TWI610438B - 積體電路裝置及製造其之方法 - Google Patents

積體電路裝置及製造其之方法 Download PDF

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Publication number
TWI610438B
TWI610438B TW102122338A TW102122338A TWI610438B TW I610438 B TWI610438 B TW I610438B TW 102122338 A TW102122338 A TW 102122338A TW 102122338 A TW102122338 A TW 102122338A TW I610438 B TWI610438 B TW I610438B
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TW
Taiwan
Prior art keywords
barrier layer
layer
gate
integrated circuit
circuit device
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Application number
TW102122338A
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English (en)
Chinese (zh)
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TW201405823A (zh
Inventor
保羅 紹尼爾
愛德華Ａ 畢姆三世
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三胞半導體公司
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Publication of TW201405823A publication Critical patent/TW201405823A/zh
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Publication of TWI610438B publication Critical patent/TWI610438B/zh

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/015—Manufacture or treatment of FETs having heterojunction interface channels or heterojunction gate electrodes, e.g. HEMT
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
    • H10D30/475—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/40—Crystalline structures
    • H10D62/402—Amorphous materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
    • H10D62/8503—Nitride Group III-V materials, e.g. AlN or GaN
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/111—Field plates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs

Landscapes

  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Junction Field-Effect Transistors (AREA)
TW102122338A 2012-06-27 2013-06-24 積體電路裝置及製造其之方法 TWI610438B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/535,127 US8975664B2 (en) 2012-06-27 2012-06-27 Group III-nitride transistor using a regrown structure
US13/535,127 2012-06-27

Publications (2)

Publication Number Publication Date
TW201405823A TW201405823A (zh) 2014-02-01
TWI610438B true TWI610438B (zh) 2018-01-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW102122338A TWI610438B (zh) 2012-06-27 2013-06-24 積體電路裝置及製造其之方法

Country Status (4)

Country Link
US (1) US8975664B2 (enExample)
JP (2) JP6335444B2 (enExample)
DE (1) DE102013010487A1 (enExample)
TW (1) TWI610438B (enExample)

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Also Published As

Publication number Publication date
TW201405823A (zh) 2014-02-01
US20140001478A1 (en) 2014-01-02
DE102013010487A1 (de) 2014-01-02
JP6554530B2 (ja) 2019-07-31
US8975664B2 (en) 2015-03-10
JP2018082192A (ja) 2018-05-24
JP6335444B2 (ja) 2018-05-30
JP2014011462A (ja) 2014-01-20

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