US20060043843A1 - Ultrasonic sensor - Google Patents
Ultrasonic sensor Download PDFInfo
- Publication number
- US20060043843A1 US20060043843A1 US11/208,724 US20872405A US2006043843A1 US 20060043843 A1 US20060043843 A1 US 20060043843A1 US 20872405 A US20872405 A US 20872405A US 2006043843 A1 US2006043843 A1 US 2006043843A1
- Authority
- US
- United States
- Prior art keywords
- ultrasonic sensor
- receiving
- conversion means
- converters
- transmission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000005540 biological transmission Effects 0.000 claims abstract description 297
- 230000001681 protective effect Effects 0.000 claims description 168
- 239000000758 substrate Substances 0.000 claims description 151
- 238000006243 chemical reaction Methods 0.000 claims description 141
- 239000000945 filler Substances 0.000 claims description 61
- 238000012546 transfer Methods 0.000 claims description 55
- 238000000926 separation method Methods 0.000 claims description 50
- 238000000034 method Methods 0.000 claims description 47
- 230000001965 increasing effect Effects 0.000 claims description 22
- 239000007788 liquid Substances 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 21
- 238000004891 communication Methods 0.000 claims description 14
- 239000010408 film Substances 0.000 description 122
- 230000010355 oscillation Effects 0.000 description 86
- 230000000694 effects Effects 0.000 description 69
- 230000035945 sensitivity Effects 0.000 description 50
- 239000000463 material Substances 0.000 description 46
- 239000010409 thin film Substances 0.000 description 18
- 230000000875 corresponding effect Effects 0.000 description 17
- 238000013016 damping Methods 0.000 description 15
- 238000003466 welding Methods 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 230000008859 change Effects 0.000 description 12
- 239000007789 gas Substances 0.000 description 12
- 229920003002 synthetic resin Polymers 0.000 description 12
- 239000000057 synthetic resin Substances 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000000853 adhesive Substances 0.000 description 8
- 230000001070 adhesive effect Effects 0.000 description 8
- 229920001971 elastomer Polymers 0.000 description 8
- 238000005192 partition Methods 0.000 description 8
- 239000005060 rubber Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 150000002739 metals Chemical class 0.000 description 7
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 6
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 6
- 230000002708 enhancing effect Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 229910000838 Al alloy Inorganic materials 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 4
- 230000002596 correlated effect Effects 0.000 description 4
- 229910021419 crystalline silicon Inorganic materials 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 230000001902 propagating effect Effects 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
- G01S7/521—Constructional features
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
- B06B1/0629—Square array
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M1/00—Frames or casings of engines, machines or apparatus; Frames serving as machinery beds
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/02—Casings; Cabinets ; Supports therefor; Mountings therein
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- General Engineering & Computer Science (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/586,561 US7329975B2 (en) | 2004-08-25 | 2006-10-26 | Ultrasonic sensor |
US12/003,096 US7525237B2 (en) | 2004-08-25 | 2007-12-20 | Ultrasonic sensor |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004245541 | 2004-08-25 | ||
JP2004-245541 | 2004-08-25 | ||
JP2005-42449 | 2005-02-18 | ||
JP2005042449A JP4513596B2 (ja) | 2004-08-25 | 2005-02-18 | 超音波センサ |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/586,561 Continuation US7329975B2 (en) | 2004-08-25 | 2006-10-26 | Ultrasonic sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
US20060043843A1 true US20060043843A1 (en) | 2006-03-02 |
Family
ID=35853755
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/208,724 Abandoned US20060043843A1 (en) | 2004-08-25 | 2005-08-23 | Ultrasonic sensor |
US11/586,561 Active US7329975B2 (en) | 2004-08-25 | 2006-10-26 | Ultrasonic sensor |
US12/003,096 Active US7525237B2 (en) | 2004-08-25 | 2007-12-20 | Ultrasonic sensor |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/586,561 Active US7329975B2 (en) | 2004-08-25 | 2006-10-26 | Ultrasonic sensor |
US12/003,096 Active US7525237B2 (en) | 2004-08-25 | 2007-12-20 | Ultrasonic sensor |
Country Status (6)
Country | Link |
---|---|
US (3) | US20060043843A1 (ja) |
JP (1) | JP4513596B2 (ja) |
KR (1) | KR100693401B1 (ja) |
CN (1) | CN100568020C (ja) |
DE (1) | DE102005040081B4 (ja) |
FR (1) | FR2874780B1 (ja) |
Cited By (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070157731A1 (en) * | 2006-01-11 | 2007-07-12 | Denso Corporation | Ultrasonic sensor |
US20070158502A1 (en) * | 2002-11-04 | 2007-07-12 | Bonutti Peter M | Ultrasonic communication and drag modification |
US20070251324A1 (en) * | 2006-04-26 | 2007-11-01 | Denso Corporation | Ultrasonic sensor and manufacture method of the same |
US20080088206A1 (en) * | 2006-10-13 | 2008-04-17 | Denso Corporation | Resin substrate and ultrasonic sensor using the same |
US20080165620A1 (en) * | 2005-07-20 | 2008-07-10 | Denso Corporation | Obstacle sensor having supersonic sensor |
US20090071255A1 (en) * | 2007-06-12 | 2009-03-19 | Denso Corporation | Ultrasonic sensor and self diagnostic method of the same |
US20090085439A1 (en) * | 2007-09-28 | 2009-04-02 | Denso Corporation | Ultrasonic sensor |
US7821872B2 (en) | 2007-08-31 | 2010-10-26 | Denso Corporation | Method for ultrasonic wave transmission and apparatus for ultrasonic wave transmission |
US20100275675A1 (en) * | 2007-12-05 | 2010-11-04 | Heikki Seppa | Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas |
US20110227449A1 (en) * | 2010-03-19 | 2011-09-22 | Seiko Epson Corporation | Ultrasonic sensor |
US20130098157A1 (en) * | 2011-10-21 | 2013-04-25 | Riso Kagaku Corporation | Ultrasonic sensor |
US20130208572A1 (en) * | 2010-07-30 | 2013-08-15 | Koninklijke Philips Electronics N.V. | Thin film ultrasound transducer |
CN103770701A (zh) * | 2013-05-15 | 2014-05-07 | 宁波保税区攀峒信息科技有限公司 | 一种特定物体近距离视觉盲区人体探测方法及装置 |
US20140276080A1 (en) * | 2010-04-27 | 2014-09-18 | Seiko Epson Corporation | Ultrasonic sensor and electronic device |
US20150258573A1 (en) * | 2014-03-10 | 2015-09-17 | Seiko Epson Corporation | Ultrasonic sensor |
US20160013394A1 (en) * | 2014-07-11 | 2016-01-14 | Microtech Medical Technologies Ltd. | Multi-cell transducer |
US20160027424A1 (en) * | 2013-04-24 | 2016-01-28 | Murata Manufacturing Co., Ltd. | Ultrasonic wave generation apparatus |
US20160036412A1 (en) * | 2014-07-31 | 2016-02-04 | Seiko Epson Corporation | Ultrasonic device and probe as well as electronic apparatus and ultrasonic imaging apparatus |
US20160139250A1 (en) * | 2013-06-20 | 2016-05-19 | Robert Bosch Gmbh | Surroundings-sensing device having a modular ultrasonic transducer, and motor vehicle having such a surroundings-sensing device |
US9348027B2 (en) | 2011-06-13 | 2016-05-24 | Denso Corporation | Ultrasonic sensor device |
US9554775B2 (en) | 2012-03-30 | 2017-01-31 | Seiko Epson Corporation | Ultrasonic transducer element chip, probe, electronic instrument, and ultrasonic diagnostic device |
US9818929B2 (en) | 2013-11-20 | 2017-11-14 | Seiko Epson Corporation | Ultrasonic device, method for manufacturing the same, electronic device and ultrasonic imaging device |
CN109150127A (zh) * | 2018-07-27 | 2019-01-04 | 开元通信技术(厦门)有限公司 | 薄膜体声波谐振器及其制作方法、滤波器 |
CN111208498A (zh) * | 2018-11-22 | 2020-05-29 | 精工爱普生株式会社 | 超声波元件及超声波装置 |
US20200186937A1 (en) * | 2016-12-08 | 2020-06-11 | Bae Systems Plc | Electroacoustic transducer array |
US20210009046A1 (en) * | 2019-07-10 | 2021-01-14 | Denso Corporation | Ultrasonic sensor |
US10929633B2 (en) | 2016-09-18 | 2021-02-23 | Boe Technology Group Co., Ltd. | Fingerprint identification device, touch display panel, and method for driving fingerprint identification device |
CN112805843A (zh) * | 2018-08-01 | 2021-05-14 | 艾科索成像公司 | 用于集成具有混合触点的超声换能器的系统和方法 |
CN112887881A (zh) * | 2019-11-29 | 2021-06-01 | 精工爱普生株式会社 | 超声波设备 |
US11181627B2 (en) * | 2018-02-05 | 2021-11-23 | Denso Corporation | Ultrasonic sensor |
US11179748B2 (en) | 2017-05-09 | 2021-11-23 | Seiko Epson Corporation | Mounting structure, ultrasonic device, ultrasonic probe, ultrasonic apparatus, and electronic apparatus |
GB2564914B (en) * | 2017-07-19 | 2022-08-31 | Bae Systems Plc | Electroacoustic transducer array |
US11445304B2 (en) | 2019-04-05 | 2022-09-13 | Denso Corporation | Ultrasonic sensor |
US11666239B2 (en) | 2017-03-14 | 2023-06-06 | University Of Connecticut | Biodegradable pressure sensor |
US11678989B2 (en) * | 2019-03-01 | 2023-06-20 | University Of Connecticut | Biodegradable piezoelectric nanofiber scaffold for bone or tissue regeneration |
US11745001B2 (en) | 2020-03-10 | 2023-09-05 | University Of Connecticut | Therapeutic bandage |
US11826495B2 (en) | 2019-03-01 | 2023-11-28 | University Of Connecticut | Biodegradable piezoelectric ultrasonic transducer system |
US11910720B2 (en) | 2019-12-26 | 2024-02-20 | Seiko Epson Corporation | Piezoelectric device and MEMS device |
US11917922B2 (en) * | 2016-04-27 | 2024-02-27 | Seiko Epson Corporation | Mounting structure, ultrasonic device, ultrasonic probe, ultrasonic apparatus, and electronic apparatus |
Families Citing this family (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110022509A1 (en) * | 2005-11-13 | 2011-01-27 | Rosenthal Collins Group, L.L.C. | Method and system for electronic trading via a yield curve on plural network devices |
JP4787648B2 (ja) * | 2006-03-29 | 2011-10-05 | パナソニック株式会社 | コンデンサマイクロホンの製造方法およびコンデンサマイクロホン |
JP5313877B2 (ja) * | 2006-04-19 | 2013-10-09 | コモンウェルス サイエンティフィック アンドインダストリアル リサーチ オーガナイゼーション | 超音波トランスデューサシステム |
JP2007306043A (ja) * | 2006-05-08 | 2007-11-22 | Denso Corp | 超音波センサ |
JP4702255B2 (ja) * | 2006-10-13 | 2011-06-15 | 株式会社デンソー | 超音波センサ |
US7863856B2 (en) * | 2008-01-11 | 2011-01-04 | Modu Ltd. | Bi-directional battery charging for coupled electronic devices |
JP4958631B2 (ja) * | 2007-05-14 | 2012-06-20 | 株式会社日立製作所 | 超音波送受信デバイス及びそれを用いた超音波探触子 |
DE102008054533B8 (de) | 2007-12-26 | 2013-02-14 | Denso Corporation | Ultraschallsensor |
GB0916480D0 (en) * | 2009-09-21 | 2009-10-28 | Univ Dundee | Wire bond free connection of high frequency piezoelectric ultrasound transducer arrays |
JP5671876B2 (ja) * | 2009-11-16 | 2015-02-18 | セイコーエプソン株式会社 | 超音波トランスデューサー、超音波センサー、超音波トランスデューサーの製造方法、および超音波センサーの製造方法 |
JP5600431B2 (ja) * | 2009-12-28 | 2014-10-01 | 日本碍子株式会社 | 障害物の超音波検知デバイス |
JP5517642B2 (ja) * | 2010-01-26 | 2014-06-11 | キヤノン株式会社 | 音響波探触子 |
FR2965249B1 (fr) * | 2010-09-28 | 2013-03-15 | Eurocopter France | Systeme de degivrage ameliore pour voilure fixe ou tournante d'un aeronef |
FR2966813A1 (fr) * | 2010-10-29 | 2012-05-04 | Thales Sa | Microsysteme electromecanique (mems). |
DE102011079646A1 (de) * | 2011-07-22 | 2013-02-07 | Robert Bosch Gmbh | Ultraschallsensorvorrichtung zum Erfassen und/oder Senden von Ultraschall |
DE102011084537B4 (de) | 2011-10-14 | 2017-05-04 | Robert Bosch Gmbh | Ultraschallsensorarray |
JP5885296B2 (ja) * | 2012-02-15 | 2016-03-15 | 日本電波工業株式会社 | 超音波探触子 |
