TWI332672B - - Google Patents
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- Publication number
- TWI332672B TWI332672B TW094118383A TW94118383A TWI332672B TW I332672 B TWI332672 B TW I332672B TW 094118383 A TW094118383 A TW 094118383A TW 94118383 A TW94118383 A TW 94118383A TW I332672 B TWI332672 B TW I332672B
- Authority
- TW
- Taiwan
- Prior art keywords
- lamp
- unit
- excimer
- excimer light
- plate
- Prior art date
Links
- 238000001816 cooling Methods 0.000 claims description 22
- 230000007246 mechanism Effects 0.000 claims description 14
- 239000000110 cooling liquid Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 23
- 239000012809 cooling fluid Substances 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 239000011521 glass Substances 0.000 description 8
- 239000011261 inert gas Substances 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- 238000003860 storage Methods 0.000 description 8
- 239000012530 fluid Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 238000003825 pressing Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 239000005357 flat glass Substances 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 230000035922 thirst Effects 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
- F21V29/50—Cooling arrangements
- F21V29/60—Cooling arrangements characterised by the use of a forced flow of gas, e.g. air
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
- H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/34—Double-wall vessels or containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- General Engineering & Computer Science (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Fastening Of Light Sources Or Lamp Holders (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004265237 | 2004-09-13 | ||
| JP2005142792A JP4380591B2 (ja) | 2004-09-13 | 2005-05-16 | エキシマランプ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200609990A TW200609990A (en) | 2006-03-16 |
| TWI332672B true TWI332672B (cg-RX-API-DMAC7.html) | 2010-11-01 |
Family
ID=36377509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094118383A TW200609990A (en) | 2004-09-13 | 2005-06-03 | Excimer lamp apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4380591B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR100849801B1 (cg-RX-API-DMAC7.html) |
| CN (1) | CN1750230B (cg-RX-API-DMAC7.html) |
| TW (1) | TW200609990A (cg-RX-API-DMAC7.html) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5146808B2 (ja) * | 2007-10-05 | 2013-02-20 | ウシオ電機株式会社 | 紫外線照射装置 |
| JP5146061B2 (ja) * | 2008-04-10 | 2013-02-20 | ウシオ電機株式会社 | エキシマランプおよびこれを備えたランプユニット |
| JP5504896B2 (ja) * | 2010-01-07 | 2014-05-28 | ウシオ電機株式会社 | ランプユニット |
| JP6364953B2 (ja) * | 2014-05-23 | 2018-08-01 | 岩崎電気株式会社 | 冷却構造体、及び光源ユニット |
| JP6844292B2 (ja) * | 2017-02-09 | 2021-03-17 | ウシオ電機株式会社 | 光照射器および光照射装置 |
| KR102509316B1 (ko) * | 2019-08-05 | 2023-03-14 | 우시오덴키 가부시키가이샤 | 자외선 조사 장치 |
| CN112582251A (zh) * | 2020-12-29 | 2021-03-30 | 清华四川能源互联网研究院 | 射频无极准分子固化灯 |
| JP7849659B2 (ja) | 2022-01-25 | 2026-04-22 | ウシオ電機株式会社 | 照射ユニット、ランプユニット、ランプホルダ |
| JP2025027727A (ja) | 2023-08-17 | 2025-02-28 | ウシオ電機株式会社 | 光処理装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59112935U (ja) * | 1983-01-21 | 1984-07-30 | 株式会社精密エンタプライズ | Ｕｖ／ｏ↓３クリ−ニング装置の筐体構造 |
| JPH079294Y2 (ja) * | 1990-04-25 | 1995-03-06 | 株式会社テック | 照明器具 |
| JPH08309304A (ja) * | 1995-05-19 | 1996-11-26 | Japan Storage Battery Co Ltd | 紫外線洗浄方法及びその装置 |
| JP2001113163A (ja) * | 1999-10-20 | 2001-04-24 | Hoya Schott Kk | 紫外光照射装置及び方法 |
| JP4035680B2 (ja) * | 1999-11-19 | 2008-01-23 | リコープリンティングシステムズ株式会社 | 定着装置およびそれを用いた印刷装置 |
| JP3743270B2 (ja) * | 2000-07-12 | 2006-02-08 | 松下電工株式会社 | 表示用照明器具 |
| JP3972586B2 (ja) * | 2001-02-21 | 2007-09-05 | ウシオ電機株式会社 | 光照射処理装置 |
| JP2003144913A (ja) * | 2001-11-13 | 2003-05-20 | Ushio Inc | 誘電体バリア放電ランプによる処理装置、および処理方法 |
| JP2003346727A (ja) * | 2002-05-27 | 2003-12-05 | Ushio Inc | エキシマ光照射装置 |
| JP2004113984A (ja) * | 2002-09-27 | 2004-04-15 | Japan Storage Battery Co Ltd | 紫外線照射装置 |
| JP2004152842A (ja) * | 2002-10-29 | 2004-05-27 | Ushio Inc | 紫外光照射による処理方法および紫外光照射装置 |
| JP4196649B2 (ja) * | 2002-11-19 | 2008-12-17 | ウシオ電機株式会社 | エキシマ光源装置 |
-
2005
- 2005-05-16 JP JP2005142792A patent/JP4380591B2/ja not_active Expired - Fee Related
- 2005-06-03 TW TW094118383A patent/TW200609990A/zh not_active IP Right Cessation
- 2005-07-07 KR KR1020050061050A patent/KR100849801B1/ko not_active Expired - Fee Related
- 2005-09-13 CN CN200510099983XA patent/CN1750230B/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| TW200609990A (en) | 2006-03-16 |
| KR100849801B1 (ko) | 2008-07-31 |
| CN1750230A (zh) | 2006-03-22 |
| KR20060049916A (ko) | 2006-05-19 |
| CN1750230B (zh) | 2010-08-18 |
| JP4380591B2 (ja) | 2009-12-09 |
| JP2006108069A (ja) | 2006-04-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |