JP3125606B2 - Dielectric barrier discharge lamp device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a discharge lamp device used as an ultraviolet light source for photochemical reactions, for example, which forms excimer molecules by dielectric barrier discharge.
The present invention relates to an improvement in a so-called dielectric barrier discharge lamp device using light emitted from the excimer molecule.

[0002]

2. Description of the Related Art As a technique related to the present invention, there is, for example, Japanese Patent Laid-Open Publication No. 1-144560.
There, a discharge vessel is filled with a discharge gas for forming excimer molecules, and a dielectric barrier discharge (also known as an ozonizer discharge or a silent discharge) is issued. (See page 263)
Describes a lamp using excimer molecules to form excimer molecules by using light emitted from the excimer molecules, that is, a dielectric barrier discharge lamp.

In the above publication, the discharge vessel has a cylindrical shape, at least a part of the discharge vessel also serves as a dielectric for the dielectric barrier discharge, and the dielectric is light-transmissive. A dielectric barrier discharge lamp is described in which a conductive mesh electrode is provided on at least a part of the dielectric.

[0004] Also, Japanese Patent Application Laid-Open No. 5-2668.
No. 63 discloses a hollow cylindrical dielectric barrier discharge lamp in which a discharge chamber and an electrode are connected via a liquid having a dielectric constant of 10 or more, in order to control the irradiation characteristics of the lamp. It is described that a member for locally changing the voltage or the effective capacitance is provided.

Hereinafter, an outline of a general dielectric barrier discharge lamp will be described with reference to FIG. 5 which is a schematic view of a dielectric barrier discharge lamp. The discharge vessel 1 is made of glass as a dielectric, and has a hollow cylindrical shape in which an inner tube 2 and an outer tube 3 are coaxially arranged. On the outer surface of the outer tube 3, a mesh electrode 4 for a light-permeable dielectric barrier discharge is provided.
Further, on the inner surface of the inner tube 2, an inner electrode 5 for dielectric barrier discharge, which also serves as a light reflection film formed by vapor deposition of aluminum, is provided. To protect the inner electrode 5 mechanically and chemically, a protective film 9 made of boron nitride is provided on the inner electrode 5. At one end of the discharge vessel 1, a getter housing chamber 6 for housing a getter 7 is provided. A discharge space 8 is formed between the inner surface of the outer tube 3 and the outer surface of the inner tube 2.

The discharge space 8 is filled with a discharge gas for forming excimer molecules by dielectric barrier discharge. When a voltage is applied to the electrodes 4 and 5 by the AC power supply 10,
A voltage is applied to the discharge space 8 via the outer tube 3 and the inner tube 2, that is, two dielectrics. Then, a dielectric barrier discharge is stably generated in the discharge space 8, and excimer light is emitted. Here, if there is a spatial variation in the thickness of the outer tube 3 and the inner tube 2, a spatial variation also occurs in the voltage applied to the discharge space 8. As a result, the light output becomes locally uneven. This is a phenomenon peculiar to the dielectric barrier discharge lamp. The getter 7 has a function of removing impurity gases (for example, H ₂ O) in the discharge space 8 and stabilizing the discharge.

In a normal arc discharge generated by an arc discharge lamp having a medium pressure or a high pressure of several tens of torr or more, only one discharge plasma exists in a discharge space, and one small electrode luminescent spot exists on an electrode surface. Has occurred. That is, even if the area of the electrode is increased, the portion that substantially functions as an electrode is a very small portion, and only one discharge plasma exists.

On the other hand, as described in the above-mentioned discharge handbook, in a dielectric barrier discharge, a dielectric is inserted in the discharge path. Since this dielectric prevents the discharge plasma from converging into a single line, a very small discharge plasma having a very small plasma diameter and a very short discharge duration (hereinafter referred to as a microplasma).
Are present in the discharge space in large numbers.

The reason why a plurality of dielectric barrier discharge lamps connected in parallel can be turned on by one power supply is that the above-mentioned multiple microplasmas exist.

The dielectric barrier discharge lamp as described above is
It is useful because it has various features not found in conventional glow discharge lamps and arc discharge lamps. In particular, the dielectric barrier discharge lamp having the following configuration has various advantages as described below.

(1) When the discharge vessel is made to have a substantially cylindrical shape and an internal electrode is provided inside the discharge vessel substantially coaxially with the discharge vessel, a commercially available glass tube is used as the discharge vessel.
A ceramic tube or the like can be applied.

(2) Further, since the structure is simplified, the manufacture is facilitated, and therefore, there is an advantage that the dielectric barrier discharge lamp can be provided at low cost.

However, it has been found that the conventional dielectric barrier discharge lamp has the following disadvantages. (1) In commercially available glass tubes, ceramic tubes, and the like, there are variations in wall thickness, tube diameter, and the like between individual tubes. In addition, the same variation exists in the position of one pipe in the axial direction. Such variations in thickness, tube diameter, and the like cause variations in light output between individual lamps and non-uniform light output in the axial position of each lamp.

For example, in FIG. 5, assuming that the thickness of the outer tube 3 is increased at a position P closer to the getter accommodating chamber 6, the electric input decreases at the position P, and as a result, the light output decreases. . That is, while there is a sufficient light output in a portion far from the position P, the light output decreases as the position P approaches.

Such variations in light output increase as the area of the portion of the discharge vessel of the dielectric barrier discharge lamp in contact with the conductive mesh electrode increases. That is,
As the length or tube diameter of a commercially available glass tube, ceramic tube, or the like used as a discharge vessel increases, the variation in light output increases. This is because, generally, as the length or the diameter of a commercially available glass tube, ceramic tube, or the like increases, the variation in the wall thickness, the tube diameter, and the like tends to increase.

When one dielectric barrier discharge lamp is operated by one specific power supply, the individual lamps have the above-described variations in light output. For example, the life of a certain lamp is exhausted and a new lamp is used. When replacing the lamp, the original light output may not be obtained.

(2) The variation in light output is a value obtained by dividing the value of the electric input to the dielectric barrier discharge lamp by the area expressed in square centimeters of the discharge vessel in contact with the conductive mesh electrode. Increase with decreasing. This is due to the following reasons.

The decrease in the tube wall load means that the number (a) of the microplasma generated per unit volume of the portion of the discharge vessel in contact with the conductive mesh electrode is reduced, and / or (b) ) The frequency of occurrence is reduced. Changes in the number and / or frequency of occurrence of microplasmas cause variations in light output. The effect of this change becomes more pronounced as the (a) number of microplasmas decreases and / or (b) the frequency of occurrence decreases. This disadvantage is unique to the dielectric barrier discharge lamp device in which the tube wall of the discharge vessel is used as a dielectric for the dielectric barrier discharge.

In particular, when the area is 160 cm ² or more and the tube wall load is 0.5 W / cm ² or less, the above-mentioned variation in light output cannot be practically ignored. The area of the portion of the discharge vessel in contact with the conductive reticulated electrode is, when a plurality of dielectric barrier discharge lamps connected in parallel are lit by a single power supply, the area of each dielectric barrier discharge lamp. The total area was used.

The value of the electric input to the dielectric barrier discharge lamp can be obtained from the Ozonizer Handbook, published by Corona in 1960, edited by the Ozonizer Technical Committee of the Institute of Electrical Engineers of Japan.
It was determined from a Lissajous figure measurement of the integrated value of the voltage (symbol V) applied across the electrode and the current flowing through the lamp, that is, the charge amount (symbol Q) described on page 12.

FIG. 6 shows an example of a Lissajous diagram in which the horizontal axis represents voltage and the vertical axis represents charge. Straight line AB and straight line DC
Are obtained and a parallelogram in which the straight line BC and the straight line AD are parallel is obtained, and the value of the electric input to the discharge lamp is calculated from the area of the parallelogram. Depending on the dielectric barrier discharge lamp, the straight line AB and the straight line DC may be slightly distorted and curved. In such a case, the values of the electric input were calculated by approximating these curves with straight lines.

