JP3163919B2 - Dielectric barrier discharge lamp device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a discharge lamp device used as an ultraviolet light source for photochemical reactions, for example, which forms excimer molecules by dielectric barrier discharge.
The present invention relates to an improvement in a so-called dielectric barrier discharge lamp device using light emitted from the excimer molecule.

[0002]

2. Description of the Related Art As a technique related to the present invention, there is, for example, Japanese Patent Laid-Open Publication No. 1-144560.
There, a discharge vessel is filled with a discharge gas for forming excimer molecules, and a dielectric barrier discharge (also known as an ozonizer discharge or a silent discharge) is issued. (See page 263)
A lamp utilizing light emitted from the excimer molecule, that is, a dielectric barrier discharge lamp device, wherein the discharge vessel is cylindrical, and at least a part of the discharge vessel is formed. A dielectric barrier discharge lamp device is described, which also serves as a dielectric of the dielectric barrier discharge, the dielectric is light transmissive, and a conductive mesh electrode is provided on at least a part of the dielectric. .

[0003] Also, Japanese Patent Laid-Open Publication No. Hei 5-2668.
No. 63 discloses a hollow cylindrical dielectric barrier discharge lamp in which a discharge chamber and an electrode are connected via a liquid having a dielectric constant of 10 or more, in order to control the irradiation characteristics of the lamp. It is described that a member for locally changing the voltage or the effective capacitance is provided.

Hereinafter, an outline of a general dielectric barrier discharge will be described with reference to FIG. 4 which is a schematic diagram of a dielectric barrier discharge lamp device. The discharge vessel 1 is made of glass as a dielectric, and has a hollow cylindrical shape in which an inner tube 2 and an outer tube 3 are coaxially arranged. On the outer surface of the outer tube 3, a reticulated electrode 4 for a dielectric barrier discharge having a light transmitting property is provided. On the outer surface of the inner tube 2, an electrode 5 for a dielectric barrier discharge serving as a light reflection film formed by vapor deposition of aluminum is provided. Each is provided. In order to mechanically and chemically protect the electrode 5, a protective film 9 made of boron nitride is provided on the electrode 5. At one end of the discharge vessel 1, a getter chamber 6 for accommodating a getter 7 is provided.

A discharge space 8 is formed between the inner surface of the outer tube 3 facing the electrode 4 and the inner surface of the inner tube 2 facing the electrode 5. The distance between the two inner surfaces is not always uniform at the discharge space 8 depending on the machining accuracy of the discharge vessel 1. Therefore, the discharge gap length of the discharge space 8 is not uniform throughout the discharge space 8. Therefore, of a straight line group that is perpendicular to the central axis of the hollow cylindrical discharge vessel 1 and intersects with the central axis,
A straight line having the same distance from both ends of the discharge vessel 1 is used as a reference line, and a plurality of straight lines equidistant from the reference line in the direction of the central axis are symmetrically centered on the reference line. The average discharge gap length d of the discharge space 8 is obtained by averaging the distances between the inner surfaces at the points where the selected straight lines intersect the two inner surfaces.

When the discharge space 8 is filled with a discharge gas for forming excimer molecules by a dielectric barrier discharge and a voltage is applied to the electrodes 4 and 5 by an AC power supply 10, the outer tube 3
A voltage is applied to the discharge space 8 via the inner tube 2, that is, the two dielectrics, so that a dielectric barrier discharge is stably generated in the discharge space 8 and excimer light is emitted. When the thicknesses of the outer tube 3 and the inner tube 2 vary, the voltage applied to the discharge space 8 varies depending on the position of the tube, and as a result, the light output varies. This is a phenomenon peculiar to the dielectric barrier discharge lamp. The getter 7 has a function of removing impurity gases (for example, H ₂ O) in the discharge space 8 and stabilizing the discharge.

In a normal arc discharge generated by an arc discharge lamp having a medium pressure or a high pressure of several tens of torr or more, only one discharge plasma exists in a discharge space, and one small electrode luminescent spot exists on an electrode surface. Has occurred. That is, even if the area of the electrode is increased, the portion that substantially functions as an electrode is a very small portion, and only one discharge plasma exists. On the other hand, as described in the discharge handbook, in a dielectric barrier discharge, a dielectric is inserted in the discharge path. Since this dielectric prevents the discharge plasma from converging into a single line, a very small discharge plasma having a very small plasma diameter and a very short discharge duration (hereinafter referred to as a microplasma) is formed by the discharge. There will be many in space.

The reason why a plurality of dielectric barrier discharge lamp devices connected in parallel can be operated by one power supply is as follows.
This is because there are multiple micro-plasmas described above.

[0009]

The above-described dielectric barrier discharge lamp device is useful because it has various features not found in conventional glow discharge lamps and arc discharge lamps. In particular, when the discharge vessel is formed into a substantially cylindrical shape, and a structure in which an internal electrode is provided substantially coaxially with the discharge vessel on the outer surface inside the discharge vessel, a commercially available glass tube, ceramic tube, or the like can be used, and In addition, since the structure is simplified, the manufacture is facilitated, and therefore, there is an advantage that the dielectric barrier discharge lamp device can be provided at low cost.

However, it has been found that the conventional dielectric barrier discharge lamp device has the following disadvantages. Commercially available glass tubes, ceramic tubes, and the like have variations in wall thickness, tube diameter, and the like in the axial position of each tube and one tube, and this is the difference in the axial position of each lamp and one lamp. Causes variations in light output. For example, in FIG. 4, if the thickness of the outer tube 3 is increased at the position on the getter 7 side, the electric input decreases on the getter 7 side and the light output decreases. That is, while the portion far from the getter 7 side has a sufficient light output,
The light output decreases as approaching the getter 7 side.

Also, when one dielectric barrier discharge lamp is turned on by a specific one power supply, if the thickness of the discharge vessel and the discharge gap in each lamp vary,
Light output varies among individual lamps. When this phenomenon occurs, the lamp reaches its end of life, and the light output fluctuates when the lamp is replaced with a new lamp.

This disadvantage is unique to a dielectric barrier discharge lamp device in which the tube wall of the discharge vessel is used as a dielectric for dielectric barrier discharge.

The above-mentioned variations in light output due to variations in thickness, tube diameter, etc. naturally increase as the area of the discharge vessel in contact with the conductive mesh electrode of the dielectric barrier discharge lamp device increases. And further increases as the tube wall load decreases. In particular, the area is 160 square centimeters or more, and the tube wall load is 0.5 W / cm.
^In the case of ² or less, the above-mentioned variations in wall thickness, tube diameter, etc., and variations in light output due to variations in discharge gap length due to machining accuracy cannot be ignored in practical use.

When the plurality of dielectric barrier discharge lamp devices connected in parallel are lit by one power supply, the area is obviously the sum of the areas of the respective dielectric barrier discharge lamp devices. It is.

The electric input to the dielectric barrier discharge lamp device is described in “Ozonizer Handbook” published by Corona, 1960, No. 112, edited by the Ozonizer Technical Committee of the Institute of Electrical Engineers of Japan.
It was determined from the Lissajous figure measurement of the integrated value of the applied voltage and the current flowing through the lamp, ie, the charge amount (symbol Q), described on the page. FIG. 5 shows an example of a Lissajous diagram in which the horizontal axis represents the applied voltage and the vertical axis represents the charge amount. An isosceles quadrilateral in which the straight lines AB and CD are parallel and the straight lines BC and AD are parallel is obtained, and the electric input to the discharge lamp is calculated from the area of the isosceles quadrilateral. In some cases, the straight line AB and the straight line CD were slightly deviated from each other and became curved, but in this case, these curves were approximated by straight lines.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to provide a light-transmitting discharge vessel having a substantially cylindrical outer shape and at least one of the outer surfaces of the discharge vessel. A conductive mesh electrode provided on the entire periphery of the portion, an internal electrode provided substantially coaxially with the discharge vessel on the outer surface inside the discharge vessel, and excimer molecules formed by a dielectric barrier discharge filled in the discharge space . A dielectric barrier discharge lamp comprising a discharge gas to be formed, and a dielectric barrier discharge lamp device provided with at least one power supply for performing a dielectric barrier discharge, the light output of each lamp and the axial position of the lamp. An object of the present invention is to provide a dielectric barrier discharge lamp device having no variation.

