TWI390692B - 封裝基板與其製法暨基材 - Google Patents
封裝基板與其製法暨基材 Download PDFInfo
- Publication number
- TWI390692B TWI390692B TW098120959A TW98120959A TWI390692B TW I390692 B TWI390692 B TW I390692B TW 098120959 A TW098120959 A TW 098120959A TW 98120959 A TW98120959 A TW 98120959A TW I390692 B TWI390692 B TW I390692B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- metal
- dielectric layer
- auxiliary dielectric
- layers
- Prior art date
Links
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4682—Manufacture of core-less build-up multilayer circuits on a temporary carrier or on a metal foil
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0147—Carriers and holders
- H05K2203/0152—Temporary metallic carrier, e.g. for transferring material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/15—Position of the PCB during processing
- H05K2203/1536—Temporarily stacked PCBs
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0097—Processing two or more printed circuits simultaneously, e.g. made from a common substrate, or temporarily stacked circuit boards
-
- H10W70/655—
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- H10W72/884—
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- H10W72/90—
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- H10W72/923—
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- H10W72/9415—
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- H10W74/15—
-
- H10W90/724—
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- H10W90/734—
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- H10W90/754—
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW098120959A TWI390692B (zh) | 2009-06-23 | 2009-06-23 | 封裝基板與其製法暨基材 |
| JP2009263132A JP2011009686A (ja) | 2009-06-23 | 2009-11-18 | パッケージ基板及びその製造方法、並びにその基材 |
| US12/731,480 US8354598B2 (en) | 2009-06-23 | 2010-03-25 | Packaging substrate and fabrication method thereof |
| US13/738,526 US20130118680A1 (en) | 2009-06-23 | 2013-01-10 | Method for fabricating a packaging substrate |
| JP2013225193A JP2014017531A (ja) | 2009-06-23 | 2013-10-30 | パッケージ基板及びその製造方法、並びにその基材 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW098120959A TWI390692B (zh) | 2009-06-23 | 2009-06-23 | 封裝基板與其製法暨基材 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201101441A TW201101441A (en) | 2011-01-01 |
| TWI390692B true TWI390692B (zh) | 2013-03-21 |
Family
ID=43353307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098120959A TWI390692B (zh) | 2009-06-23 | 2009-06-23 | 封裝基板與其製法暨基材 |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US8354598B2 (enExample) |
| JP (2) | JP2011009686A (enExample) |
| TW (1) | TWI390692B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI576025B (zh) * | 2014-10-29 | 2017-03-21 | 矽品精密工業股份有限公司 | 基板結構及其製法 |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5003812B2 (ja) * | 2009-12-10 | 2012-08-15 | イビデン株式会社 | プリント配線板及びプリント配線板の製造方法 |
| US20110253439A1 (en) * | 2010-04-20 | 2011-10-20 | Subtron Technology Co. Ltd. | Circuit substrate and manufacturing method thereof |
| JP5590985B2 (ja) * | 2010-06-21 | 2014-09-17 | 新光電気工業株式会社 | 半導体装置及びその製造方法 |
| US20120055706A1 (en) * | 2010-09-03 | 2012-03-08 | Samsung Electro-Mechanics Co., Ltd. | Printed circuit board and method of manufacturing the same |
