TWI365453B - - Google Patents

Info

Publication number
TWI365453B
TWI365453B TW094117706A TW94117706A TWI365453B TW I365453 B TWI365453 B TW I365453B TW 094117706 A TW094117706 A TW 094117706A TW 94117706 A TW94117706 A TW 94117706A TW I365453 B TWI365453 B TW I365453B
Authority
TW
Taiwan
Application number
TW094117706A
Other languages
Chinese (zh)
Other versions
TW200620286A (en
Inventor
Tomoyuki Ishii
Toshiyuki Mine
Toshiaki Sano
Norifumi Kameshiro
Original Assignee
Renesas Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Electronics Corp filed Critical Renesas Electronics Corp
Publication of TW200620286A publication Critical patent/TW200620286A/zh
Application granted granted Critical
Publication of TWI365453B publication Critical patent/TWI365453B/zh

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
    • G11C11/403—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh
    • G11C11/405—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh with three charge-transfer gates, e.g. MOS transistors, per cell
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B10/00—Static random access memory [SRAM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B10/00—Static random access memory [SRAM] devices
    • H10B10/18—Peripheral circuit regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0135—Manufacturing their gate conductors
    • H10D84/0142—Manufacturing their gate conductors the gate conductors having different shapes or dimensions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0144—Manufacturing their gate insulating layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C2207/00—Indexing scheme relating to arrangements for writing information into, or reading information out from, a digital store
    • G11C2207/10—Aspects relating to interfaces of memory device to external buses
    • G11C2207/104—Embedded memory devices, e.g. memories with a processing device on the same die or ASIC memory designs

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Semiconductor Memories (AREA)
  • Dram (AREA)
TW094117706A 2004-06-22 2005-05-30 Semiconductor storage device TW200620286A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004183338A JP4927321B2 (ja) 2004-06-22 2004-06-22 半導体記憶装置

Publications (2)

Publication Number Publication Date
TW200620286A TW200620286A (en) 2006-06-16
TWI365453B true TWI365453B (enExample) 2012-06-01

Family

ID=35479701

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094117706A TW200620286A (en) 2004-06-22 2005-05-30 Semiconductor storage device

Country Status (4)

Country Link
US (1) US7375399B2 (enExample)
JP (1) JP4927321B2 (enExample)
CN (1) CN100474592C (enExample)
TW (1) TW200620286A (enExample)

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JP4643617B2 (ja) * 2007-06-26 2011-03-02 株式会社東芝 不揮発性半導体記憶装置
US8294216B2 (en) 2008-08-14 2012-10-23 Taiwan Semiconductor Manufacturing Company, Ltd. Integrating the formation of I/O and core MOS devices with MOS capacitors and resistors
WO2011052488A1 (en) * 2009-10-30 2011-05-05 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
CN102612714B (zh) * 2009-11-13 2016-06-29 株式会社半导体能源研究所 半导体器件及其驱动方法
KR101866734B1 (ko) 2009-12-25 2018-06-15 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
CN102804360B (zh) 2009-12-25 2014-12-17 株式会社半导体能源研究所 半导体装置
KR101840797B1 (ko) * 2010-03-19 2018-03-21 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 메모리 장치
WO2011125432A1 (en) * 2010-04-07 2011-10-13 Semiconductor Energy Laboratory Co., Ltd. Semiconductor memory device
WO2011129233A1 (en) * 2010-04-16 2011-10-20 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
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US8422272B2 (en) 2010-08-06 2013-04-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and driving method thereof
US8634228B2 (en) 2010-09-02 2014-01-21 Semiconductor Energy Laboratory Co., Ltd. Driving method of semiconductor device
JP2012256821A (ja) 2010-09-13 2012-12-27 Semiconductor Energy Lab Co Ltd 記憶装置
JP6030298B2 (ja) * 2010-12-28 2016-11-24 株式会社半導体エネルギー研究所 緩衝記憶装置及び信号処理回路
CN102789808B (zh) * 2011-05-20 2018-03-06 株式会社半导体能源研究所 存储器装置和用于驱动存储器装置的方法
JP6081171B2 (ja) 2011-12-09 2017-02-15 株式会社半導体エネルギー研究所 記憶装置
US9208849B2 (en) 2012-04-12 2015-12-08 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for driving semiconductor device, and electronic device
KR102059218B1 (ko) * 2012-05-25 2019-12-24 가부시키가이샤 한도오따이 에네루기 켄큐쇼 프로그래머블 로직 디바이스 및 반도체 장치
KR102027443B1 (ko) * 2013-03-28 2019-11-04 에스케이하이닉스 주식회사 불휘발성 메모리소자 및 그 동작방법
JP6560508B2 (ja) 2014-03-13 2019-08-14 株式会社半導体エネルギー研究所 半導体装置
US9842842B2 (en) 2014-03-19 2017-12-12 Semiconductor Energy Laboratory Co., Ltd. Semiconductor memory device and semiconductor device and electronic device having the same
KR20150138026A (ko) 2014-05-29 2015-12-09 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치
KR20160137148A (ko) * 2015-05-22 2016-11-30 에스케이하이닉스 주식회사 전자 장치
WO2017130082A1 (en) 2016-01-29 2017-08-03 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device, electronic component, and electronic device
KR102458660B1 (ko) 2016-08-03 2022-10-26 가부시키가이샤 한도오따이 에네루기 켄큐쇼 표시 장치 및 전자 기기
WO2018047035A1 (en) 2016-09-12 2018-03-15 Semiconductor Energy Laboratory Co., Ltd. Memory device, driving method thereof, semiconductor device, electronic component, and electronic device
WO2018073708A1 (en) 2016-10-20 2018-04-26 Semiconductor Energy Laboratory Co., Ltd. Storage device, driving method thereof, semiconductor device, electronic component, and electronic device
CN108172545A (zh) * 2016-12-08 2018-06-15 中芯国际集成电路制造(上海)有限公司 半导体器件及其形成方法
CN108269758B (zh) 2016-12-29 2019-08-23 联华电子股份有限公司 半导体元件的制作方法
CN108573926B (zh) * 2017-03-09 2020-01-21 联华电子股份有限公司 半导体存储装置以及其制作方法
US10276794B1 (en) * 2017-10-31 2019-04-30 Taiwan Semiconductor Manufacturing Co., Ltd. Memory device and fabrication method thereof
US10468428B1 (en) * 2018-04-19 2019-11-05 Silicon Storage Technology, Inc. Split gate non-volatile memory cells and logic devices with FinFET structure, and method of making same
US10847364B2 (en) * 2018-05-10 2020-11-24 Kabushiki Kaisha Toshiba Laminated body and semiconductor device
US10727240B2 (en) 2018-07-05 2020-07-28 Silicon Store Technology, Inc. Split gate non-volatile memory cells with three-dimensional FinFET structure
US10937794B2 (en) 2018-12-03 2021-03-02 Silicon Storage Technology, Inc. Split gate non-volatile memory cells with FinFET structure and HKMG memory and logic gates, and method of making same
US10797142B2 (en) 2018-12-03 2020-10-06 Silicon Storage Technology, Inc. FinFET-based split gate non-volatile flash memory with extended source line FinFET, and method of fabrication
JP7303006B2 (ja) * 2019-03-29 2023-07-04 ラピスセミコンダクタ株式会社 半導体装置及び半導体装置の製造方法
US11362100B2 (en) 2020-03-24 2022-06-14 Silicon Storage Technology, Inc. FinFET split gate non-volatile memory cells with enhanced floating gate to floating gate capacitive coupling
CN114256251B (zh) * 2020-09-21 2025-05-13 硅存储技术股份有限公司 形成具有存储器单元、高压器件和逻辑器件的设备的方法
CN114446972B (zh) 2020-10-30 2025-09-05 硅存储技术股份有限公司 具有鳍式场效应晶体管结构的分裂栅非易失性存储器单元、hv和逻辑器件及其制造方法
CN116761421A (zh) * 2022-03-03 2023-09-15 北京超弦存储器研究院 一种半导体集成电路及其制备方法
US12433014B2 (en) * 2022-04-12 2025-09-30 Globalfoundries U.S. Inc. Structure having different gate dielectric widths in different regions of substrate
US12347481B2 (en) * 2023-01-16 2025-07-01 Macronix International Co., Ltd. Universal memory for in-memory computing and operation method thereof
KR102730001B1 (ko) * 2023-04-14 2024-11-15 서울대학교산학협력단 랜덤 액세스 메모리 및 그 제조 방법
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Also Published As

Publication number Publication date
JP2006012878A (ja) 2006-01-12
TW200620286A (en) 2006-06-16
CN100474592C (zh) 2009-04-01
JP4927321B2 (ja) 2012-05-09
US20050280000A1 (en) 2005-12-22
CN1713387A (zh) 2005-12-28
US7375399B2 (en) 2008-05-20

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees