TWI733941B - 導線架及其製造方法暨製造電子構件裝置之方法 - Google Patents

導線架及其製造方法暨製造電子構件裝置之方法 Download PDF

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Publication number
TWI733941B
TWI733941B TW106139334A TW106139334A TWI733941B TW I733941 B TWI733941 B TW I733941B TW 106139334 A TW106139334 A TW 106139334A TW 106139334 A TW106139334 A TW 106139334A TW I733941 B TWI733941 B TW I733941B
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TW
Taiwan
Prior art keywords
electrode
lead frame
plating layer
metal plating
coupling portion
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TW106139334A
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English (en)
Chinese (zh)
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TW201830626A (zh
Inventor
小林浩之佑
阿藤晃士
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日商新光電氣工業股份有限公司
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Publication of TW201830626A publication Critical patent/TW201830626A/zh
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40—Leadframes
    • H10W70/411—Chip-supporting parts, e.g. die pads
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01—Manufacture or treatment
    • H10W70/04—Manufacture or treatment of leadframes
    • H10W70/041—Connecting or disconnecting interconnections to or from leadframes, e.g. connecting bond wires or bumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01—Manufacture or treatment
    • H10W70/04—Manufacture or treatment of leadframes
    • H10W70/042—Etching
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40—Leadframes
    • H10W70/421—Shapes or dispositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40—Leadframes
    • H10W70/456—Materials
    • H10W70/457—Materials of metallic layers on leadframes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40—Leadframes
    • H10W70/464—Additional interconnections in combination with leadframes
    • H10W70/465—Bumps or wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40—Leadframes
    • H10W70/464—Additional interconnections in combination with leadframes
    • H10W70/467—Multilayered additional interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/811—Multiple chips on leadframes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/851—Dispositions of multiple connectors or interconnections
    • H10W72/874—On different surfaces
    • H10W72/884—Die-attach connectors and bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
    • H10W74/142—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed the encapsulations exposing the passive side of the semiconductor body
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/726—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink

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  • Lead Frames For Integrated Circuits (AREA)
TW106139334A 2016-11-15 2017-11-14 導線架及其製造方法暨製造電子構件裝置之方法 TWI733941B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-222098 2016-11-15
JP2016222098A JP6761738B2 (ja) 2016-11-15 2016-11-15 リードフレーム及びその製造方法、電子部品装置の製造方法

Publications (2)

Publication Number Publication Date
TW201830626A TW201830626A (zh) 2018-08-16
TWI733941B true TWI733941B (zh) 2021-07-21

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Family Applications (1)

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TW106139334A TWI733941B (zh) 2016-11-15 2017-11-14 導線架及其製造方法暨製造電子構件裝置之方法

Country Status (4)

Country Link
US (1) US20180138107A1 (https=)
JP (1) JP6761738B2 (https=)
CN (1) CN108074903B (https=)
TW (1) TWI733941B (https=)

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* Cited by examiner, † Cited by third party
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US20200035614A1 (en) * 2018-07-30 2020-01-30 Powertech Technology Inc. Package structure and manufacturing method thereof
JP7319808B2 (ja) 2019-03-29 2023-08-02 ローム株式会社 半導体装置および半導体パッケージ
US11562948B2 (en) 2019-11-04 2023-01-24 Mediatek Inc. Semiconductor package having step cut sawn into molding compound along perimeter of the semiconductor package
JP2022041152A (ja) * 2020-08-31 2022-03-11 ソニーセミコンダクタソリューションズ株式会社 半導体装置の製造方法、半導体装置、および電子機器

Citations (8)

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US20060097366A1 (en) * 2003-07-19 2006-05-11 Ns Electronics Bangkok (1993) Ltd. Semiconductor package including leadframe roughened with chemical etchant to prevent separation between leadframe and molding compound
WO2006115267A1 (ja) * 2005-04-26 2006-11-02 Dai Nippon Printing Co., Ltd. 回路部材、回路部材の製造方法、半導体装置、及び回路部材表面の積層構造
WO2007061112A1 (ja) * 2005-11-28 2007-05-31 Dai Nippon Printing Co., Ltd. 回路部材、回路部材の製造方法、及び、回路部材を含む半導体装置
US20090230525A1 (en) * 2008-03-14 2009-09-17 Pao-Huei Chang Chien Advanced quad flat no lead chip package having marking and corner lead features and manufacturing methods thereof
US20100258920A1 (en) * 2009-04-10 2010-10-14 Advanced Semiconductor Engineering, Inc. Manufacturing method of advanced quad flat non-leaded package
JP2011029335A (ja) * 2009-07-23 2011-02-10 Mitsui High Tec Inc リードフレーム及びリードフレームの製造方法とこれを用いた半導体装置の製造方法
US20120074548A1 (en) * 2010-09-24 2012-03-29 Zigmund Ramirez Camacho Integrated circuit packaging system with interlock and method of manufacture thereof
WO2016031482A1 (ja) * 2014-08-26 2016-03-03 Ｓｈマテリアル株式会社 リードフレーム及びその製造方法

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KR100373460B1 (ko) * 2001-02-08 2003-02-25 신무환 고효율 ＳｉＣ 소자제작을 위한 건식식각 공정
TW574753B (en) * 2001-04-13 2004-02-01 Sony Corp Manufacturing method of thin film apparatus and semiconductor device
US7060535B1 (en) * 2003-10-29 2006-06-13 Ns Electronics Bangkok (1993) Ltd. Flat no-lead semiconductor die package including stud terminals
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WO2009084597A1 (ja) * 2007-12-28 2009-07-09 Mitsui High-Tec, Inc. 半導体装置の製造方法及び半導体装置、半導体装置の中間製品の製造方法及び半導体装置の中間製品、並びにリードフレーム
WO2010036051A2 (en) * 2008-09-25 2010-04-01 Lg Innotek Co., Ltd. Structure and manufacture method for multi-row lead frame and semiconductor package
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JP5195647B2 (ja) * 2009-06-01 2013-05-08 セイコーエプソン株式会社 リードフレームの製造方法及び半導体装置の製造方法
JP2011096882A (ja) * 2009-10-30 2011-05-12 Seiko Epson Corp 半導体装置の製造方法及び半導体装置のアレイ
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JP6555927B2 (ja) * 2015-05-18 2019-08-07 大口マテリアル株式会社 半導体素子搭載用リードフレーム及び半導体装置の製造方法
JP6770853B2 (ja) * 2016-08-31 2020-10-21 新光電気工業株式会社 リードフレーム及び電子部品装置とそれらの製造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060097366A1 (en) * 2003-07-19 2006-05-11 Ns Electronics Bangkok (1993) Ltd. Semiconductor package including leadframe roughened with chemical etchant to prevent separation between leadframe and molding compound
WO2006115267A1 (ja) * 2005-04-26 2006-11-02 Dai Nippon Printing Co., Ltd. 回路部材、回路部材の製造方法、半導体装置、及び回路部材表面の積層構造
WO2007061112A1 (ja) * 2005-11-28 2007-05-31 Dai Nippon Printing Co., Ltd. 回路部材、回路部材の製造方法、及び、回路部材を含む半導体装置
US20090230525A1 (en) * 2008-03-14 2009-09-17 Pao-Huei Chang Chien Advanced quad flat no lead chip package having marking and corner lead features and manufacturing methods thereof
US20100258920A1 (en) * 2009-04-10 2010-10-14 Advanced Semiconductor Engineering, Inc. Manufacturing method of advanced quad flat non-leaded package
TW201037776A (en) * 2009-04-10 2010-10-16 Advanced Semiconductor Eng Advanced quad flat non-leaded package structure and manufacturing method thereof
JP2011029335A (ja) * 2009-07-23 2011-02-10 Mitsui High Tec Inc リードフレーム及びリードフレームの製造方法とこれを用いた半導体装置の製造方法
US20120074548A1 (en) * 2010-09-24 2012-03-29 Zigmund Ramirez Camacho Integrated circuit packaging system with interlock and method of manufacture thereof
WO2016031482A1 (ja) * 2014-08-26 2016-03-03 Ｓｈマテリアル株式会社 リードフレーム及びその製造方法

Also Published As

Publication number Publication date
TW201830626A (zh) 2018-08-16
JP6761738B2 (ja) 2020-09-30
US20180138107A1 (en) 2018-05-17
CN108074903B (zh) 2022-07-01
JP2018081979A (ja) 2018-05-24
CN108074903A (zh) 2018-05-25

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