KR20120042990A - 부상 반송 장치 - Google Patents

부상 반송 장치 Download PDF

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Publication number
KR20120042990A
KR20120042990A KR1020127004006A KR20127004006A KR20120042990A KR 20120042990 A KR20120042990 A KR 20120042990A KR 1020127004006 A KR1020127004006 A KR 1020127004006A KR 20127004006 A KR20127004006 A KR 20127004006A KR 20120042990 A KR20120042990 A KR 20120042990A
Authority
KR
South Korea
Prior art keywords
floating
fluid
control
conveying
height
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020127004006A
Other languages
English (en)
Korean (ko)
Inventor
겐스케 히라타
후미오 하세가와
가이 다나카
Original Assignee
가부시키가이샤 아이에이치아이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 아이에이치아이 filed Critical 가부시키가이샤 아이에이치아이
Publication of KR20120042990A publication Critical patent/KR20120042990A/ko
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
KR1020127004006A 2007-06-29 2008-05-09 부상 반송 장치 Ceased KR20120042990A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-173446 2007-06-29
JP2007173446A JP2009012877A (ja) 2007-06-29 2007-06-29 浮上搬送装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020107000545A Division KR101135000B1 (ko) 2007-06-29 2008-05-09 부상 반송 장치

Publications (1)

Publication Number Publication Date
KR20120042990A true KR20120042990A (ko) 2012-05-03

Family

ID=40225915

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020127004006A Ceased KR20120042990A (ko) 2007-06-29 2008-05-09 부상 반송 장치
KR1020107000545A Expired - Fee Related KR101135000B1 (ko) 2007-06-29 2008-05-09 부상 반송 장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020107000545A Expired - Fee Related KR101135000B1 (ko) 2007-06-29 2008-05-09 부상 반송 장치

Country Status (5)

Country Link
JP (1) JP2009012877A (enExample)
KR (2) KR20120042990A (enExample)
CN (1) CN101715421A (enExample)
TW (2) TWI399331B (enExample)
WO (1) WO2009004858A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5372824B2 (ja) * 2010-03-30 2013-12-18 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP5495065B2 (ja) * 2010-12-06 2014-05-21 株式会社ダイフク 板状体搬送装置
JP5582021B2 (ja) * 2010-12-22 2014-09-03 村田機械株式会社 物品搬送装置
CN102923480A (zh) * 2011-08-12 2013-02-13 大银微系统股份有限公司 气浮平台的管路整合构造
CN102616567B (zh) * 2012-03-23 2014-02-05 深圳市华星光电技术有限公司 玻璃基板的取出装置
TWI583608B (zh) 2016-11-29 2017-05-21 盟立自動化股份有限公司 用以運送一平板構件之氣浮平台
CN106938785B (zh) * 2017-02-28 2022-07-19 江苏科技大学 一种具有形变检测功能的玻璃基板气浮装置及检测方法
CN114476681A (zh) * 2022-03-09 2022-05-13 河北泰晶新材料科技有限公司 一种物料输送系统、物料输送方法及存储介质

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112339A (ja) * 1985-11-12 1987-05-23 Nippon Telegr & Teleph Corp <Ntt> 半導体基板のロツト編成装置
JP4187366B2 (ja) * 1999-09-28 2008-11-26 株式会社トーショー 散薬供給装置
JPWO2004088742A1 (ja) * 2003-03-28 2006-07-06 平田機工株式会社 基板搬送システム
WO2005002804A1 (ja) * 2003-07-04 2005-01-13 Rorze Corporation 搬送装置、薄板状物の搬送方法、及び薄板状物製造システム
JP2005075496A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ihi 浮上装置および搬送装置
JP4840144B2 (ja) * 2005-01-19 2011-12-21 三菱電機株式会社 位置決め装置及び位置決め方法
JP4570545B2 (ja) * 2005-09-22 2010-10-27 東京エレクトロン株式会社 基板処理装置及び基板処理方法
TWI301119B (en) * 2005-10-26 2008-09-21 Ind Tech Res Inst Substrate transportation apparatus
CN1966371B (zh) * 2005-11-14 2012-08-15 株式会社Ihi 浮起装置及输送装置

Also Published As

Publication number Publication date
TW200914350A (en) 2009-04-01
JP2009012877A (ja) 2009-01-22
TWI399331B (zh) 2013-06-21
TW201242877A (en) 2012-11-01
WO2009004858A1 (ja) 2009-01-08
KR20100018611A (ko) 2010-02-17
CN101715421A (zh) 2010-05-26
KR101135000B1 (ko) 2012-04-09
TWI375650B (enExample) 2012-11-01

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