/1290332 ·， (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於介電質障壁放電燈及使用該放電燈的紫 • 外線照射裝置。 【先前技術】 將氙等稀有氣體或是稀有氣體的鹵化物等施行無聲放 Φ 電亦即施行介電質障壁放電，發生接近於固有單色的放射 的激光放電燈亦即介電質障壁放電燈，是習知就被記載於 很多文獻。在介電質障壁放電燈，會流動脈衝狀電流。該 脈衝狀電流是具有高速電子流，且因休止期間較多，因此 鬌 將放出氙等紫外線的物質暫時地結合成分子狀態（激光狀 態），而由該狀態恢復成基底狀態時有效率地放出再吸收 較少的短波長紫外線。又，氙的場合，進行以172nm作爲 中心波長的層半値寬的分子發光。波長172nm的紫外線是 其#重比由低壓水銀燈所得到的波長1 8 5 n m或2 5 4 n m的 “ 紫外線還大，而且比欲分解的有機化合物的結合能量還大 - 。爲此，藉由照射波長1 7 2 n m的紫外線，來切斷上述有機 化合物的結合，而可加以分解並除去。又，藉由在大氣環 境中進行波長1 72nm的紫外線照射，就可分解大氣中的氧 而生成活性氧，使得結合被切斷的有機化合物與活性氣反 應，而生成二氧化碳（C〇2 )或水（fj2〇 )等之故，因而 除去有機化合物成爲容易。因此介電質障壁放電燈，是作 . 爲紫外線光源極有效。 -5- •1290332 ^ (2) 作爲介電質障壁放電燈，眾知使用細長管狀的氣密容 器進行介電質障壁放電燈的介電質障壁放電燈（參照專利 文獻1)。記載於專利文獻1的介電質障壁放電燈是構成 - 細長氣密容器，形成朝該氣密容器內的軸方向延伸的內部 . 電極及具備被封入於氣密容器內的激光生成氣體的螢光管 ，將具有冷卻功能而且凹下成嵌合著氣密容器外面的一部 '分的鋁製燈體作爲外部電極而抵接於氣密容器外面，沿著 Φ 氣密容器的管軸方向一樣地產生介電質障壁放電，而且能 快速地散放自發光管所發生的熱以維持在高發光效率。又 ，欲互相地密接外部電極與氣密容器，構成能壓接兩者。 使用上述的習知此種介電質障壁放電燈來進行紫外線 照射時，隨著被照射物的大面積化而開發更長的介電質障 壁放電燈，使其有效長度成爲超過1 m者。使此種長介電 質障壁放電燈時，可成爲如大面積液晶基板的灰化，感光 性樹脂的硬化及殺菌等多種工業上應用。 φ 專利文獻1:日本特開2〇〇3— I97!52號公報 【發明內容】 可是’使用介電質障壁放電燈的燈而於被照射物照射 紫外線，之行進行如乾洗淨之際，則附著於被照射物而藉 由紫外線照射所飛散的雜質或發生在環境中，或浮游於環 境中的雜質會附著於介電質障壁放電燈的表面。結果，有 減低從介電質障壁放電燈被放射至外部的紫外線量，且對 : 著被照射物的紫外線照度有隨著點燈時間的經過會降低的 -6 - 1290332 ' (4) 電燈的紫外線照射裝置。 【實施方式】 ' 以下，參照圖式說明用以實施本發明的形態。 [第1形態] 第1圖至第4圖是表示用以實施於本發明介電質障壁 φ 放電燈的第1形態；第1圖是表示介電質障壁放電燈的局 部斷面前視圖；第2圖是表示發光管的局部切除前視圖； 第3圖是表示發光管的支持部及給電部的局部切除斷面前 視圖；第4圖是表示側面斷面圖。在本形態中，介電質障 壁放電燈EXL是具備：氣密容器1，激光形成氣體，內部 電極2，外部電極OE及氣流形成手段AB ;利用高頻點燈 電路HFI被彈推進行點燈。又，氣密容器1，激光形成氣 體及內部電極2是構成事先被裝配而被一體化的發光管 • LT。 <有關於發光管LT> 在本形態中，發光管LT是除 了上述構成之外，還於其兩端具有一對給電部3A、3B及 一對支持部5，5。 (有關於氣密容器1) 氣密容器1是由紫外線透射 性的材料所構成，細長放電空間1 a形成於內部。又，如 下述的第2形態，也可作成藉由封閉雙重細長管的兩端而 於內部形成著圓筒狀細長放電空間1 a’的構造。作爲紫外 :線透射性的材料，一般使用合成石英玻璃所製作。但是在 -8 - (5) 1290332 本發明，對於欲利用的波長的紫外線具有透射性，則以任 何材料構成也可以。 又，氣密容器1是爲了容許將須確保所需的紫外線量 的多數介電質障壁放電燈EXL以較窄小間隔並列配置加 以使用，而爲直線性上優異的直管較理想，惟稍彎曲也無 所謂。實際上，在形成組長管之際會產生稍彎曲，例如對 於全長約1 200mm可形成著最大1 mm程度以下的彎曲。但 是，該程度的彎曲是被容許作爲略直管。 (有關於激光生成氣體） 作爲激光生成氣體，可 使用氙（Xe )、氪（Kr )、氬（A〇或氮（He )等的稀 有氣體的一種或複數種的混合或是稀有氣體鹵化物，例如 XeCl、KrCl等。又，封入稀有氣體鹵化物的場合，則封 入稀有氣體與氟（F)、氯（C1)、溴（Br)或碘（I)等 的鹵素，而在氣密容器1的內部作成生成鹵化物也可以。 又，除了激光生成氣體之外，還混合著未生成激光的氣體 ，如氖（Ne)等，視場合也容許。 (有關於內部電極2) 內部電極2是隔著氣密容器 1的壁面配設成與外部電極OE面對面著。但是，內部電 極2是封入成露出於氣密容器1的放電空間1 a內的態樣 及例如在氣密容器1的內側配設於放電空間1 a的外部的 態樣的任一都可以。後者態樣的場合，例如氣密容器1爲 雙重管構造，內部電極2是沿著被形成於氣密容器1的中 心軸側的筒狀壁面所配設。因此，在本發明，所謂內部電 極2是可瞭解爲從外部觀看氣密容器1時相對地配設在氣 -9 " (6) J290332 密容器1內側的電極。 由以上說明可瞭解，在本發明中，內部電極2是在氣 密容器1內部，配設成其管軸方向大約全長亦即燈的有效 長度整體上生成介電質障壁放電燈的電極，較理想是管軸 方向較長的電極，而其他部分是成爲任何構成也可以。又 ，在第1圖，第3圖及第4圖中，內部電極2是省略圖示 〇 針對於表示於第2圖的內部電極2的適用構成例如以 說明。該內部電極2是多數獨立的網目狀部分2b被分散 配置於氣密容器1的軸方向，且於周圍形成分別經由空隙 所配設的構成的網目狀，而且經由連結部分2a成爲被一 體化的構造，具備被插入於氣密容器1內部的狀態所配設 的構成。藉由使用此種內部電極2，可相對地增多紫外線 發生量。又，網目狀部分2b是對於周方向連續也可以， 或是加以分斷也可以。 因此，在本發明中，內部電極2形成網目狀時，其網 目狀部分2b是具備而言例如容許形成如環狀、螺旋狀或 線圏狀或是網目狀等。 以下，針對於內部電極2配設於石英玻璃所構成的氣 密容器1內部時的支持構造及給電構造加以說明。如第2 圖所示地，欲將內部電極2封閉於氣密容器1內，可採用 使用封閉金屬箔1 b 1的封閉構造。亦即，將延伸內部電極 2的連結部分2a的雨部延伸所形成的直線狀端部2c藉由 焊接等連接封閉金屬箔1 b 1進行連接，並將內部電極2插 -10- (7) (7)M290332 入在氣密容器1內之後，加熱端部的石英玻璃作成軟化狀 態而從封閉金屬箔1 b 1上進行夾緊封閉。如此，於氣密容 器1的端部形成有封閉部lb而使內部電極2被支持於所 定位置。 (給電部3A，3B ) 給電部3A，3B是構成對於內 部電極2用以供給介電質障壁放電所需要電流的給電端者 。如此，給電部3 A，3B是分別形成棒狀，內端被熔接於 形成於氣密容器1兩端的封閉部1 b所埋設的鉬箔1 b 1，而 基端從形成於氣密容器1兩端的封閉部1 b朝管軸方向突 出。又，給電部3A，3B是在下述的支持部5的內部，分 別歛縫連接於給電部4。又，給電線4是從下述的高頻點 燈電路HF1的輸出端延伸。 (支持部5 ) 如第3圖所示地，支持部5是具備： 有底圓筒狀蓋體5a，鎖緊環5b及安裝臂5c。蓋體5a是 圍住發光管LT的端部。又，於底部具有給電線4的插通 孔5al。鎖緊環5b是配設於蓋體5a的開口端，被固定於 氣密容器1的端部。又，蓋體5a是金屬及絕緣體的任一 種所形成也可以，又，依所期望地以絕緣體加襯內面的金 屬製也可以。安裝臂5c是從蓋體5a側面在圖中朝上方突 出，將發光管LT在以蓋體5a的上面抵接於表示於第1圖 的定位臂8的狀態下使用安裝臂5c被安裝於未圖示的固 定部分。又，定位臂8是從外部電極OE的管軸方向兩端 朝氣密容器1的端部方向延伸而規定發光管LT，因此規 定氣密容器1的安裝位置。又，安裝臂5c是金屬及絕緣 -11 - (8) (8),1290332 體的任一種所形成也可以，又，依所期望地，於中間作爲 介由絕緣物的構造而也可將與安裝位置之間作成絕緣的構 造。如此，蓋體5 a以絕緣體製成以絕緣體加襯的金屬製 ，或是將安裝臂5c與安裝位置之間作成絕緣的構造，或 是藉由絕緣定位臂8本體或是絕緣該臂8與支持部5之間 ，爲了於給電部3A，3B之間發生電暈放電，可抑制減低 來自介電質障壁放電燈的紫外線放射。 <有關於外部電極〇E> 外部電極OE是在至少燈的 有效長度的部分，配設成於氣密容器1的外面沿著其管軸 方向密接，或是保持適當間隙而延伸，而且面對面於內部 電極2，藉由外部電極OE及內部電極2的協動，將氣密 容器1的至少一壁面作爲介電質的介電質障壁放電燈作用 成產生於氣密容器1的放電空間1 a內。 又，外部電極OE是具備剛性的構成及具備可撓性的 構成的任一也可以。剛性的情形，成爲作成導電性金屬所 構成的熱容量較大的塊狀的如圖示的外部電極OE。因此 ，習知，將稱爲燈體的構件，依所期望可直接使用作爲外 部電極。這時候，成爲不必採用如將習知所使用的鋁製薄 板所構成的外部電極OE夾持於燈體與氣密容器1之間的 構造。又，爲了冷卻介電質障壁放電所產生的領域的氣密 容器1部分，而於外部電極OE可配設冷卻手段9。這時 候，冷卻手段9是任何構成也可以，惟將冷媒流通於內部 的冷卻水路外設於外部電極OE，或是一體地形成於內部 加以附設較理想。又，外部電極OE是形成連續的面狀或 -12- • 1290332 ' ⑼ 網目狀的任何狀態也可以。又，網目狀是指形成網目狀， 沖孔狀，格子狀等。 <氣流發生手段AB> 氣流發生手段AB是橫跨沿著 ° 氣密容器1的管軸方向的前面部而形成氣流的手段。所形 • 成的氣流是使用例如大氣環境的氣流及不管環境如何而使 用惰性氣體的氣流等的清淨氣體，則任何氣流也可以。但 是，所形成的氣流是必須爲能阻止雜質附著於氣密容器1 φ 的尤其是相對於被照射物的部位表面的程度的速度及流量 〇 又，氣流發生手段ΑΒ是對著單一發光管LT以1對1 的關係可加以配置。但是，依所期望地，也容許對著鄰接 而並聯配置的複數的發光管LT將單一氣流發生手段ΑΒ 配設作爲附著介電質障壁放電燈共通的手段。 又，氣流發生手段 ΑΒ是結合於介電質障壁放電燈 EXL的發光管LT或外部電極ΟΕ的構成也可以，或分離 φ 的構成也可以。後者是對著上述的複數發光管LT配設單 一氣流發生手段ΑΒ的構成情形爲佳。 還有，氣流形成手段ΑΒ是具備：氣體吹出構造，氣 體吸入構造或是氣體吹出及氣體吹入構造的任一構成也可 以。又，容許配設沿著氣密容器1的管軸的較長單一氣體 吹出或氣體吸入構造體的構造，或是將氣體吹出或氣體吸 入構造體複數沿著氣密容器1的管軸所配設的構造等。 圖示的氣流形成手段ΑΒ是於氣密容器1的長度方向 •.延伸氣體吹出管1 〇，而且如第4圖所示地，於面對面於氣 •13- .1290332 - (10) 體吹出管1 0的氣密容器1側面以適當間隔形成多數氣體 吹出孔11。又，將氣體吹出管與外部電極0Ε —體地形成 也可以。又，代替氣體吹出孔而形成細長氣體吹出開縫也 可以。又，代替朝氣密容器1的長度方向延伸氣體吹出管 • ，將多數氣體吹出管配列成沿著氣密容器1的管軸方向也 可以。這時候，多數氣體吹出管是對著氣密容器1的管軸 配置成大約正交。 • <高頻點燈電路HFI> 高頻點燈電路HFI最於介電 質障壁放電燈EXL的內部電極2與外部電極〇E之間施加 高頻電壓，俾彈推介電質障壁放電燈EXL進行點燈。又 ，高頻點燈電路HFI是以並聯反相器作爲主體所構成，其 高頻輸出是經由其高電位側經由給電線4，4施加於介電 質障壁放電燈EXL的發光管LT的一對給電部3A，3B， 又低電位側施加於外部電極0E。 <介電質障壁放電燈EXL的動作 > 介電質障壁放電 • 燈EXL是高頻點燈電路HFI的高頻輸出端的一方，例如 高壓側輸出端經由給電線4，4被連接於內部電極2朝外 部所導出的一對給電部3A，3B，另一方，例如低壓（接 地）側輸出端被連接於外部電極OE的一端之故，因而當 投入高頻點燈電路HFI的未圖示的輸入電源，則發生高頻 ，該高頻輸出被施加於內部電極2，及與此經由氣密容器 1的壁面面對面的外部電極OE之間，結果，介電質障壁 放電燈產生氣密容器1的內部。藉由該介電質障壁放電燈 放射利用氙的激光作成以172nm爲中心波長的真空紫外光 -14- '1290332 ' (11) 。真空紫外光是透射氣密容器1的壁面而被導出至外部之 故，因而可將此因應於各該目的加以使用。 又，當點亮介電質障壁放電燈燈EXL，則氣流形成手 * 段AB進行動作，通過氣密容器1的在圖中位於下面近旁 . 位置般地，使得橫跨氣密容器1的氣流發生在介電質障壁 放電燈EXL的至少有效長度整體而形成氣簾。結果，因 氣密容器1表面藉由氣簾被保護，因此抑制對著氣密容器 φ 1表面的雜質附著。 第5圖是表示將本發明的第1形態的對著介電質障壁 放電燈的點燈時間的紫外線照度的變化與比較例的比較一 .起的圖表。在圖中，橫軸是表示點燈，縱軸是表示紫外線 照度。圖中，曲線A是本發明，曲線B是比較例，任一曲 線也依據點燈至大約3 500小時的取得資料所作成。又， 比較例是未具備氣流形成手段之外是與本發明相同規格的 習知技術。該圖是依據將本發明及比較例以同一條件使用 # 於乾洗淨處理的情形的資料所製作者。測定條件是從介電 質障壁放電燈EXL的側面方向距300mm的位置吹附風速 3m、〇.23m3/秒風量的空氣，來測定的紫外線照射距離 3mm的紫外線照度者。又，介電質障壁放電燈Exl的表 面’由圖可理解地，依照本發明，防止附著雜質之故，因 而即使介電質障壁放電燈的長時間內點燈，也很少降低紫 外線照度。對此，比較例是附著雜質之故，因而顯著降低 紫外線照度。 •15- (12) (12)1290332 [第2形態] 第6圖是表示實施本發明的介電質障壁放電燈所用的 第2形態的側面斷面圖。本形態是介電質障壁放電燈EXL 的發光管LT。 亦即，發光管LT是氣密容器1形成雙重管構造，形 成於內部的放電空間1 a形成圓筒狀，而且內部電極2在 氣密容器1’內方而配置於氣密容器1’外面。 內部電極2’是爲了配設於形成氣密容器1’的圓筒狀的 內側外面而作成圓筒狀。又，使用導電性材料所構成的板 材或網目材料。還有，於形成氣密容器1’內側的圓筒狀外 面大約密接地配設。外部電極OE是成爲與第1形態同樣 的構成及對著氣密容器1的配置。 第7圖至第1〇圖是表示作爲實施本發明的紫外線照 射裝置所用的一形態的紫外線洗淨裝置；第7圖是前視斷 面圖；第8圖是仰視圖；第9圖是沿著第8圖的lx — IX， 線的斷面圖。在各圖中，針對於與第1圖至第4圖同一部 分給予同一符號而省略說明。紫外線照射裝置UVW是具 備紫外線照射裝置本體2 1，高頻點燈電路2 2及複數介電 質障壁放電燈EXL。 在本發明中’紫外線照射裝置UVW是指利用從介電 質障壁放電燈EXL所發生的紫外線的所有裝置。例如爲 半導體步進對準機，光洗淨裝置，光硬化裝置及光乾燥裝 置等。又’紫外線照射裝置本體21是從紫外線照射裝置 UVW除掉介電質障壁放電燈燈exl及高頻點燈電路22的 -16- 1290332 (13) 殘留部分所構成。 介電質障壁放電燈EXL是視需要如各圖所示地可使 用複數支。氣流形成手段AB是對著複數支介電質障壁放 電燈EXL單一構成者配設於紫外線照射裝置本體2 1下面 ·· 。除了氣流形成手段AB具有與表示於第1圖至第4圖的 ， 第1形態相同的構造。 氣流形成手段AB是配設於紫外線照射裝置本體2 1的 % 下面。 高頻點燈電路2 2是點亮介電質障壁放電燈E X l。高 頻點燈電路22是包含高頻發生手段，而發生高頻電壓而 • 於介電質障壁放電燈，供給其點燈所必需的高頻電力。又 . ，高頻是發生l〇kHz以上適當爲1〇〇]^仏〜2]^1^的重複頻 率的脈衝電壓。 高頻點燈電路2 2是輸出脈衝電壓，則不管其他構成 ’例如使用矩形波輸出的反相器，可得到矩形波脈衝。 ® 如此，在本發明中，介電質障壁放電燈EXL具備氣 流形成手段AB之故，因而防止對著氣密容器表面的雜質 附著，而可實現減低紫外線照度降低的紫外線照射裝置 UVW。 可是’紫外線照射裝置本體21是整體上作成箱狀， 內部於上下被區分成紫外線照射室21a與電源室21b。紫 外線照射室21a與電源室21b是一端藉由鉸鏈2 lc構成可 開閉之狀態。 二 在紫外線照射室21a，如下述地並聯配置有複數介電 -17- (14) 1290332 質障壁放電燈EXL。複數介電質障壁放電燈]EXL是此些 外部電極形成作爲單一區塊。因此，外部電極OE的凹曲 曲面以鄰接狀態並聯配置複數。又，紫外線照射室2 1 a是 固定地配設在洗淨裝置的被照射物的搬運手段的上部，而 且下面被開放，構成將真空紫外光以極近位置照射在通過 下面正下方的被照射物（未圖示）。 電源室2 1 b是於其內部收納高頻點燈電路2 2及省略 圖示的控制電路，成爲以鉸鏈2 1 c作爲轉動中心而在第8 圖中朝上方轉動的狀態。又，21bl是在電源室21b轉動時 用以握持的柄；21b2是運搬紫外線照射裝置本體21或電 源室2 1 b之際的柄；2 1 b 3是電源配線的保護器。 高頻點燈電路2 2是收納於電源室2丨b內，變換經由 電源配線的保護器21b3而被導入於電源室21b內的電源 而發生局頻電壓，分別給電於複數介電質障壁放電燈EXL 【圖式簡單說明】 第1圖是表示用以實施本發明的介電質障壁放電燈的 第1形態的局部斷面前視圖。 第2圖是表示同一發光管的局部切除前視圖。 第3圖是表示同一發光管的支持部及給電部的局部切 除斷面前視圖。 第4圖是表示同一側面斷面圖。 第5圖是表示將對著本發明的第1形態的介電質障壁 -18- (15) 1290332 放電燈的點燈時間的紫外線照度的變化與比較例的變化者 一起的圖表。 第6圖是表示用以實施本發明的介電質障壁放電燈的 第2形態的側面斷面圖。 第7圖是表示作爲用以實施本發明的紫外^照w _胃 的一形態的紫外線洗淨裝置的前視斷面圖。 第8圖是表示同一仰視圖。 • 第9圖是表示沿著同一第8圖的IX—1玉，線的斷面圖 【主要元件之符號說明】 1 :氣密容器 2 :內部電極 4 :給電線 5 :保持部 8 =定位臂 AB :氣流形成手段 EXL :介電質障壁放電燈 MFI :高頻點燈電路 LT :發光管 OE :外部電極 -19-</ RTI> </ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; [Prior Art] A rare earth gas such as a rare gas or a halide of a rare gas is subjected to a silent discharge Φ, that is, a dielectric barrier discharge is performed, and a laser discharge lamp which is close to an inherently monochromatic radiation, that is, a dielectric barrier discharge is generated. Lights, which are well known, are documented in many documents. In a dielectric barrier discharge lamp, a pulsed current flows. Since the pulsed current has a high-speed electron current and has a large number of rest periods, the material that emits ultraviolet rays such as helium is temporarily combined with the component state (laser state), and is efficiently released when the state is restored to the base state. Re-absorbs less short-wavelength UV rays. Further, in the case of ruthenium, molecular luminescence of a half-width of a layer having a center wavelength of 172 nm was performed. The ultraviolet ray having a wavelength of 172 nm is "the ultraviolet ray is larger than the wavelength of 185 nm or 254 nm obtained by the low pressure mercury lamp, and is larger than the binding energy of the organic compound to be decomposed - by this Ultraviolet rays having a wavelength of 172 nm are irradiated to cut off the combination of the above organic compounds, and can be decomposed and removed. Further, by irradiating ultraviolet rays having a wavelength of 1 72 nm in an atmospheric environment, oxygen in the atmosphere can be decomposed to generate The active oxygen causes the organic compound to be cleaved to react with the active gas to form carbon dioxide (C〇2) or water (fj2〇), so that it is easy to remove the organic compound. Therefore, the dielectric barrier discharge lamp is It is extremely effective for ultraviolet light sources. -5- • 1290332 ^ (2) As dielectric barrier discharge lamps, dielectric barrier discharge lamps for dielectric barrier discharge lamps using a slender tubular airtight container are known (refer to Patent Document 1) The dielectric barrier discharge lamp described in Patent Document 1 is an elongated airtight container that is formed to extend in the axial direction of the hermetic container. a fluorescent tube for generating a gas into a gas-tight container, and a part of the aluminum lamp body having a cooling function and recessed to fit outside the airtight container as an external electrode to abut the airtight container On the outside, a dielectric barrier discharge is generated in the same direction along the tube axis of the Φ airtight container, and the heat generated by the self-luminous tube can be quickly dissipated to maintain high luminous efficiency. Further, the external electrodes are to be closely connected to each other. The hermetic container is configured to be capable of crimping both of them. When the above-mentioned conventional dielectric barrier discharge lamp is used for ultraviolet irradiation, a longer dielectric barrier discharge lamp is developed with a large area of the object to be irradiated. When such a long dielectric barrier discharge lamp is used, it can be used in various industrial applications such as ashing of a large-area liquid crystal substrate, curing and sterilization of a photosensitive resin, etc. φ Patent Literature [J] Japanese Patent Application Laid-Open No. 2-3-I97! [Invention] [Brief of the invention] When the ultraviolet light is irradiated to the object to be irradiated by the lamp of the dielectric barrier discharge lamp, the adhesion is performed as in the case of dry cleaning. Being photographed The impurities scattered by the ultraviolet irradiation or the impurities occurring in the environment or floating in the environment adhere to the surface of the dielectric barrier discharge lamp. As a result, the discharge from the dielectric barrier discharge lamp is reduced to the outside. The amount of ultraviolet rays is equal to: The ultraviolet illuminance of the object to be irradiated is lowered by the lighting time -6 - 1290332 ' (4) The ultraviolet ray irradiation device of the electric lamp. [Embodiment] 'The following is a description with reference to the drawings. The first embodiment is shown in Fig. 1 to Fig. 4 showing a first embodiment of the dielectric barrier φ discharge lamp of the present invention, and Fig. 1 is a view showing a dielectric barrier discharge. Fig. 2 is a partially cutaway front view showing the arc tube; Fig. 3 is a front cross-sectional view showing the support portion and the power supply portion of the arc tube; and Fig. 4 is a side cross-sectional view showing the same. In the present embodiment, the dielectric barrier discharge lamp EXL includes an airtight container 1, a laser forming gas, an internal electrode 2, an external electrode OE, and an air flow forming means AB; and is lit by the high frequency lighting circuit HFI. . Further, the airtight container 1, the laser forming gas and the internal electrode 2 constitute an arc tube LT which is assembled in advance and integrated. <Light-emitting tube LT> In the present embodiment, the light-emitting tube LT has a pair of power supply portions 3A and 3B and a pair of support portions 5 and 5 at both ends thereof in addition to the above configuration. (There is an airtight container 1) The airtight container 1 is made of a material that is transparent to ultraviolet rays, and an elongated discharge space 1a is formed inside. Further, in the second aspect described below, a structure in which a cylindrical elongated discharge space 1 a' is formed inside by closing both ends of the double elongated tube can be employed. As a material for ultraviolet light transmission, it is generally made of synthetic quartz glass. However, in the present invention, the present invention may be made of any material, and it is transmissive to ultraviolet rays of a wavelength to be used. Further, the hermetic container 1 is preferably used in order to allow a plurality of dielectric barrier discharge lamps EXL to ensure a required amount of ultraviolet rays to be arranged in parallel at a narrow interval, and is preferably a straight tube excellent in linearity. It doesn't matter if you bend. In fact, slight bending occurs when the long tube is formed, for example, a bending of up to about 1 mm can be formed for a total length of about 1 200 mm. However, this degree of bending is allowed as a straight pipe. (The laser-generating gas is used.) As the laser-generating gas, one or a mixture of rare gases such as xenon (Xe), krypton (Kr), or argon (A or nitrogen (He)) or a rare gas halide may be used. For example, XeCl, KrCl, etc. Further, when a rare gas halide is enclosed, a rare gas is enclosed with a halogen such as fluorine (F), chlorine (C1), bromine (Br) or iodine (I), and in an airtight container. In addition to the laser generated gas, a gas in which no laser light is generated, such as neon (Ne), may be mixed, and may be allowed depending on the case. (About internal electrode 2) Internal electrode 2 The wall surface of the airtight container 1 is disposed to face the external electrode OE. However, the internal electrode 2 is sealed to be exposed in the discharge space 1 a of the airtight container 1 and, for example, in the airtight container 1 The inner side may be disposed outside the discharge space 1 a. In the latter case, for example, the airtight container 1 has a double tube structure, and the inner electrode 2 is formed along the center of the airtight container 1 The cylindrical wall surface on the shaft side is provided. Therefore, in this It is to be understood that the internal electrode 2 is an electrode which is relatively disposed on the inside of the gas -9 " (6) J290332 dense container 1 when the airtight container 1 is viewed from the outside. As apparent from the above description, in the present invention, The internal electrode 2 is disposed inside the hermetic container 1, and is disposed such that an electrode having a dielectric barrier discharge lamp is formed on the entire length of the tube axis, that is, an effective length of the lamp, and is preferably an electrode having a longer tube axis direction. The other part may be any configuration. In addition, in FIG. 1, FIG. 3, and FIG. 4, the internal electrode 2 is omitted, and the applicable configuration of the internal electrode 2 shown in FIG. 2 is explained, for example. In the internal electrode 2, a plurality of independent mesh-like portions 2b are dispersed and arranged in the axial direction of the airtight container 1, and a mesh shape having a configuration in which the gaps are formed is formed in the periphery, and is integrated via the connecting portion 2a. The structure is provided in a state of being inserted into the inside of the airtight container 1. By using such an internal electrode 2, the amount of ultraviolet rays can be relatively increased. Further, the mesh portion 2b is connected to the circumferential direction. Therefore, in the present invention, when the internal electrode 2 is formed in a mesh shape, the mesh portion 2b is provided to allow, for example, formation of a ring shape, a spiral shape, or a wire shape, or In the following, the support structure and the power supply structure when the internal electrode 2 is disposed inside the hermetic container 1 made of quartz glass will be described. As shown in Fig. 2, the internal electrode 2 is to be sealed to the gas. In the closed container 1, a closed structure using the closed metal foil 1 b 1 can be employed. That is, the linear end portion 2c formed by extending the rain portion extending the connecting portion 2a of the internal electrode 2 is connected to the closed metal foil by welding or the like. 1 b 1 is connected, and the internal electrode 2 is inserted into the -10 (7) (7) M290332, and after entering the airtight container 1, the quartz glass at the heating end is softened and is carried out from the closed metal foil 1b1. Clamped closed. Thus, the closing portion 1b is formed at the end of the airtight container 1 so that the internal electrode 2 is supported at a predetermined position. (Power Supply Units 3A, 3B) The power supply units 3A, 3B are power supply terminals constituting the current required for the internal electrode 2 to supply the dielectric barrier discharge. In this manner, the power supply portions 3 A, 3B are respectively formed in a rod shape, and the inner ends are welded to the molybdenum foil 1 b 1 embedded in the closed portion 1 b formed at both ends of the airtight container 1, and the base end is formed in the airtight container 1 The closing portions 1 b at both ends protrude in the tube axis direction. Further, the power supply units 3A and 3B are connected to the power supply unit 4 by caulking inside the support unit 5 to be described later. Further, the electric wire 4 extends from the output end of the high-frequency lighting circuit HF1 to be described later. (Supporting Unit 5) As shown in Fig. 3, the supporting portion 5 is provided with a bottomed cylindrical lid body 5a, a locking ring 5b, and a mounting arm 5c. The cover 5a is an end portion surrounding the arc tube LT. Further, there is an insertion hole 5a1 for the electric wire 4 at the bottom. The lock ring 5b is disposed at the open end of the lid body 5a and is fixed to the end portion of the airtight container 1. Further, the lid body 5a may be formed of any of a metal and an insulator, and may be made of a metal which is desirably lined with an inner surface of the insulator. The mounting arm 5c protrudes upward from the side of the lid body 5a in the drawing, and the arc tube LT is attached to the arm by the mounting arm 5c in a state in which the arc tube LT is in contact with the positioning arm 8 shown in Fig. 1 on the upper surface of the lid body 5a. The fixed part of the illustration. Further, since the positioning arm 8 extends from the both ends in the tube axis direction of the external electrode OE toward the end portion of the airtight container 1 to define the arc tube LT, the mounting position of the airtight container 1 is specified. Further, the mounting arm 5c may be formed of any one of a metal and an insulating -11 - (8) (8) and 1290332. Further, it may be a structure in which an insulator is interposed as desired. An insulating structure is formed between the mounting positions. Thus, the cover 5a is made of an insulator made of metal lining the insulator, or a structure for insulating the mounting arm 5c from the mounting position, or by insulating the body of the positioning arm 8 or insulating the arm 8 Between the support portions 5, in order to cause corona discharge between the power supply portions 3A and 3B, it is possible to suppress the reduction of ultraviolet radiation from the dielectric barrier discharge lamp. <About the external electrode 〇E> The external electrode OE is disposed at least in the effective length of the lamp, and is disposed to be adhered to the outside of the hermetic container 1 in the tube axis direction thereof, or to extend with an appropriate gap, and face to face In the internal electrode 2, at least one wall surface of the hermetic container 1 acts as a dielectric dielectric barrier discharge lamp to form a discharge space 1 generated in the hermetic container 1 by the cooperation of the external electrode OE and the internal electrode 2. Within a. Further, the external electrode OE may have any configuration having rigidity and a configuration having flexibility. In the case of rigidity, the external electrode OE as shown in the figure has a large heat capacity and is formed of a conductive metal. Therefore, it is conventionally known that a member called a lamp body can be directly used as an external electrode as desired. At this time, it is not necessary to employ a structure in which the external electrode OE composed of an aluminum thin plate used in the prior art is sandwiched between the lamp body and the airtight container 1. Further, in order to cool the portion of the hermetic container 1 in the field generated by the dielectric barrier discharge, the cooling means 9 may be disposed on the external electrode OE. In this case, the cooling means 9 may be of any configuration, and it is preferable that the cooling water passage in which the refrigerant flows inside is externally attached to the external electrode OE or integrally formed therein. Further, the external electrode OE may be in any state in which a continuous surface shape or a -12- • 1290332 ' (9) mesh shape is formed. Further, the mesh shape means a mesh shape, a punched shape, a lattice shape, or the like. <Airflow generation means AB> The airflow generation means AB is means for forming an air flow across the front portion of the airtight container 1 in the tube axis direction. The formed gas stream is a clean gas such as a gas stream in an atmospheric environment and a gas stream using an inert gas regardless of the environment, and any gas stream may be used. However, the air flow formed is a speed and a flow rate which must prevent the adhesion of impurities to the airtight container 1 φ, especially with respect to the surface of the portion of the object to be irradiated, and the air flow generating means 对 is directed to the single luminous tube LT. A one-to-one relationship can be configured. However, as desired, a plurality of light-emitting tubes LT arranged in parallel adjacent to each other are allowed to be disposed as a means for attaching a dielectric barrier discharge lamp in common. Further, the airflow generating means ΑΒ may be configured to be coupled to the arc tube LT or the external electrode 介 of the dielectric barrier discharge lamp EXL, or may be configured to separate φ. The latter is preferably a configuration in which a single airflow generating means 配 is provided for the above-mentioned plurality of light-emitting tubes LT. Further, the air flow forming means 具备 may include any one of a gas blowing structure, a gas suction structure, or a gas blowing and gas blowing structure. Further, the structure of the long single gas blowing or gas suction structure along the tube axis of the airtight container 1 is allowed to be disposed, or the gas blowing or gas suction structure is plurally arranged along the tube axis of the airtight container 1. The structure and so on. The illustrated airflow forming means 延伸 extends the gas blowing pipe 1 于 in the longitudinal direction of the airtight container 1 and, as shown in Fig. 4, faces the gas in the face of the gas 13-.1290332 - (10) body blowing pipe A plurality of gas blowing holes 11 are formed at appropriate intervals on the side surface of the airtight container 1 of 10. Further, the gas blowing pipe may be formed integrally with the external electrode. Further, instead of the gas blowing hole, an elongated gas blowing slit may be formed. Further, instead of extending the gas blowing pipe in the longitudinal direction of the airtight container 1, a plurality of gas blowing pipes may be arranged along the tube axis direction of the airtight container 1. At this time, most of the gas blowing pipes are arranged to be approximately orthogonal to the tube axis of the airtight container 1. • <High-frequency lighting circuit HFI> The high-frequency lighting circuit HFI applies the high-frequency voltage between the internal electrode 2 and the external electrode 〇E of the dielectric barrier discharge lamp EXL, and the electric discharge barrier discharge lamp EXL Light up. Further, the high-frequency lighting circuit HFI is mainly composed of a parallel inverter, and the high-frequency output thereof is applied to the light-emitting tube LT of the dielectric barrier discharge lamp EXL via the high-potential side via the power supply wires 4, 4. The power supply units 3A and 3B are applied to the external electrode OE on the low potential side. <Operation of Dielectric Barrier Discharge Lamp EXL> Dielectric Barrier Discharge/Light EXL is one of the high-frequency output ends of the high-frequency lighting circuit HFI, and for example, the high-voltage side output terminal is connected to the inside via the power supply wires 4, 4 The pair of power supply units 3A, 3B led out to the outside of the electrode 2, and the other, for example, the low-voltage (ground) side output end are connected to one end of the external electrode OE, so that the high-frequency lighting circuit HFI is not shown. The input power source generates a high frequency, and the high frequency output is applied between the internal electrode 2 and the external electrode OE that faces the wall surface of the hermetic container 1, and as a result, the dielectric barrier discharge lamp produces an airtight container. The interior of 1. A vacuum ultraviolet light of -14-'1290332' (11) with a wavelength of 172 nm was formed by the dielectric barrier discharge lamp using a laser beam of 氙. The vacuum ultraviolet light is transmitted to the outside by the wall surface of the hermetic container 1, and thus it can be used for each of the purposes. Further, when the dielectric barrier discharge lamp EXL is lit, the airflow forms a hand segment AB to operate, passing through the airtight container 1 in the vicinity of the figure. Positionally, the airflow across the airtight container 1 is made. The air curtain is formed by generating at least the effective length of the dielectric barrier discharge lamp EXL. As a result, since the surface of the airtight container 1 is protected by the air curtain, the adhesion of impurities against the surface of the airtight container φ 1 is suppressed. Fig. 5 is a graph showing a comparison between the change in the ultraviolet illuminance of the first embodiment of the present invention against the lighting time of the dielectric barrier discharge lamp and the comparative example. In the figure, the horizontal axis indicates lighting, and the vertical axis indicates ultraviolet illuminance. In the figure, curve A is the present invention, curve B is a comparative example, and any curve is also made based on the data obtained by lighting up to about 3,500 hours. Further, the comparative example is a conventional technique which is the same as the specification of the present invention except that the air flow forming means is not provided. The figure is based on the data of the case where the present invention and the comparative example are used in the same condition as in the case of dry cleaning. The measurement conditions were obtained by blowing air having a wind speed of 3 m and a volume of 〇23 m3/sec from a position of 300 mm from the side direction of the dielectric barrier discharge lamp EXL, and measuring the ultraviolet ray having a distance of 3 mm. Further, the surface of the dielectric barrier discharge lamp Ex1 is understood from the drawings. According to the present invention, adhesion of impurities is prevented, and therefore, even if the dielectric barrier discharge lamp is lit for a long period of time, the ultraviolet illuminance is rarely lowered. In this regard, the comparative example was attached to impurities, thereby significantly reducing the ultraviolet illuminance. [15] (12) (12) 1290332 [Second aspect] Fig. 6 is a side cross-sectional view showing a second embodiment of the dielectric barrier discharge lamp of the present invention. This embodiment is an arc tube LT of a dielectric barrier discharge lamp EXL. In other words, the arc tube LT has a double tube structure in which the airtight container 1 is formed, and the discharge space 1 a formed inside is formed in a cylindrical shape, and the internal electrode 2 is disposed inside the airtight container 1 ′ outside the airtight container 1 ′. . The internal electrode 2' is formed in a cylindrical shape so as to be disposed on the outer side of the inner side of the cylindrical shape forming the airtight container 1'. Further, a plate material or a mesh material composed of a conductive material is used. Further, the cylindrical outer surface forming the inner side of the airtight container 1' is disposed approximately in close contact with each other. The external electrode OE has the same configuration as that of the first embodiment and the arrangement facing the airtight container 1. Fig. 7 to Fig. 1 are views showing an ultraviolet cleaning apparatus as an embodiment for carrying out the ultraviolet irradiation apparatus of the present invention; Fig. 7 is a front sectional view; Fig. 8 is a bottom view; Figure l1 - IX, a cross-sectional view of the line. In the respective drawings, the same portions as those in the first to fourth embodiments are denoted by the same reference numerals, and their description will be omitted. The ultraviolet irradiation device UVW is provided with an ultraviolet irradiation device main body 2, a high-frequency lighting circuit 2 2, and a plurality of dielectric barrier discharge lamps EXL. In the present invention, the ultraviolet irradiation device UVW refers to all devices that utilize ultraviolet rays generated from the dielectric barrier discharge lamp EXL. For example, it is a semiconductor stepper, a light cleaning device, a light curing device, and a light drying device. Further, the ultraviolet irradiation apparatus main body 21 is composed of a residual portion of the dielectric barrier discharge lamp ex1 and the high-frequency lighting circuit 22 from the ultraviolet irradiation device UVW to remove the residual portion of -16-1290332 (13). The dielectric barrier discharge lamp EXL is a plurality of branches as needed as shown in the respective drawings. The airflow forming means AB is disposed below the ultraviolet irradiation device body 2 1 against a single component of the plurality of dielectric barrier discharge lamps EXL. The airflow forming means AB has the same structure as the first embodiment shown in Figs. 1 to 4 . The air flow forming means AB is disposed below the % of the ultraviolet irradiation device main body 2 1 . The high frequency lighting circuit 22 is a light-emitting dielectric barrier discharge lamp E X l. The high-frequency lighting circuit 22 is a high-frequency generating device that includes a high-frequency generating means to generate a high-frequency voltage and supplies it to a dielectric barrier discharge lamp to supply high-frequency power necessary for lighting. Moreover, the high frequency is a pulse voltage of a repetition frequency of 1 〇〇]^仏~2]^1^ which is more than 10 kHz. When the high-frequency lighting circuit 22 is an output pulse voltage, a rectangular wave pulse can be obtained regardless of other configurations, for example, an inverter using a rectangular wave output. In the present invention, the dielectric barrier discharge lamp EXL is provided with the air flow forming means AB, thereby preventing the adhesion of impurities against the surface of the airtight container, and the ultraviolet irradiation device UVW which reduces the ultraviolet ray illuminance can be realized. However, the ultraviolet irradiation apparatus main body 21 is formed in a box shape as a whole, and is internally divided into an ultraviolet irradiation chamber 21a and a power supply chamber 21b. The ultraviolet irradiation chamber 21a and the power supply chamber 21b are open and closed by one end of the power supply chamber 21b. In the ultraviolet irradiation chamber 21a, a plurality of dielectric -17-(14) 1290332 barrier discharge lamps EXL are arranged in parallel as follows. A plurality of dielectric barrier discharge lamps] EXL is such that the external electrodes are formed as a single block. Therefore, the concave curved surfaces of the external electrodes OE are arranged in parallel in a contiguous state. Further, the ultraviolet irradiation chamber 21a is an upper portion of the conveyance means that is fixedly disposed on the object to be irradiated of the cleaning device, and the lower surface is opened, and the vacuum ultraviolet light is irradiated at a very close position to be irradiated directly below the lower surface. (not shown). The power supply unit 2 1 b accommodates a high-frequency lighting circuit 2 2 and a control circuit (not shown) therein, and is rotated upward in the eighth drawing with the hinge 2 1 c as a center of rotation. Further, 21b1 is a handle for gripping when the power supply chamber 21b is rotated; 21b2 is a handle for transporting the ultraviolet irradiation apparatus main body 21 or the power supply chamber 2 1b; 2 1 b 3 is a protector for the power supply wiring. The high-frequency lighting circuit 22 is housed in the power supply chamber 2b, converts the power source introduced into the power supply chamber 21b via the protector 21b3 of the power supply wiring, generates a local frequency voltage, and supplies power to the plurality of dielectric barrier discharges. Light EXL [Brief Description of the Drawings] Fig. 1 is a partial cross-sectional front view showing a first embodiment of a dielectric barrier discharge lamp for carrying out the present invention. Fig. 2 is a partially cutaway front elevational view showing the same arc tube. Fig. 3 is a front elevational view, partly in section, of the support portion and the power supply portion of the same arc tube. Figure 4 is a cross-sectional view showing the same side. Fig. 5 is a graph showing changes in the ultraviolet illuminance of the dielectric barrier -18-(15) 1290332 discharge lamp of the first embodiment of the present invention together with the change of the comparative example. Figure 6 is a side cross-sectional view showing a second embodiment of a dielectric barrier discharge lamp for carrying out the present invention. Figure 7 is a front cross-sectional view showing an ultraviolet cleaning device as an embodiment of the ultraviolet light irradiation method of the present invention. Figure 8 is a view showing the same bottom view. • Fig. 9 is a cross-sectional view showing the IX-1 jade along the same figure in Fig. 8 [Description of the main components] 1 : Hermetic container 2: Internal electrode 4: Feeding wire 5: Holding portion 8 = Positioning Arm AB: Airflow forming means EXL: Dielectric barrier discharge lamp MFI: High-frequency lighting circuit LT: Illuminating tube OE: External electrode-19-