TW200535902A - Dielctric shielded discharging lamp and ultraviolet radiating device - Google Patents

Abstract

To provide a dielectric barrier discharge lamp restrained from the generation of particles caused by the difference of thermal expansion, and provide an ultraviolet-ray irradiation device using the same. SOLUTION: The dielectric barrier discharge lamp EXL comprises a slender tube-shaped airtight vessel 1 made of ultraviolet-ray transmissive material, an excimer generating gas sealed in the airtight vessel 1, a long inner electrode 2 arranged in the airtight vessel so as to generate the dielectric barrier discharge over whole axial direction, and an external electrode OE arranged on the outer face of the airtight vessel 1 with a gap of 0.05 to 1.0 mm along axial direction, acting so as to generate the dielectric barrier discharge in the airtight vessel 1 in cooperation with the inner electrode 2.

Description

200535902 (1) IX. Description of the invention [Technical field to which the invention belongs] The present invention relates to a dielectric barrier discharge lamp and an external irradiation device using the same. [Prior Art] Conventionally, it is known that a halogen compound such as xenon or a rare gas is subjected to a silent discharge and a barrier discharge, and an almost monochromatic excimer discharge mass barrier discharge lamp is known. In the dielectric barrier discharge, pulse-like. This pulsed current has a high-speed electron flow and therefore causes substances that generate ultraviolet rays, such as xenon, to be in a temporary state (excimer state). When it returns to the ground state, it has a short wavelength with less absorption. UV. In the case of xenon, a molecule with a large half-value width of 172 nm as the center wavelength emits light. The energy of the ultraviolet rays of the wave is larger than the ultraviolet rays with a wavelength of 254 nm obtained by the low-pressure mercury lamp, and at the same time, it has greater energy than the organic compound to be decomposed. Therefore, by irradiating ultraviolet rays with a wavelength of 172 nm, the organic compounds are combined to decompose and remove them. Furthermore, ultraviolet rays with a wavelength of 17 2 nm are irradiated in the atmospheric atmosphere, and the atmosphere is decomposed to generate activated oxygen. The reaction of the activated organic compound that is cut off and combined to generate carbon dioxide (C02) and water (H20) makes it easy to remove compounds . Therefore, the external light source of the dielectric barrier discharge lamp is very effective. Light Purple

The rare earth dielectric potential, that is, the period when the dielectric current stops flowing, multi-synthesized molecules are well released, and they can be cut off with a length of 172 nm 1 8 5 nm or a substance. With the oxygen in it, it will be organic. As Purple 200535902 (2)

As a dielectric barrier discharge lamp, there is known a dielectric barrier discharge lamp that performs a dielectric barrier discharge using an elongated tubular airtight container (see Patent Document 1). The dielectric barrier discharge lamp described in Patent Document 1 is configured by first forming an internal electrode including an elongated airtight container 'extending in the axial direction of the airtight container, and a standard sealed in the airtight container. The light-emitting tube of the molecule generating gas, and then the aluminum lamp body with a cooling function and a concave shape is used as an external electrode to abut the outside of the airtight container, so that the same dielectric can be generated along the tube axis direction of the airtight container The mass barrier discharges and at the same time rapidly dissipates the heat generated from the arc tube to maintain high luminous efficiency. In addition, since the external electrode and the airtight container are tightly sealed to each other, the two are configured to be crimped together. When the above-mentioned dielectric potential S discharge lamp is used for ultraviolet irradiation, a larger dielectric barrier discharge lamp has been developed as the area to be irradiated becomes larger, and the discharge lamp used is effective The length is more than 1m. When a dielectric barrier discharge lamp of such a length is used, various industrial applications such as ashing of a large area liquid crystal substrate, curing of a photosensitive resin, and sterilization are possible. [Patent Document 1] Japanese Patent Application Laid-Open No. 2003-197152 [Summary of Invention] (Problems to be Solved by the Invention) However, in the case where the length of the tube of a dielectric barrier discharge lamp is 500 mm or less, There is no problem in the structure in which the aforementioned aluminum external electrode is tightly attached to the airtight container, but the effective length of the lamp tube is -6-200535902 (3)

For example, if it is longer than l1) 1 ', the following problems are known. In other words, the influence of the expansion and contraction of each part is caused by the flash of the dielectric barrier discharge lamp. When the gas-tight container of the dielectric barrier discharge lamp is turned on, it becomes about thirty to one hundred dozens. C. On the other hand, the external electrode ' is suppressed by the temperature increase due to the cooling by the refrigerant. However, 疋 'the aforementioned external electrode, which is connected to the outside of the airtight container, is formed of a metal material, so the thermal expansion rate is large. When the dielectric barrier discharge lamp is turned on,' the temperature of the airtight container rises' Its temperature rises and expands', and when the lamp is turned off, it cools and contracts with the temperature of the lamp body. On the other hand, since the 'airtight container' is formed of a material having a relatively low thermal expansion coefficient such as quartz glass, expansion and contraction due to flicker are small. As a result of the above configuration, as the dielectric barrier discharge lamp flickers, friction occurs between the airtight container and the external electrode. If the length of the lamp tube exceeds 1 m, the position deviation between the two will reach more than 1 m m. In addition, due to this friction, the external electrode is scraped, and particles with a particle diameter of about 0.1 mm are liable to occur. If such particles occur, they will adhere to the surface of the airtight container to form black attachments, which will adversely affect the ultraviolet illuminance or its distribution, etc., or the particles will be contaminated on the object to be irradiated. Object to be irradiated The object of the present invention is to provide a dielectric barrier discharge lamp and an ultraviolet irradiation device using the discharge lamp, which can prevent the generation of particles due to friction between an external electrode and an airtight container. In addition, a specific object of the present invention is to provide a dielectric barrier discharge lamp and an ultraviolet irradiation device using the discharge lamp, which are configured to be provided between a gas-tight -7-200535902 (4) container and an external electrode. The gap forming means' to form a gap within a predetermined range is used to prevent the occurrence of particles and to form a good dielectric barrier discharge. (Means for solving the problem) A dielectric barrier discharge lamp of the present invention is characterized by having: an airtight container, which is made of a long, paralyzed tube made of an ultraviolet permeable material; an excimer generates a gas, It is enclosed in an airtight container; the internal electrode is configured to: in the airtight container, the dielectric barrier is discharged, and about the entire length of the tube axis direction, an external electrode can be generated, It is arranged on the outside of the airtight container, is arranged along the direction of its tube axis, and acts in cooperation with the internal electrode so that a dielectric barrier discharge can be generated in the airtight container; and

The gap forming means forms a gap G that satisfies the condition of the formula 0 < GS 1.0 (unit mm) between the airtight container and the external electrode along the tube axis direction of the airtight container. In the present invention, with the above configuration, with the flicker of the lamp tube, even if expansion and contraction occur between the airtight container and the external electrode, at least the effective length of the bulb does not occur between the two. Friction, and at the same time can form a good dielectric barrier discharge. Therefore, even if the effective length of the lamp tube exceeds 1 m, it can be avoided that when the external electrode is rubbed, the particles that are scraped to become fine particles adhere to the outside of the air-tight container or fall down, and the transmission window of the ultraviolet irradiation device Or, if there is no transmission window-2005-35902 (5), there will be problems such as black attachments on the object being irradiated. [Embodiment] (Best Mode for Carrying Out the Invention) Hereinafter, a mode for carrying out the invention will be described with reference to the drawings. [First Form]

1 to 5 show a first form of a dielectric barrier discharge lamp for implementing the present invention; FIG. 1 is a front view of a partial cross-section of the dielectric barrier discharge lamp, and FIG. 2 is a light-emitting tube. Partial cut-away front view, FIG. 3 is a partially cut-away front view of the support portion and power supply portion of the arc tube, and FIG. 4 is a front cross-sectional view of the main portion of the spacer and the suction means. Fig. 5 is a side sectional view of the same member. In this embodiment, the dielectric barrier discharge lamp EXL is composed of an airtight container 1, an excimer-forming gas, an internal electrode 2, an external electrode OE, and a gap-forming means s; since the high-frequency lighting circuit HFI is Excite and light. In addition, the airtight container 1, the quasi-divided generated gas, and the internal electrode 2 constitute a light-emitting tube LT integrated in advance. Further, in this embodiment, the air intake means AA is incorporated in the aforementioned configuration. < Light-emitting tube LT > The light-emitting tube LT has the aforementioned configuration, and has a pair of power supply sections 3 A3B and a pair of support sections 5 and 5 at both ends. (Regarding the airtight container 1) The airtight container 1 is made of a material which is UV-transparent -9- 200535902 (6) 'and forms an elongated discharge space 1 a inside. For example, a structure in which both ends of the elongated tube are sealed and a cylindrical discharge space 1a is formed in the inside can be made. Also, as in the second embodiment described later, it is possible to form an elongated discharge space having a circular cross-section and a cylindrical shape in the direction of the tube axis by sealing both ends of the coaxial and double-layered slender tube. 1 a — 之 structure. Ultraviolet-transmitting materials are generally manufactured using synthetic quartz glass. However, in the present invention, as long as it is transmissive to the wavelength of ultraviolet light to be used, it is possible to form an airtight volume with the material.

In addition, the diameter of the gas trough 1 is not particularly limited, and when the output of ultraviolet rays is to be increased, it is appropriate to set the outer diameter to 2 mm or more. In addition, the wall thickness can be set to 2 m or less, and it is desirable that the thickness is about 0.3 to about 0.3 m. In contrast, the length of the airtight container 1 is not limited at all when a dielectric potential ink discharge is to be performed. Therefore, in the present invention, the airtight container ′ Hb is sufficient to set any desired length in accordance with the required ultraviolet irradiation length, that is, the effective length of the lamp tube. In addition, the present invention is particularly effective for an effective length of a lamp tube of 1 m or more. For example, it can be made into a strip of about 2 nl. Furthermore, in order to ensure a required amount of ultraviolet rays, a plurality of dielectric barrier discharge lamps EXL are allowed to be used side by side at a relatively narrow interval. The airtight container 1 is preferably a straight straight tube. But it does not interfere even if it is slightly bent. In fact, when forming a slender tube, it is easy to produce a slight bend. For example, it is about 200 mm with respect to the total length, and it will form a maximum bend of less than m m. However, this degree of bending, -10- 200535902 (7)

Approximately allowed as straight pipes. In addition, as will be described later, when the gap forming means s composed of the spacer s1 is arranged, when the airtight container 1 is bent as described above, it is arranged to abut the spacer S 1 according to the bent back portion. This makes it easier to limit the gap G between the airtight container 1 and an external electrode OE described later within a predetermined range. Furthermore, the cross-sectional shape of the tube is ideal as long as it is a circular tube, because the manufacturing cost is relatively low. However, if necessary, a desired cross-sectional shape such as an ellipse or a square can also be used. Furthermore, at a stage before the airtight container 1 is sealed, an exhaust pipe (not shown) can be used as a means for sealing excimer-generating gas after exhausting the discharge space 1 a inside the airtight container 1. Connect the airtight container 1. In this case, the exhaust pipe can be connected and connected to the side of a portion near the one end of the airtight container 1 and exposed to the outside from the external electrode EO described later. Furthermore, if the exhaust pipe is exhausted, the excimer-generating gas is sealed in the airtight container 1 by the exhaust pipe, and then the exhaust pipe is tip-off. Thus, the airtight container 1 is hermetically sealed. If exhaust is performed through an exhaust pipe formed on one end side of the airtight container 1, especially if the airtight container 1 is 1 m or more in length, in order to fully exhaust the air, the exhaust time may become longer. tendency. Therefore, if necessary, a pair of exhaust pipes may be formed in the vicinity of both ends of the airtight container 1, and exhaust may be performed simultaneously. Therefore, in this case, a pair of exhaust welding openings are formed. As an example of this form, an outer diameter of 18 mm, an inner diameter of 16 mm, and a length of 300 mm were formed, and the seal portions at both ends were provided. B The airtightness was provided with a shrinkage seal portion embedded with molybdenum foil Container 1. -11-200535902 (8)

(About excimer-generating gas) As the excimer-generating gas, for example, one or a mixture of rare gases such as xenon (Xe), krypton (K0, argon (Ar), and helium (He)), or a rare gas can be used. Examples of gas halides include xenon halides (X e C 1, K r C 1), etc. In addition, when rare gas halides are enclosed, rare gases and fluorine (F), chlorine (C1), and bromine (Br ) Or halogen such as iodine (I) so that halides can be generated inside the airtight container 1. In addition to excimer-generating gas, depending on the case, a gas that does not generate excimer, such as neon, is mixed. Permissible. Furthermore, excimer-produced gas can be sealed at a pressure of 20 kPa or more. As the pressure increases, the efficiency of the light bulb increases, and the ultraviolet output increases. However, the increase in the efficiency of the light bulb with respect to the pressure shows a saturation tendency. In one embodiment, an excimer made of xenon is enclosed at a pressure of [Pa 丨]. (About the internal electrode 2) The internal electrode 2 is arranged to face the external electrode 0 E, and is gas-tight. Container 1 The wall surface. However, the internal electrode 2 may be enclosed in an airtight container and exposed in the discharge space 1 a, and may be disposed inside the airtight container 1 and disposed outside the discharge space 1 a, for example. In the latter case, the airtight container 1 has, for example, a double tube structure; the internal electrode 2 is arranged along a cylindrical wall surface formed on the central axis side of the airtight container 1 Therefore, in the present invention, the so-called internal electrode 2 means: an electrode which is relatively disposed on the inner side of the airtight container when the airtight container 1 is viewed from the outside. Furthermore, In Figure 1, Figure 3, Figure 4, and Figure 5, province-12-200535902 0) the illustration of the internal electrode 2 is omitted.

According to the above description, it can be known that, in the present invention, if the internal electrode 2 is arranged inside the airtight container 1, the entire length in the tube axis direction, that is, the effective length of the lamp tube as a whole, can be generated. The electrode of the electric potential barrier discharge is preferably an electrode that is long in the tube length direction, and the rest can be of any configuration. For example, it is permissible to select and use various known structures such as a rod-like shape, a plate-like shape, and a mesh-like shape according to an arbitrary desire. The material constituting the internal electrode 2 is not particularly limited, and for example, a refractory metal such as tungsten, molybdenum, or nickel can be used. Tungsten or nickel has a relatively small work function and is easy to emit electrons, which is effective for reducing the starting voltage. Next, an appropriate configuration example of the internal electrode 2 shown in Fig. 2 will be described. That is, the internal electrode 2 is enclosed in the airtight container 1, and a plurality of independent mesh portions 2b are dispersedly arranged in the axial direction of the airtight container 1 and are formed to be surrounded by gaps respectively. The reticulated structure of the arrangement. The plurality of mesh portions 2b are connected to each other through the connecting portion 2a to form an integrated structure, and are disposed inside the airtight container 1 in a state of being inserted. By using the internal electrode 2 'such as the airtight container 1, the amount of ultraviolet rays generated can be relatively increased. The mesh portion 2b may be continuous or separated in the circumferential direction. Therefore, in the present invention, when the internal electrode 2 is formed into a mesh shape, the meshed portion 2b is, for example, a spiral or coil shape that is formed in a ring shape, a continuous spiral shape, or a coil shape, respectively. Etc. are permissible degrees. If the appropriate configuration example shown in FIG. 2 is further detailed, most -13-

200535902 (10) The mesh portion 2b is connected by a plurality of connection portions 2a, and is electrically conductively connected, so that it can be arranged at a predetermined pitch, and the connection portion 2a is configured to follow the air. The central axis of the dense container 1 extends. Therefore, the entire internal electrode 2 has a ring-like anchor (equivalent to a mesh portion) and has a filament-like shape as a halogen light bulb for copying. Therefore, the internal electrode 2 can be diverted when the internal electrode 2 is manufactured. The manufacturing equipment of the halogen light bulb for copying makes it easy to manufacture the internal electrode 2. However, if necessary, a configuration may be adopted in which the central portion of the airtight container 1 is staggered and the connecting portion 2a is directly connected to the ring portion of the mesh portion 2b. Further, the connecting portion 2a may be a straight line having a single line or a coil having an outer diameter of 20% or less with respect to the inner diameter of the airtight container 1. Furthermore, it is desirable to package the connecting portion 2a with an appropriate tension, preferably in a state where a tension of 2 kg or more is applied in the direction of the central axis. When tension is applied, it is suitable to form the internal electrode 2 in a coil shape. However, even if it is not coiled, a tension in the direction of the central axis can be applied to the connecting portion 2a. Regardless of the shape of the connecting portion 2a, the flat sealing portions 1b formed on the both ends of the airtight container 1 are sealed at the both end sides to make it easy to apply tension to the connecting portion 2a. However, if necessary, only one end of the connecting portion 2a may be sealed on one side of the airtight container 1, and the other end thereof may be on the other end side of the airtight container 1, by appropriate means such as a pile. An anchor wire is fixed to the sealing portion lb, and can also apply tension to the connecting portion 2a. In contrast, when the mesh portion 2b is formed in a spiral or mesh shape, the spiral or mesh portion functions as a connecting portion 2a. -14-

200535902 (11), most of the meshed portions 2b are mechanically and mutually guided by a single or a plurality of rod-shaped bodies on the spiral or meshed meshed portions 2b, giving a better shape retention Sex. Alternatively, if the part 2a of the rod-shaped body is mounted on the bobbin first, the wire or the mesh-like mesh part 2b is used to improve the shape retention property. It may be either insulating or conductive. With any of the foregoing configurations, it is possible to stabilize the internal shape and make it easier to handle, and it faces the axial direction of the network portion 2 b of the molecular pressure p (Pa). Multiplying products within a fixed range. Furthermore, even in the case where the sealing pressure is raised as described later to improve the efficiency of the lamp, the distance between Li and the inner wall surface of Evil / Guyi 1 is 3 mm or less. Under certain conditions, the pressure is suppressed. Below 1 000V. Next, a description will be given regarding the support in the inside of the airtight container 1 in which the internal electrode 2 is arranged. When the internal electrode 2 is sealed in the airtight container 1, a seal using a metal foil 1 b 1 can be used. Both ends of the connecting portion 2a of the contact electrode 2 are extended by 2c. After welding, the metal foil electrode 2 is inserted into the air-tight container, and the heating end is in a softened state, and the metal is self-sealed. Foil 1 b 1 is electrically connected to ground. However, the connection portion 2 a can be welded to the internal electrode 2, and the ring portion can be connected to form a spiral shape. It should be noted that the coil bobbin and the mesh portion 2b are provided by the entire electrode 2. In addition, the internal electrode 2 rejects P (m) and a later-described reference system is configured to generate a gas at a higher excimer. It is desirable to make the mesh portion 2 b 5 mm or less. If the foregoing can maintain the discharge in a structure made of quartz glass and a power supply structure. At this time, the structure is as shown in FIG. 2. That is, the linear end 1 b 1 formed on the inside is shrunk, and the upper surface of the quartz glass on the inside is shrunken > 15-200535902 (12). In this way, at the end of the airtight container 1, the sealing portion 1b is formed and the internal electrode 2 is supported at a predetermined position.

As an example of the present embodiment, a tension of about 2 kg is applied to the internal electrode 2 and placed in the discharge space ia of the airtight container 1. The internal electrode 2 is first wound by a tungsten wire having a wire diameter of 0.26 mm. The coils having an outer diameter form a connecting portion 2a, and are formed by a ring anchor that attaches the mesh portion 2b to the connecting portion 2a at a constant pitch of 15 mm. (Power supply section 3 A, 3 B) The power supply sections 3 A, 3 B constitute a power supply terminal for supplying the bulb current required for the dielectric barrier discharge to the internal electrode 2. Furthermore, as many power supply sections as desired can be provided so that power can be supplied from one of the ends of the internal electrode 2 or both of the ends or / and the middle section simultaneously and in parallel. That is, when power is supplied from only one end portion of the internal electrode, it is sufficient to provide a power supply portion at least at the one end portion. In the case where power is supplied from both ends, a pair of power supply sections 3 A and 3 B may be distributed at both ends of the airtight container 1. In addition, if power is also supplied from the middle portion of the airtight container 1, a desired number of power supply portions can be provided in the middle portion of the airtight container 1. In addition, the power supply sections 3 A and 3 B may be formed integrally with the internal electrode 2 by extending the internal electrode 2, or may be welded, caulked, or the like, and will be prepared as a separate component and connected to On the internal electrode 2. Furthermore, various shapes of the power supply sections 3 A and 3 B, such as a linear shape, a rod shape, a button shape, and a pin shape, are allowed. Furthermore, it is also possible to supply power to only one of the power supply units 3 A and 3 B, and the other party may be pre-grounded.

As an example of this aspect, the power supply sections 3 A and 3 B are each formed in a rod shape, and the inner ends are welded with a metal foil 1 b sealed in a sealing section 1 b that has been buried in both ends of the airtight container 1. 1, the outer end protrudes outward from the sealing portions 1 b formed at both ends of the airtight container 1 along the tube axis. In addition, the outer ends of the power supply sections 3 A and 3 B are tied to the inside of a support section 5 described later, and are respectively sewn to the power supply line 4. The power supply line 4 is connected to an output terminal of a high-frequency lighting circuit HFI described later. (Supporting section) As shown in Fig. 3, the supporting section 5 includes a bottomed cylindrical cover 5a, a fastening ring 5b, and a mounting arm 5c. The cover 5a surrounds the end of the light emitting tube LT. Moreover, the insertion hole 5al of the power supply line 4 is provided at the bottom. The fastening ring 5b is provided at the open end of the lid 5a, and supports the light-emitting tube LT by tightening the end of the airtight container 1 from the outside thereof. The mounting arm 5 c protrudes upward from the side of the cover 5 a in the figure, and the top surface of the cover 5 a is in contact with the positioning arm 8 shown in FIG. Mounted on a fixed part (not shown). The positioning arm 8 defines a light-emitting tube extending from the both ends in the tube axis direction of the external electrode OE toward the end portion of the airtight container 1, and thus the installation position of the airtight container 1. Therefore, the positioning arm 8 and the supporting portion 5 together constitute the arc tube supporting mechanism S2, and form a gap G in a predetermined range between the outer surface of the airtight container 1 and the external electrode OE. The detailed configuration will be described later. -17- 200535902 (14)

< About external electrode 0E > The external electrode OE is arranged at least along the effective length of the dielectric barrier discharge lamp EXL so as to be along the tube axis direction from the outside of the airtight container 1, It can be extended while maintaining the predetermined gap G mentioned later. Moreover, the external electrode OE passes through at least one wall surface of the airtight container 1 and faces the internal electrode 2, and acts by the cooperation between the external electrode OE and the internal electrode 2, so that it can be used in the airtight container 1. In the discharge space 1 a, a dielectric barrier discharge using the wall surface of the airtight container 1 as a dielectric is generated. In the present invention, the external electrode OE may be any one having a rigid structure and a flexible structure. In the case of rigidity, it is permissible to form a block-shaped external electrode OE with a large heat capacity made of a conductive metal as shown in the figure. Therefore, it is possible to use a member conventionally called a lamp body as an external electrode as it is desired. In this case, it is not necessary to adopt a structure in which an external electrode OE formed of a thin plate made of aluminum conventionally used is held between the lamp body and the airtight container 1. However, as long as a predetermined gap G is formed between the external electrode OE and the airtight container 1, it is permissible to place the external electrode OE of the thin plate between the lamp body and the light emitting tube LT as desired. Further, in order to cool the area where the dielectric barrier discharge of the airtight container 1 occurs', the cooling means 9 can be additionally provided on the external electrode OE. In this case, although the cooling means 9 'may have any structure, it is desirable to have a structure in which a cooling water path through which a refrigerant such as water flows is attached to the external electrode OE. In the form shown in Fig. 5, the cooling means 9 is composed of a tubular cooling water path, and is configured to be welded to both sides of the external electrode 0E. -18- 200535902 (15) Furthermore, the 'external electrode oE' can be formed into a continuous surface or mesh. The term "mesh" refers to a mesh shape, a punched shape, or a lattice shape.

Furthermore, the 'external electrode 0 E' is preferably provided with a curved surface that can be concavely curved so as to surround a considerable portion of the outer periphery of the airtight container 1. The angle range of the curved surface of the external electrode OE can be selected from about 60 to 300, which surrounds the outer periphery of the airtight container 1, and is preferably 90 to 240. It is most preferably 1 2 0 to 1 8 0. The range. Therefore, the portion of the airtight container 1 which is not provided with an external electrode OE is exposed to the outside, and the system is formed at 3-60. Within the range of the angle excluding the surrounding angle ', the ultraviolet rays transmitted through the wall surface of the airtight container 1 can be used for various purposes by radiating to the outside from the exposed portion and a relatively long distance along the tube axis direction of the light-emitting tube LT. In purpose. In this way, if the external electrode OE surrounds a part of the angular range of the airtight container 1 and faces only the area of the external electrode OE, a dielectric barrier discharge occurs, and the remaining area of the airtight container will exhibit transmission as ultraviolet The role of the window. If the external electrode O E surrounds the airtight container 1 at an angle ranging from 90 ° to 240 °. Within the range, a large amount of ultraviolet rays can be radiated by the dielectric barrier discharge, and the emitted ultraviolet rays can be irradiated at a more ideal angle. In addition, if the surrounding range of the external electrode OE is within the range of 120 to 180 °, in addition to the aforementioned effects, the assembly and disassembly of the external electrode OE and the airtight container 1 and the production of the external electrode may change. easily. The curved surface of the external electrode OE may be ultraviolet reflective or non-reflective. Furthermore, the external electrode OE may be in any of a possible state and a state in which it is impossible to attach and detach with respect to the airtight container -19- 200535902 (16). The external electrode OE has a length approximately equal to the tube axis direction of the internal electrode 2. In this way, a dielectric barrier discharge can be generated along the tube axis direction of the airtight container 1.

Furthermore, a middle portion such as a central portion in the tube axis direction of the external electrode OE can be engraved with a fitting groove 6 and a suction hole 7 that accommodate a spacer S 1 described later. As shown in Figs. 4 and 5, the fitting grooves 6 are formed perpendicular to the tube axis' and open to the bottom surface of the external electrode OE. The suction hole 7 is formed to cross the fitting groove 6 and penetrate the vertical direction of the external electrode OE. As an example of this embodiment, the external electrode OE is formed by forming a groove-shaped aluminum block with a bottom surface formed by a concave arc-shaped curved surface. ≪ About the gap forming means S > The gap forming means s, which is connected to the airtight container], at least the entire length of the tube axis direction spanning the effective length of the tube is' outside the airtight container 1 and the external electrode OE Means for forming a gap g that satisfies the condition of the formula ≦ GS 1.0 (unit: mm); in the present invention, the specific structure is not particularly limited. In addition, in this embodiment, the gap forming means S is constituted by the spacer S 1 and the arc tube supporting mechanism S 2. The reason why the gap G is limited to satisfy the condition of the formula 0 < g $ 1.0 (unit: mm) is as follows. That is, if the gap G is 0, friction occurs between the outer surface of the airtight container 1 and the external electrode 0E, and undesirable particles are generated, which is not acceptable. Conversely, if the gap G exceeds -20- 200535902 (17)

1 · 0 m m, since the electrostatic capacity formed between the external electrode Ο E and the discharge space becomes too small, when a reasonable voltage is applied, it becomes difficult to cause a stable dielectric barrier discharge, so it is not possible. In addition, even if a phase barrier voltage is applied to generate a dielectric barrier discharge, the amount of ultraviolet rays generated is excessively reduced. Therefore, the cost of a lighting circuit, an ultraviolet irradiation device, etc. will increase. On the other hand, if the gap G is within a range satisfying the aforementioned formula, in addition to being able to prevent particles caused by friction between the outer surface of the airtight container 1 and the external electrode OE, it is possible to ensure a desired amount of ultraviolet radiation. The gap G is preferably within a range satisfying the condition of 0.05 S G S 0.5 (unit mm). That is, if the gap G is 0.05 mm or more, it is easy to form a constant gap continuously in the tube axis direction of the airtight container 1. On the other hand, if the gap is less than 0.05 mm, since it is necessary to avoid the slight bending of the airtight container 1 which is difficult to manufacture, the formation of a certain gap G tends to be slightly difficult along the tube axis direction. When the gap G is 0.5 mm or less, the amount of ultraviolet rays generated is sufficiently increased. The gap G is preferably formed by space. However, it is desirable that the surface of the airtight container 1 in the irradiation direction is formed along the tube axis direction without adversely affecting the ultraviolet illuminance distribution, and in a range where particles do not occur, and is formed by the presence of an insulator. One thing is allowed. Furthermore, in order to fix the external electrode OE and the airtight container 1 to each other, both ends of the external electrode OE and the airtight container 1 can be provided at a portion located on the end side away from the effective length of the lamp tube. , Fixed to each other. For this fixing, a part of the end portion of the external electrode OE is allowed to touch the outside of the airtight container 1 for the following reasons. That is, due to the aforementioned contact, even the ultraviolet illuminance distribution along the tube axis direction in the surface on the irradiated side of the dielectric barrier discharge lamp has an effect, since it is a part other than the effective length of the lamp tube, So no problem.

The spacer s 1 is located at the middle portion of the effective length of the dielectric barrier discharge lamp EX L, for example, at the center portion, in order to set the gap G between the airtight container 1 and the external electrode OE along the airtight container 1. The direction of the tube axis is kept within the aforementioned predetermined range, and is attached as desired. Furthermore, it can be formed using any of a conductive substance and an insulating substance. As a conductive material, stainless steel (SUS) is suitable due to its abrasion resistance. In addition, as insulating materials, quartz glass, ceramics, and the like are also abrasion-resistant, so they are suitable. In order to limit the size of the gap G between the external electrode OE and the airtight container 1 to a desired range, the spacer s 1 is, for example, a curved surface fitted to the airtight container 1 side of the external electrode OE. Was installed. However, when the spacer S 1 is formed of a conductive material such as S U S, the width dimension of the spacer S 1 in the tube axis direction, that is, the wall thickness, should be formed to be 3 mm or less. In this way, even if the spacer s 丨 is configured as a conductive ground contact external electrode OE, the illuminance distribution in the tube axis direction is caused by the strong dielectric barrier discharge that occurs around the spacer s' 丨. Does not change to an undesirable level. Furthermore, this has been confirmed experimentally. Also, since the position of the airtight container 1 is fixed relative to the external electrode OE in accordance with regulations, the spacer S 1 is preferably provided with a concave portion r fitted to the outer periphery of the airtight container 1 and holding it. . To achieve this concave shape -22- 200535902 (19)

The spacer s 1 can be formed by cutting a part of the plate material to form the concave portion of the fitted air-tight container 1 or by bending a band-shaped metal member to form the concave portion of the fitted air-tight container 1. To constitute. In the case of using the spacer member S 1 of the former configuration, a concave groove 6 of the outer curved surface of the external electrode OE can be formed with a fitting groove 6 perpendicular to the tube axis direction, and the spacer S 1 can be attached to the fitting. Hegou 6 in. In the case where the spacer S1 has the latter configuration, the spacer S1 can be attached by attaching the bent spacer S1 to the concave curved surface of the external electrode OE. It is allowable that the part of the spacer S I facing the airtight container 1 is formed to contact the outside of the airtight container 1 or to form a slight gap. Furthermore, the number of the spacers S1 is not particularly limited, but the number of the spacers S1 can be reduced as much as possible, so long as the airtight container can be limited to the desired range. For example, as a standard, as long as the airtight container 1 includes a structure that is held by the spacer S 1 and fixed or held on the external electrode OE at an interval of about 500 to 800 mm, it can be reliably set. The gap between the external electrode OE and the airtight container 1 is maintained within a predetermined range. The arc tube support mechanism S2 is constituted by the pair of support portions 5 and the positioning arm 8 described above. The positioning arm 8 has a pair of projections extending from both ends in the tube axis direction of the external electrode OE, and has a pair of support portions 5 and 5 at its front end portion. As a result, both ends of the airtight container 1 are supported by the support portions 5 and 5 and the positioning arm 8 at both ends of the external electrode OE while forming the aforementioned gap G. As an example of this aspect, the gap G between the outer surface of the airtight container 1 and the external electric -23- 200535902 (20) electrode OE is set to 0 · 3 5 ± 0.1 5 by the gap forming means S. mm.

< About the suction means A A > The suction means a a is composed of the suction hole 7 and an exhaust pipe (not shown). Since the suction hole 7 is formed with a fitting groove 6 that crosses the external electrode OE, the opening at the lower end thereof is divided into both sides of the spacer S1 of the gap forming means S. Therefore, the air on both sides of the spacer S1 is well sucked in the suction hole 7. In this way, the air exhausted to the outside of the external electrode OE through the suction hole 7 is further exhausted to the outside of the ultraviolet irradiation device through the exhaust pipe. Therefore, even the spacer S1 and the airtight container! The friction and the spacer S1 are ground to generate fine particles and traces of powder particles. By the suction means A A, the powder particles are quickly discharged to the outside together with the surrounding air. < High-frequency lighting circuit HFI > The high-frequency lighting circuit HFI applies a high-frequency voltage between the internal electrode 2 and the external electrode OE of the dielectric barrier discharge lamp EXL to excite the dielectric barrier discharge. Light EXL while lighting. In addition, the high-frequency lighting circuit HFI is mainly composed of a parallel inverter; its high-frequency outputs are: its high-potential side passes through the power supply lines 4, 4 and passes through a dielectric barrier discharge lamp EXL The pair of power supply sections 3 A and 3 B of the light-emitting tube LT in the middle are applied to the internal electrode 2; and the low potential (ground) side is applied to the external electrode OE. < Lighting operation of dielectric barrier discharge lamp EXL > Dielectric potential -24- 200535902 (21)

As described above, the barrier discharge lamp EXL is connected to the high-frequency output terminal of the high-frequency lighting circuit HFI. Therefore, if the high-frequency lighting circuit HFI is input to an input power (not shown), the high-frequency output generated by the high-frequency lighting circuit HFI will be It is applied between the internal electrode 2 and the external electrode OE facing the internal electrode 2 across the wall surface of the airtight container 1. As a result, a dielectric barrier discharge occurs inside the airtight container 1. By this dielectric barrier discharge, xenon excimer emits vacuum ultraviolet light with a center wavelength of 172 nm. Since the vacuum ultraviolet light is led out through the wall surface of the airtight container 1, the ultraviolet light can be used according to the purpose. Hereinafter, the second to fourth aspects of the dielectric barrier discharge lamp for implementing the present invention will be described. In each embodiment, the same parts as those in FIGS. 1 to 6 are denoted by the same reference numerals, and descriptions thereof are omitted. [Second Embodiment] Fig. 6 is a side sectional view showing a second embodiment of a dielectric barrier discharge lamp for implementing the present invention. In this embodiment, the arc tube LT of the dielectric barrier discharge lamp EXL is different. That is, the light-emitting tube L T has an air-tight container 1 / having a double-tube structure, and is formed into a cylindrical discharge space 1 a >. Therefore, the airtight container 1 has a ring-shaped cross section, and is shaped like a bamboo wheel (fish roll) for food as a whole. In addition, the internal electrode 2 is formed in a cylindrical shape and is arranged inside the airtight container] and abuts against the outer surface of the airtight container 1-. It is formed using a plate material or a mesh material made of a conductive material. -25- 200535902 (22) The external electrode OE has the same structure as the external electrode OE in the first aspect, and is arranged to face the airtight container 1 /. [Third aspect]

7 to 10 are views showing a third embodiment of a dielectric barrier discharge lamp for implementing the present invention; FIG. 7 is a front view of the whole; FIG. 8 is a partial front view of both ends; FIG. 9 is a cross-sectional view at the middle of the tube axis direction, which is perpendicular to the tube axis direction; FIG. 10 is a partial side view of the lamp support mechanism viewed from the arrow direction of FIG. 8. This embodiment is different from the first embodiment mainly in that the entirety of the dielectric barrier discharge lamp EXL can be constructed by suspending the external electrode OE. Also, the conductive suspension arms Π, 1 1 bent into an inverted L shape support both ends of the external electrode OE, and at the same time, the external electrodes OE conduct the suspension arms 11, 11. The external electrode OE is directly formed in the aluminum block by a cooling means 9 composed of a cooling water path by extrusion molding or the like. In addition, the external electrode OE passes through the suspension arms 11 and 11 and is connected to the ground potential. The suspension arm 11 supports the airtight container 1 at the lower end portion of the figure by supporting the external electrode OE and the light emitting tube LT. At the upper end portion of the figure, it is fixed to a ground potential portion such as an ultraviolet irradiation device. In addition, the suspension arm Π, as shown in FIG. 8 in particular, is connected to the power source terminal 2 connected to the internal electrode 2 to be insulated. The power terminal 12 is connected to an output terminal of a high potential side of a high-frequency lighting circuit (not shown) through an insulated connection conductor (not shown). In addition, the output terminal on the low potential side of the high -26- 200535902 (23) frequency lighting circuit is connected to the ground potential. Also, the "power source 10" is connected to the internal electrode 2 via the conductive support plate 13 and the power supply line 4 '. The positioning arm 8 is fixed to the end surface of the external electrode 0E by a screw 8a. Furthermore, as shown in FIG. 8 and FIG. 10, the contact support portion 5-is provided with a contact portion 8 b. In Fig. 8, the support portion 5 on the right side includes an insulator 5d, a relay plate 5e, and a plate spring 5f in addition to the cover 5a, the fastening ring d 5b, and the mounting arm 5c. The insulator 5d is fixed to the mounting arm 5c. The relay board 5e is fixed to the insulator 5d so as to be in an insulating relationship with the mounting arm 5c. The leaf spring 5 f exists in a mechanical support relationship and exists between the relay plate 5 e and the conductive support plate 13. v The mounting part 5c on the left side of the support part 5 in Fig. 8 is directly fixed to the leaf spring 5f. In addition, the power supply part 3 A on the left side connected to the internal electrode 2 as shown in FIG. 2 is not connected to the high-frequency power supply circuit, and is in an ungrounded state. In this way, the light-emitting tube LT is mounted on the suspension arm 11 along with the airtight container 1 through the above-mentioned support portion 5. In this state, the 'light-emitting tube. LT' is supported by the airtight container 1 so as to be elastically pushed toward the external electrode by the spring action of the plate spring 5 f and abut against the positioning arm 8. As a result, the gap G between the outer surface of the airtight container and the external electrode OE satisfies the aforementioned prescribed conditions. In addition, in Figs. 7 and 8, the illustration of the internal electrode 2 is omitted. Fig. 11 and Fig. 2 show the tube surface illuminance when the gap Q is changed in the third form of the dielectric -27- 200535902 (24) mass barrier discharge lamp used to implement the present invention; Figure 1 is a table describing measurement data, and Figure 12 is a chart. That is, based on the tube surface illuminance when the gap G is changed from 0 to 0.6 mm every 0.1 mm, the data obtained by measurement is directly below the central portion of the light emitting tube LT. In addition, in Figure 12_, the horizontal axis indicates the gap G (mm), and the vertical axis indicates the relative tube with a gap of 0 mm and a tube surface illuminance of 100% when there is no gap g. Face Illumination (%). The lighting conditions of the dielectric barrier discharge lamp EXL are fixed to a lamp voltage of 173.2Λ /, a lamp current of 2.65A, and a lamp power of 45 9W. From Figure 1 and Figure 12, it can be seen that as the gap G becomes larger, the illuminance of the tube surface is lowered. 'Right gap ~ G is 0 · 5 mm or less' is greater than 80% of the illuminance of the tube surface when the gap is 0 mm in. :,. [4th aspect]

13 and 14 show a fourth embodiment of a dielectric barrier discharge lamp for implementing the present invention; FIG. 13 is a side sectional view of a main part, and FIG. 14 is a tube shaft of an airtight container A sectional view of the main part of the direction. The difference between this form is that in the third form, the spacer S 1 and the suction means AA are attached, that is, the spacer S 1 is fixed at the lower end portion by the fixing tools 15 and 15. So that it will not fall. The suction means AA includes an exhaust manifold 16 and an exhaust pipe 17 in addition to the suction hole 7. The exhaust gas collection box 16 is an atmosphere attracted by the suction holes 7 disposed on the top surface of the figure of the external electrode OE, such as air-28-200535902 (25) 'collecting mouth' Μ 自 被The exhaust port formed on the top of the exhaust port is "exhausted. The row V is 17 and its base V is connected to the exhaust port through the pipe joint 17a, and its front end reaches the end of the dielectric barrier discharge lamp eXL. The exhaust position shown in the figure. Figures 15 to 18 show the ultraviolet cleaning device as one form of the ultraviolet irradiation device for implementing the present invention; Figure r5 is a front view of the front surface, Figure 16 The drawing is a bottom view, FIG. 7 is a cross-sectional view along χνιι-χνιι ϋ along FIG. 6 and FIG. 18 is a circuit diagram of a high-frequency lighting circuit. In each of the drawings, about The same parts in the figure are marked with the same symbols and description is omitted. The ultraviolet irradiation device UVW includes: an ultraviolet irradiation device body 21, a high-frequency lighting circuit 22, and a plurality of dielectric barrier discharge lamps EXL.

In the present invention, the "ultraviolet irradiation device UVW" means all devices that use ultraviolet rays generated by a dielectric barrier discharge lamp EXL. For example, a 'semiconductor stepper, a light cleaning device, a light hardening device, and a light drying device. The ultraviolet irradiation device main body 21 is composed of the remaining parts except the dielectric barrier discharge lamp εXL and the high-frequency lighting circuit 22 from the ultraviolet irradiation device UVW. The dielectric barrier discharge lamp EXL can be used from one to a plurality as necessary (in the form shown in FIG. 17, plural ones are arranged adjacently). The high-frequency lighting circuit 22 applies the generated high-frequency voltage to a dielectric barrier discharge lamp EXL to light it. Therefore, the high-frequency lighting circuit 22 includes a high-frequency generation circuit to generate a high-frequency voltage, and supplies a dielectric barrier discharge lamp with high-frequency power required for lighting. In addition, the high frequency is from -29-200535902 (26) The frequency is more than 10kHz, and the frequency is suitably 100kHz ~ 2MHz. Furthermore, the high-frequency lighting circuit 22 applies a high-frequency voltage of about 3,000 to 5,000 volts during the stable lighting of the dielectric barrier discharge lamp ex1. . Furthermore, the starting voltage of the dielectric barrier discharge lamp EXL is 2 to 6.0 kVp-p. The secondary open-circuit voltage of the high-frequency lighting circuit 22 is increased to the starting voltage.

Up to voltage 'can make starting easy. In this case, as a high-frequency generating means, if a parallel inverter is used as the main body, a high step-up ratio can be easily obtained. At the same time, for example, even if the crimping state of the external electrode OE changes, the outside of the dielectric barrier discharge lamp EXL The capacitance between the electrode OE and the internal electrode 2 changes, and since it does not affect the high-frequency output, the design of the high-frequency lighting circuit 22 is easy, which is suitable. In addition, if the high-frequency output waveform is a sine wave, when the dielectric barrier discharge lamp EXL is turned on, the noise changes / J / '〇 However,' If necessary, a high-frequency lighting circuit 22 and Another means of initiating the pulse wave. Furthermore, the dielectric barrier discharge lamp E X L and the local-frequency lighting circuit 22 are preferably arranged close to each other, but if necessary, they can also be arranged apart from each other. Dielectric barrier discharge lamps E X L are different from general discharge lamps' and do not need to be connected in series with current limiting means. However, in order to adjust the lamp current to a predetermined value, an appropriate resistance can be connected in series as necessary to light the lamp. When the dielectric barrier discharge lamp EXL is connected to the high-frequency lighting circuit 22, if the external electrode OE is grounded, noise generation is reduced. As long as the high-frequency lighting circuit 22 outputs the pulse wave voltage, other configurations are not required. For example, a rectangular wave pulse wave can be obtained by using a rectangular wave inverter. However, it is also possible to use a sine wave output inverter to obtain a sine wave pulse wave.

In this way, in the present invention, since it is possible to avoid the occurrence of black adhesions caused by the friction between the external electrode OE and the airtight container 1 from the dielectric barrier discharge lamp EXL, the There is no need to arrange a light projection window formed of synthetic quartz glass between the dielectric barrier discharge lamps EXL. Therefore, there is no loss of ultraviolet rays due to the light-emitting window, and since the irradiation distance to the object to be irradiated can be shortened, the ultraviolet illuminance can be increased and the cost can be reduced. In addition, the main body of the ultraviolet irradiation device 21 is formed into a box shape as a whole, and the inside thereof is divided into an ultraviolet irradiation room, a 2 a, and a power supply room 21 b in the vertical direction. The ultraviolet irradiation chamber 2 1 a and the power source chamber 2 1 b are configured to be opened and closed by a hinge 21 c. A plurality of dielectric barrier discharge lamps EXL, which will be described later, are arranged in parallel in the ultraviolet irradiation chamber 21a. The plurality of dielectric barrier discharge lamps EXL have external electrodes formed as a single block. Therefore, a plurality of concavely curved surfaces of the external electrode OE are arranged adjacent to each other in parallel. In addition, the ultraviolet irradiation chamber 2 1 a is fixedly arranged on the upper part of the conveyance means of the irradiated object in the cleaning device, and the bottom surface thereof is open, and is configured so that the irradiated object passing directly below the bottom surface ( (Not shown), irradiate vacuum ultraviolet light at an extremely close distance. In FIG. 16, the hatched portion ′ indicates a region where ultraviolet rays are effectively irradiated. In addition, although the illustration is omitted on the top surfaces of the external electrodes of the plurality of dielectric barrier discharge lamps EXL, -31-200535902 (28) the suction holes of each of the dielectric barrier discharge lamps EXL are provided. The exhaust collecting box passes through the exhaust collecting box and connects with the exhaust pipe. Furthermore, the air around the spacer S 1 of the airtight container 1 which is sucked from the suction hole via the exhaust pipe is configured to be exhausted to the outside.

The power supply room 2 1 b accommodates a high-frequency lighting circuit 22 and a control circuit (not shown) in the power supply room 2 b. The hinge 21 c is used as the center of rotation. In addition, the symbol 2 1 b 1 is a handle for holding when the power supply room 2 1 b rotates; the symbol 2 i b2 is a handle for carrying the ultraviolet irradiation device body 21 or the power supply room 2 1 b; the symbol 2 1 b Cover for 3 series power wiring. The high-frequency lighting circuit 2 2 is housed in the power supply room 2113, and the protective cover 2 lb3 is used to transform the spectrum into the power supply room 21b. The power source generates a high-frequency voltage, and then supplies power to a plurality of each Dielectric barrier discharge lamp EXL. The high-frequency lighting circuit 22 has a circuit configuration shown in FIG. 18. That is, the “local frequency lighting circuit 22” is mainly composed of an inductor L, a pair of switching elements Q] and Q2, an output transformer OT, a resonance capacitor C1, and a control circuit CC, and has a DC input terminal t. And 12, the high-frequency output terminals t3 and t4 are parallel inverters. The DC input terminals 11 and t2 are connected to a DC current (not shown) whose output DC voltage is variable by a step-up chopper circuit or the like. The high-frequency output terminals 13 and 14 are connected to a dielectric barrier discharge lamp. The DC input terminal 11 passes through the inductor 1 in series and is connected to the middle point of the primary coil pw 1 of the output transformer OT. The DC input terminal G is connected to the connection point of a pair of switching elements Q 1 and Q 2. A pair of switch elements -32- 200535902 (29)

The pieces Q1 and Q2 are connected in series, and are connected in parallel with respect to the primary coils Pwl, Pw2, and pw3 of the output transformer 0τ. The output transformer τ has three sets of primary coils pwl, pw2, and pw3, three sets of secondary coils swi, sw2, and sw3, a drive coil fw, and a detection coil dw. Further, the primary coils pwl, Pw2, pw3 and the secondary coils swl, sw2, sw3 are paired. In addition, the primary coils pwl, pw2, and pw3 are connected in parallel with each other. On the other hand, the two secondary coils sw 1, sw 2, sw 3 are connected in series with each other, and two% of them are connected to the drum frequency output terminals 13, t4. The resonance capacitor C 1 is connected in parallel with the primary coils pwl,. Pw2, and pw3. The drive coil fw and the detection coil d w are connected to a control circuit c C described later. The control circuit CC is composed of a driving circuit Dc and a protection circuit pC. The input terminal of the drive circuit DC is connected to the drive coil fw to generate a drive signal, and is supplied to the switching elements Q1 and Q2. As a result, the parallel inverter 'oscillates spontaneously. The input terminal of the protection circuit PC is connected to the detection coil dw. Once the activation of the dielectric barrier discharge lamp EXL is detected, for example, the DC frequency output voltage is reduced by controlling a DC power supply or the like. In this way, the high-frequency lighting circuit 22 has the aforementioned circuit configuration, so that the dielectric barrier discharge lamp EXL is turned on and turned on. In addition, the protection circuit PC monitors the detection voltage appearing in the detection coil dw of the output transformer OT. After the start-up, if the high-frequency output voltage rises, it is reduced, and a protection operation can be performed so that it is applied to the switching element Q. 1. The voltage on Q2 will not exceed its withstand voltage. In addition, it can adjust the driving signal output from the DC of the driving circuit in accordance with the degree of high-frequency output. In addition, a plurality of dielectric barrier discharge lamps EXL are arranged adjacent to each other -33- 200535902 (30), and are arranged in the ultraviolet irradiation chamber 2 1 a. However, in order to make it easy to manufacture and maintain, each of the required dielectric barrier discharge lamps EXL can be attached and detached. In order to allow the cooling water to flow through the cooling water path of the external electrode OE, a pipe for supplying cooling water is connected to the inflow port, and a pipe for draining water is connected to the outflow port.

[Effects of the Invention] According to the present invention, it is possible to provide a dielectric barrier discharge lamp and an ultraviolet irradiation device using the discharge lamp, and suppress powder generated by friction between an external electrode and an airtight container due to a difference in thermal expansion. Particles, and form a good dielectric barrier. [Brief Description of the Drawings] FIG. 1 is a front view, partly in section, of a first form of a dielectric barrier discharge lamp for implementing the present invention. Fig. 2 is a partially cut-away front view of the same arc tube. Fig. 3 is a partially cut-away front view of a portion of a support portion and a power supply portion of the same arc tube. Fig. 4 is a front cross-sectional view of a main part showing a portion of the same spacer and suction means. Fig. 5 is a side sectional view of the same member. Fig. 6 is a side sectional view of a second embodiment of a dielectric barrier discharge lamp for implementing the present invention. -34- 200535902 (31) FIG. 7 is a partial cross-sectional front view of the front view of the third embodiment of the dielectric potential ink discharge lamp for implementing the present invention. Fig. 8 is a partial front view of the same both ends. Fig. 9 is a cross-sectional view in a direction perpendicular to the tube axis at the middle portion in the tube axis direction. Fig. 10 is a partial side view of the same lamp support mechanism as viewed from the direction of the arrow in Fig. 8.

Fig. 11 is a table showing measurement data indicating the illuminance of the tube surface when the gap G is changed in the third embodiment of the dielectric barrier discharge lamp for implementing the present invention. Fig. 12 is a graph showing the illuminance of the tube surface when the gap is changed in a similar manner. Fig. 13 is a side sectional view of a main part of a fourth embodiment of a dielectric barrier discharge lamp for implementing the present invention. Fig. 14 is a sectional view of a main part in the tube axis direction of the same airtight container. Fig. 15 is a front cross-sectional view of an ultraviolet cleaning device which is one form of the ultraviolet irradiation device for implementing the present invention. Figure 16 is a bottom view of the same device. Fig. 17 is a cross-sectional view of the same device, taken along line XVlI-XVif of Fig. 16. Figure 18 is a circuit diagram of the same high-frequency lighting circuit. [Description of main component symbols] -35- 200535902 (32) 1: Airtight container 2: Internal electrode 4: Power supply line 5: Support section 7: Suction hole 8: Positioning arm A A · Suction method

EXL: Dielectric barrier discharge lamp G: Gap H F I: High-frequency lighting circuit LT: Light-emitting tube OE: External electrode 'S: Gap forming means S 1: Spacer S 2: Light-emitting tube support mechanism

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Claims (1)

200535902 十 X. Patent application scope 1. A dielectric barrier discharge lamp, which is characterized by having an airtight container, which is made of an elongated tube made of a UV-transparent material; an excimer generates a gas, which is Sealed in an airtight container; The internal electrode is configured to discharge the dielectric barrier in the airtight container, and can be generated in the entire length of the tube axis. The external electrode is connected to the outer surface of the airtight container. It is arranged along the direction of its tube axis, and acts in cooperation with the internal electrode, so that a dielectric barrier discharge can be generated in the airtight container; and a gap forming means, which runs along the airtight container In the direction of the tube axis, a gap G is formed between the airtight container and the external electrode, which satisfies the condition of the formula 0 < GS 丨 .〇 (unit nim). 2 — An ultraviolet irradiation device, comprising: a dielectric barrier discharge lamp described in item 1 of the scope of patent application; an ultraviolet irradiation device main body equipped with a dielectric barrier discharge lamp; and a dielectric substance High frequency lighting circuit for potential barrier lamp lighting. -37-