JP2007287762A - 半導体集積回路素子とその製造方法および半導体装置 - Google Patents
半導体集積回路素子とその製造方法および半導体装置 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 238000007789 sealing Methods 0.000 claims abstract description 35
- 239000011347 resin Substances 0.000 claims abstract description 33
- 229920005989 resin Polymers 0.000 claims abstract description 33
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- 238000000034 method Methods 0.000 description 10
- 229910000679 solder Inorganic materials 0.000 description 10
- 238000007747 plating Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 229910001128 Sn alloy Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
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- 238000001816 cooling Methods 0.000 description 2
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
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- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910000978 Pb alloy Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
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- 229910001297 Zn alloy Inorganic materials 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
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- 230000002452 interceptive effect Effects 0.000 description 1
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- 239000002245 particle Substances 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
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Abstract
【解決手段】配線パターンが形成された配線基板2の上面に半導体チップ3を搭載し、配線基板の上面の配線パターンと半導体チップの素子電極とをワイヤ4により電気的に接続し、配線基板の上面に形成された上面端子8aに一端が電気接続された導電性ポスト7を配置し、半導体チップとワイヤと導電性ポストを樹脂封止部5で封止する。前記ポストの一部を樹脂封止部から露出させて、外部電極7aを形成している。
【選択図】図1
Description
図4に示した半導体集積回路素子1Aは、配線パターンが形成された配線基板2の上面に半導体チップ3を搭載し、配線基板2の上面の配線パターンの接続端子と半導体チップ3の素子電極とをワイヤー4により電気的に接続し、半導体チップ3とワイヤー4とを樹脂封止部5で封止し、配線基板2の下面に前記上面の配線パターンと電気的に接続した複数の外部接続電極6(以下、ボール電極6と言う)を格子状に配置したものであり、エリアアレイ型のパッケージ半導体集積回路素子のなかでも、ボール電極6を設けたものは、BGA(ボール・グリッド・アレイ)型半導体集積回路素子と呼ばれている。8aは配線基板2の上面周辺部に設けられた上面接続端子である。
本発明の請求項3記載の半導体集積回路素子の製造方法は、半導体チップを搭載した配線基板の上面に、前記配線基板に形成された配線に電気接続されるように導電性のポストを取り付け、前記ポストの先端を封止シートを介して密着させてモールド金型に当接、または直接にモールド金型に当接させた状態でモールド樹脂を注入して封止して、前記ポストの先端を樹脂封止部の表面に露出させることを特徴とする。
図1(a)(b)は本発明の一実施形態における半導体集積回路素子を示す。
この半導体集積回路素子1Aは、BGA型の半導体集積回路素子であり、配線パターンが形成されたインターポーザと呼ばれる配線基板2の上面に半導体チップ3を搭載し、配線基板2の上面の配線パターンと半導体チップ3の素子電極とをワイヤー4により電気的に接続し、半導体チップ3とワイヤー4とを樹脂封止部5で封止し、配線基板2の下面に前記上面の配線パターンと電気的に接続した凸状の外部接続電極6(以下、ボール電極6と言う)を複数個、二次元的に格子状に配置している。
先ず、図2(a)に示すように、配線基板2Aの上面に複数の半導体チップ3を素子電極を上向きにして搭載し、各半導体チップ3の素子電極と基板上面の配線パターンとをワイヤー4により接続する。
更に、このように半導体チップ3と導電性ポスト7を搭載した配線基板2Aを、図2(c)に示すようにモールド上型10aとモールド下型10bとで挟持する。なお、モールド上型10aと配線基板2Aとの間には封止シート11が設けられており、導電ポスト7の先端が封止シート11に密着してモールド上型10aに当接している。
先ず、図3(a)に示すように、実装用回路基板9の実装用ランド上にメタルマスクなどを用いて半田ペースト13を印刷転写する。この時の半田ペースト13の高さはメタルマスクの厚さにより規定され、高さ0.08mm〜0.15mmが好ましい。半田ペースト13は半田とフラックスとにより構成されるものであるが、実装用途には粒径15〜60μm程度の半田の使用が好ましい。
次に、図3(e)に示すように、第1層目の半導体集積回路素子1Aの上に第2層目の半導体集積回路素子1Bを、第2層目の半導体集積回路素子1Bのボール電極6が第1層目の半導体集積回路素子1Aの外部電極7aに対向するように位置合わせして積層搭載する。
2,2A 配線基板
3 半導体チップ
4 ワイヤー
5 樹脂封止部
6 ボール電極
7 導電性ポスト
7a 外部電極
8a 上面接続端子
10a モールド上型
10b モールド下型
11 封止シート
13 半田ペースト
14 フラックス
Claims (4)
- 配線基板の上面に半導体チップを搭載するとともに、前記半導体チップを樹脂封止する樹脂封止部を設け、前記配線基板に形成された配線に一端が電気接続された導電性のポストを前記樹脂封止部にモールドすると共に前記ポストの一部を樹脂封止部から露出させた
半導体集積回路素子。 - 前記ポストの先端を前記樹脂封止部の表面に露出させた
請求項1記載の半導体集積回路素子。 - 半導体チップを搭載した配線基板の上面に、前記配線基板に形成された配線に電気接続されるように導電性のポストを取り付け、
前記ポストの先端を封止シートを介して密着させてモールド金型に当接、または直接にモールド金型に当接させた状態でモールド樹脂を注入して封止して、前記ポストの先端を樹脂封止部の表面に露出させる
半導体集積回路素子の製造方法。 - 請求項1に記載の半導体集積回路素子を複数個積層した半導体装置であって、
実装用回路基板の上に第1層目の半導体集積回路素子を実装し、
第1層目の半導体集積回路素子の上に第2層目の半導体集積回路素子を、第1層目の半導体集積回路素子の樹脂封止部の表面で露出した前記ポストに第2層目の半導体集積回路素子の配線基板の下面に形成された電極部を位置合わせして搭載した
半導体装置。
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009260132A (ja) * | 2008-04-18 | 2009-11-05 | Oki Semiconductor Co Ltd | 半導体装置の製造方法 |
WO2010047014A1 (ja) * | 2008-10-21 | 2010-04-29 | パナソニック株式会社 | 積層型半導体装置及び電子機器 |
WO2011114766A1 (ja) * | 2010-03-16 | 2011-09-22 | 日本電気株式会社 | 機能素子内蔵基板 |
FR2977076A1 (fr) * | 2011-06-21 | 2012-12-28 | St Microelectronics Grenoble 2 | Dispositif semi-conducteur a elements de connexion electrique encapsules et son procede de fabrication |
US9491846B2 (en) | 2011-09-07 | 2016-11-08 | Murata Manufacturing Co., Ltd. | Method of manufacturing module |
US9538649B2 (en) | 2011-09-07 | 2017-01-03 | Murata Manufacturing Co., Ltd. | Method of manufacturing module |
US9591747B2 (en) | 2011-09-09 | 2017-03-07 | Murata Manufacturing Co., Ltd. | Module board |
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JP2010103129A (ja) * | 2008-10-21 | 2010-05-06 | Panasonic Corp | 積層型半導体装置及び電子機器 |
US8269335B2 (en) | 2008-10-21 | 2012-09-18 | Panasonic Corporation | Multilayer semiconductor device and electronic equipment |
WO2011114766A1 (ja) * | 2010-03-16 | 2011-09-22 | 日本電気株式会社 | 機能素子内蔵基板 |
JP5692217B2 (ja) * | 2010-03-16 | 2015-04-01 | 日本電気株式会社 | 機能素子内蔵基板 |
FR2977076A1 (fr) * | 2011-06-21 | 2012-12-28 | St Microelectronics Grenoble 2 | Dispositif semi-conducteur a elements de connexion electrique encapsules et son procede de fabrication |
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