JP2008124374A - 絶縁ゲート電界効果トランジスタ - Google Patents
絶縁ゲート電界効果トランジスタ Download PDFInfo
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- JP2008124374A JP2008124374A JP2006309107A JP2006309107A JP2008124374A JP 2008124374 A JP2008124374 A JP 2008124374A JP 2006309107 A JP2006309107 A JP 2006309107A JP 2006309107 A JP2006309107 A JP 2006309107A JP 2008124374 A JP2008124374 A JP 2008124374A
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- 230000005669 field effect Effects 0.000 title claims abstract description 30
- 239000004065 semiconductor Substances 0.000 claims description 45
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 abstract description 17
- 229910002704 AlGaN Inorganic materials 0.000 abstract description 14
- 229910004205 SiNX Inorganic materials 0.000 abstract description 6
- 239000000463 material Substances 0.000 description 10
- 238000002161 passivation Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
- H01L29/7787—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT with wide bandgap charge-carrier supplying layer, e.g. direct single heterostructure MODFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/518—Insulating materials associated therewith the insulating material containing nitrogen, e.g. nitride, oxynitride, nitrogen-doped material
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
【課題】ノーマリオフ動作が可能な絶縁ゲート電界効果トランジスタを提供する。
【解決手段】このヘテロ接合電界効果トランジスタ(MISHFET)は、AlGaNバリア層104の上にソースオーミック電極105とドレインオーミック電極106が形成されている。AlGaNバリア層104上にSiNxゲート絶縁膜108、p型多結晶SiC層109、オーミック電極であるPt/Auゲート電極110が順次形成されている。p型多結晶SiC層109は仕事関数が相対的に大きいので、ゼロバイアス状態でもMISHFETのチャネルが空乏化されて、ノーマリオフ動作が生じる。
【選択図】図1
Description
アディバラーンら(V. Adivarahan,M. Gaevski,W.H. Sun,H.Fatima,A.Koudymov,S.Saygi, G.Simin,J.Yang,M.Afir Khan,A.Tarakji,M.S.Shur,and R.Gaska)著、「サブミクロンゲート(Submicron Gate) Si3N4/AlGaN/GaN MISHFET(−Metal−Insulator−Semiconductor Heterostructure Field−Effect Transistors)」、 アイトリプルイー(IEEE)エレクトロン・デバイス・レターズ(EDL)、第24巻、第9号、2003年9月、p.541−543、
上記半導体チャネル層上に形成されたソース電極と、
上記半導体チャネル層上に形成されたドレイン電極と、
上記半導体チャネル層上に形成されたゲート絶縁膜と、
上記ゲート絶縁膜上に形成された第2導電型の半導体膜と、
上記第2導電型の半導体膜上に形成された金属製のオーミック電極からなるゲート電極とを備えることを特徴としている。
図1に、この発明の絶縁ゲート電界効果トランジスタの第1実施形態であるMISHFET(メタル・インシュレータ・セミコンダクタ・ヘテロ接合電界効果トランジスタ)の断面を示す。この第1実施形態は、シリコン基板101の上に、厚さ500ÅのAlNバッファ層102、厚さ2μmのアンドープGaNからなるチャネル層103、厚さ250ÅのAl0.3Ga0.7Nからなるバリア層104が順次形成されている。このAl0.3Ga0.7Nバリア層104の上に、Ti/Al/Auの積層からなるソースオーミック電極105、およびTi/Al/Auの積層からなるドレインオーミック電極106が形成されている。
次に、図2に、この発明の絶縁ゲート電界効果トランジスタの第2実施形態であるMISHFETの断面を示す。この第2実施形態は、シリコン基板201の上に、厚さ500ÅのAlNバッファ層202、厚さ2μmのアンドープGaNからなるチャネル層203、厚さ250ÅのAl0.3Ga0.7Nからなるバリア層204が順次形成されている。このAl0.3Ga0.7Nバリア層204の上に、Ti/Al/Auの積層からなるソースオーミック電極205およびTi/Al/Auの積層からなるドレインオーミック電極206が形成されている。
