can be greatly reduced.
  • the previous optimum focal distance is used as the current predicted optimum focal distance.
  • the average value of all the optimum focal lengths accumulated before the previous time is used as the predicted optimum focal length for this time.
  • (3) For example, two times, the previous time and the previous time.
  • the narrowing down of the optimum focal length at each inspection point is based on, for example, a relational expression indicating the relationship between the brightness of the image data and the distance between the objective lens 41 and the imaging object at the inspection point in the information processing means. Is calculated. That is, as shown in FIG. 8A, there is a place where the luminance that changes in accordance with the change in the distance changes extremely greatly before and after the specific distance. From the maximum change amount ⁇ of the change curve and its gradient, By identifying the correct focal length and again changing the distance before and after the predicted focal length, as shown in FIG. 8B, two points sandwiching the point where the slope becomes positive to negative are identified, thereby It can be obtained in a very short time by the process of specifying an appropriate focal length at which the luminance reaches a peak.
  • the LCD module is taken in from the transport conveyor 11 (see FIGS. 2A and 3) and positioned at a predetermined initial position below the first stage 12 on which the LCD module is placed for the inspection.
  • an X-direction moving means, a Y-direction moving means, and a ⁇ -axis rotating means for rotating the stage surface in the surface direction are provided for moving the first stage 12 itself (these are shown in the figure). Is omitted).
  • the inspection on the second stage 13 is provided at the position indicated by the inspection point S in FIG. 2A, as shown in FIG. 5B, with the Y-direction imaging means 50 provided on the left side and two in the back side.
  • the X direction imaging means 51 and 52 are used.
  • the X-direction imaging means 51 and 52 are for inspecting the quality of the pressure-bonded portions of the source chip 31 and the LCD 30 arranged in a horizontal row in the LCD module to be inspected, and can inspect two adjacent chips 31 simultaneously.
  • Each of the imaging means 51 and 52 is attached to the X-direction moving means 46 via the Z-direction adjusting means 47 for focusing, similar to the imaging means 40 (see FIG. 7).
  • the image pickup means 40 By the same operation as that of the image pickup means 40, it is possible to pick up an enlarged image of each of the two chips 31 simultaneously at predetermined points while moving in the X direction. More specifically, in FIG.
  • the chip 31 indicated by a 1 to a 5 is imaged by the imaging means 51, and the chip 31 indicated by b 1 -b 5 is imaged by the imaging means 52. It has become. Since these imaging operations are performed simultaneously by simultaneously moving the imaging units 51 and 52, the imaging and inspection can be performed in a very short time as a whole.
  • the Y-direction image pickup means 50 is also used for inspecting the quality of the pressure-bonded portions of the LCD chip 30 and the gate chip 32 arranged in a single vertical row in the LCD module.
  • the Y-direction image pickup means 51 and the X-direction image pickup means 51 and 52 Similarly, it is attached to the Y-direction moving means 53 via the Z-direction adjusting means 47 for focusing, and an enlarged image is taken for each predetermined point on the chip 32 while moving in the Y direction. Can be done. Since the imaging by the Y-direction imaging unit 50 is also performed simultaneously with the imaging by the imaging units 51 and 52, the imaging and inspection can be performed in a very short time as a whole.
  • Image data obtained by these imaging means 50 to 52 is also input to the information processing means of the main body 21 of the apparatus and processed in the same manner as the inspection in the first stage 12 so that a defect is detected. It has become.
  • This image data can also be displayed on the monitor screen 20 (see FIG. 1) of the sequential apparatus together with the inspection result.
  • the inspection image in the first stage 12 and the second stage 13 are displayed.
  • the inspection image can be switched by a switch and viewed.
  • these display methods are not particularly limited, and can be set as appropriate.
  • the first LCD module is repeatedly subjected to imaging for focusing several times at the same inspection point prior to the inspection.
  • the optimum focal length is calculated, and the imaging means 50 to 52 are moved in the Z direction according to the value, and focusing is performed.
  • the focal length is memorized.
  • the imaging means 50 to 52 are automatically positioned in the Z direction at each inspection point in accordance with the predicted optimum focal length derived from the stored optimum focal length, thereby more efficiently. Focusing is performed.
  • the LCD module placed on the second stage 13 is positioned at a precise position in the first stage 12 in advance, and is transferred to the second stage 13 with high accuracy in that state. Therefore, unlike the first stage 12, the second stage 13 itself is not provided with a moving means for positioning. However, in order to discharge the LCD module to the conveyor 11 (see FIGS. 2A and 3), Y-direction moving means is provided on the lower side of the second stage 13 (not shown).
  • the LCD module can be inspected as follows, for example. First, the LCD module (first sheet) transferred from the conveyor 11 (see FIG. 2) to the first stage 12 is accurately positioned at the inspection point R. This positioning is performed by moving the first stage 12 in the X direction, the Y direction, and the ⁇ (rotation) direction using the imaging unit 40 and using the alignment mark provided on the LCD module as a mark.
  • the imaging means 40 is moved to the inspection start position of the drive circuit board 34 of the LCD module, and the objective lens 41 of the differential interference microscope 44 is positioned at an appropriate inspection position, and for focusing, Repeated a plurality of times at the same inspection point, calculates an appropriate focal length based on the obtained image data, moves the imaging means 40 (the objective lens 41 thereof) in the Z direction according to the value, and performs focusing.
  • imaging for inspection is performed and the optimum focal length calculated at the time of focusing is stored. This is performed for each inspection point.
  • the focus is adjusted more efficiently based on the predicted optimum focal length derived from the stored optimum focal length in the next and subsequent focusing. As a whole, the inspection process can be speeded up.
  • the image data input from the imaging means 40 is compared with preset reference data, and those that are out of the reference are regarded as defective. To detect.
  • the image data input to the information processing means is displayed on the monitor screen 20 (see FIG. 1) of the sequential apparatus together with the inspection result. It is displayed as you can see.
  • the inspection image is as shown in FIG. 9A, for example.
  • the number of the conductive particles 61 arranged in the vertical direction in the pressure-bonding portion of each bump 60 is measured at a predetermined pitch, and the deviation of the number of the conductive particles 61 is examined, whereby the deviation between the bump 60 and the electrode of the LCD 30 (see FIG. Can be inspected).
  • the ratio of the deviation becomes a certain level or more, defective display is performed.
  • the inspection image is as shown in FIG. 9B, for example.
  • the range where the foreign substance 63 exists is divided into four in the vertical direction, and it is determined that it is other than the conductive particles 61 from the data of area, shape, brightness, etc. In the case where the size is greater than or equal to a predetermined value, a failure display is made.
  • FIG. 10 shows an X-direction moving means (described as “X-axis” in FIG. 10) 46 and a Z-direction adjusting means (in FIG. 10) at the time of inspection (three places) of the LCD module on the first stage 12.
  • X-axis X-direction moving means
  • Z-direction adjusting means in FIG. 10
  • An example of a chart of an operation pattern of 47 (described as “Z-axis”), a CCD camera 45, and image processing means (described as “CPU” in FIG. 10) in the information processing means is shown.
  • the LCD module (first sheet) that has been inspected by the first stage 12 is transferred from the inspection point R (see FIG. 2A) onto the second stage 13 disposed at the inspection point S. .
  • the inspection of the crimped portion between the source chip 31, the gate chip 32 and the LCD 30 of the LCD module is performed simultaneously by driving the X direction imaging means 51 and 52 and the Y direction imaging means 50 simultaneously.
  • tip 31 and 32 can be test
  • this is an inspection for the first LCD module in order to obtain image data for focusing before imaging for inspection, a plurality of times in the Z-axis direction are obtained at the same inspection position.
  • Imaging is performed while changing the height, the optimum focal length is calculated by the above-described method, and focusing is performed based on the value.
  • the optimum focal length is stored in the information processing means. Then, in the next and subsequent inspections, by narrowing down the optimum focal length after positioning each imaging means 51 and the like in the Z direction according to the predicted optimum focal length derived from the stored optimum focal length, Focusing can be performed more efficiently.
  • a sufficient number of conductive particles 61 are interposed between the bumps of the chip 31 (32) and the electrodes of the LCD 30 in the crimping portion of the LCD 30 sandwiching each of the chips 31 (32) and the anisotropic conductive film.
  • the inspection image is as shown in FIG. 11A, for example. That is, since the indentation 65 of the conductive particles crimped to this portion appears as a substantially circular shadow on the crimping portion 64 of each bump, as shown in FIG. 11B, a region surrounding the crimping portion 64 of each bump is rectangular.
  • the indentation 65 of the conductive particles enclosed in a frame and appearing in the square frame is specified and marked from the shadow pattern (indicated by the small frame 66), and the number is counted. When the number falls below a preset reference value, a failure display is made.
  • the inspection apparatus when inspecting the quality of the drive circuit board 34 of the LCD module and the chips 31 and 32 arranged vertically and horizontally, the optimum focal length at the time of focusing is calculated using the image data. Since the LCD module for the next and subsequent times is automatically focused on the basis of the predicted optimum focal length derived from the stored optimum focal length before and after the previous time, Combined with the fact that the lightweight imaging means 40 moves and stops at high speed and immediately enters the imaging state, it is possible to inspect at high speed and with high accuracy. In addition, the inspection is not performed while moving the LCD module, but the image capturing means 40, 50 to 52 are moved to perform image inspection by continuously capturing image data for each predetermined portion. However, the device space as a whole is compact, and even when used in combination with the LCD module production line, no space is required.
  • the moving speed in the X direction and Y direction of the imaging means 40, 50 to 52 (hereinafter abbreviated as “40 etc.”) is appropriately determined according to the inspection speed, inspection accuracy, etc. required for the apparatus. Although it is set, it is usually preferable to set it to 1000 mm / second or less, especially 100 mm / second or less, in order to perform high-speed inspection.
  • the image pickup means 40 etc. is stably maintained.
  • the part including the center of gravity G such as the image pickup means 40 is attached to the Z direction adjusting means 47, and the objective lens 41 and the outer cylinder portion of the CCD camera 45 arranged at the lower end are also fixed at the same time.
  • the fixing method of the imaging means 40 or the like is not particularly limited as long as the movement of the center of gravity G is suppressed.
  • the imaging means 40 and the like are preferably lightweight, and the total weight of the combination of the differential interference microscope 44 and the CCD camera 45 is 2.5 kg or less, preferably 2.0 to 1.0 kg. is there. Further, the height is preferably 300 mm or less, particularly 200 to 100 mm, and the diameter of the lens barrel is also preferably about 50 to 30 mm.
  • the first stage 12 and the second stage 13 are arranged in parallel so that two types of inspection can be performed simultaneously.
  • the number of is not particularly limited. Whether the number is single or three or more, the inspection can be performed in the same manner by adjusting the timing. However, considering the synchronization with the transfer conveyor 11 and the like, it is optimal to combine two stages as in the above example.
  • the first stage 12 including the imaging unit 40 that moves in the X direction, the second imaging unit 51 and 52 that moves in the X direction, and the imaging unit 50 that moves in the Y direction are combined.
  • the moving direction of the image pickup means is not particularly limited as long as it moves with respect to the object positioned at the initial position at every inspection. Absent.
  • the first stage 12 is provided with the X direction moving means, the Y direction moving means, and the ⁇ axis rotating means for positioning the initial position of the LCD module.
  • the moving means on the first stage 12 side can be used for further position adjustment on the premise of the movement of the imaging means 40.
  • the present invention is used for the inspection of the LCD module.
  • the inspection object is not particularly limited, and various electronic components that can be inspected using image data. (Including products).
  • the apparatus of the present invention from the accumulated data of the optimum focal length stored for each examination, the change in the optimum focal length is analyzed over time and the tendency is extracted, and the predicted optimum focal length is based on the tendency.
  • the correction it is possible to achieve focusing that better matches the characteristics of the device and the characteristics of the inspection target, and to obtain image data at higher speed and higher accuracy. it can.
  • the inspection result can be analyzed to extract the defect tendency, and information based on the defect tendency can be fed back to the production line side and used for production management.
  • analysis of accumulated data on the optimum focal length can extract a defect tendency of an inspection object such as “work is too warped”, and information based on the defect tendency. Can be fed back to the production line and used for production management.
  • a vibration sensor or the like is attached to the apparatus of the present invention, it is preferable that when a defective product is detected in the inspection, it can be immediately determined whether or not an external vibration has an influence.
  • any item can be inspected as long as it can be detected by image data, and the type of the inspection item is not particularly limited.
  • the electronic component inspection method of the present invention and the apparatus used therefor can quickly and accurately inspect minute portions of electronic components at low cost.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
PCT/JP2009/054092 2008-03-04 2009-03-04 電子部品検査方法およびそれに用いられる装置 WO2009110518A1 (ja)

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CN108645868A (zh) * 2018-08-10 2018-10-12 北京妙想科技有限公司 一种小张印铁双面质量检测设备
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CN102269713B (zh) * 2011-08-02 2013-04-17 武汉科技大学 一种连铸结晶器铜板表面图像采集装置
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KR20100124742A (ko) 2010-11-29
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TWI490477B (zh) 2015-07-01

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