TWI760316B - 液體移除裝置 - Google Patents

液體移除裝置 Download PDF

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Publication number
TWI760316B
TWI760316B TW105135698A TW105135698A TWI760316B TW I760316 B TWI760316 B TW I760316B TW 105135698 A TW105135698 A TW 105135698A TW 105135698 A TW105135698 A TW 105135698A TW I760316 B TWI760316 B TW I760316B
Authority
TW
Taiwan
Prior art keywords
opposing
air
slits
groove
web
Prior art date
Application number
TW105135698A
Other languages
English (en)
Chinese (zh)
Other versions
TW201728242A (zh
Inventor
彼得 菲利浦 安德魯 林恩
Original Assignee
彼得 菲利浦 安德魯 林恩
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB1519445.9A external-priority patent/GB201519445D0/en
Priority claimed from GBGB1600887.2A external-priority patent/GB201600887D0/en
Application filed by 彼得 菲利浦 安德魯 林恩 filed Critical 彼得 菲利浦 安德魯 林恩
Publication of TW201728242A publication Critical patent/TW201728242A/zh
Application granted granted Critical
Publication of TWI760316B publication Critical patent/TWI760316B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B08B5/023—Cleaning travelling work
    • B08B5/026—Cleaning moving webs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/005—Nozzles or other outlets specially adapted for discharging one or more gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H20/00—Advancing webs
    • B65H20/14—Advancing webs by direct action on web of moving fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B13/00—Machines and apparatus for drying fabrics, fibres, yarns, or other materials in long lengths, with progressive movement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/50—Auxiliary process performed during handling process
    • B65H2301/51—Modifying a characteristic of handled material
    • B65H2301/511—Processing surface of handled material upon transport or guiding thereof, e.g. cleaning
    • B65H2301/5115—Cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2301/00—Handling processes for sheets or webs
    • B65H2301/50—Auxiliary process performed during handling process
    • B65H2301/51—Modifying a characteristic of handled material
    • B65H2301/517—Drying material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00—Means using fluid
    • B65H2406/10—Means using fluid made only for exhausting gaseous medium
    • B65H2406/12—Means using fluid made only for exhausting gaseous medium producing gas blast
    • B65H2406/122—Nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2408/00—Specific machines
    • B65H2408/20—Specific machines for handling web(s)
    • B65H2408/21—Accumulators
    • B65H2408/217—Accumulators of rollers type, e.g. with at least one fixed and one movable roller

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Cleaning In General (AREA)
  • Drying Of Solid Materials (AREA)
TW105135698A 2015-11-03 2016-11-03 液體移除裝置 TWI760316B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
GBGB1519445.9A GB201519445D0 (en) 2015-11-03 2015-11-03 Liquid removal
GBGB1519445.9 2015-11-03
GBGB1600887.2 2016-01-18
GBGB1600887.2A GB201600887D0 (en) 2016-01-18 2016-01-18 Liquid removal

Publications (2)

Publication Number Publication Date
TW201728242A TW201728242A (zh) 2017-08-01
TWI760316B true TWI760316B (zh) 2022-04-11

Family

ID=57570083

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105135698A TWI760316B (zh) 2015-11-03 2016-11-03 液體移除裝置

Country Status (5)

Country Link
JP (1) JP6984812B2 (OSRAM)
KR (1) KR20180078278A (OSRAM)
CN (1) CN108449936B (OSRAM)
TW (1) TWI760316B (OSRAM)
WO (1) WO2017077291A1 (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114877666A (zh) * 2022-02-25 2022-08-09 南京华易泰电子科技有限公司 一种适用于面板干燥用的双缝气刀结构及其加工工艺
CN114713563B (zh) * 2022-03-01 2023-03-07 长沙振安机电设备有限公司 马达清洁设备
CN115682649B (zh) * 2022-10-24 2023-08-08 深圳市行知行机器人技术有限公司 抹干机构及清洗装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE241981C (OSRAM) * 1910-05-24
US2423768A (en) * 1943-01-13 1947-07-08 Warren S D Co Apparatus for coating flexible webs
TWI236944B (en) * 2001-12-17 2005-08-01 Tokyo Electron Ltd Film removal method and apparatus, and substrate processing system
TWI428709B (zh) * 2010-04-15 2014-03-01 Asml Netherlands Bv 流體處置結構，微影裝置及元件製造方法
TWI431436B (zh) * 2010-04-22 2014-03-21 Asml Netherlands Bv 流體處理結構，微影裝置及元件製造方法

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US3002700A (en) * 1958-07-26 1961-10-03 Mohring Gustav Nozzle on heat-treatment machines for textile fabrics and the like
JPS5425066A (en) * 1977-07-28 1979-02-24 Chugai Ro Kogyo Kaisha Ltd Nonncontact type shape correcting and holding method of beltlike material and its device
US4551926A (en) * 1984-05-23 1985-11-12 C. Keller Gmbh U. Co. Kg Maschinenfabrik Nozzle box for heat treatment of veneering
US4848633A (en) * 1986-02-28 1989-07-18 Thermo Electron Web Systems, Inc. Non-contact web turning and drying apparatus
EP0513632B1 (de) * 1991-05-17 1995-07-19 SUNDWIGER EISENHÜTTE MASCHINENFABRIK GmbH & CO. Vorrichtung zum Entfernen von Flüssigkeit von der Oberfläche eines bewegten Bandes
JP2528669Y2 (ja) * 1991-08-19 1997-03-12 三菱重工業株式会社 テンタオーブン用プレナムダクト
JP2552595B2 (ja) * 1991-09-17 1996-11-13 株式会社東京機械製作所 走行ウエブの制振方法及び制振装置
CH687957A5 (de) * 1994-09-06 1997-04-15 Schneider Consulting & Dev Verfahren zum Entfernen von Staubpartikeln von einer bewegten Materialbahn sowie Vorrichtung hierzu.
US6726777B1 (en) * 1999-06-24 2004-04-27 Sumitomo Heavy Industries Ltd. Cleaning method and apparatus using fluid spraying
JP4352194B2 (ja) * 2000-04-04 2009-10-28 株式会社日立ハイテクノロジーズ 基板乾燥装置及び基板乾燥方法
JP2001335205A (ja) * 2000-05-24 2001-12-04 Mitsubishi Heavy Ind Ltd 両面フロータ式乾燥機，両面フロータ式冷却機及び両面フロータ式加湿機
EP1775034B1 (en) * 2004-08-05 2010-12-15 Kabushiki Kaisha Kobe Seiko Sho Deposit removing device
WO2008084224A2 (en) * 2007-01-11 2008-07-17 Peter Philip Andrew Lymn Liquid treatment apparatus
KR20080090070A (ko) * 2007-04-04 2008-10-08 삼성전자주식회사 에어나이프 및 이를 포함하는 기판 건조 장치
KR101020779B1 (ko) * 2008-07-31 2011-03-09 주식회사 디엠에스 에어나이프 장치
GB2500564A (en) * 2012-01-26 2013-10-02 Peter Philip Andrew Lymn Web processing machine
JP2013256384A (ja) * 2012-06-14 2013-12-26 Japan Steel Works Ltd:The エア噴出ノズル
CN103851887B (zh) * 2012-12-07 2016-01-27 深南电路有限公司 Pcb干燥机
CN104043613B (zh) * 2014-06-19 2016-01-06 张家港市超声电气有限公司 风切吹干装置
CN104117504A (zh) * 2014-06-26 2014-10-29 苏州一合光学有限公司 玻璃风刀清洗机的风刀装置
CN104990383A (zh) * 2015-07-31 2015-10-21 北京七星华创电子股份有限公司 一种在线风刀吹干装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE241981C (OSRAM) * 1910-05-24
US2423768A (en) * 1943-01-13 1947-07-08 Warren S D Co Apparatus for coating flexible webs
TWI236944B (en) * 2001-12-17 2005-08-01 Tokyo Electron Ltd Film removal method and apparatus, and substrate processing system
TWI428709B (zh) * 2010-04-15 2014-03-01 Asml Netherlands Bv 流體處置結構，微影裝置及元件製造方法
TWI431436B (zh) * 2010-04-22 2014-03-21 Asml Netherlands Bv 流體處理結構，微影裝置及元件製造方法

Also Published As

Publication number Publication date
TW201728242A (zh) 2017-08-01
CN108449936A (zh) 2018-08-24
CN108449936B (zh) 2022-03-11
KR20180078278A (ko) 2018-07-09
WO2017077291A1 (en) 2017-05-11
JP2018535831A (ja) 2018-12-06
JP6984812B2 (ja) 2021-12-22

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