| TW201241969A (en) | 2011-04-08 | 2012-10-16 | Unimicron Technology Corp | Method for fabricating heat dissipation substrate |
| TWI453872B (zh) * | 2011-06-23 | 2014-09-21 | 矽品精密工業股份有限公司 | 半導體封裝件及其製法 |
| CN102956575A (zh) * | 2011-08-24 | 2013-03-06 | 国碁电子(中山)有限公司 | 封装结构及制造方法 |
| US9230899B2 (en) | 2011-09-30 | 2016-01-05 | Unimicron Technology Corporation | Packaging substrate having a holder, method of fabricating the packaging substrate, package structure having a holder, and method of fabricating the package structure |
| CN103035756A (zh) * | 2011-10-08 | 2013-04-10 | 威奈联合科技股份有限公司 | 光电元件及其制造方法 |
| CN103066048B (zh) * | 2011-10-21 | 2015-11-25 | 欣兴电子股份有限公司 | 具有支撑体的封装基板、封装结构及其制法 |
| CN103066049B (zh) * | 2011-10-24 | 2015-09-02 | 联致科技股份有限公司 | 封装基板及其制法 |
| TWI560835B (en) * | 2011-11-07 | 2016-12-01 | Siliconware Precision Industries Co Ltd | Package substrate and fabrication method thereof |
| CN103137568B (zh) * | 2011-12-02 | 2017-05-03 | 欣兴电子股份有限公司 | 具有支撑体的封装基板及其制法 |
| JP5536748B2 (ja) * | 2011-12-16 | 2014-07-02 | 聯致科技股▲フン▼有限公司 | パッケージ基板の製造方法 |
| TWI444123B (zh) * | 2012-02-16 | 2014-07-01 | 威盛電子股份有限公司 | 線路板製作方法及線路板 |
| TWI484600B (zh) * | 2012-08-15 | 2015-05-11 | Unimicron Technology Corp | 無核心封裝基板及其製法 |
| CN103681586B (zh) * | 2012-08-30 | 2016-07-06 | 欣兴电子股份有限公司 | 无核心封装基板及其制法 |
| JP2014082490A (ja) * | 2012-09-28 | 2014-05-08 | Hitachi Chemical Co Ltd | 多層配線基板 |
| JP6393618B2 (ja) * | 2012-10-04 | 2018-09-19 | Jx金属株式会社 | 多層プリント配線基板の製造方法及びベース基材 |
| KR101980993B1 (ko) * | 2012-10-04 | 2019-05-21 | 제이엑스금속주식회사 | 다층 프린트 배선 기판의 제조 방법 및 베이스 기재 |
| JP2014075515A (ja) * | 2012-10-05 | 2014-04-24 | Shinko Electric Ind Co Ltd | 配線基板及び配線基板の製造方法 |
| JP2014086651A (ja) * | 2012-10-26 | 2014-05-12 | Ibiden Co Ltd | プリント配線板及びプリント配線板の製造方法 |
| JP2014127623A (ja) | 2012-12-27 | 2014-07-07 | Shinko Electric Ind Co Ltd | 配線基板及び配線基板の製造方法 |
| JP2014130856A (ja) * | 2012-12-28 | 2014-07-10 | Kyocer Slc Technologies Corp | 配線基板の製造方法 |
| JP6478309B2 (ja) | 2012-12-31 | 2019-03-06 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | 多層基板及び多層基板の製造方法 |
| US8659173B1 (en) * | 2013-01-04 | 2014-02-25 | International Business Machines Corporation | Isolated wire structures with reduced stress, methods of manufacturing and design structures |
| US9275925B2 (en) | 2013-03-12 | 2016-03-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method for an improved interconnect structure |
| US10464836B2 (en) | 2013-10-10 | 2019-11-05 | Medtronic, Inc. | Hermetic conductive feedthroughs for a semiconductor wafer |
| CN104576596B (zh) * | 2013-10-25 | 2019-01-01 | 日月光半导体制造股份有限公司 | 半导体基板及其制造方法 |
| JP6000297B2 (ja) * | 2014-03-17 | 2016-09-28 | 聯致科技股▲フン▼有限公司 | パッケージ基板 |
| US9609751B2 (en) * | 2014-04-11 | 2017-03-28 | Qualcomm Incorporated | Package substrate comprising surface interconnect and cavity comprising electroless fill |
| TWI529883B (zh) * | 2014-05-09 | 2016-04-11 | 矽品精密工業股份有限公司 | 封裝堆疊結構及其製法暨無核心層式封裝基板及其製法 |
| CN204014250U (zh) * | 2014-05-16 | 2014-12-10 | 奥特斯(中国)有限公司 | 用于生产电子元件的连接系统的半成品 |
| US9603247B2 (en) * | 2014-08-11 | 2017-03-21 | Intel Corporation | Electronic package with narrow-factor via including finish layer |
| JP6615701B2 (ja) * | 2016-06-24 | 2019-12-04 | 新光電気工業株式会社 | 配線基板、半導体装置及び配線基板の製造方法 |
| US10515888B2 (en) | 2017-09-18 | 2019-12-24 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor device and method for manufacturing the same |
| US11640934B2 (en) * | 2018-03-30 | 2023-05-02 | Intel Corporation | Lithographically defined vertical interconnect access (VIA) in dielectric pockets in a package substrate |
| TWI693874B (zh) * | 2018-06-08 | 2020-05-11 | 欣興電子股份有限公司 | 線路載板結構及其製作方法 |
| US11637060B2 (en) | 2019-07-18 | 2023-04-25 | Unimicron Technology Corp. | Wiring board and method of manufacturing the same |
| TWI751506B (zh) * | 2020-03-06 | 2022-01-01 | 欣興電子股份有限公司 | 線路板及其製造方法 |
| DE102020131125A1 (de) * | 2020-04-29 | 2021-11-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Halbleiterpaket und Verfahren zum Herstellen desselben |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62252189A (ja) * | 1986-04-25 | 1987-11-02 | 株式会社日立製作所 | 銅張積層板 |
| JP4427874B2 (ja) * | 2000-07-06 | 2010-03-10 | 住友ベークライト株式会社 | 多層配線板の製造方法および多層配線板 |
| JP4082995B2 (ja) * | 2001-11-30 | 2008-04-30 | 日本特殊陶業株式会社 | 配線基板の製造方法 |
| JP2004186265A (ja) * | 2002-11-29 | 2004-07-02 | Ngk Spark Plug Co Ltd | 多層配線基板の製造方法 |
| JP2004214272A (ja) * | 2002-12-27 | 2004-07-29 | Ngk Spark Plug Co Ltd | 片面積層配線基板の製造方法 |
| JP2006049660A (ja) * | 2004-08-06 | 2006-02-16 | Cmk Corp | プリント配線板の製造方法 |
| JP4630027B2 (ja) * | 2004-09-08 | 2011-02-09 | 日本シイエムケイ株式会社 | プリント配線板とその製造方法 |
| KR100674319B1 (ko) * | 2004-12-02 | 2007-01-24 | 삼성전기주식회사 | 얇은 코어층을 갖는 인쇄회로기판 제조방법 |
| TWI315657B (en) * | 2005-06-07 | 2009-10-01 | Phoenix Prec Technology Corp | Reverse build-up structure of circuit board |
| JP5356647B2 (ja) * | 2006-12-25 | 2013-12-04 | 新光電気工業株式会社 | 実装基板及び電子装置 |
| US8238114B2 (en) * | 2007-09-20 | 2012-08-07 | Ibiden Co., Ltd. | Printed wiring board and method for manufacturing same |
| KR100929839B1 (ko) * | 2007-09-28 | 2009-12-04 | 삼성전기주식회사 | 기판제조방법 |
| JP5092662B2 (ja) * | 2007-10-03 | 2012-12-05 | 凸版印刷株式会社 | 印刷配線板の製造方法 |
| JP5080234B2 (ja) * | 2007-12-19 | 2012-11-21 | 新光電気工業株式会社 | 配線基板およびその製造方法 |
| JP5203045B2 (ja) * | 2008-05-28 | 2013-06-05 | 日本特殊陶業株式会社 | 多層配線基板の中間製品、多層配線基板の製造方法 |
| KR20090130612A (ko) * | 2008-06-16 | 2009-12-24 | 삼성전기주식회사 | 웨이퍼 레벨 패키지 및 그 제조방법 |
| TWI365026B (en) | 2009-06-11 | 2012-05-21 | Unimicron Technology Corp | Method for fabricating packaging substrate and base therefor |
-
2009
- 2009-06-23 TW TW098120959A patent/TWI390692B/zh not_active IP Right Cessation
- 2009-11-18 JP JP2009263132A patent/JP2011009686A/ja active Pending
-
2010
- 2010-03-25 US US12/731,480 patent/US8354598B2/en not_active Expired - Fee Related
-
2013
- 2013-01-10 US US13/738,526 patent/US20130118680A1/en not_active Abandoned
- 2013-10-30 JP JP2013225193A patent/JP2014017531A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI576025B (zh) * | 2014-10-29 | 2017-03-21 | 矽品精密工業股份有限公司 | 基板結構及其製法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US8354598B2 (en) | 2013-01-15 |
| TW201101441A (en) | 2011-01-01 |
| JP2014017531A (ja) | 2014-01-30 |
| JP2011009686A (ja) | 2011-01-13 |
| US20100319966A1 (en) | 2010-12-23 |
| US20130118680A1 (en) | 2013-05-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |