WO2003010603A1 - Positive type radiosensitive composition and method for forming pattern - Google Patents

Positive type radiosensitive composition and method for forming pattern Download PDF

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Publication number
WO2003010603A1
WO2003010603A1 PCT/JP2002/007343 JP0207343W WO03010603A1 WO 2003010603 A1 WO2003010603 A1 WO 2003010603A1 JP 0207343 W JP0207343 W JP 0207343W WO 03010603 A1 WO03010603 A1 WO 03010603A1
Authority
WO
WIPO (PCT)
Prior art keywords
positive type
group
hydrolyzable
forming pattern
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2002/007343
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Kentarou Tamaki
Tomohiro Utaka
Akira Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
JSR Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JSR Corp filed Critical JSR Corp
Priority to EP02751650A priority Critical patent/EP1411390A4/en
Priority to US10/484,716 priority patent/US7005231B2/en
Priority to KR1020047000936A priority patent/KR100817377B1/ko
Priority to JP2003515916A priority patent/JP3882816B2/ja
Publication of WO2003010603A1 publication Critical patent/WO2003010603A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1347—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion implantation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0755—Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/121—Channel; buried or the like

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Silicon Polymers (AREA)
PCT/JP2002/007343 2001-07-24 2002-07-19 Positive type radiosensitive composition and method for forming pattern Ceased WO2003010603A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP02751650A EP1411390A4 (en) 2001-07-24 2002-07-19 RADIATION SENSITIVE COMPOSITION OF THE POSITIVE TYPE AND METHOD FOR FORMING A STRUCTURE
US10/484,716 US7005231B2 (en) 2001-07-24 2002-07-19 Positive type radiosensitive composition and method for forming pattern
KR1020047000936A KR100817377B1 (ko) 2001-07-24 2002-07-19 포지티브형 감방사선성 조성물 및 패턴 형성 방법
JP2003515916A JP3882816B2 (ja) 2001-07-24 2002-07-19 ポジ型感放射線性組成物およびパターン形成方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001222706 2001-07-24
JP2001-222706 2001-07-24
JP2001352419 2001-11-16
JP2001-352419 2001-11-16

Publications (1)

Publication Number Publication Date
WO2003010603A1 true WO2003010603A1 (en) 2003-02-06

Family

ID=26619157

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/007343 Ceased WO2003010603A1 (en) 2001-07-24 2002-07-19 Positive type radiosensitive composition and method for forming pattern

Country Status (7)

Country Link
US (1) US7005231B2 (enExample)
EP (1) EP1411390A4 (enExample)
JP (1) JP3882816B2 (enExample)
KR (1) KR100817377B1 (enExample)
CN (1) CN1238766C (enExample)
TW (1) TWI300516B (enExample)
WO (1) WO2003010603A1 (enExample)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004295104A (ja) * 2003-03-03 2004-10-21 Rohm & Haas Electronic Materials Llc ポリマー、およびそれを含むフォトレジスト
JP2005181638A (ja) * 2003-12-18 2005-07-07 Kyocera Corp シロキサンポリマ皮膜形成方法および光導波路
JP2005325344A (ja) * 2004-04-14 2005-11-24 Rohm & Haas Electronic Materials Llc 導波路組成物およびそれより形成された導波路
JP2006139083A (ja) * 2004-11-12 2006-06-01 Sekisui Chem Co Ltd 感光性樹脂組成物、薄膜パターン形成方法及び電子機器用絶縁膜
EP1605021A4 (en) * 2003-03-18 2007-09-12 Jsr Corp RADIATION-CURABLE COMPOSITION, OPTICAL WAVEGUIDE AND FORMATION METHOD THEREOF
JP2008023715A (ja) * 2006-07-18 2008-02-07 Canon Inc 液体吐出ヘッドおよびその製造方法
US7366381B2 (en) 2003-03-31 2008-04-29 Jsr Corporation Optical waveguide chip and optical component comprising same
JP2008122916A (ja) * 2006-10-16 2008-05-29 Hitachi Chem Co Ltd 感光性樹脂組成物、シリカ系被膜の形成方法、及びシリカ系被膜を備える装置及び部材
JP2011209694A (ja) * 2010-03-30 2011-10-20 Sam Xunyun Sun マイクロフォトリソグラフィ用の多階調の感光性ハードマスク
JP2012237778A (ja) * 2011-05-10 2012-12-06 Adeka Corp 光路変換機能を有する光導波路の製造方法
WO2014087998A1 (ja) * 2012-12-07 2014-06-12 Ｄｓｐ五協フード＆ケミカル株式会社 新規なスルホニウム塩化合物、その製造方法及び光酸発生剤
JP2014114225A (ja) * 2012-12-07 2014-06-26 Dsp Gokyo Food & Chemical Co Ltd 新規スルホニウム塩、その製造方法、及び、光酸発生剤

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KR100870020B1 (ko) * 2002-10-04 2008-11-21 삼성전자주식회사 용해 특성을 조절하는 감광성 수지 조성물 및 이를 이용한이층 구조의 패턴 형성 방법
KR100564565B1 (ko) * 2002-11-14 2006-03-28 삼성전자주식회사 실리콘을 함유하는 폴리머 및 이를 포함하는 네가티브형레지스트 조성물과 이들을 이용한 반도체 소자의 패턴형성 방법
JP4379596B2 (ja) * 2004-06-10 2009-12-09 信越化学工業株式会社 犠牲膜形成用組成物、パターン形成方法、犠牲膜及びその除去方法
JP2006030919A (ja) * 2004-07-22 2006-02-02 Kansai Paint Co Ltd 光導波路の作成方法
US20070299176A1 (en) * 2005-01-28 2007-12-27 Markley Thomas J Photodefinable low dielectric constant material and method for making and using same
TWI391454B (zh) * 2005-06-17 2013-04-01 Nissan Chemical Ind Ltd 用於形成膜之塗覆流體及其膜與形成膜之方法
US7618683B2 (en) * 2006-01-12 2009-11-17 Fujifilm Corporation Ink composition, inkjet recording method, printed material, process for producing lithographic printing plate, and lithographic printing plate
US8329774B2 (en) * 2008-01-15 2012-12-11 Toagosei Co., Ltd. Organosilicon compounds which have oxetanyl groups, and a method for the production and curable compositions of the same
JP5047057B2 (ja) * 2008-05-20 2012-10-10 東洋インキＳｃホールディングス株式会社 カラーフィルタ用感光性着色組成物及びカラーフィルタ
TWI459131B (zh) * 2008-05-20 2014-11-01 Toyo Ink Mfg Co 彩色濾光片用感光性著色組成物及彩色濾光片
JP5459211B2 (ja) * 2008-07-17 2014-04-02 Ｊｓｒ株式会社 第１膜の改質方法及びこれに用いる酸転写樹脂膜形成用組成物
JP4960330B2 (ja) * 2008-10-21 2012-06-27 株式会社Ａｄｅｋａ ポジ型感光性組成物及び永久レジスト
EP2371879B1 (en) * 2008-12-26 2013-10-02 Toagosei Co., Ltd Process for producing silicon compound having oxetanyl group
JP5423367B2 (ja) * 2009-01-23 2014-02-19 Ｊｓｒ株式会社 酸転写用組成物、酸転写用膜及びパターン形成方法
JP5504823B2 (ja) * 2009-10-28 2014-05-28 Ｊｓｒ株式会社 感放射線性組成物、保護膜、層間絶縁膜、及びそれらの形成方法
KR101759251B1 (ko) 2009-12-21 2017-07-18 다우 코닝 코포레이션 알킬-작용성 실세스퀴옥산 수지를 이용하여 가요성 도파관을 제조하는 방법
KR101804344B1 (ko) 2011-05-25 2017-12-04 다우 코닝 코포레이션 에폭시－작용성 실록산 올리고머를 함유하는 에폭시－작용성 방사선－경화성 조성물
CN104011596A (zh) * 2011-12-26 2014-08-27 东丽株式会社 感光性树脂组合物和半导体元件的制造方法
CN103809374B (zh) * 2012-11-02 2019-11-05 日铁化学材料株式会社 触摸面板用遮光性组合物和触摸面板
JP5997041B2 (ja) * 2012-12-26 2016-09-21 東京応化工業株式会社 感光性樹脂組成物
KR102357133B1 (ko) * 2014-02-21 2022-01-28 도쿄엘렉트론가부시키가이샤 광증감 화학 증폭형 레지스트 재료 및 이를 이용한 패턴 형성 방법, 반도체 디바이스, 리소그래피용 마스크와, 나노임프린트용 템플릿
CN104635300A (zh) * 2015-02-13 2015-05-20 云南师范大学 一种环氧树脂多模光波导的制备方法

