JP6279294B2 - フッ化物系または塩化物系化合物を含むゲート誘電体を備えたiii族窒化物系トランジスタ - Google Patents
フッ化物系または塩化物系化合物を含むゲート誘電体を備えたiii族窒化物系トランジスタ Download PDFInfo
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- JP6279294B2 JP6279294B2 JP2013241751A JP2013241751A JP6279294B2 JP 6279294 B2 JP6279294 B2 JP 6279294B2 JP 2013241751 A JP2013241751 A JP 2013241751A JP 2013241751 A JP2013241751 A JP 2013241751A JP 6279294 B2 JP6279294 B2 JP 6279294B2
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- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 title description 16
- 150000001805 chlorine compounds Chemical class 0.000 title description 5
- 239000003989 dielectric material Substances 0.000 title 1
- 230000004888 barrier function Effects 0.000 claims description 65
- 239000000463 material Substances 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 23
- 150000004767 nitrides Chemical class 0.000 claims description 15
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 6
- 229910002601 GaN Inorganic materials 0.000 claims description 5
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 claims description 4
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 claims description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052733 gallium Inorganic materials 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 3
- AJGDITRVXRPLBY-UHFFFAOYSA-N aluminum indium Chemical compound [Al].[In] AJGDITRVXRPLBY-UHFFFAOYSA-N 0.000 claims description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 2
- XAEFZNCEHLXOMS-UHFFFAOYSA-M potassium benzoate Chemical compound [K+].[O-]C(=O)C1=CC=CC=C1 XAEFZNCEHLXOMS-UHFFFAOYSA-M 0.000 claims 1
- 239000010410 layer Substances 0.000 description 198
- 150000001875 compounds Chemical class 0.000 description 13
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 238000000151 deposition Methods 0.000 description 7
- 230000003321 amplification Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000003199 nucleic acid amplification method Methods 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 3
- 239000002800 charge carrier Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000006911 nucleation Effects 0.000 description 3
- 238000010899 nucleation Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000003750 conditioning effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- LVEULQCPJDDSLD-UHFFFAOYSA-L cadmium fluoride Chemical compound F[Cd]F LVEULQCPJDDSLD-UHFFFAOYSA-L 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000009349 indirect transmission Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000005404 monopole Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000003949 trap density measurement Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Images
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66431—Unipolar field-effect transistors with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
- H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
- H01L29/7787—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT with wide bandgap charge-carrier supplying layer, e.g. direct single heterostructure MODFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
Description
Claims (11)
- エンハンスメント型高電子移動度トランジスタ(HEMT)装置であって、
基板上に堆積された、第1の窒化物系材料を含むバッファ層と、
前記バッファ層上に堆積された、第2の窒化物系材料を含む、前記バッファ層のバンドギャップエネルギーより大きいバンドギャップエネルギーを有するバリア層と、
前記バリア層に設けられた、前記バッファ層の内部に及ばない凹部と、
前記凹部内に設けられ、塩化カリウム(KCl)からなるゲート誘電体層と、
前記ゲート誘電体層上に配置されたゲート端子と、を備え、前記ゲート誘電体層は、前記ゲート端子と前記バリア層間、または前記ゲート端子と前記バッファ層間に配置されることを特徴とする装置。 - 前記バッファ層は、窒化ガリウム(GaN)を含むことを特徴とする請求項1に記載の装置。
- 前記バリア層は、窒化アルミニウムガリウム(AlGaN)、窒化アルミニウムインジウム(InAlN)あるいは窒化インジウムガリウムアルミニウム(InGaAlN)を含むことを特徴とする請求項2に記載の装置。
- 前記ゲート端子は、前記HEMT装置のスイッチングを制御するように構成されていることを特徴とする請求項1に記載の装置。
- 前記凹部は、前記バッファ層まで延在していないことを特徴とする請求項1に記載の装置。
- 前記ゲート誘電体層の厚さは約20Å〜約500Åであることを特徴とする請求項1に記載の装置。
- 前記バリア層上であって、前記ゲート端子の両側に配置されたソース端子とドレイン端子をさらに備え、前記ゲート誘電体層は、前記ソース端子及び前記ドレイン端子から分離されることを特徴とする請求項1に記載の装置。
- 前記バリア層上であって、前記ゲート端子と前記ソース端子間および前記ゲート端子と前記ドレイン端子間の前記バリア層上に配置された誘電体層をさらに備えることを特徴とする請求項7に記載の装置。
- 前記ゲート誘電体層は、前記ゲート端子と前記誘電体層間に配置されていることを特徴とする請求項8に記載の装置。
- 前記ゲート端子は、制御電圧を受け取って前記バリア層または前記バッファ層の電流のスイッチングを制御するように構成され、前記制御電圧は、1.5V以上の上限にまで及ぶ動作範囲を有することを特徴とする請求項7に記載の装置。
- 前記ゲート誘電体層は、前記バリア層のバンドギャップエネルギーより大きいバンドギャップエネルギーを有することを特徴とする請求項1に記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/685,560 US9029914B2 (en) | 2012-11-26 | 2012-11-26 | Group III-nitride-based transistor with gate dielectric including a fluoride -or chloride- based compound |