[0017]

In order to solve the above-mentioned problems, the invention according to claim 1 of the present invention provides a light-transmitting discharge vessel having at least a substantially cylindrical outer shape, and at least one of the outer surfaces of the discharge vessel. A conductive mesh electrode provided on the entire periphery of the portion, an internal electrode provided substantially coaxially with the discharge vessel on the outer surface inside the discharge vessel, and excimer molecules formed by a dielectric barrier discharge filled in the discharge space . A dielectric barrier discharge lamp comprising a discharge gas to be formed, and a dielectric barrier discharge lamp device provided with at least one power supply for performing the dielectric barrier discharge, wherein the conductive material is provided in at least a part of an axial direction of the discharge vessel. A conductive spiral electrode is provided on a conductive reticulated electrode in close contact with the conductive reticulated electrode.

According to a second aspect of the present invention, in the first aspect of the present invention, the electric mesh electrode is formed of a cylindrical conductive mesh having elasticity in the axial direction.

According to a third aspect of the present invention, in the first or second aspect, the length of the conductive spiral electrode in the tube axis direction is less than the length of the conductive mesh electrode. It was done.

According to a fourth aspect of the present invention, in the first or second aspect, the length of the conductive spiral electrode in the tube axis direction is substantially the same as the length of the conductive mesh electrode. It is composed.

According to a fifth aspect of the present invention, in the first to fourth aspects of the present invention, the discharge gas is a gas containing xenon as a main component and the dielectric gas is connected to one power supply. A discharge vessel in which a total area of the discharge vessel in contact with the conductive mesh electrode of the barrier discharge lamp is 160 square centimeters or more, and an electric input to the dielectric barrier discharge lamp is in contact with the conductive mesh electrode; Is defined to be 0.5 W / cm ² or less when divided by the area expressed in square centimeters.

A sixth aspect of the present invention is the invention according to the first to fifth aspects, wherein two or more dielectric barrier discharge lamps are arranged in parallel to constitute a substantially planar light source. It is.

[0023]

According to the first aspect of the present invention, there is provided a light-transmitting discharge vessel having at least a substantially cylindrical outer shape, and a conductive mesh electrode provided on at least a part of the outer surface of the discharge vessel. A dielectric barrier discharge lamp comprising: an internal electrode provided substantially coaxially with the discharge vessel on an outer surface inside the discharge vessel; and a discharge gas for forming excimer molecules by a dielectric barrier discharge filled in the discharge space . And a dielectric barrier discharge lamp device provided with at least one power supply for performing a dielectric barrier discharge, wherein the conductive mesh electrode is provided on the conductive mesh electrode in at least a part of the discharge vessel in the axial direction. By providing the conductive spiral electrode in close contact with the conductive spiral electrode, the conductive spiral electrode presses the conductive reticulated electrode against the discharge vessel, so that the outer surface of the discharge vessel and the conductive reticulated electrode are in contact with each other. Touch are improved, and, since the conductive helical electrode is added, it is possible to change the substantial capacitance connected to the discharge space in series. As a result, the electric input to the discharge space can be adjusted, and the variation in the light output can be reduced.

The mechanism of the first aspect of the present invention described above has not been completely elucidated, and there are many inexplicable parts. For example, the change in capacitance due to the provision of the conductive spiral electrode on the conductive mesh electrode is quite small, and it is difficult to explain the reduction in the variation in light output by only this small change in capacitance. It seems to be. One possible cause is that a minute change in the electric field intensity distribution in the discharge space is related to the generation of microplasma and changes the electric input to the discharge space.

In the invention of claim 2 of the present invention, the conductive mesh electrode is constituted by a cylindrical conductive mesh having elasticity in the axial direction. By pulling in the direction, the conductive mesh electrode can be easily and evenly adhered to the discharge vessel, and the variation of the electric input to the discharge space can be reduced.

According to the third aspect of the present invention, the length of the conductive spiral electrode in the tube axis direction is less than the length of the conductive mesh electrode. In the case where the light output changes along the axis, by providing the conductive spiral electrode in a portion where the light output is large or in a portion where the light output is small, the light output can be made uniform along the tube axis. Whether the conductive spiral electrode is provided in a portion where the light output is large or in a portion where the light output is small is determined by the matching between the lamp and the power supply.

In the invention of claim 4 of the present invention, since the length of the conductive spiral electrode in the tube axis direction is substantially the same as the length of the conductive mesh electrode, both ends of the conductive mesh electrode are connected. The conductive spiral electrode can be fixed by the fixing member.

In the invention of claim 5 of the present invention, the discharge gas is a gas containing xenon as a main component, and the discharge gas is connected to the conductive reticulated electrode of the dielectric barrier discharge lamp connected to one power supply. The total area of the discharge vessels in contact with each other is 160
Wavelength is 172 nm because the value of the electric input to the dielectric barrier discharge lamp divided by the area expressed in square centimeters of the discharge vessel in contact with the conductive mesh electrode is 0.5 W or less. The advantage is that vacuum ultraviolet rays having a center at the center can be obtained with high efficiency, and a relatively large object to be treated can be collectively irradiated with a compact apparatus, and the temperature rise of the discharge vessel is small. This has the advantage of not heating the material excessively. Furthermore, since the input of ultraviolet rays to the unit area of the discharge vessel is reduced, there is an advantage that deterioration of the discharge vessel is reduced and a long life is obtained.

In the invention of claim 6 of the present invention, since two or more dielectric barrier discharge lamps are arranged in parallel to constitute a substantially planar light source, a large number of expensive synthetic quartz glass plates are used. Since there is no need to perform this, there is an advantage that a flat light source device can be obtained at low cost.

[0030]

1 is a schematic view of a dielectric barrier discharge lamp device according to a first embodiment of the present invention. The discharge vessel 1 is made of synthetic quartz glass having a total length of about 300 mm, an inner tube 2 having an outer diameter of 16 mm and a thickness of 1 mm, an outer diameter of about 26.5 mm, and a thickness of 1 mm.
Are arranged in a hollow cylindrical shape by coaxially arranging the outer tubes 3. The thickness variation of the inner pipe 2 and the outer pipe 3 in the pipe axis direction is ± 0.1 mm. The outer tube 3 also serves as a dielectric barrier for the dielectric barrier discharge and a light extraction window member.
An electrode 4 made of a metal net that transmits light is provided on the outer surface thereof.

The metal net 4 is a seamless cylindrical net formed by knitting a single stainless wire of 0.15 mm in diameter and has elasticity in the axial direction. The length of the metal net 4 in the tube axis direction is 250 mm. That is, the area of the discharge vessel in contact with the mesh electrode 4 is 208 square centimeters. Both ends of the mesh electrode 4 are fixed by mesh electrode fixing members 21a and 21b.

Further, on the outer surface of the inner tube 2, there is provided an inner electrode 5 for dielectric barrier discharge which also serves as a light reflection film formed by vapor deposition of aluminum. In order to mechanically and chemically protect the electrode 5, a protective film 9 made of boron nitride is provided on the electrode 5.

A discharge space 8 is formed between the inner surface of the outer tube 3 facing the electrode 4 and the inner surface of the inner tube 2 facing the electrode 5. Therefore, the discharge gap length d in the discharge space 6 is about 0.425 cm. At one end of the discharge vessel 1, a tube wall of the discharge vessel 1 is extended to provide a getter accommodating chamber 6. Barium getter 7 made of barium alloy in getter storage chamber 6
Was stored, and the barium getter 7 was heated at a high frequency to form a barium thin film in the getter storage chamber.

Spiral pitch 3 mm, axial length 100
The conductive spiral electrode 20 made of a nickel wire having a diameter of 0.3 mm and a wire diameter of 0.3 mm is closely attached on the conductive mesh electrode 4 in an axial position close to the getter accommodating chamber 6 of the discharge vessel 1. Provided. One end of the conductive spiral electrode 20 is fixed by a mesh electrode fixing member 21b, and the other end is
It is fixed by being attached to it.

The discharge space 8 has a discharge gas of 40 kPa
Xenon gas, and using a power supply 10 having a frequency of about 13 kHz to increase the applied voltage to the lamp to about 12 kV
When turned on, the input power per square centimeter of surface area of the dielectric barrier discharge lamp was 0.3
Watts, vacuum ultraviolet rays in the range of 160 nm to 180 nm, having a maximum value at 172 nm emitted from the xenon excimer molecule, are emitted uniformly and with high efficiency without variation at the axial position of the lamp tube. Was. When the conductive spiral electrode 20 was not provided, the light output at the end close to the getter housing chamber 6 was smaller than that at the other end.

FIG. 2 is a sectional view of a second embodiment of the present invention. The discharge vessel 1 and the inner electrode 5 are the same as in the first embodiment. The outer electrode 41 has a configuration in which a sheet-shaped wire net is wound around the entire circumference of the discharge vessel 1 instead of a seamless cylindrical shape. The conductive spiral electrode 20 made of a nickel wire having a wire diameter of 0.3 mm is adjusted to have a spiral pitch of 3 mm to 15 mm in accordance with the variation in the light output of each lamp, thereby forming a sheet-like outer surface. It was wound closely around the outside of the electrode 41. In this embodiment, the conductive spiral electrode 2
Reference numeral 0 also serves as a member for fixing the sheet-like wire mesh electrode 41. With the above-described characteristic configuration of the present invention, variations in the light output of each lamp due to variations in the thickness of the discharge vessel and the discharge gap in each lamp could be reduced.

FIG. 3 is a sectional view of a third embodiment of the present invention. Coaxial cylindrical dielectric barrier discharge lamp 4 of Embodiment 2
The book is arranged in parallel with a cooling block 34 made of aluminum. The coaxial cylindrical dielectric barrier discharge lamp is installed such that the portion around which the conductive spiral electrode 20 is wound contacts the cooling block 34. Lamp 1
a, 1b are connected in parallel to the power supply 10a,
c and 1d are connected in parallel to the power supply 10b. 30a,
30b, 30c, and 30d are holes through which the cooling fluid flows. Dielectric barrier discharge lamp device 1a, 1b, 1c, 1
The outer diameter of d is 26.5 mm, the discharge gap length is 5 mm, the sealing pressure of xenon gas is 55 kPa, and the length of the mesh electrode per lamp is 250 mm. The total area of the discharge vessel in contact with the reticulated electrodes of the lamp connected to one power supply is 416 square centimeters.

The dielectric barrier discharge lamps 1a, 1b, 1
c and 1d are light extraction windows 3 made of synthetic quartz glass.
1. The cooling block 34, the side plates 35a and 35b, and the side plates (not shown) located at both ends of the lamp are hermetically sealed. The effective area of the light extraction window 31 is
It is 240 mm × 240 mm. The space between the dielectric barrier discharge lamps 1a, 1b, 1c, 1d and the light extraction window 31 made of synthetic quartz glass is filled with nitrogen gas introduced from an inert gas inlet 32. Incidentally, reference numeral 33 denotes an inert gas outlet.

