WO2005019231A8 - ホスファゼン化合物、及び感光性樹脂組成物並びにその利用 - Google Patents

ホスファゼン化合物、及び感光性樹脂組成物並びにその利用

Info

Publication number
WO2005019231A8
WO2005019231A8 PCT/JP2004/007719 JP2004007719W WO2005019231A8 WO 2005019231 A8 WO2005019231 A8 WO 2005019231A8 JP 2004007719 W JP2004007719 W JP 2004007719W WO 2005019231 A8 WO2005019231 A8 WO 2005019231A8
Authority
WO
WIPO (PCT)
Prior art keywords
compound
resin composition
photosensitive resin
phenoxyphosphazene
phosphazene compound
Prior art date
Application number
PCT/JP2004/007719
Other languages
English (en)
French (fr)
Other versions
WO2005019231A1 (ja
Inventor
Koji Okada
Toshio Yamanaka
Original Assignee
Kaneka Corp
Koji Okada
Toshio Yamanaka
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaneka Corp, Koji Okada, Toshio Yamanaka filed Critical Kaneka Corp
Priority to JP2005513241A priority Critical patent/JP4695512B2/ja
Priority to US10/559,737 priority patent/US8063245B2/en
Publication of WO2005019231A1 publication Critical patent/WO2005019231A1/ja
Publication of WO2005019231A8 publication Critical patent/WO2005019231A8/ja

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G79/00Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule
    • C08G79/02Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule a linkage containing phosphorus
    • C08G79/025Polyphosphazenes
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C07F9/02Phosphorus compounds
    • C07F9/06Phosphorus compounds without P—C bonds
    • C07F9/062Organo-phosphoranes without P-C bonds
    • C07F9/065Phosphoranes containing the structure P=N-
    • C07F9/067Polyphosphazenes containing the structure [P=N-n]
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C07F9/02Phosphorus compounds
    • C07F9/547Heterocyclic compounds, e.g. containing phosphorus as a ring hetero atom
    • C07F9/6564Heterocyclic compounds, e.g. containing phosphorus as a ring hetero atom having phosphorus atoms, with or without nitrogen, oxygen, sulfur, selenium or tellurium atoms, as ring hetero atoms
    • C07F9/6581Heterocyclic compounds, e.g. containing phosphorus as a ring hetero atom having phosphorus atoms, with or without nitrogen, oxygen, sulfur, selenium or tellurium atoms, as ring hetero atoms having phosphorus and nitrogen atoms with or without oxygen or sulfur atoms, as ring hetero atoms
    • C07F9/65812Cyclic phosphazenes [P=N-]n, n>=3
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/037Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Materials For Photolithography (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
PCT/JP2004/007719 2003-06-05 2004-06-03 ホスファゼン化合物、及び感光性樹脂組成物並びにその利用 WO2005019231A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005513241A JP4695512B2 (ja) 2003-06-05 2004-06-03 ホスファゼン化合物、及び感光性樹脂組成物並びにその利用
US10/559,737 US8063245B2 (en) 2003-06-05 2004-06-03 Phosphazene compound, photosensitive resin composition and use thereof

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2003-161079 2003-06-05
JP2003161079 2003-06-05
JP2003204036 2003-07-30
JP2003204023 2003-07-30
JP2003-204023 2003-07-30
JP2003-204036 2003-07-30

Publications (2)

Publication Number Publication Date
WO2005019231A1 WO2005019231A1 (ja) 2005-03-03
WO2005019231A8 true WO2005019231A8 (ja) 2005-10-20

Family

ID=34222138

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2004/007719 WO2005019231A1 (ja) 2003-06-05 2004-06-03 ホスファゼン化合物、及び感光性樹脂組成物並びにその利用

Country Status (3)

Country Link
US (1) US8063245B2 (ja)
JP (1) JP4695512B2 (ja)
WO (1) WO2005019231A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7088004B2 (ja) 2017-03-21 2022-06-21 東レ株式会社 感光性樹脂組成物、感光性樹脂組成物フィルム、絶縁膜および電子部品

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KR101256332B1 (ko) * 2007-04-04 2013-04-18 히타치가세이가부시끼가이샤 감광성 접착제 조성물, 필름상 접착제, 접착 시트, 접착제 패턴, 접착제층 부착 반도체 웨이퍼, 반도체 장치, 및, 반도체 장치의 제조방법
JP5179843B2 (ja) * 2007-07-31 2013-04-10 旭化成イーマテリアルズ株式会社 感光性樹脂組成物及びそれを用いた感光性フィルム
JP5239661B2 (ja) * 2007-09-13 2013-07-17 東レ株式会社 カバーレイフィルム
JP4901687B2 (ja) * 2007-10-17 2012-03-21 日東電工株式会社 感光性樹脂組成物およびそれを用いて得られるカバー絶縁層を有するフレキシブルプリント配線回路基板
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US9023922B2 (en) 2012-05-24 2015-05-05 Sabic Global Technologies B.V. Flame retardant compositions, articles comprising the same and methods of manufacture thereof
US20150175811A1 (en) * 2012-07-20 2015-06-25 Hitachi Chemical Company, Ltd. Silver-sulfidation-preventing material and method for forming silver-sulfidation-preventing film, and method for producing light-emitting device and light-emitting device
JP6462983B2 (ja) * 2014-01-28 2019-01-30 太陽インキ製造株式会社 感光性熱硬化性樹脂組成物およびフレキシブルプリント配線板
CN106832764A (zh) * 2015-12-04 2017-06-13 广东生益科技股份有限公司 一种无卤环氧树脂组合物以及含有它的预浸料、层压板和印制电路板
TWI580714B (zh) 2016-03-10 2017-05-01 台燿科技股份有限公司 樹脂組合物及其應用
JP6819854B2 (ja) * 2016-08-26 2021-01-27 三菱瓦斯化学株式会社 樹脂組成物、プリプレグ、金属箔張積層板、積層樹脂シート、樹脂シート、及びプリント配線板
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7088004B2 (ja) 2017-03-21 2022-06-21 東レ株式会社 感光性樹脂組成物、感光性樹脂組成物フィルム、絶縁膜および電子部品

Also Published As

Publication number Publication date
JP4695512B2 (ja) 2011-06-08
WO2005019231A1 (ja) 2005-03-03
US20060142542A1 (en) 2006-06-29
JPWO2005019231A1 (ja) 2007-10-04
US8063245B2 (en) 2011-11-22

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