102、202 AlNバッファ層
103、203 アンドープGaNチャネル層
104、204 AlGaNバリア層
105、205 Ti/Al/Auソースオーミック電極
106、206 Ti/Al/Auドレインオーミック電極
107、207 ゲートリセス
108、208 ゲート絶縁膜
109、209 p型多結晶SiC層
110、210 Pt/Auゲート電極
211 電極
212 第2のゲート電極
Claims (6)
- 第1導電型チャネルが形成される半導体チャネル層と、
上記半導体チャネル層上に形成されたソース電極と、
上記半導体チャネル層上に形成されたドレイン電極と、
上記半導体チャネル層上に形成されたゲート絶縁膜と、
上記ゲート絶縁膜上に形成された第2導電型の半導体膜と、
上記第2導電型の半導体膜上に形成された金属製のオーミック電極からなるゲート電極とを備えることを特徴とする絶縁ゲート電界効果トランジスタ。 - 請求項1に記載の絶縁ゲート電界効果トランジスタにおいて、
上記第2導電型の半導体膜は、多結晶半導体またはアモルファス半導体で作製されていることを特徴とする絶縁ゲート電界効果トランジスタ。 - 請求項1に記載の絶縁ゲート電界効果トランジスタにおいて、
上記半導体チャネル層は、III‐V族化合物半導体で作製されていることを特徴とする絶縁ゲート電界効果トランジスタ。 - 請求項3に記載の絶縁ゲート電界効果トランジスタにおいて、
上記ゲート絶縁膜がTa2O5からなることを特徴とする絶縁ゲート電界効果トランジスタ。 - 請求項3に記載の絶縁ゲート電界効果トランジスタにおいて、
上記ゲート絶縁層が窒化シリコンからなることを特徴とする絶縁ゲート電界効果トランジスタ。 - 請求項1に記載の絶縁ゲート電界効果トランジスタにおいて、
上記金属製のオーミック電極からなるゲート電極を第1のゲート電極とし、
上記半導体チャネル層上かつ上記第1のゲート電極と上記ドレイン電極との間に形成されていると共に上記ソース電極に電気的に繋がれたショットキ電極からなる第2のゲート電極を有することを特徴とする絶縁ゲート電界効果トランジスタ。
Priority Applications (2)
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JP2006309107A JP2008124374A (ja) | 2006-11-15 | 2006-11-15 | 絶縁ゲート電界効果トランジスタ |
US11/980,567 US7629632B2 (en) | 2006-11-15 | 2007-10-31 | Insulated-gate field effect transistor |
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JP2006309107A JP2008124374A (ja) | 2006-11-15 | 2006-11-15 | 絶縁ゲート電界効果トランジスタ |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2011100967A (ja) * | 2009-07-21 | 2011-05-19 | Rohm Co Ltd | 半導体装置 |
JP2011129607A (ja) * | 2009-12-16 | 2011-06-30 | Furukawa Electric Co Ltd:The | GaN系MOS型電界効果トランジスタ |
JP2012231003A (ja) * | 2011-04-26 | 2012-11-22 | Advanced Power Device Research Association | 半導体装置 |
JP2013502563A (ja) * | 2009-08-18 | 2013-01-24 | ウニヴェルズィテート・ウルム | 半導体装置及び半導体装置の製造方法 |
CN103022118A (zh) * | 2011-09-21 | 2013-04-03 | 株式会社东芝 | 氮化物半导体装置 |
KR101311041B1 (ko) * | 2011-09-26 | 2013-09-24 | 후지쯔 가부시끼가이샤 | 화합물 반도체 장치 및 그 제조 방법 |
US9252253B2 (en) | 2013-10-17 | 2016-02-02 | Samsung Electronics Co., Ltd. | High electron mobility transistor |
US10290731B2 (en) | 2016-08-29 | 2019-05-14 | Kabushiki Kaisha Toshiba | Semiconductor device, power supply circuit, and computer |
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KR101632314B1 (ko) * | 2009-09-11 | 2016-06-22 | 삼성전자주식회사 | 전계 효과형 반도체 소자 및 그 제조 방법 |
WO2011100304A1 (en) | 2010-02-09 | 2011-08-18 | Massachusetts Institute Of Technology | Dual-gate normally-off nitride transistors |
KR20120124101A (ko) * | 2011-05-03 | 2012-11-13 | 삼성전자주식회사 | 고효율 질화계 이종접합 전계효과 트랜지스터 |
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US20220130988A1 (en) * | 2020-10-27 | 2022-04-28 | Texas Instruments Incorporated | Electronic device with enhancement mode gallium nitride transistor, and method of making same |
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JPS60137071A (ja) | 1983-12-26 | 1985-07-20 | Sumitomo Electric Ind Ltd | シヨツトキゲ−ト電界効果トランジスタ |
JPS6155971A (ja) * | 1984-08-27 | 1986-03-20 | Sumitomo Electric Ind Ltd | シヨツトキ−ゲ−ト電界効果トランジスタ |
JPH03116738A (ja) | 1989-09-28 | 1991-05-17 | Fujitsu Ltd | 電界効果トランジスタ |
JP3042019B2 (ja) | 1991-05-29 | 2000-05-15 | ソニー株式会社 | 電界効果トランジスタ |
JPH0645362A (ja) | 1992-07-21 | 1994-02-18 | Mitsubishi Electric Corp | 電界効果トランジスタ |
JPH1050727A (ja) | 1996-08-01 | 1998-02-20 | Fujitsu Ltd | 半導体装置 |
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JP5130641B2 (ja) * | 2006-03-31 | 2013-01-30 | サンケン電気株式会社 | 複合半導体装置 |
JP2002324813A (ja) | 2001-02-21 | 2002-11-08 | Nippon Telegr & Teleph Corp <Ntt> | ヘテロ構造電界効果トランジスタ |
US7456443B2 (en) * | 2004-11-23 | 2008-11-25 | Cree, Inc. | Transistors having buried n-type and p-type regions beneath the source region |
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2006
- 2006-11-15 JP JP2006309107A patent/JP2008124374A/ja active Pending
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2007
- 2007-10-31 US US11/980,567 patent/US7629632B2/en active Active
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JP2013502563A (ja) * | 2009-08-18 | 2013-01-24 | ウニヴェルズィテート・ウルム | 半導体装置及び半導体装置の製造方法 |
JP2011129607A (ja) * | 2009-12-16 | 2011-06-30 | Furukawa Electric Co Ltd:The | GaN系MOS型電界効果トランジスタ |
JP2012231003A (ja) * | 2011-04-26 | 2012-11-22 | Advanced Power Device Research Association | 半導体装置 |
CN103022118A (zh) * | 2011-09-21 | 2013-04-03 | 株式会社东芝 | 氮化物半导体装置 |
JP2013069785A (ja) * | 2011-09-21 | 2013-04-18 | Toshiba Corp | 窒化物半導体装置 |
US8581300B2 (en) | 2011-09-26 | 2013-11-12 | Fujitsu Limited | Compound semiconductor device and method of manufacturing the same |
KR101311041B1 (ko) * | 2011-09-26 | 2013-09-24 | 후지쯔 가부시끼가이샤 | 화합물 반도체 장치 및 그 제조 방법 |
US9252253B2 (en) | 2013-10-17 | 2016-02-02 | Samsung Electronics Co., Ltd. | High electron mobility transistor |
US10290731B2 (en) | 2016-08-29 | 2019-05-14 | Kabushiki Kaisha Toshiba | Semiconductor device, power supply circuit, and computer |
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US20080210988A1 (en) | 2008-09-04 |
US7629632B2 (en) | 2009-12-08 |
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