201009888 六、發明說明： 【發明所屬之技術領域】 本發明是關於具備準分子發光的準分子燈的紫外線照 射裝置，尤其是關於具備複數準分子燈的紫外線照射裝置 【先前技術】 φ 習知，在半導體基板或液晶基板的製造工程，將此些 基板的洗淨作爲目的使用著具備照射真空紫外線的準分子 燈的紫外線照射裝置。在具備此種準分子燈的紫外線照射 裝置，有專利文獻1所述者。 針對於習知的紫外線照射裝置1，使用第6圖進行說 明。 第6圖是表示習知的紫外線照射裝置1的說明圖，對 於具備於紫外線照射裝置1的準分子燈2的管軸方向的斷 Q 面圖。 習知的紫外線照射裝置1是由具備照射真空紫外線的 準分子燈2的燈單元11，及搬運被照射物W的搬運單元 1 2所構成。 燈單元11是由：準分子燈2，及昇壓對於準分子燈2 的饋電電壓的變壓器6，及保持準分子燈2與變壓器6的 筐體3所構成，針對於該詳細的構成，說明如下。 在筐體3，於其內部配置有準分子燈2與變壓器6, 而在準分子燈2與變壓器6之間設有隔間壁32，設有配置 -5- 201009888 有準分子燈2的光源部35與配置有變壓器6的電裝部34 〇 筐體3的電裝部34是由··載置變壓器6的隔間壁32 ，及被連接於隔間壁32而且圍繞變壓器6的四方的電裝 部側側壁341(在第6圖的變壓器6的紙面左右方向的電裝 部側側壁3 4 1，及位於紙面內深正前方的未圖示的電裝部 側側壁），及設置成在電裝部側側壁34 1作成蓋的頂板3 1 所構成。 魯 筐體3的光源部35是由：保持準分子燈2的燈保持 體36，及設有燈保持體36的隔間壁32，及被連接於隔間 壁32而且圍繞準分子燈2的四方的光源部側側壁351 (在 第6圖的準分子燈2的紙面左右方向的光源部側側壁351 ，及位於紙面內深正前方的未圖示的光源部側側壁）所構 成。 又，在光源部3 5，設有光透射窗4於光源部側側壁 3 5 1成爲蓋子。 爲了電性地連接變壓器6與準分子燈2，在隔間壁32 設有連通電裝部34與光源部35的貫通孔331，而在該貫 通孔331，插通有電性地連接變壓器6與準分子燈2的饋 電線5。 在隔間壁3 2的貫通孔3 3 1，爲了空間性地隔開光源部 35的內部與電裝部34的內部，而在插通饋電線5的狀態 下設有密封體3 3 2。 上述的燈單元11是設田成被載置於搬運單元12上， -6- 201009888 搬運單元12是由搬運被照射物W的複數滾子121， 及旋轉驅動各滾子121的驅動體121所構成。 複數滾子121是排列成並行於燈單元11的光透射窗4 的平面。 上述準分子燈2是由例如封入有如氙氣體的發光氣體 的例如石英玻璃所成的放電容器，及設於放電容器的外周 面的外側電極，及設於放電容器的內周面的內側電極所構 ❹ 成。 在準分子燈2的內側電極，經由饋電線5電性地連接 有上述的變壓器6。又，在準分子燈2的外側電極，設有 是例如不鏽鋼的電性傳導性的金屬構件所成的燈保持體36 〇 在準分子燈2的內側電極及外側電極，經由變壓器6 連接有未圖示的高頻電源，而外側電極是經由抵接的燈保 持體36被接地。所以，在燈點燈時，從未圖示的高頻電 〇 源饋電至準分子燈2的內側電極，而在位於被饋電的內側 電極與被連接地的外側電極之間的放電容器21的內部開 始準分子發光，例如在20 0nm以下具峰値波長的真空紫外 線照射於放電容器21的外方。 從準分子燈2所照射的真空紫外線，是透射光透射窗 4，而被照射於相對於光透射窗4被搬運的被照射物W。 搬運單元12的內部是大氣狀態，透射光透射窗4的 真空紫外線，是在搬運單元12的內部被吸收在大氣中的 氧氣，而發生臭氧氣體。所以，被照射物W是藉由真空 201009888 紫外線與臭氧被處理。 作爲設於準分子燈2的變壓器6 ’例如有專利文獻2 者’在構成變壓器6的構件有包括例如矽樹脂的樹脂構件 者。樹脂構件是當直接照射真空紫外線就被分解而有劣化 的問題，又藉由臭氧也被分解而有劣化的問題。 所以，在變壓器6與準分子燈2之間，設有藉由未透 射真空紫外線的例如鋁的金屬構件所構成的隔間壁32。又 ，配置變壓器6的電裝部34，是爲了防止臭氧的流進，構 @ 成密閉構造。 又，在上述，說明了有關具有光透射窗4的紫外線照 射裝置1，惟在習知的紫外線照射裝置，也有如專利文獻 3所述的未具有光透射窗者。又，如專利文獻3所述的準 分子燈，是記載著一對電極設於放電容器的外面者。 又，在上述，說明了具備一支準分子燈2的紫外線照 射裝置1。惟在習知的紫外線照射裝置，如專利文獻4所 述地也有設置複數準分子燈者，記載著在各準分子燈設有 ◎ 個別的變壓器的情形。 專利文獻1 ··日本特開2001-243923號公報 專利文獻2:曰本特開2〇〇5_260〇〇7號公報 專利文獻3:日本特開2004_097986號公報 專利文獻4:日本特開2〇〇3_3〇3694號公報 【發明內容】 作爲最近的期望，配合被照射物W的大型化而有準 -8- 201009888 分子燈2的長度化，又爲了縮短處理時間而有提昇來自準 分子燈2的真空紫外線的照度。所以，以提昇被輸入於準 分子燈2的電力作爲目的，必須提昇對於變壓器6的輸入 電力。對於變壓器6的輸入電力成爲如5 00W的高輸入時 ，則配置於如電裝部34的密閉空間的變壓器6是被加熱 ，若在構成變壓器6的構件含有樹脂時，則有藉由加熱會 劣化該樹脂的問題。 φ 尤其是，具備複數準分子燈2，而在各準分子燈2設 置個別的變壓器6的情形，在燈點燈時各變壓器6被分別 加熱之故，因而由各變壓器6相鄰接的變壓器6被加熱。 而有提早樹脂劣化的問題。 所以，爲了冷卻配置變壓器6的電裝部34內部，考 量例如在電裝部34的電裝部側側壁341設置通風口，而 且在該通風口設置導管，俾將冷卻風從導管朝著電裝部34 內部送風，進行冷卻變壓器6。 〇 然而，在構成變壓器6的構件含有樹脂時，則如上述 地，則劣化變壓器6的例如臭氧氣體的腐蝕性氣體不會混 進冷卻風的方式，設置除掉腐蝕性氣體的過濾器等，有裝 置會複雜化的問題。又，若設置導管，則也有裝置變大型 化的問題。 如此地，本發明的目的是在於提供一種一面把電裝部 密閉，一面冷卻其密閉的電裝部的內部的紫外線照射裝置 〇 本發明的第1項發明的紫外線照射裝置，屬於由放電 -9- 201009888 容器與經由該放電容器的放電空間相對配置的電極所構成 的準分子燈；及分別電性地連接於複數該準分子燈的變壓 器；及保持該複數準分子燈與該複數變壓器，而且具備設 於該複數準分子燈與該複數變壓器之間的隔間壁的筐體； 及在該筐體內經由該隔間壁來圍繞該複數變壓器的電裝部 所構成的紫外線照射裝置，其特徵爲：在該電裝部，設有 具備冷卻液的流路的冷卻手段，在該各變壓器的外方，設 有個別地圍繞該各變壓器，而且具備經由該變壓器相對的 @ 一對開口部的風洞體，在該電裝部內部，設有從該風洞體 的一方開口部送風至另一方開口部的送風手段。 第2項發明的紫外線照射裝置，是在第1項發明的紫 外線照射裝置中，該隔間壁是在其內部具備冷卻液的流路 的冷卻手段所構成。 第1項發明的紫外線照射裝置，是利用上述特徵，可 冷卻變壓器。 第2項發明的紫外線照射裝置，是利用上述特徵，藉 @ 由以冷卻手段所構成的隔間壁進行冷卻來自準分子燈的照 射熱，可抑制變壓器受到照射熱被加熱的情形。 【實施方式】 本發明的紫外線照射裝置，是在圍繞變壓器的電裝部 設有具冷卻液的流路的冷卻手段，而在變壓器的外方設置 具有一對開口部的風洞體，設有從風洞體的一方開口部送 風至另一方的開口部的送風手段。 -10- 201009888 首先，本發明的第1實施例的紫外線照射裝置，是針 對於冷卻手段設於電裝部側側壁的構成加以說明。 第1圖是表示第1實施例的紫外線照射裝置1的說明 圖，對於具備於紫外線照射裝置1的準分子燈2的管軸方 向正交的斷面圖。第2圖是表示沿著第1圖的紫外線照射 裝置1的準分子燈2的管軸方向的斷面圖（在第1圖中， 紫外線照射裝置1的A-A斷面圖。 φ 又，在第1圖及第2圖，與表示於第6圖者相同者給 予同一符號。 第1實施例的紫外線照射裝置1是由：具備照射真空 紫外線的準分子燈2的燈單元11，及搬運被照射物W的 搬運單元12所構成。 燈單元11是由：準分子燈2，及昇壓對於準分子燈2 的饋電電壓的變壓器6,及保持準分子燈2與變壓器6的 筐體3所構成，針對於其詳細構成說明如下。 ❹ 在筐體3，有準分子燈2與變壓器6配置於其內部， 而在準分子燈2與變壓器6之間設有隔間壁32，設有準分 子燈2所位置的光源部35及變壓器6所位置的電裝部34 〇 筐體3的電裝部34是由：具有載置變壓器6的長方 形平面的板狀隔間壁32，及連接於隔間壁32的長方形平 面的周緣，而且圍繞變壓器6的四方的電裝部側側壁341( 對於第1圖的隔間壁32的長方形平面朝垂直方向的紙面 上方延伸的電裝部側側壁341，及對於第2圖的隔間壁32 -11 - 201009888 的長方形平面朝垂直方向的紙面上方延伸的電裝部側側壁 341)，及設置於電裝部側側壁341作成蓋子的頂板31所 構成的六面構造所成，而在其內部具有密閉空間。 在電裝部34的密閉空間配置有複數變壓器6，複數變 壓器6是成爲被圍繞於電裝部34的狀態。 作爲構成電裝部34的構件，例如有施以耐酸鋁處理 的鋁或不鏽鋼所成的具耐臭氧性的金屬構件。 筐體3的光源部35是由：保持準分子燈2的兩端的 燈保持體36，及設有燈保持體36，而且具有長方形平面 的板狀隔間壁32，及連接於隔間壁32的長方形平面的周 緣，而且圍繞準分子燈2的四方的光源部側側壁3 5 1 (對於 第1圖的隔間壁32的長方形平面朝垂直方向的紙面下方 延伸的光源部側側壁351，及對於第2圖的隔間壁32的長 方形平面朝垂直方向的紙面下方延伸的光源部側側壁35 1) 所構成的五面構造所成。 在光源部3 5，於光源部側側壁3 5 1作成蓋子而且相對 於隔間壁3 2的方式設有透射真空紫外線的例如石英玻璃 的構件所成的板狀光透射窗4。 設有光透射窗4的光源部35是有複數準分子燈2配 置於其內部，而複數準分子燈2是成爲被圍繞於光源部35 與光透射窗4的狀態。 作爲構成光源部3 5的構件，例如有施以耐酸鋁處理 的鋁或不鏽鋼所成的具耐紫外線性及耐臭氧性的金屬構件 -12- 201009888 在複數準分子燈2，分別設有個別的變壓器6。例如 在第1圖中，記載著3支準分子燈2,各準分子燈2的下 述的內側電極（在第1圖及第2圖未圖示，而在下述的第3 圖的符號222)分別經由饋電線5電性地連接有個別的變壓 器6。 爲了插通電性地連接各準分子燈2與各變壓器6的饋 電線5，在隔間壁32，設有連通電裝部34與光源部35的 φ 貫通孔33 1。設於隔間壁32的貫通孔33 1是設置成削除位 於準分子燈2與變壓器6之間的隔間壁32的一部分，例 如第1圖所示地設有3支準分子燈2時，則設有對應於各 準分子燈2的3部位的貫通孔3 3 1。 在設於隔間壁32的貫通孔33 1，在插通有電性地連接 準分子燈2與變壓器6的饋電線5的狀態下，爲了空間地 隔開成未連通光源部35的內部與電裝部34的內部，設置 具耐臭氧性的例如聚丙烯所成的密封體332。 ❹ 在電裝部34的內部，複數變壓器6,是被載置於隔間 壁32而且圍繞其外方的方式設有風洞體72。 風洞體72是表示於第1圖的斷面3形狀構件，如第2 圖所示地圍繞變壓器6外方的方式，設置成沿著準分子燈 2的管軸方向延伸。在風洞體72，經由變壓器6設有相對 的一對開口部721、722。風洞體72是設置複數成個別地 圍繞配置於電裝部3 4內部的複數變壓器6。例如如第1圖 地設有3具變壓器6時，則風洞體72也變壓器6別地設 置，而設有合計3個風洞體72。作爲構成風洞體72的構 -13- 201009888 件，有具有電性絕緣性的例如玻璃環氧所成的樹脂構件。 在風洞體72 —方開口部721，設有從一方開口部721 朝另一方開口部722進行送風的例如冷卻風扇的送風手段 71。送風手段71是爲了冷卻變壓器6而設置之故，因而 對應於各變壓器6的風洞體72別地被設置。 在電裝部34的內部，設有例如散熱器等的熱交換器 的冷卻手段73。 冷卻手段73是在電裝部34內部，經由送風手段71 q 配置成相對於一方的開口部721。又，如第1實施例所示 地，具備複數變壓器6的情形，冷卻手段73是爲了有效 率地冷卻複數變壓器6，配置複數成爲相對於設在各變壓 器的各風洞體的各一方的開口部72。[參照下述的第4(b) 圖]。 在冷卻手段73，設有流路731成爲冷卻液L供應， 排出於其內部。 如第2圖所示地，冷卻手段73的流路73 1，是從電裝 ❹ 部34的內部朝外部延伸的方式，從設於電裝部側側壁341 的貫通孔342被導出。 在電裝部側側壁341的貫通孔342與冷卻手段73的 流路731之間，設有例如鋁所成的密封體343，而將電裝 部34的內部構成密閉空間。 從電裝部34所導出的流路731，是在電裝部34的外 部，設有未圖示的循環手段，則流路731內部的冷卻液L 被循環。 -14- 201009888 上述的燈單元11是設成被載置於搬運單元12上。 搬運單元12是由：搬運被照射物W的複數圓筒狀滾 子121，及對於各滾子121的中心軸進行旋轉驅動的驅動 體121所構成。 複數圓筒狀滾子121，是排列成並行於燈單元11的光 透射窗4的平面。 針對於具備於上述的燈單元11的準分子燈2的構成 φ 的一例子，使用第3圖進行說明。 第3圖是表示第1圖所述的準分子燈2的說明圖。第 3 (a)圖是表示沿著構成準分子燈2的放電容器21的管軸方 向的斷面圖，第3(b)圖表示對於構成準分子燈2的放電容 器21的管軸方向正交的擴大斷面圖[參照第3(a)圖的B-B 斷面的擴大圖]。 又，在第3圖中，在與表示於第1圖及第2圖者相同 者給與同一符號。 〇 準分子燈2是由：具有封入發光氣體的放電空間214 的放電容器21，及經由放電空間214而相對配置的電極 221、222所構成。 放電容器21是由：圓筒狀外側管211，及位於外側管 211的內部，而且具有比外側管211的直徑還要小徑的直 徑的圓筒狀內側管212，及將圓筒狀外側管211的管軸與 圓筒狀內側管212的管軸保持成一致，而且設於外側管 211與內側管212之管軸方向的兩端的圓環狀端壁部213 所構成的雙重管構造所成。 -15- 201009888 在放電容器21，構成有藉由外側管211與內側管212 及一對端壁部213所圍繞的放電空間214，而例如氙氣體 的稀有氣體作爲發光氣體封入於該放電空間214。 作爲構成放電容器21的構件，例舉有如石英玻璃地 具有介質性，而且對具有200nm以下的峰値波長的真空紫 外線具有光透射性的構件。 在構成放電容器21的內側管212的內周面，設有圓 筒狀內側電極222成爲密接於其長度方向全面。 @ 又，在構成放電容器21的外側管211的外周面，設 有網狀外側電極221成爲密接於其長度方向全面。 外側電極221與內側電極222，是藉由如此地設置， 經由介質所構成的放電容器2 1的外側管2 1 1與內側管2 1 2 及放電空間2 1 4被相對。 作爲構成內側電極222及外側電極221的構件，例舉 具有電性傳導性的例如銅·鎳合金的金屬構件。 在第3圖所表示的內側電極222及外側電極221，電 _ 性地連接有在第1圖所表示的變壓器6的未圖示的二次側 ’而變壓器6的未圖示的一次側電性地連接於未圖示的高 頻電源。 又，在外側電極221的外周’設有例如施以耐酸鋁處 理的鋁或不鏽鋼的金屬構件所成的燈保持體36 ’外側電極 221是經由燈保持體36被接地。 上述第1實施例的紫外線照射裝置1是在燈點燈時’ 來自未圖示的高頻電源的饋電電壓藉由變壓器6被昇壓， -16 - 201009888 而被饋電至準分子燈2。 被饋電的準分子燈2是藉由一對電極221、222間的 電位差，開始依被封入在放電容器21的內部的發光氣體 所致的準分子發光，而發光氣體爲例如氙氣體時產生在 172nm以下具有峰値波長的真空紫外線。在放電空間214 所產生的真空紫外線是透射放電容器21，而被照射至準分 子燈2的外方。 φ 筐體3的光源部35是塡充有例如氮氣體的惰性氣體 之故，因而來自準分子燈2的真空紫外線，是不被吸收於 惰性氣體，而透射光透射窗4而照射搬運單元1 2側。 搬運單元12的驅動體121，是被連接於未圖示的電源 ，旋轉驅動各滾子121。被載置於滾子121上的被照射物 W，是藉由滾子121的旋轉驅動被搬運，而相對於光透射 窗4。例如在第1圖中，被照射物W是從紙面右側被搬運 至紙面左側，被移動至相對於光透射窗4的下方側。 φ 搬運單元12的內部是大氣環境之故，因而透射光透 射窗4的真空紫外線是一部分被吸收於大氣中的氧氣，惟 被搬運的被照射物W與光透射窗4被近接配置，在全部 被吸收於氧氣之前被照射於被照射物W。201009888 6. TECHNOLOGICAL FIELD OF THE INVENTION [Technical Field] The present invention relates to an ultraviolet irradiation device having an excimer lamp for excimer light emission, and more particularly to an ultraviolet irradiation device having a plurality of excimer lamps. [Prior Art] φ In the manufacturing process of a semiconductor substrate or a liquid crystal substrate, an ultraviolet irradiation device including an excimer lamp that irradiates vacuum ultraviolet rays is used for the purpose of cleaning these substrates. The ultraviolet irradiation device including such an excimer lamp is described in Patent Document 1. The conventional ultraviolet irradiation device 1 will be described using Fig. 6. Fig. 6 is an explanatory view showing a conventional ultraviolet irradiation device 1 and a broken Q view of the excimer lamp 2 provided in the ultraviolet irradiation device 1 in the tube axis direction. The conventional ultraviolet irradiation device 1 is composed of a lamp unit 11 including an excimer lamp 2 that irradiates vacuum ultraviolet rays, and a transport unit 1 2 that transports the object W to be irradiated. The lamp unit 11 is composed of an excimer lamp 2, a transformer 6 that boosts the feed voltage to the excimer lamp 2, and a casing 3 that holds the excimer lamp 2 and the transformer 6. With respect to the detailed configuration, described as follows. In the casing 3, an excimer lamp 2 and a transformer 6 are disposed therein, and a compartment wall 32 is provided between the excimer lamp 2 and the transformer 6, and a light source having an excimer lamp 2 of -5 to 201009888 is disposed. The portion 35 and the electrical component 34 in which the transformer 6 is disposed. The electrical component 34 of the casing 3 is a partition wall 32 on which the transformer 6 is placed, and is connected to the partition wall 32 and surrounds the transformer 6. The electrical component side side wall 341 (the side wall 314 of the electrical component side in the left-right direction of the transformer 6 of Fig. 6 and the side wall of the electrical component part (not shown) located directly in front of the paper surface), and The side wall 3 1 of the cover portion side wall portion 34 1 is formed as a top plate 3 1 of the cover. The light source unit 35 of the housing 3 is composed of a lamp holder 36 that holds the excimer lamp 2, a partition wall 32 that is provided with the lamp holder 36, and is connected to the compartment wall 32 and surrounds the excimer lamp 2. The light source side wall 351 of the four sides (the light source side wall 351 in the left-right direction of the excimer lamp 2 of Fig. 6 and the light source side wall (not shown) located directly in front of the paper surface). Further, in the light source unit 35, a light transmission window 4 is provided on the light source unit side wall 351 as a cover. In order to electrically connect the transformer 6 and the excimer lamp 2, the partition wall 32 is provided with a through hole 331 that communicates the electrical component 34 and the light source unit 35, and the through hole 331 is electrically connected to the transformer 6. Feed line 5 with excimer lamp 2. In the through hole 331 of the partition wall 32, in order to spatially separate the inside of the light source unit 35 from the inside of the electric component 34, the sealing body 3 3 2 is provided in a state in which the feed line 5 is inserted. The lamp unit 11 described above is placed on the transport unit 12, and -6-201009888. The transport unit 12 is a plurality of rollers 121 for transporting the irradiated object W, and a drive body 121 for rotationally driving the rollers 121. Composition. The plurality of rollers 121 are planes arranged in parallel with the light transmission window 4 of the lamp unit 11. The excimer lamp 2 is, for example, a discharge vessel made of, for example, quartz glass in which a luminescent gas such as helium gas is enclosed, an outer electrode provided on the outer peripheral surface of the discharge vessel, and an inner electrode provided on the inner peripheral surface of the discharge vessel. Constructed into. The transformer 6 described above is electrically connected to the inner electrode of the excimer lamp 2 via the feeder 5. Further, a lamp holder 36 made of an electrically conductive metal member such as stainless steel is provided on the outer electrode of the excimer lamp 2, and the inner electrode and the outer electrode of the excimer lamp 2 are connected to each other via a transformer 6. The high frequency power source is shown, and the outer electrode is grounded via the abutting lamp holder 36. Therefore, when the lamp is lit, a high-frequency power source (not shown) is fed to the inner electrode of the excimer lamp 2, and a discharge vessel is located between the inner electrode to be fed and the outer electrode to be connected. The inside of 21 starts excimer light emission, for example, ultraviolet light having a peak-to-peak wavelength of 20 nm or less is irradiated to the outside of the discharge vessel 21. The vacuum ultraviolet ray irradiated from the excimer lamp 2 is transmitted through the light transmission window 4, and is irradiated to the object W to be irradiated with respect to the light transmission window 4. The inside of the transport unit 12 is in an atmospheric state, and the vacuum ultraviolet rays transmitted through the light transmission window 4 are oxygen which is absorbed into the atmosphere inside the transport unit 12 to generate ozone gas. Therefore, the irradiated object W is treated by ultraviolet light and ozone by vacuum 201009888. The transformer 6' provided in the excimer lamp 2 is, for example, a member of the patent document 2, and the member constituting the transformer 6 is a resin member including, for example, a resin. The resin member has a problem that it is decomposed and deteriorated when directly irradiated with vacuum ultraviolet rays, and is also degraded by ozone to deteriorate. Therefore, between the transformer 6 and the excimer lamp 2, a partition wall 32 made of a metal member such as aluminum which is not transparent to ultraviolet rays is provided. Further, the electrical component 34 of the transformer 6 is arranged to prevent the flow of ozone and to form a hermetic structure. Further, in the above, the ultraviolet ray irradiation device 1 having the light transmission window 4 has been described. However, the conventional ultraviolet ray irradiation device also has a light transmission window as described in Patent Document 3. Further, the quasi-molecular lamp described in Patent Document 3 describes that a pair of electrodes are provided outside the discharge vessel. Further, in the above, the ultraviolet ray irradiation device 1 including one excimer lamp 2 has been described. In the conventional ultraviolet irradiation device, as described in Patent Document 4, a plurality of excimer lamps are also provided, and it is described that each of the excimer lamps is provided with an individual transformer. Japanese Unexamined Patent Publication (KOKAI) Publication No. JP-A No. JP-A No. Hei No. Hei. Japanese Patent Publication No. 3_3〇3694 [Summary of the Invention] As a recent expectation, the length of the illuminating material W is increased in accordance with the increase in the size of the illuminant W, and the length of the numerator-8-201009888 numerator lamp 2 is increased, and the excimer lamp 2 is improved in order to shorten the processing time. Illumination of vacuum ultraviolet light. Therefore, in order to increase the electric power input to the quasi-molecular lamp 2, it is necessary to increase the input power to the transformer 6. When the input power of the transformer 6 is a high input of 500 W, the transformer 6 disposed in the sealed space of the electrical component 34 is heated, and when the member constituting the transformer 6 contains a resin, there is heating. The problem of degrading the resin. In particular, in the case where the plurality of excimer lamps 2 are provided and the individual transformers 6 are provided in the respective excimer lamps 2, the transformers 6 are separately heated when the lamps are lit, and thus the transformers adjacent to the transformers 6 are connected. 6 is heated. There is a problem that the resin is deteriorated early. Therefore, in order to cool the inside of the electrical component 34 of the transformer 6, it is considered that a vent is provided, for example, on the side wall 341 of the electrical component portion of the electrical component 34, and a duct is provided at the vent, and the cooling air is directed from the duct toward the electrical equipment. The air is blown inside the portion 34, and the cooling transformer 6 is performed. In the case where the member constituting the transformer 6 contains a resin, as described above, the corrosive gas of the ozone gas of the deterioration transformer 6 is not mixed with the cooling air, and a filter for removing the corrosive gas is provided. There are problems with devices that can be complicated. Further, if a duct is provided, there is a problem that the apparatus becomes large. In view of the above, an object of the present invention is to provide an ultraviolet irradiation device according to the first aspect of the present invention, in which the electric component is sealed while the electric component is sealed, and the ultraviolet irradiation device of the first invention of the present invention is discharged. - 201009888 an excimer lamp composed of an electrode disposed opposite to a discharge space of the discharge vessel; and a transformer electrically connected to each of the plurality of excimer lamps; and maintaining the plurality of excimer lamps and the plurality of transformers, and a housing having a partition wall provided between the plurality of excimer lamps and the plurality of transformers; and an ultraviolet irradiation device comprising an electric component of the plurality of transformers via the partition wall in the housing, characterized in that A cooling means including a flow path of the coolant is provided in the electrical component, and each of the transformers is provided separately around the transformers, and a pair of openings facing each other via the transformer are provided. In the wind tunnel body, a wind blowing means for blowing air from one opening of the wind tunnel body to the other opening portion is provided inside the electric component. In the ultraviolet irradiation device according to the first aspect of the invention, the partition wall is a cooling means including a flow path of the cooling liquid therein. According to the ultraviolet irradiation device of the first aspect of the invention, the transformer can be cooled by the above features. According to the ultraviolet irradiation device of the second aspect of the invention, the irradiation heat from the excimer lamp is cooled by the partition wall formed by the cooling means by the above-described feature, and the case where the transformer is heated by the irradiation heat can be suppressed. [Embodiment] The ultraviolet irradiation device of the present invention is a cooling means provided with a flow path of a coolant around an electrical component of the transformer, and a wind tunnel body having a pair of openings is provided outside the transformer, and is provided with a wind tunnel body. The air blowing means that blows the air to the other opening in one of the opening portions of the wind tunnel body. -10-201009888 First, the ultraviolet irradiation device according to the first embodiment of the present invention will be described with respect to a configuration in which the cooling means is provided on the side wall of the electrical component portion. Fig. 1 is an explanatory view showing the ultraviolet irradiation device 1 of the first embodiment, and is a cross-sectional view orthogonal to the tube axis direction of the excimer lamp 2 provided in the ultraviolet irradiation device 1. Fig. 2 is a cross-sectional view taken along the direction of the tube axis of the excimer lamp 2 of the ultraviolet irradiation device 1 of Fig. 1 (in the first view, the AA cross-sectional view of the ultraviolet irradiation device 1 is used. 1 and 2 are the same as those shown in Fig. 6. The ultraviolet irradiation device 1 of the first embodiment is composed of a lamp unit 11 including an excimer lamp 2 that irradiates vacuum ultraviolet rays, and a conveyance is irradiated. The lamp unit 11 is composed of an excimer lamp 2, a transformer 6 that boosts the feed voltage to the excimer lamp 2, and a casing 3 that holds the excimer lamp 2 and the transformer 6. The detailed configuration of the configuration is as follows. ❹ In the casing 3, the excimer lamp 2 and the transformer 6 are disposed inside, and the partition wall 32 is provided between the excimer lamp 2 and the transformer 6. The light source unit 35 at the position of the molecular lamp 2 and the electrical component 34 at the position of the transformer 6 〇 The electrical component 34 of the casing 3 is composed of a plate-shaped partition wall 32 having a rectangular plane on which the transformer 6 is placed, and is connected to The circumference of the rectangular plane of the partition wall 32, and the surrounding portion of the transformer 6 The side wall 341 (the rectangular surface of the partition wall 32 of the first drawing is extended toward the upper side of the paper surface side 341 in the vertical direction, and the rectangular plane of the partition wall 32 -11 - 201009888 of the second drawing is oriented in the vertical direction The electric component side wall 341) extending above the paper surface and the hexahedron structure formed by the top plate 31 of the electric component side wall 341 as a cover have a sealed space inside the electric component 34. The complex transformer 6 is disposed in the sealed space, and the complex transformer 6 is in a state of being surrounded by the electrical component 34. As a member constituting the electrical component 34, for example, aluminum or stainless steel treated with an alumite treatment is provided with ozone resistance. The light source portion 35 of the casing 3 is composed of a lamp holder 36 that holds both ends of the excimer lamp 2, and a plate-shaped partition wall 32 that is provided with a lamp holder 36 and has a rectangular flat surface, and is connected to The peripheral edge of the rectangular plane of the partition wall 32, and the light source side wall 3 5 1 surrounding the quasi-molecular lamp 2 (the light source side of the rectangular plane of the partition wall 32 of FIG. 1 extending downward in the vertical direction) side 351 and a five-sided structure formed by the light source portion side wall 35 1) in which the rectangular plane of the partition wall 32 of FIG. 2 extends downward in the vertical direction. The light source unit 35 is on the side wall of the light source unit side. 3 5 1 is formed as a cover and is provided with a plate-shaped light transmission window 4 made of a member such as quartz glass that transmits vacuum ultraviolet rays with respect to the partition wall 32. The light source portion 35 provided with the light transmission window 4 has a plurality of The molecular lamp 2 is disposed inside, and the plurality of excimer lamps 2 are in a state of being surrounded by the light source portion 35 and the light transmission window 4. As members constituting the light source portion 35, for example, aluminum or stainless steel treated with an alumite treatment is provided. A metal member having ultraviolet resistance and ozone resistance is formed -12-201009888 In the plurality of excimer lamps 2, individual transformers 6 are provided. For example, in the first drawing, three excimer lamps 2 are described, and the following inner electrodes of the excimer lamps 2 (not shown in FIGS. 1 and 2, and symbols 222 in the third drawing below) are described. An individual transformer 6 is electrically connected via the feed line 5, respectively. In order to electrically connect the excimer lamp 2 and the feeder 5 of each transformer 6, a φ through hole 33 1 that communicates the electrical component 34 and the light source unit 35 is provided in the partition wall 32. The through hole 33 1 provided in the partition wall 32 is provided to cut off a part of the partition wall 32 between the excimer lamp 2 and the transformer 6. For example, when three excimer lamps 2 are provided as shown in Fig. 1, A through hole 3 3 1 corresponding to each of the three portions of each excimer lamp 2 is provided. In the through hole 33 1 provided in the partition wall 32, in a state in which the feed line 5 electrically connecting the excimer lamp 2 and the transformer 6 is inserted, the space inside the unconnected light source unit 35 is spatially separated. Inside the electric component 34, a sealing body 332 made of, for example, polypropylene having ozone resistance is provided. ❹ Inside the electrical component 34, the plurality of transformers 6 are provided with a wind tunnel body 72 so as to be placed on the partition wall 32 and surround the outside. The wind tunnel body 72 is a cross-sectional three-shaped member shown in Fig. 1 and is provided to extend outside the transformer 6 as shown in Fig. 2 so as to extend along the tube axis direction of the excimer lamp 2. In the wind tunnel body 72, a pair of opposing opening portions 721, 722 are provided via the transformer 6. The wind tunnel body 72 is provided with a plurality of transformers 6 disposed integrally around the interior of the electrical component portion 34. For example, when three transformers 6 are provided as shown in Fig. 1, the wind tunnel body 72 is also provided separately by the transformer 6, and a total of three wind tunnel bodies 72 are provided. As a member constituting the wind tunnel body - 13 - 201009888, there is a resin member made of, for example, glass epoxy having electrical insulating properties. In the wind tunnel body 72, the square opening portion 721 is provided with a blowing means 71 for cooling a fan, for example, from the one opening portion 721 to the other opening portion 722. Since the air blowing means 71 is provided for cooling the transformer 6, the wind tunnel body 72 corresponding to each transformer 6 is separately provided. Inside the electrical component 34, a cooling means 73 of a heat exchanger such as a radiator is provided. The cooling means 73 is disposed inside the electrical component 34 via the air blowing means 71 q so as to be opposed to the one opening 721. Further, as shown in the first embodiment, in the case where the plurality of transformers 6 are provided, the cooling means 73 is for efficiently cooling the plurality of transformers 6, and the plurality of openings are arranged to be open to the respective ones of the respective wind tunnel bodies provided in the respective transformers. 72. [Refer to Figure 4(b) below]. The cooling means 73 is provided with a flow path 731 to supply the cooling liquid L, and is discharged inside. As shown in Fig. 2, the flow path 73 1 of the cooling means 73 extends outward from the inside of the electrical component portion 34, and is led out from the through hole 342 provided in the side wall 341 of the electrical component portion. A sealing body 343 made of, for example, aluminum is provided between the through hole 342 of the electrical component side side wall 341 and the flow path 731 of the cooling means 73, and the inside of the electrical component 34 constitutes a sealed space. The flow path 731 which is led out from the electrical component unit 34 is provided with a circulation means (not shown) outside the electrical component 34, and the coolant L inside the flow path 731 is circulated. -14- 201009888 The lamp unit 11 described above is arranged to be placed on the transport unit 12. The transport unit 12 is composed of a plurality of cylindrical rollers 121 that transport the irradiated object W, and a drive body 121 that rotationally drives the central axis of each of the rollers 121. The plurality of cylindrical rollers 121 are planes arranged in parallel with the light transmission window 4 of the lamp unit 11. An example of the configuration φ of the excimer lamp 2 provided in the above-described lamp unit 11 will be described with reference to Fig. 3 . Fig. 3 is an explanatory view showing the excimer lamp 2 shown in Fig. 1. Fig. 3(a) is a cross-sectional view taken along the tube axis direction of the discharge vessel 21 constituting the excimer lamp 2, and Fig. 3(b) is a view showing the direction of the tube axis of the discharge vessel 21 constituting the excimer lamp 2. Expanded cross-section of the intersection [refer to the enlarged view of the BB section of Figure 3(a)]. In the third drawing, the same reference numerals are given to the same as those shown in the first and second figures. The excimer lamp 2 is composed of a discharge vessel 21 having a discharge space 214 in which a luminescent gas is sealed, and electrodes 221 and 222 which are disposed to face each other via a discharge space 214. The discharge vessel 21 is composed of a cylindrical outer tube 211 and a cylindrical inner tube 212 having a diameter smaller than the diameter of the outer tube 211 inside the outer tube 211, and a cylindrical outer tube The tube axis of the 211 is aligned with the tube axis of the cylindrical inner tube 212, and is formed by a double tube structure formed by the annular end wall portions 213 at both ends of the outer tube 211 and the inner tube 212 in the tube axis direction. . -15- 201009888 The discharge vessel 21 is formed with a discharge space 214 surrounded by the outer tube 211 and the inner tube 212 and the pair of end wall portions 213, and a rare gas such as helium gas is sealed as a luminescent gas in the discharge space 214. . The member constituting the discharge vessel 21 is exemplified by a dielectric property such as quartz glass and a light transmissive property to a vacuum ultraviolet ray having a peak wavelength of 200 nm or less. The inner peripheral surface of the inner tube 212 constituting the discharge vessel 21 is provided with a cylindrical inner electrode 222 which is in close contact with the entire length direction. Further, on the outer peripheral surface of the outer tube 211 constituting the discharge vessel 21, the mesh outer electrode 221 is provided in close contact with the entire length direction thereof. The outer electrode 221 and the inner electrode 222 are disposed such that the outer tube 2 1 1 of the discharge vessel 2 1 formed by the medium faces the inner tube 2 1 2 and the discharge space 2 1 4 . The member constituting the inner electrode 222 and the outer electrode 221 is exemplified by a metal member having an electrical conductivity such as a copper-nickel alloy. The inner side electrode 222 and the outer side electrode 221 shown in FIG. 3 are electrically connected to a secondary side (not shown) of the transformer 6 shown in FIG. 1 and a primary side of the transformer 6 (not shown) It is connected to a high frequency power supply (not shown). Further, a lamp holder 36' is formed on the outer circumference of the outer electrode 221 by a metal member made of, for example, aluminum or stainless steel treated with an alumite treatment. The outer electrode 221 is grounded via the lamp holder 36. In the ultraviolet irradiation device 1 of the first embodiment, when the lamp is turned on, the feed voltage from the high-frequency power source (not shown) is boosted by the transformer 6, and is fed to the excimer lamp 2 by -16 - 201009888. . The excimer lamp 2 that is fed is excimer light emitted by the luminescent gas enclosed in the discharge vessel 21 by the potential difference between the pair of electrodes 221 and 222, and is generated when the luminescent gas is, for example, helium gas. Vacuum ultraviolet light having a peak-to-peak wavelength below 172 nm. The vacuum ultraviolet rays generated in the discharge space 214 are transmitted through the discharge vessel 21 and are irradiated to the outside of the quasi-molecular lamp 2. φ The light source unit 35 of the casing 3 is an inert gas filled with, for example, a nitrogen gas. Therefore, the vacuum ultraviolet light from the excimer lamp 2 is not absorbed into the inert gas, and the light transmission window 4 is transmitted to illuminate the transport unit 1. 2 sides. The driving body 121 of the transport unit 12 is connected to a power source (not shown) to rotationally drive the respective rollers 121. The object to be irradiated W placed on the roller 121 is transported by the rotation of the roller 121 to be opposed to the light transmission window 4. For example, in Fig. 1, the object to be irradiated W is transported from the right side of the paper surface to the left side of the paper surface, and is moved to the lower side with respect to the light transmission window 4. φ The inside of the transport unit 12 is an atmospheric environment. Therefore, the vacuum ultraviolet light transmitted through the light transmission window 4 is a part of the oxygen absorbed into the atmosphere, but the conveyed object W and the light transmission window 4 are closely arranged, at all. It is irradiated to the irradiated object W before being absorbed by oxygen.
如第2圖所示地，被照射物W，是在紙面左右方向爲 大型的情形，藉由將準分子燈2配置成鋸齒狀（在第2圖 中，在紙面正前方側，將一方的準分子燈2配置於紙面右 側，而在紙面內深側，將另一方的準分子燈2配置於紙面 左側），來自準分子燈2的真空紫外線照射於被照射物W -17- 201009888 全體，而被處理。又，在搬運單元12的內部，真空紫外 線被氧氣吸收而產生臭氧，藉由該臭氧，被照射物W是 被處理。 如上述地，第1實施例的紫外線照射裝置1，是筐體 3的電裝部34的內部成爲密閉空間之故，因而防止在搬運 單元12所產生的臭氧流進電裝部34，可防止配置於電裝 部34的內部的變壓器6被曝露在臭氧的情形。 第1實施例的紫外線照射裝置1是在燈點燈時，將對 於準分子燈2的饋電電壓藉由變壓器6予以昇壓之故，因 而變壓器6被加熱。針對於冷卻第1實施例的紫外線照射 裝置1的變壓器6的構成及其作用•效果，表示風洞體72 ，與此相較來說明。 第4(a)圖是表示比較例的紫外線照射裝置1的說明圖 ，沿著電裝部側側壁341的長度方向的斷面圖，第4(b)圖 是表示第1實施例的紫外線照射裝置1的說明圖，沿著電 裝部側側壁341的長度方向的斷面圖（在第1圖的C-C斷 面圖）。 又，在第4圖，與表示於第1圖及第2圖者相同者給 予同一符號。 比較例的紫外線照射裝置1是未設置風洞體72之處 ，與第1實施例不相同。 比較例及第1實施例的紫外線照射裝置1是準分子燈 2配置成鋸齒狀之故，因而變壓器6也配合於準分子燈2 的排列而配置成鋸齒狀。藉此，電性地連接準分子燈2與 -18 - 201009888 變壓器6的饋電線5，是不會不期望地變長，而可將其處 理作成簡便。 比較例及第1實施例的紫外線照射裝置1是在燈點燈 時，藉由未圖示的電源，送風手段71及冷卻手段73被運 轉。 比較例及第1實施例的紫外線照射裝置1是藉由所具 備的送風手段71，將冷卻風A送風至變壓器6。 φ 如比較例的紫外線照射裝置1地，在所具備的複數準 分子燈2設置個別的變壓器6的情形，則藉由送風手段71 所送風的冷卻風A與變壓器6相撞之後會擴散。具體而言 ，如第4(a)圖所示地，冷卻風A相撞於變壓器6之後，紙 面上側及下側的變壓器6，是冷卻風A擴散至沒有電裝部 側側壁341的一邊，而紙面正中央的變壓器6，冷卻風A 會朝紙面上下方向擴散。如此地，比較例的紫外線照射裝 置1的情形，則對於相對於變壓器6的冷卻手段73的一 ® 邊相反側的冷卻會成爲不充分。 第1實施例的紫外線照射裝置1的情形，在與比較例 相同具備的複數準分子燈2設置個別的變壓器6，而且藉 由具備風洞體72，可防止藉由送風手段71進行送風的冷 卻風A相撞於變壓器6之後的擴散。具體地，如第4(b)圖 所示地，在筐體3的電裝部34，設有個別地圍繞各變壓器 6，而且具備經由變壓器6相對的一對開口部721，722的 風洞體72，且送風手段71爲設於風洞體72的一方的開口 部721，而且藉由送風手段71有冷卻風A從風洞體72的 -19- 201009888 一方開口部721朝著另一方開口部722被送風。利用該構 成，來自送風手段71的冷卻風A是經過風洞體72的內方 而不會擴散，剛好噴在配置於風洞體72的內方的變壓器6 ，而適當地可冷卻被加熱的變壓器6。 第1實施例的紫外線照射裝置1，是筐體3的電裝部 34構成在密閉空間之故，因而從風洞體72的另一方開口 部7 22導出藉由被加熱的變壓器6成爲高溫的排熱風，而 循環筐體3的內部。第1實施例的紫外線照射裝置1是在 0 電裝部34的密閉空間設有具備冷卻液L的流路73 1的冷 卻手段73，藉此來自被加熱的變壓器6的排熱風藉由冷卻 手段73被熱交換，而可冷卻被密閉的電裝部34。該冷卻 手段73是經由送風手段721，個別地相對配置於各變壓器 6之故，因而可將藉由冷卻手段73被熱交換的冷卻風A 適當地噴在各變壓器6。 如上述地，第1實施例的紫外線照射裝置1是將電裝 部34構成在密閉空間，在該電裝部34，設有具備冷卻液 · L的流路731的冷卻手段73，在該各變壓器6的外方，設 有個別地圍繞該各變壓器6，而且經由具有經由該變壓器 6相對的開口部721、722的風洞體72，在該電裝部34的 內部’設有從該風洞體72的一方開口部721送風至另一 方的開口部722的送風手段71，爲其特徵者。藉此，第i 實施例的紫外線照射裝置1，可防止來自外部的腐蝕性氣 體進到電裝部34的內部’而藉由冷卻手段73進行熱交換 而可防止電裝部34的內部成爲高溫的情形，而藉由送風 -20- 201009888 手段71可冷卻在被防止成爲高溫的電裝部34的內部配置 於風洞體72內方的變壓器6。 又，第1實施例的紫外線照射裝置1是針對於設置光 透射窗4的構成加以說明，惟本發明的紫外線照射裝置1 是可防止配置於電裝部34的變壓器6曝露於腐蝕性氣體 就可以，若電裝部34的內部與光源部35的內部爲未大氣 地相連通的構成，則未設置光透射窗也可以。 φ 又，具備於本發明的紫外線照射裝置1的準分子燈2 ，是經由放電空間214與介質21而相對配置有一對電極 22 1、222，而照射真空紫外線者也可以，例如如上述的專 利文獻3所示地，一對電極221、222設於放電容器21的 外面的準分子燈2也可以。 在上述第1實施例的紫外線照射裝置1中，在電裝部 34的內部設置冷卻手段73，惟針對於以冷卻手段73構成 隔間壁3 2的紫外線照射裝置1，作爲第2實施例加以說明 第5圖是表示第2實施例的紫外線照射裝置1的說明 圖，對於具備於紫外線照射裝置1的準分子燈2的管軸方 向正交的斷面圖。 又’在第5圖，與表示於第1圖者相同者給予同一符 號。 表示於第5圖的紫外線照射裝置1，是以冷卻手段73 構成隔間壁32之處’與表示於第〗圖的紫外線照射裝置1 不相同。 * 21 - 201009888 作爲表示於第5圖的紫外線照射裝置1的說明，省略 了與在第1圖所表示的紫外線照射裝置1的說明共通的部 分，針對於與第1圖不同處加以說明。 載置變壓器6的隔間壁32，是藉由例如施以耐酸鋁處 理的鋁的具有熱傳導性的金屬構件所構成，而在其內部設 有流通冷卻液L的流路731，就可構成作爲冷卻手段73。 如此地，第2實施例的紫外線照射裝置1是隔間壁32 以冷卻手段73所構成，而且以可進行電裝部34的密閉空 間的熱交換的具熱傳導性的構件所構成，而在燈點燈時， 奪取變壓器6的熱的排熱風藉由構成隔間壁32的冷卻手 段73被熱交換，而可冷卻被密閉的電裝部34。 又，在從準分子燈2所照射的光，真空紫外線以外也 包括不同波長領域的光，而在該光中，也包括加熱隔間壁 32的光。又，從準分子燈2，被饋電就被加熱之故，因而 其輻射熱被放射。 第2實施例的紫外線照射裝置1，是藉由冷卻手段73 構成位於準分子燈2與變壓器6之間的隔間壁32，藉此將 來自準分子燈2的照射熱或輻射熱藉由隔間壁32進行熱 交換，而可防止變壓器6被加熱的情形。 【圖式簡單說明】 第1圖是表示第1實施例的紫外線照射裝置的說明圖 第2圖是表示第1實施例的紫外線照射裝置的說明圖 201009888 第3 (a)圖及第3 (b)圖是表示具備於本發明的第1實施 例的紫外線照射裝置的準分子燈說明圖。 第4(a)圖及第4(b)圖是表示將比較例的紫外線照射裝 置與本發明的第1實施、例的紫外線照射裝置予以比較的說 明圖。 第5圖是表示本發明的第2實施例的紫外線照射裝置 的說明圖。 Φ 第6圖是表示習知的紫外線照射裝置的說明圖。 【主要元件符號說明】 1 :紫外線照射裝置 1 1 :燈單元 12 :搬運單元 1 2 1 :滾子 122 :驅動體 9 2:準分子燈 21 :放電容器 2 1 1 :外側管 2 1 2 :內側管 2 1 3 :端壁部 2 1 4 :放電空間 221 :外側電極 222 :內側電極 3 :筐體 -23- 201009888 3 1 :頂板 3 2 :隔間壁 3 3 1 :貫通孔 3 32 :密封體 34 :電裝部 341 :電裝部側側壁 3 42 :貫通孔 3 43 :密封體 ❿ 3 5 :光源部 3 5 1 :光源部側側壁 3 6 :燈保持體 4 :光透射窗 5 :饋電線 6 :變壓器 71 :送風手段 72 :風洞體 . 721 :—方的開口部 722 :另一方的開口部 73 :冷卻手段 7 3 1 :流路 A :冷卻風的流動 L :冷卻液的流動 W :被照射物 -24-As shown in Fig. 2, the object to be irradiated W is large in the horizontal direction of the paper surface, and the excimer lamp 2 is arranged in a zigzag shape (in the second figure, one side is on the front side of the paper surface) The excimer lamp 2 is disposed on the right side of the paper surface, and the other excimer lamp 2 is disposed on the left side of the paper surface on the deep side in the paper surface, and the vacuum ultraviolet light from the excimer lamp 2 is irradiated onto the irradiated object W-17-201009888. And being processed. Further, inside the transport unit 12, the vacuum ultraviolet rays are absorbed by oxygen to generate ozone, and the irradiated material W is treated by the ozone. As described above, in the ultraviolet irradiation device 1 of the first embodiment, since the inside of the electrical component 34 of the casing 3 is a sealed space, it is possible to prevent ozone generated in the transport unit 12 from flowing into the electrical component 34 and prevent it from being prevented. The transformer 6 disposed inside the electrical component 34 is exposed to ozone. In the ultraviolet irradiation device 1 of the first embodiment, when the lamp is turned on, the feed voltage to the excimer lamp 2 is boosted by the transformer 6, and the transformer 6 is heated. The configuration of the transformer 6 for cooling the ultraviolet irradiation device 1 of the first embodiment, and the action and effect thereof will be described with respect to the wind tunnel body 72. 4(a) is an explanatory view showing the ultraviolet irradiation device 1 of the comparative example, a cross-sectional view along the longitudinal direction of the electrical component side side wall 341, and a fourth (b) view showing the ultraviolet irradiation of the first embodiment. The explanatory view of the apparatus 1 is a cross-sectional view along the longitudinal direction of the electric component side side wall 341 (in the cross-sectional view of CC in Fig. 1). In the fourth drawing, the same reference numerals are given to the same as those shown in the first drawing and the second drawing. The ultraviolet irradiation device 1 of the comparative example is not provided with the wind tunnel body 72, and is different from the first embodiment. In the ultraviolet ray irradiation apparatus 1 of the comparative example and the first embodiment, since the excimer lamp 2 is arranged in a zigzag shape, the transformer 6 is also arranged in a zigzag shape in accordance with the arrangement of the excimer lamp 2. Thereby, the excimer lamp 2 and the feed line 5 of the transformer 6 of -18 - 201009888 are electrically connected, and it is not undesirably long, and the process can be made simple. In the ultraviolet irradiation device 1 of the comparative example and the first embodiment, when the lamp is turned on, the air blowing means 71 and the cooling means 73 are operated by a power source (not shown). In the ultraviolet ray irradiation apparatus 1 of the comparative example and the first embodiment, the cooling air A is blown to the transformer 6 by the air blowing means 71 provided. φ As in the ultraviolet irradiation device 1 of the comparative example, when the individual transformers 6 are provided in the plurality of pseudo-molecular lamps 2 provided, the cooling air A blown by the air blowing means 71 collides with the transformer 6 and then diffuses. Specifically, as shown in Fig. 4(a), after the cooling air A collides with the transformer 6, the transformer 6 on the upper side and the lower side of the paper is the side where the cooling air A is diffused to the side wall 341 where the electric component side is not provided. In the transformer 6 at the center of the paper, the cooling air A will spread toward the top and bottom of the paper. As described above, in the case of the ultraviolet irradiation device 1 of the comparative example, cooling on the opposite side of the one side of the cooling means 73 with respect to the transformer 6 is insufficient. In the case of the ultraviolet irradiation device 1 of the first embodiment, the individual transformers 6 are provided in the plurality of excimer lamps 2 provided in the same manner as the comparative example, and by providing the wind tunnel body 72, the cooling air that is blown by the air blowing means 71 can be prevented. A collides with the diffusion after the transformer 6. Specifically, as shown in FIG. 4(b), the electric component 34 of the casing 3 is provided with a wind tunnel body that individually surrounds each of the transformers 6 and includes a pair of openings 721 and 722 that face each other via the transformer 6. 72, the air blowing means 71 is provided in one opening portion 721 of the wind tunnel body 72, and the cooling air A is blown from the -19-201009888 one opening portion 721 of the wind tunnel body 72 toward the other opening portion 722 by the air blowing means 71. Air supply. With this configuration, the cooling air A from the air blowing means 71 passes through the inside of the wind tunnel body 72 without being diffused, and is just sprayed on the transformer 6 disposed inside the wind tunnel body 72, and the heated transformer 6 can be appropriately cooled. . In the ultraviolet irradiation device 1 of the first embodiment, since the electrical component 34 of the casing 3 is formed in a sealed space, the discharge of the heated transformer 6 is discharged from the other opening 722 of the wind tunnel body 72. Hot air, while circulating the inside of the casing 3. The ultraviolet irradiation device 1 of the first embodiment is a cooling means 73 in which a flow path 73 1 including a coolant L is provided in a sealed space of the zero electrical component 34, whereby the exhaust air from the heated transformer 6 is cooled by means of cooling 73 is exchanged by heat, and the sealed electrical component 34 can be cooled. Since the cooling means 73 is disposed separately from each of the transformers 6 via the air blowing means 721, the cooling air A which is heat-exchanged by the cooling means 73 can be appropriately sprayed on the respective transformers 6. As described above, in the ultraviolet irradiation device 1 of the first embodiment, the electrical component 34 is formed in a sealed space, and the electrical component 34 is provided with a cooling means 73 including a flow path 731 of the coolant L. The outside of the transformer 6 is provided to surround the transformers 6 individually, and the wind tunnel body 72 having the openings 721 and 722 opposed to the transformer 6 is provided in the interior of the electrical component 34 from the wind tunnel body. The air blowing means 71 that blows one of the openings 721 of the 72 to the other opening 722 is characteristic. As a result, the ultraviolet irradiation device 1 of the first embodiment can prevent the corrosive gas from the outside from entering the interior of the electrical component 34 and exchange heat with the cooling means 73 to prevent the interior of the electrical component 34 from becoming hot. In this case, the transformer 6 that is disposed inside the wind tunnel body 72 inside the electric component 34 that is prevented from becoming high temperature can be cooled by the air supply -20-201009888 means 71. Further, the ultraviolet irradiation device 1 of the first embodiment is described with respect to the configuration in which the light transmission window 4 is provided. However, the ultraviolet irradiation device 1 of the present invention prevents the transformer 6 disposed in the electrical component 34 from being exposed to corrosive gas. If the inside of the electric component 34 and the inside of the light source unit 35 are connected to each other without being in the atmosphere, the light transmission window may not be provided. φ Further, the excimer lamp 2 provided in the ultraviolet irradiation device 1 of the present invention may be provided with a pair of electrodes 22 1 and 222 disposed opposite to the medium 21 via the discharge space 214, and may be irradiated with vacuum ultraviolet rays, for example, as described above. As shown in Document 3, the pair of electrodes 221 and 222 may be provided on the outer surface of the discharge vessel 21 by the excimer lamp 2. In the ultraviolet irradiation device 1 of the first embodiment, the cooling means 73 is provided inside the electrical component 34, but the ultraviolet irradiation device 1 which constitutes the partition wall 32 by the cooling means 73 is used as the second embodiment. 5 is an explanatory view showing the ultraviolet irradiation device 1 of the second embodiment, and is a cross-sectional view orthogonal to the tube axis direction of the excimer lamp 2 provided in the ultraviolet irradiation device 1. Further, in Fig. 5, the same symbol is given to the same as that shown in Fig. 1. The ultraviolet irradiation device 1 shown in Fig. 5 is different from the ultraviolet irradiation device 1 shown in Fig. 1 in that the partitioning means 32 is formed by the cooling means 73. * 21 - 201009888 The description of the ultraviolet irradiation device 1 shown in Fig. 5 is omitted, and the portion common to the description of the ultraviolet irradiation device 1 shown in Fig. 1 is omitted, and the difference from Fig. 1 will be described. The partition wall 32 on which the transformer 6 is placed is formed of, for example, a metal member having heat conductivity which is treated with an alumite-treated aluminum, and a flow path 731 through which the cooling liquid L flows is provided inside the partition wall 32. Cooling means 73. In the ultraviolet irradiation device 1 of the second embodiment, the partition wall 32 is constituted by the cooling means 73, and is constituted by a thermally conductive member capable of performing heat exchange in the sealed space of the electrical component 34, and the lamp is At the time of lighting, the hot exhaust air that has taken up the transformer 6 is heat-exchanged by the cooling means 73 constituting the partition wall 32, and the sealed electrical component 34 can be cooled. Further, in the light irradiated from the excimer lamp 2, light in a different wavelength region is included in addition to the vacuum ultraviolet ray, and the light in the partition wall 32 is also included in the light. Further, since the excimer lamp 2 is heated by being fed, the radiant heat is radiated. In the ultraviolet irradiation device 1 of the second embodiment, the partition wall 32 between the excimer lamp 2 and the transformer 6 is constituted by the cooling means 73, whereby the irradiation heat or radiant heat from the excimer lamp 2 is passed through the compartment. The wall 32 performs heat exchange to prevent the transformer 6 from being heated. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is an explanatory view showing an ultraviolet irradiation device according to a first embodiment. Fig. 2 is an explanatory view showing an ultraviolet irradiation device according to a first embodiment. 201009888 3 (a) and 3 (b) FIG. 4 is an explanatory view showing an excimer lamp provided in the ultraviolet irradiation device according to the first embodiment of the present invention. 4(a) and 4(b) are explanatory views showing an ultraviolet irradiation apparatus of a comparative example and an ultraviolet irradiation apparatus according to the first embodiment and the example of the present invention. Fig. 5 is an explanatory view showing an ultraviolet irradiation device according to a second embodiment of the present invention. Φ Fig. 6 is an explanatory view showing a conventional ultraviolet irradiation device. [Description of main component symbols] 1 : Ultraviolet irradiation device 1 1 : Lamp unit 12 : Transport unit 1 2 1 : Roller 122 : Driver 9 2 : Excimer lamp 21 : Discharge capacitor 2 1 1 : Outer tube 2 1 2 : Inner tube 2 1 3 : end wall portion 2 1 4 : discharge space 221 : outer electrode 222 : inner electrode 3 : housing -23 - 201009888 3 1 : top plate 3 2 : partition wall 3 3 1 : through hole 3 32 : Sealing body 34: Electrical component 341: Electrical component side side wall 3 42 : Through hole 3 43 : Sealing body ❿ 3 5 : Light source part 3 5 1 : Light source part side side wall 3 6 : Lamp holding body 4 : Light transmitting window 5 : Feeder 6 : Transformer 71 : Air supply means 72 : Wind tunnel body 721 : - Opening part 722 : The other opening part 73 : Cooling means 7 3 1 : Flow path A : Flow of cooling air L : Coolant Flow W: Irradiated object-24-