TWI375650B - - Google Patents

Download PDF

Info

Publication number
TWI375650B
TWI375650B TW97121179A TW97121179A TWI375650B TW I375650 B TWI375650 B TW I375650B TW 97121179 A TW97121179 A TW 97121179A TW 97121179 A TW97121179 A TW 97121179A TW I375650 B TWI375650 B TW I375650B
Authority
TW
Taiwan
Prior art keywords
floating
fluid
control
patent application
items
Prior art date
Application number
TW97121179A
Other languages
English (en)
Chinese (zh)
Other versions
TW200914350A (en
Inventor
Kensuke Hirata
Fumio Hasegawa
Kai Tanaka
Original Assignee
Ihi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corp filed Critical Ihi Corp
Publication of TW200914350A publication Critical patent/TW200914350A/zh
Application granted granted Critical
Publication of TWI375650B publication Critical patent/TWI375650B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
TW97121179A 2007-06-29 2008-06-06 Float-carrying device TW200914350A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007173446A JP2009012877A (ja) 2007-06-29 2007-06-29 浮上搬送装置

Publications (2)

Publication Number Publication Date
TW200914350A TW200914350A (en) 2009-04-01
TWI375650B true TWI375650B (enExample) 2012-11-01

Family

ID=40225915

Family Applications (2)

Application Number Title Priority Date Filing Date
TW97121179A TW200914350A (en) 2007-06-29 2008-06-06 Float-carrying device
TW101118639A TWI399331B (zh) 2007-06-29 2008-06-06 Floating handling device

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW101118639A TWI399331B (zh) 2007-06-29 2008-06-06 Floating handling device

Country Status (5)

Country Link
JP (1) JP2009012877A (enExample)
KR (2) KR20120042990A (enExample)
CN (1) CN101715421A (enExample)
TW (2) TW200914350A (enExample)
WO (1) WO2009004858A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5372824B2 (ja) * 2010-03-30 2013-12-18 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP5495065B2 (ja) * 2010-12-06 2014-05-21 株式会社ダイフク 板状体搬送装置
JP5582021B2 (ja) * 2010-12-22 2014-09-03 村田機械株式会社 物品搬送装置
CN102923480A (zh) * 2011-08-12 2013-02-13 大银微系统股份有限公司 气浮平台的管路整合构造
CN102616567B (zh) * 2012-03-23 2014-02-05 深圳市华星光电技术有限公司 玻璃基板的取出装置
CN106938785B (zh) * 2017-02-28 2022-07-19 江苏科技大学 一种具有形变检测功能的玻璃基板气浮装置及检测方法
CN114476681A (zh) * 2022-03-09 2022-05-13 河北泰晶新材料科技有限公司 一种物料输送系统、物料输送方法及存储介质

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112339A (ja) * 1985-11-12 1987-05-23 Nippon Telegr & Teleph Corp <Ntt> 半導体基板のロツト編成装置
JP4187366B2 (ja) * 1999-09-28 2008-11-26 株式会社トーショー 散薬供給装置
JPWO2004088742A1 (ja) * 2003-03-28 2006-07-06 平田機工株式会社 基板搬送システム
AU2003304270A1 (en) * 2003-07-04 2005-01-21 Rorze Corporation Transfer device, thin plate-like article transfer method, and thin plate-like article production system
JP2005075496A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ihi 浮上装置および搬送装置
WO2006077629A1 (ja) * 2005-01-19 2006-07-27 Mitsubishi Denki Kabushiki Kaisha 位置決め装置及び位置決め方法
JP4570545B2 (ja) * 2005-09-22 2010-10-27 東京エレクトロン株式会社 基板処理装置及び基板処理方法
TWI301119B (en) * 2005-10-26 2008-09-21 Ind Tech Res Inst Substrate transportation apparatus
CN101920849A (zh) * 2005-11-14 2010-12-22 株式会社Ihi 浮起装置及输送装置

Also Published As

Publication number Publication date
CN101715421A (zh) 2010-05-26
JP2009012877A (ja) 2009-01-22
KR20100018611A (ko) 2010-02-17
KR101135000B1 (ko) 2012-04-09
TWI399331B (zh) 2013-06-21
KR20120042990A (ko) 2012-05-03
WO2009004858A1 (ja) 2009-01-08
TW200914350A (en) 2009-04-01
TW201242877A (en) 2012-11-01

Similar Documents

Publication Publication Date Title
TWI375650B (enExample)
CN101107186B (zh) 载物台装置及涂敷处理装置
CN104364891B (zh) 基板搬运系统
TWI323191B (en) Coating method and coating apparatus
TWI393205B (zh) 基板搬送裝置及基板搬送方法
TW200918428A (en) Conveyance direction turnabout apparatus and levitation conveyance system
JP4349101B2 (ja) 基板搬送装置
TWI411567B (zh) Floating handling device and handling system with floating handling device
TW201637725A (zh) 加熱乾燥裝置
TWI483883B (zh) Handling device
CN101715422B (zh) 悬浮装置及悬浮输送装置
JP2007182304A (ja) 基板搬送装置、基板搬送方法及びコンピュータプログラム
TW200925089A (en) Floating device and floating carrier
TWI359779B (enExample)
TW201010921A (en) Floating type conveying apparatus
JP2009022823A (ja) 検査装置および基板処理システム
JP5902909B2 (ja) 移動装置
TWI355364B (enExample)
TWI495607B (zh) Handling device
TW200920674A (en) Levitation transportation device
WO2020095698A1 (ja) 物品搬送設備（ａｒｔｉｃｌｅ ｔｒａｎｓｐｏｒｔ ｆａｃｉｌｉｔｙ）
JP2007250871A (ja) 基板搬送装置
WO2006003876A1 (ja) 基板塗布装置
JP2011058740A (ja) 減圧乾燥装置
JP7693154B2 (ja) 染料付基体製造装置および染色システム

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees