US20180305819A1 - Electroless platinum plating solution - Google Patents
Electroless platinum plating solution Download PDFInfo
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- US20180305819A1 US20180305819A1 US15/767,817 US201615767817A US2018305819A1 US 20180305819 A1 US20180305819 A1 US 20180305819A1 US 201615767817 A US201615767817 A US 201615767817A US 2018305819 A1 US2018305819 A1 US 2018305819A1
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- United States
- Prior art keywords
- plating solution
- electroless
- platinum
- electroless platinum
- platinum plating
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 title claims abstract description 340
- 229910052697 platinum Inorganic materials 0.000 title claims abstract description 172
- 238000007747 plating Methods 0.000 title claims abstract description 144
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 35
- 150000003058 platinum compounds Chemical class 0.000 claims abstract description 28
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 claims abstract description 24
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 claims abstract description 24
- 239000001257 hydrogen Substances 0.000 claims abstract description 16
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 16
- -1 thiol compounds Chemical class 0.000 claims abstract description 15
- 150000004675 formic acid derivatives Chemical class 0.000 claims abstract description 13
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 claims abstract description 12
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 claims abstract description 12
- WQZGKKKJIJFFOK-VFUOTHLCSA-N beta-D-glucose Chemical compound OC[C@H]1O[C@@H](O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-VFUOTHLCSA-N 0.000 claims abstract description 12
- 235000019253 formic acid Nutrition 0.000 claims abstract description 12
- 239000008103 glucose Substances 0.000 claims abstract description 12
- 150000007524 organic acids Chemical class 0.000 claims abstract description 12
- CLSUSRZJUQMOHH-UHFFFAOYSA-L platinum dichloride Chemical compound Cl[Pt]Cl CLSUSRZJUQMOHH-UHFFFAOYSA-L 0.000 claims abstract description 10
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims abstract description 5
- 229940045985 antineoplastic platinum compound Drugs 0.000 claims abstract description 4
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims abstract 6
- 239000008139 complexing agent Substances 0.000 claims description 15
- 150000001875 compounds Chemical class 0.000 claims description 8
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract description 33
- 229910001385 heavy metal Inorganic materials 0.000 abstract description 7
- 150000002500 ions Chemical class 0.000 abstract description 7
- 239000000243 solution Substances 0.000 description 117
- IKDUDTNKRLTJSI-UHFFFAOYSA-N hydrazine hydrate Chemical compound O.NN IKDUDTNKRLTJSI-UHFFFAOYSA-N 0.000 description 22
- 239000000758 substrate Substances 0.000 description 18
- 238000007772 electroless plating Methods 0.000 description 16
- 230000001603 reducing effect Effects 0.000 description 16
- 230000000052 comparative effect Effects 0.000 description 15
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 14
- 229910021529 ammonia Inorganic materials 0.000 description 11
- 239000012279 sodium borohydride Substances 0.000 description 11
- 229910000033 sodium borohydride Inorganic materials 0.000 description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 150000003057 platinum Chemical class 0.000 description 10
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- 239000004280 Sodium formate Substances 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 6
- 239000002253 acid Substances 0.000 description 6
- 150000002431 hydrogen Chemical class 0.000 description 6
- 238000006722 reduction reaction Methods 0.000 description 6
- HLBBKKJFGFRGMU-UHFFFAOYSA-M sodium formate Chemical compound [Na+].[O-]C=O HLBBKKJFGFRGMU-UHFFFAOYSA-M 0.000 description 6
- 235000019254 sodium formate Nutrition 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- IXSUHTFXKKBBJP-UHFFFAOYSA-L azanide;platinum(2+);dinitrite Chemical compound [NH2-].[NH2-].[Pt+2].[O-]N=O.[O-]N=O IXSUHTFXKKBBJP-UHFFFAOYSA-L 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- 239000004094 surface-active agent Substances 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- 239000002249 anxiolytic agent Substances 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- VUZPPFZMUPKLLV-UHFFFAOYSA-N methane;hydrate Chemical compound C.O VUZPPFZMUPKLLV-UHFFFAOYSA-N 0.000 description 3
- 239000003002 pH adjusting agent Substances 0.000 description 3
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- RGHNJXZEOKUKBD-SQOUGZDYSA-N D-gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-M Formate Chemical compound [O-]C=O BDAGIHXWWSANSR-UHFFFAOYSA-M 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 239000001630 malic acid Substances 0.000 description 2
- 235000011090 malic acid Nutrition 0.000 description 2
- 150000004682 monohydrates Chemical class 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- FBEIPJNQGITEBL-UHFFFAOYSA-J Cl[Pt](Cl)(Cl)Cl Chemical compound Cl[Pt](Cl)(Cl)Cl FBEIPJNQGITEBL-UHFFFAOYSA-J 0.000 description 1
- RGHNJXZEOKUKBD-UHFFFAOYSA-N D-gluconic acid Natural products OCC(O)C(O)C(O)C(O)C(O)=O RGHNJXZEOKUKBD-UHFFFAOYSA-N 0.000 description 1
- 239000004471 Glycine Substances 0.000 description 1
- CQDPSHVYFDYAOM-UHFFFAOYSA-L N[Pt](N)(N)(N)(Cl)Cl Chemical compound N[Pt](N)(N)(N)(Cl)Cl CQDPSHVYFDYAOM-UHFFFAOYSA-L 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- VZTDIZULWFCMLS-UHFFFAOYSA-N ammonium formate Chemical compound [NH4+].[O-]C=O VZTDIZULWFCMLS-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 description 1
- 229940092714 benzenesulfonic acid Drugs 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- DLDJFQGPPSQZKI-UHFFFAOYSA-N but-2-yne-1,4-diol Chemical compound OCC#CCO DLDJFQGPPSQZKI-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 235000015165 citric acid Nutrition 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 239000000174 gluconic acid Substances 0.000 description 1
- 235000012208 gluconic acid Nutrition 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- YZMHQCWXYHARLS-UHFFFAOYSA-N naphthalene-1,2-disulfonic acid Chemical compound C1=CC=CC2=C(S(O)(=O)=O)C(S(=O)(=O)O)=CC=C21 YZMHQCWXYHARLS-UHFFFAOYSA-N 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 238000010979 pH adjustment Methods 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- WFIZEGIEIOHZCP-UHFFFAOYSA-M potassium formate Chemical compound [K+].[O-]C=O WFIZEGIEIOHZCP-UHFFFAOYSA-M 0.000 description 1
- CVHZOJJKTDOEJC-UHFFFAOYSA-N saccharin Chemical compound C1=CC=C2C(=O)NS(=O)(=O)C2=C1 CVHZOJJKTDOEJC-UHFFFAOYSA-N 0.000 description 1
- 229940081974 saccharin Drugs 0.000 description 1
- 235000019204 saccharin Nutrition 0.000 description 1
- 239000000901 saccharin and its Na,K and Ca salt Substances 0.000 description 1
- 239000001509 sodium citrate Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
- YWYZEGXAUVWDED-UHFFFAOYSA-N triammonium citrate Chemical compound [NH4+].[NH4+].[NH4+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O YWYZEGXAUVWDED-UHFFFAOYSA-N 0.000 description 1
- HRXKRNGNAMMEHJ-UHFFFAOYSA-K trisodium citrate Chemical compound [Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O HRXKRNGNAMMEHJ-UHFFFAOYSA-K 0.000 description 1
- 229940038773 trisodium citrate Drugs 0.000 description 1
- 235000019263 trisodium citrate Nutrition 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/42—Coating with noble metals
- C23C18/44—Coating with noble metals using reducing agents
Definitions
- the present invention relates to an electroless platinum plating solution.
- Some electroless platinum plating solutions conventionally known contain dinitrodiammineplatinum or dinitrotetraammineplatinum as a platinum salt, ethylenediamine or ammonia as a complexing agent, and hydrazine monohydrate or sodium borohydride as a reducing agent (See, for example, Patent Literatures 1 to 4).
- Dinitrodiammineplatinum and dinitrotetraammineplatinum are poorly soluble in water. Therefore, they are dissolved in water by adding ethylenediamine or ammonia as a complexing agent to electroless platinum plating solutions containing them to form platinum complexes coordinated with ethylenediamine or ammonia.
- reducing agents can reduce metal ions or metal complexes on the surface of a plating substrate to deposit metals thereon. Since the platinum complexes coordinated with ethylenediamine or ammonia are resistant to reduction, hydrazine monohydrate or sodium borohydride having a strong reducing action has been added as a reducing agent to the electroless platinum plating solutions. However, since hydrazine monohydrate and sodium borohydride have too strong reducing power, there are problems that platinum is deposited in the plating solutions due to reduction of the platinum complex and the reduction reaction is accompanied by generation of hydrogen.
- the stability of the electroless platinum plating solutions has been improved by adding heavy metal ions such as lead and thallium or thiol compounds as a stabilizer.
- Patent Literature 1 Japanese Patent Laid-Open No. 5-222543
- Patent Literature 2 Japanese Patent Laid-Open No. 9-287078
- Patent Literature 3 International Publication No. WO 2014/162935
- Patent Literature 4 International Publication No. WO 2013/094544
- the present inventors have made intensive studies, and as a result, have found that the conventional electroless platinum plating solutions decrease in solution stability for the following reasons.
- ethylenediamine or ammonia used as a complexing agent is coordinated to platinum ions to form platinum complexes. Since ethylenediamine or ammonia is strongly complexed with platinum ions, a reducing agent having a strong reducing action is required in order to reduce the platinum complexes to deposit them on the surface of substrates to be plated.
- the electroless platinum plating solutions are subjected to reduction and decomposition by the reducing power of the reducing agent having a strong reducing action.
- the present inventors have achieved the above object by adopting the following electroless platinum plating solution.
- the electroless platinum plating solution of the present invention is characterized by comprising a water-soluble platinum compound, and one or more reducing agents selected from the group consisting of formalin, glucose, formic acid and formates.
- the water-soluble platinum compound is preferably one or more water-soluble platinum compounds selected from the group consisting of platinous chloride (II), hydrogen tetrachloroplatinic acid (II), tetrachloroplatinate (II), platinic chloride (IV), hydrogen hexachloroplatinic acid (IV), hexachloroplatinate (IV), hydrogen hexahydroxoplatinic acid (IV), hexahydroxoplatinate (IV) and dichlorotetraammineplatinum (II).
- the electroless platinum plating solution according to the present invention preferably comprises an organic acid as a complexing agent.
- the organic acid is preferably one or more compounds selected from aliphatic hydroxy acids having a molecular weight of 90 to 500.
- the platinum compound Since a water-soluble platinum compound is used in the electroless platinum plating solution according to the present invention, the platinum compound forms a platinum complex which in turn is easily dissolved in water, even if the electroless platinum plating solution contains no complexing agent such as ethylenediamine or ammonia that is strongly complexed with a platinum ion.
- the platinum complex formed from the water-soluble platinum compound is more easily reduced than platinum complexes coordinated with ethylenediamine or ammonia, which are formed in conventional electroless platinum plating solutions.
- formalin, glucose, formic acid or formates having a weak reducing action is used as a reducing agent, the platinum complex can be made to an easily reduced state.
- any of formalin, glucose, formic acid and formates as reducing agents also have a weaker reducing action than hydrazine monohydrate and sodium borohydride.
- the electroless platinum plating solution of the present invention is not decomposed by any of the reducing agents. Therefore, the electroless platinum plating solution of the present invention can provide excellent solution stability even without the use of heavy metal ions or thiol compounds as compared with conventional electroless platinum plating solutions.
- Any of formalin, glucose, formic acid and formates are also suitable in that they reduce the amount of hydrogen generated than the conventional reducing agents such as hydrazine monohydrate and sodium borohydride.
- the electroless platinum plating solution of the present invention contains no compound capable of generating ammonia gas such as ethylenediamine or ammonia, it can prevent the generation of ammonia gas.
- FIG. 1 is a graph showing the deposition property exhibited by the electroless platinum plating solution of an embodiment of the present invention.
- FIG. 2 is an SEM image of the electroless platinum film obtained by electroless plating processing with the electroless platinum plating solution of Example 1.
- FIG. 3 is an SEM image of the electroless platinum film obtained by electroless plating processing with the electroless platinum plating solution of Example 2.
- the electroless platinum plating solution of the present invention is an aqueous solution comprising a water-soluble platinum compound and one or more reducing agents selected from the group consisting of formalin, glucose, formic acid and formates.
- water-soluble platinum compound examples include one or more water-soluble platinum compounds selected from the group consisting of platinous chloride (II), hydrogen tetrachloroplatinic acid (II), tetrachloroplatinate (II), platinic chloride (IV), hydrogen hexachloroplatinic acid (IV), hexachloroplatinate (IV), hydrogen hexahydroxoplatinic acid (IV), hexahydroxoplatinate (IV) and dichlorotetraammineplatinum (II).
- the electroless platinum plating solution of the present invention preferably contains the water-soluble platinum compound in the range of not less than 0.0005 mol/L and not more than 0.05 mol/L and more preferably in the range of not less than 0.0025 mol/L and not more than 0.01 mol/L.
- the content of the water-soluble platinum compound in the electroless platinum plating solution is less than 0.0005 mol/L, the electroless platinum film may be difficult to be formed and the plating rate may decrease.
- plating itself can be performed well but economic efficiency decreases.
- Platinum chloride (IV) is easily dissolved in the electroless platinum plating solution of the present invention to form a platinum complex represented by the following formula (1).
- Dichlorotetraammineplatinum (II) is easily dissolved in the electroless platinum plating solution of the present invention to form a platinum complex represented by the following formula (2).
- Both of the platinum complexes represented by the above formulae (1) and (2) are more easily reduced than platinum complexes coordinated with ethylenediamine, which are produced in conventional electroless platinum plating solutions.
- the electroless platinum plating solution of the present invention requires no reducing agent having a strong reducing action, and even when a reducing agent having a weak reducing action is used, the platinum complex can be made to an easily reduced state.
- any of one or more reducing agents selected from the group consisting of formalin, glucose, formic acid and formates have a weak reducing action.
- the reducing agents can make the platinum complexes represented by the above formulae (1) and (2) to an easily reduced state.
- Any of the above-mentioned reducing agents are advantageous in that they mainly produce carbon dioxide and water as decomposition products accompanying the reduction reaction and reduce the amount of hydrogen generated than hydrazine monohydrate or sodium borohydride.
- the electroless platinum plating solution of the present invention is adjusted to a pH range of 6.5 to 12.0 as described below. The above-mentioned reducing agent can be used throughout this pH range.
- the electroless platinum plating solution of the present invention preferably contains the reducing agent in the range of not less than 0.1 mol/L and not more than 1.0 mol/L and more preferably in the range of not less than 0.2 mol/L and not more than 0.8 mol/L.
- the content of the reducing agent in the electroless platinum plating solution is less than 0.1 mol/L, undeposited areas may occur.
- it exceeds 1.0 mol/L the reducing action of the reducing agent may become excessive and the solution stability of the electroless platinum plating solution may be thus impaired.
- sodium formate, potassium formate and ammonium formate can be used as the formates.
- Sodium formate is suitable due to being readily soluble in water and ease of handling.
- the water-soluble platinum compound is used in the electroless platinum plating solution of the present invention, no complexing agent is necessarily required to dissolve the platinum compound in water. However, adding the complexing agent can further stabilize the electroless platinum plating solution.
- the organic acid is preferably one or more compounds selected from aliphatic hydroxy acids having a molecular weight of 90 to 500.
- the complexing agent also acts as a pH buffering material.
- the electroless platinum plating solution of the present invention preferably contains the organic acid in the range of not less than 0.01 mol/L and not more than 0.5 mol/L and more preferably in the range of not less than 0.02 mol/L and not more than 0.3 mol/L.
- the content of the organic acid in the electroless platinum plating solution is less than 0.01 mol/L, it may not act as a complexing agent. When it exceeds 0.5 mol/L, plating itself can be performed well but economic efficiency decreases.
- the electroless platinum plating solution of the present invention may further contain various components such as a surfactant, a stress relaxant and a pH adjusting agent.
- surfactant examples include polyethylene glycol and any other various surfactants conventionally known.
- polyethylene glycol the surfactant
- the wettability of the surface of a plating substrate can be improved, and bubbles can be made easier to separate from the surface of the plating substrate when the bubbles are generated on the surface of the plating substrate.
- stress relaxant examples include saccharin, 1,4-butynediol, benzenesulfonic acid and naphthalenedisulfonic acid, and any other various stress relaxants conventionally known.
- the electroless platinum plating solution can be preferably adjusted in the pH range of 6.5 to 13.0 by adding the adjusting agent.
- the pH of the electroless platinum plating solution is less than 6.5, the reducing action of the reducing agent may decrease.
- pH is preferably not more than 13.0 from the viewpoint of workability such as pH adjustment as well as controlling bath.
- adjusting the pH of the electroless platinum plating solution in the above-mentioned range can vary the appearance of the resulting electroless platinum film. For example, when the pH of the electroless platinum plating solution is 7, a gray-colored electroless platinum film can be obtained. When the pH is 12, a white-colored electroless platinum film can be obtained.
- the electroless platinum plating solution of an embodiment according to the present invention since a water-soluble platinum compound such as platinous chloride (II), platinic chloride (IV), hexahydroxoplatinate (IV) or dichlorotetraammineplatinum (II) is used, this platinum compound can form a platinum complex even without the use of complexing agents to easily dissolve it in water.
- the platinum complex formed from the water-soluble platinum compound is more easily reduced than platinum complexes coordinated with ethylenediamine, which are produced in conventional electroless platinum plating solutions.
- formalin, glucose, formic acid or formates having a weak reducing action is used as a reducing agent, the platinum complex can be made to an easily reduced state.
- any of formalin, glucose, formic acid and formates as reducing agents also have a weaker reducing action than hydrazine monohydrate and sodium borohydride.
- the electroless platinum plating solution of the present invention is not decomposed by any of the reducing agents. Therefore, the electroless platinum plating solution of the present invention can provide excellent solution stability even without the use of heavy metal ions or thiol compounds as compared with conventional electroless platinum plating solutions.
- Any of formalin, glucose, formic acid and formates are also suitable in that they reduce the amount of hydrogen generated than the conventional reducing agents such as hydrazine monohydrate and sodium borohydride.
- the electroless platinum plating solution of the present invention contains no compound capable of generating ammonia gas such as ethylenediamine, it can prevent the generation of ammonia gas.
- the example described here uses, as a plating substrate which is an object to be plated, a plating substrate that have a copper film and a nickel film sequentially formed on the surface of an insulating base by electroless plating processing.
- the plating substrate is not limited to the above-mentioned plating substrate but any conventionally known plating substrate can be used.
- the plating substrate is subjected to electrolytic plating processing to form a platinum film (electrolytic platinum film) on the surface of the nickel film.
- the plating substrate having the electrolytic platinum film on the surface of the nickel film is subjected to electroless plating processing by immersing it in an electroless platinum plating solution of the present embodiment.
- the platinum complex in the electroless platinum plating solution can be reduced and deposited on the surface of the electrolytic platinum film to form another platinum film (electroless platinum film) on the electrolytic platinum film.
- the deposition rate is 1 to 2 m/hour, which can be approximately the same deposition rate as that of conventional electroless platinum plating solutions containing dinitrodiammineplatinum or dinitrotetraammineplatinum.
- the working temperature of the electroless platinum plating solution is preferably in the range of 40 to 90° C.
- the temperature is less than 40° C., the plating rate may be slow.
- the temperature exceeds 90° C., the water evaporation amount may increase and the composition variation may thus increase.
- the time of plating with the electroless platinum plating solution depends on the thickness of the electroless platinum film to be formed. For example, in the case of using an electroless platinum plating solution containing 0.005 mol/L of dichlorotetraammineplatinum (II) (1.0 g/L in terms of platinum) as a water-soluble platinum compound, the plating time of 30 minutes allows an electroless platinum film having a thickness of 0.5 ⁇ m to be formed.
- II dichlorotetraammineplatinum
- the above-mentioned reducing agent mainly produces carbon dioxide and water with reduction reaction. Since carbon dioxide and water do not accumulate in the electroless platinum plating solution, the electroless platinum plating solution does not deteriorate and can thus be used for a long time.
- the electroless platinum plating solution of the present embodiment is suitable for plating electronic components made of metals or the like, electrode materials, synthetic resins such as ABS resins, polyamide resins and polycarbonate resins, ceramics having no conductivity such as alumina and zirconia, and the like.
- it can be suitably used for electrodes of oxygen sensors made of ceramics such as zirconia, and the like, as well as various jewelry goods, and the like.
- a nickel film having a thickness of 3 ⁇ m was formed on a copper plate by electrolytic plating processing.
- a plating substrate was prepared by forming a platinum film (electrolytic platinum film) having a thickness of 0.1 ⁇ m on the surface of the nickel film by electrolytic plating processing.
- the resulting electroless platinum plating solution was warmed to a temperature of 70° C., the plating substrate having the electrolytic platinum film thereon was subjected to electroless plating processing by immersing it in the electroless platinum plating solution to form another platinum film (electroless platinum film) on the electrolytic platinum film.
- the thickness of the electroless platinum film was measured every 10 minutes until the immersion time reached 60 minutes. The results are shown in FIG. 1 . From FIG. 1 , the deposition rate during the electroless plating processing was determined to be 1.0 ⁇ m/hour.
- electroless plating processing was performed for 60 minutes to form an electroless platinum film having a thickness of 0.5 ⁇ m.
- the resulting electroless platinum film was visually observed to be gray-colored.
- the surface of the resulting electroless platinum film was observed with a scanning electron microscope (SEM) at a magnification of 30,000 times. As shown in FIG. 2 , the particle size of the platinum particles was large, and the electroless platinum film has a rough surface shape.
- the temperature of the electroless platinum plating solution was changed to 50° C., 60° C., 70° C. or 80° C., and the plating substrate having the electrolytic platinum film formed thereon was subjected to electroless plating processing by immersing it in the electroless platinum plating solution for two hours. At this time, whether platinum deposits were formed in the electroless platinum plating solution or not was observed to determine whether the electroless platinum plating solution was decomposed or not.
- Table 1 In Table 1, X indicates that the electroless platinum plating solution was decomposed within one hour, ⁇ indicates that it was decomposed within two hours, and ⁇ indicates that it was not decomposed at all even after two hours.
- the electroless platinum plating solution kept at a temperature of 50 to 80° C. for two hours was allowed to cool naturally, and on the following day, was warmed again to the same temperature.
- the plating substrate was subjected to electroless plating processing by immersing it in the electroless platinum plating solution for two hours. Even in the electroless platinum plating solution warmed to any of the above temperatures, electroless plating processing was able to be performed normally. This clearly indicates that the electroless platinum plating solution can be used continuously.
- the electroless platinum plating solution was prepared in exactly the same manner as in Example 1 except that the pH (at a temperature of 25° C.) was adjusted to 11.0.
- the resulting electroless platinum plating solution was warmed to a temperature of 70° C., the plating substrate having the electrolytic platinum film thereon was subjected to electroless plating processing by immersing it in the electroless platinum plating solution for 60 minutes to form an electroless platinum film having a thickness of 0.5 ⁇ m on the electrolytic platinum film.
- the resulting electroless platinum film was visually observed to have a white glossy appearance.
- the surface of the resulting electroless platinum film was observed with a SEM at a magnification of 30,000 times. As shown in FIG. 3 , the particle size of the platinum particles was small, and the electroless platinum film has a smooth surface shape.
- Example 2 the electroless platinum plating solution kept at a temperature of 50 to 80° C. for two hours was processed, and on the following day, electroless plating processing was performed. Even in the electroless platinum plating solution warmed to any of the above temperatures, electroless plating processing was able to be performed normally. This clearly indicates that the electroless platinum plating solution can be used continuously.
- the electroless platinum plating solution was prepared in exactly the same manner as in Example 2 except that 0.5 mol/L of hydrazine monohydrate was used instead of sodium formate as a reducing agent.
- the pH (at a temperature of 25° C.) of the electroless platinum plating solution was adjusted to 11.0.
- the resulting electroless platinum plating solution was used to determine whether it was decomposed or not, in exactly the same manner as in Example 1. The results are shown in Table 1.
- the electroless platinum plating solution was prepared in exactly the same manner as in Example 2 except that 0.5 mol/L of sodium borohydride was used instead of sodium formate as a reducing agent.
- the pH (at a temperature of 25° C.) of the electroless platinum plating solution was adjusted to 11.0.
- the resulting electroless platinum plating solution was used to determine whether it was decomposed or not, in exactly the same manner as in Example 1. The results are shown in Table 1.
- the electroless platinum plating solution was prepared in exactly the same manner as in Comparative Example 1 except that 0.005 mol/L of dinitrodiammineplatinum (II) (1.0 g/L in terms of platinum) was used instead of dichlorotetraammineplatinum (II) as a platinum compound.
- the pH (at a temperature of 25° C.) of the electroless platinum plating solution was adjusted to 11.0.
- the resulting electroless platinum plating solution was used to determine whether it was decomposed or not, in exactly the same manner as in Example 1. The results are shown in Table 1.
- the electroless platinum plating solution was prepared in exactly the same manner as in Comparative Example 2 except that 0.005 mol/L of dinitrotetraammineplatinum (II) (1.0 g/L in terms of platinum) was used instead of dichlorotetraammineplatinum (II) as a platinum compound.
- the pH (at a temperature of 25° C.) of the electroless platinum plating solution was adjusted to 11.0.
- the resulting electroless platinum plating solution was used to determine whether it was decomposed or not, in exactly the same manner as in Example 1. The results are shown in Table 1.
- Table 1 clearly indicates that the electroless platinum plating solutions of both of Examples 1 and 2 in which the platinum compound is dichlorotetraammineplatinum (II) and the reducing agent is sodium formate are not decomposed even after two hours at a temperature ranging from 50 to 80° C. and thus have excellent solution stability.
- the reducing agent is hydrazine monohydrate or sodium borohydride are decomposed within one hour at a temperature ranging from 70 to 80° C., and within two hours even at a temperature ranging from 50 to 60° C. and thus has poor solution stability.
- the electroless platinum plating solution of the present invention since the electroless platinum plating solution of the present invention has excellent solution stability, it can thus withstand long use.
- the electroless platinum plating solution of the present invention contains no compound capable of generating ammonia gas such as ethylenediamine or ammonia, it can prevent the generation of ammonia gas. Thus, it can prevent the working environment from deteriorating due to odor associated with the generation of ammonia gas.
- reducing agents such as formalin, glucose, formic acid and formates that have a weak reducing action can be used. In addition, these reducing agents can reduce the amount of hydrogen gas generated as compared with hydrazine monohydrate and sodium borohydride.
- the electroless platinum plating solution of the embodiments of the present invention is suitable for plating electronic components made of metals or the like, electrode materials, various synthetic resins, ceramics, and the like.
- it can be suitably used for electrodes of oxygen sensors made of ceramics such as zirconia, and the like, as well as various jewelry goods, and the like.
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JP2015203809A JP6352879B2 (ja) | 2015-10-15 | 2015-10-15 | 無電解白金めっき液 |
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EP (1) | EP3363928A4 (ja) |
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DE102018126804A1 (de) * | 2018-10-26 | 2020-04-30 | RF360 Europe GmbH | Verfahren zur Herstellung eines elektroakustischen Resonators und elektroakustische Resonatorvorrichtung |
US10941494B2 (en) * | 2017-05-18 | 2021-03-09 | Japan Pure Chemical Co., Ltd. | Electroless platinum plating solution and platinum film obtained using same |
US10947623B2 (en) | 2018-11-30 | 2021-03-16 | C. Uyemura & Co., Ltd. | Electroless plating bath |
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KR102293808B1 (ko) * | 2019-12-02 | 2021-08-24 | (재)한국건설생활환경시험연구원 | 무전해 백금 도금액 조성물 및 이를 이용한 도금방법 |
Citations (2)
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US5298280A (en) * | 1989-12-26 | 1994-03-29 | Olin Corporation | Process for producing an electrode by electroless deposition |
US20110229734A1 (en) * | 2010-03-22 | 2011-09-22 | Unity Semiconductor Corporation | Immersion platinum plating solution |
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JPS5412435B2 (ja) * | 1971-11-22 | 1979-05-23 | ||
JPS54117329A (en) * | 1978-03-06 | 1979-09-12 | Ngk Spark Plug Co | Electroless plating method |
JPH01319683A (ja) * | 1988-06-20 | 1989-12-25 | Electroplating Eng Of Japan Co | 白金コロイド溶液及びそれを用いた無電解白金メッキ方法ならびに白金担持体の製法 |
JP3101061B2 (ja) * | 1992-02-14 | 2000-10-23 | 日本エレクトロプレイテイング・エンジニヤース株式会社 | 白金無電解めっき浴及びそれを用いた白金めっき品の製造方法 |
DE10048844A1 (de) * | 2000-10-02 | 2002-04-11 | Basf Ag | Verfahren zur Herstellung von Platinmetall-Katalysatoren |
JP4849930B2 (ja) * | 2006-03-28 | 2012-01-11 | 日本化学工業株式会社 | 導電性無電解めっき粉体およびその製造方法 |
CN104126149B (zh) * | 2012-02-28 | 2017-03-22 | 旭硝子株式会社 | 电湿润装置、显示装置、透镜 |
DE102014006739B3 (de) * | 2014-05-12 | 2015-06-25 | Albert-Ludwigs-Universität Freiburg | Verfahren zur Beschichtung von Oberflächen mit Nanostrukturen, nach dem Verfahren her- gestelltes Bauteil und Verwendung des Bauteils |
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- 2016-02-29 EP EP16855128.1A patent/EP3363928A4/en active Pending
- 2016-02-29 WO PCT/JP2016/056047 patent/WO2017064874A1/ja active Application Filing
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US5298280A (en) * | 1989-12-26 | 1994-03-29 | Olin Corporation | Process for producing an electrode by electroless deposition |
US20110229734A1 (en) * | 2010-03-22 | 2011-09-22 | Unity Semiconductor Corporation | Immersion platinum plating solution |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US10941494B2 (en) * | 2017-05-18 | 2021-03-09 | Japan Pure Chemical Co., Ltd. | Electroless platinum plating solution and platinum film obtained using same |
DE102018126804A1 (de) * | 2018-10-26 | 2020-04-30 | RF360 Europe GmbH | Verfahren zur Herstellung eines elektroakustischen Resonators und elektroakustische Resonatorvorrichtung |
DE102018126804B4 (de) * | 2018-10-26 | 2020-09-24 | RF360 Europe GmbH | Verfahren zur Herstellung eines elektroakustischen Resonators und elektroakustische Resonatorvorrichtung |
US10947623B2 (en) | 2018-11-30 | 2021-03-16 | C. Uyemura & Co., Ltd. | Electroless plating bath |
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TWI586833B (zh) | 2017-06-11 |
EP3363928A1 (en) | 2018-08-22 |
TW201713798A (zh) | 2017-04-16 |
WO2017064874A1 (ja) | 2017-04-20 |
JP6352879B2 (ja) | 2018-07-04 |
EP3363928A4 (en) | 2019-06-19 |
JP2017075379A (ja) | 2017-04-20 |
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