TWI606569B - 半導體元件以及半導體封裝 - Google Patents

半導體元件以及半導體封裝 Download PDF

Info

Publication number
TWI606569B
TWI606569B TW103107328A TW103107328A TWI606569B TW I606569 B TWI606569 B TW I606569B TW 103107328 A TW103107328 A TW 103107328A TW 103107328 A TW103107328 A TW 103107328A TW I606569 B TWI606569 B TW I606569B
Authority
TW
Taiwan
Prior art keywords
memory
soc
system single
output
bump
Prior art date
Application number
TW103107328A
Other languages
English (en)
Chinese (zh)
Other versions
TW201436165A (zh
Inventor
金泰善
林慶默
Original Assignee
三星電子股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三星電子股份有限公司 filed Critical 三星電子股份有限公司
Publication of TW201436165A publication Critical patent/TW201436165A/zh
Application granted granted Critical
Publication of TWI606569B publication Critical patent/TWI606569B/zh

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C5/00Details of stores covered by group G11C11/00
    • G11C5/06Arrangements for interconnecting storage elements electrically, e.g. by wiring
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C5/00Details of stores covered by group G11C11/00
    • G11C5/02Disposition of storage elements, e.g. in the form of a matrix array
    • G11C5/025Geometric lay-out considerations of storage- and peripheral-blocks in a semiconductor storage device
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/072Connecting or disconnecting of bump connectors
    • H10W72/07251Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
    • H10W72/07254Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting changes in dispositions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/241Dispositions, e.g. layouts
    • H10W72/244Dispositions, e.g. layouts relative to underlying supporting features, e.g. bond pads, RDLs or vias
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/241Dispositions, e.g. layouts
    • H10W72/247Dispositions of multiple bumps
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/241Dispositions, e.g. layouts
    • H10W72/247Dispositions of multiple bumps
    • H10W72/248Top-view layouts, e.g. mirror arrays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/29Bond pads specially adapted therefor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/941Dispositions of bond pads
    • H10W72/944Dispositions of multiple bond pads
    • H10W72/9445Top-view layouts, e.g. mirror arrays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • H10W74/114Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations
    • H10W74/117Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations the substrate having spherical bumps for external connection
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/20Configurations of stacked chips
    • H10W90/28Configurations of stacked chips the stacked chips having different sizes, e.g. chip stacks having a pyramidal shape
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/20Configurations of stacked chips
    • H10W90/297Configurations of stacked chips characterised by the through-semiconductor vias [TSVs] in the stacked chips
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/722Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between stacked chips
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Dram (AREA)
  • Semiconductor Memories (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Memory System (AREA)
TW103107328A 2013-03-15 2014-03-05 半導體元件以及半導體封裝 TWI606569B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020130027658A KR102029682B1 (ko) 2013-03-15 2013-03-15 반도체 장치 및 반도체 패키지

Publications (2)

Publication Number Publication Date
TW201436165A TW201436165A (zh) 2014-09-16
TWI606569B true TWI606569B (zh) 2017-11-21

Family

ID=50792497

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103107328A TWI606569B (zh) 2013-03-15 2014-03-05 半導體元件以及半導體封裝

Country Status (8)

Country Link
US (1) US9275688B2 (https=)
JP (1) JP2014182794A (https=)
KR (1) KR102029682B1 (https=)
CN (1) CN104051410B (https=)
DE (1) DE102014103186B4 (https=)
IN (1) IN2014DE00712A (https=)
NL (1) NL2012389B1 (https=)
TW (1) TWI606569B (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9324397B1 (en) * 2015-01-16 2016-04-26 Qualcomm Incorporated Common die for supporting different external memory types with minimal packaging complexity
TWI561960B (en) * 2015-11-05 2016-12-11 Sunplus Technology Co Ltd Clock providing system
KR102413441B1 (ko) 2015-11-12 2022-06-28 삼성전자주식회사 반도체 패키지
KR102468698B1 (ko) * 2015-12-23 2022-11-22 에스케이하이닉스 주식회사 메모리 장치
DE102016011750A1 (de) * 2016-09-29 2018-03-29 Ceramtec-Etec Gmbh Datenträger aus Keramik
US11514996B2 (en) * 2017-07-30 2022-11-29 Neuroblade Ltd. Memory-based processors
KR20190087893A (ko) * 2018-01-17 2019-07-25 삼성전자주식회사 클럭을 공유하는 반도체 패키지 및 전자 시스템
TWI856974B (zh) * 2018-09-06 2024-10-01 埃拉德 希提 可變字長存取
US11335383B2 (en) * 2019-05-31 2022-05-17 Micron Technology, Inc. Memory component for a system-on-chip device

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5223454A (en) * 1988-01-29 1993-06-29 Hitachi, Ltd. Method of manufacturing semiconductor integrated circuit device
US6809421B1 (en) * 1996-12-02 2004-10-26 Kabushiki Kaisha Toshiba Multichip semiconductor device, chip therefor and method of formation thereof
US6724084B1 (en) * 1999-02-08 2004-04-20 Rohm Co., Ltd. Semiconductor chip and production thereof, and semiconductor device having semiconductor chip bonded to solid device
US7173877B2 (en) * 2004-09-30 2007-02-06 Infineon Technologies Ag Memory system with two clock lines and a memory device
WO2006067852A1 (ja) * 2004-12-24 2006-06-29 Spansion Llc 同期型記憶装置、およびその制御方法
JP4910512B2 (ja) * 2006-06-30 2012-04-04 富士通セミコンダクター株式会社 半導体装置および半導体装置の製造方法
US8059443B2 (en) 2007-10-23 2011-11-15 Hewlett-Packard Development Company, L.P. Three-dimensional memory module architectures
US20100140750A1 (en) * 2008-12-10 2010-06-10 Qualcomm Incorporated Parallel Plane Memory and Processor Coupling in a 3-D Micro-Architectural System
US20100174858A1 (en) 2009-01-05 2010-07-08 Taiwan Semiconductor Manufacturing Co., Ltd. Extra high bandwidth memory die stack
US8207754B2 (en) 2009-02-24 2012-06-26 Stmicroelectronics International N.V. Architecture for efficient usage of IO
US8174876B2 (en) * 2009-06-19 2012-05-08 Hynix Semiconductor Inc. Fusion memory device embodied with phase change memory devices having different resistance distributions and data processing system using the same
US8227904B2 (en) 2009-06-24 2012-07-24 Intel Corporation Multi-chip package and method of providing die-to-die interconnects in same
US8698321B2 (en) 2009-10-07 2014-04-15 Qualcomm Incorporated Vertically stackable dies having chip identifier structures
US8612809B2 (en) 2009-12-31 2013-12-17 Intel Corporation Systems, methods, and apparatuses for stacked memory
US8796863B2 (en) 2010-02-09 2014-08-05 Samsung Electronics Co., Ltd. Semiconductor memory devices and semiconductor packages
KR20110099384A (ko) * 2010-03-02 2011-09-08 삼성전자주식회사 와이드 입출력 반도체 메모리 장치 및 이를 포함하는 반도체 패키지
US9123552B2 (en) * 2010-03-30 2015-09-01 Micron Technology, Inc. Apparatuses enabling concurrent communication between an interface die and a plurality of dice stacks, interleaved conductive paths in stacked devices, and methods for forming and operating the same
KR101728067B1 (ko) 2010-09-03 2017-04-18 삼성전자 주식회사 반도체 메모리 장치
KR20120068216A (ko) 2010-12-17 2012-06-27 에스케이하이닉스 주식회사 반도체 집적회로
US8399961B2 (en) * 2010-12-21 2013-03-19 Taiwan Semiconductor Manufacturing Company, Ltd. Tuning the efficiency in the transmission of radio-frequency signals using micro-bumps
KR20120079397A (ko) * 2011-01-04 2012-07-12 삼성전자주식회사 적층형 반도체 장치 및 이의 제조 방법
US8564111B2 (en) * 2011-01-27 2013-10-22 Siano Mobile Silicon Ltd. Stacked digital/RF system-on-chip with integral isolation layer
KR20120098096A (ko) 2011-02-28 2012-09-05 에스케이하이닉스 주식회사 반도체 집적회로
JP5286382B2 (ja) * 2011-04-11 2013-09-11 株式会社日立製作所 半導体装置およびその製造方法
CN102891114B (zh) * 2012-10-24 2015-01-28 上海新储集成电路有限公司 一种上下堆叠的片上系统芯片的制作方法

Also Published As

Publication number Publication date
DE102014103186A1 (de) 2014-09-18
JP2014182794A (ja) 2014-09-29
DE102014103186B4 (de) 2021-05-27
TW201436165A (zh) 2014-09-16
KR20140112944A (ko) 2014-09-24
US20140268979A1 (en) 2014-09-18
NL2012389B1 (en) 2016-07-15
US9275688B2 (en) 2016-03-01
CN104051410B (zh) 2018-05-01
KR102029682B1 (ko) 2019-10-08
CN104051410A (zh) 2014-09-17
NL2012389A (en) 2014-09-16
IN2014DE00712A (https=) 2015-06-19

Similar Documents

Publication Publication Date Title
TWI606569B (zh) 半導體元件以及半導體封裝
CN105633063B (zh) 半导体封装件
KR101815489B1 (ko) 스루 브리지 도전성 비아 신호 접속에 의한 임베딩된 멀티디바이스 브리지
CN103887274B (zh) 半导体封装件
JP6847863B2 (ja) パッケージオンパッケージ構造体用のインターポーザ
TWI736560B (zh) 於記憶體裝置中的雙層介電質
CN103165505B (zh) 制造扇出晶体级封装的方法以及由该方法形成的封装
TWI635575B (zh) 記憶體裝置、備有堆疊式記憶體裝置之系統、以及記憶體晶粒元件(二)
US10096577B2 (en) Semiconductor memory package including stacked layers and memory device and semiconductor memory system having the same
CN104576546B (zh) 半导体封装件及其制造方法
CN105006456A (zh) 半导体封装件及其制造方法
US20110309468A1 (en) Semiconductor chip package and method of manufacturing the same
US9478502B2 (en) Device identification assignment and total device number detection
TW201637166A (zh) 具有中介層的半導體封裝及其製造方法
TW202018915A (zh) 堆疊記憶體佈線技術
CN102376695A (zh) 堆叠半导体器件及其制造方法
TW201721820A (zh) 有穿過矽的功率分布的兩側上金屬
CN109755235B (zh) 层叠封装半导体封装件、堆叠半导体封装件及电子系统
CN108155175A (zh) 能够测试内部信号线的多芯片封装件
CN110582809A (zh) 具有相对对准的通道的双侧面存储器模块
CN110379798A (zh) 芯片层叠封装
CN104617084B (zh) 具有提供偏移互连的接口的堆叠式存储器
TW201611199A (zh) 重組態之寬輸入輸出記憶體模組及使用其之封裝架構