US20120092324A1 - Touch, handwriting and fingerprint sensor with elastomeric spacer layer - Google Patents

Touch, handwriting and fingerprint sensor with elastomeric spacer layer Download PDF

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Publication number
US20120092324A1
US20120092324A1 US13/271,057 US201113271057A US2012092324A1 US 20120092324 A1 US20120092324 A1 US 20120092324A1 US 201113271057 A US201113271057 A US 201113271057A US 2012092324 A1 US2012092324 A1 US 2012092324A1
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US
United States
Prior art keywords
electrodes
substrate
substantially transparent
implementations
handwriting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US13/271,057
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English (en)
Inventor
Nicholas Ian Buchan
Srinivasan Kodaganallur Ganapathi
Kurt Edward Petersen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SnapTrack Inc
Original Assignee
Qualcomm MEMS Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qualcomm MEMS Technologies Inc filed Critical Qualcomm MEMS Technologies Inc
Priority to US13/271,057 priority Critical patent/US20120092324A1/en
Assigned to QUALCOMM MEMS TECHNOLOGIES, INC. reassignment QUALCOMM MEMS TECHNOLOGIES, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BUCHAN, NICHOLAS IAN, GANAPATHI, SRINIVASAN KODAGANALLUR, PETERSEN, KURT EDWARD
Priority to PCT/US2011/056445 priority patent/WO2012054354A1/en
Priority to TW100137515A priority patent/TW201232360A/zh
Publication of US20120092324A1 publication Critical patent/US20120092324A1/en
Assigned to SNAPTRACK, INC. reassignment SNAPTRACK, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: QUALCOMM MEMS TECHNOLOGIES, INC.
Abandoned legal-status Critical Current

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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
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    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
    • G06F21/30—Authentication, i.e. establishing the identity or authorisation of security principals
    • G06F21/31—User authentication
    • G06F21/32—User authentication using biometric data, e.g. fingerprints, iris scans or voiceprints
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F21/00—Security arrangements for protecting computers, components thereof, programs or data against unauthorised activity
    • G06F21/70—Protecting specific internal or peripheral components, in which the protection of a component leads to protection of the entire computer
    • G06F21/82—Protecting input, output or interconnection devices
    • G06F21/83—Protecting input, output or interconnection devices input devices, e.g. keyboards, mice or controllers thereof
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
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    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/033—Pointing devices displaced or positioned by the user, e.g. mice, trackballs, pens or joysticks; Accessories therefor
    • G06F3/0354—Pointing devices displaced or positioned by the user, e.g. mice, trackballs, pens or joysticks; Accessories therefor with detection of 2D relative movements between the device, or an operating part thereof, and a plane or surface, e.g. 2D mice, trackballs, pens or pucks
    • G06F3/03547—Touch pads, in which fingers can move on a surface
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    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0414—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position
    • G06F3/04144—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position using an array of force sensing means
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    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0414—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position
    • G06F3/04146—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position using pressure sensitive conductive elements delivering a boolean signal and located between crossing sensing lines, e.g. located between X and Y sensing line layers
    • G—PHYSICS
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    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0416—Control or interface arrangements specially adapted for digitisers
    • G06F3/04166—Details of scanning methods, e.g. sampling time, grouping of sub areas or time sharing with display driving
    • G—PHYSICS
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    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0447—Position sensing using the local deformation of sensor cells
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/045—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using resistive elements, e.g. a single continuous surface or two parallel surfaces put in contact
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12—Fingerprints or palmprints
    • G06V40/13—Sensors therefor
    • G06V40/1306—Sensors therefor non-optical, e.g. ultrasonic or capacitive sensing
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04106—Multi-sensing digitiser, i.e. digitiser using at least two different sensing technologies simultaneously or alternatively, e.g. for detecting pen and finger, for saving power or for improving position detection
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.

Definitions

  • a first substantially transparent substrate includes a first substantially transparent substrate.
  • a first plurality of substantially transparent electrodes may be formed in a first region of the first substantially transparent substrate and a second plurality of substantially transparent electrodes may be formed in a second region of the first substantially transparent substrate.
  • a first plurality of resistors may be formed on some, but not all, of the first plurality of electrodes and a second plurality of resistors may be formed on the second plurality of electrodes.
  • FIG. 10A shows an example of a cross-sectional view of a combined sensor device.
  • FIG. 13 shows an example of a top view of a force-sensitive switch implementation.
  • the cover glass of a display device serves as a single or multi-touch sensor, as a handwriting (or note capture) input device, and as a fingerprint sensor. Sensor functionality and resolution can be tailored to specific locations on the cover glass.
  • the area in which the fingerprint sensing elements are located may provide not only fingerprint detection, but also handwriting and touch functionality.
  • the fingerprint sensor may be segregated in a separate, high-resolution zone that only provides fingerprint functionality.
  • the sensor device serves as a combination touch and stylus input device.
  • Various methods of fabrication are described herein, as well as methods for using a device that includes a combined sensor device.
  • a combination PCT sensor and digital resistive touch (DRT) sensor has a passive array of capacitors (PCT) and a passive array of resistive switches (DRT). While the touch sensor and stylus sensor systems generally use different sensing techniques, a holistic approach with a common structure saves on PCB part count, reduces area in an ASIC implementation, reduces power, and eliminates the need for isolation between touch and stylus subsystems.
  • the movable reflective layer When the voltage is reduced from that value, the movable reflective layer maintains its state as the voltage drops back below, e.g., 10-volts, however, the movable reflective layer does not relax completely until the voltage drops below 2-volts.
  • a range of voltage approximately 3 to 7-volts, as shown in FIG. 3 , exists where there is a window of applied voltage within which the device is stable in either the relaxed or actuated state. This is referred to herein as the “hysteresis window” or “stability window.”
  • a common line such as a high addressing voltage VC ADD — H or a low addressing voltage VC ADD — L
  • data can be selectively written to the modulators along that line by application of segment voltages along the respective segment lines.
  • the segment voltages may be selected such that actuation is dependent upon the segment voltage applied.
  • an addressing voltage is applied along a common line
  • application of one segment voltage will result in a pixel voltage within a stability window, causing the pixel to remain unactuated.
  • application of the other segment voltage will result in a pixel voltage beyond the stability window, resulting in actuation of the pixel.
  • the particular segment voltage which causes actuation can vary depending upon which addressing voltage is used.
  • the fixed resistor may be a non-linear device such as a leaky diode or other device that provides a relatively high resistance to current flow.
  • the fixed resistor may include a thin-film conductive cap that serves as a conductive contact surface.
  • DRT digital resistive touch
  • the resultant pressure can be significantly higher than that associated with a finger touch, due to the smaller area of contact between the stylus and the surface. This pressure can be up to two orders of magnitude (or more) greater than the pressure exerted by a finger touch.
  • a different set of electrodes from those used for the touch mode such as upper electrodes 1015 and lower electrodes 1030 a depicted in FIG. 10A
  • the different circuit may sense either the closure of a switch for an implementation such as that shown in FIG. 10A , or the change in parallel plate capacitance for an implementation such as that shown in FIGS. 10B-10D .
  • a compressible layer 1025 is disposed between the upper substrate 905 and the capacitor top electrode 1320 .
  • the compressible layer 1025 may be an insulator that is formed of a material having a sufficiently low elastic modulus that may be easily compressed and does not interfere with the switch to the capacitor.
  • the upper substrate 905 is a flexible membrane disposed on top of the sensor to protect the surface and yet deflect locally when touched, in order to actuate the switches.
  • a thin metal contact region 1037 may be included above the vertical resistor 1035 .
  • block 1635 involves processing and packaging.
  • Block 1635 may involve the singulation of individual combined sensor devices 900 from large substrates such as large plates of glass or long rolls of plastic having multiple combined sensor devices 900 formed thereon by cutting, cleaving, sawing, or other suitable methods. Singulation of sensor devices from larger substrates may be performed prior to block 1635 , such as prior to attaching the upper substrate (see block 1630 ) or prior to applying adhesive to the compressible material (see block 1625 ).
  • Block 1635 may involve configuring combined sensor devices 900 for electrical communication with one or more sensor controllers, such as the combined sensor controller 77 described below with reference to FIG. 25B .
  • Block 1635 may involve attaching combined sensor devices 900 to a display device 40 such as described elsewhere herein.
  • Block 1635 may involve packaging individual combined sensor devices 900 for shipment or storage.
  • the sensors in the combined sensor device 900 communicate with the microcontroller 1809 , which in turn communicates with application processor 1810 .
  • the communication between these devices may go in both directions.
  • the microcontroller 1809 drives the sensors of the combined sensor device 900 and receives sense data from the sensors.
  • the application processor 1810 may be configured both to monitor the output of the microcontroller 1809 and to send commands to the microcontroller 1809 .
  • the microcontroller 1809 may, for example, be located on the lower substrate 910 , on an attached flex cable, or on an electrically connected printed circuit board.
  • the microcontroller 1809 also may be configured to control a display and/or to perform other functions.
  • a processor also may be implemented as a combination of computing devices, such as a combination of a DSP and a microprocessor, a plurality of microprocessors, one or more microprocessors in conjunction with a DSP core, or any other such configuration. In some implementations, particular steps and methods may be performed by circuitry that is specific to a given function.
  • Disk and disc includes compact disc (CD), laser disc, optical disc, digital versatile disc (DVD), floppy disk, and blu-ray disc where disks usually reproduce data magnetically, while discs reproduce data optically with lasers. Combinations of the above also may be included within the scope of computer-readable media. Additionally, the operations of a method or algorithm may reside as one or any combination or set of codes and instructions on a machine readable medium and computer-readable medium, which may be incorporated into a computer program product.

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Computer Hardware Design (AREA)
  • Computer Security & Cryptography (AREA)
  • Software Systems (AREA)
  • Multimedia (AREA)
  • Optics & Photonics (AREA)
  • Position Input By Displaying (AREA)
  • User Interface Of Digital Computer (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
  • Image Input (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
US13/271,057 2010-10-18 2011-10-11 Touch, handwriting and fingerprint sensor with elastomeric spacer layer Abandoned US20120092324A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US13/271,057 US20120092324A1 (en) 2010-10-18 2011-10-11 Touch, handwriting and fingerprint sensor with elastomeric spacer layer
PCT/US2011/056445 WO2012054354A1 (en) 2010-10-18 2011-10-14 Touch, handwriting and fingerprint sensor with elastomeric spacer layer
TW100137515A TW201232360A (en) 2010-10-18 2011-10-17 Touch, handwriting and fingerprint sensor with elastomeric spacer layer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US39405410P 2010-10-18 2010-10-18
US13/271,057 US20120092324A1 (en) 2010-10-18 2011-10-11 Touch, handwriting and fingerprint sensor with elastomeric spacer layer

Publications (1)

Publication Number Publication Date
US20120092324A1 true US20120092324A1 (en) 2012-04-19

Family

ID=45933061

Family Applications (7)

Application Number Title Priority Date Filing Date
US13/271,069 Abandoned US20120092127A1 (en) 2010-10-18 2011-10-11 Multifunctional input device for authentication and security applications
US13/271,049 Abandoned US20120092294A1 (en) 2010-10-18 2011-10-11 Combination touch, handwriting and fingerprint sensor
US13/271,054 Abandoned US20120090757A1 (en) 2010-10-18 2011-10-11 Fabrication of touch, handwriting and fingerprint sensor
US13/271,057 Abandoned US20120092324A1 (en) 2010-10-18 2011-10-11 Touch, handwriting and fingerprint sensor with elastomeric spacer layer
US13/271,063 Abandoned US20120092279A1 (en) 2010-10-18 2011-10-11 Touch sensor with force-actuated switched capacitor
US13/271,065 Expired - Fee Related US8724038B2 (en) 2010-10-18 2011-10-11 Wraparound assembly for combination touch, handwriting and fingerprint sensor
US13/271,039 Expired - Fee Related US8743082B2 (en) 2010-10-18 2011-10-11 Controller architecture for combination touch, handwriting and fingerprint sensor

Family Applications Before (3)

Application Number Title Priority Date Filing Date
US13/271,069 Abandoned US20120092127A1 (en) 2010-10-18 2011-10-11 Multifunctional input device for authentication and security applications
US13/271,049 Abandoned US20120092294A1 (en) 2010-10-18 2011-10-11 Combination touch, handwriting and fingerprint sensor
US13/271,054 Abandoned US20120090757A1 (en) 2010-10-18 2011-10-11 Fabrication of touch, handwriting and fingerprint sensor

Family Applications After (3)

Application Number Title Priority Date Filing Date
US13/271,063 Abandoned US20120092279A1 (en) 2010-10-18 2011-10-11 Touch sensor with force-actuated switched capacitor
US13/271,065 Expired - Fee Related US8724038B2 (en) 2010-10-18 2011-10-11 Wraparound assembly for combination touch, handwriting and fingerprint sensor
US13/271,039 Expired - Fee Related US8743082B2 (en) 2010-10-18 2011-10-11 Controller architecture for combination touch, handwriting and fingerprint sensor

Country Status (7)

Country Link
US (7) US20120092127A1 (enExample)
EP (1) EP2630560A1 (enExample)
JP (1) JP5612218B2 (enExample)
KR (1) KR20140003423A (enExample)
CN (1) CN103168283A (enExample)
TW (7) TW201232359A (enExample)
WO (7) WO2012054353A1 (enExample)

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US8587422B2 (en) 2010-03-31 2013-11-19 Tk Holdings, Inc. Occupant sensing system
US20130321335A1 (en) * 2012-05-29 2013-12-05 Sony Mobile Communications, Inc. Terminal device, information processing method, and storage medium
WO2013163496A3 (en) * 2012-04-27 2013-12-19 Alsentis, Llc Apparatus for determining a touch input stimulus
US8725230B2 (en) 2010-04-02 2014-05-13 Tk Holdings Inc. Steering wheel with hand sensors
US8724038B2 (en) 2010-10-18 2014-05-13 Qualcomm Mems Technologies, Inc. Wraparound assembly for combination touch, handwriting and fingerprint sensor
US20140132553A1 (en) * 2012-11-14 2014-05-15 Samsung Display Co., Ltd. Flexible touch screen panel and flexible display device with the same
US8866497B2 (en) 2009-03-25 2014-10-21 Alsentis, Llc Apparatus and method for determining a touch input
CN104166970A (zh) * 2013-05-16 2014-11-26 北京壹人壹本信息科技有限公司 笔迹数据文件的生成、恢复显示方法及装置、电子装置
US9007190B2 (en) 2010-03-31 2015-04-14 Tk Holdings Inc. Steering wheel sensors
US9024910B2 (en) 2012-04-23 2015-05-05 Qualcomm Mems Technologies, Inc. Touchscreen with bridged force-sensitive resistors
US9032818B2 (en) 2012-07-05 2015-05-19 Nextinput, Inc. Microelectromechanical load sensor and methods of manufacturing the same
US9487388B2 (en) 2012-06-21 2016-11-08 Nextinput, Inc. Ruggedized MEMS force die
US20170052073A1 (en) * 2015-08-19 2017-02-23 Preh Gmbh Capacitive control element with improved malfunction immunity
US20170133357A1 (en) * 2015-11-05 2017-05-11 Innolux Corporation Display device
US9696223B2 (en) 2012-09-17 2017-07-04 Tk Holdings Inc. Single layer force sensor
US9727031B2 (en) 2012-04-13 2017-08-08 Tk Holdings Inc. Pressure sensor including a pressure sensitive material for use with control systems and methods of using the same
KR101765950B1 (ko) 2011-10-27 2017-08-23 엘지이노텍 주식회사 터치 패널
US9851834B2 (en) 2013-09-10 2017-12-26 Alsentis, Llc Time domain differential techniques to characterize various stimuli
US9857923B2 (en) * 2011-10-27 2018-01-02 Lg Innotek Co., Ltd. Touch panel including an elastic intermediate layer
US9902611B2 (en) 2014-01-13 2018-02-27 Nextinput, Inc. Miniaturized and ruggedized wafer level MEMs force sensors
US10466119B2 (en) 2015-06-10 2019-11-05 Nextinput, Inc. Ruggedized wafer level MEMS force sensor with a tolerance trench
US10962427B2 (en) 2019-01-10 2021-03-30 Nextinput, Inc. Slotted MEMS force sensor
US10983558B2 (en) 2017-04-11 2021-04-20 Samsung Electronics Co., Inc. Biometric sensor and device including the same
US11221263B2 (en) 2017-07-19 2022-01-11 Nextinput, Inc. Microelectromechanical force sensor having a strain transfer layer arranged on the sensor die
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TW201232362A (en) 2012-08-01
US8743082B2 (en) 2014-06-03
TW201230161A (en) 2012-07-16
WO2012054350A1 (en) 2012-04-26
WO2012054355A1 (en) 2012-04-26
US20120092279A1 (en) 2012-04-19
EP2630560A1 (en) 2013-08-28
US20120092293A1 (en) 2012-04-19
WO2012054359A1 (en) 2012-04-26
TW201232361A (en) 2012-08-01
JP5612218B2 (ja) 2014-10-22
TW201229852A (en) 2012-07-16
TW201229804A (en) 2012-07-16
US20120092294A1 (en) 2012-04-19
KR20140003423A (ko) 2014-01-09
US20120090757A1 (en) 2012-04-19
JP2013541780A (ja) 2013-11-14
CN103168283A (zh) 2013-06-19
WO2012054358A1 (en) 2012-04-26
US8724038B2 (en) 2014-05-13
WO2012054354A1 (en) 2012-04-26
TW201232360A (en) 2012-08-01
US20120092127A1 (en) 2012-04-19

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