TW200609990A - Excimer lamp apparatus - Google Patents

Excimer lamp apparatus

Info

Publication number
TW200609990A
TW200609990A TW094118383A TW94118383A TW200609990A TW 200609990 A TW200609990 A TW 200609990A TW 094118383 A TW094118383 A TW 094118383A TW 94118383 A TW94118383 A TW 94118383A TW 200609990 A TW200609990 A TW 200609990A
Authority
TW
Taiwan
Prior art keywords
lamp
excimer lamp
excimer
frames
house
Prior art date
Application number
TW094118383A
Other languages
English (en)
Chinese (zh)
Other versions
TWI332672B (cg-RX-API-DMAC7.html
Inventor
Satoshi Murakami
Hideki Fujitsugu
Kenichi Hirose
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200609990A publication Critical patent/TW200609990A/zh
Application granted granted Critical
Publication of TWI332672B publication Critical patent/TWI332672B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50—Cooling arrangements
    • F21V29/60—Cooling arrangements characterised by the use of a forced flow of gas, e.g. air
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/34—Double-wall vessels or containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Fastening Of Light Sources Or Lamp Holders (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
TW094118383A 2004-09-13 2005-06-03 Excimer lamp apparatus TW200609990A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004265237 2004-09-13
JP2005142792A JP4380591B2 (ja) 2004-09-13 2005-05-16 エキシマランプ装置

Publications (2)

Publication Number Publication Date
TW200609990A true TW200609990A (en) 2006-03-16
TWI332672B TWI332672B (cg-RX-API-DMAC7.html) 2010-11-01

Family

ID=36377509

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094118383A TW200609990A (en) 2004-09-13 2005-06-03 Excimer lamp apparatus

Country Status (4)

Country Link
JP (1) JP4380591B2 (cg-RX-API-DMAC7.html)
KR (1) KR100849801B1 (cg-RX-API-DMAC7.html)
CN (1) CN1750230B (cg-RX-API-DMAC7.html)
TW (1) TW200609990A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI914569B (zh) 2022-01-25 2026-02-11 日商牛尾電機股份有限公司 照射單元、燈管單元、燈座

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5146808B2 (ja) * 2007-10-05 2013-02-20 ウシオ電機株式会社 紫外線照射装置
JP5146061B2 (ja) * 2008-04-10 2013-02-20 ウシオ電機株式会社 エキシマランプおよびこれを備えたランプユニット
JP5504896B2 (ja) * 2010-01-07 2014-05-28 ウシオ電機株式会社 ランプユニット
JP6364953B2 (ja) * 2014-05-23 2018-08-01 岩崎電気株式会社 冷却構造体、及び光源ユニット
JP6844292B2 (ja) * 2017-02-09 2021-03-17 ウシオ電機株式会社 光照射器および光照射装置
KR102509316B1 (ko) * 2019-08-05 2023-03-14 우시오덴키 가부시키가이샤 자외선 조사 장치
CN112582251A (zh) * 2020-12-29 2021-03-30 清华四川能源互联网研究院 射频无极准分子固化灯
JP2025027727A (ja) 2023-08-17 2025-02-28 ウシオ電機株式会社 光処理装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59112935U (ja) * 1983-01-21 1984-07-30 株式会社精密エンタプライズ Uv/o↓3クリ−ニング装置の筐体構造
JPH079294Y2 (ja) * 1990-04-25 1995-03-06 株式会社テック 照明器具
JPH08309304A (ja) * 1995-05-19 1996-11-26 Japan Storage Battery Co Ltd 紫外線洗浄方法及びその装置
JP2001113163A (ja) * 1999-10-20 2001-04-24 Hoya Schott Kk 紫外光照射装置及び方法
JP4035680B2 (ja) * 1999-11-19 2008-01-23 リコープリンティングシステムズ株式会社 定着装置およびそれを用いた印刷装置
JP3743270B2 (ja) * 2000-07-12 2006-02-08 松下電工株式会社 表示用照明器具
JP3972586B2 (ja) * 2001-02-21 2007-09-05 ウシオ電機株式会社 光照射処理装置
JP2003144913A (ja) * 2001-11-13 2003-05-20 Ushio Inc 誘電体バリア放電ランプによる処理装置、および処理方法
JP2003346727A (ja) * 2002-05-27 2003-12-05 Ushio Inc エキシマ光照射装置
JP2004113984A (ja) * 2002-09-27 2004-04-15 Japan Storage Battery Co Ltd 紫外線照射装置
JP2004152842A (ja) * 2002-10-29 2004-05-27 Ushio Inc 紫外光照射による処理方法および紫外光照射装置
JP4196649B2 (ja) * 2002-11-19 2008-12-17 ウシオ電機株式会社 エキシマ光源装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI914569B (zh) 2022-01-25 2026-02-11 日商牛尾電機股份有限公司 照射單元、燈管單元、燈座

Also Published As

Publication number Publication date
KR100849801B1 (ko) 2008-07-31
CN1750230A (zh) 2006-03-22
KR20060049916A (ko) 2006-05-19
CN1750230B (zh) 2010-08-18
JP4380591B2 (ja) 2009-12-09
TWI332672B (cg-RX-API-DMAC7.html) 2010-11-01
JP2006108069A (ja) 2006-04-20

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees