JP6102212B2 - Small ultraviolet irradiation device - Google Patents

Description

  The present invention relates to an ultraviolet irradiation device, and more particularly to a small ultraviolet irradiation device including an excimer lamp that emits excimer light.

Conventionally, excimer lamps have been developed in which a discharge vessel is filled with a discharge gas, and the discharge gas is excimer-emitted by dielectric barrier discharge. Applied.
Japanese Patent Application Laid-Open No. 2011-165540 (Patent Document 1) describes an ultraviolet irradiation device equipped with such an excimer lamp. A light source unit in which a plurality of excimer lamps are arranged in a casing, and the excimer lamp. A structure is shown in which an electrical component (transformer) for power supply is installed separated by a partition wall.
Such a partition part is provided in order to protect an electrical equipment part from the ultraviolet light radiated | emitted from a light source part, or the ozone produced | generated when ambient oxygen receives ultraviolet light.
In addition to the step-up transformer that turns on the excimer lamp, the electrical component is provided with a heat exchanger and a blower fan as cooling means for cooling the transformer.

In addition, the conventional ultraviolet irradiation device was intended for a large work such as a liquid crystal substrate, but in recent years, the field of application has expanded, and depending on the application, on the other hand, there is a small and simple ultraviolet irradiation device. Development is underway.
For example, in a small ultraviolet irradiation device described in Japanese Patent Application Laid-Open No. 2011-181535 (Patent Document 2), the inside of the casing is separated into a lamp storage chamber in which an excimer lamp is stored by a partition and a circuit chamber having an electrical component. This structure is shown, and a cleaning gas made of an inert gas is supplied to the lamp housing chamber via a gas supply pipe.

In the conventional structures described in Patent Literature 1 and Patent Literature 2, it is necessary to isolate the accommodation place of the electrical equipment portion from the light source portion in an airtight manner by a partition wall. This is because if a small amount of oxygen is present around the light source part, the oxygen receives ultraviolet light from the excimer lamp and ozone is generated, and the electrical part may be deteriorated by the ozone. Similarly, it is necessary to always shield the ultraviolet rays emitted from the light source unit so that ozone is not generated around the electrical unit.
However, such an airtight structure complicates the configuration of the apparatus and the manufacturing process. For example, when the light source unit and the electrical unit are electrically connected, it is necessary to perform wiring while ensuring the airtightness of each accommodation place, and the work is complicated and the structure is complicated. In addition, regarding the cooling mechanism in the irradiation apparatus, it is necessary to separately provide a cooling fan for each of the light source unit and the electrical unit, resulting in complication of the apparatus.
In particular, when the device is downsized, if the distance between the light source lamp and the step-up transformer is reduced, the temperature inside the device housing is increased. Ensuring cooling means is an important issue.

JP 2011-165540 A JP 2011-181535 A

  In view of the above problems, the problem to be solved by the present invention is to prevent the ultraviolet rays from the lamp from being irradiated on the electric body without isolating the electric body from the lamp in an airtight manner. Compact body with internal structure that can cool down the body and lamp efficiently and protect the electrical equipment from ozone generated by ultraviolet rays emitted from the lamp, making the device smaller and simpler than before It is to provide an ultraviolet irradiation device.

In order to solve the above-mentioned problems, an excimer lamp and an electrical component that supplies power to the excimer lamp are disposed inside a casing , and a light exit window is formed in the casing. In the small ultraviolet irradiation device, a partition wall is provided so as to contact one side wall of the housing and to form a communication path between the other side wall, and the inside of the housing is electrically connected by the partition wall. A body storage chamber and a lamp storage chamber; the electrical component storage chamber stores the electrical component; the lamp storage chamber stores the excimer lamp; and the communication passage in the electrical component storage chamber Thus , an intake port is provided on the side where the partition wall abuts, an exhaust port is provided on the side where the partition wall abuts when viewed from the communication path in the lamp storage chamber, and cooling air is supplied from the intake port to the electrical component storage chamber. Introducing the electrical component Cooled, it cools the excimer lamp by the cooling air flowing to the lamp housing chamber through the communication passage, characterized in that so as to discharge the ozone generated by the lamp housing chamber simultaneously from the exhaust port .

Further, the partition wall extends to an end portion of the excimer lamp so that ultraviolet rays from the excimer lamp are not directly irradiated onto the electrical component.
The light exit window also serves as the exhaust port.
The light exit window is formed on an upper wall of the casing.
Further, the intake port is formed in a side wall of the casing.
Further, the excimer lamp has a long arc tube, and is arranged so that the cooling air flows along the arc tube.

  According to the small ultraviolet irradiation device of the present invention, the inside of the housing is partitioned by the partition wall into the electrical component storage chamber and the lamp storage chamber, and these storage chambers communicate with each other at one end of the partition wall. By providing an intake port at the non-communication end of the storage chamber and providing an exhaust port at the non-communication end of the lamp storage chamber, cooling air is introduced from the intake port into the electrical component storage chamber. The electrical component is cooled, and the excimer lamp is cooled by cooling air flowing into the lamp storage chamber via the communication passage, and ultraviolet rays from the excimer lamp are not irradiated to the electrical component, and at the same time The ozone generated in the lamp housing chamber can be discharged from the exhaust port, and the effect of preventing corrosion of the electrical component due to ultraviolet rays and ozone can be achieved.

The disassembled perspective view of the small ultraviolet irradiation device of the present invention. Side sectional drawing (A) of the Example of this invention, and its XX arrow directional view (B). The YY arrow line view of FIG. The exploded perspective view of other examples. In still another embodiment, (A) is a side sectional view and (B) is a view taken along the line XX.

1 is an exploded perspective view of the upper wall of the small ultraviolet irradiation device 1 of the present invention. FIG. 2A is a side sectional view thereof, and FIG. FIG. 3 is a view taken in the direction of arrows YY in FIG.
In the small ultraviolet irradiation device 1 of the present invention, a partition wall 3 is provided inside the housing 2, and one end portion (abutting end portion) 3 a of the partition wall 3 is in contact with one side wall 2 a of the housing 2. A communication path 4 is formed between the other end (open end) 3b and the other side wall 2b. The casing 2 is partitioned into an electrical component storage chamber 5 and a lamp storage chamber 6 by the partition wall 3.
An electrical component 7 is stored in the electrical component storage chamber 5, and an excimer lamp 8 having a long arc tube 8 a is stored in the lamp storage chamber 6. At this time, the partition wall 3 extends over the entire length to the end of the arc tube 8 a of the excimer lamp 8.
Further, as shown in FIGS. 1 and 2B, the excimer lamp 8 is supported by a lamp holder 9 in the lamp storage chamber 6.

1 and 2B, a light exit window 10 is formed on the upper wall 2c of the housing 2 corresponding to the excimer lamp 8 in the lamp storage chamber 6. On the other hand, as shown in FIG. 3, an intake port 11 is provided on the side wall 2 a of the electrical component storage chamber 5 on the side where the partition wall 3 abuts. In this embodiment, the light exit window 10 also serves as the exhaust port 12.
In addition, air blowing means 13 is disposed at the air inlet 11 of the electrical equipment housing chamber 5, and the cooling air sucked into the electrical equipment housing room 5 by the air blowing means 13 is used for the partition wall 3 and the housing 2. It flows into the lamp storage chamber 6 through the communication path 4 formed between the side wall 2b and the light exit window 10 (exhaust port 12).
As shown in FIG. 3, the wiring 15 from the electrical component 7 to the excimer lamp 8 is laid using the communication path 4.

In the above configuration, the ultraviolet light from the excimer lamp 8 is shielded by the partition wall 3 and is not irradiated to the electrical component 7.
On the other hand, the cooling air is sucked into the electrical equipment storage chamber 5 from the air inlet 11 by the blower means 13 and flows into the communication path 4 while cooling the electrical equipment 7. The cooling air flows into the lamp housing chamber 6 from the communication path 4, flows around the lamp 8, cools it, and is exhausted from the light exit window 10 (exhaust port 12).
At this time, ozone is generated from the oxygen in the atmosphere around the excimer lamp 8, but is exhausted to the outside from the light emission window 10 (exhaust port 12) by the cooling air described above, and the electrical component 7 in the electrical component chamber 5. Does not act on.

FIG. 4 shows another embodiment. In this embodiment, the light exit window 10 is provided with a window member 16 made of quartz glass. An exhaust port 12 is formed in the side wall 2 a of the housing 2 corresponding to the lamp storage chamber 6.
In this embodiment, the cooling air flowing into the lamp housing chamber 6 from the electrical equipment housing chamber 5 through the communication passage 4 flows along the arc tube 8 a of the excimer lamp 8 and exhausts from the exhaust port 12. Is done.

In the above embodiment, the inside of the housing 2 is partitioned into the electrical component housing chamber 5 and the lamp housing chamber 6 within the same plane by the partition wall 3, but in the other embodiment shown in FIG. It is configured to do.
That is, the partition wall 3 is provided horizontally in the housing 2, and the lower part thereof is an electrical component housing chamber 5 and the upper part is a lamp housing chamber 6. Also in this case, the communication path 4 is formed between the open end 3b of the partition wall 3 and the side wall 2b of the housing 2 as in the embodiment of FIGS.
An excimer lamp 8 is supported on the partition wall 3 via a lamp holder 9.
In this embodiment as well, the light exit window 10 is formed on the upper wall 2c of the housing 2, and the light exit window 10 also serves as the exhaust port 12. However, FIG. Similarly to the example, when the light exit window 10 is provided with a window member, an exhaust port is formed separately.

Further, although the exhaust port 12 is formed on the side wall 2c of the housing 2, it may be formed on the upper wall 2c separately from the light exit window 10.
Further, although the air blowing means 13 is provided at the air inlet 11, when the air outlet 12 is formed separately from the light exit window 10, a suction means is provided on the side of the air outlet 12 and the inside of the housing 2 is provided. It is good also as a structure which introduces cooling air into.
Furthermore, in any of the above-described embodiments, the intake port 11 is formed on the side wall 2a of the housing 2, but may be formed on the upper wall 2c of the housing 2.

As described above, in the small ultraviolet irradiation device of the present invention, the inside of the housing is partitioned into the electric body housing chamber and the lamp housing chamber by the partition wall, and a communication path is formed between the housing at one end of the partition wall. Accordingly, the ultraviolet rays from the excimer lamp are not irradiated to the electrical component, and the cooling air introduced from the intake port into the electrical component housing chamber cools the electrical component, and then the lamp housing chamber passes through the communication path. As a result, the excimer lamp can be efficiently cooled.
In addition, since ozone generated around the lamp in the lamp housing chamber is discharged from the exhaust port by the cooling air, ozone does not act on the electrical component.
As described above, since the ventilation path of the intake port—electric component housing chamber—communication path—lamp housing chamber—exhaust port is configured by the partition wall in the housing, a compact and simple structure of a small ultraviolet irradiation device is realized. I was able to.

DESCRIPTION OF SYMBOLS 1 Small ultraviolet irradiation device 2 Housing | casing 2a, 2b Side wall 2c Upper wall 3 Partition wall 3a Contact edge part 3b Open end part 4 Communication path 5 Electrical component storage chamber 6 Lamp storage chamber 7 Electrical component 8 Excimer lamp 8a Luminescent tube 9 Holding Tool 10 Light exit window 11 Intake port 12 Exhaust port 13 Blowing means 15 Wiring 16 Window member

Claims (6)

In a small ultraviolet irradiation device in which an excimer lamp and an electrical component that supplies power to the excimer lamp are disposed inside the housing, and a light exit window is formed in the housing.
A partition wall is provided so as to be in contact with one side wall of the housing and to form a communication path between the other side wall,
The housing is partitioned by the partition wall into an electrical component storage chamber and a lamp storage chamber, the electrical component storage chamber stores the electrical component, and the lamp storage chamber stores the excimer lamp,
An intake port is provided on the side where the partition wall abuts when viewed from the communication path in the electrical component storage chamber, and an exhaust port is provided on the side where the partition wall abuts when viewed from the communication path in the lamp storage chamber;
Cooling air is introduced from the intake port into the electric device housing chamber to cool the electric device, and the excimer lamp is cooled by cooling air flowing into the lamp housing chamber through the communication path , and at the same time, the lamp housing. A small ultraviolet irradiation device characterized in that ozone generated in the room is discharged from the exhaust port.
  The said partition wall is extended to the edge part of the said excimer lamp, The ultraviolet-ray from this excimer lamp was made not to irradiate the said electrical component directly, The Claim 1 characterized by the above-mentioned. Small ultraviolet irradiation device.   The small ultraviolet irradiation device according to claim 1, wherein the light exit window also serves as the exhaust port.   The small ultraviolet irradiation device according to claim 1, wherein the light exit window is formed on an upper wall of the casing.   The small ultraviolet irradiation device according to claim 1, wherein the air inlet is formed in a side wall of the housing. 6. The small ultraviolet irradiation according to claim 1, wherein the excimer lamp has a long arc tube and the cooling air is arranged so as to flow along the arc tube. apparatus.

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