WO1994023951A1 - Thin film forming apparatus and thin film forming method - Google Patents

Thin film forming apparatus and thin film forming method Download PDF

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Publication number
WO1994023951A1
WO1994023951A1 PCT/JP1994/000630 JP9400630W WO9423951A1 WO 1994023951 A1 WO1994023951 A1 WO 1994023951A1 JP 9400630 W JP9400630 W JP 9400630W WO 9423951 A1 WO9423951 A1 WO 9423951A1
Authority
WO
WIPO (PCT)
Prior art keywords
wiper
elastic plate
roll
printing
plate
Prior art date
Application number
PCT/JP1994/000630
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Yasuhiro Hashimura
Satoshi Noguchi
Kenichi Masaki
Takahiro Akai
Original Assignee
Nissha Printing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP11380993A external-priority patent/JP3300467B2/ja
Priority claimed from JP11381093A external-priority patent/JP3288126B2/ja
Priority claimed from JP11381193A external-priority patent/JP3288127B2/ja
Application filed by Nissha Printing Co., Ltd. filed Critical Nissha Printing Co., Ltd.
Priority to DE69420721T priority Critical patent/DE69420721T2/de
Priority to KR1019950704445A priority patent/KR100210523B1/ko
Priority to EP94912687A priority patent/EP0700780B1/de
Publication of WO1994023951A1 publication Critical patent/WO1994023951A1/ja

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F9/00Rotary intaglio printing presses
    • B41F9/06Details
    • B41F9/08Wiping mechanisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F9/00Rotary intaglio printing presses
    • B41F9/06Details
    • B41F9/08Wiping mechanisms
    • B41F9/16Removing or recovering ink from wiping mechanisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F27/00Devices for attaching printing elements or formes to supports
    • B41F27/12Devices for attaching printing elements or formes to supports for attaching flexible printing formes
    • B41F27/1206Feeding to or removing from the forme cylinder
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F9/00Rotary intaglio printing presses
    • B41F9/01Rotary intaglio printing presses for indirect printing

Definitions

  • the present invention provides, as an apparatus for forming a polymer thin film pattern used for an electronic component such as a liquid crystal alignment film, for example, an intaglio roll having a large number of ink cells, an ink supply means for filling the ink cells with the ink, and the intaglio roll.
  • an intaglio roll having a large number of ink cells
  • an ink supply means for filling the ink cells with the ink
  • the intaglio roll A printing roll having an elastic plate to which the ink of the printing roll is transferred on the plate cylinder; a printing table for fixing the printing medium to which the printing roll of the printing roll is transferred; and the filling of the ink into the ink cells of the intaglio roll.
  • the present invention relates to a thin film forming apparatus having a doctor blade for performing the above operation, and a robot acting on the printing roll and the intaglio roll, and a thin film forming method for forming a thin film using the thin film forming apparatus. More specifically, the present invention provides
  • the doctor blade is easily wiped and / or dried, and the doctor blade is automatically pinched by the predetermined pinching pressure by the piper, and the doctor blade is automatically wiped or Z and dried.
  • the present invention also relates to a thin film forming apparatus and a thin film forming method capable of performing at least one of the following steps. Background art
  • a positioning mark provided at a plurality of positions of the elastic plate and a plurality of positioning marks provided at the print roll plate cylinder are provided.
  • the reference mark is positioned by hand and eyes, and the elastic plate is pulled by hand and wound around the printing roll plate cylinder.
  • the plate holders attached to both ends of the elastic plate are hooked and fixed to the chuck means attached to the printing roll plate cylinder by hand.
  • ink is filled into a number of ink cells of the intaglio roll by the ink supply means, the ink is transferred from the intaglio roll to the elastic plate of the printing roll, and the ink is transferred from the printing roll to the printing medium fixed to the printing table. Transfer and print.
  • the intaglio roll normally, all of the ink filled in the ink cells of the intaglio roll is not transferred to the printing roll, and some ink remains in the ink cells of the intaglio roll. If left as it is, the remaining ink will dry or harden to become an ink solid and stick to the back of the ink cell. If the intaglio roll is used while it is still sticking, the ink that has stuck to the intaglio roller will re-dissolve in the new ink, or the ink solids will fall off and mix with the new ink supplied to the intaglio roll. Will be printed. In addition, sticking inside the ink cell The amount of ink transferred to the print rolls is reduced by the reduced ink cell capacity due to the used ink.
  • the ink remaining in the ink cells of the intaglio roll is wiped off, but all the work is done manually.
  • a wiper impregnated with a solvent that dissolves ink is pressed against the surface of the body of the intaglio roll by a human hand at a predetermined contact pressure. The roll is moved along the axis of the intaglio roll while rotating.
  • the intaglio roll is dried in order to remove the solvent and the like remaining on the surface of the body of the intaglio roll.
  • a state was set in which a predetermined distance was left between the gas blowing means for injecting the intaglio roll drying gas by hand and the body surface of the intaglio roll.
  • the intaglio roll is moved along the axial direction of the intaglio roll by hand while rotating while rotating the intaglio roll.
  • ink is filled into the ink cells of the intaglio roll by the ink supply device, the ink is transferred from the intaglio roll to the elastic plate of the printing roll, and the ink is transferred from the printing roll to the printing medium fixed to the printing table. Transfer and print.
  • the doctor blade is a plate-like body, and is attached to a doctor blade support rod attached to a rack (see FIG. 27).
  • the doctor blade has the function of scraping the plate cylinder surface of the rotating intaglio roll, ensuring that the ink in the intaglio roll is filled with ink, and then weighing the ink. It dries or hardens to become a solid, which sticks to the doctor blade. If a doctor blade is used while it is sticking, the ink sticking to the doctor blade may dissolve again in the new ink, or the solid ink may fall off and become concave. Since it mixes with the new ink supplied to the plate roll, printing is performed with the deteriorated ink. In addition, since the tip of the doctor blade becomes uneven due to the sticking ink, wiping unevenness occurs, and it is not possible to reliably fill and measure all the ink cells of the intaglio roll.
  • the ink on the doctor blade has been wiped off, but it is all done manually.
  • first hold the wiper impregnated with the solvent in a person's hand pinch the doctor blade with a predetermined pinching pressure, and move the doctor blade along the longitudinal direction of the doctor blade with the pinched. Let me.
  • the doctor blade is manually dried to remove any residual solvent from the doctor blade.
  • the gas ejection means from which the gas for drying the doctor blade is ejected is set at a predetermined distance between the doctor blade and the gas ejection means by human hands, and gas is sprayed onto the surface of the doctor blade. It is moved along the length of the doctor blade by hand.
  • the ink supply device fills the ink into a number of ink cells of the intaglio roll, transfers the ink from the intaglio roll to the elastic plate of the printing roll, and transfers the ink from the printing roll to the printing medium fixed to the printing table. Transfer and print.
  • Such a conventional thin film forming apparatus has the following problems.
  • the elastic plate Since the elastic plate is wound around the printing roll plate cylinder while being pulled by hand, while the elastic plate is wound around the printing roll plate cylinder, the elastic plate is of a predetermined size over the entire width of the elastic plate. It is very difficult to achieve tension in the direction. If the work is not performed with as much injection window as possible, the elastic plate will be wound around the printing roll cylinder without correcting the excessive tension and slack on the entire elastic plate to be wound. As a result, the elastic plate may be attached to the printing roll plate cylinder while excessive tension is being applied, or the elastic plate may be attached to the printing roll plate cylinder while the elastic plate is wrinkled or wavy.
  • ink stuck to the intaglio roll mixes with the new ink supplied to the intaglio roll. It will be inconvenient.
  • the transfer amount of the ink to the printing roll is reduced accordingly, and a thin film having a sufficient thickness cannot be formed on the printing medium.
  • the solvent used for wiping will be mixed as impurities into the new ink supplied to the intaglio roll. Therefore, using such an ink, for example, a liquid crystal alignment film When a polymer thin film pattern is formed, the insulating properties are reduced, and the film thickness and orientation are uneven, causing a problem that the function of the thin film is reduced.
  • Wiping is performed while holding the wiper in the hands of the doctor blade while pinching the doctor blade.
  • the doctor blade is pinched by the wiper at a predetermined pinching pressure, and the wiper is moved while the wiper is moved in the longitudinal direction of the doctor blade. It is extremely difficult to maintain the pinch pressure, and the pinch pressure will increase or decrease. As a result, sufficient and insufficient wiping is created, and the residual ink stuck to the doctor blade cannot be sufficiently removed. Also, the doctor blade cannot be wiped uniformly.
  • the ink is filled and weighed with a doctor blade that has not been sufficiently wiped, the ink sticking to the doctor blade will be mixed with the new ink supplied to the intaglio roll. The ink will be mixed. In addition, if the tip of the doctor blade becomes uneven, wiping unevenness occurs, and the filling meter S cannot be surely filled in all the ink cells of the intaglio roll.
  • the tip of the doctor blade will be uneven due to the sticking ink, and there will be places where ink can be filled well in the ink tank and places where ink cannot be filled.
  • the unevenness occurs in the filling amount of the ink, and the film thickness is not uniform. Therefore, for example, when a polymer thin film pattern such as a liquid crystal alignment film is formed, the uniformity of the film thickness deteriorates, causing display unevenness and causing a problem that the function of the thin film deteriorates.
  • an object of the present invention is to solve the above-mentioned drawbacks, and to improve the function of a thin film and improve the work efficiency by automating a print preparation operation without human intervention.
  • the purpose of the present invention is to provide an apparatus and a method for forming a thin film.
  • an intaglio roll having a plurality of ink cells, an ink supply unit for filling the ink cells with ink, a doctor blade for wiping a plate cylinder surface of the intaglio roll, What is claimed is: 1.
  • a thin film forming apparatus comprising: a printing roll having a printing roll on which an elastic plate to which an intaglio roll is transferred is wound around a plate cylinder; and a printing table for fixing a printing medium to which the printing roll is transferred.
  • An articulated robot installed adjacent to the printing device,
  • the printing preparation work can be automated without human intervention, and the function of the thin film can be improved, the work efficiency can be improved, and the like.
  • FIG. 1 is a perspective view showing a first embodiment of the thin film forming apparatus of the present invention
  • FIG. 2 is a side view showing a printing unit of the thin film forming apparatus
  • FIG. It is an explanatory view showing an elastic plate automatic installation and removal device part of
  • FIG. 4 is an explanatory view showing an elastic plate automatic attachment / detachment unit of the thin film forming apparatus.
  • FIG. 5 is an explanatory view showing an elastic plate automatic attachment / detachment unit of the thin film forming apparatus.
  • FIG. 6 is an explanatory view showing an elastic plate automatic attachment / detachment unit of the thin film forming apparatus,
  • FIG. 4 is an explanatory diagram showing an elastic plate automatic attachment / detachment unit of the thin film forming apparatus
  • FIG. 8 is an enlarged cross-sectional explanatory view of a main part of a modification of the elastic plate automatic attachment / detachment unit of the thin film forming apparatus.
  • FIG. 9 is a top view of FIG.
  • FIG. 10 is a top view of FIG. 9 in which the tension direction of the elastic plate is adjusted.
  • FIG. 11 is an enlarged view of an essential part of an elastic plate and a plate holder used for automatic attachment and detachment of an elastic plate in one embodiment of the thin film forming method of the present invention
  • FIG. 12 is an explanatory view of the state of the elastic plate when the elastic plate is attached in the conventional thin film forming method.
  • FIG. 13 is an explanatory view of the above-described embodiment of the thin film forming method of the present invention in a state where the elastic plate is stretched so as to eliminate slack.
  • FIG. 14 is an explanatory view of the state of the elastic plate when the elastic plate is attached in the conventional thin film forming method.
  • FIG. 15 is an explanatory view of the above-described embodiment of the thin film forming method of the present invention in a state where the elastic plate is stretched so as to eliminate slack.
  • FIG. 16 is a diagram showing another configuration example of the fixed chuck means, the tension chuck means, the first chuck means, and the second chuck means in the thin film forming apparatus.
  • FIG. 17 shows control of the thin film forming apparatus.
  • FIG. 18 is a block diagram of a circuit portion, and FIG. 18 is a flowchart of attaching an elastic plate to a printing roll plate cylinder in the thin film forming apparatus of the present embodiment.
  • FIG. 19 is a perspective view showing a second embodiment of the thin film forming apparatus of the present invention.
  • FIG. 20 is an intaglio roll automatic wiping unit of the thin film forming apparatus of the second embodiment.
  • FIG. 20 is an intaglio roll automatic wiping unit of the thin film forming apparatus of the second embodiment.
  • FIG. 21 is an explanatory view showing the trajectory of the wiper holder means of the intaglio roll automatic wiping unit moving while contacting the plate cylinder surface of the intaglio roll.
  • FIG. 22 is an intaglio roll automatic wiping unit. It is a principal part enlarged sectional explanatory view of the modification of FIG.
  • FIG. 23 is a sectional view taken along line X-X of FIG.
  • FIG. 24 is a schematic view showing a state in which the elastic plate automatic attaching / removing means and the wiper holder means for wiping the doctor blade are attached to the intaglio roll automatic wiping device.
  • FIG. 25 is a perspective view showing a third embodiment of the thin film forming apparatus of the present invention
  • FIG. 26 is an explanatory side view showing a doctor blade automatic wiping unit of the thin film forming apparatus.
  • Figure 27 is a top view of Figure 26,
  • FIG. 28 is an enlarged side explanatory view of a main part of a modification of the doctor blade automatic wiping device of the thin film forming apparatus.
  • FIG. 29 is a front view showing a state where the upper chuck and the lower chuck of the doctor blade automatic wiping device shown in FIG. 28 are separated from each other;
  • FIG. 30 is a front view showing a state in which the upper chuck and the lower chuck of the doctor blade automatic wiping device shown in FIG.
  • FIG. 31 is a diagram showing a conventional thin film forming apparatus.
  • the elastic plate is automatically attached and detached by using the hand attached to the arm of the articulated robot in the elastic plate automatic attaching and detaching device, and then the printing device is mounted. Since a thin film is formed on the printing medium in the printing section, the elastic plate can be automatically attached to the printing roll plate cylinder, and the elastic plate can be automatically removed after printing, thus forming a thin film. Since the entire series of steps can be performed smoothly, the efficiency of thin film formation is improved.
  • the elastic plate automatic installation and removal device automatically moves the rod back and forth from the air cylinder body of the elastic plate tension adjusting means, and adjusts the distance between the hand body and the tension chuck means. After the elastic plate is attached to the printing roll plate cylinder while automatically adjusting the tension of the printing plate, a thin film is formed on the printing body by the printing device.
  • the elastic plate does not become wrinkled or wavy, but can be attached neatly to the printing plate cylinder. Therefore, even if the ink is transferred to the elastic plate and then transferred to the printing substrate, there is no difference in the amount of transfer, and a thin film of uniform thickness is printed on the printing substrate. Can be formed.
  • the tension applied to the elastic plate is a combined force of the force for pulling the elastic plate by the rotation of the printing roll plate cylinder and the force for pulling the elastic plate in reverse by the rod of the air cylinder.
  • the magnitude of the distance between the main body of the elastic plate automatic attachment / detachment device of the present invention and the tension chuck means automatically changes in accordance with the magnitude of the tension applied to the elastic plate.
  • the tension applied to the elastic plate becomes a predetermined value.
  • the rod retreats to the air cylinder body, reducing the distance between the elastic plate tension adjustment means and the tension chuck means.
  • the tension applied to the elastic printing plate becomes a predetermined value.
  • the rod advances from the lower cylinder body to increase the distance between the elastic plate tension adjustment means and the tension chuck means in order to get smaller and recover the smaller amount.
  • the elastic plate automatic mounting / removing device rotates the elastic plate tension adjusting means or the tension chuck means with respect to the hand main body, and adjusts the angle of pulling the elastic plate by the tension chuck means, thereby adjusting the elastic plate.
  • the elastic plate is attached to the printing roll plate cylinder while automatically adjusting the pulling direction, and then a thin film is formed on the printing medium by the printing device.
  • the elastic plate does not become wrinkled or wavy, but can be attached neatly to the printing plate cylinder. Therefore, even if the ink is transferred to the elastic plate and further transferred to the printing medium, there is no difference in the transfer amount, and a thin film having a uniform film thickness can be formed on the printing medium.
  • the direction in which the elastic plate is pulled by the tension chuck means is automatically adjusted according to the slack generated in a part of the elastic plate.
  • the elastic plate is not pulled while (A) the first plate holder and the second plate holder of the elastic plate are not slightly parallel or so-called tilted, a part of the elastic plate will sag. If the tension can not be stretched (see Fig. 12), the tension chuck means is rotated to the right by the amount of the tilt deviation with respect to the hand body around the tension chuck means rotation ⁇ , and the elastic plate is in tension. (See Fig. 13 o
  • the elastic plate tension adjusting means is rotated to the left by the required angle about the rotation axis of the mounting means with respect to the hand body. Further, the tension chuck means is rotated to the right by a required angle around the rotation axis of the tension chuck means with respect to the bearing body of the elastic plate tension adjusting means, so that the first plate holder and the second plate holder become parallel. (See Fig. 10), but the elastic plate becomes taut (see Fig. 15).
  • the elastic plate automatic mounting / removing device 101 has a hand 105 mounted on an arm 60 of an articulated robot 6.
  • the articulated robot 6 is a general-purpose industrial robot, and a plurality of arms 60 are connected to be able to freely bend horizontally and vertically via a joint 61. That is, the articulated robot 6 may be a horizontal articulated robot, a vertical articulated robot, or an orthogonal robot.
  • a hand 105 is attached to one end of an arm group in which a plurality of arms 60 are gathered, and the other end is structured to be supported by a robot base 62.
  • the joint 61 is a part that bends and drives the arm 60 in multiple steps or steplessly by hydraulic pressure, water pressure, or a motor.
  • the robot base 62 is a part that drives the group of arms in a vertical direction in multiple steps or steplessly by hydraulic pressure, water pressure, or a motor.
  • the hand 105 has a hand body 1, a fixed chuck means 102, a tension chuck means 103, and an elastic plate tension adjusting means 104 (see FIGS. 1 and 3). .
  • the hand body 1 is a rectangular plate body having an appropriate thickness, and an arm 60 of the articulated robot 6 is fixed to a center portion of the surface thereof, and the arm 60 of the articulated robot 6 is driven. Thus, it is possible to move freely such as up, down, left, right and rotation around the arm 60. Further, the hand main body 1 can be provided with a mounting means 140 shown in FIG.
  • the elastic plate 7 attached circumferentially to the plate cylinder surface of the cylindrical printing roll plate cylinder 108 is a soft plate made of rubber, nap resin, etc., and has a desired surface. It may be a relief plate in which a convex portion is formed at the same time, or an intaglio plate or a planographic plate.
  • Both ends in the circumferential direction are held by a first plate holder 170 and a second plate holder 171.
  • the 1st edition holder 1 ⁇ 0 and the 2nd edition holder 1 7 1 are the chuck hole 1 75 for the hand, the zipper mosquito L 1 176 for the printing roll, and the zipper hole 1 7 7 for positioning.
  • the elastic plate 7 wound around the printing roll plate cylinder 108 has a printing ink adhered to the tops of the projections, and the projections come into contact with the surface of the printing medium, thereby transferring ink and printing. It is a printing plate to be printed.
  • the fixed chuck means 102 has a mechanism that can hold and release the first plate holder 100 of the elastic plate 7. And is fixedly attached to one side of the hand body 1 on the back side of the hand body 1.
  • the method of fixing the fixed chuck means 102 to the hand main body 1 is not limited to the above-described method, and may be fixed to the mounting means 140 described later (see FIGS. 8 to 10). .
  • the fixed chuck means 102 is a magnetic force type comprising a chuck body 121 and an electromagnet (not shown) exposed on the surface of the chuck body 121. It has a fixing mechanism. In this magnetic holding mechanism, the chuck main body 121 of the fixed chuck means 102 is brought into contact with the metal plate holder of the elastic plate 7 to generate a magnetic force on the electromagnet, so that the chuck main body 121 is formed. To hold the plate holder. When releasing the holding of the plate holder, the magnetic force of the electromagnet may be eliminated.
  • a fixing chuck means 102 there is a fixing chuck means 102 provided with a vacuum suction type fixing mechanism provided with a vacuum suction hole (not shown) on a surface of the chuck body 121 in contact with the plate holder.
  • a vacuum suction type fixing mechanism provided with a vacuum suction hole (not shown) on a surface of the chuck body 121 in contact with the plate holder.
  • the chuck main body 121 of the fixed chuck means 102 is brought into contact with the plate holder, vacuum is sucked from the vacuum suction hole, and the plate holder is held on the chuck main body 121. Release hold At that time, stop the vacuum suction.
  • a chuck body 121 for example, as shown in FIG. 16, a chuck body 121, a drive unit 122 attached to the side surface of the chuck body 121, and a drive unit 1 And a grip portion 123 having an L-shaped cross section driven in the vertical direction as shown in FIG.
  • the gripper 1 2 3 is moved up and down by the driving unit 1 2 2, and the first letterpress holder 1 70 of the elastic plate 7 is held by the chuck body 1 2 1 and the grip 1 2 3. Release the pinch or grip.
  • the tension chuck means 103 is provided on the back side of the hand main body 1 and opposed to the fixed chuck means 102 described above, and is provided on the elastic plate 7 held by the fixed chuck means 102.
  • the tension check means 103 can be directly attached to the tip of the drive shaft of the air cylinder 1 provided on the back of 1 (see FIGS. 1, 3 to 7).
  • guide means 147 are provided on the back of the hand body 1 on both sides of the air cylinder 1 as shown in FIG.
  • the guide means 147 includes a guide rod 148 extending in the same direction as the above-mentioned mouth 144, and one end of which is attached to the tension check means 103, and a vehicle having the guide rod 148. And a guide member 149 for guiding reciprocal movement in the free direction.
  • FIGS. 8 to 9 show a case where the tension chuck means 103 has a chuck body 13 1 and a free receiving body 14 3. It discloses a mechanism in a more preferred embodiment in which a bearing body 144 is attached, instead of a structure in which the tension chuck means 103 is directly attached to the tip of the drive shaft.
  • the elastic plate tension adjusting means 104 is provided with an extensible mechanism such as an air cylinder and a spring so as to expand and contract the distance between the hand body 1 and the tension chuck means 103.
  • an extensible mechanism such as an air cylinder and a spring so as to expand and contract the distance between the hand body 1 and the tension chuck means 103.
  • One end of the plate tension adjusting means 104 is fixed to the fixed chuck means 102, and the other end is fixed to the tension chuck means 103.
  • the elastic plate tension adjusting means 104 As another specific configuration of the elastic plate tension adjusting means 104, as shown in FIG. 8, there is a configuration including an air-cylinder-main body 141 and a rod 142.
  • the mounting means 140 is a rectangular plate-shaped mounting portion 161, and a substantially cylindrical rotation protruding from a substantially central portion of the surface of the mounting portion 161. It consists of a shaft part 160.
  • the rotating shaft part 160 enters the concave bearing part 10 formed inside the hand main body 1 and horizontally rotates with respect to the lower surface of the hand main body 1 via a rotating guide 11 composed of a roller bearing. It is possible.
  • the mounting means 140 rotates as needed so that the elastic plate 7 can be pulled in a direction such that the elastic plate 7 does not sag (see FIG. 10).
  • a linear slide guide may be formed inside the hand main body 1 so that the mounting means 140 slides linearly along the linear slide guide.
  • a fixed chuck means 102 is fixed to the back surface of the mounting portion 16 1.
  • the air cylinder 1 body 1 4 1 has a rod 1 4 2 that expands and contracts in the axial direction of the air cylinder body 1 4 1 by supplying and discharging the air into the air cylinder 1 body 4 1.
  • the above-mentioned guide means 147 is also provided on both sides of the air cylinder one body 141 on the back surface of the mounting portion 161.
  • a bearing 144 is attached to an end of the rod 144 of the air cylinder 141.
  • the tip of the guide rod 1487 of 147 is also attached to the bearing body 144.
  • the bearing body 144 includes a cam follower 144 and a bearing part 144.
  • a protrusion 14 is formed on the hand main body 1 corresponding to the tension chuck means 103 so as to extend in the direction of expansion and contraction of the above-mentioned mouth 142.
  • the protrusion 14 has a cam follower.
  • the cam follower guide groove 12 is wider than the diameter of 144 and is slidable by the cam follower 144 (see FIG. 9).
  • the bearing body 14 3 moves within the length of the cam follower guide groove 12 in conjunction with the expansion and contraction movement of the rod 14 2 of the air cylinder (the distance in the left and right direction in FIGS. 8 and 9). ), So that the stationary chuck means 102 and the mounting means 140 are moved linearly in a direction of moving away from and in a direction of approaching.
  • the bearing body 144 is integrated with the mounting means 140 so that the IS The shaft is rotated with respect to the hand body 1 within the box (corresponding to the vertical distance in Fig. 9).
  • the bearing body 144 can perform linear movement and shaft rotation separately or simultaneously.
  • the tension chuck means 103 has a rotating shaft portion 130, a chuck body 131, and a bearing body 144.
  • the rotating shaft portion 140 is rotatably fitted into the bearing portion 144 of the bearing body 144, and is horizontally rotatable with respect to the lower surface of the bearing body 144. Therefore, the tension chuck means 103 rotates as needed so that the elastic plate 7 can be pulled in a direction such that the elastic plate 7 does not sag (see FIG. 10).
  • the wiper holder means 202 for wiping the intaglio roll is placed on a line orthogonal to the line connecting the fixed chuck means 102 and the tension chuck means 103. It is attached to the hand body 1 or the attaching means 140 via the repulsive pressing means 203.
  • the wiper holder means 202 for wiping the intaglio roll holds a wiper made of nonwoven fabric or the like impregnated with a solvent or the like. Then, the hand body 1 or the mounting means 140 is rotated 90 ′, and the arm 60 of the articulated robot 6 is driven to wipe the surface of the intaglio roll.
  • the repulsion pressing means 203 is means for pressing the wiper against the plate cylinder of the intaglio roll with a predetermined contact pressure using a repulsive force of a spring, an air cylinder, or the like.
  • the wiper holder means 3 ⁇ 2 for wiping the doctor blade is, for example, as shown in FIGS. 9 and 10.
  • the wiper holder means for wiping the intaglio rolls 200 Via means 3 0, han Attach to the thick body 1 or mounting means 140.
  • the wiper holder means 302 of the doctor blade holds a wiper made of non-woven cloth etc. impregnated with a solvent, etc. Rotate the mounting means 140 90 degrees, move the arm 60 of the articulated robot 6 II to wipe the surface of the doctor blade.
  • the repulsion pressing means 303 uses a repulsive force of a spring-air cylinder or the like to bring the wiper into contact with the tip of the doctor blade at a predetermined contact pressure, and wipe the upper and lower surfaces of the doctor blade at a predetermined pinching pressure. , Means for sandwiching by par.
  • the operation of the elastic plate automatic attachment / removal device as described above is controlled by a control device 185 provided in the articulated robot 6 shown in FIG.
  • the control unit 185 includes a driving unit 186 such as an arm 60 of the articulated robot 6, a chuck operating unit 187 for operating the tension chuck unit 103, and an elastic plate tension adjusting unit 104.
  • the drive unit 189 of the rod 142 of the air cylinder 142, the operation unit 190 that performs the gas blowing operation when cleaning the doctor blade, and the gripping operation of the wiper when cleaning the doctor blade The operation unit 191, which performs the gas blowing operation when wiping the print roll, and the operation unit 1993, which performs the gripping operation of the paper when wiping the print roll, Connected.
  • FIG. 17 is a diagram common to the second and third embodiments described later, and also shows components not used in the above-described embodiment.
  • the printing unit of the thin film forming apparatus according to this embodiment will be described.
  • the printing device includes an intaglio roll A having a large number of ink cells, an ink supply means B for filling the ink cells with an ink, and a printing roll C having an elastic plate on the plate cylinder to which the ink of the intaglio roll is transferred.
  • the print roll ink roll And a print table D for fixing the printing medium to be transferred.
  • a support frame F is formed at the center of a base E formed of a rectangular base, and the intaglio roll A and the print roll C are rotatably supported on the support frame F.
  • an ink supply means B is arranged above the intaglio roll A.
  • a printing table D is arranged on the upper surface of the base 1.
  • the intaglio roll A has a body fixed to the rotating shaft, and has a large number of ink cells on the surface of the body.
  • the ink cells are, for example, 10 to several tens of meters deep.
  • the barrel is in contact with the convex portion of the elastic plate of the printing roll C plate cylinder at a constant pressure.
  • the ink supply means B includes an ink supply line nozzle B1 and a doctor blade B2.
  • the ink supply means B has a pair of rails installed on the upper end of the support frame opposite to the intaglio roll A of the doctor.
  • An ink supply body is movably provided on the rail, and an ink nozzle B 1 of the ink supply body extends above the doctor and above the surface of the intaglio roll A.
  • the ink lined body is moved back and forth along the pair of rails by the drive of a motor or an air cylinder through a wire or the like (not shown).
  • Ink is supplied to the intaglio roll A from the ink supply lined nozzle B 1 so as to accumulate.
  • the ink has, for example, a viscosity of several tens to 30,000 cps, and is composed of a mixture of a synthetic resin or a resin precursor and a solvent.
  • the doctor blade B 2 is a plate-like body, and is attached to a doctor blade support rod B 3 attached to a support frame F. By rotating the doctor blade support rod B 3, the doctor blade B 2 comes and comes into contact with and separates from the surface of the intaglio roll A.
  • the ink supplied from the ink supply nozzle B1 is metered and wiped by the doctor blade B2.
  • the ink supply means B spreads the ink dropped on the surface of the intaglio roll A on the surface of the intaglio roll A,
  • the ink is filled in the ink tank, and a highly uniform ink film is formed on the surface of the intaglio roll A.
  • the printing roll C has a body fixed to its rotating shaft, and the body is made of a rubber such as butyl rubber, a synthetic resin such as a nylon resin, or a soft resin made of photosensitive rubber or photosensitive resin.
  • Elastic plate 7 is attached or detached. The ink of the intaglio roll A is transferred to the elastic plate 7.
  • the printing table D is set on the base E. On the upper surface of the base E, the printing position b below the support frame F and the print substrate placement position a away from the support frame F to the print material loading side from below the support frame F, and the print material discharge side from below the support frame F Guide rails D1 are fixed on both sides between the separated discharge positions c.
  • the printing table D moves between the positions a, b, and c along the guide rails on the base E.
  • the printing medium D 2 is placed on the printing table D at the printing medium mounting position a of the base E, and contacts the printing roll C at the printing position b of the base E to remove the ink of the elastic plate 7 of the printing roll C. Transfer is performed on the printing medium D2 to form a print, and the printing medium D2 is unloaded at the unloading position c of the base E.
  • the printing table D has a plate-shaped printing medium D2 placed on its upper surface, determines the position of the printing medium D2, and holds it. Further, a rack D3 parallel to the guide rail D1 is attached to the lower end surface of the printing table D. The rack D3 is linked with a pinion D4, and the print table D is configured to slide back and forth with the rack D3 by forward and reverse rotation of the pinion D4.
  • the operation of the above-described printing device section is controlled by the control device 194 on the printing device side shown in FIG.
  • the control device 194 is electrically connected to the control device 185, and controls the operation of the entire thin film forming apparatus while exchanging information with each other.
  • the control device 1 85 and the control device 1 94 may be configured with one controller.
  • the control device 1994 includes a rotation unit 195 for rotating the printing roll, a driving unit 196 for the first chuck unit 180 and the second chucking unit 181 in the printing roll, and a control unit for the intaglio roll.
  • the respective components of the rotation drive unit 197 and the doctor blade angle adjustment unit 198 are electrically connected.
  • the first plate holder 17 0 and the second plate holder 17 1 include the hand chuck hole 17 5, the print roll chuck hole 1 7 6, and the positioning chuck hole 1 ⁇ 2. It is a member that is formed symmetrically side by side (see Fig. 11).
  • the first chuck means 180 and the second chuck means 1801 are the same as those described for the fixed chuck means 102 and the tension chuck means 103 of the elastic plate automatic mounting and removing device of this embodiment. Magnetic holding mechanism and vacuum suction holding mechanism.
  • the first plate holder 170 of the elastic plate 7 and the second plate holder 171 of the elastic plate 7 in the loosened state are fixed to the hand 105 of the elastic plate automatic mounting / removing unit of this embodiment. 2 and tension chuck means 103 respectively (see Fig. 3).
  • the distance between the first plate holder 170 holding the both ends and the second plate holder 171, the fixed chuck means 102 of the hand 105 and the tension chuck means 10 0 It is placed on the elastic plate standby rack with the slack so as to be the same as the distance from 3.
  • the first plate holder 170 and the second plate holder 1 ⁇ 1 are held by the fixed chuck means 102 and the tension chuck means 103 by the magnetic holding mechanism, the vacuum suction holding mechanism, and the like described above. Good to do.
  • the first plate holder 17 of the elastic plate 7 is located at the position where the first chuck means 180 of the printing roll plate cylinder 108 is provided. Move 0.
  • the driving of the arm 60 is performed by appropriately bending and extending the arm 60 via the joint 61 of the articulated robot 6, or by vertically moving the robot base 62.
  • the first plate holder 170 of the elastic plate 7 is transferred from the fixed chuck means 102 of the hand 105 to the first chuck means 180 of the printing roll plate cylinder 108 (FIG. 4). , See Figure 18, step 1).
  • This delivery is performed by exciting and demagnetizing the electromagnet when, for example, a magnetic holding mechanism is employed as the fixed chuck means 102 and the first chuck means 180.
  • the arm 105 of the articulated robot 6 is then driven to separate the hand 105 from the printing roll plate cylinder 108, and the first plate holder 170 and the second plate holder 170 are moved.
  • a predetermined tension is applied to the elastic plate 7 between the plate holder 1 and 17 1 (see Fig. 5).
  • the air cylinder 1 4 1 has an elastic plate 7 Due to the tension acting on the air, the rod 144 is supplied with air by the air pressure enough to return an appropriate amount into the air cylinder 141. Therefore, when a tension higher than an appropriate tension acts on the elastic plate 7, the rod 14 2 is drawn into the air cylinder 14 1 according to the tension, and the tension acting on the elastic plate 7 is reduced accordingly. . Thus, a constant tension acts on the elastic plate 7.
  • the magnitude of the tension acting on the elastic plate 7 can be controlled by the pressure value of the air supplied to the air cylinder 141.
  • the above-mentioned moderate tension is a tension having an appropriate magnitude such that no excessive tension is applied to the elastic plate 7 and the elastic plate 7 is not completely or partially sagged.
  • the elastic plate 7 is illustrated in FIG.
  • the chuck body 13 1 is rotated clockwise or counterclockwise by the amount of the above-mentioned tilt shift about the tension chuck means rotation center 13 3 with respect to the bearing body 14 3.
  • 2-plate holder 1 7 1 Slightly inclined, part of the elastic plate 7 is removed, and it becomes taut (see Fig. 13).
  • the attachment means 140 force, rotate the attachment means to the hand body 1 to the left by the required angle about the center of rotation $ i center 16 2, and further, the chuck body 13 1 becomes the bearing body 1
  • the first plate holder 170 and the second plate holder 1 7 1 are parallel to each other by rotating the chuck 1 to the right by the required angle about the rotation center 1 3 3 with respect to 4 3.
  • the slack is partially removed and becomes tight (see Fig. 10 and Fig. 15).
  • the elastic plate 7 is in a state in which no excessive tension or slack is generated.
  • the printing roll plate cylinder 108 is gradually rotated in the direction in which the elastic plate 7 is wound, and the arm 60 of the articulated robot 6 is driven, so that the hand 105 is moved to the printing roll plate cylinder 108. And gradually move the second plate holder 17 1 of the elastic plate 7 to the position where the second chuck means 18 1 of the printing roll plate cylinder 108 is provided (FIGS. 6, 7, and 1). 8 Step 3 and Step 4). At this time, the tension acting on the elastic plate 7 at this time is automatically adjusted by the expansion and contraction movement of the rod 142 of the air cylinder 141.
  • the expansion and contraction movement of the rod 142 causes the movement of the hand 105 to be slightly slower than the rotation of the print roll plate cylinder 108 while the elastic plate 7 is wound around the printing roll plate cylinder 108.
