UA81614C2 - Устройство для изготовления алмазов, узел удержания образца (варианты) и способ изготовления алмазов (варианты) - Google Patents

Устройство для изготовления алмазов, узел удержания образца (варианты) и способ изготовления алмазов (варианты)

Info

Publication number
UA81614C2
UA81614C2 UA20040504061A UA20040504061A UA81614C2 UA 81614 C2 UA81614 C2 UA 81614C2 UA 20040504061 A UA20040504061 A UA 20040504061A UA 20040504061 A UA20040504061 A UA 20040504061A UA 81614 C2 UA81614 C2 UA 81614C2
Authority
UA
Ukraine
Prior art keywords
diamond
temperature
growth surface
producing
variants
Prior art date
Application number
UA20040504061A
Other languages
English (en)
Ukrainian (uk)
Inventor
Рассел Дж. Хемлей
Хо-Кванг Мао
Чих-Шиуе Ян
Йогеш К. Вохра
Original Assignee
Карнеги Инститьюшн Ов Вашингтон
Зе Юайби Рисерч Фаундейшн
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23292514&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=UA81614(C2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Карнеги Инститьюшн Ов Вашингтон, Зе Юайби Рисерч Фаундейшн filed Critical Карнеги Инститьюшн Ов Вашингтон
Publication of UA81614C2 publication Critical patent/UA81614C2/ru

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/10—Heating of the reaction chamber or the substrate
    • C30B25/105—Heating of the reaction chamber or the substrate by irradiation or electric discharge
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/12—Substrate holders or susceptors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/04—Diamond
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1016—Apparatus with means for treating single-crystal [e.g., heat treating]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/108—Including a solid member other than seed or product contacting the liquid [e.g., crucible, immersed heating element]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
UA20040504061A 2001-11-07 2002-07-11 Устройство для изготовления алмазов, узел удержания образца (варианты) и способ изготовления алмазов (варианты) UA81614C2 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US33107301P 2001-11-07 2001-11-07
PCT/US2002/035659 WO2003040440A2 (en) 2001-11-07 2002-11-07 Apparatus and method for diamond production

Publications (1)

Publication Number Publication Date
UA81614C2 true UA81614C2 (ru) 2008-01-25

Family

ID=23292514

Family Applications (1)

Application Number Title Priority Date Filing Date
UA20040504061A UA81614C2 (ru) 2001-11-07 2002-07-11 Устройство для изготовления алмазов, узел удержания образца (варианты) и способ изготовления алмазов (варианты)

Country Status (15)

Country Link
US (4) US6858078B2 (ru)
EP (1) EP1444390B1 (ru)
JP (2) JP3834314B2 (ru)
KR (1) KR100942279B1 (ru)
CN (1) CN1296528C (ru)
AT (1) ATE453741T1 (ru)
AU (1) AU2002361594B2 (ru)
CA (1) CA2466077C (ru)
DE (1) DE60234949D1 (ru)
HK (1) HK1075072A1 (ru)
RU (1) RU2302484C2 (ru)
TW (1) TWI239266B (ru)
UA (1) UA81614C2 (ru)
WO (1) WO2003040440A2 (ru)
ZA (1) ZA200404243B (ru)

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UA81614C2 (ru) * 2001-11-07 2008-01-25 Карнеги Инститьюшн Ов Вашингтон Устройство для изготовления алмазов, узел удержания образца (варианты) и способ изготовления алмазов (варианты)
GB2430194B (en) * 2002-09-06 2007-05-02 Element Six Ltd Coloured diamond
DE60335117D1 (de) 2002-09-06 2011-01-05 Element Six Ltd Verfahren zum ändern die farbe eines cvd-artigen diamanteinkristalles und dadurch hergestellte diamant-schicht
US7157067B2 (en) * 2003-07-14 2007-01-02 Carnegie Institution Of Washington Tough diamonds and method of making thereof
EP1807346A4 (en) * 2004-09-10 2010-04-28 Carnegie Inst Of Washington ULTRADUR VAPOR PHASE CHEMICAL DEPOSITED DIAMOND (CVD) AND THREE-DIMENSIONAL GROWTH OF THE SAME
JP4649153B2 (ja) * 2004-09-14 2011-03-09 アリオス株式会社 ダイヤモンド合成用ｃｖｄ装置
WO2006054610A1 (ja) * 2004-11-16 2006-05-26 Nippon Telegraph And Telephone Corporation 結晶製造装置
JP5002982B2 (ja) * 2005-04-15 2012-08-15 住友電気工業株式会社 単結晶ダイヤモンドの製造方法
EP1907320A4 (en) * 2005-05-25 2010-05-05 Carnegie Inst Of Washington COLORLESS CRYSTALLINE CVD DIAMOND WITH FAST GROWTH RATE
JP4613314B2 (ja) * 2005-05-26 2011-01-19 独立行政法人産業技術総合研究所 単結晶の製造方法
TWI410538B (zh) * 2005-11-15 2013-10-01 Carnegie Inst Of Washington 建基於以快速生長速率製造之單晶ｃｖｄ鑽石的新穎鑽石的用途／應用
WO2007081492A2 (en) * 2006-01-04 2007-07-19 Uab Research Foundation High growth rate methods of producing high-quality diamonds
JP2007331955A (ja) * 2006-06-12 2007-12-27 National Institute Of Advanced Industrial & Technology ダイヤモンド製造方法
JP5284575B2 (ja) * 2006-10-31 2013-09-11 住友電気工業株式会社 ダイヤモンド単結晶及びその製造方法
US8246746B2 (en) * 2007-01-29 2012-08-21 Carnegie Institution Of Washington Laser uses for single-crystal CVD diamond
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US7776408B2 (en) * 2007-02-14 2010-08-17 Rajneesh Bhandari Method and apparatus for producing single crystalline diamonds
CN100457983C (zh) * 2007-03-23 2009-02-04 北京科技大学 浸埋式固态碳源制备单晶金刚石的方法
EP2215291A1 (en) * 2007-10-02 2010-08-11 Carnegie Institution Of Washington Low pressure method annealing diamonds
JP5003442B2 (ja) * 2007-12-04 2012-08-15 住友電気工業株式会社 ダイヤモンド単結晶基板の製造方法
US7547358B1 (en) 2008-03-03 2009-06-16 Shapiro Zalman M System and method for diamond deposition using a liquid-solvent carbon-transfer mechanism
US9487858B2 (en) 2008-03-13 2016-11-08 Board Of Trustees Of Michigan State University Process and apparatus for diamond synthesis
US9023306B2 (en) * 2008-05-05 2015-05-05 Carnegie Institution Of Washington Ultratough single crystal boron-doped diamond
JP2012509831A (ja) * 2008-11-25 2012-04-26 カーネギー インスチチューション オブ ワシントン 急速成長速度における単結晶ｃｖｄダイヤモンドの製造
US8747963B2 (en) * 2009-01-23 2014-06-10 Lockheed Martin Corporation Apparatus and method for diamond film growth
CN104760955B (zh) * 2009-04-28 2017-03-08 储晞 生产大颗粒金刚石的方法和设备
TW201204863A (en) 2010-05-17 2012-02-01 Carnegie Inst Of Washington Production of large, high purity single crystal CVD diamond
GB201021860D0 (en) 2010-12-23 2011-02-02 Element Six Ltd A microwave plasma reactor for diamond synthesis
GB201021853D0 (en) 2010-12-23 2011-02-02 Element Six Ltd A microwave plasma reactor for manufacturing synthetic diamond material
GB201021913D0 (en) 2010-12-23 2011-02-02 Element Six Ltd Microwave plasma reactors and substrates for synthetic diamond manufacture
GB201021855D0 (en) 2010-12-23 2011-02-02 Element Six Ltd Microwave power delivery system for plasma reactors
SG191220A1 (en) 2010-12-23 2013-07-31 Element Six Ltd Controlling doping of synthetic diamond material
GB201021870D0 (en) 2010-12-23 2011-02-02 Element Six Ltd A microwave plasma reactor for manufacturing synthetic diamond material
GB201021865D0 (en) 2010-12-23 2011-02-02 Element Six Ltd A microwave plasma reactor for manufacturing synthetic diamond material
GB201121642D0 (en) 2011-12-16 2012-01-25 Element Six Ltd Single crtstal cvd synthetic diamond material
JP5418621B2 (ja) * 2012-02-16 2014-02-19 住友電気工業株式会社 ダイヤモンド単結晶基板
US9469918B2 (en) 2014-01-24 2016-10-18 Ii-Vi Incorporated Substrate including a diamond layer and a composite layer of diamond and silicon carbide, and, optionally, silicon
DE102014223301B8 (de) 2014-11-14 2016-06-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Substrathalter, Plasmareaktor und Verfahren zur Abscheidung von Diamant
WO2017036543A1 (de) * 2015-09-03 2017-03-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beschichtungsanlage und verfahren zur beschichtung
CN107021480B (zh) * 2017-04-26 2019-01-08 金华职业技术学院 一种用于沉积制备金刚石的反应器
CN108554334B (zh) * 2018-04-20 2021-06-11 长沙新材料产业研究院有限公司 一种mpcvd合成设备及合成温度控制方法
CN108840321A (zh) * 2018-07-10 2018-11-20 中喜（宁夏）新材料有限公司 天然气基石墨烯纳米金钢石联产炭黑的方法
DE102018121854A1 (de) * 2018-09-07 2020-03-12 Aixtron Se Verfahren zum Einrichten oder zum Betrieb eines CVD-Reaktors
CN109678150B (zh) * 2018-12-19 2022-05-27 长沙新材料产业研究院有限公司 金刚石合成用的衬底、温度均匀性控制装置及合成设备
CN110714225B (zh) * 2019-10-31 2021-10-01 长沙新材料产业研究院有限公司 一种金刚石生长托盘和系统
RU2762222C1 (ru) * 2019-11-05 2021-12-16 Федеральное государственное бюджетное учреждение науки Институт общей физики им. А.М. Прохорова Российской академии наук (ИОФ РАН) СВЧ плазменный реактор с регулированием температуры косвенного нагрева подложки
CN111394792B (zh) * 2020-01-17 2023-10-24 北京大学东莞光电研究院 一种生长金刚石多晶膜用样品托及金刚石多晶膜生长方法
CN112030146A (zh) * 2020-08-04 2020-12-04 西安电子科技大学芜湖研究院 一种基于plc冷却装置的金刚石生长控制方法及装置
RU2763103C1 (ru) * 2020-08-27 2021-12-27 Федеральное государственное бюджетное учреждение науки Федеральный исследовательский центр "Институт общей физики им. А.М. Прохорова Российской академии наук" (ИОФ РАН) Способ контроля и управления температурным режимом ростовой поверхности подложки
CN113058506B (zh) * 2021-03-23 2022-05-20 湖州中芯半导体科技有限公司 一种mpcvd金刚石高效合成工艺及其装置
CN115142039A (zh) * 2021-03-31 2022-10-04 苏州贝莱克晶钻科技有限公司 Cvd钻石及其制作方法、改进钻石光学性质的方法
CN114772592B (zh) * 2022-06-21 2022-09-16 成都沃特塞恩电子技术有限公司 钻石培育设备调节方法、装置、电子设备及存储介质

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Also Published As

Publication number Publication date
US20030084839A1 (en) 2003-05-08
WO2003040440A3 (en) 2004-03-04
ATE453741T1 (de) 2010-01-15
KR20040076250A (ko) 2004-08-31
HK1075072A1 (en) 2005-12-02
CA2466077A1 (en) 2003-05-15
EP1444390A2 (en) 2004-08-11
RU2302484C2 (ru) 2007-07-10
US20090038934A1 (en) 2009-02-12
US20050160969A1 (en) 2005-07-28
US7235130B2 (en) 2007-06-26
US6858078B2 (en) 2005-02-22
JP2005508279A (ja) 2005-03-31
JP2006219370A (ja) 2006-08-24
CA2466077C (en) 2011-01-04
DE60234949D1 (de) 2010-02-11
EP1444390B1 (en) 2009-12-30
ZA200404243B (en) 2005-03-30
JP3834314B2 (ja) 2006-10-18
KR100942279B1 (ko) 2010-02-16
JP4494364B2 (ja) 2010-06-30
RU2004117077A (ru) 2005-04-10
CN1608148A (zh) 2005-04-20
TWI239266B (en) 2005-09-11
AU2002361594B2 (en) 2007-09-06
CN1296528C (zh) 2007-01-24
US7452420B2 (en) 2008-11-18
TW200301157A (en) 2003-07-01
WO2003040440A2 (en) 2003-05-15
US20070193505A1 (en) 2007-08-23

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