When the voltage applied to the lamps of the power supplies 10a and 10b was 9.4 kV, the tube wall load was 0.25 W / cm.
² and a wavelength 160 having a maximum value at a wavelength of 172 nm.
Vacuum ultraviolet light having a wavelength in the range from nm to 180 nm was emitted uniformly and with high efficiency without variation among individual lamps. As a result, uniform irradiance was obtained on the surface of the light extraction window 31, and a substantially planar light source was obtained at low cost.

The fourth embodiment of the present invention is different from the third embodiment in that the lamps 1a, 1b, 1c and 1d are connected to one power supply. The same effect as that of the second embodiment can be obtained, and further, there is an advantage that the power supply unit is compact.

[0041]

As described above, according to the present invention, the following effects can be obtained. According to the first aspect of the present invention, there is provided a light-transmissive discharge vessel having at least a substantially cylindrical outer shape, a conductive mesh electrode provided on at least a part of an outer surface of the discharge vessel, and Inside the container
An inner electrode provided substantially coaxially with the discharge vessel on the outer surface of the discharge vessel; a dielectric barrier discharge lamp comprising a discharge gas forming excimer molecules by the dielectric barrier discharge filled in the discharge space ; and a dielectric barrier discharge. A dielectric barrier discharge lamp device provided with at least one power supply for carrying out the process, wherein at least a part of the discharge vessel in the axial direction is on the conductive mesh electrode, and is in close contact with the conductive mesh electrode. Since the spiral electrode is provided, it is possible to obtain a dielectric barrier discharge lamp device in which the light output at the position of each lamp and one lamp in the tube axis direction is small. Further, since a commercially available material can be used without using a special material for the discharge vessel, there is an advantage that a dielectric barrier discharge lamp device can be obtained at low cost.

According to the invention of claim 2 of the present invention, since the conductive mesh electrode of the invention of claim 1 is constituted by a cylindrical conductive mesh having elasticity in the axial direction, variations in light output are reduced. The advantage of being small arises.

According to a third aspect of the present invention, in the first or second aspect, the length of the conductive spiral electrode in the tube axis direction is set to be less than the length of the conductive mesh electrode. When the light output changes along the tube axis of the dielectric barrier discharge lamp, the conductive spiral electrode is provided in a portion where the light output is large, or in a portion where the light output is small, The advantage is that the light output can be made uniform along the tube axis.

According to a fourth aspect of the present invention, in the first to third aspects, the length of the conductive spiral electrode in the tube axis direction is substantially the same as the length of the conductive mesh electrode. Therefore, the conductive spiral electrode can be fixed by members for fixing both ends of the conductive mesh electrode, and therefore, the conductive spiral electrode can be firmly fixed, and a highly reliable dielectric barrier discharge lamp device can be obtained. The advantage is that it can be done.

According to a fifth aspect of the present invention, in the first to fourth aspects of the present invention, the discharge gas is a gas containing xenon as a main component and is connected to one power supply. The total area of the discharge vessel in contact with the conductive reticulated electrode of the dielectric barrier discharge lamp is not less than 160 square centimeters, and the electric input to the dielectric barrier discharge lamp is in contact with the conductive reticulated electrode. The value divided by the area expressed in square centimeters of the discharge vessel is 0.5 W /
cm ² or less, vacuum ultraviolet rays having a center at a wavelength of 172 nm can be obtained with high efficiency, and further, there is an advantage that a relatively large object to be processed can be collectively irradiated with a compact apparatus. Temperature rise is small,
Therefore, there is an advantage that the object to be irradiated is not excessively heated. Furthermore, since the input of ultraviolet rays to the unit area of the discharge vessel is reduced, there is an advantage that deterioration of the discharge vessel is reduced and a long life is obtained.

According to a sixth aspect of the present invention, in accordance with the first to fifth aspects of the present invention, two or more dielectric barrier discharge lamps are arranged in parallel to provide a substantially planar light source. Because of the configuration, there is no need to use a large number of expensive synthetic quartz glass plates, so a flat light source device can be obtained at low cost, and the spatial variation of light output is small, and
There is an advantage that a highly efficient substantially planar light source device can be obtained.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of an embodiment of a dielectric barrier discharge lamp device of the present invention.

FIG. 2 is an explanatory view of another embodiment of the dielectric barrier discharge lamp device of the present invention.

FIG. 3 is an explanatory view of another embodiment of the dielectric barrier discharge lamp device of the present invention.

FIG. 4 is an explanatory view of a conventional dielectric barrier discharge lamp device.

FIG. 5 is an explanatory diagram of a Lissajous figure.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Discharge container 1a, 1b, 1c, 1d Dielectric barrier discharge lamp 2 Inner tube 3 Outer tube 4 Reticulated electrode 5 Inner electrode 6 Getter accommodating chamber 7 Getter 20 Conductive spiral electrodes 21a, 21b Mesh electrode fixing members 30a, 30b, 30c , 30d Cooling fluid hole 31 Light extraction window 32 Inert gas inlet 33 Inert gas outlet 34 Cooling block 35a, 35b Side plate

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Noriyoshi Hishinuma, 1194 Sado, Bessho-cho, Himeji-shi, Hyogo Ushio Electric Co., Ltd. (72) Inventor Yasuo Onishi 1194, Sado, Bessho-cho, Himeji, Hyogo Examiner Hiroshi Kojima in Electric Co., Ltd. (56) References JP-A-6-275242 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01J 65/00

Claims (6)

(57) [Claims] 1. A profile and a light-transmitting discharge vessel which is generally cylindrical, and a conductive mesh electrode provided on the entire circumference of at least a portion of the outer surface of the discharge vessel, the inside of the outer surface of the discharge vessel An internal electrode provided substantially coaxially with the discharge vessel, and a dielectric barrier discharge lamp including a discharge gas that forms excimer molecules by a dielectric barrier discharge filled in the discharge space ,
In a dielectric barrier discharge lamp device provided with at least one power supply for performing a dielectric barrier discharge, said conductive reticulated electrode is closely adhered to said conductive reticulated electrode on at least a part of said discharge vessel in the axial direction. A dielectric spiral discharge lamp device provided with a conductive spiral electrode. 2. The dielectric barrier discharge lamp device according to claim 1, wherein said conductive mesh electrode is constituted by a cylindrical conductive mesh having elasticity in the axial direction. 3. The dielectric barrier discharge lamp according to claim 1, wherein the length of the conductive spiral electrode in the tube axis direction is less than the length of the conductive mesh electrode. apparatus. 4. The dielectric barrier discharge according to claim 1, wherein the length of the conductive spiral electrode in the tube axis direction is substantially the same as the length of the conductive mesh electrode. Lamp device. 5. The discharge vessel according to claim 1, wherein said discharge gas is a gas containing xenon as a main component, and an area of said discharge vessel in contact with said conductive mesh electrode of said dielectric barrier discharge lamp connected to one power supply. The total is 160 square centimeters or more, and the value obtained by dividing the electric input to the dielectric barrier discharge lamp by the area expressed in square centimeters of the discharge vessel in contact with the conductive mesh electrode is 0.5 W / cm ² or less. The dielectric barrier discharge lamp device according to claim 1, wherein the dielectric barrier discharge lamp device is defined as follows. 6. The dielectric barrier discharge lamp according to claim 1, wherein two or more dielectric barrier discharge lamps are arranged in parallel to constitute a substantially planar light source. apparatus.