CN110349834A - Excimer lamp, light irradiation device and ozone generating apparatus - Google Patents
Excimer lamp, light irradiation device and ozone generating apparatus Download PDFInfo
- Publication number
- CN110349834A CN110349834A CN201910257453.5A CN201910257453A CN110349834A CN 110349834 A CN110349834 A CN 110349834A CN 201910257453 A CN201910257453 A CN 201910257453A CN 110349834 A CN110349834 A CN 110349834A
- Authority
- CN
- China
- Prior art keywords
- electrode
- excimer lamp
- accessory
- luminous tube
- starting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims abstract description 32
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 29
- 229910052799 carbon Inorganic materials 0.000 claims description 24
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 238000009751 slip forming Methods 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 17
- 239000004020 conductor Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 239000011521 glass Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 230000005611 electricity Effects 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 238000005286 illumination Methods 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 238000007599 discharging Methods 0.000 description 4
- 235000013399 edible fruits Nutrition 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005162 X-ray Laue diffraction Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052724 xenon Inorganic materials 0.000 description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 229910052743 krypton Inorganic materials 0.000 description 2
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- 229910000604 Ferrochrome Inorganic materials 0.000 description 1
- 208000031481 Pathologic Constriction Diseases 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 238000005660 chlorination reaction Methods 0.000 description 1
- 238000004332 deodorization Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 229910000953 kanthal Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- KTUFCUMIWABKDW-UHFFFAOYSA-N oxo(oxolanthaniooxy)lanthanum Chemical compound O=[La]O[La]=O KTUFCUMIWABKDW-UHFFFAOYSA-N 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000036262 stenosis Effects 0.000 description 1
- 208000037804 stenosis Diseases 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
- H01J61/545—Igniting arrangements, e.g. promoting ionisation for starting using an auxiliary electrode inside the vessel
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
- H01J61/541—Igniting arrangements, e.g. promoting ionisation for starting using a bimetal switch
- H01J61/542—Igniting arrangements, e.g. promoting ionisation for starting using a bimetal switch and an auxiliary electrode inside the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/90—Lamps suitable only for intermittent operation, e.g. flash lamp
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
Abstract
The present invention provides a kind of Excimer lamp, light irradiation device and ozone generating apparatus, and the Excimer lamp can be while reducing luminance reduction, electric discharge deviates and power loss, it is ensured that the startability under dark surrounds.The Excimer lamp has: being sealed with the luminous tube of luminous gas；It is set to a pair of electrodes of the outer surface of luminous tube；With the starting accessory for the inner surface for being set to luminous tube, starts accessory and be at least set to the region X than a pair of electrodes in the outer part, it is smaller than distance Y between a pair of electrodes with the distance between the electrode of the starting closer side of accessory and starting accessory A.
Description
Technical field
The present invention relates to Excimer lamp, light irradiation device and ozone generating apparatus.
Background technique
In the past, it there are known to the ozone generating apparatus for having used ultraviolet radiator.As for producing ozoniferous ultraviolet radiator, week
Knowing has mercury vapor lamp, Excimer lamp (for example, xenon excimer lamp).
Ultraviolet radiator is for example configured in the way of pipeline and wind path, is usually lighted and is used under the lower environment of illumination.
It is therefore desirable to the reliable startability (dark startability) under dark surrounds.
Patent Document 1 discloses following Excimer lamp (with reference to claim 1 etc.): having filled with generation quasi-molecule
Electric discharge gas discharge space and a pair of electrodes for making electric discharge gas sensing electric discharge, be configured to make dielectric
Between at least one party in the electrode and between the discharge space, and ultraviolet light is generated in the discharge space.
Following invention (with reference to claim 1, paragraph [0017] etc.) is disclosed in patent document 2: rare being sealed with
The outer surface of the glass tube of gas is equipped with a pair of electrodes, and conductive material is being configured at the one of the glass pipe internal surface
In partial external electrode type rare gas discharge lamp, the conductive material with by position existing for the electrode of a side with it is another
The mode of the connection of position existing for the electrode of side is located at glass tube.
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2016-126934 bulletin
Patent document 2: Japanese Unexamined Patent Publication 2008-034272 bulletin
Summary of the invention
Problems to be solved by the invention
In patent document 1, patent document 2, make between two electrodes (electrode of the electrode of high-voltage side and low voltage side it
Between) distance substantially shorten so that improve startability.Therefore, in discharge path, that is, in the electrode of high-voltage side
Conductive material etc. is set between the electrode of low voltage side.
However, patent document 1, patent document 2 structure in, after ignition, there are the shadings such as conductive material from
And the worry for declining illumination.Additionally there are discharging to deviate after ignition near conductive material etc., occur
The worry of uneven illumination.As long as in addition, do not turn off the light after ignition, the electric current constant flow in conductive material etc., thus deposit
Increase in power loss, the worry reduced to the transfer efficiency of light.Particularly in the lower-powered quasi-molecule of 1~number W degree
In lamp, these unfavorable conditions become significant problem.
The present invention is made in view of above-mentioned project, and its purpose is to provide one kind to reduce luminance reduction, electric discharge
Ensure the Excimer lamp of the startability under dark surrounds while deviation and power loss.
In addition, the present invention provides a kind of light irradiation device for having the Excimer lamp.
In addition, the present invention provides a kind of ozone generating apparatus for having the Excimer lamp.
A technical solution to solve project
Present inventor has carried out sharp study to Excimer lamp.As a result, being set in luminous tube when accessory will be started
When the electrode of the ratio high-voltage side in surface region in the outer part, be surprised to find reduce luminance reduction, electric discharge deviates and electricity
While power is lost, the startability under dark surrounds becomes well, so as to complete the present invention.
That is, Excimer lamp of the invention is characterized in that having:
Luminous tube is sealed with luminous gas；
A pair of electrodes is set to the outer surface of the luminous tube；With
Start accessory, be set to the inner surface of the luminous tube,
The starting accessory is at least set to the region X than the pair of electrode in the outer part,
Described in the distance between the electrode of the starting closer side of accessory and starting accessory A ratio
Distance Y between a pair of electrodes is small.
As described above, the method that the previous startability as Excimer lamp improves, it is contemplated that i.e. in height in discharge path
Conductive material etc. is set between the electrode of voltage side and the electrode of low voltage side.And the thought of the present application and above-mentioned previous
The thought of technology is entirely different.That is, the present application is set in luminous pipe internal surface by that ought will start accessory
Than high-voltage side electrode region in the outer part when, be surprised to find that the startability under dark surrounds becomes well, thus
The invention of completion.Such effect can also understand from the record of aftermentioned embodiment.
Excimer lamp according to the present invention, if making the electricity in a pair of electrodes with the starting closer side of accessory
The extremely electrode of high-voltage side, then the startability under dark surrounds becomes good.And even if making to open in a pair of electrodes away from described
The electrode of the farther away side of dynamic auxiliary component is the electrode of high-voltage side, and the startability under dark surrounds will not become good
It is good.
Present inventor compares the present invention with the case where not set starting accessory, as opening under dark surrounds
Dynamic property becomes good reason, thus it is speculated that (1) below out, (2) two sides or either side.
(1) electronics be easy to fly to the closer starting accessory of the electrode distance of high-voltage side, when in high-voltage side
When primary electric discharge occurs between electrode and starting accessory, thereafter, electric discharge can steadily continue between a pair of electrodes.
(2) when luminous tube is placed under dark surrounds, for discharging, the electronics started tails off.By in high-voltage side
Starting accessory is nearby arranged in electrode, and starting accessory charges and electronics becomes easy and flies out.Since electronics becomes easy
The thus electric discharge that flies out is easy to happen.
In addition, utilizing the light projected from the electric interelectrode portion of luminous tube usually in Excimer lamp.Standard according to the present invention
Molecule lamp, starting accessory is arranged at the region X than a pair of electrodes in the outer part, therefore can reduce the light for covering injection
Range.As a result, it is possible to which illumination is inhibited to decline.
In addition, discharging hardly occur after ignition in the region X.It therefore, can be in the region X in point
The deviation of electric discharge is inhibited to occur after bright.In addition, discharging hardly occur after ignition, therefore can in the region X
Reduce power loss after ignition.
In this way, Excimer lamp according to the present invention, if made in a pair of electrodes with the starting closer side's of accessory
Electrode is the electrode of high-voltage side, then can be while reducing luminance reduction, electric discharge deviates and power loss, it is ensured that in dark
Startability under environment.
In the structure, the preferably described luminous tube includes cylindrical portion, has first end and the second end；First contracting
Diameter portion is continuously formed from the first end, and with far from the first end and diameter becomes smaller；Second undergauge
Portion is continuously formed from the second end, and as the separate the second end diameter becomes smaller,
The pair of electrode is made of first electrode and second electrode,
First electrode is set to the outer peripheral surface of the first end,
Second electrode is set to the outer peripheral surface of the second end.
It, can also be in the first reducing diameter part or the second reducing diameter part setting starting accessory according to the structure.Therefore, can
Easily in the first reducing diameter part or the second reducing diameter part setting starting accessory.
In the structure, preferably it is described starting accessory by with formed electrode region it is nonoverlapping in a manner of formed.
When start accessory by with formed electrode region it is nonoverlapping in a manner of formed when, will also realize that from embodiment,
Startability under dark surrounds becomes more excellent.
In the structure, the preferably described starting accessory is carbon.
In the manufacturing process of Excimer lamp, exist after it will start accessory and be set to luminous pipe internal surface, example
Such as carry out the situation of the heating for eliminating strain.Here, the high stability of carbon.Therefore, when the starting accessory
When for carbon, it is able to suppress because heating etc. makes the case where starting accessory evaporation etc., can be improved as the reliable of Excimer lamp
Property.
In addition, light irradiation device of the invention, which is characterized in that
Have the Excimer lamp,
The starting accessory is at least set to the electrode region X in the outer part than high-voltage side.
According to the structure, it is capable of providing a kind of light irradiation device, has the Excimer lamp, since the starting is auxiliary
Help component to be at least set to the electrode region X in the outer part than high-voltage side, it is thus possible to reduce luminance reduction, electric discharge deviates
And while power loss, it is ensured that the startability under dark surrounds.
In addition, ozone generating apparatus of the invention, which is characterized in that
Have the Excimer lamp,
The starting accessory is at least set to the electrode region X in the outer part than high-voltage side.
According to the structure, it is capable of providing a kind of ozone generating apparatus, has the Excimer lamp, due to the starting
Accessory is at least set to the electrode region X in the outer part than high-voltage side, it is thus possible to which reducing, luminance reduction, electric discharge are inclined
From and while power loss, it is ensured that the startability under dark surrounds.
Invention effect
In accordance with the invention it is possible to provide a kind of Excimer lamp, luminance reduction, electric discharge deviation and electric power damage can reduced
While mistake, it is ensured that the startability under dark surrounds.In addition, being capable of providing the light irradiation device for having the Excimer lamp.Separately
Outside, it is capable of providing the ozone generating apparatus for having the Excimer lamp.
Detailed description of the invention
Fig. 1 is the perspective view for showing schematically the ozone generating apparatus of present embodiment.
Fig. 2 is the nearby half part removal in the ozone generating apparatus for indicating to indicate in Fig. 1 in order to illustrate and by shell
The main view of appearance afterwards.
Fig. 3 (a) is the tube axial direction sectional view for the Excimer lamp that the ozone generating apparatus indicated in Fig. 1 has, (b)
It is its Z1-Z1 sectional view, is (c) its Z2-Z2 sectional view.
Fig. 4 is the main view for the luminous tube that the Excimer lamp indicated in Fig. 3 (a) has.
Fig. 5 is for evaluating the Laue's diagram for lighting delay.
Fig. 6 is for evaluating the Laue's diagram for lighting delay.
Specific embodiment
Firstly, referring to attached drawing to the ozone generating apparatus of one embodiment of the present invention described below.It needs
Illustrate, is aligned point since Excimer lamp is provided in ozone generating apparatus, thus in the explanation of ozone generating apparatus
Sub- lamp is illustrated.
Fig. 1 is the perspective view for schematically showing the ozone generating apparatus of present embodiment.Fig. 2 is indicated in Fig. 1 institute table
In the ozone generating apparatus shown in order to illustrate and by shell nearby half part remove after appearance main view.
As shown in Figure 1 and Figure 2, ozone generating apparatus 10 has shell 12 and Excimer lamp 20.
Fig. 3 (a) is the tube axial direction sectional view for the Excimer lamp that the ozone generating apparatus indicated in Fig. 1 has, Fig. 3
It (b) is its Z1-Z1 sectional view, Fig. 3 (c) is its Z2-Z2 sectional view.Fig. 4 is that the Excimer lamp represented by Fig. 3 (a) is had
Luminous tube main view.
Excimer lamp 20 has luminous tube 22, first electrode 24a, second electrode 24b and the setting for being sealed with luminous gas
In the starting accessory 29 of the inner surface of luminous tube 22.
Luminous tube 22 has cylindrical portion 30, the first reducing diameter part 33a and the second reducing diameter part 33b (referring to Fig. 4).
Cylindrical portion 30 is the hollow cylindrical that section is circular ring shape, and (left end in Fig. 4) has first end 31a at one end,
There is the second end 31b at the other end (right end in Fig. 4).
First reducing diameter part 33a is to the direction (being left direction in Fig. 4) far from first end 31a from first end 31a
It is continuously formed.First reducing diameter part 33a with far from first end 31a and diameter becomes smaller, and closed by end face 34a.
Second reducing diameter part 33b is to the direction (being right direction in Fig. 4) far from the second end 31b from the second end 31b
It is continuously formed.Second reducing diameter part 33b with far from the second end 31b and diameter becomes smaller, and closed by end face 34b.
As long as end face 34a, end face 34b are closed, shape is not done and is particularly limited, either curved surface is also possible to put down
Face.In addition, exist can also be with for protrusion for generating etc. in closing.
It in the present embodiment, is to be carried out the case where the Excimer lamp of dielectric barrier discharge is utilized to Excimer lamp 20
Illustrate, as long as however Excimer lamp shoots out the lamp from the light of quasi-molecule in the present invention, rather than be defined in using be situated between
The case where matter barrier discharge.
As the shape of luminous tube 22, as long as internal closed tubulose, shape are just not limited, however it is preferred that such as this
Embodiment is circular tube shaped made of sealing both ends in this way.
It as the material of luminous tube 22, is particularly limited although not doing, the material of preferred transmission ultraviolet light, for example, can
To enumerate quartz glass etc..
As the luminous gas, as long as can project can produce the light of ozoniferous wavelength by irradiating to oxygen
Luminous gas is just not particularly limited.Xenon (outgoing wavelength: 172nm) can be enumerated as the luminous gas.
First electrode 24a is set to the outer peripheral surface of first end 31a.Second electrode 24b is set to the outer of the second end 31b
Circumferential surface.In the present embodiment, first electrode 24a is the electrode of high-voltage side, and second electrode 24b is the electrode of low voltage side.
It should be noted that being applied to the voltage either positive high voltage or negative high voltage of first electrode 24a (electrode of high-voltage side) all
It can be with.
Although the shape of first electrode 24a and second electrode 24b are not particularly limited, preferably it is as in this embodiment
It is cylindric.The reason is that can more suitably cause dielectric barrier discharge if it is cylindrical shape.As the electricity of first electrode 24a and second
The other examples of the shape of pole 24b, it can be cited for example that section C-shaped or coiled type.
The area of outer peripheral surface as first electrode 24a and second electrode 24b covering luminous tube 22, from the viewpoint of startability
It sets out, it is preferably larger.It is therefore preferable that being as in this embodiment cylindrical shape.
In the present embodiment, first electrode 24a is not extended on the first reducing diameter part 33a.That is, first electrode 24a
Only connect with the cylindrical portion 30 of luminous tube 22 without connecting with the first reducing diameter part 33a.In addition, second electrode 24b is not extended
In on the second reducing diameter part 33b.That is, second electrode 24b only connect with the cylindrical portion 30 of luminous tube 22 without with the second reducing diameter part 33b
Connect.
As the material of first electrode 24a, second electrode 24b, though it does not limit particularly, the antioxygen under hot environment
The property changed, from the perspective of thermal shock resistance, preferably stainless steel, it is safe you (Kanthal) (ferrochrome).
Starting accessory 29 is set to the region than a pair of electrodes (first electrode 24a and second electrode 24b) in the outer part
X.More specifically, starting accessory 29 is in a manner of covering the position for being spaced apart distance A from first electrode 24a and play end face 34
It is set to the inner surface of luminous tube 22.
It should be noted that distance A refers to from the outermost position of electrode to starting accessory in the present specification
Innermost position the shortest distance.
The distance A is closer than the distance Y (first electrode 24a is at a distance from second electrode 24b) between a pair of electrodes.Speculate by
It is smaller than the distance Y in the distance A, thus electronics is easy to fly to the distance of the electrode (first electrode 24a) away from high-voltage side
Closer starting accessory 29, when the electrode (first electrode 24a) of high-voltage side and starting accessory 29 between generate
When primary electric discharge, electric discharge can steadily continue between a pair of electrodes thereafter.
It should be noted that in the present specification, distance Y refers to from the electrode near another party of the electrode of a side
Position to another party electrode the electrode near the party position.In the present embodiment, distance Y refers to from first
Second electrode 24b is arrived in the position (right end for being first electrode 24a in Fig. 3 (a)) near second electrode 24b of electrode 24a
The position left end of second electrode 24b (in Fig. 3 (a) be) near first electrode 24a distance.
It is preferred that the distance A is smaller for positive value.The distance A is smaller, then the starting under dark surrounds
Property is the better.The situation can be defined from aftermentioned embodiment.As its reason, present inventor is presumably due to starting assisted parts
For part 29 closer to the electrode (first electrode 24a) of high-voltage side, electronics is easier to fly to starting accessory from first electrode 24a
29。
In addition, starting accessory 29, which is configured at, can not cover from the injection of luminous tube 22 when the distance A is positive value
The position of light.As a result, it is possible to inhibit illumination to decline.
In addition, in the region X, hardly generating electric discharge after ignition when the distance A is positive value.Therefore,
It is able to suppress and occurs electric discharge deviation after ignition in the region X.In addition, due in the region X, after ignition almost
Electric discharge will not be generated, it is thus possible to reduce power loss after ignition.
If starting accessory 29 is set at least part of the region X than first electrode 24a in the outer part, described
Distance A or 0 (zero).That is, starting accessory 29 can also be with the side Chong Die with the region of first electrode 24a is formed
Formula is formed.Even if the startability in this case, compared with not formed starting accessory 29 the case where, under dark surrounds
Preferably.As its reason, by the way that starting accessory 29 is overlappingly arranged with first electrode 24a, starting accessory 29 is charged,
Electronics is easy to fly out.Speculate that, since electronics is easy to fly out, electric discharge is easy to produce.
In addition, if starting accessory 29 is set at least part of the region X than first electrode 24a in the outer part,
It then also can be set in the region than first electrode 24a in the inner part.Even if in this case, with not formed starting accessory 29
The case where compare, the startability under dark surrounds is also preferable.As its reason, by being overlappingly arranged with first electrode 24a
Start accessory 29, starting accessory 29 charges, and electronics is easy to fly out.Speculate since electronics is easy to fly out, discharges
It is easy to produce.
However, the part can block when that will start accessory 29 and be set to than the region in the inner part first electrode 24a
The light firmly projected from luminous tube 22.Therefore, the case where accessory 29 is set to than first electrode 24a in the inner part will started
Under, preferably the area stenosis is to a certain extent.For example, being set to than first electrode 24a in the inner part accessory 29 will be started
In the case where, if make the length 100% of the distance Y, the length in the region is 10% or less (further preferably long
Degree is 5% or less) if, then starting accessory 29 can also be set to the region than first electrode 24a in the inner part.Separately
Outside, in the case where that will start accessory 29 and be set to than first electrode 24a in the inner part, or aftermentioned protection portion 14
It is interior.
Material as starting accessory 29 can enumerate conductive material, easy electron-emissive material.It is led as described
Conductive substances can enumerate carbon (Carbon), platinum, gold, silver, nickel, ITO (Indium Tin Oxide: tin indium oxide), FTO (F-
Doped Tin Oxide: fluorine-doped tin oxide) etc..In addition, magnesia can be enumerated as the easy electron-emissive material
(MgO), lanthana (La2O3), cerium oxide (CeO2), yttrium oxide (Y2O3), zirconium oxide (ZrO2) or lanthanum hexaboride (LaB6) etc.
Metallic compound etc..The wherein preferred carbon of material as starting accessory 29.Since carbon thermal stability is higher, can press down
Starting accessory 29 after system is set up is evaporated because of heating etc., and can be improved the reliability as Excimer lamp 20.
An example of enclosed method as from the luminous gas to luminous tube 22, first preparation section are annular shape, open two
The cylinder of the hollow cylindrical at end.Next, passing through heat fusing for the end-enclosed of a side of the cylinder.Thus reducing diameter part is obtained.
Secondly, forming starting accessory 29 in the part as region X.As the method for forming starting accessory 29, Ke Yiju
Method, the method for coating of the material vapor deposition of accessory 29 will be started out.Next, making the described of the end for enclosing a side
(being preferably formed into vacuum) is depressurized in cylinder, and imports luminous gas into the cylinder.Thereafter, it is promptly sealed in a manner of heat fusing
Close the end of another party of the cylinder.By above step, luminous gas can be enclosed in luminous tube 22.
According to Excimer lamp 20, since starting accessory 29 is set to the region X than first electrode 24a in the outer part, because
If this makes the electrode of first electrode 24a high-voltage side, the startability under dark surrounds is good.
In Excimer lamp 20, when applying the high-voltage electricity of exchange between electrode 24, in the space 28 in luminous tube 22
Generate exciting media barrier discharge.Also, luminous gas is thus excited, quasi-molecule state is become, is returned to from quasi-molecule state
When original state (ground state), issue the light of the distinctive spectrum of the quasi-molecule (quasi-molecule shines).
20 electrode of Excimer lamp exists only in outer peripheral surface not in the inside of luminous tube.Therefore, Excimer lamp 20 is shining
Setting starting accessory 29 and enclosed luminous gas in pipe 22, are arranged electrode 24 in outer peripheral surface thereafter, manufacture is easy.
In addition, the electrode of Excimer lamp 20 not in the inside of luminous tube, is not needed the inside of luminous tube and external electric
The wiring connect.Thus, there is no the components of the wall surface through luminous tube 22.Therefore, Excimer lamp 20 can be maintained higher
Reliability.
As described above, 20 electrode of Excimer lamp is in the inside of luminous tube, and exist only in outer peripheral surface.Therefore, quasi-molecule
Lamp 20 easy to manufacture is more small-sized equipment.It is excellent as the various sizes of Excimer lamp 20 from the viewpoint of being easy miniaturization
The overall length for selecting tube axial direction is 10~150mm, more preferably 10~100mm, further preferably 10~50mm.In addition, electrode
Between distance be preferably 3~130mm, more preferably 3~80mm, further preferably 3~30mm.It should be noted that described
Interelectrode distance refers to the mutual distance in the nearest part of each electrode.In addition, outer diameter is excellent for cylindrical shape
It is selected as 3~20mm, more preferably 3~15mm, further preferably 3~10mm.In addition, the wall thickness as luminous tube 22 is preferably
0.1~2mm, more preferably 0.1~1mm, further preferably 0.1~0.5mm.
It should be noted that the various sizes of Excimer lamp 20 be not especially minimize etc. in the case where,
It is not limited to above-mentioned size.But insulation breakdown can not be generated in luminous tube 22 when interelectrode distance becomes larger due to existing
The case where, thus preferably various sizes are set in the case where balancing each other with application voltage.
Shell 12 is U-shaped.Shell 12 has the be arranged in a manner of the electrode 24 (first electrode 24a) for covering a side
One protection portion 14a and the second protection portion 14b being arranged in a manner of the electrode 24 (second electrode 24b) for covering another party.In addition,
Shell 12 has the interconnecting piece 16 for connecting the first protection portion 14a with the second protection portion 14b.That is, shell 12 is integrally formed with
First protection portion 14a, interconnecting piece 16 and the second protection portion 14b, constitute the shell 12 of U-shaped.In addition, the first protection portion 14a with
Second protection portion 14b separation.
In ozone generating apparatus 10, first electrode 24a is covered by the first protection portion 14a, is covered by the second protection portion 14b
Second electrode 24b, since the first protection portion 14a is separated with the second protection portion 14b, thus first electrode 24a and second electrode 24b
It is covered by protection portion 14 (first protection portion 14a, the second protection portion 14b), the tube axial direction central portion of luminous tube 22 exposes.Pass through
Such structure is formed, the light projected from luminous tube 22 can not be blocked on a large scale, and by (the first protection portion of protection portion 14
14a, the second protection portion 14b) covering electrode (first electrode 24a, second electrode 24b).Thereby, it is possible to maintain ozone higher
Prevent electrode from deteriorating because of ozone while generation efficiency.In addition, also can be avoided the moisture arrival electricity for being present in use environment
Pole portion.
Opening corresponding with the caliber of luminous tube 22 is formed at protection portion 14 (first protection portion 14a, the second protection portion 14b)
18.Due to forming opening 18 corresponding with the caliber of luminous tube 22 in protection portion 14, it is thus possible to be configured at out luminous tube 22
Mouth 18.In addition, can prevent from producing outside shell 12 as much as possible since opening 18 is opening corresponding with the caliber of luminous tube 22
Raw ozone enters in shell 12.
Luminous tube 22 is separated with interconnecting piece 16, and aerated area 32 is formed between luminous tube 22 and interconnecting piece 16.Due to hair
Light pipe 22 is separated with interconnecting piece 16, is formed with aerated area 32, it is thus possible to make the light projected from luminous tube 22 from luminous tube 22
All directions effectively irradiate oxygen, so as to increase the yield of ozone further.In addition, due to luminous tube 22 and even
Socket part 16 separates, it is thus possible to prevent interconnecting piece 16 from deteriorating because of the light projected from luminous tube 22.That is, in aerated area 32 from hair
The light that light pipe 22 projects irradiates oxygen, and the light weakens, it is thus possible to prevent the deterioration of interconnecting piece 16.
As the separating distance of luminous tube 22 and interconnecting piece 16, from the generation of the deterioration and increase ozone that prevent interconnecting piece 16
From the perspective of amount, preferably 1mm or more, more preferably 5mm or more, further preferably 10mm or more.In addition, the separation
Distance from the viewpoint of the miniaturization of ozone generating apparatus 10, preferably 30mm hereinafter, more preferably 25mm hereinafter, further
Preferably 20mm or less.It should be noted that the separating distance of luminous tube and interconnecting piece refers to the nearest of luminous tube and interconnecting piece
The distance between part.
As shown in Fig. 2, containing the Denso body 36 for powering to Excimer lamp such as converter in shell 12.Denso body
36 are electrically connected with the electrode 24 of Excimer lamp 20 by wiring 38.Since Denso body 36 is contained in shell 12, it is thus possible to
Denso body 36 is prevented to be affected because of external noise.In addition, can prevent from leaking out from the noise that Denso body 36 generates to outside.
Known electromagnetic wave shielding (for example, the film etc. for being used for electromagnetic wave shielding) also can be set in the inner surface of shell 12.
More than, ozone generating apparatus 10 is illustrated.
In the above-described embodiment, the situation of a part that protection portion is shell is illustrated.That is, to electrode by
The case where protection portion covering of a part of shell, is illustrated.However, the protection portion in the present invention is not limited to shell.Example
Such as, the protection portion is also possible in electrode coating adhesive and makes structure made of its hardening.That is, the protection portion can also be with
It is the adhesive after the hardening being arranged in a manner of covering electrode.
The purposes (setting place) of above-mentioned ozone generating apparatus is not although be defined particularly, due to can be small
Type, thus be also suitable in the restricted place of installation space.For example, in the inside of conditioner or with deodorization function
It can be also applicable in toilet of energy etc..
In the above-described embodiment, to the light (ultraviolet light) for projecting the wavelength that ozone can be made to generate from Excimer lamp
Situation is illustrated.That is, being illustrated to the case where Excimer lamp is used for ozone generating apparatus.However, in the present invention
In from Excimer lamp project light be not limited to the example, for example, making luminous gas chlorination krypton (a length of 222nm of outgoing wave), bromine
Changing krypton (a length of 207nm of outgoing wave) etc. also can use ultraviolet light.In addition, for example, it can be visible lights.Specifically, example
Such as, it is also possible to be coated with structure made of the fluorophor for projecting visible light when irradiating ultraviolet light in the inner surface of luminous tube.
It in these cases, can be as lighting device etc. if making the electrode high-voltage side of setting starting accessory side
Light irradiation device come using.
(embodiment)
Hereinafter, using embodiment, the present invention is described in detail, as long as but the present invention without departing from its purport, and it is unlimited
Due to embodiment below.
<production of Excimer lamp>
(embodiment 1)
Firstly, closing and the end heat fusing by a side of the quartz glass tube of diameter 10mm, reducing diameter part is obtained.
Next, the carbon core of the vapor deposition of diameter 0.5mm is cut to 3mm, and reducing diameter part downside is made to be put into the glass tube.Later,
The carbon core is heated with high frequency.In heating in high frequency, only carbon is heated and glass tube is not heated.Therefore, carbon evaporates
And it is attached to cold interior surfaces of glass.Thereafter, the mixed gas (Xe:Ne=3:7) of xenon and neon is enclosed into 100Torr, and passed through
Heat fusing is by the end-enclosed of another party.By above step, the luminous tube that overall length is 40mm has been obtained.It should be noted that
Neon is that do not have contributive buffer gas to shining.
Next, so that the mode that the interval (distance Y (referring to Fig. 3 (a))) of electrode is 20mm is equably arranged to control
A pair of electrodes.By above step, the Excimer lamp of embodiment 1 is obtained.It should be noted that the width of electrode is 3mm.It is tied
Fruit is 3mm close to the distance between the electrode of a side of carbon and carbon A.Make the Excimer lamp of 10 embodiments 1.
(embodiment 2)
Other than the carbon core of vapor deposition is cut into 5mm, the Excimer lamp of embodiment 2 is obtained similarly to Example 1.It is tied
Fruit, electrode and carbon distance A close to a side of carbon are 1mm.Make the Excimer lamp of 10 embodiments 2.
(embodiment 3)
Other than the carbon core of vapor deposition is cut into 6mm, the Excimer lamp of embodiment 3 is obtained similarly to Example 1.It is tied
Fruit, electrode and carbon distance A close to a side of carbon are 0mm.It should be noted that in the electrode than the side close to carbon
Carbon film is not present in the inner part.Make the Excimer lamp of 10 embodiments 3.
(embodiment 4)
Other than the carbon core of vapor deposition is cut into 8mm, the Excimer lamp of embodiment 4 is obtained similarly to Example 1.Knot
Fruit, electrode and carbon distance A close to a side of carbon are 0mm.Further, inner in the electrode than the side close to carbon
There are the carbon films of 2mm at side.Make the Excimer lamp of 10 embodiments 4.
(comparative example 1)
Other than the evaporation film this point of not formed carbon, the Excimer lamp of comparative example 1 is obtained similarly to Example 1.System
Make the Excimer lamp of 10 comparative examples 1.
<measurement of start delay time>
Excimer lamp (each 10) of embodiment, comparative example are measured since applying high voltage until insulation breakdown
Time (start delay time).At this point, making the electrode high-voltage side for the side to form evaporation film for Examples 1 to 4.Tool
For body, firstly, being placed 14 hours under light, thereafter, it is moved under dark surrounds and high voltage is applied by lighting power supply.As
Lighting power supply using converter, the open-circuit voltage by inverse-excitation type is+4kV, the power supply that frequency is 20kV.It will be as the result is shown in figure
5, Fig. 6.
Fig. 5, Fig. 6 are for evaluating the Laue's diagram for lighting delay.Horizontal axis expression is lighted delay time, and the longitudinal axis uses probability tables
Show and lights number of the delay time than the Excimer lamp that light delay time slow indicated by horizontal axis.Fig. 6 is to become the horizontal axis of Fig. 5
Figure after more.
As shown in figure 5, do not have the Excimer lamp of the comparative example 1 of carbon evaporation film in the outer part than high-voltage side electrode
There is the Excimer lamp of the Examples 1 to 4 of carbon evaporation film to compare in region, become for the longer lamp of start delay time is more
Gesture.
In addition, as shown in fig. 6, in the Excimer lamp of Examples 1 to 4, according to from the shorter lamp of start delay time
Sequence, be embodiment 2, embodiment 1, embodiment 3, embodiment 4.Distance is known compared with embodiment 3,4 from embodiment 1,2
A (referring to Fig. 3 (a)) is preferably greater than 0.In addition, being known the case where distance A is positive value from the comparison of embodiment 1 and embodiment 2
Under, distance A is smaller then the more preferred.In addition, being known preferably from than electrode in the inner part not compared with embodiment 4 from embodiment 3
There are carbon films.
Label declaration
10 ozone generating apparatus
12 shells
14 protection portion (the first protection portion 14a, the second protection portion 14b)
16 interconnecting pieces
18 openings
20 Excimer lamps
22 luminous tubes
24 electrodes (first electrode 24a, second electrode 24b)
28 spaces
29 starting accessories
30 cylindrical portions
31a first end
31b the second end
The first reducing diameter part of 33a
The second reducing diameter part of 33b
The end face 34a, 34b
32 aerated areas
36 Denso bodies
38 wirings
Claims (6)
1. a kind of Excimer lamp, which is characterized in that have:
Luminous tube is sealed with luminous gas；
A pair of electrodes is set to the outer surface of the luminous tube；With
Start accessory, be set to the inner surface of the luminous tube,
The starting accessory is at least set to the region X than the pair of electrode in the outer part,
With the distance between the electrode for starting the closer side of accessory and the starting accessory A than the pair of
Interelectrode distance Y is small.
2. Excimer lamp according to claim 1, which is characterized in that
The luminous tube includes
Cylindrical portion has first end and the second end；
First reducing diameter part is continuously formed from the first end, and with far from the first end and diameter becomes smaller；
With
Second reducing diameter part is continuously formed from the second end, and with far from the second end and diameter becomes smaller,
The pair of electrode is made of first electrode and second electrode,
First electrode is set to the outer peripheral surface of the first end,
Second electrode is set to the outer peripheral surface of the second end.
3. Excimer lamp according to claim 1 or 2, which is characterized in that
It is described starting accessory by with formed electrode region it is nonoverlapping in a manner of formed.
4. Excimer lamp according to claim 1 or 2, which is characterized in that
The starting accessory is carbon.
5. a kind of light irradiation device, which is characterized in that
Have Excimer lamp of any of claims 1 or 2,
The starting accessory is at least set to the electrode region X in the outer part than high-voltage side.
6. a kind of ozone generating apparatus, which is characterized in that
Have Excimer lamp of any of claims 1 or 2,
The starting accessory is at least set to the electrode region X in the outer part than high-voltage side.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-070764 | 2018-04-02 | ||
| JP2018070764A JP7106945B2 (en) | 2018-04-02 | 2018-04-02 | Excimer lamp, light irradiation device, and ozone generator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110349834A true CN110349834A (en) | 2019-10-18 |
Family
ID=68174133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910257453.5A Pending CN110349834A (en) | 2018-04-02 | 2019-04-01 | Excimer lamp, light irradiation device and ozone generating apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7106945B2 (en) |
| KR (1) | KR20190115410A (en) |
| CN (1) | CN110349834A (en) |
| TW (1) | TW201943098A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102657557B1 (en) * | 2021-09-23 | 2024-04-15 | (주)선재하이테크 | Ionizer using excimer lamp |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003036813A (en) * | 2001-05-17 | 2003-02-07 | Matsushita Electric Ind Co Ltd | Cold cathode lamp and its manufacturing method |
| US20040095069A1 (en) * | 2002-08-20 | 2004-05-20 | Ushiodenki Kabushiki Kaisha | Light source device |
| JP2005029401A (en) * | 2003-07-08 | 2005-02-03 | Iwasaki Electric Co Ltd | Reflecting mirror for light source, and light source unit |
| KR20050117661A (en) * | 2004-06-11 | 2005-12-15 | 동양산업(주) | An electroide structure of fiuorescent lamp used an insulated film |
| KR20070070055A (en) * | 2005-12-28 | 2007-07-03 | 우시오덴키 가부시키가이샤 | Excimer lamp |
| JP2010225343A (en) * | 2009-03-23 | 2010-10-07 | Ushio Inc | Excimer lamp |
| JP2013149546A (en) * | 2012-01-23 | 2013-08-01 | Ushio Inc | Excimer lamp |
| JP2014078460A (en) * | 2012-10-12 | 2014-05-01 | Ushio Inc | Excimer lamp |
| JP2015103343A (en) * | 2013-11-22 | 2015-06-04 | ウシオ電機株式会社 | Excimer lamp |
| CN106252194A (en) * | 2015-06-09 | 2016-12-21 | 优志旺电机株式会社 | Excimer lamp |
| JP2017068944A (en) * | 2015-09-29 | 2017-04-06 | 株式会社オーク製作所 | Excimer lamp device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001185090A (en) * | 1999-12-28 | 2001-07-06 | Md Komu:Kk | Dielectric material barrier discharge lamp |
| JP4793154B2 (en) | 2006-07-31 | 2011-10-12 | ウシオ電機株式会社 | External electrode type rare gas discharge lamp |
| US8049417B2 (en) * | 2008-02-22 | 2011-11-01 | Rutgers, The State University | High brightness excimer lamp |
| JP6232782B2 (en) * | 2013-07-01 | 2017-11-22 | ウシオ電機株式会社 | Excimer lamp |
| JP6501196B2 (en) | 2015-01-06 | 2019-04-17 | ウシオ電機株式会社 | Excimer lamp light source device |
| JP6288568B2 (en) * | 2016-08-09 | 2018-03-07 | ウシオ電機株式会社 | Ozone generator |
-
2018
- 2018-04-02 JP JP2018070764A patent/JP7106945B2/en active Active
-
2019
- 2019-02-14 TW TW108104888A patent/TW201943098A/en unknown
- 2019-03-19 KR KR1020190031238A patent/KR20190115410A/en unknown
- 2019-04-01 CN CN201910257453.5A patent/CN110349834A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003036813A (en) * | 2001-05-17 | 2003-02-07 | Matsushita Electric Ind Co Ltd | Cold cathode lamp and its manufacturing method |
| US20040095069A1 (en) * | 2002-08-20 | 2004-05-20 | Ushiodenki Kabushiki Kaisha | Light source device |
| JP2005029401A (en) * | 2003-07-08 | 2005-02-03 | Iwasaki Electric Co Ltd | Reflecting mirror for light source, and light source unit |
| KR20050117661A (en) * | 2004-06-11 | 2005-12-15 | 동양산업(주) | An electroide structure of fiuorescent lamp used an insulated film |
| KR20070070055A (en) * | 2005-12-28 | 2007-07-03 | 우시오덴키 가부시키가이샤 | Excimer lamp |
| JP2010225343A (en) * | 2009-03-23 | 2010-10-07 | Ushio Inc | Excimer lamp |
| JP2013149546A (en) * | 2012-01-23 | 2013-08-01 | Ushio Inc | Excimer lamp |
| JP2014078460A (en) * | 2012-10-12 | 2014-05-01 | Ushio Inc | Excimer lamp |
| JP2015103343A (en) * | 2013-11-22 | 2015-06-04 | ウシオ電機株式会社 | Excimer lamp |
| CN106252194A (en) * | 2015-06-09 | 2016-12-21 | 优志旺电机株式会社 | Excimer lamp |
| JP2017068944A (en) * | 2015-09-29 | 2017-04-06 | 株式会社オーク製作所 | Excimer lamp device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20190115410A (en) | 2019-10-11 |
| TW201943098A (en) | 2019-11-01 |
| JP7106945B2 (en) | 2022-07-27 |
| JP2019185856A (en) | 2019-10-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW200931485A (en) | Discharge lamp | |
| KR101792563B1 (en) | Discharge lamp | |
| JP2001167737A (en) | High pressure discharge lamp, and lighting device and illuminating device of high pressure discharge lamp | |
| US6605889B2 (en) | Electrodeless low pressure lamp with multiple ferrite cores and coils | |
| US20120112624A1 (en) | Xenon lamp using ceramic arc tube | |
| JP2005327719A (en) | Dielectric barrier discharge lamp | |
| ES2377507T3 (en) | Lamp that has an ignition mount | |
| CN110349834A (en) | Excimer lamp, light irradiation device and ozone generating apparatus | |
| JP2002175780A (en) | High-pressure discharge lamp, high-pressure discharge lamp lighting device and lighting system | |
| CN1945791B (en) | Non-electrode sulfur lamp | |
| EP1704580B1 (en) | Metal halide lamp and luminaire using the same | |
| US6777878B2 (en) | Dielectric barrier discharge lamp having an ignition means | |
| JP2013505523A (en) | Low pressure discharge lamp | |
| JP4977337B2 (en) | Dielectric barrier discharge lamp | |
| US6359376B1 (en) | Fluorescent lamp having asymmetric electrodes inside the discharge tube | |
| HU219701B (en) | Electrodeless high intensity discharge lamp having a phosphorus fill | |
| EP2149146B1 (en) | High pressure sodium lamp | |
| JPS6358752A (en) | Aperture type area gas discharge lamp | |
| JP2002110100A (en) | High pressure discharge lamp, high pressure discharge lamp lighting device and lighting system | |
| US20130278130A1 (en) | Temperature control of arc tube of fluorescent lamp | |
| CN205810763U (en) | A kind of high-power ceramic Metal halogen lamp | |
| CN101501814A (en) | Luminous tube, electric lamp base fluorescent lamp and bulb shaped fluorescent lamp | |
| KR200230709Y1 (en) | Cold cathod type fluorescent lamp | |
| JP2001093471A (en) | High-pressure discharge lamp, lighting device of high- pressure discharge lamp, and illuminating equipment | |
| JP2004152605A (en) | Discharge lamp and liquid crystal backlight apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |