JP2005353386A - Excimer discharge lamp device - Google Patents

Excimer discharge lamp device Download PDF

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JP2005353386A
JP2005353386A JP2004172059A JP2004172059A JP2005353386A JP 2005353386 A JP2005353386 A JP 2005353386A JP 2004172059 A JP2004172059 A JP 2004172059A JP 2004172059 A JP2004172059 A JP 2004172059A JP 2005353386 A JP2005353386 A JP 2005353386A
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discharge
excimer
excimer discharge
discharge lamp
vessel
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JP4389682B2 (en
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Masaki Nakamura
雅規 中村
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Ushio Denki KK
Ushio Inc
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Ushio Denki KK
Ushio Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an excimer discharge lamp device having a structure capable of carrying out stable dielectric barrier discharge without exposing an external electrode to an air atmosphere. <P>SOLUTION: This excimer discharge lamp device comprises: an excimer discharge lamp composed by adjacently arranging a plurality of excimer discharge units each comprising a discharge vessel formed of a dielectric material with a gas generating excimer discharge enclosed, and a conductor supplied with power from the outside the discharge vessel and installed in the discharge vessel; and a lighting device for applying a voltage to the excimer discharge lamp. The excimer discharge lamp device is characterized by that the lighting device is connected between the conductors of the excimer discharge units adjacent to each other. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

この発明は、誘電体バリア放電を行うエキシマ放電ランプ装置の構造に関する。   The present invention relates to a structure of an excimer discharge lamp device that performs dielectric barrier discharge.

近年、誘電体からなる円筒管の両端部を塞いで放電容器を形成し、その放電容器内部にキセノンなどの希ガスを封入し、誘電体をはさんで放電容器外に配置される一対の電極間に、例えば５０ｋＨｚ程度の高周波電圧を印加して封入空間内で誘電体バリア放電を行うことによりキセノンを一時的にエキシマ状態にし、基底状態にエネルギー準位が下がるときに紫外線を放出させるエキシマ放電ランプが半導体・電子部品の表面洗浄・表面改質などの光源として使用され始めている。   In recent years, a discharge vessel is formed by closing both ends of a cylindrical tube made of a dielectric, a rare gas such as xenon is sealed inside the discharge vessel, and a pair of electrodes disposed outside the discharge vessel with the dielectric interposed In the meantime, for example, excimer discharge that temporarily turns xenon into an excimer state by applying a high frequency voltage of about 50 kHz to perform dielectric barrier discharge in the enclosed space and emits ultraviolet rays when the energy level falls to the ground state. Lamps are starting to be used as light sources for surface cleaning and surface modification of semiconductors and electronic components.

従来のエキシマ放電ランプ装置では、図１４に管軸方向の断面図を示すが、石英ガラス等の誘電体からなる放電容器２１の外部に網構造の金属電極２２が使用されていた。これは放電容器外部に効率よく紫外線を放出するためには網構造の電極が適するとされ採用されたものである。この金属電極２２は例えばニッケル合金であるモネルメタルが、耐熱耐食性が大きいことから使用される。なお、２３は網構造の電極に対向する電極であり、アルミニウム等の金属からなる。７は点灯電源としての高周波電源である。
しかし、放電容器２１である石英ガラスとモネルメタルの膨張率が異なるので、擦れて金属粉末が生じ、エキシマ放電ランプを点灯中に被照射物が下方にある場合、その金属粉末が落下し、コンタミとなる。 In a conventional excimer discharge lamp apparatus, a cross-sectional view in the tube axis direction is shown in FIG. 14, but a mesh-structured metal electrode 22 is used outside a discharge vessel 21 made of a dielectric such as quartz glass. In order to efficiently emit ultraviolet rays to the outside of the discharge vessel, a net-structured electrode is suitable and adopted. As the metal electrode 22, for example, monel metal, which is a nickel alloy, is used because of its high heat and corrosion resistance. Reference numeral 23 denotes an electrode facing the electrode having a net structure, and is made of a metal such as aluminum. Reference numeral 7 denotes a high-frequency power source as a lighting power source.
However, since the expansion rate of quartz glass, which is the discharge vessel 21, and that of the monel metal are different, metal powder is rubbed and the object is irradiated while the excimer discharge lamp is turned on. Become.

また、キセノンを封入したエキシマ放電ランプは１７２ｎｍの真空紫外光を放射する。この真空紫外光は大気雰囲気ではオゾンを発生し、網構造の金属電極が酸化腐蝕してしまう。外部電極が酸化するとインピーダンスの低下、網の開口率の低下を招き、発光効率の低下とともにランプの寿命にも影響するという問題があった。   An excimer discharge lamp enclosing xenon emits vacuum ultraviolet light of 172 nm. The vacuum ultraviolet light generates ozone in the air atmosphere, and the metal electrode having a net structure is oxidized and corroded. Oxidation of the external electrode causes a decrease in impedance and a decrease in the aperture ratio of the net, and there is a problem in that the lifetime of the lamp is affected as well as a decrease in luminous efficiency.

そこで、エキシマ放電ランプの周囲に窒素で不活性な雰囲気を形成し、また金属のコンタミが被照射物に落下しないように、エキシマ放電ランプは石英ガラス製の照射窓をランプ下方に備えた筐体内に配設され、筐体内は窒素パージされていた。   Therefore, the excimer discharge lamp has a quartz glass irradiation window under the lamp so that an inert atmosphere with nitrogen is formed around the excimer discharge lamp and metal contamination does not fall on the irradiated object. The inside of the housing was purged with nitrogen.

しかしながら、石英ガラス製の照射窓があると、紫外線が石英ガラスを透過するうちに減衰することが避けられないこと、また、照射窓が破損する恐れがあること、さらには照射窓が高価なものであることなどから、照射窓を取り除いたエキシマ放電ランプ装置が産業界で望まれている。   However, if there is an irradiation window made of quartz glass, it is unavoidable that the ultraviolet light attenuates while passing through the quartz glass, the irradiation window may be damaged, and the irradiation window is expensive. Therefore, an excimer discharge lamp apparatus in which the irradiation window is removed is desired in the industry.

ところで、照射窓を取り除き、窒素ガスを直接エキシマ放電ランプに吹き付けて、網構造の金属電極が酸化腐蝕をすることもできるが、完全に電極の酸化腐蝕を防止することはできなかった。また、前述の金属コンタミを防ぐことはできなかった。
特開平6−３１０１０２号公報 By the way, it is possible to remove the irradiation window and blow nitrogen gas directly onto the excimer discharge lamp to oxidize and corrode the metal electrode of the network structure, but it has not been possible to completely prevent the oxidative corrosion of the electrode. Moreover, the above-mentioned metal contamination could not be prevented.
JP-A-6-310102

そこで本発明の目的は、大気雰囲気に外部電極を露出させずに安定した誘電体バリア放電を行うことが可能な構造を有するエキシマ放電ランプ装置を提供することにある。   SUMMARY OF THE INVENTION An object of the present invention is to provide an excimer discharge lamp device having a structure capable of performing stable dielectric barrier discharge without exposing an external electrode to the air atmosphere.

上記課題を解決するために、請求項１に記載の発明は、エキシマ放電を生じるガスを封入した誘電体から成る放電容器と、エキシマ放電を生じるガスを封入した誘電体から成る放電容器と、該放電容器外から給電され該放電容器内に配設される導体とからなるエキシマ放電ユニットが複数近接配置されてなるエキシマ放電ランプと、該エキシマ放電ランプに電圧を印加する点灯装置とからなり、該点灯装置は、隣り合うエキシマ放電ユニットの導体間に接続されていることを特徴とするエキシマ放電ランプ装置とするものである。   In order to solve the above-mentioned problem, the invention described in claim 1 is characterized in that a discharge vessel made of a dielectric enclosing a gas that generates excimer discharge, a discharge vessel made of a dielectric enclosing a gas that generates excimer discharge, An excimer discharge lamp in which a plurality of excimer discharge units including power supplied from outside the discharge vessel and a conductor disposed in the discharge vessel are disposed close to each other, and a lighting device for applying a voltage to the excimer discharge lamp, The lighting device is an excimer discharge lamp device that is connected between conductors of adjacent excimer discharge units.

請求項２に記載の発明は、前記放電容器は管状であり、前記導体は該放電容器の略中心に沿って配設されていることを特徴とする請求項１に記載のエキシマ放電ランプ装置とするものである。   According to a second aspect of the present invention, in the excimer discharge lamp device according to the first aspect, the discharge vessel is tubular, and the conductor is disposed along substantially the center of the discharge vessel. To do.

請求項３に記載の発明は、隣り合う一方のエキシマ放電ユニットが他方のエキシマ放電ユニットと比べて放電容器の外径が小さいことを特徴とする請求項２に記載のエキシマ放電ランプ装置とするものである。   The invention according to claim 3 is the excimer discharge lamp device according to claim 2, wherein one of the adjacent excimer discharge units has a smaller outer diameter than the other excimer discharge unit. It is.

請求項４に記載の発明は、隣り合う一方のエキシマ放電ユニットが他方のエキシマ放電ユニットと比べて放電容器の肉厚が薄いことを特徴とする請求項２または請求項３のいずれかに記載のエキシマ放電ランプ装置とするものである。   The invention according to claim 4 is characterized in that one of the adjacent excimer discharge units has a thinner discharge vessel than the other excimer discharge unit. An excimer discharge lamp device is provided.

請求項５に記載の発明は、前記導体が放電容器内において誘電体からなる少なくとも片方の端部が開放された管部材内に配設されてなることを特徴とする請求項２に記載のエキシマ放電ランプ装置とするものである。   According to a fifth aspect of the present invention, the excimer according to the second aspect is characterized in that the conductor is disposed in a tube member having at least one end made of a dielectric in the discharge vessel. A discharge lamp device is provided.

請求項６に記載の発明は、隣合う一方のエキシマ放電ユニットが他方のエキシマ放電ユニットと比べて放電容器の肉厚が薄いことを特徴とする請求項５に記載のエキシマ放電ランプ装置とするものである。   The invention according to claim 6 is the excimer discharge lamp device according to claim 5, wherein one of the adjacent excimer discharge units is thinner than the other excimer discharge unit. It is.

本発明によれば、処理空間（雰囲気）中に外部金属電極を必要とせずに安定した誘電体バリア放電が可能となる。本発明によれば、放電容器の外部に配設した電極の酸化等によるランプの寿命低下の生じないエキシマ放電ランプ装置とすることができる。   According to the present invention, a stable dielectric barrier discharge can be performed without requiring an external metal electrode in the processing space (atmosphere). ADVANTAGE OF THE INVENTION According to this invention, it can be set as the excimer discharge lamp apparatus which does not produce the lifetime reduction of a lamp | ramp by the oxidation etc. of the electrode arrange | positioned outside the discharge vessel.

本発明において、エキシマ放電ランプを構成する単位のエキシマ放電ユニットの、ユニット内の導体は放電容器の略中心に沿って配設されると、複数個のエキシマ放電ユニットを並列配置したときに各エキシマ放電ユニットで導体を挟んで略均等に放電が生じる。   In the present invention, when the excimer discharge unit of the unit constituting the excimer discharge lamp is disposed along the substantially center of the discharge vessel, each excimer discharge unit is arranged when a plurality of excimer discharge units are arranged in parallel. Discharge occurs substantially evenly across the conductor in the discharge unit.

また、小径の放電容器であるエキシマ放電ユニットとそれより大径で厚肉の放電容器であるエキシマ放電ユニットを組合わせてエキシマ放電ランプを構成すると、放電開始電圧を下げることができる。   Further, when an excimer discharge lamp is configured by combining an excimer discharge unit, which is a discharge vessel having a small diameter, and an excimer discharge unit, which is a discharge vessel having a larger diameter and a larger wall thickness, a discharge start voltage can be lowered.

また、薄肉厚の放電容器であるエキシマ放電ユニットとそれより大径で厚肉の放電容器であるエキシマ放電ユニットを組合わせてエキシマ放電ランプを構成すると、放電開始電圧を下げることができる。   In addition, when an excimer discharge lamp is configured by combining an excimer discharge unit, which is a thin-walled discharge vessel, and an excimer discharge unit, which is a larger-diameter and thick-walled discharge vessel, the discharge start voltage can be lowered.

また、エキシマ放電ユニットの導体が誘電体からなる少なくとも片方の端部が開放された管部材の中に配設されると、放電ユニット内の電界分布が一様になり、放電が安定する。また、本発明によれば、構造が簡単であり低価格のエキシマ放電ランプ装置を提供することが可能となる。   Further, when the conductor of the excimer discharge unit is disposed in a tube member made of a dielectric and having at least one end thereof open, the electric field distribution in the discharge unit becomes uniform, and the discharge is stabilized. In addition, according to the present invention, it is possible to provide an excimer discharge lamp device that has a simple structure and is inexpensive.

以下、本発明の実施形態を説明する。図１、図２には本発明の第一の実施例であるエキシマ放電ランプ装置１００の概略断面図で構成を示す。なお、図１には本発明のエキシマ放電ランプの構成単位であるエキシマ放電ユニット１０を示す。管状の石英ガラス製の放電容器１にキセノンを４０ｋＰａ乃至８０ｋＰａの圧力で封入し、該放電容器１を貫通して導体２が配設された２個のエキシマ放電ユニット１０がアルミナ等の高誘電率の材料からなるスペーサ３をその間に介在させ近接配置され、１つのエキシマ放電ランプ５０を構成している。   Embodiments of the present invention will be described below. 1 and 2 are schematic sectional views of an excimer discharge lamp device 100 according to the first embodiment of the present invention. FIG. 1 shows an excimer discharge unit 10 which is a structural unit of the excimer discharge lamp of the present invention. Two excimer discharge units 10 in which xenon is sealed in a tubular quartz glass discharge vessel 1 at a pressure of 40 kPa to 80 kPa and conductors 2 are disposed through the discharge vessel 1 are made of a high dielectric constant such as alumina. A single excimer discharge lamp 50 is formed by interposing a spacer 3 made of the above material in between.

ここで、スペーサ３が存在すると、隣接する放電容器１、１´間の間隔を一定に確保できる。放電容器間の間隔は２ｍｍ程度である。放電容器の肉厚は一例をあげれば０．８ｍｍであり、管軸方向の長さは一例をあげれば２０００ｍｍである、放電容器１の封止部４はモリブデン箔５を使用したピンチシールで封止される。   Here, if the spacer 3 exists, the space | interval between the adjacent discharge containers 1 and 1 'can be ensured uniformly. The interval between the discharge vessels is about 2 mm. The thickness of the discharge vessel is 0.8 mm, for example, and the length in the tube axis direction is 2000 mm, for example. The sealing portion 4 of the discharge vessel 1 is sealed with a pinch seal using molybdenum foil 5. Stopped.

本発明において、各放電容器の間隔は、容器内部の空隙間隔、すなわち導体と放電容器内壁間の間隔と比べて十分に小さいために各放電容器の間隔が構成する外部空隙は放電開始電圧に達しないため、放電容器外部では放電せず、単なる誘電体に相当し、温度上昇に伴いその誘電体に蓄えられる電荷量が変わるため、エキシマ放電空間内の温度上昇による電子量増加によるインピーダンスの変化も抑制することができ、安定した誘電体バリア放電を提供することができる。   In the present invention, the interval between each discharge vessel is sufficiently smaller than the gap interval inside the vessel, that is, the interval between the conductor and the inner wall of the discharge vessel, so that the external gap formed by the interval between each discharge vessel reaches the discharge start voltage. Therefore, it does not discharge outside the discharge vessel, it corresponds to a mere dielectric, and the amount of charge stored in the dielectric changes as the temperature rises, so the impedance changes due to the increase in the amount of electrons due to the temperature rise in the excimer discharge space. Therefore, a stable dielectric barrier discharge can be provided.

導体２は放電容器１内においてはタングステン線などが使われ、放電容器１の封止部４においてはモリブデン箔５の一方の端部にタングステン線を接続し、モリブデン箔５の他方の端部に放電容器外部へ外部リード６として導出されるモリブデン棒が接続される。導体２としては、上述の線状形状のもの以外にも、コイル状又は板状でもよく、金属としては、タングステンのほかにステンレス、ニッケル合金、モネルメタル、銅、モリブデン、などが適する。また、同一放電容器内に導体は複数本あってもいい。   As the conductor 2, a tungsten wire or the like is used in the discharge vessel 1, a tungsten wire is connected to one end of the molybdenum foil 5 in the sealing portion 4 of the discharge vessel 1, and the other end of the molybdenum foil 5 is connected to the conductor 2. A molybdenum rod led out as an external lead 6 is connected to the outside of the discharge vessel. The conductor 2 may be in the form of a coil or a plate in addition to the above-described linear shape, and as the metal, stainless steel, nickel alloy, monel metal, copper, molybdenum, etc. are suitable in addition to tungsten. Further, there may be a plurality of conductors in the same discharge vessel.

なお、放電容器は円筒形状に限られるものではなく、管軸に垂直な断面が四角形状やその他の多角形状であってもいい。材質としては、成形加工性や紫外線の透過特性から石英ガラス、特に合成石英ガラスが好ましいが、単結晶アルミナであるサファイアや多結晶アルミナであってもよい。図2のエキシマ放電ランプは、図３に示したが、封止部４からリードを露出させずに封止部４の外部から給電板６ａで封止部４を挟み込み、容量結合にて給電することも可能である。   The discharge vessel is not limited to a cylindrical shape, and the cross section perpendicular to the tube axis may be a square shape or other polygonal shapes. As the material, quartz glass, particularly synthetic quartz glass is preferable from the viewpoint of molding processability and ultraviolet light transmission characteristics, but single crystal alumina such as sapphire and polycrystalline alumina may also be used. The excimer discharge lamp of FIG. 2 is shown in FIG. 3, but the lead is not exposed from the sealing portion 4 and the sealing portion 4 is sandwiched by the power supply plate 6a from the outside of the sealing portion 4, and power is supplied by capacitive coupling. It is also possible.

上記図２の各導体２、２´間に電源７から例えば５０ｋＨｚの高周波の高電圧を印加することにより誘電体バリア放電を行う。図１２に本発明のエキシマ放電ランプ装置の点灯装置７の回路構成を模式図的に示した。点灯装置７はコンバータ部１１とインバータ部１２と昇圧トランス１３とからなり、コンバータ部１１により商用電源（不図示）を直流電源に変換し、インバータ部１２で直流電源を高周波のパルスに変換し、昇圧トランス１３に供給する。該昇圧トランス１３の二次側は中間タップ１４のついた構造になっており、エキシマ放電ランプ５０の放電容器１、１´の表面電位を安定電圧になるよう調整される。
なお、２、２´は放電容器１、１´内にそれぞれ配設された導体である。 Dielectric barrier discharge is performed by applying a high frequency of, for example, 50 kHz from the power source 7 between the conductors 2 and 2 'shown in FIG. FIG. 12 schematically shows the circuit configuration of the lighting device 7 of the excimer discharge lamp device according to the present invention. The lighting device 7 includes a converter unit 11, an inverter unit 12, and a step-up transformer 13. The converter unit 11 converts a commercial power source (not shown) into a DC power source, and the inverter unit 12 converts the DC power source into a high-frequency pulse. The voltage is supplied to the step-up transformer 13. The secondary side of the step-up transformer 13 has a structure with an intermediate tap 14, and the surface potential of the discharge vessel 1, 1 ′ of the excimer discharge lamp 50 is adjusted to a stable voltage.
Reference numerals 2 and 2 ′ denote conductors disposed in the discharge vessels 1 and 1 ′, respectively.

図２のエキシマ放電ランプ装置１００においては、印加電圧は周波数２０ｋＨｚ〜３００ｋＨｚで、５ｋＶｐ−ｐから１５Ｖｐ−ｐであり、放電は誘電体を介して導体２と導体２´間でエキシマ放電を生じる。ここでＶｐ−ｐは、図１３に電圧波形の一例を示すが、電圧波形の最大値（Ｖｍａｘ）と最小値（Ｖｍｉｎ）の幅を意味するものである。 In the excimer discharge lamp device 100 of FIG. 2, at the applied voltage frequency 20KHz～300kHz, a 15V p-p from 5 kV p-p, discharge excimer discharge between the conductor 2 and the conductor 2 'through a dielectric Arise. Here, although V p-p shows an example of the voltage waveform in FIG. 13, it means the width of the maximum value (V max ) and the minimum value ( Vmin ) of the voltage waveform.

図４は図２のエキシマ放電ランプ装置１００のエキシマ放電ユニットの管軸方向に垂直な方向の概略断面図である。放電容器Ｌ１と放電容器Ｌ２は１．５ｍｍ以下の距離でスペーサ３により離間して配置されている。１．５ｍｍ以下の離間距離とすることで、空隙層が誘電体となり空隙層内でコロナ放電発生することなく放電容器Ｌ１、Ｌ２内での放電が生じるのである。それ以上の間隔をあけると放電が起き難くなる。放電容器Ｌ１、Ｌ２のガラス管は肉厚０．８ｍｍ、導体Ａと放電容器Ｌ１の内壁、導体Ｂと放電容器Ｌ２の内壁との距離は９．０ｍｍであり、放電容器Ｌ１、Ｌ２内に８０ｋＰａのキセノンが封入されている。導体はタングステン製であり、電圧波形の最大最小の幅Ｖｐ−ｐで１０ｋＶとなる電圧を導体Ａと導体Ｂの間にかけると、図４のような放電柱Ｈが形成される。 4 is a schematic cross-sectional view in a direction perpendicular to the tube axis direction of the excimer discharge unit of the excimer discharge lamp apparatus 100 of FIG. The discharge vessel L1 and the discharge vessel L2 are spaced apart by the spacer 3 at a distance of 1.5 mm or less. By setting the separation distance to 1.5 mm or less, the gap layer becomes a dielectric, and discharge in the discharge vessels L1 and L2 occurs without generating corona discharge in the gap layer. If the interval is longer than that, it will be difficult for the discharge to occur. The glass tubes of the discharge vessels L1 and L2 are 0.8 mm thick, the distance between the conductor A and the inner wall of the discharge vessel L1, and the distance between the conductor B and the inner wall of the discharge vessel L2 is 9.0 mm, and 80 kPa in the discharge vessels L1 and L2. Xenon is enclosed. The conductor is made of tungsten, and when a voltage of 10 kV is applied between the conductor A and the conductor B with the maximum and minimum width V p-p of the voltage waveform, a discharge column H as shown in FIG. 4 is formed.

図５に示したように、エキシマ放電ユニット１０を連続的に並べて、最外側は金属筐体１６として、金属筐体１６をアースし、該筐体１６に隣接するエキシマ放電ユニットの導体との間に所定の電位差をつくることで、エキシマ放電ユニットの筐体側空間においても放電し、放電柱Ｈ´が形成される。   As shown in FIG. 5, the excimer discharge units 10 are continuously arranged, the outermost side is a metal casing 16, the metal casing 16 is grounded, and the conductor of the excimer discharge unit adjacent to the casing 16 is between When a predetermined potential difference is generated, the discharge is performed also in the housing side space of the excimer discharge unit, and a discharge column H ′ is formed.

図６には、隣り合う一方のエキシマ放電ユニットが他方のエキシマ放電ユニットと比べて放電容器の外径が小さく、かつ放電容器の肉厚が薄い場合の実施形態を管軸に垂直な概略断面図で示す。相対的に大径の放電容器Ｌ３は肉厚が０．８ｍｍであり、小径の放電容器Ｌ４の肉厚は０．４ｍｍである。小径のエキシマ放電ユニットは放電ギャップが短く、肉厚も薄いので電圧波形の最大・最小の幅Ｖｐ−ｐで６ｋＶでエキシマ放電ユニットの放電が開始する。なお、大径の放電容器Ｌ３の内径は１４ｍｍであり、小径の放電容器Ｌ４の内径は６ｍｍである。放電容器Ｌ４では2kV〜４ｋＶで放電が始まり、さらに電圧を上げて4kv〜６ｋＶにすると放電容器Ｌ３での放電が生じる。 FIG. 6 is a schematic cross-sectional view perpendicular to the tube axis of an embodiment in which one adjacent excimer discharge unit has a smaller outer diameter of the discharge vessel and a thinner discharge vessel than the other excimer discharge unit. It shows with. The relatively large diameter discharge vessel L3 has a wall thickness of 0.8 mm, and the small diameter discharge vessel L4 has a wall thickness of 0.4 mm. Since the small-diameter excimer discharge unit has a short discharge gap and a small thickness, the excimer discharge unit starts discharging at 6 kV with the maximum / minimum width V pp of the voltage waveform. The large diameter discharge vessel L3 has an inner diameter of 14 mm, and the small diameter discharge vessel L4 has an inner diameter of 6 mm. In the discharge vessel L4, discharge starts at 2 kV to 4 kV, and when the voltage is further increased to 4 kv to 6 kV, discharge in the discharge vessel L3 occurs.

また、放電容器Ｌ４を有する小径のエキシマ放電ユニットが放電開始すると、エキシマ放電ユニットから発した紫外線が隣接する大径の放電容器Ｌ３を有するエキシマ放電ユニットに入射し、光電子により放電開始がしやすくなる易放電効果を生じ、大径のエキシマ放電ユニットの放電をしやすくする。   Further, when the small-diameter excimer discharge unit having the discharge vessel L4 starts discharging, the ultraviolet rays emitted from the excimer discharge unit enter the excimer discharge unit having the adjacent large-diameter discharge vessel L3, and the discharge is easily started by photoelectrons. Easily discharges the large-diameter excimer discharge unit.

図７は放電容器Ｌ７をもつ小径のエキシマ放電ユニットを放電容器Ｌ５、Ｌ６をもつ大径の２つのエキシマ放電ユニットの間であって、それら２つの大径のエキシマ放電ユニットの中心より下側に配設したものを示す。この配置にして導体Ｉと導体Ｋ間、導体Ｋと導体Ｊ間に電圧を印加すると、放電柱Ｈが斜め下方に向くことで、ランプ下方に被照射物があると放電部分と被照射物の距離を近づけることになり、被照射物に対して高照度の照射ができる。   FIG. 7 shows that a small-diameter excimer discharge unit having a discharge vessel L7 is positioned between two large-diameter excimer discharge units having discharge vessels L5 and L6 and below the center of the two large-diameter excimer discharge units. The arrangement is shown. When a voltage is applied between the conductor I and the conductor K and between the conductor K and the conductor J in this arrangement, the discharge column H faces obliquely downward, and if there is an object to be irradiated below the lamp, the discharge portion and the object to be irradiated The distance is reduced, and the irradiated object can be irradiated with high illuminance.

図８は、導体が放電容器内において誘電体からなる少なくとも片方の端部が開放された管部材８内に配設されている実施形態を示す。図９は管軸方向の断面図を示す。放電容器内に金属の導体が剥き出しであると、導体から熱電子が放出され、局部的に電界集中し、局部的に放電するので管軸方向でみると偏在した放電になることがある。しかし、この図８のように誘電体からなる管部材８、８´を導体Ｍおよび導体Ｎに被せ、管部材８、８´を介して放電させることによって電界分布を一様にでき、放電が安定することが分かった。導体Ｍと管部材８の間、導体Ｎと管部材８´の間にも小さな放電柱ｈが生じている。   FIG. 8 shows an embodiment in which the conductor is disposed in a tube member 8 in which at least one end made of a dielectric is opened in the discharge vessel. FIG. 9 shows a cross-sectional view in the tube axis direction. If the metal conductor is exposed in the discharge vessel, thermoelectrons are emitted from the conductor, the electric field is locally concentrated, and the electric discharge is locally performed. Therefore, the discharge may be unevenly distributed when viewed in the tube axis direction. However, as shown in FIG. 8, the tube members 8 and 8 'made of a dielectric are placed on the conductor M and the conductor N, and the electric field distribution can be made uniform by discharging through the tube members 8 and 8'. It turned out to be stable. Small discharge columns h are also formed between the conductor M and the tube member 8 and between the conductor N and the tube member 8 '.

図１０は本発明のエキシマ放電ユニット１０の構造の一例を示したものである。図１０（ａ）では、全長４００ｍｍ、肉厚０．８ｍｍの石英ガラスからなる放電容器内に０．１２ｍｍの径のモリブデンやステンレスからなる棒状の導体２が放電容器１の略中心に配設されている。封止端部１７は膨張係数の異なるガラスを繋いだ段継シールがされている。
また、図１０（ｂ）に片側の端部を示したが、導体２は放電容器１内の凹部１ａで片持ちさせ、一方の封止部から導体を導出したものとしてもよい。 FIG. 10 shows an example of the structure of the excimer discharge unit 10 of the present invention. In FIG. 10A, a rod-shaped conductor 2 made of molybdenum or stainless steel having a diameter of 0.12 mm is disposed in the approximate center of the discharge vessel 1 in a discharge vessel made of quartz glass having a total length of 400 mm and a wall thickness of 0.8 mm. ing. The sealing end portion 17 is provided with a step seal that connects glasses having different expansion coefficients.
Moreover, although the edge part of one side was shown in FIG.10 (b), the conductor 2 is cantilevered by the recessed part 1a in the discharge vessel 1, and it is good also as what led out the conductor from one sealing part.

図１１は本発明のエキシマ放電ユニット１０の構造の他の例を示したものであり、全長４００ｍｍ、肉厚０．８ｍｍの石英ガラスからなる放電容器１内に０．１２ｍｍの径のモリブデンやステンレスからなるコイル状の導体が略放電容器の中心に配設されている。コイルを保持するためにここでは１００ｍｍ置きにサポータ９を配置している。サポータ９は０．３ｍｍ径の金属線であり、あるいはガラスなどの絶縁体からなる。封止部４はモリブデン箔５を使用したピンチシールがされている。６は外部リードである。   FIG. 11 shows another example of the structure of the excimer discharge unit 10 of the present invention. Molybdenum or stainless steel having a diameter of 0.12 mm is placed in a discharge vessel 1 made of quartz glass having a total length of 400 mm and a wall thickness of 0.8 mm. A coiled conductor made of is disposed substantially at the center of the discharge vessel. In order to hold the coil, the supporter 9 is arranged every 100 mm here. The supporter 9 is a metal wire having a diameter of 0.3 mm, or is made of an insulator such as glass. The sealing portion 4 is pinch sealed using a molybdenum foil 5. 6 is an external lead.

なお、以上の説明において、封入ガスとしてはキセノンを封入したエキシマ放電ランプについて説明をしたが、本発明のエキシマ放電ランプ装置では、並列設置した各エキシマ放電ユニットに封入するエキシマ発光のガスの種類を例えば個々に変えることにより隣接するエキシマ放電ユニットから波長の異なる紫外光を取り出すということも可能となる。   In the above description, the excimer discharge lamp in which xenon is enclosed as the encapsulated gas has been described. For example, it is possible to take out ultraviolet light having different wavelengths from adjacent excimer discharge units by changing them individually.

本発明のエキシマ放電ランプ装置のエキシマ放電ユニットの概略断面図を示す。The schematic sectional drawing of the excimer discharge unit of the excimer discharge lamp apparatus of this invention is shown. 本発明のエキシマ放電ランプ装置の管軸方向の概略断面図を示す。The schematic sectional drawing of the tube-axis direction of the excimer discharge lamp apparatus of this invention is shown. 本発明のエキシマ放電ランプ装置の、容量結合での給電構造の例を示す。The example of the electric power feeding structure by capacitive coupling of the excimer discharge lamp apparatus of this invention is shown. 本発明のエキシマ放電ランプ装置のエキシマ放電ランプの管軸に垂直な概略断面図を示す。1 is a schematic sectional view perpendicular to the tube axis of an excimer discharge lamp of an excimer discharge lamp device according to the present invention. 本発明のエキシマ放電ランプ装置のエキシマ放電ランプの管軸に垂直な概略断面図を示す。1 is a schematic sectional view perpendicular to the tube axis of an excimer discharge lamp of an excimer discharge lamp device according to the present invention. 本発明のエキシマ放電ランプ装置の他の実施形態のエキシマ放電ランプの管軸に垂直な概略断面図を示す。The schematic sectional drawing perpendicular | vertical to the tube axis | shaft of the excimer discharge lamp of other embodiment of the excimer discharge lamp apparatus of this invention is shown. 本発明のエキシマ放電ランプ装置の他の実施形態のエキシマ放電ランプの管軸に垂直な概略断面図を示す。The schematic sectional drawing perpendicular | vertical to the tube axis | shaft of the excimer discharge lamp of other embodiment of the excimer discharge lamp apparatus of this invention is shown. 本発明のエキシマ放電ランプ装置の他の実施形態のエキシマ放電ランプの管軸に垂直な概略断面図を示す。The schematic sectional drawing perpendicular | vertical to the tube axis | shaft of the excimer discharge lamp of other embodiment of the excimer discharge lamp apparatus of this invention is shown. 本発明のエキシマ放電ランプ装置の他の実施形態のエキシマ放電ランプの管軸方向の概略断面図を示す。The schematic sectional drawing of the tube-axis direction of the excimer discharge lamp of other embodiment of the excimer discharge lamp apparatus of this invention is shown. 本発明に供されるエキシマ放電ユニットの構造の一例を示す。An example of the structure of the excimer discharge unit used for this invention is shown. 本発明に供されるエキシマ放電ユニットの構造の他の一例を示す。The other example of the structure of the excimer discharge unit provided for this invention is shown. 本発明のエキシマ放電ランプ装置の点灯装置の構成を示す。The structure of the lighting device of the excimer discharge lamp apparatus of this invention is shown. 本発明のエキシマ放電ランプ装置の電圧波形の例を示す。The example of the voltage waveform of the excimer discharge lamp apparatus of this invention is shown. 従来のエキシマ放電ランプ装置の管軸方向の概略断面図を示す。The schematic sectional drawing of the tube axis direction of the conventional excimer discharge lamp apparatus is shown.

符号の説明Explanation of symbols

１、１´ 放電容器
１ａ 凹部
２、２´ 導体
３ スペーサ
４ 封止部
５ モリブデン箔
６ 外部リード
６ａ 給電板
７ 点灯装置
８、８´ 管部材
９ サポータ
１０エキシマ放電ユニット
１１ コンバータ部
１２ インバータ部
１３ 昇圧トランス
１４ 中間タップ
１６ 金属筐体
１７ 封止端部
２１ 放電容器
２２ 金属電極
５０エキシマ放電ランプ
１００ エキシマ放電ランプ装置
Ｌ１、Ｌ２、Ｌ３、Ｌ４、Ｌ５、Ｌ６、Ｌ７、Ｌ８ 放電容器
Ｈ、Ｈ´、ｈ 放電柱
Ａ 導体
Ｂ 導体
Ｃ 導体
Ｄ 導体
Ｅ 導体
Ｆ 導体
Ｇ 導体
Ｉ 導体
Ｋ 導体
Ｍ 導体
Ｎ 導体
DESCRIPTION OF SYMBOLS 1, 1 'Discharge vessel 1a Recess 2, 2' Conductor 3 Spacer 4 Sealing part 5 Molybdenum foil 6 External lead 6a Feed plate 7 Lighting device 8, 8 'Tube member 9 Supporter 10 Excimer discharge unit 11 Converter part 12 Inverter part 13 Step-up transformer 14 Middle tap 16 Metal housing 17 Sealed end 21 Discharge vessel 22 Metal electrode 50 Excimer discharge lamp 100 Excimer discharge lamp devices L1, L2, L3, L4, L5, L6, L7, L8 Discharge vessels H, H ′ , H Discharge column A Conductor B Conductor C Conductor D Conductor E Conductor F Conductor G Conductor I Conductor K Conductor M Conductor N Conductor

Claims (6)

エキシマ放電を生じるガスを封入した誘電体から成る放電容器と、該放電容器外から給電され該放電容器内に配設される導体とからなるエキシマ放電ユニットが複数近接配置されてなるエキシマ放電ランプと、該エキシマ放電ランプに電圧を印加する点灯装置とからなり、
該点灯装置は、隣り合うエキシマ放電ユニットの導体間に接続されていることを特徴とするエキシマ放電ランプ装置。 An excimer discharge lamp comprising a plurality of excimer discharge units, each of which includes a discharge vessel made of a dielectric material that encloses a gas that generates excimer discharge, and a conductor that is fed from outside the discharge vessel and disposed in the discharge vessel; And a lighting device for applying a voltage to the excimer discharge lamp,
The excimer discharge lamp device, wherein the lighting device is connected between conductors of adjacent excimer discharge units. 前記放電容器は管状であり、前記導体は該放電容器の略中心に沿って配設されていることを特徴とする請求項１に記載のエキシマ放電ランプ装置。 2. The excimer discharge lamp device according to claim 1, wherein the discharge vessel is tubular, and the conductor is disposed along substantially the center of the discharge vessel. 隣り合う一方のエキシマ放電ユニットが他方のエキシマ放電ユニットと比べて放電容器の外径が小さいことを特徴とする請求項２に記載のエキシマ放電ランプ装置。 The excimer discharge lamp device according to claim 2, wherein one of the adjacent excimer discharge units has a smaller outer diameter than the other excimer discharge unit. 隣り合う一方のエキシマ放電ユニットが他方のエキシマ放電ユニットと比べて放電容器の肉厚が薄いことを特徴とする請求項２または請求項３のいずれかに記載のエキシマ放電ランプ装置。 4. The excimer discharge lamp device according to claim 2, wherein one of the adjacent excimer discharge units has a thinner discharge vessel than the other excimer discharge unit. 前記導体は放電容器内において誘電体からなる少なくとも片方の端部が開放された管部材内に配設されてなることを特徴とする請求項２に記載のエキシマ放電ランプ装置。 3. The excimer discharge lamp device according to claim 2, wherein the conductor is disposed in a tube member having at least one end made of a dielectric in the discharge vessel. 隣合う一方のエキシマ放電ユニットが他方のエキシマ放電ユニットと比べて放電容器の肉厚が薄いことを特徴とする請求項５に記載のエキシマ放電ランプ装置。

6. The excimer discharge lamp device according to claim 5, wherein one of the adjacent excimer discharge units has a thinner discharge vessel than the other excimer discharge unit.

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014032910A (en) * 2012-08-06 2014-02-20 Ushio Inc Excimer lamp
JP2017062971A (en) * 2015-09-25 2017-03-30 ウシオ電機株式会社 Excimer discharge unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014032910A (en) * 2012-08-06 2014-02-20 Ushio Inc Excimer lamp
JP2017062971A (en) * 2015-09-25 2017-03-30 ウシオ電機株式会社 Excimer discharge unit
CN107039233A (en) * 2015-09-25 2017-08-11 优志旺电机株式会社 Quasi-molecule discharge cell

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