JP6268629B2 - 水晶振動素子、及びこの水晶振動素子を備える水晶振動子 - Google Patents

水晶振動素子、及びこの水晶振動素子を備える水晶振動子 Download PDF

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Publication number
JP6268629B2
JP6268629B2 JP2017519950A JP2017519950A JP6268629B2 JP 6268629 B2 JP6268629 B2 JP 6268629B2 JP 2017519950 A JP2017519950 A JP 2017519950A JP 2017519950 A JP2017519950 A JP 2017519950A JP 6268629 B2 JP6268629 B2 JP 6268629B2
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Japan
Prior art keywords
vibration
crystal
crystal piece
thickness
piece
Prior art date
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Active
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JP2017519950A
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English (en)
Japanese (ja)
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JPWO2017061591A1 (ja
Inventor
徹 木津
徹 木津
貴志 長谷
貴志 長谷
威 鎌田
威 鎌田
開田　弘明
弘明 開田
茂昭 杉村
茂昭 杉村
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
    • H10N30/088—Shaping or machining of piezoelectric or electrostrictive bodies by machining by cutting or dicing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
JP2017519950A 2015-10-08 2016-10-07 水晶振動素子、及びこの水晶振動素子を備える水晶振動子 Active JP6268629B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP2015200232 2015-10-08
JP2015200232 2015-10-08
JP2016059077 2016-03-23
JP2016059077 2016-03-23
JP2016089765 2016-04-27
JP2016089765 2016-04-27
PCT/JP2016/079920 WO2017061591A1 (ja) 2015-10-08 2016-10-07 水晶振動素子、及びこの水晶振動素子を備える水晶振動子

Related Child Applications (1)

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JP2017182881A Division JP6819882B2 (ja) 2015-10-08 2017-09-22 水晶振動素子、及びこの水晶振動素子を備える水晶振動子

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JPWO2017061591A1 JPWO2017061591A1 (ja) 2017-10-19
JP6268629B2 true JP6268629B2 (ja) 2018-01-31

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JP2017519950A Active JP6268629B2 (ja) 2015-10-08 2016-10-07 水晶振動素子、及びこの水晶振動素子を備える水晶振動子
JP2017182881A Active JP6819882B2 (ja) 2015-10-08 2017-09-22 水晶振動素子、及びこの水晶振動素子を備える水晶振動子

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Country Link
US (4) US11038485B2 (enExample)
JP (2) JP6268629B2 (enExample)
CN (2) CN113472310B (enExample)
TW (2) TWI718368B (enExample)
WO (1) WO2017061591A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016132767A1 (ja) * 2015-02-18 2016-08-25 株式会社村田製作所 圧電振動デバイス及びその製造方法
CN113472310B (zh) * 2015-10-08 2025-03-11 株式会社村田制作所 水晶振动元件、以及具备该水晶振动元件的水晶振子
JP6853085B2 (ja) * 2017-03-27 2021-03-31 京セラ株式会社 水晶素子および水晶デバイス
JP6797764B2 (ja) * 2017-08-09 2020-12-09 日本電波工業株式会社 水晶振動子およびその製造方法
WO2019167920A1 (ja) * 2018-02-28 2019-09-06 株式会社村田製作所 振動基板、振動素子、及び振動子
JP2019193066A (ja) * 2018-04-24 2019-10-31 日本電波工業株式会社 水晶振動子
US10840882B2 (en) * 2018-04-24 2020-11-17 Nihon Dempa Kogyo Co., Ltd. Crystal unit and manufacturing method thereof
JP6760430B1 (ja) * 2019-03-27 2020-09-23 株式会社大真空 水晶振動デバイス
US11145726B2 (en) * 2019-10-16 2021-10-12 Applied Materials, Inc. Doped through-contact structures
JP7396858B2 (ja) * 2019-11-01 2023-12-12 日本電波工業株式会社 圧電デバイス及びその製造方法
JP7514196B2 (ja) * 2021-02-12 2024-07-10 日本電波工業株式会社 圧電デバイス及びその製造方法
TWI773193B (zh) * 2021-03-15 2022-08-01 台灣嘉碩科技股份有限公司 晶體裝置及諧振元件
US12388415B2 (en) * 2021-05-28 2025-08-12 Nihon Dempa Kogyo Co., Ltd. Crystal unit, semimanufactured crystal unit, and method for manufacturing crystal unit
CN113556099B (zh) * 2021-06-11 2022-10-14 成都泰美克晶体技术有限公司 压电石英晶体振荡片、谐振器和振荡器

Family Cites Families (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5186977U (enExample) * 1974-12-28 1976-07-12
JPS5186977A (ja) * 1975-01-29 1976-07-30 Hitachi Ltd Denkaikokatoranjisutatosonoseizohoho
JPS5636814B2 (enExample) 1975-02-21 1981-08-26
JPS542092A (en) * 1977-06-07 1979-01-09 Nippon Denpa Kogyo Kk Thickness slide piezooelectric vibrator holding structure
JPS5494173U (enExample) * 1977-12-16 1979-07-03
JPS5677129U (enExample) * 1979-11-16 1981-06-23
JPS5677129A (en) * 1979-11-29 1981-06-25 Yamashiro Seiki Seisakusho:Kk Small portable injection molding machine
JPS60160633U (ja) * 1984-03-31 1985-10-25 御代田精密株式会社 Ａｔカツト小型矩形水晶振動子の電極構造
JPS61123211A (ja) * 1984-11-19 1986-06-11 Murata Mfg Co Ltd 圧電振動子および圧電振動子の振動周波数調整方法
JPS61147613A (ja) * 1984-12-21 1986-07-05 Nippon Dempa Kogyo Co Ltd 厚みすべり型圧電振動子
JPS61201512A (ja) * 1985-03-04 1986-09-06 Murata Mfg Co Ltd 圧電振動子
JPH07108039B2 (ja) * 1985-11-01 1995-11-15 耕司 戸田 正方形板振動子駆動方法
JPS63221706A (ja) * 1987-03-11 1988-09-14 Matsushima Kogyo Co Ltd 矩形状ａｔ振動子
JPH0748633B2 (ja) 1987-03-11 1995-05-24 日本ビクター株式会社 オ−デイオ用振幅及び群遅延の調整装置
JP2001007677A (ja) 1999-06-24 2001-01-12 Toyo Commun Equip Co Ltd 水晶振動子
US6621194B1 (en) * 1999-11-15 2003-09-16 Matsushita Electric Industrial Co., Ltd. Piezoelectric element having thickness shear vibration and mobile communication device using the same
JP2002340559A (ja) * 2001-05-11 2002-11-27 Piedekku Gijutsu Kenkyusho:Kk 水晶角速度センサ
JP4249502B2 (ja) * 2003-02-04 2009-04-02 日本電波工業株式会社 圧電結晶材料及び圧電振動子
JP2006166390A (ja) 2004-02-05 2006-06-22 Seiko Epson Corp 圧電振動片、圧電振動子及び圧電発振器
JP3838260B2 (ja) 2004-10-14 2006-10-25 株式会社村田製作所 エネルギー閉じ込め型圧電共振子
US7745979B2 (en) * 2005-08-22 2010-06-29 Seiko Epson Corporation Piezoelectric device
JP4305542B2 (ja) * 2006-08-09 2009-07-29 エプソントヨコム株式会社 Ａｔカット水晶振動片及びその製造方法
JP2008283665A (ja) * 2007-04-10 2008-11-20 Epson Toyocom Corp 輪郭振動子
JP5088613B2 (ja) * 2007-08-06 2012-12-05 セイコーエプソン株式会社 振動デバイスの周波数調整方法、並びに振動デバイスおよび電子デバイス
CN101884168B (zh) 2007-12-06 2013-07-03 株式会社村田制作所 压电振动部件
JP4553047B2 (ja) * 2008-03-12 2010-09-29 セイコーエプソン株式会社 ラム波型共振子及び発振器
JP2010252303A (ja) * 2009-03-25 2010-11-04 Seiko Epson Corp 屈曲振動片およびそれを用いた発振器
JP5471303B2 (ja) * 2009-10-27 2014-04-16 セイコーエプソン株式会社 振動片及び振動子
JP5589403B2 (ja) * 2010-01-22 2014-09-17 株式会社村田製作所 圧電共振子
JP5589167B2 (ja) 2010-11-19 2014-09-17 セイコーエプソン株式会社 圧電振動片および圧電振動子
US8963402B2 (en) * 2010-11-30 2015-02-24 Seiko Epson Corporation Piezoelectric vibrator element, piezoelectric module, and electronic device
JP2012156978A (ja) 2011-01-05 2012-08-16 Nippon Dempa Kogyo Co Ltd Ａｔカットの水晶振動片、水晶デバイス及び水晶振動片の製造方法
JP5708089B2 (ja) 2011-03-18 2015-04-30 セイコーエプソン株式会社 圧電振動素子、圧電振動子、圧電発振器及び電子デバイス
JP5773418B2 (ja) 2011-05-06 2015-09-02 日本電波工業株式会社 圧電振動片、圧電振動片を有する圧電デバイス及び圧電デバイスの製造方法
JP5804825B2 (ja) * 2011-07-29 2015-11-04 京セラクリスタルデバイス株式会社 水晶振動素子及び水晶デバイス
JP2013051512A (ja) 2011-08-30 2013-03-14 Nippon Dempa Kogyo Co Ltd 水晶振動子
JP2013192052A (ja) * 2012-03-14 2013-09-26 Nippon Dempa Kogyo Co Ltd 水晶デバイス及びその製造方法。
JP5943186B2 (ja) * 2012-03-19 2016-06-29 セイコーエプソン株式会社 振動片、振動子、電子デバイス、および電子機器
JP5943187B2 (ja) 2012-03-21 2016-06-29 セイコーエプソン株式会社 振動素子、振動子、電子デバイス、および電子機器
JP2013255051A (ja) * 2012-06-06 2013-12-19 Seiko Epson Corp 振動素子、振動子、電子デバイス、電子機器及び振動素子の製造方法
JP2014036426A (ja) 2012-08-10 2014-02-24 Nippon Dempa Kogyo Co Ltd 圧電振動片及び圧電デバイス
JP5423870B2 (ja) 2012-12-25 2014-02-19 セイコーエプソン株式会社 メサ型圧電振動片及び圧電デバイス
US20160164490A1 (en) 2013-03-27 2016-06-09 Nihon Dempa Kogyo Co., Ltd. Piezoelectric device and method for fabricating the same
JP6133697B2 (ja) 2013-06-12 2017-05-24 日本電波工業株式会社 圧電振動片、圧電デバイス、及び圧電デバイスの製造方法
JP6338367B2 (ja) 2013-12-24 2018-06-06 日本電波工業株式会社 水晶振動子
US9503045B2 (en) * 2015-01-19 2016-11-22 Seiko Epson Corporation Resonator element, resonator, oscillator, electronic apparatus, and moving object
CN113472310B (zh) * 2015-10-08 2025-03-11 株式会社村田制作所 水晶振动元件、以及具备该水晶振动元件的水晶振子

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Publication number Publication date
CN108352821A (zh) 2018-07-31
JP6819882B2 (ja) 2021-01-27
US11139796B2 (en) 2021-10-05
CN108352821B (zh) 2021-11-23
CN113472310B (zh) 2025-03-11
US20180241372A1 (en) 2018-08-23
JP2017220954A (ja) 2017-12-14
CN113472310A (zh) 2021-10-01
TW201830741A (zh) 2018-08-16
JPWO2017061591A1 (ja) 2017-10-19
US11277115B2 (en) 2022-03-15
WO2017061591A1 (ja) 2017-04-13
US11075615B2 (en) 2021-07-27
US11038485B2 (en) 2021-06-15
US20180226943A1 (en) 2018-08-09
TWI630737B (zh) 2018-07-21
US20180248536A1 (en) 2018-08-30
US20180226944A1 (en) 2018-08-09
TW201727955A (zh) 2017-08-01
TWI718368B (zh) 2021-02-11

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