US13/685,560 | 2012-11-26 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014107566A JP2014107566A (ja) | 2014-06-09 |
JP2014107566A5 JP2014107566A5 (ja) | 2016-12-01 |
JP6279294B2 true JP6279294B2 (ja) | 2018-02-14 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2013241751A Expired - Fee Related JP6279294B2 (ja) | 2012-11-26 | 2013-11-22 | フッ化物系または塩化物系化合物を含むゲート誘電体を備えたiii族窒化物系トランジスタ |
Country Status (4)
Country | Link |
---|---|
US (1) | US9029914B2 (ja) |
JP (1) | JP6279294B2 (ja) |
DE (1) | DE102013019401A1 (ja) |
TW (1) | TWI605588B (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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US20150214127A1 (en) * | 2014-01-24 | 2015-07-30 | Qualcomm Incorporated | Integrated device comprising a substrate with aligning trench and/or cooling cavity |
US9910133B2 (en) * | 2015-02-25 | 2018-03-06 | Infineon Technologies Ag | Systems and methods for cascading radar chips having a low leakage buffer |
TWI569439B (zh) * | 2015-03-31 | 2017-02-01 | 晶元光電股份有限公司 | 半導體單元 |
WO2017171873A1 (en) * | 2016-04-01 | 2017-10-05 | Intel Corporation | Dopant diffusion barrier for source/drain to curb dopant atom diffusion |
JPWO2018037530A1 (ja) * | 2016-08-25 | 2018-08-23 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
CN107919395A (zh) * | 2017-10-26 | 2018-04-17 | 西安电子科技大学 | 基于CaF2栅介质的零栅源间距金刚石场效应晶体管及制作方法 |
US20190334021A1 (en) * | 2018-02-09 | 2019-10-31 | Semiconductor Components Industries, Llc | Electronic Device Including a Conductive Layer Including a Ta Si Compound and a Process of Forming the Same |
Family Cites Families (17)
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US5310696A (en) * | 1989-06-16 | 1994-05-10 | Massachusetts Institute Of Technology | Chemical method for the modification of a substrate surface to accomplish heteroepitaxial crystal growth |
AU5405400A (en) * | 1999-06-14 | 2001-01-02 | Carlos J.R.P. Augusto | Stacked wavelength-selective opto-electronic device |
EP1294016A1 (en) * | 2001-09-18 | 2003-03-19 | Paul Scherrer Institut | Formation of self-organized stacked islands for self-aligned contacts of low dimensional structures |
KR100544145B1 (ko) * | 2004-05-24 | 2006-01-23 | 삼성에스디아이 주식회사 | 박막 트랜지스터 및 이를 구비한 평판표시장치 |
US8482035B2 (en) * | 2005-07-29 | 2013-07-09 | International Rectifier Corporation | Enhancement mode III-nitride transistors with single gate Dielectric structure |
US7534710B2 (en) * | 2005-12-22 | 2009-05-19 | International Business Machines Corporation | Coupled quantum well devices (CQWD) containing two or more direct selective contacts and methods of making same |
JP2007305609A (ja) * | 2006-04-10 | 2007-11-22 | Matsushita Electric Ind Co Ltd | 半導体装置 |
US20080023703A1 (en) * | 2006-07-31 | 2008-01-31 | Randy Hoffman | System and method for manufacturing a thin-film device |
US7838904B2 (en) * | 2007-01-31 | 2010-11-23 | Panasonic Corporation | Nitride based semiconductor device with concave gate region |
JP2008211172A (ja) * | 2007-01-31 | 2008-09-11 | Matsushita Electric Ind Co Ltd | 半導体装置および半導体装置の製造方法 |
US8519438B2 (en) * | 2008-04-23 | 2013-08-27 | Transphorm Inc. | Enhancement mode III-N HEMTs |
US7985986B2 (en) * | 2008-07-31 | 2011-07-26 | Cree, Inc. | Normally-off semiconductor devices |
KR101143706B1 (ko) * | 2008-09-24 | 2012-05-09 | 인터내셔널 비지네스 머신즈 코포레이션 | 나노전자 소자 |
JP4968747B2 (ja) * | 2009-02-03 | 2012-07-04 | シャープ株式会社 | Iii−v族化合物半導体素子 |
JP5755460B2 (ja) * | 2010-02-12 | 2015-07-29 | インターナショナル レクティフィアー コーポレイション | 単一ゲートの誘電体構造を有するエンハンスメントモードのiii族窒化物トランジスタ |
JP2012169406A (ja) * | 2011-02-14 | 2012-09-06 | Nippon Telegr & Teleph Corp <Ntt> | 電界効果トランジスタ |
US20130099284A1 (en) | 2011-10-20 | 2013-04-25 | Triquint Semiconductor, Inc. | Group iii-nitride metal-insulator-semiconductor heterostructure field-effect transistors |
-
2012
- 2012-11-26 US US13/685,560 patent/US9029914B2/en active Active
-
2013
- 2013-10-16 TW TW102137229A patent/TWI605588B/zh not_active IP Right Cessation
- 2013-11-18 DE DE102013019401.6A patent/DE102013019401A1/de not_active Withdrawn
- 2013-11-22 JP JP2013241751A patent/JP6279294B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2014107566A (ja) | 2014-06-09 |
DE102013019401A1 (de) | 2014-05-28 |
TW201431068A (zh) | 2014-08-01 |
TWI605588B (zh) | 2017-11-11 |
US9029914B2 (en) | 2015-05-12 |
US20140145243A1 (en) | 2014-05-29 |
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