WO2009067446A1 - Anti-tarnish coating - Google Patents
Anti-tarnish coating Download PDFInfo
- Publication number
- WO2009067446A1 WO2009067446A1 PCT/US2008/083912 US2008083912W WO2009067446A1 WO 2009067446 A1 WO2009067446 A1 WO 2009067446A1 US 2008083912 W US2008083912 W US 2008083912W WO 2009067446 A1 WO2009067446 A1 WO 2009067446A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- disulfide
- copper
- group
- silver
- organic molecule
- Prior art date
Links
- 238000000576 coating method Methods 0.000 title claims description 60
- 239000011248 coating agent Substances 0.000 title claims description 48
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 119
- 239000010949 copper Substances 0.000 claims abstract description 117
- 229910052802 copper Inorganic materials 0.000 claims abstract description 116
- 239000000758 substrate Substances 0.000 claims abstract description 81
- 239000000203 mixture Substances 0.000 claims abstract description 65
- 238000000034 method Methods 0.000 claims abstract description 48
- 239000010970 precious metal Substances 0.000 claims abstract description 45
- 238000007654 immersion Methods 0.000 claims abstract description 33
- 125000000524 functional group Chemical group 0.000 claims abstract description 32
- 238000005260 corrosion Methods 0.000 claims abstract description 24
- 230000007797 corrosion Effects 0.000 claims abstract description 23
- 229910000881 Cu alloy Inorganic materials 0.000 claims abstract description 15
- 238000007747 plating Methods 0.000 claims abstract description 14
- 238000006073 displacement reaction Methods 0.000 claims abstract description 10
- 230000002708 enhancing effect Effects 0.000 claims abstract description 8
- 239000002344 surface layer Substances 0.000 claims abstract description 7
- 238000000151 deposition Methods 0.000 claims abstract description 5
- 229910052709 silver Inorganic materials 0.000 claims description 73
- 239000004332 silver Substances 0.000 claims description 72
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 46
- 125000004432 carbon atom Chemical group C* 0.000 claims description 40
- 125000001183 hydrocarbyl group Chemical group 0.000 claims description 29
- 239000004094 surface-active agent Substances 0.000 claims description 28
- 125000003118 aryl group Chemical group 0.000 claims description 26
- 229910052757 nitrogen Inorganic materials 0.000 claims description 26
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 25
- 229910052737 gold Inorganic materials 0.000 claims description 25
- 239000010931 gold Substances 0.000 claims description 25
- 229910052799 carbon Inorganic materials 0.000 claims description 24
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims description 23
- 229910052717 sulfur Inorganic materials 0.000 claims description 21
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 claims description 19
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 15
- 150000003573 thiols Chemical class 0.000 claims description 15
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 14
- 239000011593 sulfur Substances 0.000 claims description 14
- 150000001412 amines Chemical class 0.000 claims description 12
- 150000001721 carbon Chemical group 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 10
- 239000001301 oxygen Substances 0.000 claims description 10
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- 239000001257 hydrogen Substances 0.000 claims description 8
- QJAOYSPHSNGHNC-UHFFFAOYSA-N octadecane-1-thiol Chemical compound CCCCCCCCCCCCCCCCCCS QJAOYSPHSNGHNC-UHFFFAOYSA-N 0.000 claims description 8
- 150000003141 primary amines Chemical class 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 8
- 150000002019 disulfides Chemical class 0.000 claims description 7
- 150000003335 secondary amines Chemical class 0.000 claims description 6
- 150000003512 tertiary amines Chemical class 0.000 claims description 6
- 150000003568 thioethers Chemical class 0.000 claims description 5
- 125000005323 thioketone group Chemical group 0.000 claims description 5
- IDJPKRIELSFBPE-UHFFFAOYSA-N 1-(decyldisulfanyl)decane Chemical compound CCCCCCCCCCSSCCCCCCCCCC IDJPKRIELSFBPE-UHFFFAOYSA-N 0.000 claims description 4
- GAYUSSOCODCSNF-UHFFFAOYSA-N 1-(dodecyldisulfanyl)dodecane Chemical compound CCCCCCCCCCCCSSCCCCCCCCCCCC GAYUSSOCODCSNF-UHFFFAOYSA-N 0.000 claims description 4
- GUBWMRCVCQFLOJ-UHFFFAOYSA-N 1-(hexadecyldisulfanyl)hexadecane Chemical compound CCCCCCCCCCCCCCCCSSCCCCCCCCCCCCCCCC GUBWMRCVCQFLOJ-UHFFFAOYSA-N 0.000 claims description 4
- PMBXCGGQNSVESQ-UHFFFAOYSA-N 1-Hexanethiol Chemical compound CCCCCCS PMBXCGGQNSVESQ-UHFFFAOYSA-N 0.000 claims description 4
- ZRKMQKLGEQPLNS-UHFFFAOYSA-N 1-Pentanethiol Chemical compound CCCCCS ZRKMQKLGEQPLNS-UHFFFAOYSA-N 0.000 claims description 4
- QTWKINKGAHTPFJ-UHFFFAOYSA-N 2-(butan-2-yldisulfanyl)butane Chemical compound CCC(C)SSC(C)CC QTWKINKGAHTPFJ-UHFFFAOYSA-N 0.000 claims description 4
- XPFCXIKQEQOMMW-UHFFFAOYSA-N 2-[(3,4-dichlorophenyl)methyl]-1h-benzimidazole Chemical compound C1=C(Cl)C(Cl)=CC=C1CC1=NC2=CC=CC=C2N1 XPFCXIKQEQOMMW-UHFFFAOYSA-N 0.000 claims description 4
- ONJROLGQWMBXAP-UHFFFAOYSA-N 2-methyl-1-(2-methylpropyldisulfanyl)propane Chemical compound CC(C)CSSCC(C)C ONJROLGQWMBXAP-UHFFFAOYSA-N 0.000 claims description 4
- BDFAOUQQXJIZDG-UHFFFAOYSA-N 2-methylpropane-1-thiol Chemical compound CC(C)CS BDFAOUQQXJIZDG-UHFFFAOYSA-N 0.000 claims description 4
- CETBSQOFQKLHHZ-UHFFFAOYSA-N Diethyl disulfide Chemical compound CCSSCC CETBSQOFQKLHHZ-UHFFFAOYSA-N 0.000 claims description 4
- YSQZSPCQDXHJDJ-UHFFFAOYSA-N di-n-pentyl disulfide Natural products CCCCCSSCCCCC YSQZSPCQDXHJDJ-UHFFFAOYSA-N 0.000 claims description 4
- PFRGXCVKLLPLIP-UHFFFAOYSA-N diallyl disulfide Chemical compound C=CCSSCC=C PFRGXCVKLLPLIP-UHFFFAOYSA-N 0.000 claims description 4
- GVPWHKZIJBODOX-UHFFFAOYSA-N dibenzyl disulfide Chemical compound C=1C=CC=CC=1CSSCC1=CC=CC=C1 GVPWHKZIJBODOX-UHFFFAOYSA-N 0.000 claims description 4
- ALVPFGSHPUPROW-UHFFFAOYSA-N dipropyl disulfide Chemical compound CCCSSCCC ALVPFGSHPUPROW-UHFFFAOYSA-N 0.000 claims description 4
- DNJIEGIFACGWOD-UHFFFAOYSA-N ethanethiol Chemical compound CCS DNJIEGIFACGWOD-UHFFFAOYSA-N 0.000 claims description 4
- SUVIGLJNEAMWEG-UHFFFAOYSA-N propane-1-thiol Chemical compound CCCS SUVIGLJNEAMWEG-UHFFFAOYSA-N 0.000 claims description 4
- KJRCEJOSASVSRA-UHFFFAOYSA-N propane-2-thiol Chemical compound CC(C)S KJRCEJOSASVSRA-UHFFFAOYSA-N 0.000 claims description 4
- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 claims description 4
- BWGNESOTFCXPMA-UHFFFAOYSA-N Dihydrogen disulfide Chemical compound SS BWGNESOTFCXPMA-UHFFFAOYSA-N 0.000 claims description 3
- 125000004429 atom Chemical group 0.000 claims description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 3
- 239000001858 (2R)-2-methylbutane-1-thiol Substances 0.000 claims description 2
- SRZXCOWFGPICGA-UHFFFAOYSA-N 1,6-Hexanedithiol Chemical compound SCCCCCCS SRZXCOWFGPICGA-UHFFFAOYSA-N 0.000 claims description 2
- PGTWZHXOSWQKCY-UHFFFAOYSA-N 1,8-Octanedithiol Chemical compound SCCCCCCCCS PGTWZHXOSWQKCY-UHFFFAOYSA-N 0.000 claims description 2
- GJRCLMJHPWCJEI-UHFFFAOYSA-N 1,9-Nonanedithiol Chemical compound SCCCCCCCCCS GJRCLMJHPWCJEI-UHFFFAOYSA-N 0.000 claims description 2
- SEZZRXXPRCBINH-UHFFFAOYSA-N 1-(2,2-dimethylpropyldisulfanyl)-2,2-dimethylpropane Chemical compound CC(C)(C)CSSCC(C)(C)C SEZZRXXPRCBINH-UHFFFAOYSA-N 0.000 claims description 2
- CVNMNJBLUVHUOG-UHFFFAOYSA-N 1-(heptadecyldisulfanyl)heptadecane Chemical compound CCCCCCCCCCCCCCCCCSSCCCCCCCCCCCCCCCCC CVNMNJBLUVHUOG-UHFFFAOYSA-N 0.000 claims description 2
- GJPDBURPGLWRPW-UHFFFAOYSA-N 1-(hexyldisulfanyl)hexane Chemical compound CCCCCCSSCCCCCC GJPDBURPGLWRPW-UHFFFAOYSA-N 0.000 claims description 2
- MQQKTNDBASEZSD-UHFFFAOYSA-N 1-(octadecyldisulfanyl)octadecane Chemical compound CCCCCCCCCCCCCCCCCCSSCCCCCCCCCCCCCCCCCC MQQKTNDBASEZSD-UHFFFAOYSA-N 0.000 claims description 2
- AROCLDYPZXMJPW-UHFFFAOYSA-N 1-(octyldisulfanyl)octane Chemical compound CCCCCCCCSSCCCCCCCC AROCLDYPZXMJPW-UHFFFAOYSA-N 0.000 claims description 2
- ULLWKWAZWYSPDY-UHFFFAOYSA-N 1-(pentadecyldisulfanyl)pentadecane Chemical compound CCCCCCCCCCCCCCCSSCCCCCCCCCCCCCCC ULLWKWAZWYSPDY-UHFFFAOYSA-N 0.000 claims description 2
- PVHFXVCJLSWJAO-UHFFFAOYSA-N 1-(tetradecyldisulfanyl)tetradecane Chemical compound CCCCCCCCCCCCCCSSCCCCCCCCCCCCCC PVHFXVCJLSWJAO-UHFFFAOYSA-N 0.000 claims description 2
- QYVIBJKOSSAQLE-UHFFFAOYSA-N 1-(tridecyldisulfanyl)tridecane Chemical compound CCCCCCCCCCCCCSSCCCCCCCCCCCCC QYVIBJKOSSAQLE-UHFFFAOYSA-N 0.000 claims description 2
- BMMUJKMHJWGHJA-UHFFFAOYSA-N 1-(undecyldisulfanyl)undecane Chemical compound CCCCCCCCCCCSSCCCCCCCCCCC BMMUJKMHJWGHJA-UHFFFAOYSA-N 0.000 claims description 2
- FJLUATLTXUNBOT-UHFFFAOYSA-N 1-Hexadecylamine Chemical compound CCCCCCCCCCCCCCCCN FJLUATLTXUNBOT-UHFFFAOYSA-N 0.000 claims description 2
- JPZYXGPCHFZBHO-UHFFFAOYSA-N 1-aminopentadecane Chemical compound CCCCCCCCCCCCCCCN JPZYXGPCHFZBHO-UHFFFAOYSA-N 0.000 claims description 2
- BMVXCPBXGZKUPN-UHFFFAOYSA-N 1-hexanamine Chemical compound CCCCCCN BMVXCPBXGZKUPN-UHFFFAOYSA-N 0.000 claims description 2
- WASYNLWEPOHNBM-UHFFFAOYSA-N 2,2,2-trichloro-1-(1-methyl-4-nitropyrrol-2-yl)ethanone Chemical compound CN1C=C([N+]([O-])=O)C=C1C(=O)C(Cl)(Cl)Cl WASYNLWEPOHNBM-UHFFFAOYSA-N 0.000 claims description 2
- XDIAMRVROCPPBK-UHFFFAOYSA-N 2,2-dimethylpropan-1-amine Chemical compound CC(C)(C)CN XDIAMRVROCPPBK-UHFFFAOYSA-N 0.000 claims description 2
- LSUXMVNABVPWMF-UHFFFAOYSA-N 2,2-dimethylpropane-1-thiol Chemical compound CC(C)(C)CS LSUXMVNABVPWMF-UHFFFAOYSA-N 0.000 claims description 2
- YAJYJWXEWKRTPO-UHFFFAOYSA-N 2,3,3,4,4,5-hexamethylhexane-2-thiol Chemical compound CC(C)C(C)(C)C(C)(C)C(C)(C)S YAJYJWXEWKRTPO-UHFFFAOYSA-N 0.000 claims description 2
- AMNLXDDJGGTIPL-UHFFFAOYSA-N 2,4-dimethylbenzenethiol Chemical compound CC1=CC=C(S)C(C)=C1 AMNLXDDJGGTIPL-UHFFFAOYSA-N 0.000 claims description 2
- KOXRUUGKLDCECO-UHFFFAOYSA-N 2-(2-bromophenyl)-1h-benzimidazole Chemical compound BrC1=CC=CC=C1C1=NC2=CC=CC=C2N1 KOXRUUGKLDCECO-UHFFFAOYSA-N 0.000 claims description 2
- OILIYWFQRJOPAI-UHFFFAOYSA-N 2-(2-chlorophenyl)-1h-benzimidazole Chemical compound ClC1=CC=CC=C1C1=NC2=CC=CC=C2N1 OILIYWFQRJOPAI-UHFFFAOYSA-N 0.000 claims description 2
- SUPMWVVVBKKGEL-UHFFFAOYSA-N 2-(naphthalen-2-yldisulfanyl)naphthalene Chemical compound C1=CC=CC2=CC(SSC=3C=C4C=CC=CC4=CC=3)=CC=C21 SUPMWVVVBKKGEL-UHFFFAOYSA-N 0.000 claims description 2
- BKCNDTDWDGQHSD-UHFFFAOYSA-N 2-(tert-butyldisulfanyl)-2-methylpropane Chemical compound CC(C)(C)SSC(C)(C)C BKCNDTDWDGQHSD-UHFFFAOYSA-N 0.000 claims description 2
- UCJMHYXRQZYNNL-UHFFFAOYSA-N 2-Ethyl-1-hexanethiol Chemical compound CCCCC(CC)CS UCJMHYXRQZYNNL-UHFFFAOYSA-N 0.000 claims description 2
- ABROBCBIIWHVNS-UHFFFAOYSA-N 2-Ethylbenzenethiol Chemical compound CCC1=CC=CC=C1S ABROBCBIIWHVNS-UHFFFAOYSA-N 0.000 claims description 2
- ZFFTZDQKIXPDAF-UHFFFAOYSA-N 2-Furanmethanethiol Chemical compound SCC1=CC=CO1 ZFFTZDQKIXPDAF-UHFFFAOYSA-N 0.000 claims description 2
- WGQKBCSACFQGQY-UHFFFAOYSA-N 2-Methyl-1-butanethiol Chemical compound CCC(C)CS WGQKBCSACFQGQY-UHFFFAOYSA-N 0.000 claims description 2
- RFCQDOVPMUSZMN-UHFFFAOYSA-N 2-Naphthalenethiol Chemical compound C1=CC=CC2=CC(S)=CC=C21 RFCQDOVPMUSZMN-UHFFFAOYSA-N 0.000 claims description 2
- ULIKDJVNUXNQHS-UHFFFAOYSA-N 2-Propene-1-thiol Chemical compound SCC=C ULIKDJVNUXNQHS-UHFFFAOYSA-N 0.000 claims description 2
- RQOUFPLAXHLUAJ-UHFFFAOYSA-N 2-[(2-bromophenyl)methyl]-1h-benzimidazole Chemical compound BrC1=CC=CC=C1CC1=NC2=CC=CC=C2N1 RQOUFPLAXHLUAJ-UHFFFAOYSA-N 0.000 claims description 2
- XYDPQCXIGVLALP-UHFFFAOYSA-N 2-[(2-chlorophenyl)methyl]-1h-benzimidazole Chemical compound ClC1=CC=CC=C1CC1=NC2=CC=CC=C2N1 XYDPQCXIGVLALP-UHFFFAOYSA-N 0.000 claims description 2
- JPNXREVRYWWBDG-UHFFFAOYSA-N 2-propylbenzenethiol Chemical compound CCCC1=CC=CC=C1S JPNXREVRYWWBDG-UHFFFAOYSA-N 0.000 claims description 2
- BKMGLHQPYYCKPO-UHFFFAOYSA-N 2-tert-butylbenzenethiol Chemical compound CC(C)(C)C1=CC=CC=C1S BKMGLHQPYYCKPO-UHFFFAOYSA-N 0.000 claims description 2
- YOLFWWMPGNMXFI-UHFFFAOYSA-N 2-thiophen-2-yldisulfanylthiophene Chemical compound C=1C=CSC=1SSC1=CC=CS1 YOLFWWMPGNMXFI-UHFFFAOYSA-N 0.000 claims description 2
- GIIGHSIIKVOWKZ-UHFFFAOYSA-N 2h-triazolo[4,5-d]pyrimidine Chemical compound N1=CN=CC2=NNN=C21 GIIGHSIIKVOWKZ-UHFFFAOYSA-N 0.000 claims description 2
- OHKYIUYPQIFGKN-UHFFFAOYSA-N 3-(2,3-dimethoxyphenyl)-3-oxopropanenitrile Chemical compound COC1=CC=CC(C(=O)CC#N)=C1OC OHKYIUYPQIFGKN-UHFFFAOYSA-N 0.000 claims description 2
- WULNDUPZYLKLBH-UHFFFAOYSA-N 3-ethylbenzenethiol Chemical compound CCC1=CC=CC(S)=C1 WULNDUPZYLKLBH-UHFFFAOYSA-N 0.000 claims description 2
- OZBVAEZOKDPKIY-UHFFFAOYSA-N 3-propylbenzenethiol Chemical compound CCCC1=CC=CC(S)=C1 OZBVAEZOKDPKIY-UHFFFAOYSA-N 0.000 claims description 2
- JNOPHSRTJRRQGL-UHFFFAOYSA-N 4-(2-bromoethyl)-2-phenyl-1h-benzimidazole Chemical compound N=1C=2C(CCBr)=CC=CC=2NC=1C1=CC=CC=C1 JNOPHSRTJRRQGL-UHFFFAOYSA-N 0.000 claims description 2
- LKYIJNVZTLTJQN-UHFFFAOYSA-N 4-(2-chloroethyl)-2-phenyl-1h-benzimidazole Chemical compound N=1C=2C(CCCl)=CC=CC=2NC=1C1=CC=CC=C1 LKYIJNVZTLTJQN-UHFFFAOYSA-N 0.000 claims description 2
- GAMYYCRTACQSBR-UHFFFAOYSA-N 4-azabenzimidazole Chemical compound C1=CC=C2NC=NC2=N1 GAMYYCRTACQSBR-UHFFFAOYSA-N 0.000 claims description 2
- TWYYEGXSFYSRNP-UHFFFAOYSA-N 4-decylbenzenethiol Chemical compound CCCCCCCCCCC1=CC=C(S)C=C1 TWYYEGXSFYSRNP-UHFFFAOYSA-N 0.000 claims description 2
- GDKQNVYPGBJRLS-UHFFFAOYSA-N 4-hexylbenzenethiol Chemical compound CCCCCCC1=CC=C(S)C=C1 GDKQNVYPGBJRLS-UHFFFAOYSA-N 0.000 claims description 2
- FTZVZGXEBXVWMD-UHFFFAOYSA-N 4-octylbenzenethiol Chemical compound CCCCCCCCC1=CC=C(S)C=C1 FTZVZGXEBXVWMD-UHFFFAOYSA-N 0.000 claims description 2
- TVLGECZCQTWNOL-UHFFFAOYSA-N 4-propylbenzenethiol Chemical compound CCCC1=CC=C(S)C=C1 TVLGECZCQTWNOL-UHFFFAOYSA-N 0.000 claims description 2
- GNXBFFHXJDZGEK-UHFFFAOYSA-N 4-tert-butylbenzenethiol Chemical compound CC(C)(C)C1=CC=C(S)C=C1 GNXBFFHXJDZGEK-UHFFFAOYSA-N 0.000 claims description 2
- MHZGKXUYDGKKIU-UHFFFAOYSA-N Decylamine Chemical compound CCCCCCCCCCN MHZGKXUYDGKKIU-UHFFFAOYSA-N 0.000 claims description 2
- CUDSBWGCGSUXDB-UHFFFAOYSA-N Dibutyl disulfide Chemical compound CCCCSSCCCC CUDSBWGCGSUXDB-UHFFFAOYSA-N 0.000 claims description 2
- LZAZXBXPKRULLB-UHFFFAOYSA-N Diisopropyl disulfide Chemical compound CC(C)SSC(C)C LZAZXBXPKRULLB-UHFFFAOYSA-N 0.000 claims description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 claims description 2
- VPIAKHNXCOTPAY-UHFFFAOYSA-N Heptane-1-thiol Chemical compound CCCCCCCS VPIAKHNXCOTPAY-UHFFFAOYSA-N 0.000 claims description 2
- WJYIASZWHGOTOU-UHFFFAOYSA-N Heptylamine Chemical compound CCCCCCCN WJYIASZWHGOTOU-UHFFFAOYSA-N 0.000 claims description 2
- REYJJPSVUYRZGE-UHFFFAOYSA-N Octadecylamine Chemical compound CCCCCCCCCCCCCCCCCCN REYJJPSVUYRZGE-UHFFFAOYSA-N 0.000 claims description 2
- PLZVEHJLHYMBBY-UHFFFAOYSA-N Tetradecylamine Chemical compound CCCCCCCCCCCCCCN PLZVEHJLHYMBBY-UHFFFAOYSA-N 0.000 claims description 2
- ADJJLNODXLXTIH-UHFFFAOYSA-N adamantane-1-thiol Chemical compound C1C(C2)CC3CC2CC1(S)C3 ADJJLNODXLXTIH-UHFFFAOYSA-N 0.000 claims description 2
- LCCDBCVCOKZPJS-UHFFFAOYSA-N benzenethiol;2-methylbenzenethiol Chemical compound SC1=CC=CC=C1.CC1=CC=CC=C1S LCCDBCVCOKZPJS-UHFFFAOYSA-N 0.000 claims description 2
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 claims description 2
- 239000012964 benzotriazole Substances 0.000 claims description 2
- UENWRTRMUIOCKN-UHFFFAOYSA-N benzyl thiol Chemical compound SCC1=CC=CC=C1 UENWRTRMUIOCKN-UHFFFAOYSA-N 0.000 claims description 2
- VRPKUXAKHIINGG-UHFFFAOYSA-N biphenyl-4,4'-dithiol Chemical group C1=CC(S)=CC=C1C1=CC=C(S)C=C1 VRPKUXAKHIINGG-UHFFFAOYSA-N 0.000 claims description 2
- HQABUPZFAYXKJW-UHFFFAOYSA-N butan-1-amine Chemical compound CCCCN HQABUPZFAYXKJW-UHFFFAOYSA-N 0.000 claims description 2
- LOCHFZBWPCLPAN-UHFFFAOYSA-N butane-2-thiol Chemical compound CCC(C)S LOCHFZBWPCLPAN-UHFFFAOYSA-N 0.000 claims description 2
- WQAQPCDUOCURKW-UHFFFAOYSA-N butanethiol Chemical compound CCCCS WQAQPCDUOCURKW-UHFFFAOYSA-N 0.000 claims description 2
- VTXVGVNLYGSIAR-UHFFFAOYSA-N decane-1-thiol Chemical compound CCCCCCCCCCS VTXVGVNLYGSIAR-UHFFFAOYSA-N 0.000 claims description 2
- IFGAFLQUAVLERP-UHFFFAOYSA-N di-n-heptyl disulfide Natural products CCCCCCCSSCCCCCCC IFGAFLQUAVLERP-UHFFFAOYSA-N 0.000 claims description 2
- WNAHIZMDSQCWRP-UHFFFAOYSA-N dodecane-1-thiol Chemical compound CCCCCCCCCCCCS WNAHIZMDSQCWRP-UHFFFAOYSA-N 0.000 claims description 2
- JRBPAEWTRLWTQC-UHFFFAOYSA-N dodecylamine Chemical compound CCCCCCCCCCCCN JRBPAEWTRLWTQC-UHFFFAOYSA-N 0.000 claims description 2
- KAJZYANLDWUIES-UHFFFAOYSA-N heptadecan-1-amine Chemical compound CCCCCCCCCCCCCCCCCN KAJZYANLDWUIES-UHFFFAOYSA-N 0.000 claims description 2
- FXOGYMXDUYOYKR-UHFFFAOYSA-N heptadecane-1-thiol Chemical compound CCCCCCCCCCCCCCCCCS FXOGYMXDUYOYKR-UHFFFAOYSA-N 0.000 claims description 2
- ORTRWBYBJVGVQC-UHFFFAOYSA-N hexadecane-1-thiol Chemical compound CCCCCCCCCCCCCCCCS ORTRWBYBJVGVQC-UHFFFAOYSA-N 0.000 claims description 2
- YYHYWOPDNMFEAV-UHFFFAOYSA-N icosane-1-thiol Chemical compound CCCCCCCCCCCCCCCCCCCCS YYHYWOPDNMFEAV-UHFFFAOYSA-N 0.000 claims description 2
- JJWLVOIRVHMVIS-UHFFFAOYSA-N isopropylamine Chemical compound CC(C)N JJWLVOIRVHMVIS-UHFFFAOYSA-N 0.000 claims description 2
- SEXOVMIIVBKGGM-UHFFFAOYSA-N naphthalene-1-thiol Chemical compound C1=CC=C2C(S)=CC=CC2=C1 SEXOVMIIVBKGGM-UHFFFAOYSA-N 0.000 claims description 2
- YNESSCJHABBEIO-UHFFFAOYSA-N nonadecane-1-thiol Chemical compound CCCCCCCCCCCCCCCCCCCS YNESSCJHABBEIO-UHFFFAOYSA-N 0.000 claims description 2
- FJDUDHYHRVPMJZ-UHFFFAOYSA-N nonan-1-amine Chemical compound CCCCCCCCCN FJDUDHYHRVPMJZ-UHFFFAOYSA-N 0.000 claims description 2
- ZVEZMVFBMOOHAT-UHFFFAOYSA-N nonane-1-thiol Chemical compound CCCCCCCCCS ZVEZMVFBMOOHAT-UHFFFAOYSA-N 0.000 claims description 2
- IOQPZZOEVPZRBK-UHFFFAOYSA-N octan-1-amine Chemical compound CCCCCCCCN IOQPZZOEVPZRBK-UHFFFAOYSA-N 0.000 claims description 2
- HBXNJMZWGSCKPW-UHFFFAOYSA-N octan-2-amine Chemical compound CCCCCCC(C)N HBXNJMZWGSCKPW-UHFFFAOYSA-N 0.000 claims description 2
- KZCOBXFFBQJQHH-UHFFFAOYSA-N octane-1-thiol Chemical compound CCCCCCCCS KZCOBXFFBQJQHH-UHFFFAOYSA-N 0.000 claims description 2
- IGMQODZGDORXEN-UHFFFAOYSA-N pentadecane-1-thiol Chemical compound CCCCCCCCCCCCCCCS IGMQODZGDORXEN-UHFFFAOYSA-N 0.000 claims description 2
- DPBLXKKOBLCELK-UHFFFAOYSA-N pentan-1-amine Chemical compound CCCCCN DPBLXKKOBLCELK-UHFFFAOYSA-N 0.000 claims description 2
- IGEIPFLJVCPEKU-UHFFFAOYSA-N pentan-2-amine Chemical compound CCCC(C)N IGEIPFLJVCPEKU-UHFFFAOYSA-N 0.000 claims description 2
- PQPFFKCJENSZKL-UHFFFAOYSA-N pentan-3-amine Chemical compound CCC(N)CC PQPFFKCJENSZKL-UHFFFAOYSA-N 0.000 claims description 2
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- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
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- 229920002113 octoxynol Polymers 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 238000010979 pH adjustment Methods 0.000 description 1
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
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- UEZVMMHDMIWARA-UHFFFAOYSA-M phosphonate Chemical compound [O-]P(=O)=O UEZVMMHDMIWARA-UHFFFAOYSA-M 0.000 description 1
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- ONQDVAFWWYYXHM-UHFFFAOYSA-M potassium lauryl sulfate Chemical compound [K+].CCCCCCCCCCCCOS([O-])(=O)=O ONQDVAFWWYYXHM-UHFFFAOYSA-M 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229940079776 sodium cocoyl isethionate Drugs 0.000 description 1
- 235000019333 sodium laurylsulphate Nutrition 0.000 description 1
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- 239000004328 sodium tetraborate Substances 0.000 description 1
- 229940048842 sodium xylenesulfonate Drugs 0.000 description 1
- ZZMDMGNQUXYKQX-UHFFFAOYSA-L sodium;1-nonyl-2-(2-nonylphenoxy)benzene;sulfate Chemical compound [Na+].[O-]S([O-])(=O)=O.CCCCCCCCCC1=CC=CC=C1OC1=CC=CC=C1CCCCCCCCC ZZMDMGNQUXYKQX-UHFFFAOYSA-L 0.000 description 1
- OHESZEZYDPDAIH-UHFFFAOYSA-M sodium;2-(4-nonylphenoxy)ethyl sulfate Chemical compound [Na+].CCCCCCCCCC1=CC=C(OCCOS([O-])(=O)=O)C=C1 OHESZEZYDPDAIH-UHFFFAOYSA-M 0.000 description 1
- DGSDBJMBHCQYGN-UHFFFAOYSA-M sodium;2-ethylhexyl sulfate Chemical compound [Na+].CCCCC(CC)COS([O-])(=O)=O DGSDBJMBHCQYGN-UHFFFAOYSA-M 0.000 description 1
- QUCDWLYKDRVKMI-UHFFFAOYSA-M sodium;3,4-dimethylbenzenesulfonate Chemical compound [Na+].CC1=CC=C(S([O-])(=O)=O)C=C1C QUCDWLYKDRVKMI-UHFFFAOYSA-M 0.000 description 1
- KVCGISUBCHHTDD-UHFFFAOYSA-M sodium;4-methylbenzenesulfonate Chemical compound [Na+].CC1=CC=C(S([O-])(=O)=O)C=C1 KVCGISUBCHHTDD-UHFFFAOYSA-M 0.000 description 1
- WFRKJMRGXGWHBM-UHFFFAOYSA-M sodium;octyl sulfate Chemical compound [Na+].CCCCCCCCOS([O-])(=O)=O WFRKJMRGXGWHBM-UHFFFAOYSA-M 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 125000005415 substituted alkoxy group Chemical group 0.000 description 1
- 125000003107 substituted aryl group Chemical group 0.000 description 1
- PGWMQVQLSMAHHO-UHFFFAOYSA-N sulfanylidenesilver Chemical class [Ag]=S PGWMQVQLSMAHHO-UHFFFAOYSA-N 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium Chemical group [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 description 1
- 150000003464 sulfur compounds Chemical class 0.000 description 1
- UZZYXUGECOQHPU-UHFFFAOYSA-N sulfuric acid monooctyl ester Natural products CCCCCCCCOS(O)(=O)=O UZZYXUGECOQHPU-UHFFFAOYSA-N 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- BSYVTEYKTMYBMK-UHFFFAOYSA-N tetrahydrofurfuryl alcohol Chemical compound OCC1CCCO1 BSYVTEYKTMYBMK-UHFFFAOYSA-N 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- YFNKIDBQEZZDLK-UHFFFAOYSA-N triglyme Chemical compound COCCOCCOCCOC YFNKIDBQEZZDLK-UHFFFAOYSA-N 0.000 description 1
- 150000004072 triols Chemical class 0.000 description 1
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- 239000004711 α-olefin Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/282—Applying non-metallic protective coatings for inhibiting the corrosion of the circuit, e.g. for preserving the solderability
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
- C09D5/08—Anti-corrosive paints
- C09D5/082—Anti-corrosive paints characterised by the anti-corrosive pigment
- C09D5/086—Organic or non-macromolecular compounds
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
- C09D7/40—Additives
- C09D7/45—Anti-settling agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
- C09D7/40—Additives
- C09D7/60—Additives non-macromolecular
- C09D7/63—Additives non-macromolecular organic
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/54—Contact plating, i.e. electroless electrochemical plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F11/00—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent
- C23F11/08—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids
- C23F11/10—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids using organic inhibitors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F11/00—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent
- C23F11/08—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids
- C23F11/10—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids using organic inhibitors
- C23F11/14—Nitrogen-containing compounds
- C23F11/149—Heterocyclic compounds containing nitrogen as hetero atom
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F11/00—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent
- C23F11/08—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids
- C23F11/10—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids using organic inhibitors
- C23F11/16—Sulfur-containing compounds
- C23F11/161—Mercaptans
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/17—Amines; Quaternary ammonium compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/36—Sulfur-, selenium-, or tellurium-containing compounds
- C08K5/37—Thiols
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/12—Using specific substances
- H05K2203/122—Organic non-polymeric compounds, e.g. oil, wax or thiol
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/12—Using specific substances
- H05K2203/122—Organic non-polymeric compounds, e.g. oil, wax or thiol
- H05K2203/124—Heterocyclic organic compounds, e.g. azole, furan
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/244—Finish plating of conductors, especially of copper conductors, e.g. for pads or lands
Definitions
- This invention relates to methods and compositions for enhancing the corrosion protection, solderability, and wear resistance of copper substrates used in the manufacture of electronic and microelectronic devices.
- Metallic surface coatings are commonly applied to electronic devices and decorative objects to provide corrosion protection and other desired functional properties.
- Electronic devices comprising copper or copper alloy substrates are typically coated with metallic surface coatings which provide corrosion protection, high surface contact conductivity, and wear resistance.
- the metallic surface coatings typically comprise precious metals, in particular silver and gold, which provide superior corrosion protection.
- a thin layer of silver may be deposited over copper circuitry as a solderability preserver.
- the silver is generally deposited by an immersion displacement plating, in which silver ions present in the plating composition come into contact with and are reduced by surface copper atoms, according to the following reaction:
- the reduction-oxidation reaction reduces silver ions to silver metal and forms an adhesive silver layer over the copper substrate.
- the process is self-limiting in that once the copper surface is covered with a layer of silver, copper atoms are no longer accessible to reduce additional silver ions.
- Typical thicknesses of silver immersion displacement films over copper can be between about 0.05 and about 0.8 microns. See, for example, U.S. 5,955,141; 6,319,543; 6,395,329; and 6,860,925, the disclosures of which are hereby incorporated by reference as if set forth in their entireties.
- an electrolessly deposited nickel underlayer increases the hardness of an immersion plated gold overlayer.
- This metallic surface is commonly referred to as “nickel-hardened gold” or simply, “hard gold.”
- Variations on these coatings involve base metal alloy underlayers, precious metal alloy overlayers, and metallic surface coatings comprising two or more base metal underlayers and/or two or more precious metal overlayers.
- a cost effective connector uses a precious metal coating layer which is as thin as possible, without sacrificing the desired functional properties. Accordingly, the industry typically employs precious metal layer on the order of about 1.0 ⁇ m thick on electronic connectors. Thinner layers suffer from the disadvantage of highly increased porosity in the coating. Over time in service, the thin layers having a high degree of porosity are ineffective against base metal and copper diffusion to the surface. In a corrosive environment, the exposed base metal and copper will corrode and the corrosion product(s) can migrate onto the coating surface and deteriorate the surface contact conductivity. Moreover, a thin precious metal layer can wear off during application and shorten the connector's useful lifetime.
- a particular problem observed with immersion-plated precious metal coatings is creep corrosion of copper salts at certain bare copper interfaces between copper and precious metal.
- immersion silver displacement plating processes may not sufficiently coat copper wiring in PCB, particularly at plated through holes and high aspect ratio blind vias. Corrosion at these locations manifests itself as an annular ring surrounding the vias and plated through holes.
- silver is susceptible to sulfidation by reduced sulfur compounds (e.g., hydrogen sulfide) present in the environment, particularly at paper processing plants, rubber processing plants, and high pollution environments.
- reduced sulfur compounds e.g., hydrogen sulfide
- Sufficient sulfidation of silver can result in localized pores, which may expose copper to the environment.
- Humidity and environmental pollutants can oxidize and sulfidize the copper, forming copper salts that may creep through pores in the silver layer.
- the present invention is directed to a method for enhancing the corrosion resistance of a surface of a copper or copper alloy substrate.
- the method comprises depositing a metallic surface layer comprising a precious metal on the surface of the copper or copper alloy substrate; and exposing the copper or copper alloy substrate having a metallic surface layer thereon to an aqueous composition comprising (a) a first organic molecule comprising at least one functional group that interacts with and protects precious metal surfaces, (b) a second organic molecule comprising at least one functional group that interacts with and protects copper surfaces, and (c) a surfactant.
- the invention is also directed to a composition for enhancing the corrosion resistance of a surface of a copper or copper alloy substrate comprising a silver and/or gold coating on the surface of the copper or copper alloy substrate, the composition comprising (a) a first organic molecule in a concentration between about 1 and about 10 g/L selected from the group consisting of thiols (mercaptans), disulfides, thioethers, thioaldehydes, thioketones, and combinations thereof that interacts with and protects precious metal surfaces, (b) a second organic molecule in a concentration between about 1 and about 10 g/L selected from the group consisting of primary amines, secondary amines, tertiary amines, aromatic heterocycles comprising nitrogen, and combinations thereof that interacts with and protects copper surfaces, and (c) a surfactant.
- a first organic molecule in a concentration between about 1 and about 10 g/L selected from the group consisting of thiols (mercaptans),
- FIG. 1 is an illustration depicting two molecules adhering to and forming a protective organic film on the surfaces of a copper substrate having an immersion-plated silver layer thereon.
- FIGS. 2A through 2D are photographs of an immersion silver-plated copper coupon coated with immersion-plated silver according to the method of Example 1.
- the silver- plated copper coupon was subjected to porosity testing according to the method of Example 2.
- FIGS. 3A and 3B are photographs of immersion silver-plated copper coupons subjected to porosity testing according to the method of Example 4.
- FIGS. 4A through 4F are photographs of immersion silver-plated copper coupons subjected to porosity testing according to the method of Example 8.
- FIGS. 5A through 5E are photographs of immersion silver-plated copper coupons subjected to porosity testing according to the method of Example 9. DETAILED DESCRIPTION OF EMBODIMENT(S) OF THE INVENTION
- the present invention is directed to a method and composition for applying a protective organic film to a copper substrate having a metallic coating on a surface thereof.
- the metallic coating comprises a precious metal.
- the method and composition apply a protective organic film to a metallic coating comprising silver.
- the metallic coating comprising silver is applied by an immersion displacement plating process.
- the method and composition apply a protective organic film to a metallic coating comprising gold.
- the metallic coating comprising gold is applied by an immersion displacement plating process.
- the protective organic film is particularly suited for use in preserving the solderability of copper or copper alloy substrates having a layer of precious metal thereon.
- Copper substrates suitable for protection with the organic protective film of the invention include copper circuitry in printed circuit boards, chip carriers, semiconductor substrates, metal lead frames, and other solderable copper substrates. These substrates may be coated with precious metal, in particular with metallic coatings comprising silver, gold, or a combination thereof.
- Silver immersion displacement plating is a particularly preferred method of preserving the solderability of copper conductive features and copper plated through holes in printed circuit board (PCB) manufacture.
- PCB printed circuit board
- Silver immersion plating is a self-limiting process which yields silver layers having typical thicknesses between about 0.05 microns and about 0.8 microns, typically between about 0.15 microns and about 0.40 microns.
- Certain immersion processes and compositions can plate silver layers having thicknesses outside the broad range.
- immersion-plated silver may not adequately protect copper surfaces, such as at certain bare copper interfaces between copper and silver, particularly at plated through holes and high aspect ratio blind vias in PCB substrates.
- the present invention is directed to a method of applying a protective organic film to provide a layer of corrosion protection over copper surfaces, in addition to the immersion-plated silver coating.
- the method of applying the protective organic film involves exposing the copper substrate having an immersion-plated silver coating on a surface thereof to a composition for enhancing the corrosion resistance of the immersion-plated silver coating and for maintaining the solderability of the copper conductive lines and copper plated through holes.
- the present invention is therefore further directed to such a composition.
- the composition of the present invention comprises an organic molecule comprising at least one functional group that interacts with and protects precious metal surfaces.
- the organic molecule comprises at least one functional group that interacts with and protects silver surfaces, gold surfaces, or a surface comprising both silver and gold.
- Such an organic molecule is effective for filling pores in the precious metal layer, thereby inhibiting copper creep corrosion, and is effective for covering the surface of the precious metal with a self-assembled protective organic film.
- the present invention is further directed to a composition that comprises an organic molecule comprising at least one organic functional group that interacts with and protects copper surfaces.
- an organic molecule is capable of reacting with copper surfaces, thereby forming a self-assembled protective organic film capable of inhibiting exposure to water, environmental humidity, and other pollutants that may corrode copper surfaces.
- the present invention is yet further directed to a composition that comprises an organic molecule comprising at least one functional group that interacts with and protects precious metal surfaces and an organic molecule comprising at least one organic functional group that interacts with and protects copper surfaces.
- the organic molecule comprising at least one functional group that interacts with and protects precious metal surfaces comprises a sulfur atom.
- Functional groups that comprise a sulfur atom include thiols (mercaptans), disulfides, thioethers, thioaldehydes, and thioketones.
- the composition may comprise a combination of thiols (mercaptans), disulfides, thioethers, thioaldehydes, and thioketones.
- the lone electron pair in the sulfur atom forms a sulfur- precious metal bond, thereby self-assembling a protective organic film over the precious metal coating layer, wherein the film comprises a self-assembled monolayer comprising an organic molecule comprising the sulfur atom bonded to the precious metal surface.
- the copper substrate is coated with a silver coating layer deposited by, for example, immersion displacement plating, and the sulfur atom present in the organic molecule forms a sulfur-silver bond.
- the copper substrate is coated with a gold coating layer deposited by, for example, immersion displacement plating, and the sulfur atom present in the organic molecule forms a sulfur-gold bond.
- the sulfur containing compound typically comprises an organic component that enhances the effectiveness of the organic protective film by rendering the film more hydrophobic and thus more capable of repelling water and environmental humidity.
- the organic molecule comprising at least one functional group that interacts with and protects precious metal surfaces is a thiol.
- Thiols have the following general structure (I):
- Ri is a hydrocarbyl having from one carbon atom to about 24 carbon atoms, an aryl having from about five to about fourteen carbon atoms, or an arylhydrocarbyl wherein the hydrocarbyl has from one carbon atom to about 24 carbon atoms and the aryl has from about five to about fourteen carbon atoms.
- the hydrocarbyl preferably comprises between about six carbon atoms and about 18 carbon atoms.
- the aryl preferably comprises between about four and about ten carbon atoms.
- the aryl may comprise one five-membered ring or six-membered ring or a fused two-ring system in which the two-rings include a five-membered ring and a six- membered ring or two six-membered rings.
- the aryl and hydrocarbyl may be substituted or unsubstituted.
- Typical substituents include short carbon chain branching alkyl groups, typically having from one to four carbon atoms, i.e., methyl, ethyl, propyl, and butyl substituents and aromatic groups such as phenyl, naphthenyl, and aromatic heterocycles comprising nitrogen, oxygen, and sulfur.
- substituents include amines, thiols, carboxylates, phosphates, phosphonates, sulfates, sulfonates, halogen, hydroxyl, alkoxy, aryloxy, protected hydroxy, keto, acyl, acyloxy, nitro, cyano, esters, and ethers.
- the Ri is hydrocarbyl, is not substituted with other groups, and is a straight-chained alkyl, since straight- chained alkyl better achieves a desirable densely packed self-assembled monolayer over the precious metal surface coating.
- alkyl thiols applicable for use in the composition of the present invention include, singly or in combination, ethanethiol; 1-propanethiol; 2- propanethiol; 2-propene-l -thiol; 1 -butanethiol; 2-butanethiol; 2-methyl- 1 -propanethiol; 2- methyl-2-propanethiol; 2-methyl- 1 -butanethiol; 1 -pentanethiol; 2,2-dimethyl- 1-propanethiol; 1- hexanethiol; 1,6-hexanedithiol; 1-heptanethiol; 2-ethylhexanethiol; 1-octanethiol; 1,8- octanedithiol; 1 -nonanethiol; 1,9-nonanedithiol; 1-decanethiol; 1 -adamantanethiol; 1,
- the Ri comprises an aromatic ring.
- Aryl thiols also achieve highly hydrophobic, densely packed self-assembled monolayers over the precious metal surface coating.
- Exemplary aryl thiols applicable for use in the composition of the present invention include, singly or in combination, benzenethiol; 2-methylbenzenethiol; 3- methylbenzenethiol; 4-methylbenzenethiol; 2-ethylbenzenethiol; 3-ethylbenzenethiol; A- ethylbenzenethiol; 2-propylbenzenethiol; 3-propylbenzenethiol; 4-propylbenzenethiol; 2-tert- butylbenzenethiol; 4-tert-butylbenzenethiol; 4-pentylbenzenethiol; 4-hexylbenzenethiol; A- heptylbenzenethiol; 4-octy
- the organic molecule comprising at least one functional group that interacts with and protects precious metal surfaces is a disulfide.
- Disulfides can be formed by the oxidation of two thiols and can have the following structure (II):
- Ri and R 2 are each independently a hydrocarbyl having between one carbon atom and about 24 carbon atoms, an aryl having between about five and about fourteen carbon atoms, or an arylhydrocarbyl wherein the hydrocarbyl has from one carbon atom to about 24 carbon atoms and the aryl has from about five to about fourteen carbon atoms.
- the hydrocarbyl preferably comprises between about six carbon atoms and about 18 carbon atoms.
- the aryl preferably comprises between about four and about ten carbon atoms.
- the aryl may comprise one five- membered ring or six-membered ring or a fused two-ring system in which the two-rings include a five-membered ring and a six-membered ring or two six-membered rings.
- the aryl and hydrocarbyl may be substituted or unsubstituted.
- the aryl and hydrocarbyl may be substituted or unsubstituted.
- Typical substituents include short carbon chain branching alkyl groups, typically having from one to four carbon atoms, i.e., methyl, ethyl, propyl, and butyl substituents and aromatic groups such as phenyl, naphthenyl, and aromatic heterocycles comprising nitrogen, oxygen, and sulfur.
- Other substituents include amines, thiols, carboxylates, phosphates, phosphonates, sulfates, sulfonates, halogen, hydroxyl, alkoxy, aryloxy, protected hydroxy, keto, acyl, acyloxy, nitro, cyano, esters, and ethers.
- the Ri and R 2 hydrocarbyls are not substituted with other groups and are straight-chained alkyls, since straight- chained alkyls better achieve a desirable densely packed self-assembled monolayer over the precious metal surface coating.
- Exemplary disulfides applicable for use in the composition of the present invention include, singly or in combination, diethyl disulfide, di-n-propyl disulfide, diisopropyl disulfide, diallyl disulfide, di-n-butyl disulfide, di-sec -butyl disulfide, diisobutyl disulfide, di-tert-butyl disulfide, di-n-pentyl disulfide, di-neopentyl disulfide, di-n-hexyl disulfide, di-n-heptyl disulfide, di-n-octyl disulfide, di-n-nonyl disulfide, di-n-decyl disulfide, di-n-dodecyl disulfide, di-n-tridecyl disulfide, di-n-tetradecyl disulfide, di-n-p
- Ri and R 2 comprises an aromatic ring. It is thought that the sulfur-sulfur bond may be broken more easily for aromatic disulfides, such that the sulfur atom is more easily made available for bonding to silver or gold.
- Aryl thiols also achieve highly hydrophobic, densely packed self-assembled monolayers over the precious metal surface coating. Exemplary aryl thiols applicable for use in the composition of the present invention include, singly or in combination, dibenzyl disulfide, dithienyl disulfide, and 2- naphthyl disulfide.
- the organic molecule comprising at least one functional group that interacts with and protects precious metal surfaces may be added to the surface treating compositions of the present invention at a concentration between about 0.01% by weight (about 0.1 g/L) and about 10% by weight (about 100 g/L), preferably between about 0.1% by weight (about 1.0 g/L) and about 1.0% by weight (about 10 g/L).
- the sulfur containing compound is added to the composition in at least 0.1 g/L to achieve adequate coverage and protection of the surface coating.
- the maximum concentration of about 100 g/L is an estimate based on the compound's solubility and therefore may be higher or lower than the stated amount depending upon the identity of the sulfur containing compound.
- the organic molecule comprising at least one functional group that interacts with and protects precious metal surfaces is 1 -octadecanethiol added in a concentration between about 0.5 g/L and about 10.0 g/L, for example, about 5.0 g/L.
- the organic molecule comprising at least one functional group that interacts with and protects copper surfaces comprises a nitrogen atom.
- the organic functional group is an amine.
- An amine is a functional group comprising nitrogen, typically bonded to or part of an organic functional group, such as a hydrocarbyl, an aryl, or an aromatic heterocycle. Applicable amines therefore include primary amines, secondary amines, tertiary amines, and aromatic heterocycles comprising nitrogen.
- the composition may comprise a combination of amines.
- the lone electron pair in the amine functional group forms a nitrogen-copper bond, thereby forming a protective organic film over the copper conducting layer, wherein the film comprises the nitrogen atom of the amine bonded to the copper surface and the organic substituent.
- the amine is a primary amine, secondary amine, or a tertiary amine having the following general structure (III): R 2
- R 1 , R 2 , and R 3 are each independently hydrogen or a hydrocarbyl having between one carbon atom and about 24 carbon atoms, and at least one of Ri, R 2 , and R3 is a hydrocarbyl having between one carbon atom and about 24 carbon atoms.
- the hydrocarbyl preferably comprises between about six carbon atoms and about 18 carbon atoms.
- the hydrocarbyl may be substituted or unsubstituted.
- Typical substituents include short carbon chain branching alkyl groups, typically having from one to four carbon atoms, i.e., methyl, ethyl, propyl, and butyl substituents and aromatic groups such as phenyl, napthenyl, and aromatic heterocycles comprising nitrogen, oxygen, and sulfur.
- Other substituents include amines, thiols, carboxylates, phosphates, phosphonates, sulfates, sulfonates, halogen, hydroxyl, alkoxy, aryloxy, protected hydroxy, keto, acyl, acyloxy, nitro, cyano, esters, and ethers.
- Exemplary primary amines applicable for use in the composition of the present invention include aminoethane, 1 -aminopropane, 2-aminopropane, 1-aminobutane, 2-aminobutane, l-amino-2- methylpropane, 2-amino-2-methylpropane, 1 -aminopentane, 2-aminopentane, 3-aminopentane, neo-pentylamine, 1-aminohexane, 1 -aminoheptane, 2-aminoheptane, 1 -aminooctane, 2- aminooctane, 1 -aminononane, 1-aminodecane, 1 -aminododecane, 1 -aminotridecane, 1- aminotetradecane, 1 -aminopentadecane, 1 -aminohexadecane, 1-aminoheptade
- the organic functional group that interacts with and protects copper surfaces is an aromatic heterocycle comprising nitrogen. It is thought that aromatic heterocycles comprising nitrogen additionally protect copper surfaces by interacting with copper(I) ions on the surface of the copper conducting layer. Interaction with copper(I) ions forms a film comprising insoluble copper(I)-based organometallics that precipitate on the surface of the copper conducting layer. This precipitate is also thought to be another mechanism whereby amines, particularly heterocyclic, aromatic amines, form a protective organic film on the surface of the copper conducting layer.
- Aromatic heterocycles comprising nitrogen suitable for the use in the composition of the present invention comprise nitrogen in a 5-membered ring (azoles).
- the 5- membered can be fused to another 5-membered or 6-membered aromatic ring, which can also be a heterocyclic ring comprising a nitrogen atom.
- the aromatic heterocycle can comprise one or more nitrogen atoms, and typically, the aromatic heterocycle comprises between one and four nitrogen atoms.
- Azoles can have the following general structure (IV):
- each of Ri, R 2 , R3, R 4 , and R5 is an atom selected from the group consisting of carbon and nitrogen wherein between one and four of the Ri, R 2 , R3, R 4 , and R5 groups are nitrogen and between one and four of the Ri, R2, R3, R 4 , and R5 groups are carbon; and Rn, R22, R33, R 44 , and R 55 are each independently selected from the group consisting of hydrogen, carbon, sulfur, oxygen, and nitrogen.
- Rn, R 22 , R33, R 44 , and R55 of structure (I) may be carbon wherein the carbon is part of an aliphatic group having between one carbon atom and 24 carbon atoms or part of an aryl group having between two carbon atoms and fourteen carbon atoms.
- the aliphatic group and the aryl group may be substituted or unsubstituted.
- the aliphatic group may be branched-chained or straight-chained.
- a substituted aliphatic group or substituted aryl group is substituted with at least one atom other than carbon, including moieties in which a carbon chain atom is substituted with a hetero atom such as nitrogen, oxygen, silicon, phosphorous, boron, sulfur, or a halogen atom.
- the aliphatic group or aryl may be substituted with one or more of the following substituents: halogen, heterocyclo, alkoxy, alkenoxy, alkynoxy, aryloxy, hydroxy, protected hydroxy, hydroxycarbonyl, keto, acyl, acyloxy, nitro, amino, amido, nitro, phosphono, cyano, thiol, ketals, acetals, esters, and ethers.
- any pair of consecutive Rn, R22, R33, R 44 , and R55 can together with the carbon or nitrogen atoms to which they are bonded form a substituted or unsubstituted cycloalkyl or substituted or unsubstituted aryl group with the corresponding pair of consecutive Ri, R2, R3, R 4 , and R5 (e.g., Rn and R22 form a ring with Ri and R 2 ) such that the ring defined by the Ri, R 2 , R3, R 4 , and R5 groups is fused to another ring.
- This ring may comprise one or two nitrogen atoms.
- the consecutive Rn, R 22 , R33, R 44 , and R55 and the corresponding consecutive Ri, R 2 , R3, R 4 , and R5 form a six-membered aromatic ring.
- the azole of structure (IV) is not substituted.
- Exemplary unsubstituted azoles applicable for use in the composition of the present invention are shown in Table I.
- Preferred unsubstituted azoles include imidazole, triazole, pyrazole, benzimidazole, purine, imidazo[4,5-b]pyridine, and benzotriazole. Among these, benzimidazole is particularly preferred.
- the azole of structure (IV) is a substituted azole.
- the azole compound is a substituted imidazole, which has the following general structure (V):
- R22, R44, and R55 are as defined in connection with structure (IV).
- the azole compound is a 2-substituted imidazole, which has the following general structure (VI):
- the azole compound is a 2,4-substituted imidazole, which has the following general structure (VII):
- the azole compound is a benzimidazole derivative, which has the following general structure (VIII): wherein
- R 22 is as defined in connection with structure (IV).
- R-66, R77, R ⁇ 8, and R99 are independently selected from among hydrogen, halide, nitro, and substituted or unsubstituted hydrocarbyl, substituted or unsubstituted alkoxy, substituted or unsubstituted amino, and cyano.
- the halide may be selected from among chloride, bromide, and iodide.
- the halide is chloride.
- the substituted or unsubstituted hydrocarbyl may be selected from among substituted or unsubstituted alkyl, substituted or unsubstituted alkenyl, substituted or unsubstituted alkynyl, and substituted or unsubstituted aryl.
- the substituted or unsubstituted hydrocarbyl typically has from one to about twenty five carbon atoms, more typically from one to about twelve carbon atoms, such as one to about seven carbon atoms.
- the hydrocarbyl may be methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, tert-butyl, a pentyl, a hexyl, a heptyl, phenyl, or benzyl.
- Typical substituents on substituted hydrocarbyl include nitro, amino, halide, cyano, carbonyl, carboxyl, hydroxyl, and alkoxy.
- a preferred substituent is halide, which may be chloride, bromide, or iodide.
- the halide substituent is chloride.
- substituted or unsubstituted alkoxy and substituted or unsubstituted amino typically have from one to about twenty five carbon atoms, more typically from one to about twelve carbon atoms, such as one to about six carbon atoms.
- Typical substituents on substituted alkoxy and substitued amine include nitro, amino, halide, cyano, carbonyl, carboxyl, hydroxyl, and alkoxy.
- the azole component is a 2-substituted benzimidazole, which has the following general structure (IX): wherein R 22 is as defined in connection with structure (IV).
- Exemplary substitued azoles include 2-(3,4-dichlorobenzyl)-benzimidazole; 2-bromobenzyl benzimidazole; 2-bromophenyl benzimidazole; 2-bromoethylphenyl benzimidazole; 2-chlorobenzyl benzimidazole; 2-chlorophenyl benzimidazole; and 2- chloroethylphenyl benzimidazole.
- the molecule that comprises at least one organic functional group that interacts with and protects copper surfaces may be present in the composition at a concentration of at least about 0.1 g/L.
- the concentration is typically at or above this minimum concentration to achieve adequate coverage of the substrate for corrosion protection.
- the concentration of the molecule that comprises at least one organic functional group that interacts with and protects copper surfaces is at least about 1.0 g/L, more typically at least about 4.0 g/L.
- the molecule that comprises at least one organic functional group that interacts with and protects copper surfaces may be present in the composition at a concentration up to the solubility limit.
- the concentration of the molecule that comprises at least one organic functional group that interacts with and protects copper surfaces is at most about 10.0 g/L.
- the concentration of the molecule that comprises at least one organic functional group that interacts with and protects copper surfaces may be between about 0.1 g/L up to the solubility limit in the composition, typically between about 1.0 g/L and about 10 g/L, more typically between about 4.0 g/L and about 10 g/L.
- the composition is preferably an aqueous solution comprising the organic molecules as described above.
- the composition of the present invention may further comprise an alcohol, a surfactant, and an alkaline pH adjuster.
- an alcohol in the composition enhances the solubility of the organic molecules.
- Applicable alcohols include alcohols, diols, triols, and higher polyols. Suitable alcohols include ethanol, propanol, isopropanol, n-butanol, isobutanol, tert-butanol, ethylene glycol, propane- 1,2-diol, butane- 1,2-diol, butane- 1,3-diol, butane- 1,4-diol, propane- 1,3-diol, hexane- 1,4-diol hexane-l,5-diol, hexane-l,6-diol, 2 -methoxy ethanol, 2-ethoxyethanol, 2-propoxyethanol, 2-butoxyethanol, etc.
- unsaturated diols such as butene-diol, hexene-diol, and acetylenics such as butyne diol.
- a suitable triol is glycerol.
- Additional alcohols include triethylene glycol, diethylene glycol, diethylene glycol methyl ether, triethylene glycol monomethyl ether, triethylene glycol dimethyl ether, propylene glycol, dipropylene glycol, allyl alcohol, furfuryl alcohol, and tetrahydrofurfuryl alcohol.
- the alcohol may be present in the composition at a concentration of at least about 10 mL/L. Typically, the concentration of the alcohol is at least about 100 mL/L, more typically at least about 150 mL/L. The alcohol may be present in the composition at a concentration up to its solubility limit in water. It is within the scope of the invention to employ solvent systems comprised entirely of alcohol. In aqueous solvent systems wherein the alcohol is a supplementary solvent, the concentration of the alcohol is typically less than about 500 mL/L, more typically less than about 200 mL/L. Accordingly, the alcohol concentration may be between about 10 mL/L and about 500 mL/L, typically between about 150 mL/L and about 200 mL/L.
- a surfactant may be added to enhance the wettability of the copper and silver surfaces.
- the surfactant may be cationic, anionic, non-ionic, or zwitterionic.
- a particular surfactant may be used alone or in combination with other surfactants.
- One class of surfactants comprises a hydrophilic head group and a hydrophobic tail.
- Hydrophilic head groups associated with anionic surfactants include carboxylate, sulfonate, sulfate, phosphate, and phosphonate.
- Hydrophilic head groups associated with cationic surfactants include quaternary amine, sulfonium, and phosphonium.
- Quaternary amines include quaternary ammonium, pyridinium, bipyridinium, and imidazolium.
- Hydrophilic head groups associated with non-ionic surfactants include alcohol and amide.
- Hydrophilic head groups associated with zwitterionic surfactants include betaine.
- the hydrophobic tail typically comprises a hydrocarbon chain. The hydrocarbon chain typically comprises between about six and about 24 carbon atoms, more typically between about eight to about 16 carbon atoms.
- Exemplary anionic surfactants include alkyl phosphonates, alkyl ether phosphates, alkyl sulfates, alkyl ether sulfates, alkyl sulfonates, alkyl ether sulfonates, carboxylic acid ethers, carboxylic acid esters, alkyl aryl sulfonates, and sulfosuccinates.
- Anionic surfactants include any sulfate ester, such as those sold under the trade name ULTRAFAX, including, sodium lauryl sulfate, sodium laureth sulfate (2 EO), sodium laureth, sodium laureth sulfate (3 EO), ammonium lauryl sulfate, ammonium laureth sulfate, TEA-lauryl sulfate, TEA- laureth sulfate, MEA-lauryl sulfate, MEA-laureth sulfate, potassium lauryl sulfate, potassium laureth sulfate, sodium decyl sulfate, sodium octyl/decyl sulfate, sodium 2-ethylhexyl sulfate, sodium octyl sulfate, sodium nonoxynol-4 sulfate, sodium nonoxynol-6 sulfate, sodium cumen
- Exemplary cationic surfactants include quaternary ammonium salts such as dodecyl trimethyl ammonium chloride, cetyl trimethyl ammonium salts of bromide and chloride, hexadecyl trimethyl ammonium salts of bromide and chloride, alkyl dimethyl benzyl ammonium salts of chloride and bromide, and the like.
- surfactants such as Lodyne 106A (Fluoroalkyl Ammonium Chloride Cationic Surfactant 28-30%) and Ammonyx 4002 (Octadecyl dimethyl benzyl ammonium chloride Cationic Surfactant) are particularly preferred.
- the surfactant is non-ionic.
- a class of non-ionic surfactants includes those comprising polyether groups, based on, for example, ethylene oxide (EO) repeat units and/or propylene oxide (PO) repeat units. These surfactants are typically non- ionic.
- Surfactants having a polyether chain may comprise between about 1 and about 36 EO repeat units, between about 1 and about 36 PO repeat units, or a combination of between about 1 and about 36 EO repeat units and PO repeat units. More typically, the polyether chain comprises between about 2 and about 24 EO repeat units, between about 2 and about 24 PO repeat units, or a combination of between about 2 and about 24 EO repeat units and PO repeat units.
- the polyether chain comprises between about 6 and about 15 EO repeat units, between about 6 and about 15 PO repeat units, or a combination of between about 6 and about 15 EO repeat units and PO repeat units.
- These surfactants may comprise blocks of EO repeat units and PO repeat units, for example, a block of EO repeat units encompassed by two blocks of PO repeat units or a block of PO repeat units encompassed by two blocks of EO repeat units.
- Another class of polyether surfactants comprises alternating PO and EO repeat units. Within these classes of surfactants are the polyethylene glycols, polypropylene glycols, and the polypropylene glycol/poly ethylene glycols.
- Yet another class of non-ionic surfactants comprises EO, PO, or EO/PO repeat units built upon an alcohol or phenol base group, such as glycerol ethers, butanol ethers, pentanol ethers, hexanol ethers, heptanol ethers, octanol ethers, nonanol ethers, decanol ethers, dodecanol ethers, tetradecanol ethers, phenol ethers, alkyl substituted phenol ethers, ⁇ -naphthol ethers, and ⁇ -naphthol ethers.
- glycerol ethers such as glycerol ethers, butanol ethers, pentanol ethers, hexanol ethers, heptanol ethers, octanol ethers, nonanol ethers, decanol
- the phenol group is substituted with a hydrocarbon chain having between about 1 and about 10 carbon atoms, such as about 8 (octylphenol) or about 9 carbon atoms (nonylphenol).
- the polyether chain may comprise between about 1 and about 24 EO repeat units, between about 1 and about 24 PO repeat units, or a combination of between about 1 and about 24 EO and PO repeat units. More typically, the polyether chain comprises between about 8 and about 16 EO repeat units, between about 8 and about 16 PO repeat units, or a combination of between about 8 and about 16 EO and PO repeat units. Even more typically, the polyether chain comprises about 9, about 10, about 11, or about 12 EO repeat units; about 9, about 10, about 11, or about 12 PO repeat units; or a combination of about 9, about 10, about 11, or about 12 EO repeat units and PO repeat units.
- An exemplary ⁇ -naphthol derivative non- ionic surfactant is Lugalvan BNO 12 which is a ⁇ -naphtholethoxylate having 12 ethylene oxide monomer units bonded to the naphthol hydroxyl group.
- a similar surfactant is Polymax NPA- 15, which is a polyethoxylated nonylphenol.
- Another surfactant is Triton®-X100 nonionic surfactant, which is an octylphenol ethoxylate, typically having around 9 or 10 EO repeat units. Additional commercially available non-ionic surfactants include the Pluronic® series of surfactants, available from BASF.
- Pluronic® surfactants include the P series of EO/PO block copolymers, including P65, P84, P85, P103, P104, P105, and P123, available from BASF; the F series of EO/PO block copolymers, including F 108, F127, F38, F68, F77, F87, F88, F98, available from BASF; and the L series of EO/PO block copolymers, including LlO, LlOl, L121, L31, L35, L44, L61, L62, L64, L81, and L92, available from BASF.
- non-ionic surfactants include water soluble, ethoxylated nonionic fluorosurfactants available from DuPont and sold under the trade name Zonyl®, including Zonyl® FSN (Telomar B Monoether with Polyethylene Glycol nonionic surfactant), Zonyl® FSN-100, Zonyl® FS-300, Zonyl® FS-500, Zonyl® FS-510, Zonyl® FS-610, Zonyl® FSP, and Zonyl® UR.
- Other non-ionic surfactants include the amine condensates, such as cocoamide DEA and cocoamide MEA, sold under the trade name ULTRAFAX.
- nonionic surfactants include acid ethoxylated fatty acids (polyethoxy-esters) comprising a fatty acid esterified with a polyether group typically comprising between about 1 and about 36 EO repeat units.
- Glycerol esters comprise one, two, or three fatty acid groups on a glycerol base.
- the surfactant may be present in the preferred composition at a concentration of at least about 0.01 g/L. Many surfactants provide effective wetting at very low concentrations. The minimum concentration may be adjusted to achieve adequate wetting, which depends in part on the identity of the surfactant.
- the surfactant concentration is at least about 0.1 g/L, more typically at least about 0.5 g/L.
- the surfactant may be present in the anti-corrosion composition at a concentration of less than about 10.0 g/L. Typically, the surfactant concentration is less than about 5.0 g/L, more typically less than about 2.0 g/L.
- the composition of the present invention preferably has a pH between about 1.0 and about 12.0, typically between about 7.0 and about 11.0.
- the composition is preferably alkaline because in alkaline solution, the formation of the protective organic coating is more rapid than its formation in acidic solution.
- Alkaline adjustment may be accomplished using alkaline pH adjusting agents, such as sodium hydroxide, potassium hydroxide, hydroxides of quaternary amines, such as tetramethylammonium hydroxide, tetraethylammonium hydroxide, and the like.
- the concentration of the alkaline pH adjuster is sufficient to achieve the desired alkaline pH and may be between about 0.01 g/L and about 10.0 g/L, typically between about 0.01 g/L and about 2.0 g/L, more typically between about 0.1 g/L and about 0.5 g/L.
- the composition contains no alkali metal hydroxide, and only an alternative agent such as sodium tetra borate is used for pH adjustment.
- Another aspect of the present invention is directed to a method of enhancing the corrosion resistance of a solderable copper substrate having a precious metal coating on a surface thereof.
- the method involves exposing the copper substrate having the precious metal coating on a surface thereof to a composition comprising a molecule comprising at least one organic functional group interacts with and protects copper surfaces and a molecule comprising at least one organic functional group interacts with and protects precious metal surfaces.
- the precious metal coating comprises silver.
- the silver coating layer may be deposited on the copper substrate by an immersion-plated silver coating method known in the art.
- immersion-plated silver coating method known in the art.
- the method of coating a copper substrate with immersion-plated silver described in U.S. Pub. No. 2006/0024430, herein incorporated by reference in its entirety, is applicable.
- Commercially available chemistries for immersion silver coating include AlphaSTAR®, available from Enthone Inc. (West Haven, CT).
- the precious metal coating comprises gold.
- the gold coating layer may be deposited on the copper substrate by an immersion-plated gold coating method known in the art.
- the immersion-plated gold coating is deposited over a base metal underlayer, that is deposited directly on the copper substrate.
- Typical base metal underlayers include nickel layers and cobalt layers, each of which may be deposited by electroless deposition.
- SEL-REX® Select available from Enthone Inc. (West Haven, CT).
- the temperature of the composition may vary between room temperature up to about 55°C, such as between about 20 0 C and about 45°C or between about 25°C and about 45°C.
- exposure may be accompanied by, for example, scrubbing, brushing, squeegeeing, agitation, stirring, etc.
- the substrate may be rinsed, typically with deionized water for between about 10 seconds to about 2 minutes.
- Another aspect of the present invention is directed to a protective organic film applied over an immersion-plated silver coating deposited on a solderable copper substrate. Exposure of the copper substrate having an immersion-plated silver coating thereon to the composition of the present invention results in a protective organic film on both the silver surfaces and exposed copper surfaces.
- the protective organic film comprises both the molecule comprising at least one organic functional group which interacts with and protects copper surfaces and the molecule comprising at least one organic functional group which interacts with and protects silver surfaces. A depiction of this protective organic film is shown in FIG.
- the functional groups of the molecules that constitute the protective organic film are shown interacting with both the copper substrate and the immersion silver coating, e.g., the azole interacts with and protects the copper surface and the mercaptan group interacts with and protects the silver layer.
- the molecules interact with and form a protective organic film over the copper and precious metal surfaces by self-assembled adsorption. Accordingly, the molecules self-assemble into a monolayer on the copper and silver surfaces.
- the protective organic film is a relatively dense, hydrophobic film that can provide enhanced protection against atmospheric moisture, which in turn, enhances the immersion silver coating's resistance to corrosion and sulfidation.
- the protective organic film of the present invention may be additionally characterized by high thermal stability, particularly to temperatures commonly reached during lead- free reflow.
- the protective organic coatings of the present invention can better withstand reflow temperatures compared to conventional organic coatings (such as OSP) as shown by differential scanning calorimetry and thermogravimetric analysis.
- OSP organic coatings
- a protective organic coating is stable at temperatures as high as about 254°C, while only 5% of the film is lost at temperatures as high as 274°C. This compares favorably to typical reflow temperatures for tin-lead eutectic solder which is typically reflowed at temperatures between about 230 0 C and about 240 0 C.
- the protective organic coating can withstand multiple lead-free reflow processes.
- Example 1 Immersion Silver Plating over a Copper Substrate
- a copper cladded FR-4 laminate substrate was plated with a layer of immersion silver using AlphaSTAR® chemistry (available from Enthone Inc., West Haven, Conn.).
- the copper cladded FR-4 laminate substrate was dipped in an immersion silver plating bath comprising:
- Silver ions (3.0 g/L) AlphaSTAR® additives (300 mL/L) Balance water.
- the copper cladded FR-4 laminate substrate was dipped in the immersion silver plating bath for three minutes to deposit thin silver layers over the copper cladding, the silver layers having an approximate thickness of about 0.2 ⁇ m.
- a photograph of the freshly silver-plated laminate substrate is shown in FIG. 2A. The photograph shows a lustrous silver coating.
- Example 1 The freshly silver-plated copper cladded FR-4 laminate substrate of Example 1 was subjected to a porosity test in a sulfidizing atmosphere for ten minutes. In this test, the substrate is exposed to two ambient atmospheres, each comprising a sulfur-containing gas. In a first glass desiccator (150 mm inner diameter), an SO 2 vapor is evolved by placing a beaker containing 150 mL of a 6% solution of sulfurous acid therein and sealing the desiccator.
- a first glass desiccator 150 mm inner diameter
- an H 2 S vapor is evolved by placing a beaker containing 1 mL of a 23.5% solution of (NH 4 ) 2 S in 100 mL distilled water therein and sealing the desiccator.
- the test is carried out by placing the laminate substrate in the desiccator comprising SO 2 vapor first for 24 hours and then placing the laminate substrate in the desiccator comprising H 2 S vapor.
- Photographs of the laminate substrate were taken after two minutes (FIG. 2B) Of H 2 S exposure, after five minutes (FIG. 2C) Of H 2 S exposure, and after ten minutes (FIG. 2D) Of H 2 S exposure.
- the copper in the laminate substrate became increasingly discolored due to the formation of silver sulfides (AgS x ), copper oxides (CuO x ), and copper sulfides (CuS x ). It is apparent, therefore, that a self-limiting immersion-plated silver coating may not be sufficient to protect copper from corrosion.
- Example 3 Applying a Protective Organic Coating Comprising a Mercaptan Compound to an Immersion-Plated Silver Coating on a Copper Substrate
- Three copper cladded FR-4 laminate substrates were plated using the AlphaSTAR® chemistry according to the method shown in Example 1.
- the copper cladded FR- 4 laminate substrates were dipped in a commercially available post-treating composition comprising a mercaptan compound.
- the post-treating composition was Evabrite WS® (available from Enthone Inc., West Haven, Conn.)
- the post-treating composition comprised the following components:
- Laminate Substrate 1 from Example 3 and a freshly silver-plated Laminate Substrate plated according to the method of Example 1 with no post-treatment were subjected to a H 2 S porosity test for ten minutes, as described above in Example 2.
- a photograph of the untreated silver-plated laminate substrate is shown in FIG. 3A, and the Evabrite WS®-treated silver-plated laminate substrate is shown in FIG. 3B.
- the Evabrite WS®-treated silver-plated laminate substrate retained its lustrous silver color while the untreated silver-plated laminate substrate became tarnished and discolored.
- a post-treating composition was prepared having the following components:
- a post-treating composition was prepared having the following components:
- Example 7 Post-treating Composition comprising a Compound comprising an Aromatic Heterocycle Comprising Nitrogen and a Compound comprising a Mercaptan Functional Group
- a post-treating composition was prepared having the following components: 1% wt./vol. Evabrite WS® additives 0.09% wt./vol. 2-(3,4-dichlorobenzyl)-benzimidazole Balance water.
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Priority Applications (4)
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EP08852669.4A EP2220009B1 (en) | 2007-11-21 | 2008-11-18 | Anti-tarnish coating |
ES08852669.4T ES2688783T3 (es) | 2007-11-21 | 2008-11-18 | Revestimiento anti-empañado |
JP2010535028A JP2011505492A (ja) | 2007-11-21 | 2008-11-18 | 耐変色性コーティング |
CN200880125277.XA CN101925553B (zh) | 2007-11-21 | 2008-11-18 | 防失光泽性涂料 |
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US11/944,287 US7972655B2 (en) | 2007-11-21 | 2007-11-21 | Anti-tarnish coatings |
US11/944,287 | 2007-11-21 |
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PCT/US2008/083912 WO2009067446A1 (en) | 2007-11-21 | 2008-11-18 | Anti-tarnish coating |
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EP (1) | EP2220009B1 (zh) |
JP (2) | JP2011505492A (zh) |
CN (1) | CN101925553B (zh) |
ES (1) | ES2688783T3 (zh) |
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Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3365312A (en) * | 1965-03-08 | 1968-01-23 | Hollingshead Corp | Metal cleaner, article and method |
US3398003A (en) * | 1965-04-26 | 1968-08-20 | Verle C. Smith | Silver polish-tarnish retarder containing a dialkyl disulfide having from 8 to 20 carbon atoms in each alkyl radical |
JPS60258483A (ja) | 1984-06-04 | 1985-12-20 | Furukawa Electric Co Ltd:The | Ag被覆Cu材の表面処理法 |
US5955141A (en) | 1994-12-09 | 1999-09-21 | Alpha Metals, Inc. | Process for silver plating in printed circuit board manufacture |
US6319543B1 (en) | 1999-03-31 | 2001-11-20 | Alpha Metals, Inc. | Process for silver plating in printed circuit board manufacture |
US6395329B2 (en) | 1994-12-09 | 2002-05-28 | Soutar Andrew Mcintosh | Printed circuit board manufacture |
US20050186347A1 (en) * | 2004-02-25 | 2005-08-25 | Hyung-Joon Kim | Method of protecting metals from corrosion using thiol compounds |
US20060024430A1 (en) | 2004-07-29 | 2006-02-02 | Enthone Inc. | Silver plating in electronics manufacture |
Family Cites Families (101)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2080299A (en) * | 1935-04-12 | 1937-05-11 | Du Pont | Inhibiting corrosion of metals |
NL129791C (zh) * | 1961-02-08 | |||
BE621988A (zh) * | 1961-08-31 | |||
GB1209778A (en) | 1967-11-20 | 1970-10-21 | American Home Prod | Silver polish with anti-tarnish agent |
US3630790A (en) * | 1969-05-13 | 1971-12-28 | Dow Chemical Co | Method of protection of metal surfaces from corrosion |
NL7200508A (zh) * | 1971-01-18 | 1972-07-20 | ||
US4006026A (en) * | 1973-02-21 | 1977-02-01 | Schering Aktiengesellschaft | Method of improving the tarnish resistance of silver |
GB1418966A (en) * | 1973-10-06 | 1975-12-24 | Ciba Geigy Ag | Treatment of steel with organic phosphonic or phosphonous acids |
US4252662A (en) * | 1974-02-11 | 1981-02-24 | Stauffer Chemical Company | Functional fluids containing ammonium salts of phosphorus acids |
AT344122B (de) * | 1974-10-03 | 1978-07-10 | Henkel Kgaa | Verfahren und vorrichtung zum maschinellen waschen und reinigen von festen werkstoffen, insbesondere von textilien und geschirr, mittels phosphatarmer oder phosphatfreier wasch- und reinigungsloesungen |
US4209487A (en) * | 1975-06-02 | 1980-06-24 | Monsanto Company | Method for corrosion inhibition |
US4052160A (en) * | 1975-07-23 | 1977-10-04 | Ciba-Geigy Corporation | Corrosion inhibitors |
US4165334A (en) * | 1975-09-05 | 1979-08-21 | The Procter & Gamble Company | Detergent compounds and compositions |
US3986967A (en) * | 1975-10-17 | 1976-10-19 | Mobil Oil Corporation | Organophosphorus derivatives of benzotriazole and their use as load carrying additives |
JPS52111430A (en) * | 1976-03-15 | 1977-09-19 | Alps Electric Co Ltd | Method of preventing tarnish of silver and silver alloy |
US4178253A (en) * | 1977-04-05 | 1979-12-11 | Ciba-Geigy Corporation | Corrosion inhibited lubricant compositions |
US4329381A (en) * | 1978-02-23 | 1982-05-11 | Henkel Kommanditgesellschaft Auf Aktien (Henkel Kgaa) | Method for providing corrosion resistance to metal objects |
US4181619A (en) * | 1978-10-30 | 1980-01-01 | Mobil Oil Corporation | Antiwear composition |
US4351945A (en) * | 1978-12-18 | 1982-09-28 | Exxon Research & Engineering Co. | Two-phase process for the preparation of azole and azoline disulfides |
US4350600A (en) * | 1979-05-29 | 1982-09-21 | Standard Oil Company (Indiana) | Method and composition for inhibiting corrosion in high temperature, high pressure gas wells |
JPS561396A (en) | 1979-06-20 | 1981-01-09 | Hitachi Ltd | Core protecting system at trip of nuclear reactor recirculation pump |
US4303568A (en) * | 1979-12-10 | 1981-12-01 | Betz Laboratories, Inc. | Corrosion inhibition treatments and method |
US4357396A (en) * | 1981-01-26 | 1982-11-02 | Ppg Industries, Inc. | Silver and copper coated articles protected by treatment with mercapto and/or amino substituted thiadiazoles or mercapto substituted triazoles |
JPS57198269A (en) | 1981-05-28 | 1982-12-04 | Furukawa Electric Co Ltd:The | Anticorrosive treatment of silver plated stainless steel |
US4395294A (en) * | 1981-08-17 | 1983-07-26 | Bell Telephone Laboratories, Incorporated | Copper corrosion inhibitor |
DE3148330A1 (de) * | 1981-12-07 | 1983-06-09 | Max Planck Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen | Verfahren zur stromlosen abscheidung von edelmetallschichten auf oberflaechen von unedlen metallen |
GB8711534D0 (en) * | 1987-05-15 | 1987-06-17 | Ciba Geigy Ag | Corrosion inhibiting composition |
JPS60251285A (ja) * | 1984-05-25 | 1985-12-11 | Showa Denko Kk | 電気接点のめつき用表面処理剤 |
US4744950A (en) * | 1984-06-26 | 1988-05-17 | Betz Laboratories, Inc. | Method of inhibiting the corrosion of copper in aqueous mediums |
DE3519522A1 (de) * | 1985-05-31 | 1986-12-04 | Henkel KGaA, 4000 Düsseldorf | Verwendung von 3-amino-5((omega)-hydroxyalkyl)-1,2,4-triazolen als korrosionsinhibitoren fuer buntmetalle in waessrigen systemen |
US4649025A (en) * | 1985-09-16 | 1987-03-10 | W. R. Grace & Co. | Anti-corrosion composition |
US5226956A (en) * | 1987-03-24 | 1993-07-13 | Alcan International, Inc. | Surface coating compositions |
GB8707799D0 (en) * | 1987-04-01 | 1987-05-07 | Ici Plc | Metal treatment |
DE3725629A1 (de) * | 1987-08-03 | 1989-02-16 | Varta Batterie | Galvanisches element |
US4873139A (en) * | 1988-03-29 | 1989-10-10 | Minnesota Mining And Manufacturing Company | Corrosion resistant silver and copper surfaces |
US5103550A (en) * | 1989-12-26 | 1992-04-14 | Aluminum Company Of America | Method of making a food or beverage container |
US5236626A (en) * | 1990-09-24 | 1993-08-17 | Calgon Corporation | Alkoxybenzotriazole compositions and the use thereof as copper and copper alloy corrosion inhibitors |
US5141675A (en) * | 1990-10-15 | 1992-08-25 | Calgon Corporation | Novel polyphosphate/azole compositions and the use thereof as copper and copper alloy corrosion inhibitors |
US5302304A (en) * | 1990-12-21 | 1994-04-12 | Ethyl Corporation | Silver protective lubricant composition |
US5178916A (en) * | 1991-06-21 | 1993-01-12 | At&T Bell Laboratories | Process for making corrosion-resistant articles |
US5300247A (en) * | 1992-09-02 | 1994-04-05 | Ashchem Ip | Improved corrosion inhibitor system for an intermediate heat transfer medium |
US5368758A (en) * | 1992-10-13 | 1994-11-29 | The Lubrizol Corporation | Lubricants, greases and aqueous fluids containing additives derived from dimercaptothiadiazoles |
JP3175381B2 (ja) * | 1993-01-20 | 2001-06-11 | 古河電気工業株式会社 | 電気接点材料とその製造方法 |
DE69406701T2 (de) * | 1993-03-26 | 1998-04-02 | Uyemura & Co C | Chemisches Vergoldungsbad |
DE69400509T2 (de) * | 1993-06-23 | 1997-04-10 | Sumitomo Metal Ind | Metallblech mit einem galvanisch erzeugten Zink oder Zinklegierungsdispersionsüberzug und Verfahren zur Herstellung desselben |
US6183815B1 (en) * | 1994-04-01 | 2001-02-06 | University Of Pittsburgh | Method and composition for surface treatment of metals |
BR9507630A (pt) * | 1994-05-13 | 1997-09-23 | Henkel Corp | Composição liquida aquosa adequada para revestir protetoramente um substrato metálico processo de trabalho a frio de um objeto metálico e composição inibidora concentrada |
US5487792A (en) * | 1994-06-13 | 1996-01-30 | Midwest Research Institute | Molecular assemblies as protective barriers and adhesion promotion interlayer |
US5463804A (en) * | 1994-08-31 | 1995-11-07 | Aluminum Company Of America | Coating aluminum alloy sheet to promote adhesive bonding for vehicle assemblies |
AU3003495A (en) * | 1994-09-23 | 1996-04-09 | Church & Dwight Company, Inc. | Aqueous metal cleaner |
GB9425090D0 (en) | 1994-12-12 | 1995-02-08 | Alpha Metals Ltd | Copper coating |
US5555756A (en) * | 1995-01-24 | 1996-09-17 | Inland Steel Company | Method of lubricating steel strip for cold rolling, particularly temper rolling |
US5598193A (en) * | 1995-03-24 | 1997-01-28 | Hewlett-Packard Company | Treatment of an orifice plate with self-assembled monolayers |
WO1997018905A1 (en) | 1995-11-20 | 1997-05-29 | Berg Technology, Inc. | Method of providing corrosion protection |
US6139610A (en) * | 1996-01-05 | 2000-10-31 | Wayne Pigment Corp. | Hybrid pigment grade corrosion inhibitor compositions and procedures |
JP3547028B2 (ja) * | 1996-02-26 | 2004-07-28 | 四国化成工業株式会社 | 銅及び銅合金の表面処理剤 |
JPH09249991A (ja) | 1996-03-13 | 1997-09-22 | Nikko Kinzoku Kk | 銀めっき材の表面処理方法 |
US6905587B2 (en) * | 1996-03-22 | 2005-06-14 | Ronald Redline | Method for enhancing the solderability of a surface |
US6068879A (en) * | 1997-08-26 | 2000-05-30 | Lsi Logic Corporation | Use of corrosion inhibiting compounds to inhibit corrosion of metal plugs in chemical-mechanical polishing |
GB9725898D0 (en) | 1997-12-08 | 1998-02-04 | Albright & Wilson | Process for treating metal surfaces |
US6117795A (en) * | 1998-02-12 | 2000-09-12 | Lsi Logic Corporation | Use of corrosion inhibiting compounds in post-etch cleaning processes of an integrated circuit |
EP1088119A2 (en) * | 1998-06-19 | 2001-04-04 | Alcoa Inc. | Method for inhibiting stains on aluminum product surfaces |
JP3297861B2 (ja) * | 1998-06-29 | 2002-07-02 | 日本航空電子工業株式会社 | めっき材 |
DE60043912D1 (de) | 1999-02-17 | 2010-04-15 | Macdermid Inc | Verfahren zur Verbesserung der Lötbarkeit einer Oberfläche |
US6488868B1 (en) * | 1999-03-15 | 2002-12-03 | Ondeo Nalco Energy Services, L.P. | Corrosion inhibitor compositions including quaternized compounds having a substituted diethylamino moiety |
US7351353B1 (en) * | 2000-01-07 | 2008-04-01 | Electrochemicals, Inc. | Method for roughening copper surfaces for bonding to substrates |
US6586167B2 (en) * | 2000-07-21 | 2003-07-01 | Fuji Photo Film Co., Ltd. | Method for thermally forming image for plate making and thermally processed image recording material for plate making |
US6375822B1 (en) * | 2000-10-03 | 2002-04-23 | Lev Taytsas | Method for enhancing the solderability of a surface |
DE10050862C2 (de) * | 2000-10-06 | 2002-08-01 | Atotech Deutschland Gmbh | Bad und Verfahren zum stromlosen Abscheiden von Silber auf Metalloberflächen |
JP2002220676A (ja) * | 2001-01-25 | 2002-08-09 | Okuno Chem Ind Co Ltd | 銅系材料への置換金めっき方法 |
US6461682B1 (en) * | 2001-03-08 | 2002-10-08 | David Crotty | Composition and method for inhibiting corrosion of aluminum and aluminum alloys using mercapto substituted silanes |
US6731965B2 (en) * | 2001-06-20 | 2004-05-04 | 3M Innovative Properties Company | Corrosion prevention in biomedical electrodes |
CA2398423C (en) * | 2001-09-04 | 2009-11-10 | Rohm And Haas Company | Corrosion inhibiting compositions |
EP1295934B1 (en) * | 2001-09-25 | 2006-04-19 | Fuji Photo Film Co., Ltd. | Heterocyclic ring-containing compound and a lubricant composition using the same |
US6930136B2 (en) | 2001-09-28 | 2005-08-16 | National Starch And Chemical Investment Holding Corporation | Adhesion promoters containing benzotriazoles |
JP3971593B2 (ja) * | 2001-10-10 | 2007-09-05 | 株式会社カネカ | 硬化性組成物 |
US6863718B2 (en) * | 2001-10-31 | 2005-03-08 | Silberline Manufacturing Co., Inc. | Phosphonic acid derivative treatment of metallic flakes |
AT411061B (de) * | 2001-11-30 | 2003-09-25 | Solutia Austria Gmbh | Wässrige härter für wässrige epoxidharzdispersionen |
FR2837209B1 (fr) * | 2002-03-13 | 2004-06-18 | Rhodia Chimie Sa | Utilisation de copolymers a blocs portant des fonctions phosphates et/ou phosphonates comme promoteurs d'adhesion ou comme agents de protection contre la corrosion d'une surface metallique |
AU2003222669A1 (en) * | 2002-04-22 | 2003-11-03 | Yazaki Corporation | Electrical connectors incorporating low friction coatings and methods for making them |
US6933046B1 (en) * | 2002-06-12 | 2005-08-23 | Tda Research, Inc. | Releasable corrosion inhibitor compositions |
JP4115762B2 (ja) | 2002-07-09 | 2008-07-09 | ハリマ化成株式会社 | はんだ付け用フラックス及び電子回路 |
US20050263025A1 (en) * | 2002-07-26 | 2005-12-01 | Koninklijke Philips Electronics N.V. | Micro-contact printing method |
JP4181888B2 (ja) * | 2003-02-04 | 2008-11-19 | 四国化成工業株式会社 | 銀及び銀合金の防食処理剤 |
GB0307290D0 (en) | 2003-03-31 | 2003-05-07 | Cole Paul G | Enhancing silver tarnish-resistance |
US6773757B1 (en) * | 2003-04-14 | 2004-08-10 | Ronald Redline | Coating for silver plated circuits |
US20050183793A1 (en) * | 2004-02-25 | 2005-08-25 | Hyung-Joon Kim | Method of improving the performance of organic coatings for corrosion resistance |
EP1580302A1 (en) * | 2004-03-23 | 2005-09-28 | JohnsonDiversey Inc. | Composition and process for cleaning and corrosion inhibition of surfaces of aluminum or colored metals and alloys thereof under alkaline conditions |
US20050217757A1 (en) * | 2004-03-30 | 2005-10-06 | Yoshihiro Miyano | Preflux, flux, solder paste and method of manufacturing lead-free soldered body |
GB2412666B (en) | 2004-03-30 | 2008-10-08 | Paul Gilbert Cole | Water-based metal treatment composition |
US20050239295A1 (en) * | 2004-04-27 | 2005-10-27 | Wang Pei-L | Chemical treatment of material surfaces |
KR101042483B1 (ko) | 2005-03-11 | 2011-06-16 | 히다치 가세고교 가부시끼가이샤 | 구리의 표면 처리 방법 및 구리 |
KR101300541B1 (ko) * | 2005-06-24 | 2013-09-02 | 프레스톤 프로닥츠 코포레이션 | 경납땜된 금속 표면의 부식을 억제하는 방법 및 거기에사용하기 위한 냉각제 및 첨가제 |
US20070001150A1 (en) * | 2005-06-29 | 2007-01-04 | Hudgens Roy D | Corrosion-inhibiting composition and method of use |
JP4901168B2 (ja) * | 2005-09-21 | 2012-03-21 | 石原薬品株式会社 | 置換銀メッキ浴 |
US20090301996A1 (en) | 2005-11-08 | 2009-12-10 | Advanced Technology Materials, Inc. | Formulations for removing cooper-containing post-etch residue from microelectronic devices |
US20070256590A1 (en) * | 2006-05-02 | 2007-11-08 | Scott Matthew S | Coating compositions exhibiting corrosion resistance properties, related coated articles and methods |
US7883738B2 (en) | 2007-04-18 | 2011-02-08 | Enthone Inc. | Metallic surface enhancement |
US10017863B2 (en) | 2007-06-21 | 2018-07-10 | Joseph A. Abys | Corrosion protection of bronzes |
TWI453301B (zh) | 2007-11-08 | 2014-09-21 | Enthone | 浸鍍銀塗層上的自組分子 |
US7972655B2 (en) | 2007-11-21 | 2011-07-05 | Enthone Inc. | Anti-tarnish coatings |
-
2007
- 2007-11-21 US US11/944,287 patent/US7972655B2/en active Active
-
2008
- 2008-11-18 JP JP2010535028A patent/JP2011505492A/ja active Pending
- 2008-11-18 EP EP08852669.4A patent/EP2220009B1/en active Active
- 2008-11-18 CN CN200880125277.XA patent/CN101925553B/zh active Active
- 2008-11-18 ES ES08852669.4T patent/ES2688783T3/es active Active
- 2008-11-18 WO PCT/US2008/083912 patent/WO2009067446A1/en active Application Filing
- 2008-11-20 TW TW097144904A patent/TWI460312B/zh active
-
2011
- 2011-07-05 US US13/176,411 patent/US8703243B2/en active Active
-
2015
- 2015-10-30 JP JP2015214413A patent/JP6106736B2/ja active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3365312A (en) * | 1965-03-08 | 1968-01-23 | Hollingshead Corp | Metal cleaner, article and method |
US3398003A (en) * | 1965-04-26 | 1968-08-20 | Verle C. Smith | Silver polish-tarnish retarder containing a dialkyl disulfide having from 8 to 20 carbon atoms in each alkyl radical |
JPS60258483A (ja) | 1984-06-04 | 1985-12-20 | Furukawa Electric Co Ltd:The | Ag被覆Cu材の表面処理法 |
US5955141A (en) | 1994-12-09 | 1999-09-21 | Alpha Metals, Inc. | Process for silver plating in printed circuit board manufacture |
US6395329B2 (en) | 1994-12-09 | 2002-05-28 | Soutar Andrew Mcintosh | Printed circuit board manufacture |
US6860925B2 (en) | 1994-12-09 | 2005-03-01 | Enthone Incorporated | Printed circuit board manufacture |
US6319543B1 (en) | 1999-03-31 | 2001-11-20 | Alpha Metals, Inc. | Process for silver plating in printed circuit board manufacture |
US20050186347A1 (en) * | 2004-02-25 | 2005-08-25 | Hyung-Joon Kim | Method of protecting metals from corrosion using thiol compounds |
US20060024430A1 (en) | 2004-07-29 | 2006-02-02 | Enthone Inc. | Silver plating in electronics manufacture |
Non-Patent Citations (1)
Title |
---|
See also references of EP2220009A4 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011104614A1 (en) * | 2010-02-24 | 2011-09-01 | Mesa S.A.S. Di Malimpensa Simona E Davide E C. | Method for protecting silver and silver alloy surfaces against tarnishing |
US9057135B2 (en) | 2010-02-24 | 2015-06-16 | Agere S.R.L. | Method for protecting silver and silver alloy surfaces against tarnishing |
JP2012172190A (ja) * | 2011-02-21 | 2012-09-10 | Daiwa Fine Chemicals Co Ltd (Laboratory) | 封孔処理剤溶液及びそれを用いた封孔処理方法 |
WO2013147698A1 (en) * | 2012-03-26 | 2013-10-03 | Innomart Pte Ltd | An aqueous solution for forming an alkylthiol self-assembled monolayer and a method for forming the same using the solution |
EP2746427A1 (en) * | 2012-12-20 | 2014-06-25 | Rohm and Haas Electronic Materials LLC | Organic solderability preservative and method |
KR20190001366A (ko) * | 2017-06-27 | 2019-01-04 | 성균관대학교산학협력단 | 은 코팅 레이어 및 이의 제조방법과 은 코팅 레이어의 전자화물 산화방지 효과 |
KR101979676B1 (ko) * | 2017-06-27 | 2019-08-28 | 성균관대학교 산학협력단 | 은 코팅 레이어 및 이의 제조방법과 은 코팅 레이어의 전자화물 산화방지 효과 |
EP3705607A1 (en) | 2019-03-08 | 2020-09-09 | COVENTYA S.p.A. | Composition and process for the protection of precious metal substrates by an organic nanolayer |
WO2020182679A1 (en) | 2019-03-08 | 2020-09-17 | Coventya S.P.A. | Composition and process for the protection of precious metal substrates by an organic nanolayer |
US11814734B2 (en) | 2019-05-13 | 2023-11-14 | Ecolab Usa Inc. | 1,2,4-triazolo[1,5-a] pyrimidine derivative as copper corrosion inhibitor |
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JP2016026269A (ja) | 2016-02-12 |
TW200942644A (en) | 2009-10-16 |
CN101925553B (zh) | 2014-01-15 |
ES2688783T3 (es) | 2018-11-06 |
US20100291303A1 (en) | 2010-11-18 |
US7972655B2 (en) | 2011-07-05 |
TWI460312B (zh) | 2014-11-11 |
US20120175022A1 (en) | 2012-07-12 |
US8703243B2 (en) | 2014-04-22 |
JP6106736B2 (ja) | 2017-04-05 |
CN101925553A (zh) | 2010-12-22 |
EP2220009A4 (en) | 2015-11-18 |
JP2011505492A (ja) | 2011-02-24 |
EP2220009A1 (en) | 2010-08-25 |
EP2220009B1 (en) | 2018-08-15 |
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