WO2009063954A1 - 基板処理方法及びこの方法によって処理された基板 - Google Patents
基板処理方法及びこの方法によって処理された基板 Download PDFInfo
- Publication number
- WO2009063954A1 WO2009063954A1 PCT/JP2008/070713 JP2008070713W WO2009063954A1 WO 2009063954 A1 WO2009063954 A1 WO 2009063954A1 JP 2008070713 W JP2008070713 W JP 2008070713W WO 2009063954 A1 WO2009063954 A1 WO 2009063954A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- recessed
- substrate surface
- processing method
- mask
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 10
- 238000003672 processing method Methods 0.000 title abstract 3
- 238000000034 method Methods 0.000 title abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 239000002245 particle Substances 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/381—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/24—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate of the light emitting region, e.g. non-planar junction
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0206—Materials
- H05K2201/0212—Resin particles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/09—Treatments involving charged particles
- H05K2203/095—Plasma, e.g. for treating a substrate to improve adhesion with a conductor or for cleaning holes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
Abstract
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008801161982A CN101861640B (zh) | 2007-11-16 | 2008-11-13 | 基板处理方法以及用该方法进行处理而形成的基板 |
JP2009541175A JP5232798B2 (ja) | 2007-11-16 | 2008-11-13 | 基板処理方法 |
US12/743,054 US20100310828A1 (en) | 2007-11-16 | 2008-11-13 | Substrate processing method and substrate processed by this method |
KR1020107011380A KR101159438B1 (ko) | 2007-11-16 | 2008-11-13 | 기판 처리 방법, 및 이 방법에 의해 처리된 기판 |
EP08850923A EP2211374A4 (en) | 2007-11-16 | 2008-11-13 | PROCESS FOR TREATING SUBSTRATE AND SUBSTRATE PROCESSED THEREBY |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007297810 | 2007-11-16 | ||
JP2007-297810 | 2007-11-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009063954A1 true WO2009063954A1 (ja) | 2009-05-22 |
Family
ID=40638801
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/070713 WO2009063954A1 (ja) | 2007-11-16 | 2008-11-13 | 基板処理方法及びこの方法によって処理された基板 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20100310828A1 (ja) |
EP (1) | EP2211374A4 (ja) |
JP (1) | JP5232798B2 (ja) |
KR (1) | KR101159438B1 (ja) |
CN (1) | CN101861640B (ja) |
RU (1) | RU2459312C2 (ja) |
TW (1) | TWI423325B (ja) |
WO (1) | WO2009063954A1 (ja) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011091374A (ja) * | 2009-09-11 | 2011-05-06 | Samco Inc | サファイア基板のエッチング方法 |
JP2011091261A (ja) * | 2009-10-23 | 2011-05-06 | Ulvac Japan Ltd | 基板処理装置、基板処理方法及びこの方法によって処理された基板 |
CN102263174A (zh) * | 2010-05-24 | 2011-11-30 | 广镓光电股份有限公司 | 半导体发光元件 |
JP2012004375A (ja) * | 2010-06-17 | 2012-01-05 | Teijin Dupont Films Japan Ltd | テクスチャーフィルムの製造方法 |
WO2012086522A1 (ja) * | 2010-12-21 | 2012-06-28 | 三洋電機株式会社 | 光電変換装置及びその製造方法 |
US20130214245A1 (en) * | 2010-11-03 | 2013-08-22 | Richard Rugin Chang | Light emitting diode and fabrication method thereof |
JP2015026826A (ja) * | 2013-06-17 | 2015-02-05 | 王子ホールディングス株式会社 | 半導体発光素子用基板、半導体発光素子、半導体発光素子用基板の製造方法、および、半導体発光素子の製造方法 |
US9203052B2 (en) | 2009-11-18 | 2015-12-01 | Samsung Display Co., Ltd. | Organic light emitting diode display and method of manufacturing the same |
JPWO2013186945A1 (ja) * | 2012-06-13 | 2016-02-01 | 三菱電機株式会社 | 太陽電池およびその製造方法 |
JP2016035932A (ja) * | 2011-12-28 | 2016-03-17 | 王子ホールディングス株式会社 | 有機発光ダイオード、有機発光ダイオードの製造方法、画像表示装置および照明装置 |
JP2016201445A (ja) * | 2015-04-09 | 2016-12-01 | 王子ホールディングス株式会社 | 凹凸基板の製造方法。 |
EP2477238B1 (en) * | 2009-09-07 | 2017-12-20 | EL-Seed Corporation | Semiconductor light emitting element |
JP2019201080A (ja) * | 2018-05-15 | 2019-11-21 | 王子ホールディングス株式会社 | 光電変換素子用構造体及び光電変換素子とこれらの製造方法 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1839317B (zh) * | 2003-05-19 | 2012-05-30 | 东丽株式会社 | 选择结合性物质固定化载体 |
KR101293205B1 (ko) * | 2011-02-15 | 2013-08-05 | 한국기계연구원 | 나노 딤플 패턴의 형성방법 및 나노 구조물 |
JP2013168505A (ja) * | 2012-02-15 | 2013-08-29 | Ulvac Japan Ltd | テクスチャー構造形成方法 |
CN102544289B (zh) * | 2012-03-06 | 2013-12-18 | 中国科学院半导体研究所 | 将氮化镓基发光二极管的外延结构表面粗化的方法 |
EP2922103B1 (en) | 2012-08-21 | 2017-04-05 | Oji Holdings Corporation | Substrate for semiconductor light emitting elements and semiconductor light emitting element |
CN103681302B (zh) * | 2012-09-25 | 2016-07-27 | 南亚科技股份有限公司 | 选择性蚀刻方法 |
CN103730525B (zh) * | 2014-01-21 | 2016-03-30 | 南通大学 | 一种同心圆型波纹式太阳能电池硅基片及其制造工艺 |
CN103746018B (zh) * | 2014-01-21 | 2016-04-13 | 南通大学 | 一种瓦片状型波纹式太阳能电池硅基片及其制造工艺 |
CN108886075B (zh) * | 2015-07-29 | 2021-07-13 | 日机装株式会社 | 发光元件的制造方法 |
CN107204288A (zh) * | 2017-05-26 | 2017-09-26 | 武汉纺织大学 | 一种三维微结构的刻蚀方法及其应用 |
RU2707663C1 (ru) * | 2019-01-18 | 2019-11-28 | Федеральное государственное бюджетное учреждение науки Институт Ядерной Физики им. Г.И. Будкера Сибирского отделения (ИЯФ СО РАН) | Способ изготовления брэгговской структуры с гофрировкой поверхности |
CN111250863B (zh) * | 2020-03-31 | 2021-06-29 | 格物感知(深圳)科技有限公司 | 一种特殊无铝焊接键合工艺 |
Citations (6)
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JP2000261008A (ja) | 1999-03-10 | 2000-09-22 | Mitsubishi Electric Corp | 太陽電池用シリコン基板の粗面化方法 |
JP2006210394A (ja) | 2005-01-25 | 2006-08-10 | Canon Inc | シリコン基体表面の凹凸形成方法 |
WO2006088228A1 (ja) * | 2005-02-18 | 2006-08-24 | Sumitomo Chemical Company, Limited | 半導体発光素子及びその製造方法 |
JP2007012971A (ja) * | 2005-07-01 | 2007-01-18 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法及び半導体装置 |
JP2007019318A (ja) * | 2005-07-08 | 2007-01-25 | Sumitomo Chemical Co Ltd | 半導体発光素子、半導体発光素子用基板の製造方法及び半導体発光素子の製造方法 |
WO2007105782A1 (ja) * | 2006-03-13 | 2007-09-20 | Sumitomo Chemical Company, Limited | 3-5族窒化物半導体基板の製造方法 |
Family Cites Families (6)
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US4407695A (en) * | 1981-12-31 | 1983-10-04 | Exxon Research And Engineering Co. | Natural lithographic fabrication of microstructures over large areas |
SU1481267A1 (ru) * | 1987-06-01 | 1989-05-23 | Республиканский инженерно-технический центр порошковой металлургии | Способ травлени материалов |
EP0700065B1 (en) * | 1994-08-31 | 2001-09-19 | AT&T Corp. | Field emission device and method for making same |
US5817373A (en) * | 1996-12-12 | 1998-10-06 | Micron Display Technology, Inc. | Dry dispense of particles for microstructure fabrication |
US6350388B1 (en) * | 1999-08-19 | 2002-02-26 | Micron Technology, Inc. | Method for patterning high density field emitter tips |
JP3969698B2 (ja) * | 2001-05-21 | 2007-09-05 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
-
2008
- 2008-11-13 EP EP08850923A patent/EP2211374A4/en not_active Withdrawn
- 2008-11-13 CN CN2008801161982A patent/CN101861640B/zh active Active
- 2008-11-13 RU RU2010124378/28A patent/RU2459312C2/ru active
- 2008-11-13 KR KR1020107011380A patent/KR101159438B1/ko active IP Right Grant
- 2008-11-13 US US12/743,054 patent/US20100310828A1/en not_active Abandoned
- 2008-11-13 WO PCT/JP2008/070713 patent/WO2009063954A1/ja active Application Filing
- 2008-11-13 JP JP2009541175A patent/JP5232798B2/ja not_active Expired - Fee Related
- 2008-11-14 TW TW097144017A patent/TWI423325B/zh not_active IP Right Cessation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000261008A (ja) | 1999-03-10 | 2000-09-22 | Mitsubishi Electric Corp | 太陽電池用シリコン基板の粗面化方法 |
JP2006210394A (ja) | 2005-01-25 | 2006-08-10 | Canon Inc | シリコン基体表面の凹凸形成方法 |
WO2006088228A1 (ja) * | 2005-02-18 | 2006-08-24 | Sumitomo Chemical Company, Limited | 半導体発光素子及びその製造方法 |
JP2007012971A (ja) * | 2005-07-01 | 2007-01-18 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法及び半導体装置 |
JP2007019318A (ja) * | 2005-07-08 | 2007-01-25 | Sumitomo Chemical Co Ltd | 半導体発光素子、半導体発光素子用基板の製造方法及び半導体発光素子の製造方法 |
WO2007105782A1 (ja) * | 2006-03-13 | 2007-09-20 | Sumitomo Chemical Company, Limited | 3-5族窒化物半導体基板の製造方法 |
Non-Patent Citations (1)
Title |
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See also references of EP2211374A4 |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2477238B1 (en) * | 2009-09-07 | 2017-12-20 | EL-Seed Corporation | Semiconductor light emitting element |
JP2011091374A (ja) * | 2009-09-11 | 2011-05-06 | Samco Inc | サファイア基板のエッチング方法 |
JP2011091261A (ja) * | 2009-10-23 | 2011-05-06 | Ulvac Japan Ltd | 基板処理装置、基板処理方法及びこの方法によって処理された基板 |
US9203052B2 (en) | 2009-11-18 | 2015-12-01 | Samsung Display Co., Ltd. | Organic light emitting diode display and method of manufacturing the same |
CN102263174A (zh) * | 2010-05-24 | 2011-11-30 | 广镓光电股份有限公司 | 半导体发光元件 |
JP2012004375A (ja) * | 2010-06-17 | 2012-01-05 | Teijin Dupont Films Japan Ltd | テクスチャーフィルムの製造方法 |
WO2012032803A1 (ja) * | 2010-09-10 | 2012-03-15 | サムコ株式会社 | サファイア基板のエッチング方法 |
CN103168346A (zh) * | 2010-09-10 | 2013-06-19 | 莎姆克株式会社 | 蓝宝石基板的蚀刻方法 |
US20130214245A1 (en) * | 2010-11-03 | 2013-08-22 | Richard Rugin Chang | Light emitting diode and fabrication method thereof |
WO2012086522A1 (ja) * | 2010-12-21 | 2012-06-28 | 三洋電機株式会社 | 光電変換装置及びその製造方法 |
JP2016035932A (ja) * | 2011-12-28 | 2016-03-17 | 王子ホールディングス株式会社 | 有機発光ダイオード、有機発光ダイオードの製造方法、画像表示装置および照明装置 |
JPWO2013186945A1 (ja) * | 2012-06-13 | 2016-02-01 | 三菱電機株式会社 | 太陽電池およびその製造方法 |
JP2015026826A (ja) * | 2013-06-17 | 2015-02-05 | 王子ホールディングス株式会社 | 半導体発光素子用基板、半導体発光素子、半導体発光素子用基板の製造方法、および、半導体発光素子の製造方法 |
JP2016201445A (ja) * | 2015-04-09 | 2016-12-01 | 王子ホールディングス株式会社 | 凹凸基板の製造方法。 |
JP2019201080A (ja) * | 2018-05-15 | 2019-11-21 | 王子ホールディングス株式会社 | 光電変換素子用構造体及び光電変換素子とこれらの製造方法 |
JP7072801B2 (ja) | 2018-05-15 | 2022-05-23 | 王子ホールディングス株式会社 | 光電変換素子用構造体及び光電変換素子 |
Also Published As
Publication number | Publication date |
---|---|
KR20100074300A (ko) | 2010-07-01 |
KR101159438B1 (ko) | 2012-06-22 |
RU2010124378A (ru) | 2011-12-27 |
RU2459312C2 (ru) | 2012-08-20 |
TW200943409A (en) | 2009-10-16 |
TWI423325B (zh) | 2014-01-11 |
EP2211374A1 (en) | 2010-07-28 |
CN101861640A (zh) | 2010-10-13 |
US20100310828A1 (en) | 2010-12-09 |
EP2211374A4 (en) | 2012-10-10 |
CN101861640B (zh) | 2013-07-03 |
JP5232798B2 (ja) | 2013-07-10 |
JPWO2009063954A1 (ja) | 2011-03-31 |
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