WO2003015154A1 - Procede et support de carte sonde - Google Patents

Procede et support de carte sonde Download PDF

Info

Publication number
WO2003015154A1
WO2003015154A1 PCT/JP2002/005216 JP0205216W WO03015154A1 WO 2003015154 A1 WO2003015154 A1 WO 2003015154A1 JP 0205216 W JP0205216 W JP 0205216W WO 03015154 A1 WO03015154 A1 WO 03015154A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe card
carrier
carrying
probe
card carrier
Prior art date
Application number
PCT/JP2002/005216
Other languages
English (en)
French (fr)
Inventor
Masaru Suzuki
Original Assignee
Tokyo Electron Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Limited filed Critical Tokyo Electron Limited
Priority to KR1020037004505A priority Critical patent/KR100886988B1/ko
Priority to US10/380,966 priority patent/US6838892B2/en
Publication of WO2003015154A1 publication Critical patent/WO2003015154A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B23Q7/1426—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with work holders not rigidly fixed to the transport devices
    • B23Q7/1442—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with work holders not rigidly fixed to the transport devices using carts carrying work holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mechanical Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
PCT/JP2002/005216 2001-08-07 2002-05-29 Procede et support de carte sonde WO2003015154A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020037004505A KR100886988B1 (ko) 2001-08-07 2002-05-29 프로브 카드 반송 장치 및 방법
US10/380,966 US6838892B2 (en) 2001-08-07 2002-05-29 Probe card carrier and method of carrying probe card

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-239742 2001-08-07
JP2001239742A JP4798595B2 (ja) 2001-08-07 2001-08-07 プローブカード搬送装置及びプローブカード搬送方法

Publications (1)

Publication Number Publication Date
WO2003015154A1 true WO2003015154A1 (fr) 2003-02-20

Family

ID=19070444

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/005216 WO2003015154A1 (fr) 2001-08-07 2002-05-29 Procede et support de carte sonde

Country Status (5)

Country Link
US (1) US6838892B2 (ja)
JP (1) JP4798595B2 (ja)
KR (1) KR100886988B1 (ja)
TW (1) TW544745B (ja)
WO (1) WO2003015154A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI396245B (zh) * 2005-12-15 2013-05-11 Tokyo Electron Ltd A probe card loading method and a probe card transfer assisting device used in the present method
TWI410632B (zh) * 2005-09-21 2013-10-01 Tokyo Electron Ltd Probe card loading support device, testing equipment and detection methods

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4391744B2 (ja) * 2002-12-27 2009-12-24 東京エレクトロン株式会社 移動式プローブカード搬送装置、プローブ装置及びプローブ装置へのプローブカードの搬送方法
US6833717B1 (en) * 2004-02-12 2004-12-21 Applied Materials, Inc. Electron beam test system with integrated substrate transfer module
JP2007147536A (ja) * 2005-11-30 2007-06-14 Tokyo Electron Ltd プローブカード移載補助装置及び検査設備
US20100013508A1 (en) * 2006-08-09 2010-01-21 Shiro Nozaki Probe card cassette and probe card
JP4294684B2 (ja) * 2006-12-26 2009-07-15 株式会社協同 プローブ受渡し装置
KR100833285B1 (ko) * 2006-12-27 2008-05-28 세크론 주식회사 프로브카드 운반장치
JP5088167B2 (ja) * 2008-02-22 2012-12-05 東京エレクトロン株式会社 プローブ装置、プロービング方法及び記憶媒体
US7683647B1 (en) * 2008-09-05 2010-03-23 Keithley Instruments, Inc. Instrument per pin test head
JP2010271655A (ja) * 2009-05-25 2010-12-02 Shimadzu Corp プローバフレーム搬送台車およびプローバフレームハンドリングシステム
KR101278890B1 (ko) * 2009-07-30 2013-06-26 가부시키가이샤 아드반테스트 프로브카드 홀딩장치 및 프로버
JP5517344B2 (ja) * 2010-02-12 2014-06-11 東京エレクトロン株式会社 プローブカードの搬送機構、プローブカードの搬送方法及びプローブ装置
TW201237419A (en) * 2011-03-09 2012-09-16 Signality System Engineering Co Ltd Testing board carrier
KR20120110612A (ko) * 2011-03-30 2012-10-10 삼성전자주식회사 핸들러 트레이 및 이를 포함하는 테스트 시스템
CN103008265A (zh) * 2011-09-21 2013-04-03 旺矽科技股份有限公司 探针清洁装置以及使用其的在线探针清洁方法
KR20130044484A (ko) * 2011-10-24 2013-05-03 삼성전자주식회사 프로브 카드 핸들링 대차
US20130200915A1 (en) * 2012-02-06 2013-08-08 Peter G. Panagas Test System with Test Trays and Automated Test Tray Handling
JP6116992B2 (ja) * 2013-05-07 2017-04-19 日置電機株式会社 回路基板検査装置
DE102013109055A1 (de) * 2013-08-21 2015-02-26 Turbodynamics Gmbh Ausrichteinrichtung und Handhabungsvorrichtung
KR102338464B1 (ko) 2015-01-08 2021-12-15 삼성전자주식회사 운반물 반송 유닛, 그를 포함하는 운반물 관리 장치
CN105417147B (zh) * 2015-12-25 2017-10-10 福建联迪商用设备有限公司 一种二维码卡抓取存放装置及其方法
KR102568707B1 (ko) * 2018-03-02 2023-08-22 삼성전자주식회사 다단적재 구조를 가지는 무인운반장치
JP7310345B2 (ja) * 2019-06-17 2023-07-19 ニデックアドバンステクノロジー株式会社 検査装置
KR102480726B1 (ko) * 2020-12-31 2022-12-26 주식회사 쎄믹스 프로브 카드 체인저가 구비된 프로버 시스템
DE102023130896A1 (de) 2022-11-08 2024-05-08 Turbodynamics Gmbh Handhabungsvorrichtung zum Transportieren von Schnittstelleneinheiten für eine Testvorrichtung zum Testen von Halbleitern
TWI835675B (zh) * 2023-06-20 2024-03-11 京元電子股份有限公司 自動化探針卡取放裝置及其控制方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62169341A (ja) * 1986-01-21 1987-07-25 Tokyo Electron Ltd プロ−ブカ−ド自動交換プロ−バ
JPH05136219A (ja) * 1991-03-05 1993-06-01 Tokyo Electron Ltd 検査装置
JPH05175290A (ja) * 1991-12-20 1993-07-13 Tokyo Electron Ltd プローブ装置

Family Cites Families (12)

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US4864227A (en) * 1987-02-27 1989-09-05 Canon Kabushiki Kaisha Wafer prober
JPH021141A (ja) 1988-03-01 1990-01-05 Tokyo Electron Ltd プローブ装置
US5148103A (en) * 1990-10-31 1992-09-15 Hughes Aircraft Company Apparatus for testing integrated circuits
JP2868656B2 (ja) 1991-11-08 1999-03-10 東京エレクトロン株式会社 プローブ装置
JPH05136223A (ja) * 1991-11-08 1993-06-01 Tokyo Electron Yamanashi Kk プローブ装置
JP2606554Y2 (ja) * 1992-01-17 2000-11-27 株式会社東京精密 プロービング装置
US5254939A (en) * 1992-03-20 1993-10-19 Xandex, Inc. Probe card system
US5550482A (en) * 1993-07-20 1996-08-27 Tokyo Electron Kabushiki Kaisha Probe device
US5528158A (en) * 1994-04-11 1996-06-18 Xandex, Inc. Probe card changer system and method
JPH11304884A (ja) * 1998-04-24 1999-11-05 Micronics Japan Co Ltd 大型回路板用プローバ
JP4104099B2 (ja) * 1999-07-09 2008-06-18 東京エレクトロン株式会社 プローブカード搬送機構
JP3783075B2 (ja) * 2001-12-13 2006-06-07 東京エレクトロン株式会社 プローブ装置及びローダ装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62169341A (ja) * 1986-01-21 1987-07-25 Tokyo Electron Ltd プロ−ブカ−ド自動交換プロ−バ
JPH05136219A (ja) * 1991-03-05 1993-06-01 Tokyo Electron Ltd 検査装置
JPH05175290A (ja) * 1991-12-20 1993-07-13 Tokyo Electron Ltd プローブ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI410632B (zh) * 2005-09-21 2013-10-01 Tokyo Electron Ltd Probe card loading support device, testing equipment and detection methods
TWI396245B (zh) * 2005-12-15 2013-05-11 Tokyo Electron Ltd A probe card loading method and a probe card transfer assisting device used in the present method

Also Published As

Publication number Publication date
KR100886988B1 (ko) 2009-03-04
US6838892B2 (en) 2005-01-04
JP4798595B2 (ja) 2011-10-19
US20030178987A1 (en) 2003-09-25
JP2003051519A (ja) 2003-02-21
KR20040020863A (ko) 2004-03-09
TW544745B (en) 2003-08-01

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