TWI264037B - Dielectric barrier discharge lamp, and ultraviolet-ray irradiation device - Google Patents

Abstract

To provide a dielectric barrier discharge lamp restrained from the generation of particles caused by the difference of thermal expansion, and provide an ultraviolet-ray irradiation device using the same. The dielectric barrier discharge lamp EXL comprises a slender tube-shaped airtight vessel 1 made of ultraviolet-ray transmissive material, an excimer generating gas sealed in the airtight vessel 1, a long inner electrode 2 arranged in the airtight vessel so as to generate the dielectric barrier discharge over whole axial direction, and an external electrode OE arranged on the outer face of the airtight vessel 1 with a gap of 0.05 to 1.0 mm along axial direction, acting so as to generate the dielectric barrier discharge in the airtight vessel 1 in cooperation with the inner electrode 2.

Description

1264037 (1) Description of the Invention [Technical Field of the Invention] The present invention relates to a dielectric barrier discharge lamp and an apparatus for using the same. [Prior Art] Conventionally, a halogen compound such as a ruthenium or a rare gas, which is described in most documents, is subjected to silent discharge and discharge, and an approximately monochromatic excimer discharge barrier discharge lamp is generated. . In the dielectric barrier discharge, pulsed. Since the pulsed current has a high-speed electron current, a substance that generates ultraviolet rays such as helium is temporarily closed (excimer state). When it returns to the base state, the efficiency reabsorption is short. Wavelength UV. Further, in the case of gas, 72 nm is a molecule having a large half-peak width at the center wavelength. The ultraviolet light of the wave is larger than the ultraviolet light having a wavelength of 254 nm obtained by a low-pressure mercury lamp, and is larger than the organic compound energy to be decomposed. Therefore, by irradiating ultraviolet rays having a wavelength of 1 to 72 nm, the organic compound is combined and decomposed and removed. Further, ultraviolet rays having a wavelength of 172 nm are irradiated in an air atmosphere, and the activated carbon is decomposed to generate activated oxygen, and carbon dioxide (C02) and water (H20) are generated by the reaction of the cut organic compound activated oxygen to remove the compound. . Therefore, the dielectric potential and discharge lamp external light source are very effective. Purple light

The dielectric potential of the rare gas, that is, the multi-synthesis molecule is released during the flow of the dielectric current, and can be cut by the combination of the length of 1 7 2 nm 1 8 5 nm or by the combination of the oxygen in the medium. So organic, as purple (2) 1264037

As a dielectric barrier discharge lamp, a dielectric barrier discharge lamp in which a dielectric barrier discharge is performed using an elongated tubular airtight container is known (refer to Patent Document 1). The dielectric barrier discharge lamp described in Patent Document 1 is configured such that an internal electrode having an elongated airtight container, extending in the axial direction in the airtight container, and a sealed inside the airtight container are formed. The light-emitting tube of the molecular gas is formed, and the aluminum lamp body having a cooling function and a concave curvature is used as an external electrode to abut against the outside of the airtight container, so that the same dielectric can be generated along the tube axis direction of the airtight container. The mass barrier discharges while rapidly dissipating the heat generated by the self-luminous tube to maintain high luminous efficiency. Further, since the external electrode and the airtight container are in close contact with each other, the both are crimped. In the case of using the above-described dielectric barrier discharge lamp for ultraviolet irradiation, a longer dielectric barrier discharge lamp was developed with the increase in the area of the irradiated object, and the discharge lamp used was effective. The length has more than 1 ηι. When a dielectric barrier discharge lamp of such a length is used, various industrial applications such as ashing of a large-surface liquid crystal substrate, curing of a photosensitive resin, and sterilization can be realized. [Patent Document 1] Japanese Patent Laid-Open Publication No. H03-119A 1 2 (Invention) [The problem to be solved by the invention] However, the length of the lamp in the dielectric barrier discharge lamp is 50. In the case of a short case of 0 mm or less, the structure in which the external electrode made of aluminum is closely adhered to the airtight container is not problematic, but the effective effective length of the lamp is -6 - (3) 1264037 is, for example, more than 1 (7). The length is already known to have the following problems. That is, with the flicker of the dielectric barrier discharge lamp, the influence of expansion and contraction occurs in each portion. The hermetic container of the dielectric barrier discharge lamp becomes about thirty to one hundred tens of degrees c when lighting. On the other hand, since the external electrode is cooled by the refrigerant, the temperature rise is suppressed. However, since the external electrode of the outer surface of the airtight container is formed of a metal material, the thermal expansion coefficient is large, and when the dielectric barrier discharge lamp is turned on, ^ is accompanied by an increase in the temperature of the airtight container. The temperature rises and expands, and when the light is turned off, it is cooled and contracted with the temperature of the lamp body. On the other hand, since the airtight container is formed of a material having a relatively low thermal expansion coefficient such as quartz glass, expansion and contraction accompanying the flicker are small.

As a result of the above configuration, friction occurs between the hermetic container and the external electrode accompanying the flashing of the dielectric barrier discharge lamp. If the length of the lamp exceeds 1 m, the positional shift between the two will be 1 mm or more. Further, with this friction, the external electrode is scraped, and the particles having a particle diameter of about 1 mm are liable to occur. If such a powder is generated, it will adhere to the surface of the airtight container and form a black deposit, which may adversely affect the ultraviolet illuminance or its distribution, or the powder may fall on the object to be irradiated. Damaged Object The object of the present invention is to provide a dielectric barrier discharge lamp and an ultraviolet irradiation apparatus using the same, which can prevent the occurrence of particles due to friction between the external electrode and the hermetic container. Further, a specific object of the present invention is to provide a dielectric barrier discharge lamp and an ultraviolet irradiation apparatus using the same, which are constructed between an airtight -7-(4) 1264037 container and an external electrode. The gap forming means "forming a gap within a predetermined range" prevents the occurrence of particles and forms a good dielectric barrier discharge. (Means for Solving the Problem) The dielectric barrier discharge lamp of the present invention is characterized by comprising:

The cooked trough is made into an elongated tubular shape formed of an ultraviolet permeable material; an excimer generates a gas which is enclosed in an airtight container; and the internal electrode 'is configured to be: in an airtight container, The dielectric barrier discharge can be generated in approximately the entire length of the tube axis direction; the external electrode is disposed outside the hermetic container, along the tube axis direction thereof, and by the internal electrode The synergy between the two functions is such that a dielectric barrier discharge can be generated in the hermetic container; and a gap forming means is formed between the hermetic container and the external electrode along the tube axis direction of the hermetic container. The formula 〇 < GS 1.0 (in mm) of the gap G of the condition. In the present invention, by having the above configuration, even if the lamp tube is flickered, even if expansion and contraction occur between the airtight container and the external electrode, at least the effective length portion of the bulb does not occur between the two. Friction, while at the same time forming a good dielectric barrier discharge. Therefore, even if the effective length of the tube exceeds 〖m, it can be avoided that when the external electrode is rubbed, the powder which is scraped and becomes fine particles adheres to the outside of the airtight container or falls, and the transmission window of the ultraviolet irradiation device Or, if there is no window (5) 1264037, there will be a problem of black attachments on the object to be irradiated. BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments for carrying out the invention will be described with reference to the drawings. [First form]

1 to 5 are views showing a first embodiment of a dielectric barrier discharge lamp for carrying out the present invention; Fig. 1 is a partial cross-sectional front view of a dielectric barrier discharge lamp, and Fig. 2 is an arc tube Partial cut front view, Fig. 3 is a front cross-sectional view showing a portion of the support portion of the arc tube and the power supply portion, and Fig. 4 is a front cross-sectional view showing a portion of the spacer and the suction means. Fig. 5 is a side cross-sectional view of the same member. In the present embodiment, the dielectric barrier discharge lamp EX L is composed of an airtight container 1, an excimer forming gas, an internal electrode 2, an external electrode OE, and a gap forming means S; the self-frequency lighting circuit HFI Was excited and lit. Further, the airtight container 1, the quasi-separated gas and the internal electrode 2 constitute an arc tube LT which is integrated in advance. Further, in the present embodiment, the heat absorbing means A A added to the above configuration is provided. <Light-emitting tube LT> The light-emitting tube LT has the above-described configuration, and has a pair of power supply portions 3 A 3 B and a pair of support portions 5 and 5 at both ends thereof. (About the airtight container 1) The airtight container is formed of ultraviolet light permeable (6) 1264037 material, and a slender discharge space 1 a is formed inside. For example, it is possible to form a structure in which both ends of the elongated tube are sealed and a cylindrical discharge space 1a is formed inside. Further, as in the second aspect to be described later, it is possible to form an elongated discharge space having a circular cross section and a cylindrical shape in the tube axis direction by sealing both ends of the coaxial and double-layered elongated tubes. The structure of 1 a > is ° as a material for ultraviolet ray permeability' is generally made using a synthetic quartz glass finish. However, in the present invention, as long as it is for the wave to be utilized

Long ultraviolet rays, which are permeable, can form a gas-tight container with the material. Further, the diameter of the hermetic container 1 is not particularly limited, and when the ultraviolet output is to be increased, it is appropriate to have an outer diameter of 2 m or more. Further, the thickness can be made 2 m or less, and it is preferably about 3 to 1 m m. On the other hand, the length of the hermetic container 1 is not limited at all in the case where dielectric barrier discharge is to be performed. Therefore, in the present invention, the hermetic container ' can be set to any desired length in accordance with the required length of the ultraviolet irradiation, that is, the effective length of the tube. In addition, the present invention is particularly effective for an effective length of the lamp tube of 1 m or more, and for example, it can be made into a strip body of about 2 m. Further, in order to secure a required amount of ultraviolet rays, a plurality of dielectric barrier discharge lamps EXL are allowed to be arranged side by side at a relatively narrow interval, and the hermetic container I is preferably a straight straight tube. But even if it is slightly bent, it will not interfere. In fact, when the elongated tube is formed, it is easy to produce a slight curvature, for example, about 1 200 mm with respect to the entire length, and a bend of up to about 1 mm will be formed. However, this degree of bending, -10- (7) (7)

1264037 is allowed to be treated as a straight tube. Further, as will be described later, in the case of the gap forming means S composed of the fitting S1, when the airtight portion is bent as described above, the portion of the curved back portion is disposed on the resisting member S], and the airtight container 1 is easily formed. The gap G between the external turns described later is limited to a predetermined range. Further, if the cross section of the tube is a round tube, since the manufacturing cost is relatively low, it is reasonable to adopt an elliptical shape, a square shape, or the like if necessary. Further, at the stage before the hermetic container 1 is sealed, after the discharge space 1 a inside the device 1 is exhausted, a means for enclosing the quasi-gas can connect the exhaust pipe (not shown) to the gas. In this case, the side surface of the portion where the external electrode OE is exposed to the outside in the vicinity of one end portion of the hermetic container 1 can be a gas pipe. Further, after exhausting through the exhaust pipe, the exhaust gas pipe is formed by enclosing the gas into the airtight container I, and the exhaust pipe is opened, and the airtight container 1 is airtight. The exhaust pipe which is formed on one end side of the airtight container 1 is arranged such that the airtight container 1 is longer than 1 m, and the exhaust time tends to be long in order to be charged. Therefore, if necessary, a pair of exhaust pipes are formed in the vicinity of both ends of the hermetic container 1 to be exhausted. Therefore, in this case, the pair of exhaust welding portions 4 are formed as an outer diameter of 18 mm and a length of 1 300 mm as an embodiment of the present embodiment, and the sealing portions 1 b at both ends are buried. An airtight container that shrinks the seal]. The spacer container 1 is connected to the space of the pole [0E, only the desired shape, but the desired section is to form the tight container 1 with the airtight volume molecules, and the exhaust pipe will be welded (tip-sealed from the rear). If the gas is used, the exhaust gas can be specially constructed and the ground can be formed. j The diameter of 16mm is provided with molybdenum foil-11 - (9) 1264037 The illustration of the internal electrode 2 is omitted.

As can be understood from the above description, in the present invention, the internal electrode 2 can be disposed inside the hermetic container 1 so that the entire length in the tube axis direction is the entire effective length of the tube. The electrode of the electric barrier discharge is preferably an electrode that is long in the tube length direction, and the rest may be of any configuration. For example, it is permissible to select various known configurations such as a rod shape, a plate shape, a mesh shape, and the like according to an arbitrary expectation. Further, the material constituting the internal electrode 2 is not particularly limited, and for example, a fire-resistant metal such as tungsten, molybdenum or nickel can be used. Tungsten or nickel, due to its relatively small work function, is easy to emit electrons and is effective in reducing the starting voltage. Next, an appropriate configuration example of the internal electrode 2 shown in Fig. 2 will be described. That is, the internal electrode 2 is enclosed in the airtight container 1, and a plurality of independent mesh portions 2b are dispersedly disposed in the axial direction of the airtight container 1, and are formed to be separated by a gap therebetween. The mesh of the configuration. Further, the plurality of mesh portions 2b' are connected to each other via the connecting portion 2a to form an integrated structure, and are disposed inside the airtight container 1 in a state of being inserted. The amount of ultraviolet rays generated can be relatively increased by using the internal electrode 2' of the hermetic container 1. Further, the mesh portion 2b may be continuous or also separable for the circumferential direction. Therefore, in the present invention, in the case where the internal electrodes 2 are formed in a mesh shape, the mesh portions 2 b 'specifically, for example, are formed as separate spirals, respectively, spirally or coil-shaped, or meshed Eyes, etc. are allowed. If the appropriate configuration example shown in Fig. 2 is further detailed, most of the -13- (10) 1264037