[0022]

DISCLOSURE OF THE INVENTION The present invention has been made based on the above-mentioned circumstances, and the problems are as follows.
An outer tube and an inner tube each having a substantially cylindrical outer shape are coaxially arranged, and an excimer is formed by a dielectric barrier discharge in a discharge vessel having a hollow cylindrical discharge space having both ends closed between the two tubes. Filled with a discharge gas forming molecules, an inner electrode made of metal is provided on at least a part of the inner wall of the inner tube, and at least a part of the outer tube is provided with respect to light emitted from the excimer molecule. It is light-transmissive, and also serves as a dielectric of the dielectric barrier discharge, and is electrically conductive to at least a portion of the outer wall of the dielectric that is light-transmissive to light emitted from the excimer molecules. In a dielectric barrier discharge lamp device including at least one dielectric barrier discharge lamp provided with a reticulated electrode and at least one power supply for performing a dielectric barrier discharge, light output between individual lamps is provided. It is to provide a dielectric barrier discharge lamp device which can reduce the influence of the variation of.

[0023]

In order to solve the above-mentioned problems, according to the first aspect of the present invention, an outer pipe and an inner pipe each having a substantially cylindrical outer shape are arranged coaxially, and the outer pipe and the inner pipe are connected to each other. A discharge vessel that forms a hollow cylindrical discharge space with both ends closed between them is filled with a discharge gas that forms excimer molecules by dielectric barrier discharge, and at least a portion of the inner wall of the inner tube is made of metal. An inner electrode is provided, and at least a part of the outer tube is light-transmissive to light emitted from the excimer molecule, and also serves as a dielectric of the dielectric barrier discharge. At least one dielectric barrier discharge lamp in which a conductive mesh electrode is provided on at least a part of the outer wall of the dielectric that is light-transmissive for light emitted from molecules, and for performing a dielectric barrier discharge Less of In also the dielectric barrier discharge lamp device having a single power source, is provided with a conductive thin plate at least partially between the discharge vessel and the conductive mesh electrode.

According to a second aspect of the present invention, in the first aspect, the conductive mesh electrode is formed of a cylindrical conductive mesh having elasticity in the axial direction.

According to a third aspect of the present invention, in the first or second aspect, the length of the conductive thin plate in the tube axis direction is shorter than the length of the conductive mesh electrode. is there.

According to a fourth aspect of the present invention, in the first or second aspect, the length of the conductive thin plate in the tube axis direction is substantially the same as the length of the conductive mesh electrode. Things.

The fifth aspect of the present invention provides the first aspect.
In any one of the second, third and fourth aspects of the present invention, the conductive thin plate also serves as a reflector for light generated from the dielectric barrier discharge lamp.

[0028] The invention of claim 6 of the present invention relates to claim 1,
In the invention of any one of claims 2, 3, 4, and 5,
The conductive thin plate is formed by vapor deposition.

The invention of claim 7 of the present invention relates to claim 1,
In any one of the second, third, fourth, fifth and sixth aspects of the present invention, the conductive thin plate is made of aluminum.

The invention according to claim 8 of the present invention is directed to claim 1,
8. The dielectric barrier discharge lamp according to claim 2, wherein the discharge gas is a gas containing xenon as a main component and connected to one power supply. The sum of the areas of the discharge vessel in contact with the conductive mesh electrode is at least 160 square centimeters, and the electrical input to the dielectric barrier discharge lamp is expressed in square centimeters of the discharge vessel in contact with the conductive mesh electrode. It is specified so that the value obtained by dividing by the area obtained is 0.5 W / cm ² or less.

The ninth aspect of the present invention is the first aspect.
In the invention according to any one of 2, 3, 4, 5, 6, 7 and claim 8, two or more dielectric barrier discharge lamps are arranged in parallel to constitute a substantially planar light source.

[0032]

According to a first aspect of the present invention, at least a portion between the discharge vessel and the conductive reticulated electrode corresponding to the variation in the wall thickness, outer diameter or discharge gap length of the discharge vessel. By providing a conductive thin plate, a substantial capacitance connected in series with the discharge space is changed. As a result, the impedance matching between the power supply and the dielectric barrier discharge lamp is improved, and not only the electric input to the discharge space located in front of the conductive thin plate is increased, but also the whole of the dielectric barrier discharge lamp is increased. The electric input to the discharge space increases. Therefore, the electric input to the discharge space can be adjusted, and the variation in the light output between the individual lamps can be reduced.

