US20060043843A1 - Ultrasonic sensor - Google Patents

Ultrasonic sensor Download PDF

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Publication number
US20060043843A1
US20060043843A1 US11/208,724 US20872405A US2006043843A1 US 20060043843 A1 US20060043843 A1 US 20060043843A1 US 20872405 A US20872405 A US 20872405A US 2006043843 A1 US2006043843 A1 US 2006043843A1
Authority
US
United States
Prior art keywords
ultrasonic sensor
receiving
conversion means
converters
transmission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/208,724
Other languages
English (en)
Inventor
Makiko Sugiura
Takahiko Yoshida
Masatoshi Tokunaga
Yasutoshi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Soken Inc
Original Assignee
Denso Corp
Nippon Soken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp, Nippon Soken Inc filed Critical Denso Corp
Assigned to NIPPON SOKEN, INC., DENSO CORPORATION reassignment NIPPON SOKEN, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TOKUNAGA, MASATOSHI, SUGIURA, MAKIKO, SUZUKI, YASUTOSHI, YOSHIDA, TAKAHIKO
Publication of US20060043843A1 publication Critical patent/US20060043843A1/en
Priority to US11/586,561 priority Critical patent/US7329975B2/en
Priority to US12/003,096 priority patent/US7525237B2/en
Abandoned legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/521Constructional features
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629Square array
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16MFRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M1/00Frames or casings of engines, machines or apparatus; Frames serving as machinery beds
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00Details of transducers, loudspeakers or microphones
    • H04R1/02Casings; Cabinets ; Supports therefor; Mountings therein

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • General Engineering & Computer Science (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
US11/208,724 2004-08-25 2005-08-23 Ultrasonic sensor Abandoned US20060043843A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US11/586,561 US7329975B2 (en) 2004-08-25 2006-10-26 Ultrasonic sensor
US12/003,096 US7525237B2 (en) 2004-08-25 2007-12-20 Ultrasonic sensor

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2004245541 2004-08-25
JP2004-245541 2004-08-25
JP2005-42449 2005-02-18
JP2005042449A JP4513596B2 (ja) 2004-08-25 2005-02-18 超音波センサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US11/586,561 Continuation US7329975B2 (en) 2004-08-25 2006-10-26 Ultrasonic sensor

Publications (1)

Publication Number Publication Date
US20060043843A1 true US20060043843A1 (en) 2006-03-02

Family

ID=35853755

Family Applications (3)

Application Number Title Priority Date Filing Date
US11/208,724 Abandoned US20060043843A1 (en) 2004-08-25 2005-08-23 Ultrasonic sensor
US11/586,561 Active US7329975B2 (en) 2004-08-25 2006-10-26 Ultrasonic sensor
US12/003,096 Active US7525237B2 (en) 2004-08-25 2007-12-20 Ultrasonic sensor

Family Applications After (2)

Application Number Title Priority Date Filing Date
US11/586,561 Active US7329975B2 (en) 2004-08-25 2006-10-26 Ultrasonic sensor
US12/003,096 Active US7525237B2 (en) 2004-08-25 2007-12-20 Ultrasonic sensor

Country Status (6)

Country Link
US (3) US20060043843A1 (ja)
JP (1) JP4513596B2 (ja)
KR (1) KR100693401B1 (ja)
CN (1) CN100568020C (ja)
DE (1) DE102005040081B4 (ja)
FR (1) FR2874780B1 (ja)

Cited By (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070157731A1 (en) * 2006-01-11 2007-07-12 Denso Corporation Ultrasonic sensor
US20070158502A1 (en) * 2002-11-04 2007-07-12 Bonutti Peter M Ultrasonic communication and drag modification
US20070251324A1 (en) * 2006-04-26 2007-11-01 Denso Corporation Ultrasonic sensor and manufacture method of the same
US20080088206A1 (en) * 2006-10-13 2008-04-17 Denso Corporation Resin substrate and ultrasonic sensor using the same
US20080165620A1 (en) * 2005-07-20 2008-07-10 Denso Corporation Obstacle sensor having supersonic sensor
US20090071255A1 (en) * 2007-06-12 2009-03-19 Denso Corporation Ultrasonic sensor and self diagnostic method of the same
US20090085439A1 (en) * 2007-09-28 2009-04-02 Denso Corporation Ultrasonic sensor
US7821872B2 (en) 2007-08-31 2010-10-26 Denso Corporation Method for ultrasonic wave transmission and apparatus for ultrasonic wave transmission
US20100275675A1 (en) * 2007-12-05 2010-11-04 Heikki Seppa Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas
US20110227449A1 (en) * 2010-03-19 2011-09-22 Seiko Epson Corporation Ultrasonic sensor
US20130098157A1 (en) * 2011-10-21 2013-04-25 Riso Kagaku Corporation Ultrasonic sensor
US20130208572A1 (en) * 2010-07-30 2013-08-15 Koninklijke Philips Electronics N.V. Thin film ultrasound transducer
CN103770701A (zh) * 2013-05-15 2014-05-07 宁波保税区攀峒信息科技有限公司 一种特定物体近距离视觉盲区人体探测方法及装置
US20140276080A1 (en) * 2010-04-27 2014-09-18 Seiko Epson Corporation Ultrasonic sensor and electronic device
US20150258573A1 (en) * 2014-03-10 2015-09-17 Seiko Epson Corporation Ultrasonic sensor
US20160013394A1 (en) * 2014-07-11 2016-01-14 Microtech Medical Technologies Ltd. Multi-cell transducer
US20160027424A1 (en) * 2013-04-24 2016-01-28 Murata Manufacturing Co., Ltd. Ultrasonic wave generation apparatus
US20160036412A1 (en) * 2014-07-31 2016-02-04 Seiko Epson Corporation Ultrasonic device and probe as well as electronic apparatus and ultrasonic imaging apparatus
US20160139250A1 (en) * 2013-06-20 2016-05-19 Robert Bosch Gmbh Surroundings-sensing device having a modular ultrasonic transducer, and motor vehicle having such a surroundings-sensing device
US9348027B2 (en) 2011-06-13 2016-05-24 Denso Corporation Ultrasonic sensor device
US9554775B2 (en) 2012-03-30 2017-01-31 Seiko Epson Corporation Ultrasonic transducer element chip, probe, electronic instrument, and ultrasonic diagnostic device
US9818929B2 (en) 2013-11-20 2017-11-14 Seiko Epson Corporation Ultrasonic device, method for manufacturing the same, electronic device and ultrasonic imaging device
CN109150127A (zh) * 2018-07-27 2019-01-04 开元通信技术(厦门)有限公司 薄膜体声波谐振器及其制作方法、滤波器
CN111208498A (zh) * 2018-11-22 2020-05-29 精工爱普生株式会社 超声波元件及超声波装置
US20200186937A1 (en) * 2016-12-08 2020-06-11 Bae Systems Plc Electroacoustic transducer array
US20210009046A1 (en) * 2019-07-10 2021-01-14 Denso Corporation Ultrasonic sensor
US10929633B2 (en) 2016-09-18 2021-02-23 Boe Technology Group Co., Ltd. Fingerprint identification device, touch display panel, and method for driving fingerprint identification device
CN112805843A (zh) * 2018-08-01 2021-05-14 艾科索成像公司 用于集成具有混合触点的超声换能器的系统和方法
CN112887881A (zh) * 2019-11-29 2021-06-01 精工爱普生株式会社 超声波设备
US11181627B2 (en) * 2018-02-05 2021-11-23 Denso Corporation Ultrasonic sensor
US11179748B2 (en) 2017-05-09 2021-11-23 Seiko Epson Corporation Mounting structure, ultrasonic device, ultrasonic probe, ultrasonic apparatus, and electronic apparatus
GB2564914B (en) * 2017-07-19 2022-08-31 Bae Systems Plc Electroacoustic transducer array
US11445304B2 (en) 2019-04-05 2022-09-13 Denso Corporation Ultrasonic sensor
US11666239B2 (en) 2017-03-14 2023-06-06 University Of Connecticut Biodegradable pressure sensor
US11678989B2 (en) * 2019-03-01 2023-06-20 University Of Connecticut Biodegradable piezoelectric nanofiber scaffold for bone or tissue regeneration
US11745001B2 (en) 2020-03-10 2023-09-05 University Of Connecticut Therapeutic bandage
US11826495B2 (en) 2019-03-01 2023-11-28 University Of Connecticut Biodegradable piezoelectric ultrasonic transducer system
US11910720B2 (en) 2019-12-26 2024-02-20 Seiko Epson Corporation Piezoelectric device and MEMS device
US11917922B2 (en) * 2016-04-27 2024-02-27 Seiko Epson Corporation Mounting structure, ultrasonic device, ultrasonic probe, ultrasonic apparatus, and electronic apparatus

Families Citing this family (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110022509A1 (en) * 2005-11-13 2011-01-27 Rosenthal Collins Group, L.L.C. Method and system for electronic trading via a yield curve on plural network devices
JP4787648B2 (ja) * 2006-03-29 2011-10-05 パナソニック株式会社 コンデンサマイクロホンの製造方法およびコンデンサマイクロホン
JP5313877B2 (ja) * 2006-04-19 2013-10-09 コモンウェルス サイエンティフィック アンドインダストリアル リサーチ オーガナイゼーション 超音波トランスデューサシステム
JP2007306043A (ja) * 2006-05-08 2007-11-22 Denso Corp 超音波センサ
JP4702255B2 (ja) * 2006-10-13 2011-06-15 株式会社デンソー 超音波センサ
US7863856B2 (en) * 2008-01-11 2011-01-04 Modu Ltd. Bi-directional battery charging for coupled electronic devices
JP4958631B2 (ja) * 2007-05-14 2012-06-20 株式会社日立製作所 超音波送受信デバイス及びそれを用いた超音波探触子
DE102008054533B8 (de) 2007-12-26 2013-02-14 Denso Corporation Ultraschallsensor
GB0916480D0 (en) * 2009-09-21 2009-10-28 Univ Dundee Wire bond free connection of high frequency piezoelectric ultrasound transducer arrays
JP5671876B2 (ja) * 2009-11-16 2015-02-18 セイコーエプソン株式会社 超音波トランスデューサー、超音波センサー、超音波トランスデューサーの製造方法、および超音波センサーの製造方法
JP5600431B2 (ja) * 2009-12-28 2014-10-01 日本碍子株式会社 障害物の超音波検知デバイス
JP5517642B2 (ja) * 2010-01-26 2014-06-11 キヤノン株式会社 音響波探触子
FR2965249B1 (fr) * 2010-09-28 2013-03-15 Eurocopter France Systeme de degivrage ameliore pour voilure fixe ou tournante d'un aeronef
FR2966813A1 (fr) * 2010-10-29 2012-05-04 Thales Sa Microsysteme electromecanique (mems).
DE102011079646A1 (de) * 2011-07-22 2013-02-07 Robert Bosch Gmbh Ultraschallsensorvorrichtung zum Erfassen und/oder Senden von Ultraschall
DE102011084537B4 (de) 2011-10-14 2017-05-04 Robert Bosch Gmbh Ultraschallsensorarray
JP5885296B2 (ja) * 2012-02-15 2016-03-15 日本電波工業株式会社 超音波探触子
DE102012204638A1 (de) * 2012-03-22 2013-09-26 Robert Bosch Gmbh Ultraschallsensor und Verfahren zur Messung eines Objektabstands
JP6019671B2 (ja) * 2012-03-30 2016-11-02 セイコーエプソン株式会社 超音波プローブ並びに電子機器および超音波診断装置
JP6065421B2 (ja) * 2012-06-15 2017-01-25 セイコーエプソン株式会社 超音波プローブおよび超音波検査装置
JP6135088B2 (ja) * 2012-10-12 2017-05-31 セイコーエプソン株式会社 超音波トランスデューサーデバイス、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置
US20140265732A1 (en) * 2013-03-15 2014-09-18 Piezotech, Llc Pressure-compensated transducer assembly
JP6442821B2 (ja) * 2013-09-30 2018-12-26 セイコーエプソン株式会社 超音波デバイス及び電子機器
CA2929723C (en) 2013-12-12 2020-09-15 Qualcomm Incorporated Micromechanical ultrasonic transducers and display
JP6458934B2 (ja) * 2013-12-18 2019-01-30 セイコーエプソン株式会社 超音波センサー
US9772314B2 (en) 2013-12-18 2017-09-26 Seiko Epson Corporation Ultrasonic sensor and measuring method using the same, and method of manufacturing ultrasonic sensor
CA2950919A1 (en) * 2014-07-08 2016-01-14 Qualcomm Incorporated Piezoelectric ultrasonic transducer and process
JP6587051B2 (ja) * 2015-03-24 2019-10-09 セイコーエプソン株式会社 超音波センサー及びその製造方法
US9506790B2 (en) * 2015-03-24 2016-11-29 Daniel Measurement And Control, Inc. Transducer mini-horn array for ultrasonic flow meter
DE102015209238A1 (de) * 2015-05-20 2016-11-24 Robert Bosch Gmbh Akustischer Sensor zum Senden und Empfangen akustischer Signale
DE102015213989A1 (de) 2015-07-24 2017-01-26 Robert Bosch Gmbh Akustischer Sensor zum Aussenden und/oder Empfangen akustischer Signale
CN107683611B (zh) * 2015-08-31 2019-10-18 丰达电机株式会社 电声转换器、具有电声转换器的组装体以及具有该组装体的电声转换装置
WO2017043223A1 (ja) * 2015-09-10 2017-03-16 株式会社村田製作所 圧電振動デバイス
JP6728630B2 (ja) * 2015-10-29 2020-07-22 セイコーエプソン株式会社 圧電素子、圧電モジュール、電子機器、及び圧電素子の製造方法
DE102015223502A1 (de) 2015-11-27 2017-06-01 Robert Bosch Gmbh Akustisch sensitives Gehäuse und Verfahren zum Empfangen von akustischen Signalen
JP6801328B2 (ja) * 2016-04-27 2020-12-16 セイコーエプソン株式会社 実装構造体、超音波デバイス、超音波探触子、超音波装置、及び電子機器
CN105835774A (zh) * 2016-06-08 2016-08-10 成都谷辘信息技术有限公司 一种基于gps的车辆防撞预警系统
TWI592657B (zh) * 2016-08-08 2017-07-21 國立臺灣科技大學 能產生不同振動頻率的壓電材料構件及探頭結構
CN107797114A (zh) * 2016-09-02 2018-03-13 法雷奥汽车内部控制(深圳)有限公司 一种用于机动车的超声波传感器
WO2018047585A1 (ja) * 2016-09-07 2018-03-15 株式会社アルバック デバイス及びデバイスの製造方法並びにアレイ型の超音波プローブの製造方法
JP6265578B1 (ja) * 2016-09-07 2018-01-24 株式会社アルバック デバイス及びデバイスの製造方法並びにアレイ型の超音波プローブの製造方法
EP3805753B1 (en) * 2016-12-21 2022-04-27 Honeywell International Inc. Explosion proof piezoelectric ultrasonic detector
JP6939219B2 (ja) * 2017-08-03 2021-09-22 セイコーエプソン株式会社 超音波装置
JP7192510B2 (ja) * 2018-02-05 2022-12-20 株式会社デンソー 超音波センサ
KR102415468B1 (ko) 2018-02-14 2022-07-01 삼성전자주식회사 디스플레이의 아래에 배치된 생체 센서와 디스플레이 사이의 공간을 채우기 위한 충진재를 포함하는 전자 장치
US10966683B2 (en) * 2018-03-22 2021-04-06 Exo Imaging Inc. Integrated ultrasonic transducers
US10748831B2 (en) * 2018-05-30 2020-08-18 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor packages having thermal through vias (TTV)
DE102018210486A1 (de) * 2018-06-27 2020-01-02 Zf Friedrichshafen Ag Vorrichtung und Verfahren zum Erfassen von Umgebungsgeräuschen
US11517938B2 (en) * 2018-08-21 2022-12-06 Invensense, Inc. Reflection minimization for sensor
TWI675498B (zh) * 2018-12-07 2019-10-21 茂丞科技股份有限公司 晶圓級超聲波晶片模組及其製造方法
JP7088099B2 (ja) * 2019-03-25 2022-06-21 株式会社デンソー 超音波センサ
WO2020198257A1 (en) 2019-03-25 2020-10-01 Exo Imaging, Inc. Handheld ultrasound imager
JP7192640B2 (ja) * 2019-04-23 2022-12-20 株式会社Soken 超音波センサ
TWI729605B (zh) * 2019-12-04 2021-06-01 茂丞科技股份有限公司 晶圓級超聲波裝置及其製造方法
JP7439728B2 (ja) * 2020-01-08 2024-02-28 株式会社デンソー 超音波センサ
JP7439689B2 (ja) * 2020-01-14 2024-02-28 株式会社デンソー 超音波センサ
DE102021129855A1 (de) 2021-11-16 2023-05-17 Infineon Technologies Ag Ultraschallberührungssensor

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4642508A (en) * 1984-03-09 1987-02-10 Kabushiki Kaisha Toshiba Piezoelectric resonating device
US6341408B2 (en) * 1996-11-26 2002-01-29 Thomson-Csf Method of manufacturing a multiple-element acoustic probe comprising a common ground electrode
US6396199B1 (en) * 1999-07-02 2002-05-28 Prosonic Co., Ltd. Ultrasonic linear or curvilinear transducer and connection technique therefore
US6685657B2 (en) * 1998-11-20 2004-02-03 Joie P. Jones Methods for selectively dissolving and removing materials using ultra-high frequency ultrasound
US6891314B2 (en) * 2001-08-22 2005-05-10 Fuji Xerox Co., Ltd Lattice array-structured piezoelectric actuator and method for producing the same

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2452068A (en) * 1943-01-23 1948-10-26 Submarine Signal Co Sound pickup device
US3130275A (en) * 1962-10-15 1964-04-21 Electro Voice Microphone
JPS5935865U (ja) * 1982-08-31 1984-03-06 三菱電機株式会社 超音波探触子装置
DE3721209C2 (de) * 1987-06-26 1997-04-30 Grieshaber Vega Kg Schall-/Ultraschallmeßgerät
DE4139024C1 (ja) * 1991-11-27 1993-04-15 Siemens Ag, 8000 Muenchen, De
US5297553A (en) * 1992-09-23 1994-03-29 Acuson Corporation Ultrasound transducer with improved rigid backing
DE4320549C1 (de) * 1993-06-21 1994-07-14 Siemens Ag Ultraschallwandler
US5459368A (en) * 1993-08-06 1995-10-17 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave device mounted module
KR19980026603A (ko) * 1996-10-10 1998-07-15 박병재 주차시 머플러 밀림 방지 장치
KR200188749Y1 (ko) * 1996-12-24 2000-09-01 이구택 되돌이탄호퍼내 되돌이탄 레벨검출장치
US6250162B1 (en) * 1998-04-24 2001-06-26 Murata Manufacturing Co., Ltd. Ultrasonic sensor
JP4240426B2 (ja) * 1999-03-30 2009-03-18 東レエンジニアリング株式会社 高周波域のアコースティックエミションの検出方法および検出素子
US6894425B1 (en) * 1999-03-31 2005-05-17 Koninklijke Philips Electronics N.V. Two-dimensional ultrasound phased array transducer
JP2001128980A (ja) * 1999-11-04 2001-05-15 Olympus Optical Co Ltd 機械走査式超音波探触子
US6515402B2 (en) * 2001-01-24 2003-02-04 Koninklijke Philips Electronics N.V. Array of ultrasound transducers
JP3611796B2 (ja) 2001-02-28 2005-01-19 松下電器産業株式会社 超音波送受波器、超音波送受波器の製造方法及び超音波流量計
US6551248B2 (en) * 2001-07-31 2003-04-22 Koninklijke Philips Electronics N.V. System for attaching an acoustic element to an integrated circuit
JP2003284182A (ja) * 2002-03-25 2003-10-03 Osaka Industrial Promotion Organization 超音波センサ素子と超音波アレイセンサ装置とそれらの共振周波数の調整方法
KR20020050197A (ko) * 2002-05-06 2002-06-26 고도영 피에조 필름을 이용한 볼펜형 초음파 신호 발생 장치
US20060006765A1 (en) * 2004-07-09 2006-01-12 Jongtae Yuk Apparatus and method to transmit and receive acoustic wave energy

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4642508A (en) * 1984-03-09 1987-02-10 Kabushiki Kaisha Toshiba Piezoelectric resonating device
US6341408B2 (en) * 1996-11-26 2002-01-29 Thomson-Csf Method of manufacturing a multiple-element acoustic probe comprising a common ground electrode
US6685657B2 (en) * 1998-11-20 2004-02-03 Joie P. Jones Methods for selectively dissolving and removing materials using ultra-high frequency ultrasound
US6396199B1 (en) * 1999-07-02 2002-05-28 Prosonic Co., Ltd. Ultrasonic linear or curvilinear transducer and connection technique therefore
US6891314B2 (en) * 2001-08-22 2005-05-10 Fuji Xerox Co., Ltd Lattice array-structured piezoelectric actuator and method for producing the same

Cited By (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7755519B2 (en) 2002-11-04 2010-07-13 P Tech, Llc. Ultrasonic communication and drag modification
US20070158502A1 (en) * 2002-11-04 2007-07-12 Bonutti Peter M Ultrasonic communication and drag modification
US8482436B2 (en) 2002-11-04 2013-07-09 P Tech, Llc. Drag modification system
US9581179B2 (en) 2002-11-04 2017-02-28 P Tech, Llc Systems for modifying a fluid flow of a vehicle
US7990287B2 (en) 2002-11-04 2011-08-02 P Tech, Llc. Ultrasonic drag modulation
US20100276006A1 (en) * 2002-11-04 2010-11-04 Bonutti Peter M Ultrasonic drag modulation
US7420876B2 (en) 2005-07-20 2008-09-02 Denso Corporation Obstacle sensor having supersonic sensor
US20080165620A1 (en) * 2005-07-20 2008-07-10 Denso Corporation Obstacle sensor having supersonic sensor
US7555955B2 (en) 2006-01-11 2009-07-07 Denso Corporation Ultrasonic sensor
US20070157731A1 (en) * 2006-01-11 2007-07-12 Denso Corporation Ultrasonic sensor
US20070251324A1 (en) * 2006-04-26 2007-11-01 Denso Corporation Ultrasonic sensor and manufacture method of the same
US7730785B2 (en) 2006-04-26 2010-06-08 Denso Corporation Ultrasonic sensor and manufacture method of the same
US7638931B2 (en) * 2006-10-13 2009-12-29 Denso Corporation Resin substrate and ultrasonic sensor using the same
US20080088206A1 (en) * 2006-10-13 2008-04-17 Denso Corporation Resin substrate and ultrasonic sensor using the same
US20090071255A1 (en) * 2007-06-12 2009-03-19 Denso Corporation Ultrasonic sensor and self diagnostic method of the same
US8020447B2 (en) 2007-06-12 2011-09-20 Denso Corporation Ultrasonic sensor and self diagnostic method of the same
US7821872B2 (en) 2007-08-31 2010-10-26 Denso Corporation Method for ultrasonic wave transmission and apparatus for ultrasonic wave transmission
US20090085439A1 (en) * 2007-09-28 2009-04-02 Denso Corporation Ultrasonic sensor
US7714482B2 (en) 2007-09-28 2010-05-11 Denso Corporation Ultrasonic sensor
US8850893B2 (en) * 2007-12-05 2014-10-07 Valtion Teknillinen Tutkimuskeskus Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas
US20100275675A1 (en) * 2007-12-05 2010-11-04 Heikki Seppa Device for measuring pressure, variation in acoustic pressure, a magnetic field, acceleration, vibration, or the composition of a gas
US9462995B2 (en) 2010-03-19 2016-10-11 Seiko Epson Corporation Biological testing device including ultrasonic wave transmitting/receiving part
US9456801B2 (en) 2010-03-19 2016-10-04 Seiko Epson Corporation Biological testing device
US8546997B2 (en) * 2010-03-19 2013-10-01 Seiko Epson Corporation Ultrasonic sensor
US20110227449A1 (en) * 2010-03-19 2011-09-22 Seiko Epson Corporation Ultrasonic sensor
US20140276080A1 (en) * 2010-04-27 2014-09-18 Seiko Epson Corporation Ultrasonic sensor and electronic device
US10512453B2 (en) * 2010-04-27 2019-12-24 Seiko Epson Corporation Ultrasonic sensor and electronic device
US20130208572A1 (en) * 2010-07-30 2013-08-15 Koninklijke Philips Electronics N.V. Thin film ultrasound transducer
US9440258B2 (en) * 2010-07-30 2016-09-13 Koninklijke Philips Electronics N.V. Thin film ultrasound transducer
US9348027B2 (en) 2011-06-13 2016-05-24 Denso Corporation Ultrasonic sensor device
US9207216B2 (en) * 2011-10-21 2015-12-08 Riso Kagaku Corporation Ultrasonic sensor having trasmitting and receiving horns
US20130098157A1 (en) * 2011-10-21 2013-04-25 Riso Kagaku Corporation Ultrasonic sensor
US10040098B2 (en) 2012-03-30 2018-08-07 Seiko Epson Corporation Ultrasonic transducer element chip, probe, electronic instrument, and ultrasonic diagnostic device
US9554775B2 (en) 2012-03-30 2017-01-31 Seiko Epson Corporation Ultrasonic transducer element chip, probe, electronic instrument, and ultrasonic diagnostic device
US20160027424A1 (en) * 2013-04-24 2016-01-28 Murata Manufacturing Co., Ltd. Ultrasonic wave generation apparatus
US10074352B2 (en) * 2013-04-24 2018-09-11 Murata Manufacturing Co., Ltd. Ultrasonic wave generation apparatus
CN103770701A (zh) * 2013-05-15 2014-05-07 宁波保税区攀峒信息科技有限公司 一种特定物体近距离视觉盲区人体探测方法及装置
US20160139250A1 (en) * 2013-06-20 2016-05-19 Robert Bosch Gmbh Surroundings-sensing device having a modular ultrasonic transducer, and motor vehicle having such a surroundings-sensing device
US9818929B2 (en) 2013-11-20 2017-11-14 Seiko Epson Corporation Ultrasonic device, method for manufacturing the same, electronic device and ultrasonic imaging device
US10707407B2 (en) 2013-11-20 2020-07-07 Seiko Epson Corporation Ultrasonic device, method for manufacturing the same, electronic device and ultrasonic imaging device
US11712718B2 (en) 2014-03-10 2023-08-01 Seiko Epson Corporation Ultrasonic sensor
US10252296B2 (en) 2014-03-10 2019-04-09 Seiko Epson Corporation Ultrasonic sensor
US20150258573A1 (en) * 2014-03-10 2015-09-17 Seiko Epson Corporation Ultrasonic sensor
US9987663B2 (en) * 2014-03-10 2018-06-05 Seiko Epson Corporation Ultrasonic sensor
US11167314B2 (en) 2014-03-10 2021-11-09 Seiko Epson Corporation Ultrasonic sensor
US20160013394A1 (en) * 2014-07-11 2016-01-14 Microtech Medical Technologies Ltd. Multi-cell transducer
US11800806B2 (en) * 2014-07-11 2023-10-24 Microtech Medical Technologies Ltd. Method for manufacturing a multi-cell transducer
US10847708B2 (en) * 2014-07-11 2020-11-24 Microtech Medical Technologies Ltd. Multi-cell transducer
US20210043825A1 (en) * 2014-07-11 2021-02-11 Microtech Medical Technologies Ltd. Multi-cell transducer
US20160036412A1 (en) * 2014-07-31 2016-02-04 Seiko Epson Corporation Ultrasonic device and probe as well as electronic apparatus and ultrasonic imaging apparatus
US9818926B2 (en) * 2014-07-31 2017-11-14 Seiko Epson Corporation Ultrasonic device and probe as well as electronic apparatus and ultrasonic imaging apparatus
US11917922B2 (en) * 2016-04-27 2024-02-27 Seiko Epson Corporation Mounting structure, ultrasonic device, ultrasonic probe, ultrasonic apparatus, and electronic apparatus
US10929633B2 (en) 2016-09-18 2021-02-23 Boe Technology Group Co., Ltd. Fingerprint identification device, touch display panel, and method for driving fingerprint identification device
US20200186937A1 (en) * 2016-12-08 2020-06-11 Bae Systems Plc Electroacoustic transducer array
US20200186936A1 (en) * 2016-12-08 2020-06-11 Bae Systems Plc Electroacoustic transducer
US11800295B2 (en) * 2016-12-08 2023-10-24 Bae Systems Plc Electroacoustic transducer
US11666239B2 (en) 2017-03-14 2023-06-06 University Of Connecticut Biodegradable pressure sensor
US11179748B2 (en) 2017-05-09 2021-11-23 Seiko Epson Corporation Mounting structure, ultrasonic device, ultrasonic probe, ultrasonic apparatus, and electronic apparatus
GB2564914B (en) * 2017-07-19 2022-08-31 Bae Systems Plc Electroacoustic transducer array
US11181627B2 (en) * 2018-02-05 2021-11-23 Denso Corporation Ultrasonic sensor
CN109150127A (zh) * 2018-07-27 2019-01-04 开元通信技术(厦门)有限公司 薄膜体声波谐振器及其制作方法、滤波器
CN112805843A (zh) * 2018-08-01 2021-05-14 艾科索成像公司 用于集成具有混合触点的超声换能器的系统和方法
US20210151661A1 (en) * 2018-08-01 2021-05-20 Exo Imaging, Inc. Systems and methods for integrating ultrasonic transducers with hybrid contacts
CN111208498A (zh) * 2018-11-22 2020-05-29 精工爱普生株式会社 超声波元件及超声波装置
US11826495B2 (en) 2019-03-01 2023-11-28 University Of Connecticut Biodegradable piezoelectric ultrasonic transducer system
US11678989B2 (en) * 2019-03-01 2023-06-20 University Of Connecticut Biodegradable piezoelectric nanofiber scaffold for bone or tissue regeneration
US11445304B2 (en) 2019-04-05 2022-09-13 Denso Corporation Ultrasonic sensor
US11667247B2 (en) * 2019-07-10 2023-06-06 Denso Corporation Ultrasonic sensor
US20210009046A1 (en) * 2019-07-10 2021-01-14 Denso Corporation Ultrasonic sensor
CN112887881A (zh) * 2019-11-29 2021-06-01 精工爱普生株式会社 超声波设备
US11910720B2 (en) 2019-12-26 2024-02-20 Seiko Epson Corporation Piezoelectric device and MEMS device
US11745001B2 (en) 2020-03-10 2023-09-05 University Of Connecticut Therapeutic bandage

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US7525237B2 (en) 2009-04-28
US7329975B2 (en) 2008-02-12
JP4513596B2 (ja) 2010-07-28
JP2006094459A (ja) 2006-04-06
FR2874780A1 (fr) 2006-03-03
US20070040477A1 (en) 2007-02-22
CN1740814A (zh) 2006-03-01
FR2874780B1 (fr) 2011-11-11
DE102005040081A1 (de) 2006-03-16
US20080116765A1 (en) 2008-05-22
KR20060050660A (ko) 2006-05-19
DE102005040081B4 (de) 2012-06-14

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