  • excessive tension is applied to the entire elastic plate 7, or the movement of the hand 105 becomes slightly faster than the rotation of the printing plate cylinder 108, thereby causing the elastic plate 7 to move.
  • This is performed when a shortage of tension occurs as a whole.
  • the excess tension is alleviated by retreating the rod 14 2 with respect to the air cylinder 14 1, so that the predetermined tension is applied even while the elastic plate 7 is wound. Will be maintained.
  • the rod 14 is advanced from the air cylinder 141, so that the tension of the elastic plate 7 is not insufficient, so that the predetermined tension is maintained even while the elastic plate 7 is being wound.
  • the elastic plate 7 When the elastic plate 7 is wound around the printing roll plate cylinder 108, the elastic plate 7 maintains a state in which a predetermined tension is applied, and as described above, the attaching means 140 and the chuck body 1 In some cases, the direction of tension of the elastic plate 7 may be adjusted by rotating 31 (see FIG. 10).
  • the second plate holder 1701 of the elastic plate 7 is received from the tension chucking means 103 of the hand 105 to the second chucking means 181 of the printing roll plate cylinder 108. Then, the elastic plate 7 is completely mounted on the printing roll plate cylinder 108 (see FIG. 7).
  • the delivery of the second plate holder 17 1 to the second chuck means 18 1 is performed, for example, when the tension chuck means 103 and the second chuck means 18 1 employ a magnetic holding mechanism. Excitation and demagnetization of the electromagnets provided in the chuck means 103 and the second chuck means 18 1 are performed.
  • the ink is supplied to the surface of the intaglio roll A by the ink supply nozzle B1 that reciprocates in the longitudinal direction of the intaglio roll A, and then the ink is supplied to the surface of the intaglio roll A by wiping by the doctor breaker KB2. Fill and weigh.
  • the method for automatically removing the elastic plate includes the following steps: after printing on a printing medium using the elastic plate 7 attached to the printing opening plate cylinder 108 by the elastic plate automatic attaching method, Elastic plates 7 fixed by plate holder 170 and second plate holder 171, respectively, by first chuck means 180 and second chuck means 181 of printing roll plate cylinder 108 Is transferred to the hand 105.
  • the second plate holder 17 of the elastic plate 7 Have 1 delivered.
  • the operation of transferring the second plate holder 17 1 from the second chuck means 18 1 to the tension chuck means 103 is performed by, for example, magnetically holding the tension chuck means 103 and the second chuck means 18 1.
  • a mechanism it is performed by exciting and demagnetizing the electromagnets provided in the tension check means 103 and the second chuck means 181.
  • the arm 60 of the articulated robot 6 is driven, and the fixed chucking means 102 of the hand 105 is moved. Then, align the position of the first plate holder 170 of the elastic plate 7 with the position of the first plate holder 170, and then, from the first chuck means 180 of the printing roll plate cylinder 108 to the fixed chuck means 110 of the hand 105. Then, the first plate holder 170 of the elastic plate 7 is delivered, and the removal of the elastic plate 7 from the printing roll plate cylinder 108 is completed.
  • the thin film forming apparatus and the thin film forming method according to the present invention have the following effects because of the above configuration and operation.
  • the ink is transferred from the intaglio roll to the elastic printing plate, printing can be performed on the printing material with pure and constant ink.
  • a polymer thin film such as a liquid crystal alignment film
  • the insulation and the orientation are good, and a part of the film is not chipped.
  • the elastic plate is wound around the printing roll plate cylinder while automatically adjusting the tension applied to the elastic plate with the hand attached to the robot. In the meantime, it is possible to easily maintain a state in which tension is applied in a predetermined direction at a predetermined size over the entire width of the elastic plate. Therefore, the printing plate can be wound around the printing roll plate cylinder without generating excessive tension or slack, and the elastic plate can be attached to the printing roll plate cylinder without wrinkling or waving.
  • the contact pressure between the intaglio roll and the elastic plate and the contact pressure between the elastic plate and the printing medium become constant. Therefore, a thin film having a uniform thickness can be formed on the printing medium without requiring time, and the efficiency of forming the thin film is improved.
  • the intaglio roll is automatically wiped and dried by the intaglio roll automatic wiping device using a hand attached to the arm of the articulated robot. Therefore, the intaglio roll can be automatically wiped and dried before and after the printing process performed by the printing device section, and the entire thin film forming process can be smoothly performed, so that the efficiency of forming the thin film is improved.
  • the wiper can always be pressed against the surface of the body of the intaglio roll with a predetermined contact pressure by the repulsive pressing means of the intaglio roll automatic wiping device. Therefore, the intaglio roll can be sufficiently wiped off and dried, and foreign matter can be prevented from entering the thin film, and a thin film having a uniform thickness can be formed.
  • the repulsive pressing means 203 corresponds to the pressing means described in the claims
  • the repulsive force generator 230 corresponds to the pressing force generator described in the claims.
  • the intaglio roll automatic wiping unit includes a hand body 1 and an intaglio roll wiping unit attached to one end of the hand body 1 via repulsive pressing means 203.
  • Hand 2 composed of the wiper holder means 202 of the present invention is attached to the arm 60 of the articulated robot 6.
  • the articulated robot 6 is the same as that described in the first embodiment.
  • the hand body 1 is a rectangular plate, as in the first embodiment described above. It is fixed to the arm 60 of the articulated robot 6 at almost the center of the upper surface thereof, and the arm 205 of the articulated robot 6 drives the hand 205 in an arbitrary direction. It can be moved (see Figures 19 and 20).
  • the hand 205 is in the form of an arm fixed to one side of the hand body 1 as shown in FIGS. 22 and 23, and has an attachment body 2 15 which is an attachment portion to the hand body 1.
  • the repelling and pressing means 203 provided at the end of the mounting body 215 and the wiper holder means 202 which is attached to the end of the repelling pressing means 203 are provided.
  • the wiper mounting portion 220 has a plate-shaped wiper mounting portion 220 and a rotating shaft portion 221 that rotatably engages a bearing member 231 of a repulsion pressing means 203 described later.
  • the wiper mounting portion 220 has a pressing surface 222 of the wiper 208.
  • the rotating shaft 2 2 1 is fitted into the bearing 2 3 6 of the bearing 2 3 1, and the wiper holder 2 0 2 is centered on the rotating shaft 2 2 1 with respect to the bearing 3 1. It is designed to rotate.
  • a wiper chuck 224 for holding and releasing the wiper 208 on the pressing surface 222 is projected from the wiper mounting portion 220.
  • the wiper chuck 222 is made of, for example, a resin material, and holds the wiper 208 on the pressing surface 222 by its elastic force.
  • the pressing surface may be a flat surface or a curved surface that follows the curved surface of the body surface 271 of the intaglio roll A.
  • Examples of the wiper 208 include a nonwoven fabric impregnated with a solvent that dissolves ink.
  • the wiper holder means 202 repels with the hand body 1 via a repulsion pressing means 203 described later, and the wiper 208 is moved to the body surface 271 of the intaglio roll A. It presses with a predetermined contact pressure (see Fig. 20, Fig. 22, Fig. 23). As shown in FIGS. 22 and 23, the repulsion pressing means 203 is used to generate a repulsive force between the hand body 1 and the wiper holder means 202. (Not shown). By this repulsive force, the wiper holder means 202 is pressed against the surface of the plate cylinder of the intaglio roll A with a predetermined contact pressure.
  • the repulsion pressing means 203 includes an attachment body 2 15 whose one end is fixed to the hand body 1, a bearing body 2 31 located at the other end of the attachment body 2 15 and an attachment body 2 A repulsion generator 230 for generating a repulsion is provided between the bearing 15 and the bearing 2 31.
  • a spring is used as the repulsive force generator 230, and the spring is provided on the concave receiving portion 210 provided on the other end of the mounting member 210 and the bearing member 231. Each end of the spring is held in each of the concave receiving portions 235.
  • the guide rod 2 3 1 is moved with respect to the mounting body 2 15 by moving the guide rod 2 3 1 at one end into the mounting body 2 3 1 while the other part is slidably held in the mounting body 2 15. Guided by.
  • the guide rod 23 is provided with a stopper 23 so that the mounting body 2 15 and the bearing body 2 3 1 do not fall apart due to the repulsive force of the spring.
  • a limit is provided for separating the bearing 15 from the bearing 2 31.
  • the hand 205 may be provided with, for example, a gas blowing means 204 for blowing a gas for drying the intaglio roll from a pump, in addition to the wiper holder means 202.
  • a gas blowing means 204 for blowing a gas for drying the intaglio roll from a pump, in addition to the wiper holder means 202.
  • the gas for intaglio roll drying there is a gas such as nitrogen.
  • the gas jetting means 204 is a gas jetting device such as a nozzle, and is attached to the side of the wiper holder means 202.
  • the elastic plate is automatically mounted on another part of the hand body 1 where the wiper holder means 202 for wiping the intaglio roll is mounted via the repulsive pressing means 203.
  • a detaching means 101 or Z and a wiper holder one means 302 for wiping the doctor blade may be attached (not shown).
  • the elastic plate automatic mounting / removing means 101 has the mechanism described in the first embodiment described above.
  • the elastic plate tension adjusting means 104 includes the hand main body 1 Mounted on
  • the wiper holder means 302 for wiping the doctor blade is, for example, as shown in FIG. 24, provided with a repulsive pressing means 303 at a position opposed to the elastic plate automatic mounting / removing means 101. Through this, it is attached to the hand body 1.
  • the wiper holder means 302 of the doctor blade holds a wiper made of non-woven cloth etc. impregnated with a solvent, etc. ° Rotate and drive the arm 60 of the articulated robot 6 to wipe the surface of the doctor blade.
  • the repulsive pressing means 303 uses a repulsive force such as a spring or an air cylinder to bring the wiper into contact with the tip of the doctor blade at a predetermined contact pressure, and the upper and lower surfaces of the doctor blade at a predetermined pinching pressure. This is a means to be pinched by the wiper.
  • the body surface 271 of the intaglio roll A to which unnecessary ink has adhered is wiped with a wiper 208 to automatically remove unnecessary ink.
  • the intaglio roll A is a cylindrical ceramic or metal body having a rotation axis 270, and is provided with a large number of ink cells on its body surface 271.
  • the ink enters the ink tank and transfers the ink into the ink tank on the surface of the printing roll C arranged in contact with the plate cylinder of the intaglio roll A.
  • the wiper 208 is held on the pressing surface 222 of the wiper holder means 202 of the intaglio roll automatic wiping device.
  • the wiper 208 may be fixed by a plurality of wiper chucks 224 attached to the side of the wiper holder 220 of the wiper holder means 202.
  • a nonwoven fabric impregnated with a liquid such as the main solvent of the ink, alcohol, or acetone, or a dry nonwoven fabric impregnated with nothing can be used.
  • the wiper holder means 202 is moved, and the wiper 208 is pressed against the body surface 271 of the intaglio roll A. Press the surface 2 2 3 with the specified contact pressure.
  • the driving of the arm 60 is performed by appropriately bending and extending the arm 60 via the joint 61 of the articulated robot 6, or by vertically moving the robot base 62.
  • the predetermined contact pressure is such that the wiper 208 is brought into contact with the body surface 271 of the intaglio roll A, and the solvent that has been impregnated into the wiper 208 is rotated by rotating the intaglio roll A. This is the pressure when the unnecessary ink that has entered the ink cell on the body surface 27 1 of A is sufficiently melted, and is then contacted so as to be completely wiped off by the wiper 208.
  • the body surface 27 of the intaglio roll A is large and the wiper 208 held by the wiper holder means 202 is flat, the body surface 27 of the intaglio roll A and the wiper 20 Line contact is made with 8, and other parts float and do not touch. Intaglio roll A plate so that the entire surface of wiper 208 does not float If you try to press strongly against the torso surface, there will be parts with strong contact pressure and parts with weak contact pressure. In this case, the ink is wiped off only at the line contact portion or at the portion where the contact pressure is the highest, so that a portion where the dirt adheres well and a portion where the dirt adheres little are formed. It cannot be used without waste and the wiping efficiency is poor.
  • the rotation of the wiper holder means 202 is caused by the slight movement of the hand 205 while the plate cylinder of the intaglio roll A is being moved.
  • the pressing surface 2 2 3 is not parallel to the plate cylinder surface 2 7 1 of the intaglio roll A, and the pressing surface 2 2 3 is inclined as needed. In other words, when the pressing surface 2 2 3 force of the wiper holder means 202 is inclined with respect to the plate cylinder surface 27 1 of the intaglio plate A, a part of the wiper 208 becomes a plate cylinder of the intaglio roll A.
  • the surface 2271 of the intaglio roll A rises from the surface 271, and the body surface 271 of the intaglio roll A and the wiper 208 do not come into contact with a uniform contact pressure, so that the wiper cannot be wiped cleanly. Therefore, according to the inclination, the wiper holder means 202 is rotated by a predetermined angle around the rotation shaft part 221.
  • the pressing surface 2 2 3 of the wiper holder means 202 and the plate cylinder surface 2 7 1 of the intaglio roll A are in a parallel state, and the pressing surface 2 of the wiper holder means 202 23 and the plate cylinder surface 2 71 of the intaglio roll A can be brought into contact with a uniform contact pressure without any gap.
  • the arm 60 of the articulated robot 6 is driven to separate the wiper 208 from the torso surface 271 of the intaglio roll A, and the wiping of the intaglio roll A is completed.
  • the arm 205 of the articulated robot 6 is driven to move the hand 205 so as to be at a predetermined distance from the body surface 271 of the intaglio roll A.
  • the gas jetting means 204 for drying the intaglio roll of the intaglio roll automatic wiping device of the embodiment is moved.
  • the driving of the arm 60 is performed by appropriately bending and extending the arm 60 via the joint 61 of the articulated robot 6, or by vertically moving the robot base 62.
  • the intaglio roll A is rotated, and the multi-joint robot 6 is driven while the gas is jetted from the gas jetting means 204 for drying the ⁇ plate roll, so that the gas jetting means 204 is intaglio roll. Move along the axial direction of ⁇ .
  • the intaglio roll A rotates at a constant rotation speed.
  • the rotation speed of the intaglio roll A is set depending on the amount and temperature of gas ejected from the gas ejection means 204, the speed of the intaglio roller A moving in the axial direction, and the like. For example, when the amount of gas sung from the gas ejection means 204 is large, or when the temperature is high, or the speed of movement of the gas ejection means 204 in the intaglio roll A in the pongee direction is slow. In some cases, the intaglio roll A should be rotated relatively quickly.
