TWI718368B - 水晶振動元件及具備該水晶振動元件之水晶振動子 - Google Patents

水晶振動元件及具備該水晶振動元件之水晶振動子 Download PDF

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Publication number
TWI718368B
TWI718368B TW107114045A TW107114045A TWI718368B TW I718368 B TWI718368 B TW I718368B TW 107114045 A TW107114045 A TW 107114045A TW 107114045 A TW107114045 A TW 107114045A TW I718368 B TWI718368 B TW I718368B
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Taiwan
Prior art keywords
crystal
vibration
vibrating element
patent application
thickness
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TW107114045A
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English (en)
Chinese (zh)
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TW201830741A (zh
Inventor
木津徹
長谷貴志
鎌田威
開田弘明
杉村茂昭
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日商村田製作所股份有限公司
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Publication of TW201830741A publication Critical patent/TW201830741A/zh
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Publication of TWI718368B publication Critical patent/TWI718368B/zh

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
    • H10N30/088—Shaping or machining of piezoelectric or electrostrictive bodies by machining by cutting or dicing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
TW107114045A 2015-10-08 2016-10-07 水晶振動元件及具備該水晶振動元件之水晶振動子 TWI718368B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2015200232 2015-10-08
JPJP2015-200232 2015-10-08
JP2016059077 2016-03-23
JPJP2016-059077 2016-03-23
JP2016089765 2016-04-27
JPJP2016-089765 2016-04-27

Publications (2)

Publication Number Publication Date
TW201830741A TW201830741A (zh) 2018-08-16
TWI718368B true TWI718368B (zh) 2021-02-11

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Family Applications (2)

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TW107114045A TWI718368B (zh) 2015-10-08 2016-10-07 水晶振動元件及具備該水晶振動元件之水晶振動子
TW105132550A TWI630737B (zh) 2015-10-08 2016-10-07 Crystal vibrating element and crystal vibrator having the crystal vibrating element

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW105132550A TWI630737B (zh) 2015-10-08 2016-10-07 Crystal vibrating element and crystal vibrator having the crystal vibrating element

Country Status (5)

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US (4) US11139796B2 (enExample)
JP (2) JP6268629B2 (enExample)
CN (2) CN113472310B (enExample)
TW (2) TWI718368B (enExample)
WO (1) WO2017061591A1 (enExample)

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WO2016132767A1 (ja) * 2015-02-18 2016-08-25 株式会社村田製作所 圧電振動デバイス及びその製造方法
CN113472310B (zh) * 2015-10-08 2025-03-11 株式会社村田制作所 水晶振动元件、以及具备该水晶振动元件的水晶振子
JP6853085B2 (ja) * 2017-03-27 2021-03-31 京セラ株式会社 水晶素子および水晶デバイス
JP6797764B2 (ja) * 2017-08-09 2020-12-09 日本電波工業株式会社 水晶振動子およびその製造方法
WO2019167920A1 (ja) * 2018-02-28 2019-09-06 株式会社村田製作所 振動基板、振動素子、及び振動子
JP2019193066A (ja) * 2018-04-24 2019-10-31 日本電波工業株式会社 水晶振動子
CN110401429A (zh) * 2018-04-24 2019-11-01 日本电波工业株式会社 晶体振子及其制造方法
JP6760430B1 (ja) * 2019-03-27 2020-09-23 株式会社大真空 水晶振動デバイス
US11145726B2 (en) * 2019-10-16 2021-10-12 Applied Materials, Inc. Doped through-contact structures
JP7396858B2 (ja) * 2019-11-01 2023-12-12 日本電波工業株式会社 圧電デバイス及びその製造方法
JP7514196B2 (ja) * 2021-02-12 2024-07-10 日本電波工業株式会社 圧電デバイス及びその製造方法
TWI773193B (zh) * 2021-03-15 2022-08-01 台灣嘉碩科技股份有限公司 晶體裝置及諧振元件
CN115412051A (zh) * 2021-05-28 2022-11-29 日本电波工业株式会社 晶体振子及晶体振子中间物以及晶体振子的制造方法
CN113556099B (zh) * 2021-06-11 2022-10-14 成都泰美克晶体技术有限公司 压电石英晶体振荡片、谐振器和振荡器

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JPS61123211A (ja) * 1984-11-19 1986-06-11 Murata Mfg Co Ltd 圧電振動子および圧電振動子の振動周波数調整方法
JPS61147613A (ja) * 1984-12-21 1986-07-05 Nippon Dempa Kogyo Co Ltd 厚みすべり型圧電振動子
JPS61201512A (ja) * 1985-03-04 1986-09-06 Murata Mfg Co Ltd 圧電振動子
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Also Published As

Publication number Publication date
US11139796B2 (en) 2021-10-05
CN108352821B (zh) 2021-11-23
US11075615B2 (en) 2021-07-27
US11038485B2 (en) 2021-06-15
CN113472310B (zh) 2025-03-11
CN108352821A (zh) 2018-07-31
TW201830741A (zh) 2018-08-16
US20180248536A1 (en) 2018-08-30
US20180241372A1 (en) 2018-08-23
WO2017061591A1 (ja) 2017-04-13
US20180226944A1 (en) 2018-08-09
JPWO2017061591A1 (ja) 2017-10-19
US20180226943A1 (en) 2018-08-09
JP6819882B2 (ja) 2021-01-27
TWI630737B (zh) 2018-07-21
JP6268629B2 (ja) 2018-01-31
JP2017220954A (ja) 2017-12-14
US11277115B2 (en) 2022-03-15
TW201727955A (zh) 2017-08-01
CN113472310A (zh) 2021-10-01

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