DE102012204638A1 (de) * | 2012-03-22 | 2013-09-26 | Robert Bosch Gmbh | Ultraschallsensor und Verfahren zur Messung eines Objektabstands |
JP6019671B2 (ja) * | 2012-03-30 | 2016-11-02 | セイコーエプソン株式会社 | 超音波プローブ並びに電子機器および超音波診断装置 |
JP6065421B2 (ja) * | 2012-06-15 | 2017-01-25 | セイコーエプソン株式会社 | 超音波プローブおよび超音波検査装置 |
JP6135088B2 (ja) * | 2012-10-12 | 2017-05-31 | セイコーエプソン株式会社 | 超音波トランスデューサーデバイス、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置 |
US20140265732A1 (en) * | 2013-03-15 | 2014-09-18 | Piezotech, Llc | Pressure-compensated transducer assembly |
JP6442821B2 (ja) * | 2013-09-30 | 2018-12-26 | セイコーエプソン株式会社 | 超音波デバイス及び電子機器 |
CA2929723C (en) | 2013-12-12 | 2020-09-15 | Qualcomm Incorporated | Micromechanical ultrasonic transducers and display |
JP6458934B2 (ja) * | 2013-12-18 | 2019-01-30 | セイコーエプソン株式会社 | 超音波センサー |
US9772314B2 (en) | 2013-12-18 | 2017-09-26 | Seiko Epson Corporation | Ultrasonic sensor and measuring method using the same, and method of manufacturing ultrasonic sensor |
CA2950919A1 (en) * | 2014-07-08 | 2016-01-14 | Qualcomm Incorporated | Piezoelectric ultrasonic transducer and process |
JP6587051B2 (ja) * | 2015-03-24 | 2019-10-09 | セイコーエプソン株式会社 | 超音波センサー及びその製造方法 |
US9506790B2 (en) * | 2015-03-24 | 2016-11-29 | Daniel Measurement And Control, Inc. | Transducer mini-horn array for ultrasonic flow meter |
DE102015209238A1 (de) * | 2015-05-20 | 2016-11-24 | Robert Bosch Gmbh | Akustischer Sensor zum Senden und Empfangen akustischer Signale |
DE102015213989A1 (de) | 2015-07-24 | 2017-01-26 | Robert Bosch Gmbh | Akustischer Sensor zum Aussenden und/oder Empfangen akustischer Signale |
CN107683611B (zh) * | 2015-08-31 | 2019-10-18 | 丰达电机株式会社 | 电声转换器、具有电声转换器的组装体以及具有该组装体的电声转换装置 |
WO2017043223A1 (ja) * | 2015-09-10 | 2017-03-16 | 株式会社村田製作所 | 圧電振動デバイス |
JP6728630B2 (ja) * | 2015-10-29 | 2020-07-22 | セイコーエプソン株式会社 | 圧電素子、圧電モジュール、電子機器、及び圧電素子の製造方法 |
DE102015223502A1 (de) | 2015-11-27 | 2017-06-01 | Robert Bosch Gmbh | Akustisch sensitives Gehäuse und Verfahren zum Empfangen von akustischen Signalen |
JP6801328B2 (ja) * | 2016-04-27 | 2020-12-16 | セイコーエプソン株式会社 | 実装構造体、超音波デバイス、超音波探触子、超音波装置、及び電子機器 |
CN105835774A (zh) * | 2016-06-08 | 2016-08-10 | 成都谷辘信息技术有限公司 | 一种基于gps的车辆防撞预警系统 |
TWI592657B (zh) * | 2016-08-08 | 2017-07-21 | 國立臺灣科技大學 | 能產生不同振動頻率的壓電材料構件及探頭結構 |
CN107797114A (zh) * | 2016-09-02 | 2018-03-13 | 法雷奥汽车内部控制(深圳)有限公司 | 一种用于机动车的超声波传感器 |
WO2018047585A1 (ja) * | 2016-09-07 | 2018-03-15 | 株式会社アルバック | デバイス及びデバイスの製造方法並びにアレイ型の超音波プローブの製造方法 |
JP6265578B1 (ja) * | 2016-09-07 | 2018-01-24 | 株式会社アルバック | デバイス及びデバイスの製造方法並びにアレイ型の超音波プローブの製造方法 |
EP3805753B1 (en) * | 2016-12-21 | 2022-04-27 | Honeywell International Inc. | Explosion proof piezoelectric ultrasonic detector |
JP6939219B2 (ja) * | 2017-08-03 | 2021-09-22 | セイコーエプソン株式会社 | 超音波装置 |
JP7192510B2 (ja) * | 2018-02-05 | 2022-12-20 | 株式会社デンソー | 超音波センサ |
KR102415468B1 (ko) | 2018-02-14 | 2022-07-01 | 삼성전자주식회사 | 디스플레이의 아래에 배치된 생체 센서와 디스플레이 사이의 공간을 채우기 위한 충진재를 포함하는 전자 장치 |
US10966683B2 (en) * | 2018-03-22 | 2021-04-06 | Exo Imaging Inc. | Integrated ultrasonic transducers |
US10748831B2 (en) * | 2018-05-30 | 2020-08-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor packages having thermal through vias (TTV) |
DE102018210486A1 (de) * | 2018-06-27 | 2020-01-02 | Zf Friedrichshafen Ag | Vorrichtung und Verfahren zum Erfassen von Umgebungsgeräuschen |
US11517938B2 (en) * | 2018-08-21 | 2022-12-06 | Invensense, Inc. | Reflection minimization for sensor |
TWI675498B (zh) * | 2018-12-07 | 2019-10-21 | 茂丞科技股份有限公司 | 晶圓級超聲波晶片模組及其製造方法 |
JP7088099B2 (ja) * | 2019-03-25 | 2022-06-21 | 株式会社デンソー | 超音波センサ |
WO2020198257A1 (en) | 2019-03-25 | 2020-10-01 | Exo Imaging, Inc. | Handheld ultrasound imager |
JP7192640B2 (ja) * | 2019-04-23 | 2022-12-20 | 株式会社Soken | 超音波センサ |
TWI729605B (zh) * | 2019-12-04 | 2021-06-01 | 茂丞科技股份有限公司 | 晶圓級超聲波裝置及其製造方法 |
JP7439728B2 (ja) * | 2020-01-08 | 2024-02-28 | 株式会社デンソー | 超音波センサ |
JP7439689B2 (ja) * | 2020-01-14 | 2024-02-28 | 株式会社デンソー | 超音波センサ |
DE102021129855A1 (de) | 2021-11-16 | 2023-05-17 | Infineon Technologies Ag | Ultraschallberührungssensor |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4642508A (en) * | 1984-03-09 | 1987-02-10 | Kabushiki Kaisha Toshiba | Piezoelectric resonating device |
US6341408B2 (en) * | 1996-11-26 | 2002-01-29 | Thomson-Csf | Method of manufacturing a multiple-element acoustic probe comprising a common ground electrode |
US6396199B1 (en) * | 1999-07-02 | 2002-05-28 | Prosonic Co., Ltd. | Ultrasonic linear or curvilinear transducer and connection technique therefore |
US6685657B2 (en) * | 1998-11-20 | 2004-02-03 | Joie P. Jones | Methods for selectively dissolving and removing materials using ultra-high frequency ultrasound |
US6891314B2 (en) * | 2001-08-22 | 2005-05-10 | Fuji Xerox Co., Ltd | Lattice array-structured piezoelectric actuator and method for producing the same |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2452068A (en) * | 1943-01-23 | 1948-10-26 | Submarine Signal Co | Sound pickup device |
US3130275A (en) * | 1962-10-15 | 1964-04-21 | Electro Voice | Microphone |
JPS5935865U (ja) * | 1982-08-31 | 1984-03-06 | 三菱電機株式会社 | 超音波探触子装置 |
DE3721209C2 (de) * | 1987-06-26 | 1997-04-30 | Grieshaber Vega Kg | Schall-/Ultraschallmeßgerät |
DE4139024C1 (ja) * | 1991-11-27 | 1993-04-15 | Siemens Ag, 8000 Muenchen, De | |
US5297553A (en) * | 1992-09-23 | 1994-03-29 | Acuson Corporation | Ultrasound transducer with improved rigid backing |
DE4320549C1 (de) * | 1993-06-21 | 1994-07-14 | Siemens Ag | Ultraschallwandler |
US5459368A (en) * | 1993-08-06 | 1995-10-17 | Matsushita Electric Industrial Co., Ltd. | Surface acoustic wave device mounted module |
KR19980026603A (ko) * | 1996-10-10 | 1998-07-15 | 박병재 | 주차시 머플러 밀림 방지 장치 |
KR200188749Y1 (ko) * | 1996-12-24 | 2000-09-01 | 이구택 | 되돌이탄호퍼내 되돌이탄 레벨검출장치 |
US6250162B1 (en) * | 1998-04-24 | 2001-06-26 | Murata Manufacturing Co., Ltd. | Ultrasonic sensor |
JP4240426B2 (ja) * | 1999-03-30 | 2009-03-18 | 東レエンジニアリング株式会社 | 高周波域のアコースティックエミションの検出方法および検出素子 |
US6894425B1 (en) * | 1999-03-31 | 2005-05-17 | Koninklijke Philips Electronics N.V. | Two-dimensional ultrasound phased array transducer |
JP2001128980A (ja) * | 1999-11-04 | 2001-05-15 | Olympus Optical Co Ltd | 機械走査式超音波探触子 |
US6515402B2 (en) * | 2001-01-24 | 2003-02-04 | Koninklijke Philips Electronics N.V. | Array of ultrasound transducers |
JP3611796B2 (ja) | 2001-02-28 | 2005-01-19 | 松下電器産業株式会社 | 超音波送受波器、超音波送受波器の製造方法及び超音波流量計 |
US6551248B2 (en) * | 2001-07-31 | 2003-04-22 | Koninklijke Philips Electronics N.V. | System for attaching an acoustic element to an integrated circuit |
JP2003284182A (ja) * | 2002-03-25 | 2003-10-03 | Osaka Industrial Promotion Organization | 超音波センサ素子と超音波アレイセンサ装置とそれらの共振周波数の調整方法 |
KR20020050197A (ko) * | 2002-05-06 | 2002-06-26 | 고도영 | 피에조 필름을 이용한 볼펜형 초음파 신호 발생 장치 |
US20060006765A1 (en) * | 2004-07-09 | 2006-01-12 | Jongtae Yuk | Apparatus and method to transmit and receive acoustic wave energy |
-
2005
- 2005-02-18 JP JP2005042449A patent/JP4513596B2/ja not_active Expired - Fee Related
- 2005-08-23 US US11/208,724 patent/US20060043843A1/en not_active Abandoned
- 2005-08-24 CN CNB2005100977084A patent/CN100568020C/zh not_active Expired - Fee Related
- 2005-08-24 FR FR0508723A patent/FR2874780B1/fr not_active Expired - Fee Related
- 2005-08-24 DE DE102005040081A patent/DE102005040081B4/de not_active Expired - Fee Related
- 2005-08-25 KR KR1020050078374A patent/KR100693401B1/ko active IP Right Grant
-
2006
- 2006-10-26 US US11/586,561 patent/US7329975B2/en active Active
-
2007
- 2007-12-20 US US12/003,096 patent/US7525237B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4642508A (en) * | 1984-03-09 | 1987-02-10 | Kabushiki Kaisha Toshiba | Piezoelectric resonating device |
US6341408B2 (en) * | 1996-11-26 | 2002-01-29 | Thomson-Csf | Method of manufacturing a multiple-element acoustic probe comprising a common ground electrode |
US6685657B2 (en) * | 1998-11-20 | 2004-02-03 | Joie P. Jones | Methods for selectively dissolving and removing materials using ultra-high frequency ultrasound |
US6396199B1 (en) * | 1999-07-02 | 2002-05-28 | Prosonic Co., Ltd. | Ultrasonic linear or curvilinear transducer and connection technique therefore |
US6891314B2 (en) * | 2001-08-22 | 2005-05-10 | Fuji Xerox Co., Ltd | Lattice array-structured piezoelectric actuator and method for producing the same |
Cited By (72)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7755519B2 (en) | 2002-11-04 | 2010-07-13 | P Tech, Llc. | Ultrasonic communication and drag modification |
US20070158502A1 (en) * | 2002-11-04 | 2007-07-12 | Bonutti Peter M | Ultrasonic communication and drag modification |
US8482436B2 (en) | 2002-11-04 | 2013-07-09 | P Tech, Llc. | Drag modification system |
US9581179B2 (en) | 2002-11-04 | 2017-02-28 | P Tech, Llc | Systems for modifying a fluid flow of a vehicle |
US7990287B2 (en) | 2002-11-04 | 2011-08-02 | P Tech, Llc. | Ultrasonic drag modulation |
US20100276006A1 (en) * | 2002-11-04 | 2010-11-04 | Bonutti Peter M | Ultrasonic drag modulation |
US7420876B2 (en) | 2005-07-20 | 2008-09-02 | Denso Corporation | Obstacle sensor having supersonic sensor |
US20080165620A1 (en) * | 2005-07-20 | 2008-07-10 | Denso Corporation | Obstacle sensor having supersonic sensor |
US7555955B2 (en) | 2006-01-11 | 2009-07-07 | Denso Corporation | Ultrasonic sensor |
US20070157731A1 (en) * | 2006-01-11 | 2007-07-12 | Denso Corporation | Ultrasonic sensor |
US20070251324A1 (en) * | 2006-04-26 | 2007-11-01 | Denso Corporation | Ultrasonic sensor and manufacture method of the same |
US7730785B2 (en) | 2006-04-26 | 2010-06-08 | Denso Corporation | Ultrasonic sensor and manufacture method of the same |
US7638931B2 (en) * | 2006-10-13 | 2009-12-29 | Denso Corporation | Resin substrate and ultrasonic sensor using the same |
US20080088206A1 (en) * | 2006-10-13 | 2008-04-17 | Denso Corporation | Resin substrate and ultrasonic sensor using the same |
US20090071255A1 (en) * | 2007-06-12 | 2009-03-19 | Denso Corporation | Ultrasonic sensor and self diagnostic method of the same |
US8020447B2 (en) | 2007-06-12 | 2011-09-20 | Denso Corporation | Ultrasonic sensor and self diagnostic method of the same |
US7821872B2 (en) | 2007-08-31 | 2010-10-26 | Denso Corporation | Method for ultrasonic wave transmission and apparatus for ultrasonic wave transmission |
US20090085439A1 (en) * | 2007-09-28 | 2009-04-02 | Denso Corporation | Ultrasonic sensor |
US7714482B2 (en) | 2007-09-28 | 2010-05-11 | Denso Corporation | Ultrasonic sensor |
US8850893B2 (en) * | 2007-12-05 | 2014-10-07 | Valtion Teknillinen Tutkimuskeskus | Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas |
US20100275675A1 (en) * | 2007-12-05 | 2010-11-04 | Heikki Seppa | Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas |
US9462995B2 (en) | 2010-03-19 | 2016-10-11 | Seiko Epson Corporation | Biological testing device including ultrasonic wave transmitting/receiving part |
US9456801B2 (en) | 2010-03-19 | 2016-10-04 | Seiko Epson Corporation | Biological testing device |
US8546997B2 (en) * | 2010-03-19 | 2013-10-01 | Seiko Epson Corporation | Ultrasonic sensor |
US20110227449A1 (en) * | 2010-03-19 | 2011-09-22 | Seiko Epson Corporation | Ultrasonic sensor |
US20140276080A1 (en) * | 2010-04-27 | 2014-09-18 | Seiko Epson Corporation | Ultrasonic sensor and electronic device |
US10512453B2 (en) * | 2010-04-27 | 2019-12-24 | Seiko Epson Corporation | Ultrasonic sensor and electronic device |
US20130208572A1 (en) * | 2010-07-30 | 2013-08-15 | Koninklijke Philips Electronics N.V. | Thin film ultrasound transducer |
US9440258B2 (en) * | 2010-07-30 | 2016-09-13 | Koninklijke Philips Electronics N.V. | Thin film ultrasound transducer |
US9348027B2 (en) | 2011-06-13 | 2016-05-24 | Denso Corporation | Ultrasonic sensor device |
US9207216B2 (en) * | 2011-10-21 | 2015-12-08 | Riso Kagaku Corporation | Ultrasonic sensor having trasmitting and receiving horns |
US20130098157A1 (en) * | 2011-10-21 | 2013-04-25 | Riso Kagaku Corporation | Ultrasonic sensor |
US10040098B2 (en) | 2012-03-30 | 2018-08-07 | Seiko Epson Corporation | Ultrasonic transducer element chip, probe, electronic instrument, and ultrasonic diagnostic device |
US9554775B2 (en) | 2012-03-30 | 2017-01-31 | Seiko Epson Corporation | Ultrasonic transducer element chip, probe, electronic instrument, and ultrasonic diagnostic device |
US20160027424A1 (en) * | 2013-04-24 | 2016-01-28 | Murata Manufacturing Co., Ltd. | Ultrasonic wave generation apparatus |
US10074352B2 (en) * | 2013-04-24 | 2018-09-11 | Murata Manufacturing Co., Ltd. | Ultrasonic wave generation apparatus |
CN103770701A (zh) * | 2013-05-15 | 2014-05-07 | 宁波保税区攀峒信息科技有限公司 | 一种特定物体近距离视觉盲区人体探测方法及装置 |
US20160139250A1 (en) * | 2013-06-20 | 2016-05-19 | Robert Bosch Gmbh | Surroundings-sensing device having a modular ultrasonic transducer, and motor vehicle having such a surroundings-sensing device |
US9818929B2 (en) | 2013-11-20 | 2017-11-14 | Seiko Epson Corporation | Ultrasonic device, method for manufacturing the same, electronic device and ultrasonic imaging device |
US10707407B2 (en) | 2013-11-20 | 2020-07-07 | Seiko Epson Corporation | Ultrasonic device, method for manufacturing the same, electronic device and ultrasonic imaging device |
US11712718B2 (en) | 2014-03-10 | 2023-08-01 | Seiko Epson Corporation | Ultrasonic sensor |
US10252296B2 (en) | 2014-03-10 | 2019-04-09 | Seiko Epson Corporation | Ultrasonic sensor |
US20150258573A1 (en) * | 2014-03-10 | 2015-09-17 | Seiko Epson Corporation | Ultrasonic sensor |
US9987663B2 (en) * | 2014-03-10 | 2018-06-05 | Seiko Epson Corporation | Ultrasonic sensor |
US11167314B2 (en) | 2014-03-10 | 2021-11-09 | Seiko Epson Corporation | Ultrasonic sensor |
US20160013394A1 (en) * | 2014-07-11 | 2016-01-14 | Microtech Medical Technologies Ltd. | Multi-cell transducer |
US11800806B2 (en) * | 2014-07-11 | 2023-10-24 | Microtech Medical Technologies Ltd. | Method for manufacturing a multi-cell transducer |
US10847708B2 (en) * | 2014-07-11 | 2020-11-24 | Microtech Medical Technologies Ltd. | Multi-cell transducer |
US20210043825A1 (en) * | 2014-07-11 | 2021-02-11 | Microtech Medical Technologies Ltd. | Multi-cell transducer |
US20160036412A1 (en) * | 2014-07-31 | 2016-02-04 | Seiko Epson Corporation | Ultrasonic device and probe as well as electronic apparatus and ultrasonic imaging apparatus |
US9818926B2 (en) * | 2014-07-31 | 2017-11-14 | Seiko Epson Corporation | Ultrasonic device and probe as well as electronic apparatus and ultrasonic imaging apparatus |
US11917922B2 (en) * | 2016-04-27 | 2024-02-27 | Seiko Epson Corporation | Mounting structure, ultrasonic device, ultrasonic probe, ultrasonic apparatus, and electronic apparatus |
US10929633B2 (en) | 2016-09-18 | 2021-02-23 | Boe Technology Group Co., Ltd. | Fingerprint identification device, touch display panel, and method for driving fingerprint identification device |
US20200186937A1 (en) * | 2016-12-08 | 2020-06-11 | Bae Systems Plc | Electroacoustic transducer array |
US20200186936A1 (en) * | 2016-12-08 | 2020-06-11 | Bae Systems Plc | Electroacoustic transducer |
US11800295B2 (en) * | 2016-12-08 | 2023-10-24 | Bae Systems Plc | Electroacoustic transducer |
US11666239B2 (en) | 2017-03-14 | 2023-06-06 | University Of Connecticut | Biodegradable pressure sensor |
US11179748B2 (en) | 2017-05-09 | 2021-11-23 | Seiko Epson Corporation | Mounting structure, ultrasonic device, ultrasonic probe, ultrasonic apparatus, and electronic apparatus |
GB2564914B (en) * | 2017-07-19 | 2022-08-31 | Bae Systems Plc | Electroacoustic transducer array |
US11181627B2 (en) * | 2018-02-05 | 2021-11-23 | Denso Corporation | Ultrasonic sensor |
CN109150127A (zh) * | 2018-07-27 | 2019-01-04 | 开元通信技术(厦门)有限公司 | 薄膜体声波谐振器及其制作方法、滤波器 |
CN112805843A (zh) * | 2018-08-01 | 2021-05-14 | 艾科索成像公司 | 用于集成具有混合触点的超声换能器的系统和方法 |
US20210151661A1 (en) * | 2018-08-01 | 2021-05-20 | Exo Imaging, Inc. | Systems and methods for integrating ultrasonic transducers with hybrid contacts |
CN111208498A (zh) * | 2018-11-22 | 2020-05-29 | 精工爱普生株式会社 | 超声波元件及超声波装置 |
US11826495B2 (en) | 2019-03-01 | 2023-11-28 | University Of Connecticut | Biodegradable piezoelectric ultrasonic transducer system |
US11678989B2 (en) * | 2019-03-01 | 2023-06-20 | University Of Connecticut | Biodegradable piezoelectric nanofiber scaffold for bone or tissue regeneration |
US11445304B2 (en) | 2019-04-05 | 2022-09-13 | Denso Corporation | Ultrasonic sensor |
US11667247B2 (en) * | 2019-07-10 | 2023-06-06 | Denso Corporation | Ultrasonic sensor |
US20210009046A1 (en) * | 2019-07-10 | 2021-01-14 | Denso Corporation | Ultrasonic sensor |
CN112887881A (zh) * | 2019-11-29 | 2021-06-01 | 精工爱普生株式会社 | 超声波设备 |
US11910720B2 (en) | 2019-12-26 | 2024-02-20 | Seiko Epson Corporation | Piezoelectric device and MEMS device |
US11745001B2 (en) | 2020-03-10 | 2023-09-05 | University Of Connecticut | Therapeutic bandage |
Also Published As
Publication number | Publication date |
---|---|
CN100568020C (zh) | 2009-12-09 |
KR100693401B1 (ko) | 2007-03-09 |
US7525237B2 (en) | 2009-04-28 |
US7329975B2 (en) | 2008-02-12 |
JP4513596B2 (ja) | 2010-07-28 |
JP2006094459A (ja) | 2006-04-06 |
FR2874780A1 (fr) | 2006-03-03 |
US20070040477A1 (en) | 2007-02-22 |
CN1740814A (zh) | 2006-03-01 |
FR2874780B1 (fr) | 2011-11-11 |
DE102005040081A1 (de) | 2006-03-16 |
US20080116765A1 (en) | 2008-05-22 |
KR20060050660A (ko) | 2006-05-19 |
DE102005040081B4 (de) | 2012-06-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7525237B2 (en) | Ultrasonic sensor | |
US8540640B2 (en) | Ultrasonic probe and method for manufacturing the same and ultrasonic diagnostic device | |
JP4645436B2 (ja) | 超音波センサ | |
JP4917401B2 (ja) | 障害物検出装置 | |
US9258650B2 (en) | Capacitive electromechanical transducer | |
KR100770801B1 (ko) | 센서 부착 구조 및 초음파 센싱 장치 | |
JP7211220B2 (ja) | 超音波センサ | |
US8659101B2 (en) | Physical quantity detector | |
US7555955B2 (en) | Ultrasonic sensor | |
US20080218030A1 (en) | Ultrasonic transducer | |
US7513158B2 (en) | Ultrasonic sensor for use in automotive vehicle | |
US20060232165A1 (en) | Ultrasonic transmitter-receiver | |
CN213783602U (zh) | 骨传导检测装置和骨传导器件 | |
US10508919B2 (en) | Composite sensor | |
JP7439728B2 (ja) | 超音波センサ | |
JP7226154B2 (ja) | 超音波センサ | |
US20240058841A1 (en) | Device with ultrasonic transducer and method for manufacturing same | |
CN217561728U (zh) | 一种片上双芯片集成的飞行时间传感器 | |
CN214192569U (zh) | 超声波飞行传感器的封装结构及测距电子装置 | |
CN115321467A (zh) | Mems芯片封装结构、具有其的超声波传感器及封装工艺 | |
CN104113301A (zh) | 振子、振荡器、电子设备、移动体和振子的制造方法 | |
JP2024046263A (ja) | 超音波プローブ及び超音波診断装置 | |
JPH0552120B2 (ja) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: DENSO CORPORATION, JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SUGIURA, MAKIKO;YOSHIDA, TAKAHIKO;TOKUNAGA, MASATOSHI;AND OTHERS;REEL/FRAME:016910/0705;SIGNING DATES FROM 20050726 TO 20050727 Owner name: NIPPON SOKEN, INC., JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SUGIURA, MAKIKO;YOSHIDA, TAKAHIKO;TOKUNAGA, MASATOSHI;AND OTHERS;REEL/FRAME:016910/0705;SIGNING DATES FROM 20050726 TO 20050727 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |