JP5651985B2 - UV irradiation equipment - Google Patents

Description

  The present invention relates to an ultraviolet irradiation device used in a manufacturing process of a liquid crystal panel, for example.

As shown in FIG. 8, the liquid crystal panel 70 has a structure in which liquid crystal is sealed between two glass plates. For example, a plurality of active elements (for example, thin film transistors: TFTs) 72 and liquid crystal driving electrodes ( A transparent electrode: ITO) 73 is formed, and a first glass plate 71 on which an alignment film 74 is formed, and a color filter 76, a transparent electrode 77, and an alignment film 78 are formed on one surface. The glass plate 75 is arranged so that the surfaces thereof face each other with the spacer member 79 interposed therebetween, and the liquid crystal layer 80 is formed between the first glass plate 71 and the second glass plate 75.
In the manufacturing process of such a liquid crystal panel 70, by irradiating the liquid crystal panel material provided with the liquid crystal containing the photoreactive substance (monomer) that reacts with the ultraviolet light with ultraviolet rays, A technique for performing a reaction process (pretilt angle expression process, PSVA) is known (see Patent Document 1). In this technology, a photoreactive substance can be polymerized in a state in which the liquid crystal is oriented in a specific direction by irradiating the liquid crystal panel material with ultraviolet rays while applying a voltage. It is said that a corner can be given.

In such a reaction treatment (PSVA) of liquid crystal panel material using ultraviolet rays, it is necessary to irradiate the photoreactive substance in the liquid crystal with ultraviolet rays at a high illuminance, while photoreactivity in the liquid crystal. There is a need for materials not to be exposed to high temperatures.
The reaction rate of the photoreactive substance is highly temperature dependent. If the temperature during irradiation is high, the polymerization proceeds too much and the growth of polymer particles becomes too large. Then, since the uniform pretilt angle cannot be obtained, the contrast is deteriorated or light leaks.
Furthermore, if temperature non-uniformity occurs on the light-irradiated surface of the liquid crystal panel material, a difference (variation) occurs in the reaction of the photoreactive substance, causing unevenness in the tilt (pretilt angle) of the liquid crystal, This unevenness in the tilt of the liquid crystal appears as light and dark unevenness in the product.
As described above, in the liquid crystal panel manufacturing process, when performing the reaction treatment of the liquid crystal panel material using ultraviolet rays, (b) the liquid crystal panel material is irradiated with ultraviolet rays having a wavelength of 300 to 350 nm; It is required that the in-plane uniformity of the UV illuminance on the light-irradiated surface of the panel material is high, and (c) the temperature rise of the liquid-crystal panel material is small and the in-plane uniformity of the temperature on the light-irradiated surface of the liquid crystal panel material is required. However, the actual situation is that there is no known ultraviolet irradiation apparatus that can perform a desired reaction treatment of the liquid crystal panel material without adversely affecting the photoreactive substance.

Japanese Patent Laid-Open No. 2003-177408

  The present invention has been made in order to solve the above-described problems, and the in-plane uniformity of ultraviolet illuminance on the light irradiation surface of the object to be processed is high, and the temperature of the object to be processed is increased. An object of the present invention is to provide an ultraviolet irradiation apparatus that can perform ultraviolet irradiation processing with a high in-plane uniformity of temperature on the light irradiation surface of the object to be processed.

The ultraviolet irradiation device of the present invention is an ultraviolet irradiation device used in a manufacturing process of a liquid crystal panel containing a photoreactive substance.
A long excimer lamp that emits light having an emission peak at a wavelength of 300 nm to 400 nm, and a cylindrical shape having openings at both ends having light transmittance, provided in a state in which the excimer lamp is inserted inside . A light source unit in which a plurality of light source elements configured by an elongated mantle tube are arranged in parallel to face a liquid crystal panel material that is an object to be processed;
A cooling mechanism having an air guiding space and an air discharging space ,
One end opening of the outer tube in each of the light source elements is located in a common air guide space portion, and the other end opening is located in a common air discharge space portion, and the outer tube of each of the light source elements is Cooling air is introduced into the interior through a space for guiding air .

  In the ultraviolet irradiation device of the present invention, it is preferable that a light guide portion including an inner peripheral surface formed by a reflecting surface is provided between the light source unit and the object to be processed.

In the ultraviolet irradiation device of the present invention, in the cooling mechanism , a circulation cooling air circulation path is formed by the air guiding space and the exhaust air space, and the circulation cooling air circulation path is used for heat dissipation. A heat exchanger is preferably arranged .

According to the ultraviolet irradiation device of the present invention, basically, a plurality of light source elements are arranged in parallel to constitute a light source unit, so that a specific wavelength can be obtained with a uniform illuminance distribution with respect to an object to be processed. Can be irradiated with ultraviolet rays.
In addition, in each light source element, the outer tube is provided in a state where the lamp is inserted into the inner tube, so that the light emitting tube of the lamp can be directly cooled by the cooling air guide function by the outer tube. Therefore, a plurality of lamps are uniformly cooled for each lamp, and the variation of the radiant heat from the lamp itself to the object to be processed can be suppressed, and the object to be processed is irradiated with heat rays. In addition, since the outer tube itself is cooled by the cooling air, the radiant heat to the object to be processed can be suppressed, so that the temperature rise of the object to be processed can be reduced. Temperature inhomogeneity in the surface of the object to be processed can be suppressed. For example, a reaction process (pretilt) of a liquid crystal panel material in a liquid crystal panel manufacturing process It becomes suitable as an ultraviolet irradiation apparatus used in the expression process).

  In addition, since the inner peripheral surface is further provided with a ride guide portion composed of a space formed by a reflecting surface, the light source unit and the object to be processed are secured while ensuring a sufficient amount of ultraviolet irradiation for the object to be processed. Since the distance between the object and the object can be increased, the influence of the radiant heat of the light source unit can be more reliably suppressed, the temperature increase of the object to be processed can be reduced, and the object to be processed It is possible to suppress temperature non-uniformity in the surface of the object.

  Furthermore, since an excimer lamp is used, no extra light component is emitted, so that the degree of temperature rise of the object to be processed can be reliably reduced.

  Furthermore, since the cooling mechanism is configured to include a heat exchanger, a closed cooling air circulation supply path can be formed, and even when the ultraviolet irradiation device is used in a clean room, for example. It is not necessary to prepare a duct or the like, and the lamp can be cooled compactly.

It is explanatory drawing seen from the front direction which shows the outline of the internal structure in the example of 1 structure of the ultraviolet irradiation device of this invention. It is explanatory drawing seen from one side surface which shows the outline of the internal structure of the ultraviolet irradiation device shown in FIG. It is explanatory drawing which shows roughly the example of arrangement | positioning of the light source element in the light source unit which concerns on this invention. It is sectional drawing which shows the example of a structure of the excimer lamp which concerns on the lamp | ramp used in the ultraviolet irradiation device of this invention, (A) Perspective view, (B) The cross section perpendicular | vertical to the longitudinal direction of a lamp | ramp. It is the (A) perspective view and (B) the end view of the side wall of a light guide member which show one structural example of the light guide member which comprises a light guide part. It is explanatory drawing seen from one side surface which shows the outline of the internal structure in the ultraviolet irradiation device for a comparison produced in the comparative experiment example 1. FIG. It is explanatory drawing seen from the one side surface direction which shows the outline of the internal structure in the ultraviolet irradiation device for a comparison produced in the comparative experiment example 2. It is sectional drawing for description which shows the outline of the structure of a liquid crystal panel.

FIG. 1 is an explanatory view showing the outline of the internal structure in one configuration example of the ultraviolet irradiation apparatus of the present invention, as viewed from the front, and FIG. 2 shows the outline of the internal structure of the ultraviolet irradiation apparatus shown in FIG. It is explanatory drawing seen from the side surface direction.
This ultraviolet irradiation device is roughly composed of a light source unit 10, a cooling unit 40, a light guide unit 50, and a power supply unit 60.

The light source unit 10 includes a light source unit casing member 11 that has a light source unit casing 11 that has a light irradiation opening 12 that opens downward. The light source unit casing member 11 has an internal space partitioned in the vertical direction. The lower space portion is a light source unit arrangement space portion 15 in which the light source unit 20 is arranged, and the upper space portion corresponds to the light source unit 20 and an electric component arrangement space portion in which an electric body such as a transformer 35 is arranged. It is set to 16.
Further, in one end side region in the longitudinal direction of the lamp 25 constituting the light source unit 20 in the light source unit casing member 11, one end side partition wall 13 constituting the electrical component arrangement space portion 16 and one end wall 11 </ b> A of the light source unit casing member 11. And a common wind guide space 18 for introducing cooling air into each of the electrical component placement space 16 and the light source unit placement space 15, and is formed in the light source casing member 11. Common exhaust space formed by partitioning the other end side partition wall 14 constituting the electrical component arrangement space portion 16 and the other end wall 11B of the light source portion casing member 11 in the other end side region in the longitudinal direction of the lamp. It has a part 19.
The one-end-side partition wall 13 that forms the electrical component arrangement space portion 16 is formed with an air introduction vent 13 </ b> A for introducing cooling air into the electric component arrangement space portion 16, thereby forming the electric component arrangement space portion 16. The other end-side partition wall 14 is formed with a ventilating air vent 14A for discharging the cooling air from the electrical equipment arrangement space 16.

As shown in FIG. 3, the light source unit 20 includes a long lamp 25 that emits light having a light emission peak at a wavelength of 300 nm to 400 nm, and the lamp 25 along the lamp 25 in a state where the lamp 25 is inserted therein. For example, a plurality of light source elements 21 constituted by a long outer tube (tubular jacket) 24 provided so as to extend, for example, the axial centers of the lamps 25 are positioned in the same plane and extend in parallel to each other. In the state, they are arranged in parallel at equal intervals.
The lamp 25 constituting each light source element 21 is held and fixed to the light source section casing member 11 via the lamp holder 22, and the outer tube 24 has one end opening positioned in the air guide space 18. In this state, the light source unit casing member 11 is fixed and held via a holding member (not shown).
The number of light source elements 21 constituting the light source unit 20 is, for example, 32, and the separation distance p between adjacent light source elements 21 is, for example, 90 mm.

The lamp 25 constituting the light source unit 20 is constituted by, for example, an excimer lamp, and has a wavelength suitable for polymerizing a photoreactive substance (monomer) contained in the liquid crystal in the liquid crystal panel material, for example, 300 nm to 400 nm. Of ultraviolet light is emitted.
FIG. 4 is a perspective view showing an example of the configuration of an excimer lamp according to the lamp used in the ultraviolet irradiation apparatus of the present invention, and FIG. 4B is a cross-sectional view showing a cross section perpendicular to the longitudinal direction of the lamp.
The excimer lamp 25 includes a hollow elongated discharge vessel 26 having a rectangular cross section in which a discharge space S is formed. Inside the discharge vessel 26, for example, xenon gas is used as a discharge gas. It is enclosed. Here, the discharge vessel 26 is made of, for example, quartz glass.
On the outer surface of each of the upper wall 26A and the lower wall 26B in the discharge vessel 26, there are a pair of mesh electrodes, that is, one electrode 27A that functions as a high-voltage power supply electrode and the other electrode 27B that functions as a ground electrode. They are arranged opposite to each other so as to extend in the longitudinal direction.
Further, on the inner surface of the wall excluding the lower wall 26B of the discharge vessel 26, a reflecting material layer 30, a glass powder layer 31, and a phosphor layer 32 are provided in this order from the outer surface side. A glass powder layer 31 and a phosphor layer 32 are laminated on the inner surface of the lower wall 26B of the discharge vessel 26 that forms the emission portion.

The reflector layer 30 is made of, for example, a mixture of silica and alumina.
Examples of the glass constituting the glass powder layer 31 include borosilicate glass (Si—B—O glass) and aluminosilicate glass (Si—Al—O glass), barium silicate glass, or any of these. Examples thereof include glass containing an alkaline earth oxide, an alkali oxide, or a metal oxide added thereto.
Examples of the phosphor constituting the phosphor layer 32 include europium activated strontium borate (Sr—B—O: Eu (hereinafter referred to as “SBE”), center wavelength 368 nm) phosphor, cerium activated aluminin. Magnesium lanthanum phosphate (La—Mg—Al—O: Ce (hereinafter referred to as “LAM”), center wavelength 338 nm (here, “broad”) phosphor, gadolinium, praseodymium-activated lanthanum phosphate (La—PO : Gd, Pr (hereinafter referred to as “LAP: Pr, Gd”), center wavelength 311 nm) phosphors and the like.

  The outer tube 24 is a cylindrical material made of a light transmissive material, for example, quartz glass, that transmits light in a wavelength region of 300 nm to 400 nm, for example, and has almost the same length as the lamp 25. Further, the size of the minimum gap portion of the air gap constituting the cooling airflow passage 24A formed between the inner surface of the outer tube 24 and the outer surface of the lamp 25 is, for example, 16 to 30 mm.

The cooling unit 40 includes, for example, a box-shaped cooling unit casing member 41 installed at a central position in the arrangement direction of the light source elements 21 in the upper part of the light source unit casing member 11. For example, a cooling fan 42 such as an axial fan and a heat exchanger 43 for heat dissipation such as a water-cooled radiator are disposed on the upstream side of the cooling fan 42.
The internal space of the cooling section casing member 41 communicates with the air guiding space section 18 and the exhaust air space section 19 in the light source section 10 through the ventilation ducts 45 provided on both sides of the cooling section casing member 41. Thus, the cooling air supplied from the cooling fan 42 is introduced into the electrical equipment arrangement space 16 through the air guide space 18 in the light source 10 and the outer tube 24 in each light source element 21. A cooling mechanism that forms a closed circulating cooling air flow path that is introduced into the inside and introduced into the heat exchanger 43 for heat dissipation in the cooling unit 40 through the exhaust air space 19 is configured.

The light guide part 50 is a so-called spacer for ensuring a sufficiently large separation distance between the light source unit 20 and the object to be processed W while sufficiently ensuring the amount of ultraviolet irradiation to the object to be processed W. For example, a rectangular frame-shaped light having a size corresponding to the light irradiation opening 12 in the light source section casing member 11 and having an inner peripheral surface formed by a reflecting surface, for example, defining a processing space The guide member 51 is attached and configured to extend downward from the lower surface of the light source unit 10.
As shown in FIG. 5, the light guide member 51 is configured by combining four plate-like members 52 </ b> A to 52 </ b> D, and each of the plate-like members 52 </ b> A to 52 </ b> D includes a base member 53 made of, for example, aluminum, For example, the light reflecting member 54 made of high-brightness aluminum is used.
On one wall (one plate-like member 52A) of the ride guide member 51, for example, a liquid crystal panel material that is the object to be processed W is positioned at the lower level of the light guide portion 50, and the mounting surface is horizontal. An opening / closing door 55 is formed for entering and evacuating a transfer robot (not shown) that is loaded into and unloaded from the stage 58. The opening / closing of the opening / closing door 55 causes heat accumulated in the light guide portion 50 to be externally applied. Can be released to. Reference numeral 59 in FIGS. 1 and 2 denotes a stage mount.

  The power supply unit 60 controls lighting of each lamp 25, and is usually arranged separately from the light source unit 10 in view of weight and consideration during maintenance. However, since the transformer 35 generates a high voltage, the transformer 35 is arranged inside the light source unit casing member 11.

The operation of the ultraviolet irradiation apparatus will be described.
In this ultraviolet irradiation device, in a state where a flat workpiece W (for example, a liquid crystal panel member) is carried by the transfer robot via the opening / closing door 55 in the light guide member 51 and placed on the stage 58, When a high frequency voltage is boosted and supplied from the power source 60 to the one electrode 27A of the excimer lamp 25 by the transformer 35 provided in the electrical equipment arrangement space 16, the dielectric material constituting the discharge vessel 26 is passed through the dielectric material. A dielectric barrier discharge is generated in the discharge space S, excimer molecules are formed by the dielectric barrier discharge, and fluorescence that constitutes the phosphor layer 32 by light emitted from the excimer molecules (in the case of xenon gas, vacuum ultraviolet light of 175 nm). When the body is excited, ultraviolet rays of 300 nm to 400 nm pass through the lower wall 26B of the discharge vessel 26 and the other It is emitted through the opening of the pole 27B.
On the other hand, a part of the cooling air supplied by driving the cooling fan 42 is introduced into the electrical equipment arrangement space 16 through the air guide space 18 in the light source unit 10 and all the others are Each light source element 21 is introduced into the outer tube 24, specifically, into the cooling airflow passage 24 A formed between the inner surface of the outer tube 24 and the outer surface of the excimer lamp 25, whereby the excimer lamp 25 and The outer tube 24 is cooled, and then introduced into the heat exchanger 43 through the exhaust air space 19 to be cooled, and the cooling air is supplied again by the cooling fan 42 without being exhausted outside the apparatus. .

Thus, according to the ultraviolet irradiation device having the above-described configuration, the plurality of light source elements 21 are arranged in parallel with the axial centers of the respective excimer lamps 25 positioned in the same horizontal plane and extending in parallel with each other. By configuring the light source unit 20, basically, it is possible to irradiate the object to be processed W with ultraviolet rays in a wavelength region of 300 nm to 400 nm with a uniform illuminance distribution, and to the object to be processed. The temperature rise of the object W can be reduced and temperature non-uniformity in the surface of the workpiece W can be suppressed. That is, in each light source element 21, the outer tube 24 is provided in a state where the excimer lamp 25 is inserted into the outer tube 24, so that the excimer lamp is provided by the cooling air guide function (winding action) by the outer tube 24. Since the 25 discharge vessels 26 can be directly cooled, the plurality of excimer lamps 25 are uniformly cooled for each lamp, and the variation of the radiant heat with respect to the object W to be processed by the excimer lamps 25 is suppressed to be small. In addition, it is possible to suppress the irradiation of the object to be processed W with heat rays, and the outer tube 24 itself is also cooled by the cooling air, so that the radiant heat to the object to be processed W is suppressed. Thus, the temperature rise of the object to be processed W can be reduced and the surface of the object to be processed W can be reduced. Can be obtained have temperature uniformity.
Accordingly, for example, it is suitable as an ultraviolet irradiation device used in a reaction process (pretilt angle expression process) of a liquid crystal panel material in a liquid crystal panel manufacturing process.

  In addition, the light guide unit 50 and the object to be processed are secured while ensuring a sufficient amount of ultraviolet irradiation with respect to the object to be processed W by including the ride guide portion 50 having an inner peripheral surface formed by a reflecting surface. Since the separation distance from the object W can be increased, the influence of the radiant heat of the light source unit 20 can be more reliably suppressed, the temperature increase of the object to be processed W can be reduced, and the object to be processed can be reduced. High temperature uniformity in the surface of the processing object W can be obtained.

  Further, an excimer lamp 25 is used, and ultraviolet rays (vacuum ultraviolet rays) in a predetermined wavelength region generated in the discharge space S of the excimer lamp 25 are 300 to 400 nm by the action of the phosphor layer 32 provided on the inner surface of the discharge vessel 26. By being configured to be emitted as ultraviolet rays, an extra light component is not radiated to the object to be processed W, so that the temperature increase of the object to be processed W can be surely reduced.

Furthermore, since the heat exchanger 43 for heat radiation is provided, a closed (sealed) cooling air circulation path can be formed, and the ultraviolet irradiation device is used in, for example, a clean room. Even in this case, it is not necessary to take in the cooling air from the outside of the apparatus and exhaust the cooling air to the outside of the apparatus, so there is no need to connect a duct or the like, and the cooling mechanism can be configured compactly. .
Moreover, since it is air-cooled, problems such as water leakage that may occur if it is water-cooled do not occur.

  Hereinafter, experimental examples performed for confirming the effects of the present invention will be described.

<Experimental example 1>
In accordance with the configuration shown in FIGS. 1 and 2, an ultraviolet irradiation apparatus according to the present invention having the following configuration was produced.
In the light source unit (20), the number of light source elements (21) is 32, and the distance between adjacent light source elements (distance p between the center axes of the lamps) is 90 mm.
The lamp (25) constituting each light source element (21) has a total length of 2800 mm, vertical and horizontal dimensions of 43 mm × 15 mm, a lamp output of 2 kW, a discharge vessel (26) made of quartz glass, and a phosphor layer (32). An excimer lamp in which the constituent phosphor is SBE and xenon gas is sealed as a discharge gas, and the outer tube (24) is made of quartz glass, has a total length of 2500 mm, an inner diameter of 76 mm, and a wall thickness of 2.5 mm. It is a shape.
The cooling fan (42) has an axial flow capacity capable of supplying cooling air of, for example, 4 m ³ / min of blowing air (128 m ³ / min in the whole light source unit) to one light source element (21). I am a fan. The pressure in the air guiding space (18) is 500 to 1000 Pa, the temperature of the cooling air is 30 ° C., and the temperature of the air in the exhaust air space (19) is about 60 ° C.
The height of the light guide member (51) is 300 mm.
The object to be processed (W) is a test liquid crystal panel material having vertical and horizontal dimensions of 2200 mm × 2500 mm, and the separation distance between the light source unit (20) and the object to be processed (W) is 400 mm.

Using this ultraviolet irradiation device, all the lamps (25) in each light source element (21) are turned on under the same lighting conditions, and ultraviolet rays are irradiated to the test liquid crystal panel material that is the object to be processed (W). The illuminance uniformity on the light irradiation surface of the test liquid crystal panel material was determined by measuring the illuminance and temperature at arbitrary measurement points on the light irradiation surface of the liquid crystal panel material for testing. % Was confirmed to be within the range of%.
It was also confirmed that the temperature on the light-irradiated surface of the test liquid crystal panel material reached 30 ° C. ± 2 ° C. (degree of temperature rise) when 120 seconds had elapsed after the start of UV irradiation. Here, the surface temperature of the test liquid crystal panel material before irradiation with ultraviolet rays is 25 ° C.

<Illuminance uniformity>
“Illuminance uniformity” is the average value of illuminance measured at a plurality of measurement locations on the light-irradiated surface of the test liquid crystal panel material, Ea, and the illuminance measurement value at each of the plurality of measurement locations as Eb.
(Formula) (Ea-Eb) / Ea [%]
Defined by In Experimental Example 1, the average illuminance (Ea) on the light-irradiated surface of the test liquid crystal panel material was about 19 mW / cm ² .

Furthermore, when the total radiant heat of light in the wavelength range of 200 nm to 20000 nm was measured with a calorimeter, the total radiant heat amount for the test liquid crystal panel material was 57 mW / cm ² , and of these, the wavelength range of 300 nm to 400 nm The amount of radiant heat by light other than ultraviolet light (light that does not contribute to the photochemical reaction in the liquid crystal panel material) was 38 mW / cm ² . Here, the surface temperature of the lamp was 250 ° C., and the surface temperature of the outer tube was about 60 ° C.

<Comparative Experimental Example 1>
According to the configuration shown in FIG. 6, a comparative ultraviolet irradiation device was produced. This ultraviolet irradiation device is not provided with a cooling mechanism, and the light source unit of the ultraviolet irradiation device manufactured in Experimental Example 1 has the same configuration except that it does not have an outer tube. Have In FIG. 6, reference numeral 51 </ b> A is an auxiliary reflector, and 50 </ b> A is a casing that divides a processing space inside, and the same constituent members as those shown in FIGS. 1 and 2 are given the same reference numerals.
Using this ultraviolet irradiation device, all the lamps (25) in the light source unit (20A) are turned on under the same lighting conditions, and ultraviolet rays are irradiated to the test liquid crystal panel material. The illuminance uniformity on the light irradiation surface of the test liquid crystal panel material was determined by measuring the illuminance and temperature at any plurality of measurement locations on the light irradiation surface of the panel material, and the illuminance uniformity was ± 10.8%. It was confirmed that it was within the range. In addition, the average illumination intensity (Ea) in the light irradiation surface of the liquid crystal panel material for a test was about 25 mW / cm < ² >.
Further, it was confirmed that the temperature on the light-irradiated surface of the test liquid crystal panel material reached 60 ° C. ± 12 ° C. (degree of temperature rise) when 120 seconds had elapsed after the start of ultraviolet irradiation.

Furthermore, when the total radiant heat amount of light in the wavelength range of 200 nm to 20000 nm was measured with a calorimeter, the total radiant heat amount for the test liquid crystal panel material was 173 mW / cm ² , and of these, the wavelength range of 300 nm to 400 nm The amount of radiant heat by light other than ultraviolet rays (light that does not contribute to the photochemical reaction in the liquid crystal panel material) was 148 mW / cm ² . Here, the surface temperature of the lamp was about 300 ° C.

<Comparative Experiment Example 2>
According to the configuration shown in FIG. 7, a comparative ultraviolet irradiation device was produced. This ultraviolet irradiation device has a configuration in which the light source unit does not have a mantle tube in the ultraviolet irradiation device manufactured in Experimental Example 1, and instead of the light guide portion, a light irradiation opening (12) is provided. The ultraviolet light produced in Experimental Example 1 except that the auxiliary reflector (51A) is provided at the opening edge and the light transmitting window (12A) is provided at the light irradiation opening (12). It has the same configuration as the irradiation device, and the same reference numerals are given to the same constituent members for convenience. In FIG. 7, reference numeral 50A denotes a casing that divides a processing space inside.
Using this ultraviolet irradiation device, all the lamps (25) in the light source unit (20A) are turned on under the same lighting conditions, and ultraviolet rays are irradiated to the test liquid crystal panel material. The illuminance uniformity on the light irradiation surface of the test liquid crystal panel material was determined by measuring the illuminance and temperature at any plurality of measurement locations on the light irradiation surface of the panel material. The illuminance uniformity was ± 11.2%. It was confirmed that it was within the range. In addition, the average illumination intensity (Ea) in the light irradiation surface of the liquid crystal panel material for a test was about 21 mW / cm < ² >.
Further, it was confirmed that the temperature on the light-irradiated surface of the test liquid crystal panel material reached 45 ° C. ± 20 ° C. (degree of temperature rise) when 120 seconds had elapsed after the start of ultraviolet irradiation.

Furthermore, when the total radiant heat quantity of light in the wavelength range of 200 nm to 20000 nm was measured with a calorimeter, the total radiant heat quantity for the test liquid crystal panel material was 110 mW / cm ² , and of these, the wavelength range of 300 nm to 400 nm The amount of radiant heat by light other than ultraviolet light (light that does not contribute to the photochemical reaction in the liquid crystal panel material) was 89 mW / cm ² . Here, the surface temperature of the lamp was about 280 ° C., and the surface temperature of the light transmission window was 147 ° C.

As described above, according to the ultraviolet irradiation device according to the present invention, it was confirmed that high in-plane uniformity can be obtained with respect to ultraviolet illuminance and temperature on the light irradiation surface of the object to be processed.
It was also confirmed that the degree of temperature rise of the object to be treated due to ultraviolet irradiation can be reduced.

As mentioned above, although embodiment of this invention was described, this invention is not limited to said embodiment, A various change can be added.
For example, in the ultraviolet irradiation apparatus of the present invention, the number and arrangement method of the light source elements constituting the light source unit are not limited to those of the above-described embodiments, and can be appropriately changed in design according to the purpose.

DESCRIPTION OF SYMBOLS 10 Light source part 11 Light source part casing member 11A One end wall 11B Other end wall 12 Light irradiation opening 12A Light transmission window 13 One end side partition 13A Air guide vent 14 Other end partition 14A Exhaust vent 15 Light source unit arrangement space Reference numeral 16: Electrical component arrangement space part 18: Air guide space part 19: Air exhaust space part 20, 20A Light source unit 21: Light source element 22: Lamp holder 24 Mantle tube (tubular jacket)
24A Cooling air flow passage 25 Excimer discharge lamp (lamp)
26 Discharge vessel 26A Upper wall 26B Lower wall 27A One electrode 27B The other electrode 30 Reflective material layer 31 Glass powder layer 32 Phosphor layer 35 Transformer S Discharge space 40 Cooling part 41 Cooling part casing member 42 Cooling fan 43 Heat exchanger 45 Ventilation duct 50 Light guide part 50A Casing 51 Light guide member 51A Auxiliary reflecting plate 52A to 52D Plate member 53 Base member 54 Light reflecting member 55 Open / close door 58 Stage 59 Stage mount 60 Power supply part W Object 70 Liquid crystal panel 71 First glass plate 72 Active element 73 Liquid crystal driving electrode 74 Alignment film 75 Second glass plate 76 Color filter 77 Transparent electrode 78 Alignment film 79 Spacer member 80 Liquid crystal layer

Claims (4)

In an ultraviolet irradiation device used in a manufacturing process of a liquid crystal panel containing a photoreactive substance,
A long excimer lamp that emits light having an emission peak at a wavelength of 300 nm to 400 nm, and a cylindrical shape having openings at both ends having light transmittance, provided in a state in which the excimer lamp is inserted inside . A light source unit in which a plurality of light source elements configured by an elongated mantle tube are arranged in parallel to face a liquid crystal panel material that is an object to be processed;
A cooling mechanism having an air guiding space and an air discharging space ,
One end opening of the outer tube in each of the light source elements is located in a common air guide space portion, and the other end opening is located in a common air discharge space portion, and the outer tube of each of the light source elements is An ultraviolet irradiation device, wherein cooling air is introduced into the inside through a space for air guide .   The ultraviolet irradiation device according to claim 1, further comprising a light guide portion including a space in which an inner peripheral surface is formed by a reflection surface between the light source unit and the object to be processed. The ultraviolet irradiation apparatus according to claim 1 or 2, wherein the excimer lamp includes a discharge vessel having a rectangular cross section, and the outer tube is cylindrical . In the cooling mechanism , a circulating cooling air flow path is formed by the air guiding space and the exhaust air space, and a heat exchanger for heat dissipation is disposed in the circulating cooling air flow path. The ultraviolet irradiation device according to any one of claims 1 to 3.

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