UA73127C2 - Non-evaporable getter alloy and articles made of it - Google Patents
Non-evaporable getter alloy and articles made of it Download PDFInfo
- Publication number
- UA73127C2 UA73127C2 UA2002010286A UA2002010286A UA73127C2 UA 73127 C2 UA73127 C2 UA 73127C2 UA 2002010286 A UA2002010286 A UA 2002010286A UA 2002010286 A UA2002010286 A UA 2002010286A UA 73127 C2 UA73127 C2 UA 73127C2
- Authority
- UA
- Ukraine
- Prior art keywords
- alloy
- differs
- heter
- vanadium
- fact
- Prior art date
Links
- 229910045601 alloy Inorganic materials 0.000 title claims abstract description 113
- 239000000956 alloy Substances 0.000 title claims abstract description 113
- 229910000986 non-evaporable getter Inorganic materials 0.000 title abstract 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000007789 gas Substances 0.000 claims abstract description 28
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 27
- 238000001179 sorption measurement Methods 0.000 claims abstract description 25
- 229910052720 vanadium Inorganic materials 0.000 claims abstract description 19
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims abstract description 19
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910052748 manganese Inorganic materials 0.000 claims abstract description 15
- 239000011572 manganese Substances 0.000 claims abstract description 15
- 229910052742 iron Inorganic materials 0.000 claims abstract description 14
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 14
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 13
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052746 lanthanum Inorganic materials 0.000 claims abstract description 12
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 10
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000000843 powder Substances 0.000 claims description 38
- 239000000203 mixture Substances 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 11
- 239000002245 particle Substances 0.000 claims description 7
- 238000005520 cutting process Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910001122 Mischmetal Inorganic materials 0.000 claims 2
- 239000011358 absorbing material Substances 0.000 claims 1
- 238000012876 topography Methods 0.000 claims 1
- 238000012360 testing method Methods 0.000 description 20
- 239000001257 hydrogen Substances 0.000 description 14
- 229910052739 hydrogen Inorganic materials 0.000 description 14
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000009413 insulation Methods 0.000 description 5
- 238000003825 pressing Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical class [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000002429 nitrogen sorption measurement Methods 0.000 description 3
- 238000000746 purification Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- ZMIGMASIKSOYAM-UHFFFAOYSA-N cerium Chemical compound [Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce][Ce] ZMIGMASIKSOYAM-UHFFFAOYSA-N 0.000 description 2
- -1 for example Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 150000002835 noble gases Chemical class 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001868 water Inorganic materials 0.000 description 2
- 101100287724 Caenorhabditis elegans shk-1 gene Proteins 0.000 description 1
- 229910000927 Ge alloy Inorganic materials 0.000 description 1
- 229910000745 He alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910000979 O alloy Inorganic materials 0.000 description 1
- 229910000691 Re alloy Inorganic materials 0.000 description 1
- 238000003723 Smelting Methods 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000005097 cold rolling Methods 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000035622 drinking Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/0005—Reversible uptake of hydrogen by an appropriate medium, i.e. based on physical or chemical sorption phenomena or on reversible chemical reactions, e.g. for hydrogen storage purposes ; Reversible gettering of hydrogen; Reversible uptake of hydrogen by electrodes
- C01B3/001—Reversible uptake of hydrogen by an appropriate medium, i.e. based on physical or chemical sorption phenomena or on reversible chemical reactions, e.g. for hydrogen storage purposes ; Reversible gettering of hydrogen; Reversible uptake of hydrogen by electrodes characterised by the uptaking medium; Treatment thereof
- C01B3/0031—Intermetallic compounds; Metal alloys; Treatment thereof
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/04—Purification or separation of nitrogen
- C01B21/0405—Purification or separation processes
- C01B21/0433—Physical processing only
- C01B21/045—Physical processing only by adsorption in solids
- C01B21/0483—Physical processing only by adsorption in solids in getters
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
- C01B3/508—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by selective and reversible uptake by an appropriate medium, i.e. the uptake being based on physical or chemical sorption phenomena or on reversible chemical reactions
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/045—Alloys based on refractory metals
- C22C1/0458—Alloys based on titanium, zirconium or hafnium
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C16/00—Alloys based on zirconium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
- H01J7/183—Composition or manufacture of getters
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/32—Hydrogen storage
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Gas Separation By Absorption (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
- Thermal Insulation (AREA)
- Orthopedics, Nursing, And Contraception (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Manufacture And Refinement Of Metals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT2000MI001200A IT1317951B1 (it) | 2000-05-30 | 2000-05-30 | Leghe getter non evaporabili |
| PCT/IT2001/000269 WO2001092590A1 (en) | 2000-05-30 | 2001-05-28 | Non-evaporable getter alloys |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| UA73127C2 true UA73127C2 (en) | 2005-06-15 |
Family
ID=11445152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| UA2002010286A UA73127C2 (en) | 2000-05-30 | 2001-05-28 | Non-evaporable getter alloy and articles made of it |
Country Status (23)
| Country | Link |
|---|---|
| US (1) | US6521014B2 (es) |
| EP (1) | EP1285100B1 (es) |
| JP (1) | JP3917514B2 (es) |
| KR (1) | KR100697436B1 (es) |
| CN (1) | CN1138865C (es) |
| AT (1) | ATE275645T1 (es) |
| AU (1) | AU7447401A (es) |
| BR (1) | BR0105182B1 (es) |
| CA (1) | CA2380469C (es) |
| CZ (1) | CZ2002379A3 (es) |
| DE (1) | DE60105412T2 (es) |
| DK (1) | DK1285100T3 (es) |
| ES (1) | ES2227211T3 (es) |
| HK (1) | HK1049684B (es) |
| HU (1) | HUP0202352A2 (es) |
| IT (1) | IT1317951B1 (es) |
| MX (1) | MXPA02001096A (es) |
| PT (1) | PT1285100E (es) |
| RU (1) | RU2260069C2 (es) |
| TR (1) | TR200402752T4 (es) |
| TW (1) | TW574055B (es) |
| UA (1) | UA73127C2 (es) |
| WO (1) | WO2001092590A1 (es) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100702710B1 (ko) * | 1999-06-02 | 2007-04-02 | 사에스 게터스 에스.페.아. | 활성화 처리와 무관하게 수소를 흡착할 수 있는 복합 물질 및 이의 제조 방법 |
| JP4024151B2 (ja) | 2001-05-01 | 2007-12-19 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 放電ランプ |
| US7001535B2 (en) * | 2002-05-10 | 2006-02-21 | Sandia National Laboratories | Polymer formulation for removing hydrogen and liquid water from an enclosed space |
| TWI245308B (en) * | 2002-09-13 | 2005-12-11 | Getters Spa | Non-evaporable getter compositions which can be reactivated at low temperature after exposure to reactive gases at a higher temperature |
| US20050169766A1 (en) * | 2002-09-13 | 2005-08-04 | Saes Getters S.P.A. | Getter compositions reactivatable at low temperature after exposure to reactive gases at higher temperature |
| US7553355B2 (en) * | 2003-06-23 | 2009-06-30 | Matheson Tri-Gas | Methods and materials for the reduction and control of moisture and oxygen in OLED devices |
| ITMI20032208A1 (it) * | 2003-11-14 | 2005-05-15 | Getters Spa | Catodo con getter integrato e bassa funzione lavoro per lampade a catodo freddo. |
| ATE467228T1 (de) | 2004-01-05 | 2010-05-15 | Koninkl Philips Electronics Nv | Herstellungsverfahren einer kompakten hochdruck- entladungslampe |
| US20060006789A1 (en) * | 2004-07-08 | 2006-01-12 | Shigeo Itoh | Electron-beam excited light-emitting devices |
| KR100641301B1 (ko) * | 2004-09-15 | 2006-11-02 | 주식회사 세종소재 | 겟터 겸용 수은 보충재 |
| ITMI20042271A1 (it) * | 2004-11-23 | 2005-02-23 | Getters Spa | Leghe getter non evaporabili per assorbimento di idrogeno |
| TW200700144A (en) | 2005-01-14 | 2007-01-01 | Matsushita Electric Ind Co Ltd | Gas-absorbing substance, gas-absorbing alloy and gas-absorbing material |
| ITMI20050281A1 (it) * | 2005-02-23 | 2006-08-24 | Getters Spa | Lampada a scarica ad alta pressione miniaturizzata contenente un dispositivo getter |
| JP4807552B2 (ja) | 2005-04-27 | 2011-11-02 | パナソニック株式会社 | 吸着材 |
| CN1873891A (zh) * | 2005-06-03 | 2006-12-06 | 清华大学 | 真空器件、其制造方法以及吸气装置 |
| CN1300502C (zh) * | 2005-06-06 | 2007-02-14 | 朱雷 | 用于真空隔热板的吸气装置 |
| CN1877780B (zh) * | 2005-06-10 | 2011-09-28 | 清华大学 | 真空显示器及其制造方法 |
| ITMI20060361A1 (it) * | 2006-02-28 | 2007-09-01 | Getters Spa | Assorbimento di idrogeno mediante l'impiego di leghe getter non evaporabili metodo ed applicazioni |
| US7859350B1 (en) | 2009-04-28 | 2010-12-28 | Sandia Corporation | Microfabricated ion frequency standard |
| WO2012081004A1 (en) * | 2010-12-15 | 2012-06-21 | Konstantin Chuntonov | Sorption apparatuses for the production of pure gases |
| ITMI20111870A1 (it) | 2011-10-14 | 2013-04-15 | Getters Spa | Composizioni di getter non evaporabili che possono essere riattivate a bassa temperatura dopo l'esposizione a gas reattivi ad una temperatura maggiore |
| ITMI20111987A1 (it) | 2011-11-03 | 2013-05-04 | Getters Spa | Getters compositi perfezionati |
| KR101859234B1 (ko) | 2012-04-30 | 2018-05-18 | 주식회사 케이씨씨 | 진공단열재용 복합 게터 및 이를 포함하는 진공단열재 |
| ITMI20122092A1 (it) | 2012-12-10 | 2014-06-11 | Getters Spa | Leghe getter non evaporabili riattivabili dopo l'esposizione a gas reattivi |
| ITMI20131921A1 (it) * | 2013-11-20 | 2015-05-21 | Getters Spa | Leghe getter non evaporabili particolarmente adatte per l'assorbimento di idrogeno e monossido di carbonio |
| EP3265210A4 (en) * | 2015-03-06 | 2018-12-05 | Mécanique Analytique Inc. | Methods and systems for managing gas purification |
| CN108149069A (zh) * | 2016-12-02 | 2018-06-12 | 北京有色金属研究总院 | 一种吸气合金材料及其应用 |
| CN109859868B (zh) * | 2019-01-10 | 2024-05-10 | 中国原子能科学研究院 | 一种高温锂回路净化用热阱系统 |
| CN111621671B (zh) * | 2020-06-18 | 2022-03-15 | 南京哲玺太电子科技有限公司 | 锆系非蒸散型吸气剂及其制备方法与应用 |
| CN112410614A (zh) * | 2020-10-16 | 2021-02-26 | 北京赛博泰科科技有限公司 | 一种非蒸散型低温激活锆基吸气合金及其制备方法 |
| CN113699425B (zh) * | 2021-08-31 | 2022-07-15 | 中国科学技术大学 | 非蒸散型四元Ti-Zr-V-Cu真空吸气剂薄膜及其制备方法 |
| CN114574721B (zh) * | 2022-03-01 | 2022-12-13 | 秦皇岛江龙吸气材料有限公司 | 多元非蒸散型低温激活吸气剂及其制造工艺 |
| CN115341120A (zh) * | 2022-07-06 | 2022-11-15 | 上海大学 | 一种非蒸散型低温激活锆基吸气剂合金及其制备方法 |
| EP4392673A1 (en) | 2022-08-01 | 2024-07-03 | Saes Getters S.p.A. | Snap-on getter pump assembly and its use |
| WO2024165431A1 (en) | 2023-02-09 | 2024-08-15 | Saes Getters S.P.A. | Auxiliary vacuum pumps combination system |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1110271B (it) * | 1979-02-05 | 1985-12-23 | Getters Spa | Lega ternaria getterante non evaporabile e metodo di suo impiego per l'assorbimento di acqua,vapore d'acqua,di altri gas |
| US4839085A (en) * | 1987-11-30 | 1989-06-13 | Ergenics, Inc. | Method of manufacturing tough and porous getters by means of hydrogen pulverization and getters produced thereby |
| US4996002A (en) * | 1987-11-30 | 1991-02-26 | Ergenics, Inc. | Tough and porus getters manufactured by means of hydrogen pulverization |
| US5456740A (en) * | 1994-06-22 | 1995-10-10 | Millipore Corporation | High-efficiency metal membrane getter element and process for making |
| IT1290451B1 (it) * | 1997-04-03 | 1998-12-03 | Getters Spa | Leghe getter non evaporabili |
| IT1297013B1 (it) * | 1997-12-23 | 1999-08-03 | Getters Spa | Sistema getter per la purificazione dell'atmosfera di lavoro nei processi di deposizione fisica da vapore |
-
2000
- 2000-05-30 IT IT2000MI001200A patent/IT1317951B1/it active
-
2001
- 2001-05-15 TW TW090111588A patent/TW574055B/zh not_active IP Right Cessation
- 2001-05-28 RU RU2002105025/02A patent/RU2260069C2/ru active
- 2001-05-28 AU AU74474/01A patent/AU7447401A/en not_active Abandoned
- 2001-05-28 EP EP01940988A patent/EP1285100B1/en not_active Expired - Lifetime
- 2001-05-28 CN CNB018015107A patent/CN1138865C/zh not_active Expired - Lifetime
- 2001-05-28 UA UA2002010286A patent/UA73127C2/uk unknown
- 2001-05-28 DE DE60105412T patent/DE60105412T2/de not_active Expired - Lifetime
- 2001-05-28 DK DK01940988T patent/DK1285100T3/da active
- 2001-05-28 US US10/031,908 patent/US6521014B2/en not_active Expired - Lifetime
- 2001-05-28 JP JP2002500780A patent/JP3917514B2/ja not_active Expired - Lifetime
- 2001-05-28 TR TR2004/02752T patent/TR200402752T4/xx unknown
- 2001-05-28 WO PCT/IT2001/000269 patent/WO2001092590A1/en active IP Right Grant
- 2001-05-28 ES ES01940988T patent/ES2227211T3/es not_active Expired - Lifetime
- 2001-05-28 MX MXPA02001096A patent/MXPA02001096A/es active IP Right Grant
- 2001-05-28 BR BRPI0105182-2A patent/BR0105182B1/pt not_active IP Right Cessation
- 2001-05-28 AT AT01940988T patent/ATE275645T1/de not_active IP Right Cessation
- 2001-05-28 PT PT01940988T patent/PT1285100E/pt unknown
- 2001-05-28 HU HU0202352A patent/HUP0202352A2/hu unknown
- 2001-05-28 CZ CZ2002379A patent/CZ2002379A3/cs unknown
- 2001-05-28 CA CA002380469A patent/CA2380469C/en not_active Expired - Lifetime
- 2001-05-28 KR KR1020027001261A patent/KR100697436B1/ko active IP Right Grant
-
2003
- 2003-03-14 HK HK03101843.4A patent/HK1049684B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| CA2380469A1 (en) | 2001-12-06 |
| CA2380469C (en) | 2007-12-18 |
| TR200402752T4 (tr) | 2004-11-22 |
| ATE275645T1 (de) | 2004-09-15 |
| JP2003535218A (ja) | 2003-11-25 |
| DK1285100T3 (da) | 2005-01-17 |
| CN1138865C (zh) | 2004-02-18 |
| CZ2002379A3 (cs) | 2003-01-15 |
| DE60105412D1 (de) | 2004-10-14 |
| US20030007883A1 (en) | 2003-01-09 |
| HK1049684B (zh) | 2004-06-25 |
| AU7447401A (en) | 2001-12-11 |
| KR100697436B1 (ko) | 2007-03-20 |
| RU2260069C2 (ru) | 2005-09-10 |
| ITMI20001200A0 (it) | 2000-05-30 |
| DE60105412T2 (de) | 2005-09-22 |
| IT1317951B1 (it) | 2003-07-21 |
| PT1285100E (pt) | 2004-11-30 |
| US6521014B2 (en) | 2003-02-18 |
| EP1285100B1 (en) | 2004-09-08 |
| HK1049684A1 (en) | 2003-05-23 |
| EP1285100A1 (en) | 2003-02-26 |
| JP3917514B2 (ja) | 2007-05-23 |
| ITMI20001200A1 (it) | 2001-11-30 |
| BR0105182B1 (pt) | 2008-11-18 |
| KR20020019592A (ko) | 2002-03-12 |
| MXPA02001096A (es) | 2002-08-20 |
| CN1380907A (zh) | 2002-11-20 |
| WO2001092590A1 (en) | 2001-12-06 |
| ES2227211T3 (es) | 2005-04-01 |
| HUP0202352A2 (hu) | 2002-11-28 |
| BR0105182A (pt) | 2002-05-07 |
| TW574055B (en) | 2004-02-01 |
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