TW200809977A - Nitrogen enriched cooling air module for UV curing system - Google Patents

Abstract

A re-circulating cooling system can be used with a curing system in order to reduce the exhaust requirements for the system. Further, using a cooling fluid such as nitrogen reduces the production of ozone and the sealing requirements for the system. A simple heat exchanger can be used betweenreture and supply reservoirs in order to remove heat added to the re-circulating fluid during circulation past the curing radiation source. The nitrogen can come from a nitrogen source, or from a membrane or other device operable to split feed gas into its molecular components to provide a source of gas rich in nitrogen. An ozone destruction unit can be used with such a cooling system to reduce the amount of ozone to acceptable levels, and to minimize consumption of the nitrogen. A catalyst can be used to deplete the ozone that does not get consumed during the reaction.

Description

200809977 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to a body module for use in an ultraviolet curing system. [Prior Art] Materials such as oxidized stone (S i Ο x ), Carboniferous fossil (ς · , ), and antimony-doped oxidized stone oxide (SiOCx ) films have been found to be widely used in semiconductors. Forming a chemical vapor deposition (CVD) process within the 矽 $ on a semiconductor substrate

One method of making a film is through a chamber. For example, a chemical reaction between the helium supply source and the oxygen supply source may result in deposition of (5) sub-solid phase ruthenium oxide on top of the semiconductor substrate disposed within the CVD chamber. In another embodiment, the tantalum carbide and carbon doped ruthenium oxide film can be formed by a CVD reaction of an organic decane source comprising at least one si_C bond. Water is usually a by-product of the CVD reaction of the organodecane compound. Thus, water can be physically adsorbed into the film in the form of water vapor or chemically bonded to the deposited film by si_〇H. Any of these forms of water binding is generally undesirable. Therefore, undesired chemical bonds and compounds such as water are preferably removed from the deposited carbon-containing film. Also, in some specific CVD processes, it is desirable to remove the thermally unstable or unstable organic portions of the sacrificial material (caused by the porogen used to increase porosity during CVD). One known method for solving this problem is conventional thermal annealing. The energy from this annealing replaces the undesired chemical enthalpy of the unstable 6 200809977 with the more stable bond properties of the ordered film, thereby increasing the film density. Conventional thermal annealing steps typically have a relatively long duration (e.g., typically 30 minutes to 2 hours), thus consuming a significant amount of processing time and eliminating the overall manufacturing process. Another method to solve these problems is post-treatment of films (such as yttria, tantalum carbide, and carbon-doped oxide oxide films) that utilize ultraviolet (UV) radiation to facilitate CVD production. For example, U.S. Patent Nos. 6, 5 6 6, 2, 7 8 and 6,614, 181, both of which are incorporated herein by reference in their entireties in- Use of UV light. The use of UV radiation for hardened and dense cvd films can reduce the overall thermal budget of individual wafers and speed up the manufacturing process. A variety of U V hardening systems have been developed which can be effectively used for hard 4 fc» films deposited on substrates. One of the embodiments is described in U.S. Application Serial No. 11/124,90, filed on May 19, 2006, which is incorporated herein by reference in its entirety, assigned to All contents are for reference. Since the UV source used for hardening accumulates heat over time, which negatively affects the component being processed and shortens the life of the UV source itself, it is desirable to cool these existing UV and other hardening sources and to cool the electronic components and various other components. Typically, an open loop system, such as the apparatus 100 shown in Figure i, is used, wherein the blower 106 is used to direct ambient air into the end of the uv source (such as for directing UV radiation to the process (hardening) chamber i 〇 4 of the UV lamp module 102). An exhaust port 108 is provided at the other end of the UV source such that hot air is drawn from the lamp module to remove heat from the module 102. There are various disadvantages to the party's 200809977 law. One downside is that the hot air must drain out of the system, adding to the cost and complexity of the total exhaust. Another disadvantage is that the use of gas causes a large amount of milk to leak into the lamp holder group and/or the hardening chamber. Oxygen limits the wavelength in the UV spectrum at which the system can operate, because low wavelengths (e.g., below 200 nm) tend to be trapped by oxygen. It is possible to reduce the sealing requirements of the hardening system to a certain extent, which again increases the cost and complexity of the hardening system. Another problem is that a small amount of ozone is produced in the system in which any oxygen in the system is exposed to UV. The ozone causes gas in the system. In addition, there is a strict requirement for the amount of ozone present in the system. The continuous generation of ozone during the treatment may result in an undesired degree of ozone to be detected and solved before continuing to be processed). Due to these and other missing reasons, despite the development of various hardening techniques, other changes in this important technical field continue to be sought. SUMMARY OF THE INVENTION Systems and methods for recirculating fluids in a UV hardening system are provided in accordance with various embodiments of the present invention, such as by utilizing a cooling system or a closed-loop eo〇ling CLCS. This recirculation can reduce the venting of the hardening system and seal the use of circulating fluids such as nitrogen, as well as reduce ozone in the system and can allow the hardening system to be operated at lower wavelengths. The recirculation line has a lighter ambient air, but is exposed to consumption. And in the case that it must still be recirculated or recirculated, it can be re-produced. It can also be used to reduce the density of ozone in the recirculating fluid.

In one embodiment, a system for providing cooling to a UV hardening system comprising a UV lamp housing and a hardening chamber includes a supply container that can be used to contain a quantity of fluid. A flow generating device, such as a blower, can direct fluid flow from the supply vessel through the UV light source such that the fluid flow can remove thermal energy from the UV light source. A circulation line connected to the hardening chamber can receive the heated fluid stream and direct the heated fluid stream to the circulation vessel. The heat exchanger disposed between the circulation vessel and the supply vessel along the flow path can remove thermal energy from the heated fluid stream, wherein the fluid stream can be directed back to the supply vessel for recycling to the cooling fluid. The fluid can be any suitable liquid or gas, such as nitrogen or a nitrogen rich gas. The gas separation module can be used to accommodate a feed air stream and separate at least one component of the feed air to produce a fluid source for the supply vessel. The gas separation module can include a gas separation membrane that, for example, can accommodate a feed air stream and produce a nitrogen stream. In one embodiment, the air module is configured to generate a flow of recirculating cooling fluid for the radiant stiffening device. The module contains a supply container that can be used to contain and contain a quantity of fluid. The flow generating device can direct fluid flow from the supply container to the radiation hardening device, and the fluid flow can be used to remove thermal energy from the hardening device. The return container can accommodate the heated fluid stream exiting the radiation hardening device. The module can also include a heat exchanger disposed between the return container and the supply container along a fluid path. The heat exchanger can remove thermal energy from the heated fluid stream and direct the fluid stream back into the supply vessel. In one embodiment, a method of cooling a UV hardening system includes directing a flow of cooling fluid from a supply vessel through a source of UV light, the fluid flow being available.

200809977 to remove heat from UV light sources. The heated cooling fluid chamber is directed to the return vessel' and from the heated cooling fluid. The hot cooling fluid is then directed back to the supply volume and the cooling fluid can be used to recirculate through the UV light source. In one embodiment, a system for reducing the presence of a UV hardening system includes: a supply container for containing a quantity of fluid to direct flow of fluid from the supply container through a source of UV light such that fluid flow can be removed from The thermal energy of the UV light source. The first delivery channel of the chamber can accommodate the heated fluid stream heated to the ozone destruction unit. The ozone destruction unit heats the fluid stream and reduces the concentration of ozone contained therein. A second transport conduit connecting the ozone destruction unit and the supply vessel directs the ozone-reducing fluid stream back into the supply vessel. The ozone is broken to include a catalyst selected to cause a flow with the heated stream, and at least one of the agents which decomposes any ozone contained in the fluid may be any suitable catalyst for decomposing ozone, 1 Mn〇2/CuO, Mn. 〇2/CuO/Al2〇3, activated carbon, Pd/Mn〇2, yttrium aluminum, Μη02 based catalyst and noble metal pt/pd catalyst. It is contained in the ozone destruction device in the form of a sphere, or it may be in the form of a coating in a honeycomb (honeycomb) and a radiation device. In one embodiment, the scumming device for reducing the UV hardening tool comprises a housing that exits the fluid flow inlet of the hardening tool and is used for output reflow to remove from the hardening stream In the heat exchanger, the ozone in the system is connected to the hard-acting device and connected to the hard portion to accommodate the passage, and then the channel can guide the reverse portion of the unit body flow. f f, such as selected from Pd/Mn02/catalyst, can be used in the ozone depletion of a medium ozone tank.

200809977 The outlet of the ozone-reducing fluid stream of the hardening tool. Flow is configured in the tank to direct fluid flow contained in the tank, the flow path having a shape such that the fluid flow has a selected residence time in the flow path for a given flow rate. The catalyst is placed on the surface of the flow path, or in the moving path, the residence time of the fluid flow in the flow path in contact with the catalyst. The catalyst is selected to cause a reaction with the fluid stream that contains at least a portion of any ozone contained in the fluid, thereby producing a tank output and recycling back to the ozone-reducing stream output in the hardening system. The flow path can be, for example, in the form of a radiator or a bee. In one embodiment, a method of reducing ozone in a UV hardening tool includes accommodating a heated fluid exiting the UV hardening tool, flowing a flow path having a length and shape, directing the heated fluid flow, for a given flow The flow rate has a selected stop in the flow path. The flow path has a catalyst disposed on its surface, or a package wherein the fluid flow in the flow path contacts the catalyst for a selected residence time. The catalyst is selected to cause a reaction with the fluid stream&apos; at least a portion of any ozone contained in the decomposition body. The reduced odor fluid stream is then directed back from the flow path to the UV hardening tool, where the flow can be recirculated by the UV hardening tool. Other embodiments of the invention will be apparent to those skilled in the <RTIgt; [Embodiment] In the path length, the flow is selected to decompose from the body cavity. Along with the flow of oxygen in the flow of oxygen contained in the flow 11 200809977

The systems and methods in accordance with various embodiments of the present invention can overcome the aforementioned and other deficiencies in existing hardening and other applications that utilize radiation. In one embodiment, the hardening module is used to cool a radiation source (eg, a UV lamp) 'a cooling module can be used to recirculate a cooling fluid (eg, nitrogen) through the source to reduce the line or manufacturing tool on the exhaust system. Load. The recirculation of the selected fluid can also reduce and/or eliminate the sealing requirements of the system user as compared to the introduction of the air stream into the system, since the selected cooling fluid / 3⁄4 leaks into the system relative to the water vapor and Feeding air is less important, such as 'it can include a higher degree of oxygen. The module can use a simple heat exchanger that utilizes cooling water, such as process water or other suitable liquid, to remove heat from the recirculating fluid. The cooling module can utilize at least one coaxial blower (or other fluid drive) to generate and direct high velocity flow of fluid (such as pressurized gas) to the radiation source, for example, which can be included in the UV lamp module. Magnetron and uv bulbs. In one embodiment, pure nitrogen and/or nitrogen-enriched air is used as a recycle fluid to reduce the formation of ozone within the cooling system. The use of pure nitrogen can also reduce the amount of UV radiation absorbed by the oxygen in the recycled fluid (especially at wavelengths less than 200 nm), thereby increasing the UV density or the irradiation/catalyst to the workpiece exposed to the uv radiation can be The recycling system is used internally to remove any residue: ozone. In one embodiment, the ozone destruction unit is embedded or otherwise integrated into the recirculation system to reduce the corresponding consumption of #g Θ 〆 〆 以及 and purge nitrogen, as exemplified by ^ ^. The fluid is entangled by the radiation source so that no external heat suppression is required for the catalyst to achieve high smear destruction efficiency. Ten Milk 12

200809977 Figure 2 illustrates an exemplary hardening system that may include an integrated recirculating cartridge cooling system in accordance with an embodiment of the present invention. The particular hardening system includes - for the lamp modules 2〇2, 2〇4, The lamp is comprised of a magnetron and a UV lamp (Hg bulb) to provide UV hardened UV radiation. Each of the lamp modules 2, 2, 204 directs UV radiation to each of the chambers 206, 208, or a portion of the processing chamber, as discussed above in the art, each of which can be used for each workpiece (such as abundance ) UV hardening. Each lamp module has pressure sensors 222, 226 and temperatures 224, 228 for monitoring the pressure and temperature of the various lamps. These sensors can be used to adjust the flow of fluid through the lamp mode (such as nitrogen), and/or adjust the temperature of the recirculating fluid by adjusting the amount of cooling fluid exchanged by the flow of heat, as described below in this embodiment. Each of the lamp modules 202, 204 has a respective blower 2 1 0, 2 1 2 and can be used to guide the cooling fluid to be controllable in each module. The blower can be any suitable device that can be used to generate and/or direct cold flow to the various modules, such as a blower that produces about 1400 CFM of cooling fluid per chamber. It should also be understood that each module or chamber has a blower because the blower of the example can be used to provide flow for successive diverging and directing into separate mold chambers. The blower 2 1 0, 2 1 2 can direct the cooling supply chamber 214 from the cooling fluid supply (should 214 or other (typically positive pressure) fluid source) to receive a purge gas stream, such as a pure nitrogen or nitrogen gas, to replace The process that can be applied due to the 200 〇 module that is leaked or used during the cooling or recycling process is known and the flow of the 218 〇 感 感 感 感 感 导体 导体 导体 导体 导体 却 却 却 却 却 却 却 却 却 218 Techniques and / chambers such as fluids. Enhance gas consumption 13 200809977

And any gas that is lost. Supply chamber 214 may also have at least one gas sensor, such as oxygen sensor 220 for monitoring the degree of oxygen in the recirculating fluid. The blower can direct cooling fluid through the lamp mold papers 202, 204 into the respective hardening chambers 206, 208, and then the heated fluid can be directed through the recirculation lines 230, 232 to the return chamber 216 for receiving the heated fluid. Or in other chambers or containers. The heat exchanger 218 can be placed between the return time 216 and the supply chamber 2 14 or at least along the flow path between the return chamber and the supply chamber so that the fluid guide can be returned before returning to the lamp module The recirculating fluid removes heat. In one embodiment, the hardening system is a UV hardening system comprised of one or more UV modules, one or more UV modules including, but not limited to, UV lamps that are energized by microwave, RF, and/or DC energy sources. The UV source can be designed or selected to cater for specific UV spectral distribution requirements to perform hardening and chamber cleaning by using one, two or more different types of UV lamps within the same array inside the chamber cavity (eg, Low pressure Hg, medium pressure Hg, high pressure Hg, etc. are achieved. The chamber cavity can be used to support the thermal susceptor under vacuum, wherein a workpiece, such as a twine, can be placed during the hardening process to receive UV energy. A sufficient amount of cooling fluid is directed into the lamp module to cool the magnetron and the UV lamp. For an exemplary dual scan source (DSS) UV chamber 'each chamber requires approximately i4 〇〇 cfm of cooling air for 3 DSS Nanocure UV chambers (Nanocure UV chambers are available from CA, Santa A Producer SE system purchased by Clara Applied Materials Ltd. requires 4200 CFM of cooling air. This may be very much for the equipment 14 200809977 exhaust system and; and there is a rebate ring device that may increase the capacity of the consumer manufacturing equipment. ° shown in Figures 3(a) and 3(b) In one embodiment, the recirculating cooling air device 300 includes a pair of coaxial line fans 308, 310. The returned hot air is received from the return conduit 312 (and any desired extension conduit 3 1 4) into the return vessel 312 and then cooled by the water-cooled heat exchanger 3〇6 before returning to the supply vessel 404. The makeup gas stream is used to compensate for any leakage in the recirculation loop device. The pellet or honeycomb catalyst 316 described above may be placed therein in the return vessel 302, but in at least some embodiments, it is placed in the extension conduit 314 for convenience. Figures 4(a) and 4(b) illustrate an exemplary blower 400 that can be used in the cooling air unit. The blower 400 includes a rotatable fan 402 that can be used to direct the proper flow of fluid to cool the various UV lamp modules, such as at least a 7'' water level gauge forced air flow. The illustrated blower includes a connector 406 and a liquid sealing component 408. And the nameplate 412 and the oscillating damping material 410. It can be seen that the connection point 4〇4 is located equidistantly near the periphery of the rotating fan to balance the blower and reduce oscillations in the device. The blower can be, for example, AMETEK13 available from Kent, Ohio.

Technical &amp; Industrial Pr〇ducts Purchased amE: TEK® Rotron 041-402000 Model ° An important issue is that ozone build-up in recirculation will exceed 0SHA or other application standards. The recirculation system according to one embodiment uses pure nitrogen as a supplemental gas to alleviate this problem. Purification of nitrogen can remove 15 200809977 and / or reduce the oxygen concentration in the recirculation device to the top, T "private" is less than about i%. The oxygen sensor can be integrated into the recirculation system to monitor the oxygen concentration inside the recirculation valve to maintain delta and proper purge of the gas. As above =, the flow of nitrogen or nitrogen enhancing gas can be used as a recirculating cold, body: due to the need for a stable nitrogen source such as a leak or absorption to supplement the supply in the cooling system. As is well known in this ^ ^ woven, due to the provision of pure nitrogen flow can be t; the secret Aβ &gt; this increased cost and the complexity of the system, the cooling fluid system may combine the energy to flood the preparations &amp; Friends Μ King produces a nitrogen device that is messy or chaotically enhanced. A device &amp; a human seedling is placed as a membrane-containing device and can be used from the wheel to the end of the tubular membrane, the orifice, and the nitrogen stream, for example. The film 5 is shown in Fig. 5, and the shape (which will also contain a certain degree of water vapor) is sent to the end of the :. As the air passes through the membrane, a large amount of oxygen (and other elements) will pass through the deer: the wall, so that the air passing through the output of the tubular membrane is essentially nitrogen, or at least 5, compared to the feed air to the official membrane, at least significant The added part is ft A ', 虱虱. An exemplary membrane system is used to separate two gases into two streams, one of which is substantially nitrogen, by transporting compressed air through a separate core fiber, semiconductor film, and separating air into its constituent gas film. Another _ _ JLj ^ 匕έ gas, carbon dioxide and other trace gases. Millions of fibers, about the size of human hair, can be bundled into a single module. This provides a very large membrane surface area effective to produce a large nitrogen high purity product stream. One example of such a membrane system is the MG Generon® 6500 nitrogen membrane available from Innovative Gas Systems (IGS) of CA. The device ensures that proper nitrogen, such as about 250 liters per minute, can be used to inject into the system. Figure 6 shows an overall U V hardening system 600 with control 16 200809977 and cooling in accordance with one embodiment of the present invention. It can be seen that the overall system can be controlled and/or monitored by using system controller 602. The system controller can be any suitable combination of hardware and/or software known or used in the industry to receive signals indicative of conditions and/or system parameters of various components and to generate control signals to control and adjust various components and/or Or teach. In one embodiment the 'controller' takes the form of a personal electrical month g with a variety of signal inputs and outputs, and the computer has an indication of the various points of the monitoring and control system.

The system controller 602 in Figure 6 is shown to communicate various components such as a blower (for monitoring and/or air fan speed) and a light module (for monitoring and controlling the generation of radiation in the system). The system controller can also be used to communicate with other sensors and monitoring devices, such as those found elsewhere and in monitoring systems known in the art. For example, system controller 602 is in communication with nitrogen generator 604. As described above, the nitrogen generator receives the feed air stream and separates the constituent air, resulting in a flow of nitrogen directed into the supply vessel. System controller 602 can receive a signal (such as a monitoring signal from the nitrogen monitor indicating the concentration of nitrogen directed into the nitrogen container). If the flow from the nitrogen generator or other nitrogen source is insufficient, the system monitor can generate a control signal that indicates the nitrogen generator or source to increase the flow of nitrogen into the system. If the system controller informs that the nitrogen content is below the nitrogen threshold, such as may be stored in the system's data storage device 608, then the system controller may generate an alarm signal indicating that the nitrogen generator is not functioning properly and may require repair (such as catalyst replacement) ). The system controller can communicate the alert signal to an appropriate device (such as an alarm that alerts the system operator). In this embodiment, the signal transmission 17 200809977 is given to the user interface device 606 (such as a personal computer or a wireless PDA that allows the user or operator of the system to know the nitrogen generating attention). The user interface may also allow the user or operator to observe the parameters of the control and the components of the system, and may allow the user to either manipulate or control various settings and parameters of the system operation, as is known in the art. As will be apparent to those of ordinary skill in the art

Receiving signals from appropriate sensors, the system controller can monitor various aspects of the system (such as flow rate, pressure, temperature, gas, etc.) and can alert the operator and/or control component to adjust or execute the high Required repairs. For example, the system controller can control the speed of the air conditioner, and can adjust the speed of the air blower to the flow rate, and the description here and the soil. A, _ ^ move 4, for the ordinary person skilled in the art, Various other uses of the user and the data storage device are obvious.

Fig. 7 shows the supply of the uv hardening system to the supply container. The exemplary method 700 according to one embodiment of the present invention. In this method, 702 is purified. As noted above, this can be pure nitrogen or a gas 'e.g., ν and can be produced by a suitable device, such as a component separation. Nitrogen is directed via at least one blower to at least one of the 704 gases passing through the lamp module and each of the hardening chambers 706, and upon entering the returning, bitter, and ww system 7 0 8, thereby from the lamp module and Hardened to remove heat. The hot nitrogen ritual enters the return container 7丨〇, and then passes through the heat exchange, the heat is removed from the return gas), and is sent back to the supply container. 4 The enabled device requires various supervisors to adjust the audience. Degree of overall parameter cooling system. According to the system control and application to the cooling nitrogen source, the rich gas is separated from the membrane and the lamp module is exited from the chamber chamber 712, 714 〇 18

K2( cm6/( k3 ( 1/s) 200809977 If the hardening process continues 716, then pass through the lamp module and the processing chamber through each blower. Otherwise, the cycle process is terminated as described above, the recirculating cooling system is not sealed Such air (typically containing 20.9% oxygen) may leak, or the presence of helium oxygen into the recirculation system may be due to the formation of ozone by UV radiation, such as by oxygen species from the following known in the art. Forming and destroying atmospheric ozone: 〇2 + hv — 20 ki ( 1/s )

Ο + 02 + Μ ^ 〇3 + M 〇3 + hv-&gt;0 + 〇2 k4( cm3/(" where 〇 is an oxygen atom, 〇2 is an oxygen molecule, 〇3 is an ozone 疋 ultraviolet radiation photon, and M Any non-stabilizing ozone that can absorb the energy released in the second radiation of the second oxygen atom). If M does not absorb excess oxygen, it is not a very stable molecule and tends to decompose back. 〇和. Given by k 1...k 4. In order to be consistent with rules (such as current OSHA rules), the uv cooling system maintains an ozone density below about ppm8 ppm which may need to be reduced or destroyed in the system. The ozone generated in the ozone system can be attached to the cooling system to control the odor circulating in the system. The ozone destruction unit utilizes the catalyst to react oxygen because the active ingredient will not be eliminated. In addition, no additional reaction of the catalyst is required. Heat (energy), such as by introducing the gas 718 通过 by the following method, a small amount of reflux, resulting in a small amount of giving &gt; sub 2^)) &gt; sub 1s1 )) molecule, hv (from oxygen and radioactive energy , the stinky speed constant needs to be Then, oxygen destroys the amount of monooxygen. In order to reduce the odor for these programs given 19 200809977: 03 + Μ — M-0 + 〇 2 03 + M-0 — Μ + 2〇2 It can be seen that these reactions The end result is a simple inactive substance (already present) and oxygen.

The ozone destruction unit in one embodiment comprises a low temperature oxidation catalyst such as Carulite® (a volatile organic compound destruction catalyst available from Carus Chemical Company of Peru, IL and registered trademark), PremAir® (Ozone Destruction Catalyst, Available from Engelhard Corporation of Iselin, NI, and registered trademarks thereof, activated carbon, Mn〇2/CuO, Mn〇2/CuO/Al2〇3, Pd/Mn〇2 or Pd/Mn〇2/yttrium aluminum. The catalyst may be of a pellet size, for example, or may be a membrane coated on a high surface area medium such as a honeycomb, radiator, or the like. The ozone destruction unit 802 can be used with any suitable cooling and/or recirculation system, such as the exemplary UV hardening and recirculating cooling system 800 shown in FIG. In this system, ozone destruction unit 802 is shown disposed along a return line in which hot gases are passed from the hardening chamber to at least one inlet 804 of ozone destruction unit 802, reacting with catalyst 800 in unit 802, and then At least one outlet 8〇6 of the unit to be returned to the gas supply, here a nitrogen supply container, is withdrawn. As shown in this embodiment, the return line is incorporated into a single return line before the nitrogen flow reaches the ozone destruction unit, such as by using a back suction valve 8 2 6 to ensure that the gas returning from a hardened chamber is not combined Flowing and contaminating another chamber. In another embodiment, separate return lines may each be directly input to the stinky 20

200809977 Oxygen destruction unit. In addition, although a single output line is shown in the ozone destruction cell, it should be understood that multiple output lines can be used, as well as one ozone destruction unit per line and other such variations. The ozone destruction unit 802 can include, or be coupled to, an ozone sensor 820 that monitors the degree of ozone in the cooling system. The sensor and ozone destruction unit can be coupled to a system controller 820 that can accept signals from the ozone sensor and respond to the signal to monitor oxygen levels. The controller can monitor the degree of ozone and can monitor other (such as the remaining life of the catalyst), as well as when the level of ozone is reached or unacceptable, or when the catalyst needs to be changed or supplemented to generate an alarm. The alert can be transmitted to the user interface 822 (such as a brain or other interface mechanism or device known or used in the art for notifying the user or about system information). System control or user interface can be stored with data. Apparatus 824 (such as a database with system information, such as standard catalyst life and maximum ozone threshold. Unit 802 may also include a mediator in addition to or in place of the catalyst. The media filter may be used to remove any particles from the recycle gas stream. The filter may be any suitable filter known in the art or used for this purpose. It should be understood that the media filter may also be included in the unit in which the chemical destruction unit is separated. Figure 9 shows that it may be used for such as A perspective view of the system ozone destruction unit 900 shown in Fig. 8. In the unit 900, the catalyst is contained in a tank 902 including an inlet 906 and an outlet 908. The return of the unit is 810. Can be human electric operator and / related) to filter the desired J 904 from the reminder must be 21 200809977 It is returned to the stream input unit 900, but wherein the agent causes a reaction in the discussion on "such that the amount of ozone present in the gas stream is reduced. The gas emanating from outlet 908 can then include a substantially reduced amount of ozone, as well as by-products that can include oxygen and/or other reactions. Although the catalyst is shown as a free flowing material within the housing of the Figure, it should be understood that the catalyst can be controlled in any suitable manner known or used in the art, such as passageways, paths or networks through which the coating gas passes. The degree of gas flow and reaction in the unit. For example, catalysis such as P r e m A i r8

The agent may be applied to the inner surface of the radiator through which the gas flows in the unit. Figure 10 shows a plot of ozone conversion as a function of space velocity (xl 〇〇〇 / hr) performed by a PremAir® coated radiator, with a failure efficiency at 5 ft/sec flow and It was determined to be about 85% at 75 °C. Figure 11 shows a graph of ozone conversion for PremAir® coated honeycombs in an ozone destruction unit, where the honeycomb unit is a 1/8' unit with 5/8, thickness and 45 °C , with a pressure drop of about 〇 1 ''wg / layer. Figure 12 shows another graph 1 2 0 0 which plots the relative relationship between the residence time of the second system and the ozone concentration of the mega ratio. For this chart, in 6, the pipeline has a 350 CFM cooling air flow, and a 20.9% oxygen level and a 65 ° C air temperature. It can be seen that a residence time of at least 〇·〇 of 4 seconds is required to obtain an ozone level of 0·08 ρρπχ or less. The first! Figure 3 shows a chart 1300 of the data with the best fit line, shown as a 〇.〇8ppm value between 〇〇4 and 〇·〇 45 seconds, so that any 〇〇45 or ~ 食食 any stay The time in the system is sufficient to reduce the amount of ozone in the gas to the extent required on the upper jaw. For other levels of ozone, the flow catch and/or bite 22 200809977 can be adjusted to increase or decrease the dwell time accordingly. Temperature can also have an effect on the necessary residence or contact time required for ozone destruction or elimination. Table 1 shows the residence time and temperature required for various processes. Table 1. Comparison of contact time and temperature for ozone destruction Thermal damage Precious metal pt/pd catalyst MnO 2 based catalyst Temperature, °c &gt; 300 50-75 22 When staying 3 3 0.36-0.72, 粆

For the data in Table 1, the DSS heat exchanger was used with a cross section of 19''X35'' with a total flow of 1400 CFM. The linear velocity is about 5 ft/sec and for conventional catalysts, the thickness is &gt; 2 ft. Many other catalysts can be used to reduce the amount of ozone in the cooling fluid. For example, activated carbon can be used to decompose ozone in a nitrogen-rich gas. Unfortunately, activated carbon is consumed in the process, requiring frequent supply of activated carbon. In addition, the use is limited to the application of the odor 4, Pan, and the degree of milk spread. The use of activated carbon also presents a fire hazard, especially for high ozone concentrations or for ozone to be produced by concentrated oxygen sources. Typically, 'activated carbon is used in water treatment to remove additional ozone, and can produce per-carbon monoxide and carbon dioxide by-products. The process may also produce particles by reacting ozone into the filaments and ninth. The activated carbon reaction can be the following equation: 〇3 + C - C〇 + 〇3 + CO - c〇2 . 〇23 200809977 Other catalysts have been proposed including Carulite® temperature oxidation catalyst (Mn02/Cu0), and in ozone production. Carulite® 200 catalyst (Μ η Ο 2 / C u 07 A12 〇 3 ).

Figure 14 illustrates the steps of a method 1400 of ozone depletion that may be used in accordance with an embodiment of the present invention. In this method, the nitrogen-enriched gas stream is directed through a UV hardening tool to remove heat 1 402 from the tool. The heat flow is directed to ozone destruction unit 1 404. The stream is directed along the channels coated by the catalyst in the unit to have a minimum residence time of 14 〇 6 in the unit. As the gas passes along the passage, the catalyst causes a reaction in the gas stream' from reducing the amount of ozone in the gas to 1 408. After the amount of ozone is reduced to or below the desired level, the air flow directs the unit 1 4 1 0. The ozone-reduced gas stream is then directed through a heat exchanger to remove additional heat from the gas stream 1 4 1 2 . The cooled air stream is then directed back to 1 4 1 4 by a UV hardening tool. It is to be understood that the description and order of the steps are merely exemplary, and other variations will be apparent to those of ordinary skill in the art in light of the description. Accordingly, the specification and drawings are to be regarded as illustrative only However, it will be apparent that various modifications and changes can be made therein without departing from the broader spirit and scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Various embodiments according to the present invention will be described with reference to the accompanying drawings in which: FIG. 1 shows a prior art cooling system for a hardening device; 24 200809977 FIG. 2 shows a One embodiment may use a UV hardening device and a cooling system; Figures 3(a) and (b) respectively show front and side views of a cooling module that may be used in accordance with an embodiment of the present invention; (a) and 4(b) respectively show a top view and a side view of a blower device that can be used in accordance with an embodiment of the present invention; and FIG. 5 shows a gas separation membrane that can be used in accordance with an embodiment of the present invention. ;

Figure 6 shows a hardening system that can be used in accordance with one embodiment of the present invention; Figure 7 shows the steps of a method that can be used in accordance with one embodiment of the present invention; and Figure 8 shows a Embodiments may use a hardening and cooling system; Figure 9 illustrates an ozone destruction unit that may be used in accordance with one embodiment of the present invention; Figure 10 illustrates an ozone destruction unit that may be used in accordance with an embodiment of the present invention. Results of Figure 11 show the results of an ozone destruction unit that can be used in accordance with one embodiment of the present invention; Figure 12 shows the results of an ozone destruction unit that can be used in accordance with one embodiment of the present invention; 3 illustrates the results of an ozone destruction unit that may be used in accordance with an embodiment of the present invention; and 25 200809977 Figure 14 shows the steps of a method that may be used in accordance with an embodiment of the present invention.

[Main component symbol description] 100 Open loop system 104 Hardening chamber 108 Exhaust port 202, 204 Lamp module 210 ' 212 Blower 216 Return chamber 220 Oxygen sensor 224, 228 Temperature sensor 300 Recirculating cooling air device 304 Supply container 3 0 8 , 3 1 0 blower 314 extension conduit 400 blower 404 connection point 408 liquid sealing part 500 tubular film 602 system controller 606 user interface 102 UV lamp module 106 blower 200 hardening system 206, 208 processing chamber 214 Supply chamber 218 heat exchanger 222, 226 pressure sensor 230, 232 recirculation line 302 return container 306 water-cooled heat exchanger 312 return conduit 316 catalyst 402 rotatable fan 406 connector 410 turbulent Muni material 600 UV hardening system 604 nitrogen Generator 608 Data Storage Device 700 Method 702 for Cooling a UV Hardening System Purifying a Nitrogen Gas Source Supply to a Supply Container 26 200809977 704 Directing a flow of nitrogen from a supply container to at least one of the lamps 4 706 to pass a stream of nitrogen through the lamp mode The set and each of the hardening chambers 708 direct hot nitrogen from the chamber into the return piping system 710 will return Hot nitrogen gas introduced into the vessel 712 returns to return so that the container through a heat exchanger to heat the nitrogen heat removal + 714 returns the cooled nitrogen gas transferred back to the supply container 716 continues to hardening treatment? 7 1 8 Terminating the cycle process

800 UV hardening and recirculating cooling system 802 ozone destruction unit 804 inlet 806 outlet 808 catalyst 810 ozone sensor 820 system controller 822 user interface 824 data storage device 826 suckback valve 900 ozone destruction unit 902 tank 9 04 catalyst 906 Entrance 908 Outlet 1000 Ozone conversion percentage versus the performance of the PremAir® coated radiator 27 200809977 Space velocity (xl 〇〇〇 / hr ) 1100 ozone in the ozone destruction unit for PremAir ® coated honeycomb Transformed graph 1200-second dwell time vs. mega-ratio ozone concentration 1300 Chart with best fit line data 1400 Ozone Elimination Method 1402 Nitrogen-rich gas stream guide through UV hardening tool to remove from tool .heat

1404 Heat flow directed to ozone destruction unit 1406 The heat flow is directed along the catalyst coated channels in the unit to have a minimum residence time of 1408. The catalyst causes a reaction in the gas stream, thereby reducing the amount of ozone in the gas 1410. The amount of ozone is reduced to or low. After the desired level, the airflow directing unit 1412 directs the airflow through the heat exchanger to remove thermal energy from the airflow 1414. The airflow is directed back to the gas supply for being redirected through the tool 28.

Claims (1)

200809977 X. Patent Application Range 1. A system for cooling a UV curing system comprising a UV light source and a hardening chamber, comprising: a supply container for containing a fluid amount; and a flow generating device for guiding Flowing from the supply volume through the UV light source, the fluid flow can be used to remove thermal energy from the source; a return line connected to the hardened chamber and operable to heat the fluid stream and direct the flow a heated fluid stream; a return vessel coupled to the return line and operable to pass the heated fluid stream directed through the return line; and a heat exchanger disposed along the flow path at the return And the supply container, and can be used to remove thermal energy from the heating, wherein the fluid flow is directed back to the supply capacity, as in the system of claim 1, wherein: The fluid is one of nitrogen and nitrogen-rich gas. 3. The system of claim 1, further comprising a gas separation module operable to receive a feed air to flow out of at least one component of the feed air to produce the supply volume source. The streamer of the rinsing device is configured to contain a stream of fluid that is circulated to the vessel and is separated from the separator. The system of claim 3, wherein: the gas separation module comprises a gas separation membrane. 5. The system of claim 1, wherein: the heat exchanger is a water-cooled heat exchanger. 6. The system of claim 1, wherein: A plurality of flow generating devices can be used to direct fluid flow from the supply container through a plurality of UV light sources. 7. The system of claim 1, wherein: the flow generating device is a circulating blower. 8. An air module for providing a recirculating cooling fluid stream to a radiation type hardening device, comprising: a supply container operable to contain and contain a quantity of fluid; a flow generating device operable to direct from said supply The fluid of the container flows to the radiation hardening device, the fluid flow can be used to remove thermal energy from the hardening device; a return container can be used to accommodate the heated fluid flow exiting the radiation hardening device; and a heat exchanger Provided along a flow path between the return vessel and the supply vessel, the heat exchanger being operable to remove the thermal energy from the fluid stream heated 30 200809977 and direct the fluid stream back Go to the supply container. 9. The air module of claim 8, wherein: the fluid is one of nitrogen and a nitrogen-enriched gas. The air module of claim 8, further comprising: a gas separation module operable to receive a feed air stream and separate at least one component of the feed air to generate the The fluid source that supplies the container. The air module of claim 1, wherein: the gas separation module comprises a gas separation membrane, and the air module of claim 8 is as follows: The supply container can be used to hold the amount of fluid from a source of pure nitrogen. 13. The air module of claim 8, wherein: the heat exchanger is a water-cooled heat exchanger. 14. The air module of claim 8, wherein: the plurality of flow generating devices are operable to direct fluid flow from the supply container to portions of the hardening device. 31 200809977 15. The air module of claim 8, wherein: the flow generating device is a/circulating blower. i. A method of cooling a UV curing system comprising a uv light source and a hardening chamber, comprising: directing a flow of cooling fluid from a supply container through the uv light source, the fluid flow being available to The uv light source removes thermal energy; directing the heated cooling fluid stream from the hardening chamber back to the vessel; removing thermal energy from the heated cooling fluid; and β JiL 0-^ directing the heat removal cooling The fluid stream returns to the ', #•托 UV lamp source °, wherein the cooling fluid can be used to recycle through the household 7 • The latter step includes 17. The method described in claim 16 of the patent scope, In the supply container, the membrane device containing the fluid source from the fluid source, the membrane device, transmits a feed air stream to the jade, as claimed in the patent application. The method of claim 17, wherein the method of claim 17, wherein the alkali β invites and enriches the nitrogen gas to guide the cooling fluid flow system comprises guiding the gas from the gas; Group of cooling fluid flows. The method of claim 16, further comprising: circulating water passing through the heat exchanger to remove heat from the heat exchanger.