TWI409848B - Ultraviolet radiation device - Google Patents
Ultraviolet radiation device Download PDFInfo
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- TWI409848B TWI409848B TW098114431A TW98114431A TWI409848B TW I409848 B TWI409848 B TW I409848B TW 098114431 A TW098114431 A TW 098114431A TW 98114431 A TW98114431 A TW 98114431A TW I409848 B TWI409848 B TW I409848B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
Abstract
Description
本發明是關於具備準分子發光的準分子燈的紫外線照射裝置，尤其是關於具備複數準分子燈的紫外線照射裝置。The present invention relates to an ultraviolet irradiation device including an excimer lamp for excimer light emission, and more particularly to an ultraviolet irradiation device including a plurality of excimer lamps.
習知，在半導體基板或液晶基板的製造工程，將此些基板的洗淨作為目的使用著具備照射真空紫外線的準分子燈的紫外線照射裝置。在具備此種準分子燈的紫外線照射裝置，有專利文獻1所述者。Conventionally, in the manufacturing process of a semiconductor substrate or a liquid crystal substrate, an ultraviolet irradiation device including an excimer lamp that irradiates vacuum ultraviolet rays is used for the purpose of cleaning these substrates. The ultraviolet irradiation device including such an excimer lamp is described in Patent Document 1.
針對於習知的紫外線照射裝置1，使用第6圖進行說明。The conventional ultraviolet irradiation device 1 will be described using FIG.
第6圖是表示習知的紫外線照射裝置1的說明圖，對於具備於紫外線照射裝置1的準分子燈2的管軸方向的斷面圖。FIG. 6 is an explanatory view showing a conventional ultraviolet irradiation device 1 and a cross-sectional view in the tube axis direction of the excimer lamp 2 provided in the ultraviolet irradiation device 1.
習知的紫外線照射裝置1是由具備照射真空紫外線的準分子燈2的燈單元11，及搬運被照射物W的搬運單元12所構成。The conventional ultraviolet irradiation device 1 is composed of a lamp unit 11 including an excimer lamp 2 that irradiates vacuum ultraviolet rays, and a transport unit 12 that transports the object W to be irradiated.
燈單元11是由：準分子燈2，及昇壓對於準分子燈2的饋電電壓的變壓器6，及保持準分子燈2與變壓器6的筐體3所構成，針對於該詳細的構成，說明如下。The lamp unit 11 is composed of an excimer lamp 2, a transformer 6 that boosts the feed voltage to the excimer lamp 2, and a casing 3 that holds the excimer lamp 2 and the transformer 6. For this detailed configuration, described as follows.
在筐體3，於其內部配置有準分子燈2與變壓器6，而在準分子燈2與變壓器6之間設有隔間壁32，設有配置有準分子燈2的光源部35與配置有變壓器6的電裝部 34。In the casing 3, the excimer lamp 2 and the transformer 6 are disposed therein, and a compartment wall 32 is provided between the excimer lamp 2 and the transformer 6, and a light source unit 35 and an arrangement in which the excimer lamp 2 is disposed are disposed. Electric part with transformer 6 34.
筐體3的電裝部34是由：載置變壓器6的隔間壁32，及被連接於隔間壁32而且圍繞變壓器6的四方的電裝部側側壁341(在第6圖的變壓器6的紙面左右方向的電裝部側側壁341，及位於紙面內深正前方的未圖示的電裝部側側壁)，及設置成在電裝部側側壁341作成蓋的頂板31所構成。The electrical component 34 of the casing 3 is composed of a partition wall 32 on which the transformer 6 is placed, and an electric component side wall 341 that is connected to the partition wall 32 and surrounds the transformer 6 (the transformer 6 in Fig. 6) The side wall 341 of the electric component side in the left-right direction of the paper surface, the side wall of the electric component side (not shown) which is located directly in front of the paper surface, and the top plate 31 which is provided as a cover on the side wall 341 of the electric component side.
筐體3的光源部35是由：保持準分子燈2的燈保持體36，及設有燈保持體36的隔間壁32，及被連接於隔間壁32而且圍繞準分子燈2的四方的光源部側側壁351(在第6圖的準分子燈2的紙面左右方向的光源部側側壁351，及位於紙面內深正前方的未圖示的光源部側側壁)所構成。The light source unit 35 of the casing 3 is composed of a lamp holder 36 that holds the excimer lamp 2, a partition wall 32 provided with the lamp holder 36, and a square that is connected to the partition wall 32 and surrounds the excimer lamp 2. The light source unit side wall 351 (the light source side wall 351 in the left and right direction of the excimer lamp 2 of Fig. 6 and the light source side wall (not shown) located directly in front of the paper surface) is constituted.
又，在光源部35，設有光透射窗4於光源部側側壁351成為蓋子。Further, in the light source unit 35, the light transmission window 4 is provided as a cover on the side wall 351 of the light source unit side.
為了電性地連接變壓器6與準分子燈2，在隔間壁32設有連通電裝部34與光源部35的貫通孔331，而在該貫通孔331，插通有電性地連接變壓器6與準分子燈2的饋電線5。In order to electrically connect the transformer 6 and the excimer lamp 2, a through hole 331 that connects the electrical component 34 and the light source unit 35 is provided in the partition wall 32, and the through hole 331 is electrically connected to the transformer 6. Feed line 5 with excimer lamp 2.
在隔間壁32的貫通孔331，為了空間性地隔開光源部35的內部與電裝部34的內部，而在插通饋電線5的狀態下設有密封體332。In the through hole 331 of the partition wall 32, in order to spatially separate the inside of the light source unit 35 from the inside of the electric component 34, the sealing body 332 is provided in a state in which the feed line 5 is inserted.
上述的燈單元11是設置成被載置於搬運單元12上，搬運單元12是由搬運被照射物W的複數滾子121， 及旋轉驅動各滾子121的驅動體122所構成。The lamp unit 11 described above is disposed to be placed on the transport unit 12, and the transport unit 12 is a plurality of rollers 121 for transporting the irradiated object W, And a driving body 122 that rotationally drives each of the rollers 121.
複數滾子121是排列成並行於燈單元11的光透射窗4的平面。The plurality of rollers 121 are planes arranged in parallel with the light transmission window 4 of the lamp unit 11.
上述準分子燈2是由例如封入有如氙氣體的發光氣體的例如石英玻璃所成的放電容器，及設於放電容器的外周面的外側電極，及設於放電容器的內周面的內側電極所構成。The excimer lamp 2 is, for example, a discharge vessel made of, for example, quartz glass in which a luminescent gas such as helium gas is enclosed, an outer electrode provided on the outer peripheral surface of the discharge vessel, and an inner electrode provided on the inner peripheral surface of the discharge vessel. Composition.
在準分子燈2的內側電極，經由饋電線5電性地連接有上述的變壓器6。又，在準分子燈2的外側電極，設有是例如不鏽鋼的電性傳導性的金屬構件所成的燈保持體36。The transformer 6 described above is electrically connected to the inner electrode of the excimer lamp 2 via the feed line 5. Further, a lamp holder 36 made of an electrically conductive metal member such as stainless steel is provided on the outer electrode of the excimer lamp 2.
在準分子燈2的內側電極及外側電極，經由變壓器6連接有未圖示的高頻電源，而外側電極是經由抵接的燈保持體36被接地。所以，在燈點燈時，從未圖示的高頻電源饋電至準分子燈2的內側電極，而在位於被饋電的內側電極與被連接地的外側電極之間的放電容器21的內部開始準分子發光，例如在200nm以下具峰值波長的真空紫外線照射於放電容器21的外方。A high-frequency power source (not shown) is connected to the inner electrode and the outer electrode of the excimer lamp 2 via a transformer 6, and the outer electrode is grounded via the lamp holder 36 that is in contact with each other. Therefore, when the lamp is lit, a high-frequency power source (not shown) is fed to the inner electrode of the excimer lamp 2, and the discharge vessel 21 is located between the inner electrode to be fed and the outer electrode to be connected. Excimer light emission is started inside, and for example, vacuum ultraviolet rays having a peak wavelength of 200 nm or less are irradiated to the outside of the discharge vessel 21.
從準分子燈2所照射的真空紫外線，是透射光透射窗4，而被照射於相對於光透射窗4被搬運的被照射物W。The vacuum ultraviolet ray irradiated from the excimer lamp 2 is transmitted through the light transmission window 4 and is irradiated to the object W to be irradiated with respect to the light transmission window 4.
搬運單元12的內部是大氣狀態，透射光透射窗4的真空紫外線，是在搬運單元12的內部被吸收在大氣中的氧氣，而發生臭氧氣體。所以，被照射物W是藉由真空紫外線與臭氧被處理。The inside of the transport unit 12 is in an atmospheric state, and the vacuum ultraviolet light transmitted through the light transmission window 4 is oxygen which is absorbed into the atmosphere inside the transport unit 12 to generate ozone gas. Therefore, the irradiated object W is treated by vacuum ultraviolet rays and ozone.
作為設於準分子燈2的變壓器6，例如有專利文獻2者，在構成變壓器6的構件有包括例如矽樹脂的樹脂構件者。樹脂構件是當直接照射真空紫外線就被分解而有劣化的問題，又藉由臭氧也被分解而有劣化的問題。For example, in the transformer 6 provided in the excimer lamp 2, the member constituting the transformer 6 includes a resin member including, for example, a resin. The resin member has a problem of being decomposed and degraded when directly irradiated with vacuum ultraviolet rays, and is also degraded by ozone to be deteriorated.
所以，在變壓器6與準分子燈2之間，設有藉由未透射真空紫外線的例如鋁的金屬構件所構成的隔間壁32。又，配置變壓器6的電裝部34，是為了防止臭氧的流進，構成密閉構造。Therefore, between the transformer 6 and the excimer lamp 2, a partition wall 32 composed of a metal member such as aluminum which does not transmit vacuum ultraviolet rays is provided. Further, the electrical component 34 of the transformer 6 is placed to prevent the flow of ozone, and constitutes a hermetic structure.
又，在上述，說明了有關具有光透射窗4的紫外線照射裝置1，惟在習知的紫外線照射裝置，也有如專利文獻3所述的未具有光透射窗者。又，如專利文獻3所述的準分子燈，是記載著一對電極設於放電容器的外面者。Further, in the above, the ultraviolet irradiation device 1 having the light transmission window 4 has been described. However, the conventional ultraviolet irradiation device also has a light transmission window as described in Patent Document 3. Further, the excimer lamp described in Patent Document 3 describes that a pair of electrodes are provided outside the discharge vessel.
又，在上述，說明了具備一支準分子燈2的紫外線照射裝置1。惟在習知的紫外線照射裝置，如專利文獻4所述地也有設置複數準分子燈者，記載著在各準分子燈設有個別的變壓器的情形。Further, in the above, the ultraviolet irradiation device 1 including one excimer lamp 2 has been described. However, in the conventional ultraviolet irradiation device, as described in Patent Document 4, a plurality of excimer lamps are also provided, and it is described that each of the excimer lamps is provided with an individual transformer.
專利文獻1：日本特開2001-243923號公報Patent Document 1: Japanese Laid-Open Patent Publication No. 2001-243923
專利文獻2：日本特開2005-260007號公報Patent Document 2: JP-A-2005-260007
專利文獻3：日本特開2004-097986號公報Patent Document 3: Japanese Laid-Open Patent Publication No. 2004-097986
專利文獻4：日本特開2003-303694號公報Patent Document 4: Japanese Laid-Open Patent Publication No. 2003-303694
作為最近的期望，配合被照射物W的大型化而有準分子燈2的長度化，又為了縮短處理時間而有提昇來自準分子燈2的真空紫外線的照度。所以，以提昇被輸入於準 分子燈2的電力作為目的，必須提昇對於變壓器6的輸入電力。對於變壓器6的輸入電力成為如500W的高輸入時，則配置於如電裝部34的密閉空間的變壓器6是被加熱，若在構成變壓器6的構件含有樹脂時，則有藉由加熱會劣化該樹脂的問題。As a recent expectation, the length of the excimer lamp 2 is increased in accordance with the increase in size of the irradiated object W, and the illuminance of the vacuum ultraviolet ray from the excimer lamp 2 is increased in order to shorten the processing time. Therefore, the promotion is entered in the standard For the purpose of the power of the molecular lamp 2, the input power to the transformer 6 must be increased. When the input power of the transformer 6 is as high as 500 W, the transformer 6 disposed in the sealed space of the electrical component 34 is heated, and when the member constituting the transformer 6 contains a resin, it is deteriorated by heating. The problem with the resin.
尤其是，具備複數準分子燈2，而在各準分子燈2設置個別的變壓器6的情形，在燈點燈時各變壓器6被分別加熱之故，因而由各變壓器6相鄰接的變壓器6被加熱。而有提早樹脂劣化的問題。In particular, when the plurality of excimer lamps 2 are provided and the individual transformers 6 are provided in the respective excimer lamps 2, the transformers 6 are separately heated when the lamps are turned on, and thus the transformers 6 adjacent to each of the transformers 6 are connected. It is heated. There is a problem that the resin is deteriorated early.
所以，為了冷卻配置變壓器6的電裝部34內部，考量例如在電裝部34的電裝部側側壁341設置通風口，而且在該通風口設置導管，俾將冷卻風從導管朝著電裝部34內部送風，進行冷卻變壓器6。Therefore, in order to cool the inside of the electrical component 34 of the transformer 6, it is considered that a vent is provided, for example, on the side wall 341 of the electrical component portion of the electrical component 34, and a duct is provided at the vent, and the cooling air is directed from the duct toward the electrical equipment. The inside of the unit 34 is blown, and the cooling transformer 6 is performed.
然而，在構成變壓器6的構件含有樹脂時，則如上述地，則劣化變壓器6的例如臭氧氣體的腐蝕性氣體不會混進冷卻風的方式，設置除掉腐蝕性氣體的過濾器等，有裝置會複雜化的問題。又，若設置導管，則也有裝置變大型化的問題。However, when the member constituting the transformer 6 contains a resin, as described above, the corrosive gas of the ozone gas of the deterioration transformer 6 is not mixed with the cooling air, and a filter for removing the corrosive gas is provided. The device will be complicated. Moreover, if a duct is provided, there is a problem that the apparatus becomes large.
如此地，本發明的目的是在於提供一種一面把電裝部密閉，一面冷卻其密閉的電裝部的內部的紫外線照射裝置。As described above, an object of the present invention is to provide an ultraviolet irradiation device that cools the inside of the sealed electrical component while sealing the electrical component.
本發明的第1項發明的紫外線照射裝置，屬於由放電容器與經由該放電容器的放電空間相對配置的電極所構成的準分子燈；及分別電性地連接於複數該準分子燈，且配 置成左右交錯狀的變壓器；及保持該複數準分子燈與該複數變壓器，而且具備設於該複數準分子燈與該複數變壓器之間的隔間壁的筐體；及在該筐體內經由該隔間壁來圍繞該複數變壓器的電裝部所構成的紫外線照射裝置，其特徵為：在該電裝部，設有具備冷卻液的流路的冷卻手段，在該各變壓器的外方，設有個別地圍繞該各變壓器，而且具備經由該變壓器相對的一對開口部的風洞體，該風洞體是分別設置成左右交錯狀，而沿著前述準分子燈的管軸方向延伸，在該電裝部內部，設有從該風洞體的一方開口部送風至另一方開口部的送風手段。An ultraviolet irradiation device according to a first aspect of the present invention is an excimer lamp comprising an electrode disposed opposite to a discharge space of the discharge vessel; and electrically connected to the plurality of excimer lamps, respectively a transformer that is arranged in a left-right staggered manner; and a housing that holds the plurality of excimer lamps and the plurality of transformers, and includes a partition wall disposed between the plurality of excimer lamps and the plurality of transformers; and An ultraviolet irradiation device comprising a wall portion surrounding an electrical component of the plurality of transformers, wherein the electrical component is provided with a cooling means including a flow path of the cooling liquid, and is provided outside the transformers There is a wind tunnel body that surrounds each of the transformers and has a pair of openings facing the transformer. The wind tunnel bodies are respectively arranged in a left-right staggered shape and extend along a tube axis direction of the excimer lamp. Inside the fitting portion, there is provided a blowing means for blowing air from one opening of the wind tunnel body to the other opening portion.
第2項發明的紫外線照射裝置，是在第1項發明的紫外線照射裝置中，該隔間壁是在其內部具備冷卻液的流路的冷卻手段所構成。In the ultraviolet irradiation device according to the first aspect of the invention, the partition wall is a cooling means including a flow path of the coolant therein.
第1項發明的紫外線照射裝置，是利用上述特徵，可冷卻變壓器。According to the ultraviolet irradiation device of the first aspect of the invention, the transformer can be cooled by the above features.
第2項發明的紫外線照射裝置，是利用上述特徵，藉由以冷卻手段所構成的隔間壁進行冷卻來自準分子燈的照射熱，可抑制變壓器受到照射熱被加熱的情形。According to the ultraviolet irradiation device of the second aspect of the invention, the irradiation heat from the excimer lamp is cooled by the partition wall formed by the cooling means, and the transformer can be prevented from being heated by the irradiation heat.
本發明的紫外線照射裝置，是在圍繞變壓器的電裝部設有具冷卻液的流路的冷卻手段，而在變壓器的外方設置具有一對開口部的風洞體，設有從風洞體的一方開口部送風至另一方的開口部的送風手段。In the ultraviolet irradiation device of the present invention, a cooling means having a flow path of a cooling liquid is provided around the electrical component of the transformer, and a wind tunnel body having a pair of openings is provided outside the transformer, and one side of the wind tunnel body is provided. The air blowing means that blows the air to the other opening of the opening.
首先，本發明的第1實施例的紫外線照射裝置，是針對於冷卻手段設於電裝部側側壁的構成加以說明。First, the ultraviolet irradiation device according to the first embodiment of the present invention will be described with respect to a configuration in which the cooling means is provided on the side wall of the electrical component portion.
第1圖是表示第1實施例的紫外線照射裝置1的說明圖，對於具備於紫外線照射裝置1的準分子燈2的管軸方向正交的斷面圖。第2圖是表示沿著第1圖的紫外線照射裝置1的準分子燈2的管軸方向的斷面圖(在第1圖中，紫外線照射裝置1的A-A斷面圖。1 is an explanatory view showing the ultraviolet irradiation device 1 of the first embodiment, and is a cross-sectional view orthogonal to the tube axis direction of the excimer lamp 2 provided in the ultraviolet irradiation device 1. Fig. 2 is a cross-sectional view showing the excimer lamp 2 of the ultraviolet irradiation device 1 of Fig. 1 in the tube axis direction (in the first drawing, the A-A cross-sectional view of the ultraviolet irradiation device 1).
又，在第1圖及第2圖，與表示於第6圖者相同者給予同一符號。In addition, in FIGS. 1 and 2, the same reference numerals are given to the same as those shown in FIG.
第1實施例的紫外線照射裝置1是由：具備照射真空紫外線的準分子燈2的燈單元11，及搬運被照射物W的搬運單元12所構成。The ultraviolet irradiation device 1 of the first embodiment is composed of a lamp unit 11 including an excimer lamp 2 that irradiates vacuum ultraviolet rays, and a transport unit 12 that transports the object W to be irradiated.
燈單元11是由：準分子燈2，及昇壓對於準分子燈2的饋電電壓的變壓器6，及保持準分子燈2與變壓器6的筐體3所構成，針對於其詳細構成說明如下。The lamp unit 11 is composed of an excimer lamp 2, a transformer 6 that boosts the feed voltage to the excimer lamp 2, and a casing 3 that holds the excimer lamp 2 and the transformer 6. The detailed configuration thereof is as follows. .
在筐體3，有準分子燈2與變壓器6配置於其內部，而在準分子燈2與變壓器6之間設有隔間壁32，設有準分子燈2所位置的光源部35及變壓器6所位置的電裝部34。In the casing 3, the excimer lamp 2 and the transformer 6 are disposed inside, and the partition wall 32 is provided between the excimer lamp 2 and the transformer 6, and the light source unit 35 and the transformer at the position of the excimer lamp 2 are provided. 6 positions of the electrical component 34.
筐體3的電裝部34是由：具有載置變壓器6的長方形平面的板狀隔間壁32，及連接於隔間壁32的長方形平面的周緣，而且圍繞變壓器6的四方的電裝部側側壁341(對於第1圖的隔間壁32的長方形平面朝垂直方向的紙面上方延伸的電裝部側側壁341，及對於第2圖的隔間壁32的長方形平面朝垂直方向的紙面上方延伸的電裝部側側壁341)，及設置於電裝部側側壁341作成蓋子的頂板31所構成的六面構造所成，而在其內部具有密閉空間。The electrical component 34 of the casing 3 is composed of a plate-shaped partition wall 32 having a rectangular flat surface on which the transformer 6 is placed, and a peripheral edge of a rectangular plane connected to the partition wall 32, and surrounding the electric component of the transformer 6 The side wall 341 (the electric component side side wall 341 which extends to the upper side of the paper surface in the rectangular plane of the partition wall 32 of FIG. 1 and the rectangular plane of the partition wall 32 of FIG. The extended electrical component side wall 341) and the six-sided structure of the top plate 31 provided on the electrical component side wall 341 as a cover have a sealed space inside.
在電裝部34的密閉空間配置有複數變壓器6，複數變壓器6是成為被圍繞於電裝部34的狀態。The complex transformer 6 is disposed in the sealed space of the electrical component 34, and the complex transformer 6 is in a state of being surrounded by the electrical component 34.
作為構成電裝部34的構件，例如有施以耐酸鋁處理的鋁或不鏽鋼所成的具耐臭氧性的金屬構件。As a member constituting the electrical component 34, for example, an ozone-resistant metal member made of aluminum or stainless steel treated with an alumite treatment is used.
筐體3的光源部35是由：保持準分子燈2的兩端的燈保持體36，及設有燈保持體36，而且具有長方形平面的板狀隔間壁32，及連接於隔間壁32的長方形平面的周緣，而且圍繞準分子燈2的四方的光源部側側壁351(對於第1圖的隔間壁32的長方形平面朝垂直方向的紙面下方延伸的光源部側側壁351，及對於第2圖的隔間壁32的長方形平面朝垂直方向的紙面下方延伸的光源部側側壁351)所構成的五面構造所成。The light source unit 35 of the casing 3 is composed of a lamp holder 36 that holds both ends of the excimer lamp 2, a plate-shaped partition wall 32 that is provided with the lamp holder 36, and has a rectangular plane, and is connected to the partition wall 32. The circumference of the rectangular plane and the light source side wall 351 of the quasi-molecular lamp 2 (the light source side wall 351 extending downward in the vertical direction with respect to the rectangular plane of the partition wall 32 of FIG. 1 and The rectangular plane of the partition wall 32 of Fig. 2 is formed by a five-sided structure formed by the light source side wall 351) extending downward in the vertical direction.
在光源部35，於光源部側側壁351作成蓋子而且相對於隔間壁32的方式設有透射真空紫外線的例如石英玻璃的構件所成的板狀光透射窗4。In the light source unit 35, a plate-like light transmission window 4 made of a member such as quartz glass that transmits vacuum ultraviolet rays is provided on the light source unit side wall 351 as a lid and is provided to the partition wall 32.
設有光透射窗4的光源部35是有複數準分子燈2配置於其內部，而複數準分子燈2是成為被圍繞於光源部35與光透射窗4的狀態。The light source unit 35 provided with the light transmission window 4 has a plurality of excimer lamps 2 disposed therein, and the plurality of excimer lamps 2 are surrounded by the light source unit 35 and the light transmission window 4.
作為構成光源部35的構件，例如有施以耐酸鋁處理的鋁或不鏽鋼所成的具耐紫外線性及耐臭氧性的金屬構件。The member constituting the light source unit 35 is, for example, a metal member made of aluminum or stainless steel treated with an alumite treatment and having ultraviolet resistance and ozone resistance.
在複數準分子燈2，分別設有個別的變壓器6。例如在第1圖中，記載著3支準分子燈2，各準分子燈2的下述的內側電極(在第1圖及第2圖未圖示，而在下述的第3圖的符號222)分別經由饋電線5電性地連接有個別的變壓器6。In the plurality of excimer lamps 2, individual transformers 6 are provided. For example, in the first drawing, three excimer lamps 2 are described, and the following inner electrodes of the excimer lamps 2 (not shown in FIGS. 1 and 2, and symbols 222 in the third diagram below) are described. An individual transformer 6 is electrically connected via the feed line 5, respectively.
為了插通電性地連接各準分子燈2與各變壓器6的饋電線5，在隔間壁32，設有連通電裝部34與光源部35的貫通孔331。設於隔間壁32的貫通孔331是設置成削除位於準分子燈2與變壓器6之間的隔間壁32的一部分，例如第1圖所示地設有3支準分子燈2時，則設有對應於各準分子燈2的3部位的貫通孔331。In order to electrically connect the excimer lamp 2 and the feeder 5 of each transformer 6, a through hole 331 that connects the electrical component 34 and the light source section 35 is provided in the partition wall 32. The through hole 331 provided in the partition wall 32 is provided to cut off a part of the partition wall 32 between the excimer lamp 2 and the transformer 6. For example, when three excimer lamps 2 are provided as shown in Fig. 1, Through holes 331 corresponding to the three portions of each of the excimer lamps 2 are provided.
在設於隔間壁32的貫通孔331，在插通有電性地連接準分子燈2與變壓器6的饋電線5的狀態下，為了空間地隔開成未連通光源部35的內部與電裝部34的內部，設置具耐臭氧性的例如聚丙烯所成的密封體332。In the through hole 331 provided in the partition wall 32, in a state in which the feed line 5 electrically connecting the excimer lamp 2 and the transformer 6 is inserted, the space and the inside of the unconnected light source unit 35 are spatially separated. Inside the mounting portion 34, a sealing body 332 made of, for example, polypropylene having ozone resistance is provided.
在電裝部34的內部，複數變壓器6，是被載置於隔間壁32而且圍繞其外方的方式設有風洞體72。Inside the electrical component 34, the plurality of transformers 6 are provided with a wind tunnel body 72 so as to be placed on the partition wall 32 and surround the outside.
風洞體72是表示於第1圖的斷面形狀構件，如第2圖所示地圍繞變壓器6外方的方式，設置成沿著準分子燈2的管軸方向延伸。在風洞體72，經由變壓器6設有相對的一對開口部721、722。風洞體72是設置複數成個別地圍繞配置於電裝部34內部的複數變壓器6。例如如第1圖地設有3具變壓器6時，則風洞體72也變壓器6別地設置，而設有合計3個風洞體72。作為構成風洞體72的構件，有具有電性絕緣性的例如玻璃環氧所成的樹脂構件。The wind tunnel body 72 is a section shown in Fig. 1. The shape member is disposed to extend along the tube axis direction of the excimer lamp 2 so as to surround the outside of the transformer 6 as shown in FIG. In the wind tunnel body 72, a pair of opposing opening portions 721 and 722 are provided via the transformer 6. The wind tunnel body 72 is provided with a plurality of transformers 6 disposed integrally around the interior of the electrical component 34. For example, when three transformers 6 are provided as shown in Fig. 1, the wind tunnel body 72 is also provided separately by the transformer 6, and a total of three wind tunnel bodies 72 are provided. As a member constituting the wind tunnel body 72, there is a resin member made of, for example, glass epoxy having electrical insulating properties.
在風洞體72一方開口部721，設有從一方開口部721朝另一方開口部722進行送風的例如冷卻風扇的送風手段71。送風手段71是為了冷卻變壓器6而設置之故，因而對應於各變壓器6的風洞體72別地被設置。In the opening portion 721 of the wind tunnel body 72, a blowing means 71 for cooling the fan from the one opening portion 721 to the other opening portion 722 is provided. Since the air blowing means 71 is provided for cooling the transformer 6, the wind tunnel body 72 corresponding to each transformer 6 is separately provided.
在電裝部34的內部，設有例如散熱器等的熱交換器的冷卻手段73。Inside the electrical component 34, a cooling means 73 of a heat exchanger such as a radiator is provided.
冷卻手段73是在電裝部34內部，經由送風手段71配置成相對於一方的開口部721。又，如第1實施例所示地，具備複數變壓器6的情形，冷卻手段73是為了有效率地冷卻複數變壓器6，配置複數成為相對於設在各變壓器的各風洞體的各一方的開口部72。[參照下述的第4(b)圖]。The cooling means 73 is disposed inside the electrical component 34 via the air blowing means 71 so as to be opposed to the one opening 721. Further, as shown in the first embodiment, in the case where the plurality of transformers 6 are provided, the cooling means 73 is for efficiently cooling the plurality of transformers 6, and the plurality of openings are arranged to be open to the respective ones of the respective wind tunnel bodies provided in the respective transformers. 72. [Refer to Figure 4(b) below].
在冷卻手段73，設有流路731成為冷卻液L供應，排出於其內部。In the cooling means 73, the flow path 731 is provided as the supply of the cooling liquid L, and is discharged inside.
如第2圖所示地，冷卻手段73的流路731，是從電裝部34的內部朝外部延伸的方式，從設於電裝部側側壁341的貫通孔342被導出。As shown in FIG. 2, the flow path 731 of the cooling means 73 extends outward from the inside of the electrical component 34, and is led out from the through hole 342 provided in the electrical component side side wall 341.
在電裝部側側壁341的貫通孔342與冷卻手段73的流路731之間，設有例如鋁所成的密封體343，而將電裝部34的內部構成密閉空間。A sealing body 343 made of, for example, aluminum is provided between the through hole 342 of the electrical component side side wall 341 and the flow path 731 of the cooling means 73, and the inside of the electrical component 34 constitutes a sealed space.
從電裝部34所導出的流路731，是在電裝部34的外部，設有未圖示的循環手段，則流路731內部的冷卻液L被循環。The flow path 731 which is led out from the electrical component unit 34 is provided with a circulation means (not shown) outside the electrical component 34, and the coolant L inside the flow path 731 is circulated.
上述的燈單元11是設成被載置於搬運單元12上。The lamp unit 11 described above is arranged to be placed on the transport unit 12.
搬運單元12是由：搬運被照射物W的複數圓筒狀滾子121，及對於各滾子121的中心軸進行旋轉驅動的驅動體122所構成。The transport unit 12 is composed of a plurality of cylindrical rollers 121 that transport the irradiated object W, and a drive body 122 that rotationally drives the central axis of each of the rollers 121.
複數圓筒狀滾子121，是排列成並行於燈單元11的光透射窗4的平面。The plurality of cylindrical rollers 121 are planes arranged in parallel with the light transmission window 4 of the lamp unit 11.
針對於具備於上述的燈單元11的準分子燈2的構成的一例子，使用第3圖進行說明。An example of the configuration of the excimer lamp 2 provided in the above-described lamp unit 11 will be described using FIG.
第3圖是表示第1圖所述的準分子燈2的說明圖。第3(a)圖是表示沿著構成準分子燈2的放電容器21的管軸方向的斷面圖，第3(b)圖表示對於構成準分子燈2的放電容器21的管軸方向正交的擴大斷面圖[參照第3(a)圖的B-B斷面的擴大圖]。Fig. 3 is an explanatory view showing the excimer lamp 2 shown in Fig. 1. Fig. 3(a) is a cross-sectional view taken along the tube axis direction of the discharge vessel 21 constituting the excimer lamp 2, and Fig. 3(b) is a view showing the direction of the tube axis of the discharge vessel 21 constituting the excimer lamp 2. An enlarged sectional view of the intersection [refer to the enlarged view of the BB section of Fig. 3(a)].
又，在第3圖中，在與表示於第1圖及第2圖者相同者給與同一符號。In addition, in the third figure, the same symbols are given to the same as those shown in the first and second figures.
準分子燈2是由：具有封入發光氣體的放電空間214的放電容器21，及經由放電空間214而相對配置的電極221、222所構成。The excimer lamp 2 is composed of a discharge vessel 21 having a discharge space 214 in which a luminescent gas is sealed, and electrodes 221 and 222 which are disposed to face each other via a discharge space 214.
放電容器21是由：圓筒狀外側管211，及位於外側管211的內部，而且具有比外側管211的直徑還要小徑的直徑的圓筒狀內側管212，及將圓筒狀外側管211的管軸與圓筒狀內側管212的管軸保持成一致，而且設於外側管211與內側管212之管軸方向的兩端的圓環狀端壁部213所構成的雙重管構造所成。The discharge vessel 21 is composed of a cylindrical outer tube 211 and a cylindrical inner tube 212 having a diameter smaller than the diameter of the outer tube 211 inside the outer tube 211, and a cylindrical outer tube The tube axis of the 211 is aligned with the tube axis of the cylindrical inner tube 212, and is formed by a double tube structure formed by the annular end wall portions 213 at both ends of the outer tube 211 and the inner tube 212 in the tube axis direction. .
在放電容器21，構成有藉由外側管211與內側管212及一對端壁部213所圍繞的放電空間214，而例如氙氣體的稀有氣體作為發光氣體封入於該放電空間214。The discharge vessel 21 is formed with a discharge space 214 surrounded by the outer tube 211, the inner tube 212, and the pair of end wall portions 213, and a rare gas such as helium gas is sealed as a luminescent gas in the discharge space 214.
作為構成放電容器21的構件，例舉有如石英玻璃地具有介質性，而且對具有200nm以下的峰值波長的真空紫外線具有光透射性的構件。The member constituting the discharge vessel 21 is exemplified by a dielectric property such as quartz glass and a light transmissive property to a vacuum ultraviolet ray having a peak wavelength of 200 nm or less.
在構成放電容器21的內側管212的內周面，設有圓筒狀內側電極222成為密接於其長度方向全面。The inner peripheral surface of the inner tube 212 constituting the discharge vessel 21 is provided with a cylindrical inner electrode 222 which is in close contact with the entire length direction.
又，在構成放電容器21的外側管211的外周面，設有網狀外側電極221成為密接於其長度方向全面。Further, on the outer circumferential surface of the outer tube 211 constituting the discharge vessel 21, the mesh outer electrode 221 is provided in close contact with the entire length direction thereof.
外側電極221與內側電極222，是藉由如此地設置，經由介質所構成的放電容器21的外側管211與內側管212及放電空間214被相對。The outer electrode 221 and the inner electrode 222 are disposed such that the outer tube 211 of the discharge vessel 21 formed via the medium faces the inner tube 212 and the discharge space 214.
作為構成內側電極222及外側電極221的構件，例舉具有電性傳導性的例如銅．鎳合金的金屬構件。As a member constituting the inner electrode 222 and the outer electrode 221, for example, copper having electrical conductivity is exemplified. A metal component of a nickel alloy.
在第3圖所表示的內側電極222及外側電極221，電性地連接有在第1圖所表示的變壓器6的未圖示的二次側，而變壓器6的未圖示的一次側電性地連接於未圖示的高頻電源。The inner electrode 222 and the outer electrode 221 shown in Fig. 3 are electrically connected to the secondary side (not shown) of the transformer 6 shown in Fig. 1, and the primary side of the transformer 6 is not shown. The ground is connected to a high frequency power supply (not shown).
又，在外側電極221的外周，設有例如施以耐酸鋁處理的鋁或不鏽鋼的金屬構件所成的燈保持體36，外側電極221是經由燈保持體36被接地。Further, on the outer circumference of the outer electrode 221, for example, a lamp holder 36 made of a metal member made of aluminum or stainless steel treated with an alumite treatment is provided, and the outer electrode 221 is grounded via the lamp holder 36.
上述第1實施例的紫外線照射裝置1是在燈點燈時，來自未圖示的高頻電源的饋電電壓藉由變壓器6被昇壓，而被饋電至準分子燈2。In the ultraviolet irradiation device 1 of the first embodiment, when the lamp is turned on, the feed voltage from the high-frequency power source (not shown) is boosted by the transformer 6, and is fed to the excimer lamp 2.
被饋電的準分子燈2是藉由一對電極221、222間的電位差，開始依被封入在放電容器21的內部的發光氣體所致的準分子發光，而發光氣體為例如氙氣體時產生在172nm以下具有峰值波長的真空紫外線。在放電空間214所產生的真空紫外線是透射放電容器21，而被照射至準分子燈2的外方。The excimer lamp 2 that is fed is excimer light emitted by the luminescent gas enclosed in the discharge vessel 21 by the potential difference between the pair of electrodes 221 and 222, and is generated when the luminescent gas is, for example, helium gas. Vacuum ultraviolet light having a peak wavelength below 172 nm. The vacuum ultraviolet rays generated in the discharge space 214 are transmitted through the discharge vessel 21 and are irradiated to the outside of the excimer lamp 2.
筐體3的光源部35是填充有例如氮氣體的惰性氣體之故，因而來自準分子燈2的真空紫外線，是不被吸收於惰性氣體，而透射光透射窗4而照射搬運單元12側。Since the light source unit 35 of the casing 3 is filled with an inert gas such as a nitrogen gas, the vacuum ultraviolet rays from the excimer lamp 2 are not absorbed into the inert gas, and are transmitted through the light transmission window 4 to be irradiated to the conveyance unit 12 side.
搬運單元12的驅動體121，是被連接於未圖示的電源，旋轉驅動各滾子121。被載置於滾子121上的被照射物W，是藉由滾子121的旋轉驅動被搬運，而相對於光透射窗4。例如在第1圖中，被照射物W是從紙面右側被搬運至紙面左側，被移動至相對於光透射窗4的下方側。The driving body 121 of the transport unit 12 is connected to a power source (not shown) to rotationally drive the respective rollers 121. The irradiated object W placed on the roller 121 is transported by the rotational driving of the roller 121, and is opposed to the light transmitting window 4. For example, in the first drawing, the object to be irradiated W is conveyed from the right side of the paper surface to the left side of the paper surface, and is moved to the lower side with respect to the light transmission window 4.
搬運單元12的內部是大氣環境之故，因而透射光透射窗4的真空紫外線是一部分被吸收於大氣中的氧氣，惟被搬運的被照射物W與光透射窗4被近接配置，在全部被吸收於氧氣之前被照射於被照射物W。The inside of the transport unit 12 is an atmospheric environment. Therefore, the vacuum ultraviolet light transmitted through the light transmission window 4 is a part of the oxygen absorbed into the atmosphere, but the conveyed object W and the light transmission window 4 are closely arranged, and are all disposed. It is irradiated to the irradiated object W before being absorbed by oxygen.
如第2圖所示地，被照射物W，是在紙面左右方向為大型的情形，藉由將準分子燈2配置成鋸齒狀(在第2圖中，在紙面正前方側，將一方的準分子燈2配置於紙面右側，而在紙面內深側，將另一方的準分子燈2配置於紙面左側)，來自準分子燈2的真空紫外線照射於被照射物W全體，而被處理。又，在搬運單元12的內部，真空紫外線被氧氣吸收而產生臭氧，藉由該臭氧，被照射物W是被處理。As shown in Fig. 2, the object to be irradiated W is large in the horizontal direction of the paper surface, and the excimer lamp 2 is arranged in a zigzag shape (in the second figure, one side is on the front side of the paper surface) The excimer lamp 2 is disposed on the right side of the paper surface, and the other excimer lamp 2 is disposed on the left side of the paper surface on the deep side in the paper surface, and the vacuum ultraviolet rays from the excimer lamp 2 are irradiated onto the entire object W to be processed. Further, inside the transport unit 12, vacuum ultraviolet rays are absorbed by oxygen to generate ozone, and the irradiated material W is treated by the ozone.
如上述地，第1實施例的紫外線照射裝置1，是筐體3的電裝部34的內部成為密閉空間之故，因而防止在搬運單元12所產生的臭氧流進電裝部34，可防止配置於電裝部34的內部的變壓器6被曝露在臭氧的情形。As described above, in the ultraviolet irradiation device 1 of the first embodiment, since the inside of the electrical component 34 of the casing 3 is a sealed space, it is possible to prevent ozone generated in the transport unit 12 from flowing into the electrical component 34 and prevent it from being prevented. The transformer 6 disposed inside the electrical component 34 is exposed to ozone.
第1實施例的紫外線照射裝置1是在燈點燈時，將對於準分子燈2的饋電電壓藉由變壓器6予以昇壓之故，因而變壓器6被加熱。針對於冷卻第1實施例的紫外線照射裝置1的變壓器6的構成及其作用‧效果，表示風洞體72，與此相較來說明。In the ultraviolet irradiation device 1 of the first embodiment, when the lamp is turned on, the feed voltage to the excimer lamp 2 is boosted by the transformer 6, so that the transformer 6 is heated. The configuration of the transformer 6 for cooling the ultraviolet irradiation device 1 of the first embodiment and its effect and effect are shown in comparison with the wind tunnel body 72.
第4(a)圖是表示比較例的紫外線照射裝置1的說明圖，沿著電裝部側側壁341的長度方向的斷面圖，第4(b)圖是表示第1實施例的紫外線照射裝置1的說明圖，沿著電裝部側側壁341的長度方向的斷面圖(在第1圖的C-C斷面圖)。4(a) is an explanatory view showing the ultraviolet irradiation device 1 of the comparative example, a cross-sectional view along the longitudinal direction of the electrical component side side wall 341, and a fourth (b) view showing the ultraviolet irradiation of the first embodiment. The explanatory view of the apparatus 1 is a cross-sectional view along the longitudinal direction of the electric component side side wall 341 (in the cross-sectional view of CC in Fig. 1).
又，在第4圖，與表示於第1圖及第2圖者相同者給予同一符號。In addition, in the fourth drawing, the same reference numerals are given to the same as those shown in the first drawing and the second drawing.
比較例的紫外線照射裝置1是未設置風洞體72之處，與第1實施例不相同。The ultraviolet irradiation device 1 of the comparative example is a place where the wind tunnel body 72 is not provided, and is different from the first embodiment.
比較例及第1實施例的紫外線照射裝置1是準分子燈2配置成鋸齒狀之故，因而變壓器6也配合於準分子燈2的排列而配置成鋸齒狀。藉此，電性地連接準分子燈2與變壓器6的饋電線5，是不會不期望地變長，而可將其處理作成簡便。In the ultraviolet ray irradiation apparatus 1 of the comparative example and the first embodiment, since the excimer lamp 2 is arranged in a zigzag shape, the transformer 6 is also arranged in a zigzag shape in accordance with the arrangement of the excimer lamp 2. Thereby, the excimer lamp 2 and the feeder 5 of the transformer 6 are electrically connected, and it is not undesirably lengthened, and the processing can be made simple.
比較例及第1實施例的紫外線照射裝置1是在燈點燈時，藉由未圖示的電源，送風手段71及冷卻手段73被運轉。In the ultraviolet irradiation device 1 of the comparative example and the first embodiment, when the lamp is turned on, the air blowing means 71 and the cooling means 73 are operated by a power source (not shown).
比較例及第1實施例的紫外線照射裝置1是藉由所具備的送風手段71，將冷卻風A送風至變壓器6。In the ultraviolet irradiation device 1 of the comparative example and the first embodiment, the cooling air A is blown to the transformer 6 by the air blowing means 71 provided.
如比較例的紫外線照射裝置1地，在所具備的複數準分子燈2設置個別的變壓器6的情形，則藉由送風手段71所送風的冷卻風A與變壓器6相撞之後會擴散。具體而言，如第4(a)圖所示地，冷卻風A相撞於變壓器6之後，紙面上側及下側的變壓器6，是冷卻風A擴散至沒有電裝部側側壁341的一邊，而紙面正中央的變壓器6，冷卻風A會朝紙面上下方向擴散。如此地，比較例的紫外線照射裝置1的情形，則對於相對於變壓器6的冷卻手段73的一邊相反側的冷卻會成為不充分。In the ultraviolet irradiation device 1 of the comparative example, when the individual transformers 6 are provided in the plurality of excimer lamps 2 provided, the cooling air A blown by the air blowing means 71 collides with the transformer 6 and then diffuses. Specifically, as shown in Fig. 4(a), after the cooling air A collides with the transformer 6, the transformer 6 on the upper side and the lower side of the paper is the side where the cooling air A is diffused to the side wall 341 where the electric component side is not provided. In the transformer 6 at the center of the paper, the cooling air A will spread toward the upper side of the paper. As described above, in the case of the ultraviolet irradiation device 1 of the comparative example, cooling on the opposite side to the cooling means 73 of the transformer 6 is insufficient.
第1實施例的紫外線照射裝置1的情形，在與比較例相同具備的複數準分子燈2設置個別的變壓器6，而且藉由具備風洞體72，可防止藉由送風手段71進行送風的冷卻風A相撞於變壓器6之後的擴散。具體地，如第4(b)圖所示地，在筐體3的電裝部34，設有個別地圍繞各變壓器6，而且具備經由變壓器6相對的一對開口部721，722的風洞體72，且送風手段71為設於風洞體72的一方的開口部721，而且藉由送風手段71有冷卻風A從風洞體72的 一方開口部721朝著另一方開口部722被送風。利用該構成，來自送風手段71的冷卻風A是經過風洞體72的內方而不會擴散，剛好噴在配置於風洞體72的內方的變壓器6，而適當地可冷卻被加熱的變壓器6。In the case of the ultraviolet irradiation device 1 of the first embodiment, the individual transformers 6 are provided in the plurality of excimer lamps 2 provided in the same manner as the comparative example, and by providing the wind tunnel body 72, the cooling air that is blown by the air blowing means 71 can be prevented. A collides with the diffusion after the transformer 6. Specifically, as shown in FIG. 4(b), the electric component 34 of the casing 3 is provided with a wind tunnel body that individually surrounds each of the transformers 6 and includes a pair of openings 721 and 722 that face each other via the transformer 6. 72, the air blowing means 71 is provided in one opening portion 721 of the wind tunnel body 72, and the cooling air A is provided from the wind tunnel body 72 by the air blowing means 71. One of the opening portions 721 is blown toward the other opening portion 722. With this configuration, the cooling air A from the air blowing means 71 passes through the inside of the wind tunnel body 72 without being diffused, and is just sprayed on the transformer 6 disposed inside the wind tunnel body 72, and the heated transformer 6 can be appropriately cooled. .
第1實施例的紫外線照射裝置1，是筐體3的電裝部34構成在密閉空間之故，因而從風洞體72的另一方開口部722導出藉由被加熱的變壓器6成為高溫的排熱風，而循環筐體3的內部。第1實施例的紫外線照射裝置1是在電裝部34的密閉空間設有具備冷卻液L的流路731的冷卻手段73，藉此來自被加熱的變壓器6的排熱風藉由冷卻手段73被熱交換，而可冷卻被密閉的電裝部34。該冷卻手段73是經由送風手段71，個別地相對配置於各變壓器6之故，因而可將藉由冷卻手段73被熱交換的冷卻風A適當地噴在各變壓器6。In the ultraviolet irradiation device 1 of the first embodiment, since the electrical component 34 of the casing 3 is formed in a sealed space, the hot air of the heated transformer 6 is discharged from the other opening 722 of the wind tunnel body 72. And the inside of the casing 3 is circulated. In the ultraviolet irradiation device 1 of the first embodiment, the cooling means 73 including the flow path 731 of the cooling liquid L is provided in the sealed space of the electrical component 34, whereby the exhaust heat from the heated transformer 6 is cooled by the cooling means 73. The heat exchange is performed to cool the sealed electrical component 34. The cooling means 73 are individually disposed opposite to each of the transformers 6 via the air blowing means 71. Therefore, the cooling air A which is heat-exchanged by the cooling means 73 can be appropriately sprayed on the respective transformers 6.
如上述地，第1實施例的紫外線照射裝置1是將電裝部34構成在密閉空間，在該電裝部34，設有具備冷卻液L的流路731的冷卻手段73，在該各變壓器6的外方，設有個別地圍繞該各變壓器6，而且經由具有經由該變壓器6相對的開口部721、722的風洞體72，在該電裝部34的內部，設有從該風洞體72的一方開口部721送風至另一方的開口部722的送風手段71，為其特徵者。藉此，第1實施例的紫外線照射裝置1，可防止來自外部的腐蝕性氣體進到電裝部34的內部，而藉由冷卻手段73進行熱交換而可防止電裝部34的內部成為高溫的情形，而藉由送風手段71可冷卻在被防止成為高溫的電裝部34的內部配置於風洞體72內方的變壓器6。As described above, in the ultraviolet irradiation device 1 of the first embodiment, the electrical component 34 is formed in a sealed space, and the electrical component 34 is provided with a cooling means 73 including a flow path 731 of the cooling liquid L. The outside of the six is provided to surround the transformers 6 individually, and the wind tunnel body 72 is provided in the interior of the electrical component 34 via the wind tunnel body 72 having the openings 721 and 722 opposed to the transformer 6. The one of the opening portions 721 that blows air to the other opening portion 722 is characterized by the air blowing means 71. As a result, the ultraviolet irradiation device 1 of the first embodiment can prevent the corrosive gas from the outside from entering the interior of the electrical component 34, and the heat exchange by the cooling means 73 can prevent the interior of the electrical component 34 from becoming hot. In other cases, the air blowing means 71 can cool the transformer 6 disposed inside the wind tunnel body 72 inside the electric component 34 that is prevented from becoming high temperature.
又，第1實施例的紫外線照射裝置1是針對於設置光透射窗4的構成加以說明，惟本發明的紫外線照射裝置1是可防止配置於電裝部34的變壓器6曝露於腐蝕性氣體就可以，若電裝部34的內部與光源部35的內部為未大氣地相連通的構成，則未設置光透射窗也可以。Further, the ultraviolet irradiation device 1 of the first embodiment is described with respect to the configuration in which the light transmission window 4 is provided. However, the ultraviolet irradiation device 1 of the present invention prevents the transformer 6 disposed in the electrical component 34 from being exposed to corrosive gas. If the inside of the electric component 34 and the inside of the light source unit 35 are connected to each other without being in the atmosphere, the light transmission window may not be provided.
又，具備於本發明的紫外線照射裝置1的準分子燈2，是經由放電空間214與介質21而相對配置有一對電極221、222，而照射真空紫外線者也可以，例如如上述的專利文獻3所示地，一對電極221、222設於放電容器21的外面的準分子燈2也可以。In addition, the excimer lamp 2 provided in the ultraviolet irradiation device 1 of the present invention may be provided with a pair of electrodes 221 and 222 disposed opposite to the medium 21 via the discharge space 214, and may be irradiated with vacuum ultraviolet rays, for example, as described in Patent Document 3 above. As shown, the pair of electrodes 221 and 222 may be provided on the outer surface of the discharge vessel 21 by the excimer lamp 2.
在上述第1實施例的紫外線照射裝置1中，在電裝部34的內部設置冷卻手段73，惟針對於以冷卻手段73構成隔間壁32的紫外線照射裝置1，作為第2實施例加以說明。In the ultraviolet irradiation device 1 of the first embodiment, the cooling means 73 is provided inside the electrical component 34, but the ultraviolet irradiation device 1 which constitutes the partition wall 32 by the cooling means 73 is explained as a second embodiment. .
第5圖是表示第2實施例的紫外線照射裝置1的說明圖，對於具備於紫外線照射裝置1的準分子燈2的管軸方向正交的斷面圖。FIG. 5 is an explanatory view showing the ultraviolet irradiation device 1 of the second embodiment, and is a cross-sectional view orthogonal to the tube axis direction of the excimer lamp 2 provided in the ultraviolet irradiation device 1.
又，在第5圖，與表示於第1圖者相同者給予同一符號。In addition, in FIG. 5, the same symbol is given to the same as that shown in the first figure.
表示於第5圖的紫外線照射裝置1，是以冷卻手段73構成隔間壁32之處，與表示於第1圖的紫外線照射裝置1不相同。The ultraviolet irradiation device 1 shown in Fig. 5 is a space where the partition wall 32 is constituted by the cooling means 73, and is different from the ultraviolet irradiation device 1 shown in Fig. 1.
作為表示於第5圖的紫外線照射裝置1的說明，省略了與在第1圖所表示的紫外線照射裝置1的說明共通的部分，針對於與第1圖不同處加以說明。The description of the ultraviolet irradiation device 1 shown in FIG. 5 is omitted, and the portion common to the description of the ultraviolet irradiation device 1 shown in FIG. 1 is omitted, and the difference from the first embodiment will be described.
載置變壓器6的隔間壁32，是藉由例如施以耐酸鋁處理的鋁的具有熱傳導性的金屬構件所構成，而在其內部設有流通冷卻液L的流路731，就可構成作為冷卻手段73。The partition wall 32 on which the transformer 6 is placed is formed of, for example, a metal member having heat conductivity which is treated with an alumite-treated aluminum, and a flow path 731 through which the cooling liquid L flows is provided inside the partition wall 32. Cooling means 73.
如此地，第2實施例的紫外線照射裝置1是隔間壁32以冷卻手段73所構成，而且以可進行電裝部34的密閉空間的熱交換的具熱傳導性的構件所構成，而在燈點燈時，奪取變壓器6的熱的排熱風藉由構成隔間壁32的冷卻手段73被熱交換，而可冷卻被密閉的電裝部34。In the ultraviolet irradiation device 1 of the second embodiment, the partition wall 32 is constituted by the cooling means 73, and is composed of a thermally conductive member capable of performing heat exchange in the sealed space of the electrical component 34, and the lamp is At the time of lighting, the hot exhaust air that has taken up the transformer 6 is heat-exchanged by the cooling means 73 constituting the partition wall 32, and the sealed electrical component 34 can be cooled.
又，在從準分子燈2所照射的光，真空紫外線以外也包括不同波長領域的光，而在該光中，也包括加熱隔間壁32的光。又，從準分子燈2，被饋電就被加熱之故，因而其輻射熱被放射。Further, the light irradiated from the excimer lamp 2 includes light of a different wavelength region in addition to the vacuum ultraviolet ray, and the light including the heating of the partition wall 32 is also included in the light. Further, since the excimer lamp 2 is heated by being fed, the radiant heat is radiated.
第2實施例的紫外線照射裝置1，是藉由冷卻手段73構成位於準分子燈2與變壓器6之間的隔間壁32，藉此將來自準分子燈2的照射熱或輻射熱藉由隔間壁32進行熱交換，而可防止變壓器6被加熱的情形。In the ultraviolet irradiation device 1 of the second embodiment, the partition wall 32 between the excimer lamp 2 and the transformer 6 is constituted by the cooling means 73, whereby the irradiation heat or radiant heat from the excimer lamp 2 is passed through the compartment. The wall 32 performs heat exchange to prevent the transformer 6 from being heated.
1．．．紫外線照射裝置1. . . Ultraviolet irradiation device
11．．．燈單元11. . . Lamp unit
12．．．搬運單元12. . . Handling unit
121．．．滾子121. . . Roller
122．．．驅動體122. . . Driver
2．．．準分子燈2. . . Excimer lamp
21．．．放電容器twenty one. . . Discharge capacitor
211．．．外側管211. . . Lateral tube
212．．．內側管212. . . Inner tube
213．．．端壁部213. . . End wall
214．．．放電空間214. . . Discharge space
221．．．外側電極221. . . Outer electrode
222．．．內側電極222. . . Inner electrode
3．．．筐體3. . . Casing
31．．．頂板31. . . roof
32．．．隔間壁32. . . Compartment wall
331．．．貫通孔331. . . Through hole
332．．．密封體332. . . Sealing body
34．．．電裝部34. . . Electric equipment department
341．．．電裝部側側壁341. . . Electric side section side wall
342．．．貫通孔342. . . Through hole
343．．．密封體343. . . Sealing body
35．．．光源部35. . . Light source department
351．．．光源部側側壁351. . . Side wall of light source
36．．．燈保持體36. . . Lamp holder
4．．．光透射窗4. . . Light transmission window
5．．．饋電線5. . . Feeder
6．．．變壓器6. . . transformer
71．．．送風手段71. . . Air supply means
72．．．風洞體72. . . Wind tunnel
721．．．一方的開口部721. . . Opening of one side
722．．．另一方的開口部722. . . The other opening
73．．．冷卻手段73. . . Cooling means
731．．．流路731. . . Flow path
A．．．冷卻風的流動A. . . Cooling wind flow
L．．．冷卻液的流動L. . . Coolant flow
W．．．被照射物W. . . Irradiated object
第1圖是表示第1實施例的紫外線照射裝置的說明圖。Fig. 1 is an explanatory view showing an ultraviolet irradiation device of a first embodiment.
第2圖是表示第1實施例的紫外線照射裝置的說明圖。Fig. 2 is an explanatory view showing an ultraviolet irradiation device of the first embodiment.
第3(a)圖及第3(b)圖是表示具備於本發明的第1實施例的紫外線照射裝置的準分子燈說明圖。3(a) and 3(b) are explanatory views showing an excimer lamp provided in the ultraviolet irradiation device according to the first embodiment of the present invention.
第4(a)圖及第4(b)圖是表示將比較例的紫外線照射裝置與本發明的第1實施例的紫外線照射裝置予以比較的說明圖。4(a) and 4(b) are explanatory views showing a comparison between the ultraviolet irradiation device of the comparative example and the ultraviolet irradiation device of the first embodiment of the present invention.
第5圖是表示本發明的第2實施例的紫外線照射裝置的說明圖。Fig. 5 is an explanatory view showing an ultraviolet irradiation device according to a second embodiment of the present invention.
第6圖是表示習知的紫外線照射裝置的說明圖。Fig. 6 is an explanatory view showing a conventional ultraviolet irradiation device.
1．．．紫外線照射裝置1. . . Ultraviolet irradiation device
11．．．燈單元11. . . Lamp unit
12．．．搬運單元12. . . Handling unit
121．．．滾子121. . . Roller
122．．．驅動體122. . . Driver
2．．．準分子燈2. . . Excimer lamp
3．．．筐體3. . . Casing
31．．．頂板31. . . roof
32．．．隔間壁32. . . Compartment wall
331．．．貫通孔331. . . Through hole
332．．．密封體332. . . Sealing body
34．．．電裝部34. . . Electric equipment department
341．．．電裝部側側壁341. . . Electric side section side wall
35．．．光源部35. . . Light source department
351．．．光源部側側壁351. . . Side wall of light source
36．．．燈保持體36. . . Lamp holder
4．．．光透射窗4. . . Light transmission window
5．．．饋電線5. . . Feeder
6．．．變壓器6. . . transformer
72．．．風洞體72. . . Wind tunnel
A．．．冷卻風的流動A. . . Cooling wind flow
W．．．被照射物W. . . Irradiated object
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| JPH08146097A (en) * | 1994-11-24 | 1996-06-07 | Advantest Corp | Integrated type hermetically closed cooling device for semiconductor ic tester |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI224342B (en) * | 2001-08-31 | 2004-11-21 | Honle Ag Uv Technologie Dr | UV irradiation device |
| JP2003303694A (en) * | 2002-04-08 | 2003-10-24 | Ushio Inc | Excimer light irradiation device |
| JP2005101062A (en) * | 2003-09-22 | 2005-04-14 | Ushio Inc | High-voltage pulse generator and discharge-excited gas laser device having the same |
| TW200714839A (en) * | 2005-10-13 | 2007-04-16 | Ushio Electric Inc | Ultraviolet illuminating device |
| TW200809977A (en) * | 2006-06-26 | 2008-02-16 | Applied Materials Inc | Nitrogen enriched cooling air module for UV curing system |
| JP2008043925A (en) * | 2006-08-21 | 2008-02-28 | Ushio Inc | Excimer lamp device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101603640A (en) | 2009-12-16 |
| KR101255408B1 (en) | 2013-04-17 |
| JP2009295923A (en) | 2009-12-17 |
| KR20090127804A (en) | 2009-12-14 |
| JP5195051B2 (en) | 2013-05-08 |
| CN101603640B (en) | 2013-05-08 |
| TW201009888A (en) | 2010-03-01 |
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