  • the intaglio printing is used. Compare and slow down the rotation of roll A. After the intaglio roll A is wiped and dried, a thin film is formed on the printing medium in the printing unit. Note that this forming method is the same as in the case of the above-described first embodiment, and a description thereof will be omitted.
  • the thin film forming apparatus and the thin film forming method of the present invention have the above-described configuration and operation, and thus have the following effects.
  • the wiper can be pressed against the intaglio roll with a predetermined contact pressure. Also, the arm can be automatically moved in the axial direction of the intaglio roll while maintaining the predetermined contact pressure, so that the body surface of the intaglio roll can be wiped uniformly.
  • a thin film having a sufficient thickness can be formed on the printing medium.
  • the body surface of the intaglio roll can be wiped uniformly. For this reason, the No unevenness occurs in the transfer amount of the key, and the film thickness becomes uniform. Therefore, for example, when forming a polymer thin film pattern such as a liquid crystal alignment film, a thin film having a uniform thickness can be formed, and a highly functional thin film can be stably obtained, for example, without display unevenness.
  • the air for drying the intaglio roll is automatically blown to the body surface of the intaglio roll by the hand attached to the articulated robot, there is a gap between the gas ejection means and the body surface of the intaglio roll.
  • the distance is set to a predetermined distance, and the predetermined distance can be automatically and easily maintained while moving the gas jetting means in the axial direction of the intaglio roll. Therefore, the body surface of the intaglio roll can be dried uniformly, the next printing process can be performed smoothly, and the efficiency of thin film formation can be improved.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Liquid Crystal (AREA)
  • Inking, Control Or Cleaning Of Printing Machines (AREA)
  • Printing Methods (AREA)
PCT/JP1994/000630 1993-04-16 1994-04-15 Thin film forming apparatus and thin film forming method WO1994023951A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE69420721T DE69420721T2 (de) 1993-04-16 1994-04-15 Vorrichtung und verfahren zur herstellung von einem dünnen film
KR1019950704445A KR100210523B1 (ko) 1993-04-16 1994-04-15 박막형성장치 및 박막형성방법
EP94912687A EP0700780B1 (de) 1993-04-16 1994-04-15 Vorrichtung und verfahren zur herstellung von einem dünnen film

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP5/113810 1993-04-16
JP11380993A JP3300467B2 (ja) 1993-04-16 1993-04-16 薄膜形成装置と薄膜形成方法
JP11381093A JP3288126B2 (ja) 1993-04-16 1993-04-16 薄膜形成装置と薄膜形成方法
JP11381193A JP3288127B2 (ja) 1993-04-16 1993-04-16 薄膜形成装置と薄膜形成方法
JP5/113811 1993-04-16
JP5/113809 1993-04-16

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WO1994023951A1 true WO1994023951A1 (en) 1994-10-27

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EP (1) EP0700780B1 (de)
KR (1) KR100210523B1 (de)
CN (1) CN1056561C (de)
DE (1) DE69420721T2 (de)
TW (1) TW299286B (de)
WO (1) WO1994023951A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1093466C (zh) * 1995-09-08 2002-10-30 海德堡印刷机械股份公司 印刷机的刮刀和回墨器

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004015336A1 (de) * 2004-03-30 2005-10-20 Koenig & Bauer Ag Einrichtung zum Reinigen der Farbwerke einer Satellitendruckmaschine
DE102004052020B8 (de) * 2004-10-26 2013-07-04 Wifag Maschinenfabrik Ag Druckformmanipulator
DE502005009939D1 (de) * 2004-10-26 2010-09-02 Wifag Maschf Ag Druckformmanipulator
KR20140069677A (ko) * 2012-11-29 2014-06-10 삼성디스플레이 주식회사 기판 프린팅 장치 및 기판 프린팅 방법
CN104441950B (zh) * 2013-05-13 2016-11-09 海宁长林包装材料有限公司 一种带涂墨装置的制袋印刷机
CN103707627B (zh) * 2013-12-04 2016-09-28 合肥海闻机器人开发有限公司 一种多介质数字印刷机的机器人手臂
KR101478480B1 (ko) * 2014-01-17 2014-12-31 두산중공업 주식회사 다관절 매니퓰레이터
CN104698686B (zh) * 2015-03-20 2017-04-19 京东方科技集团股份有限公司 一种挂版装置和取向膜涂布系统
CN106864015A (zh) * 2017-02-17 2017-06-20 坚毅机械工程(高要)有限公司 一种移印系统
CN110891790B (zh) * 2017-08-21 2022-03-04 株式会社新克 多色凹版轮转机
CN111032356A (zh) * 2017-09-26 2020-04-17 株式会社新克 全自动凹版制版印刷系统
US11214078B2 (en) * 2019-07-03 2022-01-04 Primera Technology, Inc. Label printer and cutter assembly
DE102020209465B3 (de) * 2020-07-28 2021-07-15 Heidelberger Druckmaschinen Aktiengesellschaft Druckplatten-Greifsystem
CN116690150B (zh) * 2023-07-26 2023-12-19 河北万杰机械科技股份有限公司 一种能够实现自动装卸ps版的机械手结构

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6274654A (ja) * 1985-09-30 1987-04-06 Tokyo Kikai Seisakusho:Kk 輪転機の刷版自動着脱装置
JPS63295262A (ja) * 1987-05-28 1988-12-01 Dainippon Printing Co Ltd 版胴自動洗浄方法および装置
JPH0531882A (ja) * 1991-07-31 1993-02-09 Nissha Printing Co Ltd 薄膜形成装置
JPH0582545U (ja) * 1992-04-14 1993-11-09 富士機械工業株式会社 印刷用版面等の洗浄装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4066312A (en) * 1976-06-28 1978-01-03 International Business Machines Corporation High density cable connector
JPH07378B2 (ja) * 1982-04-29 1995-01-11 株式会社東京機械製作所 輪転印刷機の刷版自動着脱装置
US4727807A (en) * 1985-09-30 1988-03-01 Tokyo Kikai Seisakusho Apparatus for automatically mounting and removing printing plates in rotary printing press
JPH0788091B2 (ja) * 1986-11-20 1995-09-27 三菱重工業株式会社 枚葉オフセット印刷機の自動版交換制御装置
DE69223792T2 (de) * 1991-07-31 1998-08-06 Nissha Printing Vorrichtung zum bilden eines dünnen films

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6274654A (ja) * 1985-09-30 1987-04-06 Tokyo Kikai Seisakusho:Kk 輪転機の刷版自動着脱装置
JPS63295262A (ja) * 1987-05-28 1988-12-01 Dainippon Printing Co Ltd 版胴自動洗浄方法および装置
JPH0531882A (ja) * 1991-07-31 1993-02-09 Nissha Printing Co Ltd 薄膜形成装置
JPH0582545U (ja) * 1992-04-14 1993-11-09 富士機械工業株式会社 印刷用版面等の洗浄装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP0700780A4 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1093466C (zh) * 1995-09-08 2002-10-30 海德堡印刷机械股份公司 印刷机的刮刀和回墨器

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DE69420721T2 (de) 2000-01-27
CN1121336A (zh) 1996-04-24
CN1056561C (zh) 2000-09-20
DE69420721D1 (de) 1999-10-21
KR100210523B1 (ko) 1999-07-15
TW299286B (de) 1997-03-01
KR960701745A (ko) 1996-03-28
EP0700780A1 (de) 1996-03-13
EP0700780A4 (de) 1996-07-31
EP0700780B1 (de) 1999-09-15

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