TWI370325B - Positive photosensitive resin composition,relief pattern and solid camera element using it - Google Patents

Positive photosensitive resin composition,relief pattern and solid camera element using it

Info

Publication number
TWI370325B
TWI370325B TW094107131A TW94107131A TWI370325B TW I370325 B TWI370325 B TW I370325B TW 094107131 A TW094107131 A TW 094107131A TW 94107131 A TW94107131 A TW 94107131A TW I370325 B TWI370325 B TW I370325B
Authority
TW
Taiwan
Prior art keywords
resin composition
photosensitive resin
positive photosensitive
relief pattern
solid camera
Prior art date
Application number
TW094107131A
Other languages
English (en)
Other versions
TW200532374A (en
Inventor
Mitsuhito Suwa
Katsuya Minamihashi
Original Assignee
Toray Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries filed Critical Toray Industries
Publication of TW200532374A publication Critical patent/TW200532374A/zh
Application granted granted Critical
Publication of TWI370325B publication Critical patent/TWI370325B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials For Photolithography (AREA)
  • Optical Integrated Circuits (AREA)
TW094107131A 2004-03-12 2005-03-09 Positive photosensitive resin composition,relief pattern and solid camera element using it TWI370325B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004070229 2004-03-12

Publications (2)

Publication Number Publication Date
TW200532374A TW200532374A (en) 2005-10-01
TWI370325B true TWI370325B (en) 2012-08-11

Family

ID=34975743

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094107131A TWI370325B (en) 2004-03-12 2005-03-09 Positive photosensitive resin composition,relief pattern and solid camera element using it

Country Status (7)

Country Link
US (1) US20080193718A1 (zh)
EP (1) EP1724640B1 (zh)
JP (1) JP4743115B2 (zh)
KR (1) KR101150593B1 (zh)
CN (1) CN1930522B (zh)
TW (1) TWI370325B (zh)
WO (1) WO2005088396A1 (zh)

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JP2004310076A (ja) * 2003-03-26 2004-11-04 Sumitomo Bakelite Co Ltd ポジ型感光性樹脂組成物並びに半導体装置及び表示素子
JP2007122024A (ja) * 2005-09-28 2007-05-17 Toray Ind Inc 感光性組成物
JP5299739B2 (ja) * 2007-10-15 2013-09-25 富士電機株式会社 Ｘ線用屈折レンズユニットおよびｘ線用屈折レンズの製造方法
KR101461123B1 (ko) * 2008-05-08 2014-11-14 삼성디스플레이 주식회사 표시 기판의 제조 방법 및 이를 포함하는 표시 장치의 제조방법
KR101113063B1 (ko) * 2008-05-22 2012-02-15 주식회사 엘지화학 폴리이미드와 노볼락 수지를 포함하는 감광성 수지 조성물
US8137901B2 (en) * 2008-05-28 2012-03-20 United Microelectronics Corp. Method for fabricating an image sensor
JP5343738B2 (ja) * 2008-08-05 2013-11-13 Ｊｓｒ株式会社 樹脂組成物、光学膜及び光学用部材
JP5425005B2 (ja) * 2009-08-19 2014-02-26 日本電波工業株式会社 圧電部品及びその製造方法
US8828642B2 (en) * 2009-09-29 2014-09-09 Toray Industries, Inc. Positive photosensitive resin composition, cured film obtained using same, and optical device
KR20130016375A (ko) * 2010-07-02 2013-02-14 도레이 카부시키가이샤 감광성 수지 조성물, 감광성 수지 조성물 필름 및 이들을 이용한 반도체 장치
CN103154151B (zh) * 2010-10-14 2016-04-13 Lg化学株式会社 用于熔融工艺的树脂共混物
KR101890633B1 (ko) * 2011-04-27 2018-08-22 후지필름 가부시키가이샤 수지 조성물, 경화물의 제조 방법, 수지 패턴 제조 방법, 경화물 및 광학 부재
JP6110107B2 (ja) * 2012-03-13 2017-04-05 東京応化工業株式会社 パターン形成方法
JP6155823B2 (ja) * 2012-07-12 2017-07-05 Jsr株式会社 有機ｅｌ素子、感放射線性樹脂組成物および硬化膜
TWI585522B (zh) * 2012-08-31 2017-06-01 富士軟片股份有限公司 感光性樹脂組成物、硬化物及其製造方法、樹脂圖案的製造方法、硬化膜、液晶顯示裝置、有機ｅｌ顯示裝置、以及觸控面板顯示裝置
TW201439676A (zh) * 2013-03-08 2014-10-16 Fujifilm Corp 感光性樹脂組成物、硬化物及其製造方法、樹脂圖案製造方法、硬化膜、液晶顯示裝置、有機ｅｌ顯示裝置以及觸控面板顯示裝置
JP5799182B1 (ja) * 2014-10-03 2015-10-21 富士フイルム株式会社 シロキサン樹脂組成物、これを用いた透明硬化物、透明画素、マイクロレンズ、固体撮像素子
WO2016148176A1 (ja) * 2015-03-19 2016-09-22 東レ株式会社 ポジ型感光性樹脂組成物、硬化膜、ｔｆｔ基板、層間絶縁膜、表示装置、およびその製造方法
TW201800860A (zh) * 2015-12-17 2018-01-01 陶氏全球科技責任有限公司 具有高介電常數之光可成像薄膜
TW201741765A (zh) * 2015-12-17 2017-12-01 陶氏全球科技責任有限公司 具有高介電常數之光可成像薄膜
TW201802587A (zh) * 2016-03-24 2018-01-16 陶氏全球科技責任有限公司 具有高介電常數之光可成像薄膜
SG11201807874YA (en) * 2016-03-28 2018-10-30 Toray Industries Photosensitive resin composition
JP7296746B2 (ja) * 2019-03-06 2023-06-23 太陽ホールディングス株式会社 ポジ型感光性樹脂組成物、ドライフィルム、硬化物、および電子部品
US11675266B2 (en) 2021-04-15 2023-06-13 Industrial Technology Research Institute Photosensitive compound, photosensitive composition, and patterning method
CN113485072B (zh) * 2021-06-22 2023-11-07 北京科华微电子材料有限公司 一种光刻胶组合物及其用途
US20230324789A1 (en) * 2021-07-05 2023-10-12 Resonac Corporation Photosensitive resin composition, permanent resist, method for forming permanent resist, and method for inspecting permanent resist cured film

