JP6335444B2 - 再成長構造を用いたｉｉｉ族窒化物トランジスタ - Google Patents

再成長構造を用いたｉｉｉ族窒化物トランジスタ Download PDF

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JP6335444B2
JP6335444B2 JP2013132779A JP2013132779A JP6335444B2 JP 6335444 B2 JP6335444 B2 JP 6335444B2 JP 2013132779 A JP2013132779 A JP 2013132779A JP 2013132779 A JP2013132779 A JP 2013132779A JP 6335444 B2 JP6335444 B2 JP 6335444B2
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barrier layer
layer
gate
resistive
regrowth structure
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JP2014011462A5 (enExample
JP2014011462A (ja
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ソーニヤー、ポール
３世、エドワード エー． ビーム
３世、エドワード エー． ビーム
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Qorvo US Inc
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Triquint Semiconductor Inc
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/015—Manufacture or treatment of FETs having heterojunction interface channels or heterojunction gate electrodes, e.g. HEMT
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
    • H10D30/475—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/40—Crystalline structures
    • H10D62/402—Amorphous materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
    • H10D62/8503—Nitride Group III-V materials, e.g. AlN or GaN
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/111—Field plates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs

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  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Junction Field-Effect Transistors (AREA)
JP2013132779A 2012-06-27 2013-06-25 再成長構造を用いたｉｉｉ族窒化物トランジスタ Expired - Fee Related JP6335444B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/535,127 US8975664B2 (en) 2012-06-27 2012-06-27 Group III-nitride transistor using a regrown structure
US13/535,127 2012-06-27

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JP2014011462A JP2014011462A (ja) 2014-01-20
JP2014011462A5 JP2014011462A5 (enExample) 2016-07-14
JP6335444B2 true JP6335444B2 (ja) 2018-05-30

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JP2017243108A Expired - Fee Related JP6554530B2 (ja) 2012-06-27 2017-12-19 再成長構造を用いたｉｉｉ族窒化物トランジスタ

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US (1) US8975664B2 (enExample)
JP (2) JP6335444B2 (enExample)
DE (1) DE102013010487A1 (enExample)
TW (1) TWI610438B (enExample)

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JP2924064B2 (ja) 1990-03-31 1999-07-26 スズキ株式会社 パワートレイン
EP4550422A1 (en) * 2023-10-30 2025-05-07 GlobalFoundries U.S. Inc. High electron mobility transistor with regrown barrier structure

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US11791385B2 (en) 2005-03-11 2023-10-17 Wolfspeed, Inc. Wide bandgap transistors with gate-source field plates
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WO2015029434A1 (ja) * 2013-08-30 2015-03-05 独立行政法人科学技術振興機構 半導体素子
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CN116034485B (zh) * 2020-08-28 2025-10-03 华为技术有限公司 一种衬底及功率放大器件
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US12261168B2 (en) 2021-02-16 2025-03-25 Efficient Power Conversion Corporation Gate metal-insulator-field plate metal integrated circuit capacitor and method of forming the same
CN113113478B (zh) * 2021-03-01 2022-10-04 西安电子科技大学 基于欧姆再生长的GaN基射频功率器件及其制备方法
US11581448B2 (en) * 2021-04-01 2023-02-14 Raytheon Company Photoconductive semiconductor switch laterally fabricated alongside GaN on Si field effect transistors
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KR102568798B1 (ko) * 2021-07-13 2023-08-21 삼성전자주식회사 고전자 이동도 트랜지스터
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EP4550422A1 (en) * 2023-10-30 2025-05-07 GlobalFoundries U.S. Inc. High electron mobility transistor with regrown barrier structure

Also Published As

Publication number Publication date
TW201405823A (zh) 2014-02-01
US20140001478A1 (en) 2014-01-02
DE102013010487A1 (de) 2014-01-02
JP6554530B2 (ja) 2019-07-31
US8975664B2 (en) 2015-03-10
JP2018082192A (ja) 2018-05-24
TWI610438B (zh) 2018-01-01
JP2014011462A (ja) 2014-01-20

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