JP6761738B2 - リードフレーム及びその製造方法、電子部品装置の製造方法 - Google Patents
リードフレーム及びその製造方法、電子部品装置の製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 49
- 229910052751 metal Inorganic materials 0.000 claims description 227
- 239000002184 metal Substances 0.000 claims description 227
- 238000007747 plating Methods 0.000 claims description 143
- 238000005530 etching Methods 0.000 claims description 68
- 238000007789 sealing Methods 0.000 claims description 50
- 229920005989 resin Polymers 0.000 claims description 47
- 239000011347 resin Substances 0.000 claims description 47
- 238000000034 method Methods 0.000 claims description 25
- 230000002093 peripheral effect Effects 0.000 claims description 18
- 230000003746 surface roughness Effects 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 description 42
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 35
- 229910052802 copper Inorganic materials 0.000 description 35
- 239000010949 copper Substances 0.000 description 35
- 239000010931 gold Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- 238000001039 wet etching Methods 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 239000007921 spray Substances 0.000 description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229960003280 cupric chloride Drugs 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
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- H01L21/4814—Conductive parts
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- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
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- H01L23/495—Lead-frames or other flat leads
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16245—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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Description
図5〜図11は第1実施形態のリードフレームの製造方法を説明するための図、図12は実施形態のリードフレームを示す図、図13〜図16は第1実施形態の電子部品装置を説明するための図である。
エッチング液の温度:40℃
上側のスプレーの圧力:0.13MPa〜0.17MPa(例えば0.15MPa)
下側のスプレーの圧力:0.03MPa〜0.07MPa(例えば0.05MPa)
金属板10のコンベア搬送速度:1.55m/分
この場合は、金属板10の下面側の第2レジスト層22に格子状の開口部22aを必ずしも設ける必要はなく、エッチング領域に第2レジスト層22の一括した開口部22aを形成してもよい。
このように、上面側の一つの第1突出部E1に対応して下面側の一つの第2突出部E2が設けられることで、一つの電極14aが構築されている。
図17及び図18は第2実施形態のリードフレームを説明するための図、図19は第2実施形態の電子部品装置を示す図である。
図20及び図21は第3実施形態のリードフレームを説明するための図、図22は第3実施形態の電子部品装置を示す図である。
図23〜図25は第4実施形態のリードフレームを説明するための図、図26及び図27は第4実施形態の電子部品装置を説明するための図である。
図28〜図30は、第5実施形態のリードフレーム及び電子部品装置を説明するための図である。第5実施形態では、リードフレームに半導体チップがフリップチップ接続される。
図31には、第6実施形態のリードフレーム1e及び電子部品装置2eが示されている。
Claims (9)
- 金属板の連結部の上面から突出する第1突出部と、前記連結部の下面から突出する第2突出部とを備えた柱状の電極と、
前記電極の上面に形成された第1金属めっき層と、
前記電極の下面に形成された第2金属めっき層と
を備えた端子部を有し、
前記連結部の下面は、前記連結部の上面よりも表面粗さが大きく、
前記第1突出部の高さは前記第2突出部の高さよりも高く、
前記第1金属めっき層の下面の周縁部が前記第1突出部に接していることを特徴とするリードフレーム。 - 第1金属めっき層の面積は、前記電極の上面の面積よりも小さいことを特徴とする請求項1に記載のリードフレーム。
- 前記第1金属めっき層は、前記電極の上面から側面にかけて形成されていることを特徴とする請求項1に記載のリードフレーム。
- 前記金属板にダイパッド部が形成され、前記ダイパッド部の周囲に前記端子部が配置されていることを特徴とする請求項1乃至3のいずれか一項に記載のリードフレーム。
- 金属板を加工して、前記金属板の連結部の上面から突出する第1突出部と前記連結部の下面から突出する第2突出部とを備えた柱状の電極を形成する工程と、
前記電極の上面に第1金属めっき層を形成すると共に、前記電極の下面に第2金属めっき層を形成して、前記電極、前記第1金属めっき層及び前記第2金属めっき層を備えた端子部を得る工程と
を有し、
前記柱状の電極を形成する工程は、前記連結部の下面を前記連結部の上面よりも表面粗さが大きい面とする工程を有し、
前記第1突出部の高さは前記第2突出部の高さよりも高く設定され、
前記第1金属めっき層の下面の周縁部が前記第1突出部に接して形成されることを特徴とするリードフレームの製造方法。 - 前記第1金属めっき層を形成する工程において、
第1金属めっき層の面積は、前記電極の上面の面積よりも小さく設定されることを特徴とする請求項5に記載のリードフレームの製造方法。 - 前記第1金属めっき層を形成する工程において、
前記第1金属めっき層は、前記電極の上面から側面にかけて形成されることを特徴とする請求項5に記載のリードフレームの製造方法。 - 前記電極を形成する工程において、前記金属板にダイパッド部を形成し、
前記ダイパッド部の周囲に前記端子部が配置されることを特徴とする請求項5乃至7のいずれか一項に記載のリードフレームの製造方法。 - 金属板を加工して、前記金属板の連結部の上面から突出する第1突出部と前記連結部の下面から突出する第2突出部とを備えた柱状の電極を形成する工程と、
前記電極の上面に第1金属めっき層を形成すると共に、前記電極の下面に第2金属めっき層を形成して、前記電極、前記第1金属めっき層及び前記第2金属めっき層を備えた端子部を得る工程と
を含み、前記柱状の電極を形成する工程が前記連結部の下面を前記連結部の上面よりも表面粗さが大きい面とする工程を有する製造方法により、
前記第1突出部の高さが前記第2突出部の高さよりも高く設定され、かつ、前記第1金属めっき層の下面の周縁部が前記第1突出部に接して形成されるリードフレームを得る工程と、
前記リードフレームに電子部品を搭載し、前記電子部品と前記端子部の上端とを接続する工程と、
前記金属板の上面に、前記端子部の上端及び前記電子部品を封止する封止樹脂を形成する工程と、
前記第2金属めっき層をマスクとして前記連結部の下面をエッチングして、前記連結部を除去する工程と
を有することを特徴とする電子部品装置の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016222098A JP6761738B2 (ja) | 2016-11-15 | 2016-11-15 | リードフレーム及びその製造方法、電子部品装置の製造方法 |
US15/810,261 US20180138107A1 (en) | 2016-11-15 | 2017-11-13 | Lead frame and electronic component device |
TW106139334A TWI733941B (zh) | 2016-11-15 | 2017-11-14 | 導線架及其製造方法暨製造電子構件裝置之方法 |
CN201711130270.4A CN108074903B (zh) | 2016-11-15 | 2017-11-15 | 引线框架和电子元件装置 |
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JP2016222098A JP6761738B2 (ja) | 2016-11-15 | 2016-11-15 | リードフレーム及びその製造方法、電子部品装置の製造方法 |
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JP2018081979A JP2018081979A (ja) | 2018-05-24 |
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US20200035614A1 (en) * | 2018-07-30 | 2020-01-30 | Powertech Technology Inc. | Package structure and manufacturing method thereof |
JP7319808B2 (ja) | 2019-03-29 | 2023-08-02 | ローム株式会社 | 半導体装置および半導体パッケージ |
US11562948B2 (en) * | 2019-11-04 | 2023-01-24 | Mediatek Inc. | Semiconductor package having step cut sawn into molding compound along perimeter of the semiconductor package |
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US6342730B1 (en) * | 2000-01-28 | 2002-01-29 | Advanced Semiconductor Engineering, Inc. | Low-pin-count chip package and manufacturing method thereof |
KR100373460B1 (ko) * | 2001-02-08 | 2003-02-25 | 신무환 | 고효율 SiC 소자제작을 위한 건식식각 공정 |
TW574753B (en) * | 2001-04-13 | 2004-02-01 | Sony Corp | Manufacturing method of thin film apparatus and semiconductor device |
US7049683B1 (en) * | 2003-07-19 | 2006-05-23 | Ns Electronics Bangkok (1993) Ltd. | Semiconductor package including organo-metallic coating formed on surface of leadframe roughened using chemical etchant to prevent separation between leadframe and molding compound |
US7060535B1 (en) * | 2003-10-29 | 2006-06-13 | Ns Electronics Bangkok (1993) Ltd. | Flat no-lead semiconductor die package including stud terminals |
JP4857594B2 (ja) * | 2005-04-26 | 2012-01-18 | 大日本印刷株式会社 | 回路部材、及び回路部材の製造方法 |
US20090146280A1 (en) * | 2005-11-28 | 2009-06-11 | Dai Nippon Printing Co., Ltd. | Circuit member, manufacturing method of the circuit member, and semiconductor device including the circuit member |
US7807498B2 (en) * | 2007-07-31 | 2010-10-05 | Seiko Epson Corporation | Substrate, substrate fabrication, semiconductor device, and semiconductor device fabrication |
WO2009084597A1 (ja) * | 2007-12-28 | 2009-07-09 | Mitsui High-Tec, Inc. | 半導体装置の製造方法及び半導体装置、半導体装置の中間製品の製造方法及び半導体装置の中間製品、並びにリードフレーム |
US20090230524A1 (en) * | 2008-03-14 | 2009-09-17 | Pao-Huei Chang Chien | Semiconductor chip package having ground and power regions and manufacturing methods thereof |
CN102224586B (zh) * | 2008-09-25 | 2013-12-11 | Lg伊诺特有限公司 | 多行引线框架和半导体封装的结构和制造方法 |
WO2010052973A1 (ja) * | 2008-11-05 | 2010-05-14 | 株式会社三井ハイテック | 半導体装置及びその製造方法 |
US8124447B2 (en) * | 2009-04-10 | 2012-02-28 | Advanced Semiconductor Engineering, Inc. | Manufacturing method of advanced quad flat non-leaded package |
JP5195647B2 (ja) * | 2009-06-01 | 2013-05-08 | セイコーエプソン株式会社 | リードフレームの製造方法及び半導体装置の製造方法 |
JP2011029335A (ja) * | 2009-07-23 | 2011-02-10 | Mitsui High Tec Inc | リードフレーム及びリードフレームの製造方法とこれを用いた半導体装置の製造方法 |
US8669649B2 (en) * | 2010-09-24 | 2014-03-11 | Stats Chippac Ltd. | Integrated circuit packaging system with interlock and method of manufacture thereof |
US8643166B2 (en) * | 2011-12-15 | 2014-02-04 | Stats Chippac Ltd. | Integrated circuit packaging system with leads and method of manufacturing thereof |
JP2013168474A (ja) * | 2012-02-15 | 2013-08-29 | Toshiba Corp | 多結晶シリコンのエッチング方法、半導体装置の製造方法およびプログラム |
US9312194B2 (en) * | 2012-03-20 | 2016-04-12 | Stats Chippac Ltd. | Integrated circuit packaging system with terminals and method of manufacture thereof |
JP6493952B2 (ja) * | 2014-08-26 | 2019-04-03 | 大口マテリアル株式会社 | リードフレーム及びその製造方法 |
JP6555927B2 (ja) * | 2015-05-18 | 2019-08-07 | 大口マテリアル株式会社 | 半導体素子搭載用リードフレーム及び半導体装置の製造方法 |
JP6770853B2 (ja) * | 2016-08-31 | 2020-10-21 | 新光電気工業株式会社 | リードフレーム及び電子部品装置とそれらの製造方法 |
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CN108074903B (zh) | 2022-07-01 |
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TWI733941B (zh) | 2021-07-21 |
US20180138107A1 (en) | 2018-05-17 |
CN108074903A (zh) | 2018-05-25 |
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