The operation of the structure of the first aspect of the present invention described above has not been completely elucidated. For example,
The change in capacitance due to the provision of the conductive thin plate between the discharge vessel and the conductive mesh electrode is considerably small, and the variation in light output is reduced only by this small change in capacitance. Very Hard to think. Further, even if a conductive thin plate is provided outside the conductive reticulated electrode which is not in contact with the discharge vessel, the capacitance changes, but the effect of reducing the variation in light output is small. Possibly, a small change in the electric field intensity distribution in the discharge space due to the change in capacitance due to the provision of the conductive thin plate between the discharge vessel and the conductive mesh electrode is related to the generation of microplasma. Which changes the impedance of the dielectric barrier discharge lamp,
As a result, it is considered that the impedance matching between the power supply and the dielectric barrier discharge lamp is improved, and the electric input to the discharge space is changed.

According to the invention of claim 2 of the present invention, the conductive mesh electrode is constituted by a cylindrical conductive mesh having elasticity in the axial direction. By pulling the conductive mesh electrode, the conductive mesh electrode can be easily brought into close contact with the discharge vessel without unevenness. further,
The conductive thin plate provided between the discharge vessel and the conductive mesh electrode can be fixed only by the conductive mesh electrode.

According to a third aspect of the present invention, in the first or second aspect, the length of the conductive thin plate in the tube axis direction is shorter than the length of the conductive mesh electrode. In each of the dielectric barrier discharge lamps, when the light output changes along the tube axis, the conductive thin plate is provided in a portion having a large light output or a portion having a small light output, whereby the tube shaft is provided. And the light output can be made uniform. Whether the conductive thin plate is provided in a portion having a large light output or in a portion having a small light output is determined by matching a dielectric barrier discharge lamp with a power supply.

According to a fourth aspect of the present invention, in the first or second aspect, the length of the conductive thin plate in the tube axis direction is substantially the same as the length of the conductive mesh electrode. Therefore, the conductive thin plate can be fixed by a member fixing both ends of the conductive mesh electrode.

The fifth aspect of the present invention provides the first aspect.
In any one of the second, third and fourth aspects of the present invention, the conductive thin plate also serves as a reflector for light generated from the dielectric barrier discharge lamp, so that high irradiance can be obtained.

The invention of claim 6 of the present invention relates to claim 1,
In the invention of any one of claims 2, 3, 4, and 5,
Since the conductive thin plate is formed by vapor deposition, the conductive thin plate and the discharge vessel are almost completely adhered. Therefore, it is possible to reduce variations in light output due to variations in contact between the conductive thin plate and the discharge vessel.

The invention of claim 7 of the present invention provides the method of claim 1,
In any of the inventions 2, 3, 4, 5 or 6, since the conductive thin plate is made of aluminum, it has the following advantages. That is, since aluminum is soft, it adheres well to the conductive mesh electrode and the discharge vessel, and the variation in light output due to the variation in contact between the conductive thin plate and the conductive mesh electrode and the discharge vessel is reduced. further,
Aluminum has a high light reflectance, particularly in the vacuum ultraviolet region, so that high efficiency can be obtained.

The invention of claim 8 of the present invention relates to claim 1,
8. The dielectric barrier discharge lamp according to claim 2, wherein the discharge gas is a gas containing xenon as a main component and connected to one power supply. The sum of the areas of the discharge vessel in contact with the conductive mesh electrode is at least 160 square centimeters, and the electrical input to the dielectric barrier discharge lamp is expressed in square centimeters of the discharge vessel in contact with the conductive mesh electrode. The value obtained by dividing the value by 0.5 W / cm ² or less has the following advantages.

(1) Vacuum ultraviolet rays having a center at a wavelength of 172 nm can be obtained with high efficiency. (2) A relatively large object can be collectively irradiated with a compact device. (3) The temperature rise of the discharge vessel is small, and the object to be irradiated is not excessively heated. (4) Since the input of ultraviolet rays to the unit area of the discharge vessel is reduced, deterioration of the discharge vessel is reduced, and a long life is obtained.

The ninth aspect of the present invention relates to the first aspect.
In any of the inventions of 2, 3, 4, 5, 6, 7 or claim 8, two or more of the dielectric barrier discharge lamps are arranged in parallel to constitute a substantially planar light source. A flat light source device can be obtained at low cost without using many synthetic quartz glass plates.

[0043]

1 is a cross-sectional view of a dielectric barrier discharge lamp device according to a first embodiment of the present invention, and FIG. The discharge vessel 1 is made of synthetic quartz glass having a total length of about 300 mm, and an inner tube 2 having an outer diameter of 16 mm and a wall thickness of 1 mm and an outer tube 3 having an outer diameter of about 26.5 mm and a wall thickness of 1 mm are coaxially arranged to form a hollow cylinder. It is in the shape. The thickness variation of the inner pipe 2 and the outer pipe 3 in the pipe axis direction is ± 0.1 mm.
The outer tube 3 serves both as a dielectric for a dielectric barrier discharge and a light extraction window member, and is provided on its outer surface with a mesh electrode 4 made of a metal mesh through which light is transmitted.

The reticulated electrode 4 is a seamless cylindrical net formed by knitting a single stainless wire having a diameter of 0.15 mm, and has elasticity in the axial direction. The length of the mesh electrode in the tube axis direction is 250 mm. That is, the area of the portion of the discharge vessel 1 in contact with the mesh electrode 4 is π × 2.65.
× 25 ≒ 208 cm ² . Both ends of the mesh electrode 4 are fixed by mesh electrode fixing members 21a and 21b.

On the outer surface of the inner tube 2, there is provided an inner electrode 5 for dielectric barrier discharge which also serves as a light reflection film formed by vapor deposition of aluminum. In order to mechanically and chemically protect the inner electrode 5, a protective film 9 made of boron nitride is provided on the inner electrode 5. Outer tube 3
A discharge space 8 is formed between the inner surface of the inner tube 2 and the outer surface of the inner tube 2. The discharge gap length of the discharge space 8 is 4.25.
mm.

At one end of the discharge vessel 1, the tube wall of the discharge vessel 1 is extended, and a getter accommodating chamber 6 is provided. A barium getter 7 made of a barium alloy was housed in the getter housing chamber 6, and the barium getter 7 was heated at a high frequency to form a barium thin film in the getter housing chamber.

Thickness 0.3 mm, width 20 mm, length 100
A conductive thin film 20 made of an aluminum foil having a thickness of 2 mm was provided between the outer tube 3 and the conductive mesh electrode 4 so as to be close to the getter 7 of the discharge vessel 1 in the axial direction. The conductive thin film 20 is fixed by the elastic conductive mesh electrode 4.

The discharge space 8 has a discharge gas of 40 kPa
, And a voltage of about 13 kHz and a voltage of about 12 kV were supplied to the mesh electrode 4 and the inner electrode 5 using the power supply 10 to turn on the lamp. At this time, the tube wall load becomes 0.3 W / cm ² , and the vacuum ultraviolet light having a maximum value at the wavelength of 172 nm emitted from the xenon excimer molecule and having a maximum value of 160 nm to 180 nm is uniformly emitted with high efficiency. Was done. Conductive thin film 2
By adjusting the dimension of 0, the variation in the output of the vacuum ultraviolet light among the individual lamps could be reduced. Also, the variation in the output of the vacuum ultraviolet light existing in the tube axis direction of each lamp could be reduced.

FIG. 3 is a cross-sectional view of a dielectric barrier discharge lamp device according to a second embodiment of the present invention. Except for the length of the conductive thin film 20, the configuration is the same as that of the dielectric barrier discharge lamp device of the first embodiment. The conductive thin film 20 in this embodiment is made of an aluminum foil having a thickness of 0.3 mm and a length of 250 mm, which is the same as the length of the conductive mesh electrode 4. The width of the conductive thin film 20 is adjusted between 10 mm and 45 mm in accordance with the variation in the light output of each lamp, and is provided between the outer tube 3 and the conductive mesh electrode 4. The conductive thin film 20 also serves as a light reflection plate, and is fixed by mesh electrode fixing members 21a and 21b.

In the second embodiment, as in the first embodiment, the variation in the output of the vacuum ultraviolet light in each lamp could be reduced by adjusting the dimensions of the conductive thin film 20. . Further, since the length of the conductive thin film 20 is the same as the length of the conductive mesh electrode 4, high irradiance due to the effect of the light reflecting plate can be obtained over a wide irradiation area.

FIG. 4 is a sectional view of a third embodiment of the present invention. Four dielectric barrier discharge lamps 1a, 1b, similar to the coaxial cylindrical dielectric barrier discharge lamp of the second embodiment.
1c, 1d is replaced with a cooling block 34 made of aluminum.
It is a configuration installed in parallel with. The dielectric barrier discharge lamps 1a, 1b, 1c, 1d are installed such that the portion where the conductive thin film 20 is inserted is in contact with the cooling block 34. Further, each dielectric barrier discharge lamp 1a, 1b, 1
The dimensions of each of the conductive thin films 20 are adjusted so that variations in the optical outputs c and 1d are reduced. The outer diameter of the dielectric barrier discharge lamps 1a, 1b, 1c, 1d is 2
6.5 mm, average discharge gap length is 5. mm, the sealing pressure of xenon gas is 55 kPa, and the length of the mesh electrode per dielectric barrier discharge lamp is 250 mm.

The dielectric barrier discharge lamps 1a and 1b are connected in parallel to a power supply 10a, and the dielectric barrier discharge lamps 1c and 1d are connected in parallel to a power supply 10b. The total area of the portion of the discharge vessel 1 of the lamp connected to one power source that is in contact with the mesh electrode 4 is about 416 cm ² . In addition, 30a, 30b, 30c, and 30d are holes through which a cooling fluid flows.

The dielectric barrier discharge lamps 1a, 1b, 1
c and 1d are light extraction windows 3 made of synthetic quartz glass.
1. Sealed by a cooling block 34, side plates 35a and 35b, and side plates (not shown) located at both ends of the lamp. The effective light extraction area of the light extraction window 31 is 240 mm × 240 mm. The space between the dielectric barrier discharge lamps 1a, 1b, 1c, 1d and the light extraction window 31 is filled with nitrogen gas introduced from the inert gas inlet 32.

When the voltage applied to the dielectric barrier discharge lamp supplied from the power supplies 10a and 10b was 9.4 kV, the tube wall load was 0.25 W / cm ² . And a wavelength of 160 nm having a maximum value at a wavelength of 172 nm.
The vacuum ultraviolet light having a wavelength in the range of from 180 nm to 180 nm was uniformly emitted with high efficiency without dispersion by individual lamps. As a result, the irradiance was uniform on the surface of the light extraction window 31, and a substantially planar light source device was obtained at low cost.

The fourth embodiment of the present invention is different from the third embodiment in that the lamps 1a, 1b, 1c and 1d are connected to one power supply. The same effect as that of the second embodiment can be obtained, and further, there is an advantage that the power supply unit can be reduced in size and weight as a whole.

The fifth embodiment of the present invention is different from the third embodiment in that the conductive thin film 20 in each of the lamps 1a, 1b, 1c and 1d is made of an aluminum evaporated film.
The same effect as that of the third embodiment is obtained, and further, there is an advantage that high illuminance can be obtained because the light reflection efficiency is high.

In all of the above-described examples, the so-called dielectric barrier discharge ultraviolet radiation lamps which do not have a fluorescent lamp are used. However, so-called dielectric barrier discharge fluorescent lamps in which a fluorescent material is provided in a discharge vessel are also used. Applicable. In that case, a flat fluorescent lamp device is obtained.

[0058]

As described above, the following effects can be obtained in the present invention. According to the invention of claim 1 of the present invention, the conductive thin plate is provided between the discharge vessel and the conductive mesh electrode in accordance with the wall thickness, the outer diameter or the discharge gap length of the discharge vessel. Has the following effects. (1) Variations in the light output of each lamp can be reduced. (2) Therefore, without using a special material for the discharge vessel, it is possible to use a commercially available material having variations in wall thickness, tube diameter, and the like in each tube and each tube. A barrier discharge lamp device is obtained.

According to the invention of claim 2 of the present invention, the conductive mesh electrode of the invention of claim 1 is constituted by a cylindrical conductive mesh having elasticity in the axial direction. It has the following effects in addition to the effects. (3) By attaching the conductive mesh electrode to the discharge vessel and then pulling it in the axial direction, it becomes easy to bring the conductive mesh electrode into close contact with the discharge vessel without unevenness. (4) The conductive thin plate provided between the discharge vessel and the conductive mesh electrode can be fixed only by the conductive mesh electrode.

According to a third aspect of the present invention, in the first or second aspect, the length of the conductive thin plate in the tube axis direction is shorter than the length of the conductive mesh electrode. The following effects are obtained in addition to the effects similar to those of the first or second aspect of the invention. (5) In each of the dielectric barrier discharge lamps, when the light output changes along the tube axis, the conductive thin plate is provided in a portion having a large light output or a portion having a small light output. Thus, uniform light output along the tube axis can be achieved. Whether the conductive thin plate is provided in a portion where the light output is high or in a portion where the light output is low is determined by matching the lamp and the power supply.

According to a fourth aspect of the present invention, in the first or second aspect, the length of the conductive thin plate in the tube axis direction is substantially the same as the length of the conductive mesh electrode. Therefore, in addition to having the same effects as the first or second aspect of the present invention, the following effects are obtained. (6) The conductive thin plate can be fixed by a member fixing both ends of the conductive mesh electrode. Therefore, the conductive thin plate can be firmly fixed, and a highly reliable dielectric barrier discharge lamp device can be obtained.

The invention of claim 5 of the present invention is directed to claim 1,
In any one of the second, third and fourth aspects of the present invention, the conductive thin plate also serves as a reflector for light generated from the dielectric barrier discharge lamp. In addition to having the same effect as any of the inventions, the following effect is obtained. (7) High irradiance can be obtained.

The sixth aspect of the present invention provides the first aspect.
In the invention of any one of claims 2, 3, 4, and 5,
Since the conductive thin plate is formed by vapor deposition,
The present invention has the following effects in addition to the effects similar to those of the second, third, and fourth aspects of the present invention. (8) The conductive thin plate and the discharge vessel are almost completely adhered to each other, so that the variation in light output due to the variation in the contact between the conductive thin plate and the discharge vessel can be reduced.

The seventh aspect of the present invention provides the first aspect.
In any of the second, third, fourth, fifth or sixth aspect of the invention, the conductive thin plate is made of aluminum, so that it is the same as the first, second, third, fourth, fifth or sixth aspect of the invention. In addition to the effects described above, the following effects are obtained. (9) That is, since aluminum is soft, it adheres well to the conductive mesh electrode and the discharge vessel, and the variation in light output due to the variation in contact between the conductive thin plate and the conductive mesh electrode and the discharge vessel is reduced. I do. (10) Further, since aluminum has a high light reflectance, particularly in the vacuum ultraviolet region, high efficiency can be obtained.

The eighth aspect of the present invention provides the first aspect.
8. The dielectric barrier discharge lamp according to claim 2, wherein the discharge gas is a gas containing xenon as a main component and connected to one power supply. The sum of the areas of the discharge vessel in contact with the conductive mesh electrode is at least 160 square centimeters, and the electrical input to the dielectric barrier discharge lamp is expressed in square centimeters of the discharge vessel in contact with the conductive mesh electrode. Since the value divided by the set area is set to be 0.5 W / cm ² or less, the same effect as in any one of the first, ^{second, third,} fourth, fifth, sixth and seventh aspects is obtained. The following effects are obtained in addition to the above.

(11) Vacuum ultraviolet rays having a center at 172 nm can be obtained with high efficiency. (12) A relatively large object can be collectively irradiated with a compact device. (13) The temperature rise of the discharge vessel is small, and the object to be irradiated is not excessively heated. (14) Since the input of ultraviolet rays to the unit area of the discharge vessel is reduced, the deterioration of the discharge vessel is reduced, and a long life is obtained.

The ninth aspect of the present invention relates to the first aspect.
In the invention of any one of claims 2, 3, 4, 5, 6, 7 and claim 8, two or more dielectric barrier discharge lamps are arranged in parallel to constitute a substantially planar light source. In addition to having the same effects as the invention of any one of the items 1, 2, 3, 4, 5, 6, 7 or claim 8, the following effects are obtained. (15) A flat light source device can be obtained at low cost without using many expensive synthetic quartz glass plates. (16) It is possible to obtain a substantially planar light source device with small spatial variations in light output and high efficiency.

[Brief description of the drawings]

FIG. 1 is an explanatory view of a first embodiment of a dielectric barrier discharge lamp device according to the present invention.

FIG. 2 is an explanatory view of a first embodiment of the dielectric barrier discharge lamp device of the present invention.

FIG. 3 is an explanatory view of a second embodiment of the dielectric barrier discharge lamp device of the present invention.

FIG. 4 is an explanatory view of a third embodiment of the dielectric barrier discharge lamp device of the present invention.

FIG. 5 is an explanatory view of a conventional dielectric barrier discharge lamp device.

FIG. 6 is an explanatory diagram of a Lissajous figure.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Discharge container 1a, 1b, 1c, 1d Dielectric barrier discharge lamp 2 Inner tube 3 Outer tube 4 Reticulated electrode 5 Inner electrode 6 Getter accommodating chamber 7 Getter 8 Discharge space 9 Protective film 10, 10a, 10b AC power supply 20a, 20b Conductive Functional thin film 21a, 21b Reticulated electrode fixing member 31 Light extraction window 32 Inert gas inlet 34 Cooling block 35a, 35b Side plate

──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Kenichi Hirose 1194 Sado Bessho-cho, Himeji-shi, Hyogo Ushio Electric Co., Ltd. Examiner Hiroshi Kojima (56) References JP-A-6-275242 (JP, A) (58) Field surveyed (Int. Cl. ⁷ , DB name) H01J 65/00

Claims (9)

(57) [Claims] 1. A discharge vessel in which a hollow cylindrical discharge space having both ends closed is formed by arranging an outer tube and an inner tube, both of which are substantially cylindrical in shape, coaxially. A discharge gas for forming excimer molecules by body barrier discharge is filled, an inner electrode made of metal is provided on at least a part of an inner wall of the inner tube, and at least a part of the outer tube is radiated from the excimer molecule. The dielectric wall of the dielectric barrier discharge, and also serves as a dielectric of the dielectric barrier discharge, and the outer wall of the dielectric that is transparent to the light emitted from the excimer molecule. At least one dielectric barrier discharge lamp at least partially provided with a conductive reticulated electrode; and a dielectric barrier discharge lamp device provided with at least one power supply for performing a dielectric barrier discharge. A dielectric barrier discharge lamp device comprising a conductive thin plate provided at least in part between an electric container and the conductive mesh electrode. 2. The dielectric barrier discharge lamp device according to claim 1, wherein said conductive mesh electrode is formed of a cylindrical conductive mesh having elasticity in the axial direction. 3. The dielectric barrier discharge lamp device according to claim 1, wherein the length of the conductive thin plate in the tube axis direction is shorter than the length of the conductive mesh electrode. 4. The dielectric barrier discharge lamp device according to claim 1, wherein the length of the conductive thin plate in the tube axis direction is substantially the same as the length of the conductive mesh electrode. . 5. The dielectric according to claim 1, wherein the conductive thin plate also serves as a reflector for light generated from the dielectric barrier discharge lamp. Body barrier discharge lamp device. 6. The dielectric barrier discharge lamp device according to claim 1, wherein said conductive thin plate is formed by vapor deposition. 7. The method according to claim 1, wherein said conductive thin plate is made of aluminum.
The dielectric barrier discharge lamp device according to any one of the above. 8. The discharge gas is a gas containing xenon as a main component, and has an area of the discharge vessel in contact with the conductive mesh electrode of the dielectric barrier discharge lamp connected to one power supply. The total is 160 cm ² or more, and the value obtained by dividing the electric input to the dielectric barrier discharge lamp by the area expressed in square centimeters of the discharge vessel in contact with the conductive mesh electrode is 0.5 W / cm ² or less. Claims 1, 2, 3, 4, 5, characterized in that:
The dielectric barrier discharge lamp device according to claim 6. 9. A substantially planar light source according to claim 1, wherein two or more dielectric barrier discharge lamps are arranged in parallel. The dielectric barrier discharge lamp device according to claim 8.