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Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011103014A (ja) * 2003-03-03 2011-05-26 Rohm & Haas Electronic Materials Llc ポリマー、およびそれを含むフォトレジスト
JP2004295104A (ja) * 2003-03-03 2004-10-21 Rohm & Haas Electronic Materials Llc ポリマー、およびそれを含むフォトレジスト
EP1605021A4 (en) * 2003-03-18 2007-09-12 Jsr Corp RADIATION-CURABLE COMPOSITION, OPTICAL WAVEGUIDE AND FORMATION METHOD THEREOF
US7366381B2 (en) 2003-03-31 2008-04-29 Jsr Corporation Optical waveguide chip and optical component comprising same
CN100385276C (zh) * 2003-03-31 2008-04-30 Jsr株式会社 光波导芯片以及含有该芯片的光学元件
JP2005181638A (ja) * 2003-12-18 2005-07-07 Kyocera Corp シロキサンポリマ皮膜形成方法および光導波路
JP2005325344A (ja) * 2004-04-14 2005-11-24 Rohm & Haas Electronic Materials Llc 導波路組成物およびそれより形成された導波路
JP2006139083A (ja) * 2004-11-12 2006-06-01 Sekisui Chem Co Ltd 感光性樹脂組成物、薄膜パターン形成方法及び電子機器用絶縁膜
JP2008023715A (ja) * 2006-07-18 2008-02-07 Canon Inc 液体吐出ヘッドおよびその製造方法
JP2008122916A (ja) * 2006-10-16 2008-05-29 Hitachi Chem Co Ltd 感光性樹脂組成物、シリカ系被膜の形成方法、及びシリカ系被膜を備える装置及び部材
JP2011209694A (ja) * 2010-03-30 2011-10-20 Sam Xunyun Sun マイクロフォトリソグラフィ用の多階調の感光性ハードマスク
JP2012237778A (ja) * 2011-05-10 2012-12-06 Adeka Corp 光路変換機能を有する光導波路の製造方法
WO2014087998A1 (ja) * 2012-12-07 2014-06-12 Ｄｓｐ五協フード＆ケミカル株式会社 新規なスルホニウム塩化合物、その製造方法及び光酸発生剤
JP2014114225A (ja) * 2012-12-07 2014-06-26 Dsp Gokyo Food & Chemical Co Ltd 新規スルホニウム塩、その製造方法、及び、光酸発生剤
KR20150092176A (ko) * 2012-12-07 2015-08-12 디에스피 고쿄 후도 ＆ 케미카루 가부시키가이샤 신규한 술포늄염 화합물, 그 제조 방법 및 광산발생제
US9465288B2 (en) 2012-12-07 2016-10-11 Dsp Gokyo Food & Chemical Co., Ltd. Sulfonium salt compound, method for producing the same, and photoacid generator
JPWO2014087998A1 (ja) * 2012-12-07 2017-01-05 Ｄｓｐ五協フード＆ケミカル株式会社 新規なスルホニウム塩化合物、その製造方法及び光酸発生剤
KR102047349B1 (ko) 2012-12-07 2019-11-21 디에스피 고쿄 후도 ＆ 케미카루 가부시키가이샤 신규한 술포늄염 화합물, 그 제조 방법 및 광산발생제

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EP1411390A1 (en) 2004-04-21
KR20040030834A (ko) 2004-04-09
CN1507580A (zh) 2004-06-23
EP1411390A4 (en) 2010-12-08
US20040197698A1 (en) 2004-10-07
CN1238766C (zh) 2006-01-25
US7005231B2 (en) 2006-02-28
KR100817377B1 (ko) 2008-03-27
JP3882816B2 (ja) 2007-02-21
JPWO2003010603A1 (ja) 2004-11-18
TWI300516B (enExample) 2008-09-01

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