TWI343907B - - Google Patents
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- Publication number
- TWI343907B TWI343907B TW93111820A TW93111820A TWI343907B TW I343907 B TWI343907 B TW I343907B TW 93111820 A TW93111820 A TW 93111820A TW 93111820 A TW93111820 A TW 93111820A TW I343907 B TWI343907 B TW I343907B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- pressing
- scribe line
- holding
- roller
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims description 755
- 230000007246 mechanism Effects 0.000 claims description 726
- 238000003825 pressing Methods 0.000 claims description 393
- 238000000034 method Methods 0.000 claims description 27
- 238000005336 cracking Methods 0.000 claims description 17
- 239000000047 product Substances 0.000 claims description 3
- 239000013589 supplement Substances 0.000 claims description 2
- 230000001568 sexual effect Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 description 196
- 238000001816 cooling Methods 0.000 description 31
- 230000003287 optical effect Effects 0.000 description 28
- 239000000498 cooling water Substances 0.000 description 23
- 230000015572 biosynthetic process Effects 0.000 description 18
- 239000003507 refrigerant Substances 0.000 description 18
- 210000003128 head Anatomy 0.000 description 14
- 238000005520 cutting process Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 230000002093 peripheral effect Effects 0.000 description 8
- 238000005452 bending Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 239000007788 liquid Substances 0.000 description 5
- 230000001678 irradiating effect Effects 0.000 description 4
- 239000002689 soil Substances 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- 229920001971 elastomer Polymers 0.000 description 3
- 210000000887 face Anatomy 0.000 description 3
- 229920000136 polysorbate Polymers 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000003776 cleavage reaction Methods 0.000 description 2
- 238000002788 crimping Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000005340 laminated glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 230000007017 scission Effects 0.000 description 2
- 238000009751 slip forming Methods 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 241000238631 Hexapoda Species 0.000 description 1
- 241000282320 Panthera leo Species 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 206010036790 Productive cough Diseases 0.000 description 1
- 241001354471 Pseudobahia Species 0.000 description 1
- 241000555745 Sciuridae Species 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 210000003608 fece Anatomy 0.000 description 1
- -1 for example Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920002098 polyfluorene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 210000003802 sputum Anatomy 0.000 description 1
- 208000024794 sputum Diseases 0.000 description 1
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/09—Severing cooled glass by thermal shock
- C03B33/091—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
- C03B33/093—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam using two or more focussed radiation beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/042—Automatically aligning the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/027—Scoring tool holders; Driving mechanisms therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/07—Cutting armoured, multi-layered, coated or laminated, glass products
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133351—Manufacturing of individual cells out of a plurality of cells, e.g. by dicing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T225/00—Severing by tearing or breaking
- Y10T225/10—Methods
- Y10T225/12—With preliminary weakening
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Liquid Crystal (AREA)
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003124501 | 2003-04-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200505805A TW200505805A (en) | 2005-02-16 |
| TWI343907B true TWI343907B (enExample) | 2011-06-21 |
Family
ID=33410166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093111820A TW200505805A (en) | 2003-04-28 | 2004-04-28 | Brittle board dividing system and brittle board dividing method |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20070051769A1 (enExample) |
| EP (1) | EP1630140A4 (enExample) |
| JP (1) | JP4637018B2 (enExample) |
| KR (1) | KR101164491B1 (enExample) |
| CN (1) | CN1809512B (enExample) |
| TW (1) | TW200505805A (enExample) |
| WO (1) | WO2004096721A1 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI588002B (zh) * | 2013-10-29 | 2017-06-21 | 三星國際機械股份有限公司 | 用於脆性基板之分裂夾具及切割方法 |
| TWI602670B (zh) * | 2012-12-27 | 2017-10-21 | 三星鑽石工業股份有限公司 | Breaking method and breaking device |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1647534B1 (de) * | 2004-10-15 | 2018-12-19 | Bystronic Maschinen AG | Vorrichtung und Verfahren zum Brechen von Glasscheiben |
| KR101096733B1 (ko) * | 2004-12-27 | 2011-12-21 | 엘지디스플레이 주식회사 | 기판의 절단장치 및 이를 이용한 기판의 절단방법 |
| KR100907462B1 (ko) | 2005-05-30 | 2009-07-13 | 미쓰보시 다이야몬도 고교 가부시키가이샤 | 취성재료 기판 절단장치 및 절단방법 |
| TWI325352B (en) | 2005-09-12 | 2010-06-01 | Foxsemicon Integrated Tech Inc | Laser cutting apparatus and method |
| JP4890462B2 (ja) * | 2005-10-28 | 2012-03-07 | 三星ダイヤモンド工業株式会社 | 脆性材料基板のスクライブライン形成方法およびスクライブライン形成装置 |
| TW200911442A (en) * | 2007-09-11 | 2009-03-16 | Nat Applied Res Laboratories | Machining method and apparatus for brittle material |
| KR100890764B1 (ko) * | 2008-01-25 | 2009-03-26 | 삼성코닝정밀유리 주식회사 | 가공 테이블 일체형 유리 기판 브레이킹 장치 |
| JP2010229005A (ja) * | 2009-03-30 | 2010-10-14 | Mitsuboshi Diamond Industrial Co Ltd | 脆性材料基板の分断方法 |
| JP2011088382A (ja) * | 2009-10-23 | 2011-05-06 | Mitsuboshi Diamond Industrial Co Ltd | ブレイク装置およびブレイク方法 |
| JP4996703B2 (ja) * | 2010-02-09 | 2012-08-08 | 三星ダイヤモンド工業株式会社 | 基板分断装置 |
| JP5249979B2 (ja) * | 2010-03-18 | 2013-07-31 | 三星ダイヤモンド工業株式会社 | 脆性材料基板の加工方法およびこれに用いるレーザ加工装置 |
| CN102059458A (zh) * | 2010-12-28 | 2011-05-18 | 惠州市正峰激光设备有限公司 | 卷状胶膜激光切割机 |
| CN102219366B (zh) * | 2011-04-12 | 2012-12-19 | 深圳市晶向科技有限公司 | 异型玻璃切割机的自动对位系统及自动对位方法 |
| JP5348212B2 (ja) * | 2011-09-02 | 2013-11-20 | 三星ダイヤモンド工業株式会社 | 分断装置 |
| KR101968792B1 (ko) * | 2011-11-16 | 2019-04-12 | 니폰 덴키 가라스 가부시키가이샤 | 판유리 할단장치, 판유리 할단방법, 판유리 제작방법 및 판유리 할단시스템 |
| JP5276736B2 (ja) * | 2012-04-16 | 2013-08-28 | 三星ダイヤモンド工業株式会社 | ブレイク方法 |
| KR102048921B1 (ko) * | 2012-06-20 | 2019-11-27 | 삼성디스플레이 주식회사 | 셀 절단 장치 및 셀 절단 방법 |
| KR101412399B1 (ko) * | 2012-08-30 | 2014-06-25 | 현대제철 주식회사 | 용접선 정렬용 안착 유닛 및 이를 갖는 용접 장치 |
| JP6191122B2 (ja) * | 2012-10-30 | 2017-09-06 | 三星ダイヤモンド工業株式会社 | 積層セラミックス基板の分断方法 |
| US9126857B2 (en) | 2012-11-15 | 2015-09-08 | Corning Incorporated | Separation apparatuses for separating sheets of brittle material and methods for separating sheets of brittle material |
| JP6163341B2 (ja) * | 2013-04-02 | 2017-07-12 | 三星ダイヤモンド工業株式会社 | ブレイク装置 |
| JP6140012B2 (ja) * | 2013-07-08 | 2017-05-31 | 三星ダイヤモンド工業株式会社 | 貼り合わせ基板のブレイク方法 |
| CN103896483B (zh) * | 2014-03-27 | 2016-08-17 | 深圳市华星光电技术有限公司 | 一种玻璃基板切割设备及切割方法 |
| JP6421472B2 (ja) * | 2014-06-24 | 2018-11-14 | 三星ダイヤモンド工業株式会社 | 脆性基板の分断方法および表示パネルの製造方法 |
| JP2016040079A (ja) * | 2014-08-12 | 2016-03-24 | 三星ダイヤモンド工業株式会社 | 脆性材料基板の分断方法及び分断装置 |
| KR101659454B1 (ko) * | 2014-08-21 | 2016-09-23 | 한국미쯔보시다이아몬드공업(주) | 기판 브레이크 장치 |
| KR102310157B1 (ko) * | 2015-03-16 | 2021-10-12 | 주식회사 탑 엔지니어링 | 스크라이빙 장치 |
| ITUB20152791A1 (it) * | 2015-08-03 | 2017-02-03 | Bottero Spa | Macchina da taglio per il taglio di una lastra di vetro |
| CN105710980B (zh) * | 2016-01-17 | 2017-08-22 | 长春理工大学 | 激光原位辅助机械刻划硬脆材料的装置及方法 |
| JP7066701B2 (ja) * | 2016-10-24 | 2022-05-13 | コーニング インコーポレイテッド | シート状ガラス基体のレーザに基づく加工のための基体処理ステーション |
| CN106977089B (zh) * | 2017-05-05 | 2019-11-08 | 东旭科技集团有限公司 | 玻璃压断装置、玻璃压断方法和玻璃切割系统 |
| JP2020066539A (ja) | 2018-10-22 | 2020-04-30 | 坂東機工株式会社 | ガラス板の折割機械 |
| KR102668788B1 (ko) * | 2019-01-08 | 2024-05-24 | 코닝 인코포레이티드 | 유리 라미네이트 물품 및 그의 제조 방법 |
| CN113146746B (zh) * | 2021-05-14 | 2023-04-28 | 赤峰元泰铸件有限公司 | 一种自动化数控苯板切割机 |
| KR102474254B1 (ko) * | 2022-07-14 | 2022-12-06 | 최호림 | 판유리 절단장치 및 그를 위한 판유리 절단기구 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1341262A (en) * | 1914-02-04 | 1920-05-25 | Libbey Owens Sheet Glass Co | Glass drawing and cutting mechanism |
| FR1380755A (fr) * | 1963-10-25 | 1964-12-04 | Saint Gobain | Procédé et dispositif pour la découpe du verre |
| US3532260A (en) * | 1968-05-22 | 1970-10-06 | Ford Motor Co | Method of cutting glass employing vibratory energy |
| US4005808A (en) * | 1974-01-30 | 1977-02-01 | The Fletcher-Terry Company | Plastic cutting method |
| FR2304581A2 (fr) * | 1975-03-19 | 1976-10-15 | Saint Gobain | Procede et dispositif pour decouper le verre |
| JPS5342333B2 (enExample) | 1975-03-18 | 1978-11-10 | ||
| JPS5276317A (en) | 1975-12-22 | 1977-06-27 | Nippon Sheet Glass Co Ltd | Method of curved cutting of flat glass |
| JPS5585430A (en) * | 1978-12-18 | 1980-06-27 | Seikosha Co Ltd | Automatically cutting apparatus |
| JPS60112634A (ja) * | 1983-11-22 | 1985-06-19 | Bandou Kiko Kk | ガラス切断機 |
| US5785225A (en) * | 1991-12-06 | 1998-07-28 | Loomis Industries, Inc. | Frangible semiconductor wafer dicing apparatus which employs scribing and breaking |
| JP3209448B2 (ja) * | 1992-04-08 | 2001-09-17 | 河口湖精密株式会社 | ガラス基板の分断方法及びガラス基板の分断装置 |
| JPH11116260A (ja) * | 1997-10-08 | 1999-04-27 | Mitsuboshi Diamond Kogyo Kk | ガラス加工装置 |
| JP2000063137A (ja) * | 1998-08-10 | 2000-02-29 | Toyota Motor Corp | ガラス板切断方法及びその装置 |
| JP3813369B2 (ja) * | 1999-01-05 | 2006-08-23 | 古河電気工業株式会社 | 光ファイバ切断器 |
| JP3534033B2 (ja) * | 2000-02-29 | 2004-06-07 | 日産自動車株式会社 | 積層式金属ベルト用リングとその製造方法 |
| JP2002037638A (ja) * | 2000-07-26 | 2002-02-06 | Display Technologies Inc | ガラス基板の切断装置及びその方法 |
| JP3787489B2 (ja) * | 2000-10-02 | 2006-06-21 | 三星ダイヤモンド工業株式会社 | 脆性基板のブレイク方法及び装置 |
| WO2002057192A1 (en) * | 2001-01-17 | 2002-07-25 | Mitsuboshi Diamond Industrial Co., Ltd. | Separator and separating system |
| TW515781B (en) * | 2001-07-27 | 2003-01-01 | Hannstar Display Corp | Method for dividing fragile material and laminated glass |
| JP2003286044A (ja) * | 2002-03-27 | 2003-10-07 | Sharp Corp | 基板分断装置および基板分断方法 |
-
2004
- 2004-04-27 US US10/554,855 patent/US20070051769A1/en not_active Abandoned
- 2004-04-27 JP JP2005505922A patent/JP4637018B2/ja not_active Expired - Fee Related
- 2004-04-27 KR KR1020057020458A patent/KR101164491B1/ko not_active Expired - Fee Related
- 2004-04-27 CN CN2004800174224A patent/CN1809512B/zh not_active Expired - Fee Related
- 2004-04-27 EP EP04729768A patent/EP1630140A4/en not_active Withdrawn
- 2004-04-27 WO PCT/JP2004/006103 patent/WO2004096721A1/ja not_active Ceased
- 2004-04-28 TW TW093111820A patent/TW200505805A/zh not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI602670B (zh) * | 2012-12-27 | 2017-10-21 | 三星鑽石工業股份有限公司 | Breaking method and breaking device |
| TWI588002B (zh) * | 2013-10-29 | 2017-06-21 | 三星國際機械股份有限公司 | 用於脆性基板之分裂夾具及切割方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2004096721A1 (ja) | 2006-07-13 |
| KR101164491B1 (ko) | 2012-07-18 |
| US20070051769A1 (en) | 2007-03-08 |
| JP4637018B2 (ja) | 2011-02-23 |
| CN1809512A (zh) | 2006-07-26 |
| WO2004096721A1 (ja) | 2004-11-11 |
| CN1809512B (zh) | 2012-11-21 |
| EP1630140A4 (en) | 2006-10-25 |
| KR20060006826A (ko) | 2006-01-19 |
| EP1630140A1 (en) | 2006-03-01 |
| TW200505805A (en) | 2005-02-16 |
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