WO2009024045A1 - Creuset composite c/c et son procédé de fabrication - Google Patents

Creuset composite c/c et son procédé de fabrication Download PDF

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Publication number
WO2009024045A1
WO2009024045A1 PCT/CN2008/071657 CN2008071657W WO2009024045A1 WO 2009024045 A1 WO2009024045 A1 WO 2009024045A1 CN 2008071657 W CN2008071657 W CN 2008071657W WO 2009024045 A1 WO2009024045 A1 WO 2009024045A1
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WO
WIPO (PCT)
Prior art keywords
carbon
crucible
composite crucible
carbon composite
carbon fiber
Prior art date
Application number
PCT/CN2008/071657
Other languages
English (en)
Chinese (zh)
Inventor
Jiqiao Liao
Weiping Tai
Yuejun Wang
Yuliang Gong
Xiang Xiong
Boyun Huang
Original Assignee
Hunan Kingbo Carbon-Carbon Composites Co. Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CNU2007200642494U external-priority patent/CN201081542Y/zh
Priority claimed from CN2008100313640A external-priority patent/CN101319353B/zh
Application filed by Hunan Kingbo Carbon-Carbon Composites Co. Ltd filed Critical Hunan Kingbo Carbon-Carbon Composites Co. Ltd
Priority to KR1020097011582A priority Critical patent/KR101230568B1/ko
Publication of WO2009024045A1 publication Critical patent/WO2009024045A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/71—Ceramic products containing macroscopic reinforcing agents
    • C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
    • C04B35/80—Fibres, filaments, whiskers, platelets, or the like
    • C04B35/83—Carbon fibres in a carbon matrix
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00—Crucible or pot furnaces
    • F27B14/08—Details peculiar to crucible or pot furnaces
    • F27B14/10—Crucibles
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/66—Specific sintering techniques, e.g. centrifugal sintering
    • C04B2235/661—Multi-step sintering
    • C04B2235/662—Annealing after sintering
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics

Definitions

  • the present invention relates to a tool for a high temperature furnace, and more particularly to a carbon/carbon composite material for a single crystal furnace and a production process thereof.
  • graphite crucibles commonly used in single crystal furnaces to carry quartz crucibles are also called graphite crucibles, which are indispensable tooling for single crystal furnaces.
  • a quartz crucible containing a raw material such as a polycrystalline silicon block is placed in a graphite crucible on the bottom of the crucible, heated and melted in a protective atmosphere, and regulated to a process temperature, the seed crystal is diverted.
  • the tube is inserted into the molten polysilicon liquid, and the seed crystal and the graphite crucible are reversely rotated and lifted upward, so that the polysilicon liquid crystallizes and crystallizes into a single crystal silicon rod according to the order of the seed crystal silicon atoms.
  • the temperature in the furnace is 1200 ° C to 1700 ° C.
  • the quartz crucible becomes soft and depends on the outer graphite crucible.
  • Graphite crucible is used in high temperature environment. It must support the weight of quartz crucible and its raw materials, and it is in a rotating state. Because of the poor mechanical properties of graphite crucible, it is easy to be broken under the action of external force.
  • the method adopts a carbon cloth quasi-three-directional structure prefabricated body, and is densely processed by chemical vapor deposition and decyl ketone resin impregnation carbonization and hot isostatic asphalt carbonization, and the product density is repeated several times. 1.
  • the product is subjected to high-temperature purification treatment under the condition of introducing chlorine gas and Freon, and the thermal field carbon/anthrax for the single crystal silicon drawing furnace can be obtained after mechanical processing.
  • the dense process used in the method is repeated and densely processed several times, so that the product density is 1.83 g/cm 3 to complete the process, the process is complicated, the impurity content is high, and the product is purified by introducing chlorine gas and Freon. It has brought some pressure on environmental protection. Today, people are not hoping for environmental protection.
  • Carbon fiber is classified into polyacrylonitrile-based carbon fiber, viscose-based carbon fiber and pitch-based carbon fiber according to its raw materials.
  • the first one is the mainstream. Therefore, the carbon fiber is usually polyacrylonitrile-based carbon fiber.
  • the carbon fiber is divided into lk 3k 6k 12k 24k 50k according to the number of filaments contained in the tow, and k is a quantity unit, representing 1000 filaments.
  • Carbon cloth woven from carbon fiber tow according to the general surface density into 200g / m 2 220g / m 2 240g / m 2 260g / m 2, i.e., the size of the carbon cloth square meter per gram equivalent weight.
  • Needle punching is a known nonwoven woven and felt process in which a barbed needle is used to puncture adjacent cloth and net tire to form a felt.
  • the barb on the lancet catches a portion of the fiber of the net tire to displace with the movement of the lancet, and the cloth and the net tire are compressed.
  • the lancet penetrates into a certain depth, the lancet rises back.
  • the spurt of the spur the spurted fiber is detached from the hook and remains in the felt body in an almost vertical state, thereby introducing the fiber in the vertical direction to form a standard.
  • the net tire is a short fiber which is cut into carbon fibers of 10 to 80, and is mechanically opened and air-laid to form a carbon fiber net tire like a cotton wool.
  • the needling process has been widely used in the nonwoven industry.
  • the object of the present invention is to provide a carbon/carbon composite material which is simple in process and environmentally friendly.
  • the production process, the material thus obtained, can be used to prepare high quality furnace tools for high temperature furnaces.
  • the carbon/carbon composite crucible production process of the present invention comprises the following steps:
  • Billet a net tire made of carbon fiber and a carbon cloth are composited into a felt by needle punching, and the felt is wound on a mold, and a carbon cloth is covered thereon, and then a layer of net tire is covered. Laminated and laminated by needle punching to form the desired enamel preform;
  • the ruthenium preform obtained in the step (1) is densified by chemical vapor deposition, and the density thereof is gradually increased and graphitized to prepare a desired ruthenium body;
  • Chemical vapor deposition is a known technique in which a preform to be densified is placed in a CVD furnace. In a high temperature environment, hydrocarbon gas is generated in a soaked porous preform. Pyrolytic deposition of carbon, attached to the preform. It is an important process to increase product density.
  • Graphitization treatment It refers to the conversion of carbon materials with amorphous and disordered structure to the three-dimensional graphite ordered structure at high temperature to improve the comprehensive performance of the product. It is an existing process.
  • the surface density of the net tire is 20 g/m 2 to 160 g/m 2
  • the areal density of the carbon cloth is 200 g/m 2 to 320 g/m 2
  • the apparent density of the felt of 0. 3g / cm 3 ⁇ 0. 5g / cm 3, a crucible made of a preform, an apparent density of 0. 3g / cm 3 ⁇ 0. 7g / cm 3.
  • the apparent density of the crucible body is 1.43 g/cm 3 to 1.75 g/cm 3 .
  • the purification is performed under vacuum or a protective atmosphere.
  • the impurities are removed, and the purification temperature is 2300 ° C to 2800 ° C, and the holding time is 3 h to 12 h. Chlorine gas and Freon are not required in the present invention.
  • the obtained tantalum product is placed in a vacuum furnace, heated to 1800 ° C to 2300 ° C under vacuum, and kept for 50 minutes - 260 minutes. .
  • the present invention also provides a carbon/carbon composite crucible which is produced by subjecting a carbon fiber to a densification-purification process, and the carbon fiber is a polyacrylonitrile carbon fiber.
  • the existing crucible is made of graphite with low tensile strength, it can only be made into two or three lobes, and it is impossible to make it as a whole.
  • the overall enthalpy provided in the invention can be prepared.
  • the present invention also contemplates that the composite material obtained by the method of the present invention can also be made into a crucible composed of 2-4 petals in accordance with the structure of the existing graphite crucible.
  • the carbon/carbon composite material of the present invention comprises a left flap and a right flap, and a hanging hole is arranged on the left flap and the right flap.
  • the carbon/carbon composite material crucible of the present invention is composed of a bowl-shaped tray and upper and lower parts of a cylinder, and a hanging hole is arranged on the cylinder.
  • the carbon/carbon composite material of the present invention has a through hole that can be blocked on the crucible. Since the above technical solution is adopted, the invention achieves the object of the invention better, and the process is simple.
  • the blank is made, the net tire composed of the fluffy needle-shaped carbon fiber is used, and the quasi-three-dimensional preform is easily obtained during the needling, prefabrication.
  • the carbon fibers in the body are criss-crossed, have strong cohesion, will not delaminate, and have stable structure. At the same time, the pores of the preform are small, which is convenient for accelerating the subsequent densification process.
  • the crucibles made by chemical vapor deposition are made of carbon.
  • the carbon matrix is composed of pyrolytic carbon obtained by high-temperature pyrolysis. The purity is very high. Only high-temperature purification under vacuum or protective atmosphere can obtain carbon/carbon composite products with ash content less than 180ppm. .
  • Embodiment 1 is a schematic structural view of Embodiment 1 of the present invention.
  • Figure 2 is a schematic structural view of Embodiment 2 of the present invention.
  • Figure 3 is a schematic view showing the structure of Embodiment 3 of the present invention.
  • a carbon/carbon composite material which is produced by processing a carbon fiber by a compacting, a purification process.
  • the carbon/carbon composite material of the present invention consists of 2-4 petals (two flaps in this embodiment); it consists of a left flap 1 and a right flap 3, on the left flap 1.
  • a lifting hole 2 is provided on the right flap 3.
  • the production process includes the following steps:
  • Billet Open the net, select short carbon fiber of 25 mm ⁇ 70 mm length, loosen into fluffy needle-like fiber by opening equipment, and then open the loose carbon fiber through airflow and / Or combing into a net, and then laying into a fiber web by using a laying machine, pre-piercing into a net tire, and the surface density of the net tire is 20 g/m 2 to 160 g/m 2 (100 g/m in this embodiment) ; and the tread surface mesh density of 200 g / m 2 ⁇ 320g / m 2 ( according to the present embodiment is a 240g / m 2) needled carbon fabric composite into a mat, felt an apparent density of 0. 3g / cm 3 ⁇ 0.
  • the felt is wound on the mold, covered with a layer of carbon cloth, and then covered with a layer of net tire, so overlapping Place and combine them by needle punching to make the required ⁇ 5g/ ⁇
  • the apparent density is 0. 3g / cm 3 ⁇ 0. 7g / cm 3 (0. 5g / cm 3 in this embodiment).
  • the ruthenium preform obtained in the step (1) is densified by chemical vapor deposition, and the density is gradually increased and graphitized to prepare a desired ruthenium body having an apparent density of 1 . 43g / cm 3 ⁇ l. 75g / cm 3 ( Example of the present embodiment 1. 6g / cm 3).
  • the carbon/carbon composite material obtained by the step (4) is cut into the left flap 1 and the right flap 3 along the axis thereof.
  • a lifting hole 2 is formed on the left flap 1 and the right flap 3.
  • the obtained tantalum product is placed in a vacuum furnace and heated under vacuum to 1800 ° C to 2300 ° C (2100 ° in this embodiment). C), keep warm for 50 minutes - 260 minutes (160 minutes in this embodiment).
  • the carbon/carbon composite material produced by the present invention is composed of a high-strength carbon fiber and a carbon matrix, and has a tensile strength of 86 MPa and an ash content of 116 ppm. Compared with graphite products, it has excellent performance, high specific strength, high temperature resistance, corrosion resistance, small thermal expansion coefficient, resistance to quenching, rapid heat, no deformation and no cracking. It is an ideal upgrade to replace graphite crucible in single crystal furnace. product.
  • the carbon/carbon composite material obtained by the step (4) is integrally cut, and the whole crucible is cut into a circle at a distance of 15 mm from the boundary between the inner arc and the inner cylinder in the cylindrical portion.
  • the tube 4 and the bowl-shaped tray 5 are upper and lower two parts, and then the cylinder 4 is made into an outer cone at the cutting position thereof, and the bowl-shaped tray 5 is made into an inner cone, and the two conical cones have the same apex angle, both of which are 120°.
  • a mounting hole 2 is provided in the cylinder 4.
  • the cylinder and the arc of the crucible can be blocked.
  • These through holes 6 can be made into a countersunk screw hole type or a tapered hole type or a threaded hole type, and the through hole 6 can be blocked by a tapered pin or a slotted stud. The same as the embodiment 1.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Metallurgy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Composite Materials (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Structural Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Ceramic Products (AREA)

Abstract

L'invention porte sur un creuset composite c/c et sur son procédé de fabrication. On fabrique le creuset par préformage, densification, purification et usinage d'une fibre de carbone, qui est une fibre de carbone polyacrylonitrile. Pendant le préformage du procédé de fabrication, il est facile d'acquérir une préforme quasi-tridimensionnelle lors de l'aiguilletage avec une aiguille pour fibre de carbone. La fibre de carbone interne de la préforme est entrecroisée, et la cohésion est forte, aucune délamination ne se produit et la structure est stable, et l'espace des pores est si faible qu'il est commode pour accélérer le procédé de densification ultérieur. Après la densification, la pureté du creuset est très élevée, et le creuset composite c/c dans la teneur en cendres est inférieure à 180 ppm peut être obtenu seulement par la purification à une température élevée sous vide ou sous atmosphère protectrice.
PCT/CN2008/071657 2007-08-21 2008-07-16 Creuset composite c/c et son procédé de fabrication WO2009024045A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020097011582A KR101230568B1 (ko) 2007-08-21 2008-07-16 탄소/탄소 복합재료 도가니 및 그 생산공정

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CNU2007200642494U CN201081542Y (zh) 2007-08-21 2007-08-21 单晶炉坩埚托
CN200720064249.4 2007-08-21
CN200810031364.0 2008-05-20
CN2008100313640A CN101319353B (zh) 2008-05-20 2008-05-20 炭/炭复合材料坩埚及其生产工艺

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WO2009024045A1 true WO2009024045A1 (fr) 2009-02-26

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KR (1) KR101230568B1 (fr)
WO (1) WO2009024045A1 (fr)

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CN106917137A (zh) * 2017-03-28 2017-07-04 保定顺天新材料股份有限公司 碳碳薄壁筒及其制作工艺
CN108411498A (zh) * 2018-05-17 2018-08-17 佛山维顺翔复合材料有限公司 一种埚帮自动成型机
CN109097824A (zh) * 2017-06-20 2018-12-28 常州市永达五金工具厂 单晶硅生长用组合式石英坩埚及其制备方法
CN112341232A (zh) * 2020-10-28 2021-02-09 西安超码科技有限公司 一种炭/炭坩埚及其制造方法
CN112553779A (zh) * 2020-12-20 2021-03-26 西安美兰德新材料有限责任公司 一种针刺碳碳埚托的生产工艺
CN113149685A (zh) * 2021-04-29 2021-07-23 上海骐杰碳素材料有限公司 碳碳或碳陶复合材料网胎预制体及其制品以及制备方法
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CN114656271A (zh) * 2022-04-19 2022-06-24 浙江德鸿碳纤维复合材料有限公司 一种碳碳坩埚及其制备方法
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CN117265641A (zh) * 2023-11-20 2023-12-22 内蒙古鼎泰万邦新材料有限公司 一种编织坩埚预制体及制作方法

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CN103482995B (zh) * 2013-08-06 2015-01-07 江苏天鸟高新技术股份有限公司 连续碳纤维增强的坩埚预制体及其制备方法
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CN113121254B (zh) * 2021-04-19 2022-09-16 福建康碳复合材料科技有限公司 一种大尺寸r角坩埚用预制体的制备方法
CN114853478B (zh) * 2022-05-17 2023-03-31 航天特种材料及工艺技术研究所 一种梯度陶瓷基复合材料及其制备方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1059795A (ja) * 1996-08-20 1998-03-03 Toyo Tanso Kk 半導体単結晶引き上げ用ｃ／ｃルツボ
JP2000219592A (ja) * 1999-01-28 2000-08-08 Toyo Tanso Kk 単結晶引き上げ装置用炭素繊維強化炭素複合材料
CN1887804A (zh) * 2006-07-20 2007-01-03 西安超码科技有限公司 单晶硅拉制炉及多晶硅冶炼炉用炭/炭加热器的制备方法
CN1907914A (zh) * 2006-07-20 2007-02-07 西安超码科技有限公司 单晶硅拉制炉用热场炭/炭坩埚的制备方法
CN201081542Y (zh) * 2007-08-21 2008-07-02 湖南博云高科技有限公司 单晶炉坩埚托

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1059795A (ja) * 1996-08-20 1998-03-03 Toyo Tanso Kk 半導体単結晶引き上げ用ｃ／ｃルツボ
JP2000219592A (ja) * 1999-01-28 2000-08-08 Toyo Tanso Kk 単結晶引き上げ装置用炭素繊維強化炭素複合材料
CN1887804A (zh) * 2006-07-20 2007-01-03 西安超码科技有限公司 单晶硅拉制炉及多晶硅冶炼炉用炭/炭加热器的制备方法
CN1907914A (zh) * 2006-07-20 2007-02-07 西安超码科技有限公司 单晶硅拉制炉用热场炭/炭坩埚的制备方法
CN201081542Y (zh) * 2007-08-21 2008-07-02 湖南博云高科技有限公司 单晶炉坩埚托

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JIANG, JIANCHUN ET AL.: "Primary Investigation of c/c Composite Mede the Single Crystal Silicon Grow the Crucible Process.", CARBON., June 2004 (2004-06-01), pages 3 - 7, ISSN: 1001-8948 *
LUO, RUIYING.: "Present Study Situation and Technology of Preparation for Carbon/Carbon Composites.", ORDNANCE MATERIAL SCIENCE AND ENGINEERING., vol. 21, no. 1, February 1998 (1998-02-01), pages 64 - 69, ISSN: 1004-244X *

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