The mesh portion 2b is connected by a plurality of connecting portions 2a to be electrically conductively connected so as to be configurable at a predetermined pitch, and the connecting portion 2a is configured to be along the airtight container. The center axis of 1 extends. Therefore, since the entire internal electrode 2 has a filament-like form such as a halogen bulb for copying, which has a plurality of annular anchors (corresponding to a mesh portion), when the internal electrode 2 is manufactured, The manufacturing equipment of the halogen bulb for copying can be used, and the manufacture of the internal electrode 2 becomes easy. However, if necessary, it is also possible to adopt a configuration in which the central portion of the airtight container 1 is shifted and the connecting portion 2a is directly connected to the portion of the ring of the mesh portion 2b. Further, the connecting portion 2a may have a linear shape of a single wire or a coil shape whose outer diameter is 20% or less with respect to the inner diameter of the airtight container. Further, it is preferable that the connecting portion 2a is packaged under a suitable tension, preferably in a state of applying a tension of 2 kg or more in the direction of the central axis. It is suitable to form the coil shape in the internal electrode 2 in order to apply the tension to the right. However, even if it is not a coil shape, the tension in the direction of the central axis can be applied to the joint portion 2a. The connecting portion 2a is easily sealed to the connecting portion 2a by sealing the end faces on the flat sealing portions 1b formed at both end portions of the airtight container 1 regardless of the shape. However, if necessary, only one end of the joint portion 2a may be sealed to one side of the airtight container 1, and the other end thereof may be at the other end side of the airtight container 1 by a suitable means such as a pile. The line (ancho: r wire) is fixed to the sealing portion 1b and can also apply tension to the joint portion 2a. On the other hand, in the case where the mesh portion 2b is formed in a spiral shape or a mesh shape, the portion of the spiral or the mesh functions as a function of the joint portion 2a-14 - (11) 1264037, and the plurality of mesh portions 2b They are mechanically and electrically connected to each other. However, by welding the joint portion 2a composed of a single or a plurality of rod-shaped bodies to the spiral-like or mesh-like mesh portion 2b, it is possible to impart better shape retaining property to the internal electrode 2. Alternatively, in place of the connecting portion 2a of the rod-like body, the connecting portion 2a is first attached to the bobbin, and the bobbin or the mesh-like net portion 2b is formed by the bobbin, and the shape retaining property is improved. Furthermore, the coil former,

It may be either insulating or electrically conductive. In the mesh portion 2b, the configuration of any of the above-described ones can impart stability to the shape of the entire internal electrode 2, and the handling can be facilitated. Moreover, the product of the pitch P(m) of the internal electrode 2' facing the axial direction of the mesh portion 2b and the pressure p (Pa) of the excimer-forming gas to be described later is configured to be within a prescribed range. . Further, even if the sealing pressure of the excimer generating gas is increased as described later to improve the efficiency of the bulb, it is preferable that the distance between the mesh portion 2b and the inner wall surface of the airtight container 1 is 3 mm or less. When the distance is 3 mm or less, the discharge sustaining voltage can be suppressed to 1 〇 〇 〇 V or less under certain conditions. Next, the support structure and the power supply structure in the case where the internal electrode 2 is disposed in the inside of the hermetic container 1 formed of quartz glass will be described. When the inner electrode 2 is to be sealed in the hermetic container, as shown in Fig. 2, the sealing structure using the metal foil 1b can be used. In other words, the linear end portion 2c formed by extending both ends of the connecting portion 2a of the internal electrode 2 is joined to the metal foil by welding or the like, and the internal electrode 2 is inserted into the airtight portion. After the inside of the container, the quartz glass at the end is heated to self-seal the upper surface of the metal foil 1 b 1 in a softened state, and is shrunk -15-(12) 1264037. If so, at the end of the hermetic container 1, the sealing portion Ib is formed, and the internal electrode 2 is supported at a predetermined position.

As an embodiment of the present embodiment, a tension of about 2 kg is applied to the internal electrode 2 to be mounted in the discharge space 1a of the hermetic container 1, which firstly passes the wire diameter 〇· 2 6 m ηι The tungsten wire is wound into a coil having an outer diameter of 1 · 2 mm to form a joint portion 2a, and is formed by an annular anchor in which the mesh portion 2b is attached to the joint portion 2a at a certain pitch of 15 mm. . (Power Supply Units 3A, 3B) The power supply units 3A and 3B constitute a power supply terminal for supplying a bulb current required for discharging the dielectric barrier to the internal electrode 2. Further, as desired, an arbitrary number of power supply portions can be disposed so that power can be supplied in parallel from one end portion or both end portions or/and intermediate portions of the internal electrode 2. That is, in the case where power is supplied only from one end portion of the internal electrode, it is sufficient that at least the one end portion is provided with the power supply portion. In the case of supplying power from both ends, it is sufficient that the pair of power supply portions 3 A, 3 B are disposed at both ends of the airtight container 1 . In addition, when power is supplied from the intermediate portion of the airtight container 1, a desired number of power supply portions can be disposed in the intermediate portion of the airtight container 1. Further, the power supply units 3 A and 3 B may be integrally formed with the internal electrode 2 by extending the internal electrode 2, or may be connected to a member prepared as another individual by means of welding or caulking. On the internal electrode 2. Further, the power supply units 3 A and 3 B are allowed to have various shapes such as a line shape, a rod shape, a button shape, and a plug shape. Further, it is also possible to supply only one of -1 〇 - (13) 1264037 electric parts 3 A, 3 B, and the other side is previously made ungrounded.

As an embodiment of the present embodiment, the power supply portions 3A, 3B are respectively formed in a rod shape 5, and the inner ends thereof are welded to the sealed metal case 1b which has been embedded in the sealing portion 1b at both ends of the airtight container 1. In the upper end, the outer end is protruded from the sealing portion 1b formed at both ends of the airtight container 1 to the outside along the tube axis. Further, the outer ends of the power supply portions 3 A and 3 B are connected to the inside of the support portion 5 to be described later, and are respectively connected to the power supply line 4 by sewing. Further, the power supply line 4 is connected to the output terminal of the high frequency lighting circuit HFI to be described later. (Support portion) The support portion 5' includes a lid body 5a having a bottomed cylindrical shape, a fastening ring 5b, and a mounting arm 5c as shown in Fig. 3. The cover 5a surrounds the end of the light pipe LT. Moreover, the insertion hole 5 a 1 of the power supply line 4 is provided at the bottom. The fastening ring 5b is disposed at the open end of the lid body 5a, and supports the arc tube L T by fastening the end portion of the airtight container 1 from the outside thereof. The mounting arm 5 c protrudes upward from the side surface of the cover 5 a in the drawing, and the top surface of the cover 5 a is in contact with the positioning arm 8 shown in FIG. 1 , and the light-emitting tube LT is used. Installed in a fixed part not shown. Further, the positioning arm 8 defines an arc tube extending from both ends in the tube axis direction of the external electrode OE toward the end portion of the airtight container 1, and thus the mounting position of the airtight container 1 is defined. Therefore, the positioning arm 8 constitutes the arc tube support mechanism S 2 together with the support portion 5, and a gap G of a predetermined range is formed between the outer surface of the airtight container 1 and the external electrode ΟE. Furthermore, the detailed configuration will be described later. -17 - (14) 1264037

<About the external electrode 〇E &gt; The external electrode Ο E, at least in the effective length portion of the dielectric temporary ink discharge lamp EXL, is disposed so as to be along the outer surface of the hermetic container 1 along the tube axis direction thereof, It can extend by maintaining the gap G prescribed later. Moreover, the external electrode 〇e passes through at least one wall surface of the hermetic container 1 and faces the internal electrode 2, and acts by a synergy between the external electrode 〇e and the internal electrode 2 so that it can be in an airtight container In the discharge space 1 a of 1 , a dielectric barrier is formed which uses a wall surface of the hermetic container as a dielectric. Further, in the present invention, the external electrode OE may be any of a rigid structure and a flexible structure. In the case of rigidity, it is permissible to form the external electrode OE as shown in the figure in the form of a block having a large heat capacity formed of a conductive metal. Therefore, it is possible to use a member which has been conventionally referred to as a lamp body as an external electrode as it is intended. In this case, it is not necessary to employ a structure in which the external electrode 〇E formed of a conventional aluminum plate is held between the lamp body and the airtight container 1. However, as long as a predetermined gap G is formed between the external electrode OE and the hermetic container 1, it is also permissible to interpose the external electrode OE of the thin plate between the lamp body and the light-emitting tube LT as desired. Further, in order to cool the region of the hermetic container 1 where the dielectric barrier discharge occurs, the cooling means 9 can be additionally disposed on the external electrode OE. In this case, the cooling means 9 may have any configuration, and is preferably configured such that a cooling water passage through which a refrigerant such as water flows is attached to the external electrode Ο E. In the embodiment shown in Fig. 5, the cooling means 9 is composed of a tubular cooling water passage and is formed to be welded to both side faces of the external electrode OE. -18- (15) 1264037 Further, the external electrode 〇E may be formed in a continuous planar shape or a mesh shape. Further, the term "mesh" means a mesh shape, a punched shape or a lattice shape.

Further, it is preferable that the external electrode OE has a curved surface that can surround a concave portion of a considerable portion of the outer circumference of the airtight container 1. The curved surface of the external electrode 〇 E can be selected to surround the outer circumference of the airtight container 1 to a degree of 60 to 300 degrees, preferably 90 to 240 degrees, and most preferably 120 to 180 degrees. The scope. Therefore, the portion of the hermetic container 1 which is not provided with the external electrode Ο E is exposed to the ultraviolet light from the wall surface of the hermetic container 1 by the angle range in which the surrounding angle is subtracted from 360°. The exposed portion is also irradiated to the outside along a relatively long distance along the tube axis direction of the arc tube L 能够 and can be used for various purposes. As described above, when the external electrode OE surrounds the angular range of a part of the hermetic container 1, the dielectric barrier discharge occurs only in the region facing the external electrode Ο E, and the remaining region of the hermetic container serves as the ultraviolet ray. The role of the window. If the external electrode OE surrounds the hermetic container 1, the angle ranges from 9 〇 to 24 。. Within the range of extent, a large amount of ultraviolet rays can be emitted by the dielectric barrier discharge, and the emitted ultraviolet rays are irradiated at a desired angle. Further, the surrounding range of the external electrode OE is ι2〇~8〇. In addition to the above effects, the assembly and decomposition between the external electrode OE and the hermetic container and the production of the external electrode are facilitated. Further, the curved surface of the outer first electrode OE may be ultraviolet reflective or non-reflective. Further, the external electrode OE ' with respect to the airtight container] may be any of a state in which the -19-(16) 1264037 is attached and detachable. Moreover, the external electrode OE has a length approximately equal to the tube axis direction of the internal electrode 2. As a result, a dielectric barrier discharge can occur along the tube axis direction of the hermetic container 1.

Further, in the intermediate portion of the external electrode Ο E in the tube axis direction, for example, the center portion, the fitting groove 6 and the intake hole 7 for accommodating the spacer S 1 to be described later can be formed. The fitting groove 6, as shown in Figs. 4 and 5, is formed perpendicular to the tube axis and opens to the bottom surface of the external electrode Ο E. The intake hole 7 is formed to extend across the fitting groove 6 and penetrate the vertical direction of the external electrode OE. As an embodiment of the present embodiment, the external electrode OE is formed by forming a groove-shaped aluminum block by forming a concave arc-shaped curved surface on the bottom surface. <The gap forming means S &gt; The gap forming means S is the entire area of the cross section of the tube of the airtight container 1 which is at least the effective length in the tube axis direction, and is outside the hermetic container 1 and the external electrode OE In the meantime, a means for forming a gap g satisfying the condition of the formula 0 &lt; GS 1.0 (unit: mm) is formed; and in the present invention, the specific configuration thereof is not particularly limited, and the present embodiment is provided by the spacer S 1 and the arc tube support mechanism S 2 constitute a gap forming means S. The gap G is defined as a reason that the condition of the formula 〇 &lt; g $ 1 . 0 (unit m m) can be satisfied, as described below. That is, if the gap G is 0, friction occurs between the outer surface of the airtight container 1 and the external electrode 〇 E, and undesired powder particles may occur, which is not possible. Conversely, if the gap G exceeds -20- (17) (17)

1264037 1.0 mm, since the capacitance formed between the external electrode OE and the discharge space becomes too small, when a reasonable voltage is applied, it becomes impossible to form a dielectric barrier discharge which is difficult to stabilize. Further, even if a high voltage is applied to generate a dielectric barrier discharge, the amount of ultraviolet rays is lowered. Therefore, the cost of the lighting circuit or the ultraviolet irradiation device will be increased. On the other hand, the gap G is in the range of satisfying the above formula, except that the particles generated by the friction between the outer surface of the airtight container 1 and the outer OE can be prevented, and the desired amount of line generation can be secured. Further, the gap G is desirably within the range of the condition of 〇·〇5 $ GS 〇.5 (that is, the gap G is easily continuous in the tube axis direction of the hermetic container 1 if it is 〇.〇5 mm or more. When a certain gap is formed, if the gap is less than 〇5 mm, it is necessary to avoid a slight bending of the dense container 1, and a certain gap formation tends to become slightly difficult along the tube axis direction. When the gap G is below 〇, the amount of ultraviolet ray generation is sufficiently increased. Further, the 'gap G is desirably formed by a space. However, the root gaze is along the surface in the irradiation direction of the tampon and the grain 1 The tube axis will have an adverse effect on the ultraviolet illuminance distribution, and there will be no occurrence of the fact that the powder is formed by the presence of the insulator, which is allowed to be repeated, in order to fix the external electrode ΟΕ between the airtight container 1 and the airtight container 1 'On both ends of the end portion away from the effective length of the tube, the both ends of the external electrode 0Ε and the hermetic container! can be fixed. For this fixing, a part of the end of the external electrode 〇Ε Quiet Phase will increase through the opposing electrode ultraviolet range such mm), then. The 5mm of the phase G of the phase G is the opposite of the mutual part of the grain. -21 - (18) 1264037 The outside of the airtight container 1 is allowed for the following reasons. That is, due to the aforementioned contact, even if the ultraviolet illuminance distribution ' along the tube axis direction in the surface on the irradiation side of the dielectric barrier discharge lamp has an influence, since it is a portion other than the effective length of the tube, So no problem.

The spacer s 1 is located at an intermediate portion of the effective length of the dielectric barrier discharge lamp EXL, for example, at the center portion, in order to separate the gap G between the hermetic container 1 and the external electrode OE, along the hermetic container 1 The tube axis direction is kept within the aforementioned predetermined range and is attached as desired. Further, it can be formed by any of a conductive material and an insulating material. As a conductive material, stainless steel (S U S ) is suitable for abrasion resistance. Further, as an insulating material, quartz glass, ceramics, and the like are also suitable for wear resistance. In order to limit the size of the gap G between the external electrode Ο E and the hermetic container 1 to a desired range, the spacer s 1, for example, is fitted to the curved surface portion of the external electrode OE on the side of the hermetic container 1 And was installed. However, in the case where the spacer S 1 is formed of a conductive material such as SUS, the width dimension of the spacer S 1 in the tube axis direction, that is, the wall degree should be formed to be 3 m or less. As a result, even if the spacer S1 is disposed in a state of electrically connecting the external electrode OE, the illuminance distribution in the tube axis direction does not change by the ferroelectric barrier discharge occurring around the spacer S]. To the extent of hope. Furthermore, this matter has been confirmed by experiments. Moreover, since the spacer S1 is fixed to the external electrode 〇E with respect to the position of the airtight container 1, it is preferable to provide the concave portion r which is fitted to the outer periphery of the airtight container 1 and held therein. . In order to achieve this concave shape -22 - (19) (19)

In the portion 1264037, the spacer S1 can be configured by cutting a part of the sheet material to heat the concave portion of the grain, or by bending the strip-shaped gold into the concave portion of the airtight container 1. In the case of using the front spacer S1, the fitting groove 6 perpendicular to the tube axis direction can be formed in the concave curved portion of the external electrode 〇 E, and the interval can be fitted into the fitting groove 6. Further, in the case of the spacer S 1 ., the spacer S can be attached by attaching the bent spacer S i to the curved surface which is externally curved. It is permissible that the portion of the spacer ί is closed by a slight gap which is formed in contact with the outer portion of the airtight container 1.

Further, the number of the spacers S1 is not particularly limited, but the number of the airtight containers 1 can be limited to a desired range. For example, as a standard, as long as 1 is made to contain the holding by the spacer S1, the outer electrode ΟΕ and the airtight container 1 are surely fixed or held on the external electrode 以 at intervals of 50,000. The C arc tube support mechanism S 2 is formed by the pair of branch arm 8 described above. The positioning arm 8 has a pair of protrusions extending from both ends in the direction of the external electric axis, and the first and fifth ends are abutted at the front end portion thereof. As a result, both ends of the hermetic container 1 are vias 5 and the positioning arm 8, and a gap G is supported at both end portions of the external electrode 〇 E. As an embodiment of the present embodiment, the outer surface of the airtight container 1 is formed into a fitting member, and the curved surface portion S1 of the shape of the shape of the installer is configured to face the air surface of the concave portion of the i-pole E or The formation is otherwise limited, and the airtight container should be made to the extent of 80 mm, so that the gap between the Ube 5 and the fixed pole E can be maintained on the side of the support portion 5 through the support portion 5 to form the aforementioned surface and external electricity. -23- (20) 1264037 The gap G between the poles E is set to 0 · 3 5 ± 0 · 1 5 mm by the gap forming means S.

&lt;About the suction means A A &gt; The intake means A A ' is composed of the intake hole 7 and an exhaust pipe (not shown). Since the suction hole 7 is formed to fit through the fitting groove 6 of the outer electrode Ο E, the opening end of the lower end thereof is divided into the both sides of the spacer S 1 of the gap forming means S. Therefore, the air on both sides of the spacer S 1 is well sucked in the suction hole 7. In this manner, the air that has been discharged through the inside of the air intake hole 7 to the outside of the external electrode Ο E is further discharged to the outside of the ultraviolet ray irradiation device by the exhaust pipe. Therefore, even if the spacer S1 and the airtight container are rubbed, the spacer S1 is ground to generate fine particles and a small amount of particles, and by the suction means AA, the particles are quickly discharged to the outside together with the surrounding air. . &lt;High-frequency lighting circuit HFI &gt; High-frequency lighting circuit HFI applies a high-frequency voltage between the internal electrode 2 of the dielectric barrier discharge lamp EXL and the external electrode OE to excite the dielectric barrier discharge Lights on the EXL and lights up. Moreover, the 'high-frequency lighting circuit HFI is configured mainly by a parallel inverter; its high-frequency output 'is high-potential side through the power supply lines 4, 4, respectively, and via a dielectric barrier discharge lamp EXL The pair of power supply portions 3A, 3B of the light-emitting tube LT are applied to the internal electrode 2, and the low potential (ground) side is applied to the external electrode Ο E. <Lighting action of dielectric barrier discharge lamp EX L &gt; Dielectric potential -24&gt; (21) 1264037

As described above, since the high-frequency lighting circuit HFI is connected to the high-frequency output terminal of the high-frequency lighting circuit HFI, the high-frequency lighting circuit HFI is supplied with an input power source (not shown). It is applied between the internal electrode 2 and the external electrode OE of the internal electrode 2 across the wall surface of the airtight container 1. As a result, the dielectric barrier discharge occurs inside the hermetic container 1. By this dielectric barrier discharge, vacuum ultraviolet light having a center wavelength of 1 72 nm is emitted by using the excimer of germanium. Since the vacuum ultraviolet light is guided to the outside through the wall surface of the hermetic container 1, the ultraviolet light can be utilized for the purpose. Hereinafter, the second to fourth aspects of the dielectric barrier discharge lamp for carrying out the present invention will be described. In the respective aspects, the same portions as those in the first to sixth figures are denoted by the same reference numerals, and the description thereof will be omitted. [Second aspect] Fig. 6 is a side cross-sectional view showing a second embodiment of a dielectric barrier discharge lamp for carrying out the present invention. In this embodiment, the light-emitting tube LT of the dielectric barrier discharge lamp EXL is different. That is, the arc tube LT, which is an airtight container, has a double tube structure, and is formed in a cylindrical discharge space 1 a / inside. Therefore, the hermetic container 1 ^ has a cross section formed in a ring shape, and the entire shape is a bamboo wheel (fish meat roll) such as a food. Further, the internal electrode 2 &gt; is formed in a cylindrical shape, and is disposed inside the airtight container and abuts on the outer surface of the airtight container 1 /. Further, it is formed using a plate material or a mesh material formed of a conductive material. -25- (22) 1264037 The external electrode 〇E has the same configuration as the external electrode OE in the first embodiment, and is disposed to face the hermetic container 1 / . [3rd form]

7 to 10 show a third embodiment of a dielectric barrier discharge lamp for carrying out the present invention; Fig. 7 is a front view of the whole; Fig. 8 is a partial front view of both end portions; 9 is a cross-sectional view in the middle of the tube axis direction, perpendicular to the tube axis; the first drawing is a partial side view of the lamp support mechanism viewed from the direction of the arrow in FIG. This embodiment differs from the first embodiment mainly in that the external electrode OE is suspended to support the entire dielectric barrier discharge lamp EXL. That is, the both ends of the external electrode OE are supported by the suspension arms 11 and 1 1 which are bent into an inverted L shape, and the external electrodes OE are turned on the suspension arms 1 1 and 1 1 . The external electrode OE is formed directly by the cooling means 9 composed of the cooling water passage inside the aluminum block by extrusion molding or the like. Further, the external electrode OE is connected to the ground potential via the suspension arms 1 1 and 11. The suspension arm 1 1 supports the external electrode OE and the light-emitting tube LT at the lower end portion of the drawing, thereby supporting the hermetic container 1, and is fixed to the ground potential portion of the ultraviolet irradiation device or the like at the upper end portion in the drawing. Further, the suspension arm, in particular, as shown in Fig. 8, the power supply terminal 12 connected to the internal electrode 2 is insulated. The power supply terminal 12 is connected to an output end on the high potential side of the high-frequency lighting circuit (not shown) via an insulating connecting conductor (not shown). Furthermore, the output of the low-potential side of the high -26-(23) 1264037 frequency lighting circuit is connected to the ground potential. Further, the power supply terminal 12 is connected to the internal electrode 2 via the conductive support plate 13 and the power supply line 4. The positioning arm 8 is fixed to the end face of the external electrode 〇 E by a screw 8 a . Further, as shown in Fig. 8 and Fig. 10, the abutting portion 8b abuts against the support portion 5 &gt;. In Fig. 8, the support portion 5 on the right side is provided with an insulator 5d, a relay plate 5e, and a plate spring 5f in addition to the cover 5a, the fastening ring φ5b, and the mounting arm 5c. The insulator 5d' is fixed to the mounting arm 5c. The relay board 5e is fixed to the insulator 5d so as to be in an insulating relationship with the mounting arm 5c. The leaf spring * 5 f is in a mechanical support relationship and exists between the relay board 5 e and the conductive branch and the holding plate 13 . In the support portion 5 on the left side of Fig. 8, the attachment arm 5c is directly fixed to the leaf spring 5f. Further, the power supply portion 3A on the left side connected to the internal electrode 2 suitable for Fig. 2 is not connected to the high-frequency power supply circuit, and is not grounded.

As a result, the arc tube LT is attached to the suspension arm 1 by the support portion 5 as described above with the airtight container 1. In this state, the light-emitting tube LT is supported by the airtight container 1 so as to be elastically urged toward the external electrode OE side by the spring action of the leaf spring 5f to abut against the positioning arm 8. As a result, the gap G between the outer surface of the hermetic container 1 and the external electrode OE satisfies the aforementioned predetermined conditions. Further, in Figs. 7 and 8, the illustration of the internal electrode 2 is omitted. Fig. 1 and Fig. 2 show the dielectric used to carry out the invention - 27- (24) (24)

In the third embodiment of the mass barrier discharge lamp, when the gap G is changed, the first and second graphs of the measurement data are described in the first embodiment, and the gap G is from 0 to 0.6 mm, every 0.1 m. The surface illuminance is created by directly entering the data under the central portion of the arc tube LT. Furthermore, in the case of the gap G (mm) in Fig. 2, the vertical axis indicates the lighting of the opposite tube dielectric barrier discharge lamp EXL with a tube surface illumination of 100% when there is no gap G gap of 0 mm. Conditions, the solid is 173.2V, the lamp current is 2.65A, and the lamp power is 45 9W. As can be seen from Fig. 1 and Fig. 2, when the gap G degree is lowered, if the gap G is 0.5 mm or less, the illuminance with respect to the tube surface is 80% or more. [Fourth aspect] Figs. 13 and 14 show a fourth embodiment for performing the barrier discharge lamp, and Fig. 1 is a main part of the tube axis direction of the airtight container. The difference in the partial cross-section is that in the third embodiment, the spacer segment AA is attached. That is, the spacer S1 is fixed at its lower end portion so as not to fall. The suction means AA has a discharge pipe 7 in addition to the suction hole 7. The exhaust collecting box] 6 is a tube surface illuminance that is attracted by the suction holes 7 on the top surface of the graph of the electrode OE; That is, the tube line measurement when the base m is changed is obtained, and the state indicated by the horizontal axis is also the degree (%). Further, a dielectric cross-sectional view and a plan view of the invention when the tube voltage is increased and the tube surface is 3 mm. The S 1 of the present embodiment and the getter device 1 5, 1 5 are provided in an external electric atmosphere such as air -28-(25) 1264037, and are collected from the exhaust gas formed at the top thereof. The mouth is discharged 1 6 a. The exhaust pipe 17 has its base end connected to the exhaust port 16a via a pipe joint 17a, and its leading end reaches an exhaust position (not shown) which is separated from the dielectric barrier discharge lamp EXL.

Figs. 15 to 18 show an ultraviolet cleaning device as an embodiment of an ultraviolet irradiation device for carrying out the present invention; Fig. 15 is a front sectional view, a first horizontal view, and a first view; 7 is a cross-sectional view taken along line XVII-XVII/line of Fig. 16, and Fig. 18 is a circuit diagram of a high-frequency lighting circuit. In the respective drawings, the same portions as those in the first to fifth aspects are denoted by the same reference numerals, and their description is omitted. The ultraviolet irradiation device UVW includes an ultraviolet irradiation device main body 2 1 , a high-frequency lighting circuit 22, and a plurality of dielectric potential ink discharge lamps EXL. In the present invention, the ultraviolet ray irradiation means UVW means all means for utilizing ultraviolet rays generated by the dielectric barrier discharge lamp EXL. For example, a semiconductor stepper, a light cleaning device, a light curing device, and a light drying device. Further, the ultraviolet irradiation apparatus main body 2 1 is composed of a remaining portion excluding the dielectric barrier discharge lamp EXL and the high-frequency lighting circuit 2 from the ultraviolet irradiation device UVW. The dielectric barrier discharge lamp EXL can be used from one to a plurality of roots as needed (in the form shown in Fig. 7 , a plurality of nodes are arranged adjacent to each other). The high-frequency lighting circuit 22 applies the generated high-frequency voltage to the dielectric barrier discharge lamp EXL to turn it on. Therefore, the high-frequency lighting circuit 22 includes a high-frequency generating circuit that generates a high-frequency voltage, and supplies a high-frequency power required for lighting to the dielectric barrier discharge lamp. Furthermore, the high frequency is produced by -29-(26) 1264037 and is more than 10 kHz, which is suitable for the 00 rate of 00 kHz to 2 MHz. Further, the high-frequency lighting circuit 2 2 applies a voltage of about 300 V or less when the dielectric barrier discharge lamp EX L is stabilized, and it is preferable to apply a high-frequency voltage of 100 to 2 500 V. and then,

The starting voltage of the dielectric barrier discharge lamp EXL is 2 to 6.0 kVp-p, and the secondary open circuit voltage of the high-frequency lighting circuit 22 is increased to the starting voltage, so that starting can be facilitated. In this case, as a high-frequency generating means, if a parallel inverter is mainly used, it is easy to obtain a high step-up ratio, and at the same time, for example, even if the pressure state of the external electrode OE changes, the outside of the dielectric barrier discharge lamp EXL The electrostatic capacitance between the electrode OE and the internal electrode 2 changes, and since the high-frequency output is not affected, the design of the high-frequency lighting circuit 22 is easy, which is suitable. Further, if the high-frequency output waveform is a sine wave, the noise is reduced when the dielectric barrier discharge lamp EXL is turned on. However, if necessary, the high-frequency lighting circuit 2 2 and another pulse wave generating means for starting up can be used. Further, the dielectric barrier discharge lamp EXL and the high-frequency lighting circuit 22 are desirably disposed in the proximity position, but may be disposed at positions apart from each other if necessary. Dielectric barrier discharge lamp EXL, unlike general discharge lamps, does not require continuous current limiting in series. However, in order to adjust the lamp current to a predetermined value, the appropriate impedance can be connected in series to light up as needed. Further, when the dielectric barrier discharge lamp EXL is connected to the high-frequency lighting circuit 2 2, when the external electrode OE is grounded, noise is reduced. The high-frequency lighting circuit 2 2 can be obtained by using a pulse wave of a rectangular wave, for example, by using an inverter of a rectangular wave, as long as it is an output pulse wave voltage, and other components -30 - (27) 1264037. However, it is also possible to use a sine wave output inverter to obtain a sine wave pulse wave.

As a result, in the present invention, since the occurrence of black deposits due to friction between the external electrode 〇E and the hermetic container 1 due to the self-dielectric barrier discharge lamp EXL can be avoided, the object to be irradiated There is no need to provide a light projecting window formed of synthetic quartz glass between the dielectric barrier discharge lamp EXL and the dielectric barrier discharge lamp EXL. Therefore, there is no loss of ultraviolet rays due to the light projecting window, and since the irradiation distance to the object to be irradiated can be shortened, the ultraviolet illuminance can be improved and the cost can be reduced. Further, the ultraviolet irradiation apparatus main body 2I is formed in a box shape, and its inner portion is divided into an ultraviolet irradiation chamber 2 1 a and a power supply chamber 2 1 b in the vertical direction. The ultraviolet irradiation chamber 2 1 a and the power supply chamber 2 1 b are configured to be opened and closed by the hinge 2 1 c. In the ultraviolet irradiation chamber 2 1 a, a plurality of dielectric barrier discharge lamps EXL as will be described later are arranged in parallel. A plurality of dielectric barrier discharge lamps EXL are formed by forming external electrodes as a single block. Therefore, the concave curved surface of the external electrode 〇 E is arranged in parallel in a plurality of adjacent states. Further, the ultraviolet irradiation chamber 21a is fixedly disposed on the upper portion of the conveyance means of the object to be irradiated in the cleaning device, and the bottom surface thereof is open, and is configured to be capable of illuminating the object directly under the bottom surface ( Not shown), the vacuum ultraviolet light is irradiated at a very close distance. Further, in the case of Fig. 6, the portion which is obliquely lined indicates the ultraviolet ray effective irradiation region. Further, on the top surface of the external electrodes of the plurality of dielectric barrier discharge lamps EXL, the suction holes of the respective dielectric barrier discharge lamps EXL are disposed in a communication-31 &gt; (28) 1264037, although not shown. The exhaust collection box is connected to the exhaust pipe through the exhaust collection box. Further, the air around the spacer S1 of the airtight container 1 sucked from the air suction hole through the exhaust pipe is configured to be exhausted to the outside.

The power supply chamber 2 1 b houses therein a high-frequency lighting circuit 2 2 and a control circuit (not shown), and has a hinge 2 1 c as a center of rotation, and in the fifth embodiment, it can be rotated upward. Further, the symbol 2 1 b 1 is a handle for holding when the power supply chamber 2 1 b is rotated; the symbol 2 1 b 2 is a handle for carrying the ultraviolet irradiation device body 2 1 or the power supply chamber 2 1 b; 2 1 b 3 Shield for power wiring. The high-frequency lighting circuit 22 is housed in the power supply chamber 2 1 b, and is converted into a power source that is introduced into the power supply chamber 2 1 b via the shield 2 1 b 3 ' of the power supply wiring to generate a high-frequency voltage, and then supplied to the power supply. A plurality of dielectric barrier discharge lamps EXL. Further, the high-frequency lighting circuit 2 2 is a circuit configuration shown in FIG. 8 , that is, the 'frequency-frequency lighting circuit 2 2 ' is configured by an inductor L, a pair of switching elements Q 1 and Q 2 , and an output transformer. 〇τ, the resonance capacitor C 1 and the control pen path CC are main bodies' and have parallel-type inverters of the DC input terminals 11 and 12 and the high-frequency output terminals t3 and t4. The DC input terminal t1 is connected to a DC current (not shown) whose output DC voltage is variable by a boost cutoff circuit or the like. The high frequency output terminals 13, 14 are connected to a dielectric barrier discharge lamp. Further, the DC input terminal U passes through the inductor L in series, and is connected to the midpoint of the primary winding Pw 1 of the output transformer OT. The DC input terminal t2' is connected to the connection point of the pair of switching elements Q and Q2. A pair of switch elements -32- (29) 1264037

The pieces Q 1 and Q 2 ' are connected in series, and are connected in parallel with respect to the primary coils Pw1, pw2, and pw3 of the output transformer 〇τ. The output transformer 〇Τ includes three primary coils ρ λν 1 , p w 2 and p w 3 , three sets of secondary coils s w 1 , sw2 and sw3, a drive coil fw, and a detection coil dw. Moreover, the --A 'T springs p w 1 , p w 2, p w 3 and the secondary coils s w 1 , s w 2, s w 3 are paired. Further, the primary coils p w 1 , p w 2, and p w 3 are connected to each other. On the other hand, the secondary coils swl, sw2, and sw3 are connected in series to each other', and both ends thereof are connected to the high-frequency output terminals t3 and t4. The resonant capacitor C 1 is connected to the primary coils pw1, Pw2, and pw3. The drive coil fw and the detection coil d w are connected to a control circuit c C to be described later. The control circuit CC is composed of a drive circuit DC and a protection circuit PC. The drive circuit DC has its input terminal connected to the drive coil fw, and generates a drive signal to be supplied to the switching elements Q1, Q2. Thereby, the parallel inverters are self-oscillated. The protection circuit P C has its input terminal connected to the detection coil dw. When the activation of the dielectric barrier discharge lamp EXL is detected, the high-frequency output voltage is lowered, for example, by controlling a DC power supply or the like. As a result, the high-frequency lighting circuit 22 is activated by the dielectric barrier discharge lamp EXL by the above-described circuit configuration. Further, the detection circuit PC monitors the detection voltage appearing in the detection coil dw of the output transformer ,, and after the startup, if the high-frequency output voltage rises, it is lowered, and a protection operation can be performed to be applied to the switching element. The voltage on Q 1 and Q2 will not exceed its withstand voltage. Further, the drive signal output from the drive circuit D C can be adjusted in accordance with the degree of high frequency output. Further, a plurality of dielectric barrier discharge lamps E X L are disposed in the ultraviolet irradiation chamber 21a in a state of being adjacent to each other -33-(30) 1264037. However, in order to make manufacturing easy and maintenance, the required dielectric barrier discharge lamps EXL become detachable. Further, in order to allow the cooling water to flow through the cooling water passage of the external electrode 〇E, the piping for supplying the cooling water is coupled to the inlet thereof, and the piping for draining is combined with the outlet.

[Effects of the Invention] According to the present invention, it is possible to provide a dielectric barrier discharge lamp and an ultraviolet irradiation apparatus using the same, which suppress the generation of friction between the external electrode and the hermetic container due to the difference in thermal expansion. The granules occur and form a good dielectric barrier discharge. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partial cross-sectional front view showing a first embodiment of a dielectric barrier discharge lamp of the present invention. Fig. 2 is a partially cutaway front view of the same arc tube. Fig. 3 is a partial cutaway and cross-sectional front view showing a portion of the support portion and the power supply portion of the same arc tube. Fig. 4 is a front elevational cross-sectional view showing the same portion of the spacer and the suction means. Figure 5 is a side cross-sectional view of the same member. Figure 6 is a side cross-sectional view showing a second embodiment of a dielectric barrier discharge lamp for carrying out the present invention. - 34 - (31) 1264037 Fig. 7 is a partial cross-sectional front view showing a front view of a third embodiment of a dielectric barrier discharge lamp for carrying out the present invention. Figure 8 is a partial front view of the same end portions. Fig. 9 is a cross-sectional view similar to the direction of the tube axis in the intermediate portion in the tube axis direction. The first diagram is a partial side view of the same lamp support mechanism as seen from the direction of the arrow in Fig. 8.

Fig. 1 is a table showing measurement information indicating the illuminance of the tube surface when the gap G is changed in the third embodiment of the dielectric barrier discharge lamp for carrying out the present invention. Fig. 1 is a side view showing the fourth embodiment of the dielectric barrier discharge lamp of the present invention. Fig. 1 is a side cross-sectional view showing the fourth embodiment of the dielectric barrier discharge lamp of the present invention. Figure 14 is a partial section of the main part of the same airtight container in the tube axis direction.

Fig. 15 is a front sectional view showing an ultraviolet cleaning device as one of the ultraviolet irradiation devices for carrying out the present invention. Figure 16 is a bottom view of the same device. Figure 17 is a cross-sectional view taken along line XVII-XVII/ of Figure 16 of the same apparatus. Figure 18 is a circuit diagram of the same high-frequency lighting circuit. [Description of main component symbols] -35- 1264037 (32) 1 : Hermetic container 2 : Internal electrode 4 : Power supply line 5 : Support part ' 7 : Suction hole · 8 : Positioning arm AA : Suction means φ EXL: Electric barrier discharge lamp G: gap HFI: high-frequency lighting circuit ^ LT : luminous tube" Ο E: external electrode S: gap forming means S 1 : spacer S 2 : luminous tube supporting mechanism

-36-

Claims (1)

(1) 1264037 X. Patent application scope 1. A dielectric barrier discharge lamp characterized by comprising: an airtight container which is formed into an elongated tubular shape formed of an ultraviolet permeable material; an excimer generating gas, the system Enclosed in the airtight container; the internal electrode is configured to: in the airtight container, the dielectric barrier is discharged, and the entire length of the tube axis can be generated; The external electrode, which is disposed outside the airtight container, is disposed along the tube axis direction, and acts by a synergistic force with the internal electrode to form a dielectric barrier in the airtight container And a gap forming means for forming a gap G satisfying the condition of the formula 0 &lt; G 1.00 (unit: mm) between the airtight container and the external electrode along the tube axis direction of the airtight container. An ultraviolet irradiation device comprising: a dielectric barrier discharge lamp according to claim 1; an ultraviolet irradiation device body provided with a dielectric barrier discharge lamp; and a dielectric material High-frequency lighting circuit for barrier discharge lamp lighting. -37-