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Publication number Priority date Publication date Assignee Title
JPS61184828A (ja) * 1985-02-12 1986-08-18 Matsushita Electronics Corp 半導体装置の製造方法
ATE155897T1 (de) * 1990-05-21 1997-08-15 Nashua Corp Mikrolinsen-bildschirme aus photopolymerisierbaren materialien und verfahren zur ihrer herstellung
DE69130701T2 (de) * 1990-10-29 1999-08-26 Toyo Gosei Kogyo Kk Lichtempfindliches gefärbtes Harz, farbiges Bild, Verfahren zur Herstellung von Farbfiltern und Verfahren zur Herstellung einer Schwarzmatrix
JPH05323599A (ja) * 1992-05-22 1993-12-07 Sumitomo Chem Co Ltd 感光性フォトレジスト組成物
DE69408709T2 (de) * 1993-04-28 1998-10-01 Hitachi Chemical Co Ltd Photoempfindliche Harzzusammensetzung
JPH1164608A (ja) * 1997-08-26 1999-03-05 Dainippon Printing Co Ltd レンチキュラーレンズ
JP2000039503A (ja) * 1998-07-22 2000-02-08 Matsushita Electric Ind Co Ltd レンズアレイ
JP4390028B2 (ja) * 2000-10-04 2009-12-24 日産化学工業株式会社 ポジ型感光性ポリイミド樹脂組成物
JP3672085B2 (ja) * 2000-10-11 2005-07-13 シャープ株式会社 固体撮像素子およびその製造方法
JP3622201B2 (ja) * 2001-02-19 2005-02-23 Ｊｓｒ株式会社 感放射線性屈折率変化性組成物
KR100739283B1 (ko) * 2001-03-13 2007-07-12 제이에스알 가부시끼가이샤 감방사선성 굴절율 변화성 조성물 및 그의 이용
JP3959735B2 (ja) 2001-03-13 2007-08-15 Ｊｓｒ株式会社 感放射線性屈折率変化性組成物およびその利用
JP4310968B2 (ja) * 2001-06-22 2009-08-12 東レ株式会社 ポジ型感光性樹脂組成物を用いて得られるレンズおよび光導波路
JP4673513B2 (ja) * 2001-08-01 2011-04-20 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP4062087B2 (ja) * 2002-01-28 2008-03-19 Ｊｓｒ株式会社 感光性誘電体形成用組成物、転写フィルム、誘電体および電子部品
US7015256B2 (en) * 2002-01-28 2006-03-21 Jsr Corporation Composition for forming photosensitive dielectric material, and transfer film, dielectric material and electronic parts using the same

Also Published As

Publication number Publication date
US20080193718A1 (en) 2008-08-14
EP1724640B1 (en) 2015-11-18
EP1724640A1 (en) 2006-11-22
KR20070007095A (ko) 2007-01-12
WO2005088396A1 (ja) 2005-09-22
CN1930522A (zh) 2007-03-14
TW200532374A (en) 2005-10-01
JP4743115B2 (ja) 2011-08-10
JPWO2005088396A1 (ja) 2008-01-31
KR101150593B1 (ko) 2012-06-01
CN1930522B (zh) 2013-06-12
EP1724640A4 (en) 2010-04-07

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