KR100840798B1 - Short arc type discharge lamp operating apparatus, ultraviolet irradiation apparatus and method of ultraviolet irradiating - Google Patents

Abstract

Provided are a short arc mercury lamp lighting device that suppresses decay of ultraviolet illuminance with the progress of the life of a short arc mercury lamp, an ultraviolet irradiation device using the same, and an ultraviolet irradiation method.

The short arc mercury lamp lighting device includes a first period T1 for supplying relatively large power H and a second period T2 for supplying relatively small power L under the control of the short arc mercury lamp SHL and constant current. The lighting circuit OC which turns on the short arc mercury lamp SHL while repeating alternately is provided.

Description

SHORT ARC TYPE DISCHARGE LAMP OPERATING APPARATUS, ULTRAVIOLET IRRADIATION APPARATUS AND METHOD OF ULTRAVIOLET IRRADIATING}

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a circuit block diagram showing a first embodiment for implementing a short arc discharge lamp lighting device of the present invention.

Fig. 2 is a front view of the ultrahigh pressure mercury lamp as a short arc discharge lamp in the same manner.

3 is a waveform diagram of lamp power input to a short arc discharge lamp in a similar manner.

Fig. 4 is a first embodiment for implementing the short arc type discharge lamp lighting device of the present invention.

5 is a graph showing a change in lamp power and ultraviolet illuminance with respect to the lighting time of a short arc discharge lamp in a comparative example;

Fig. 6 is a circuit block diagram showing a second embodiment for implementing the short arc type discharge lamp lighting device of the present invention.

Fig. 7 is a front view showing the entirety of the third embodiment for implementing the short arc type discharge lamp lighting device of the present invention.

8 is a front view and a side view likewise showing an enlarged cathode;

9 is a front view and a side view likewise showing an enlarged anode;

10 is a waveform diagram of lamp power similarly illustrating flash-up lighting.

11 is a front sectional view showing one embodiment for implementing the ultraviolet irradiation device of the present invention.

Figure 12 is also a left side cross-sectional view

<Explanation of symbols for the main parts of the drawings>

AC: AC power supply CC: Control means

CCR: Constant Current Control Circuit RC: Rectifier Circuit

SHL: Short Arc Discharge Lamp

The present invention relates to a short arc type discharge lamp lighting device, an ultraviolet irradiation device and an ultraviolet irradiation method using the same.

UV irradiation apparatuses are used for various applications such as semiconductor exposure and curing of ultraviolet curable resins. In such an ultraviolet irradiation device, a discharge lamp (hereinafter referred to as a short arc discharge lamp) such as a short arc ultrahigh pressure mercury lamp has been conventionally used as an ultraviolet light source. And a short arc type discharge lamp comprising: an ultraviolet-transparent airtight container having an enclosure surrounding a discharge space and a pair of seals connected from both ends of the enclosure, and sealed in the airtight container along the tube axis direction. A short arc lamp having a cathode and an anode protruding into the enclosure and spaced apart at small intervals, and a discharge medium containing mercury and rare gas enclosed in the hermetic container are known (for example, Patent Document 1). Reference).

Conventionally, in the semiconductor exposure apparatus, by increasing the illuminance by the ultraviolet rays of the short arc type discharge lamp, the short arc type discharge lamp is kept below the rated lamp power under a continuous lighting state for the purpose of shortening the exposure time and increasing the efficiency. The pulse lighting system which waits and exposes more than rated lamp power is known (for example, refer patent document 2).

Thus, when the short arc type lamp is turned on with relatively small lamp power during normal lighting, and the second lamp power is intermittently added to the first lamp power, the lamp is turned on with a relatively large lamp power. Thus, a dimming lamp (hereinafter referred to as "flash-up lighting" for increasing the ultraviolet illuminance) can be performed, and the ultraviolet irradiation ability is increased compared to the case where the lamp is continuously lit at a constant lamp power.

As a result, since the illumination of ultraviolet rays increases at the time of flash-up lighting, the index of the workpiece is synchronized so as to irradiate ultraviolet rays to the workpiece at this time, or the index of the workpiece is synchronized to switch to flash-up lighting. Thereby, irradiation in high ultraviolet illuminance can be performed. For this reason, since enlargement of a short arc mercury lamp and a lighting circuit can be suppressed, cost reduction can be aimed at.

[Patent Document 1] Japanese Patent Application Laid-Open No. 07-226187

[Patent Document 2] Japanese Unexamined Patent Publication No. 60-059733

By the way, in the conventional pulse lighting system, the ultraviolet illuminance gradually decreases with the progress of the life of a short arc type discharge lamp. This is caused by depletion of the discharge medium, deterioration of the electrode, lowering of the transmittance of glass, and the like. For this reason, it is necessary to gradually lengthen the exposure time with the progress of the life of the short arc discharge lamp, and there is a problem that the control for coping with it is difficult.

In addition, it turns out that the conventional short arc mercury lamp does not have a structure suitable for performing flash up lighting. That is, in general, since the first lamp power is made small so that the arc discharge can be maintained, the first lamp power is set to a smaller value than the case of continuously constant rated lamp power. In addition, the 2nd lamp power at the time of flash up is made into a value larger than the said rated lamp power. For this reason, the electrode temperature at the time of flash-up lighting rises, the thermal deformation of an airtight container increases, and it becomes easy to damage a gastight container.

It is a main object of the present invention to provide a short arc discharge lamp lighting device which suppresses the deterioration of ultraviolet illuminance accompanying the progress of the life of a short arc discharge lamp, an ultraviolet irradiation device and an ultraviolet irradiation method using the same.

In addition, the present invention provides a short arc discharge lamp lighting apparatus, an ultraviolet irradiating apparatus and an ultraviolet irradiating method using the same, in addition to the above object, which reduces thermal deformation generated when the flash-up is turned on, thereby preventing damage to the airtight container. For other purposes.

The short arc type discharge lamp lighting device of the first invention includes a short arc type discharge lamp; And a lighting circuit for lighting the short arc discharge lamp while alternately repeating the first period of supplying relatively large power and the second period of supplying relatively small power under constant current control. .

The short arc type discharge lamp lighting device of the second invention includes a short arc type discharge lamp; Under the constant power control, the short arc type discharge lamp is turned on while alternately repeating the first period of supplying relatively large power and the second period of supplying relatively small power, and furthermore, at least in the first period of life. It is characterized by including a lighting circuit configured to gradually increase the power supplied to the short arc discharge lamp with progress.

An ultraviolet irradiation device of the present invention, the ultraviolet irradiation device main body; The short arc type discharge lamp lighting device according to any one of claims 1 to 7 arranged in the ultraviolet irradiation device main body is provided.

The ultraviolet irradiation method of this invention irradiates a workpiece | work with the ultraviolet-ray generate | occur | produced in the 1st period which supplies relatively large electric power of the short arc type discharge lamp lighting apparatus of any one of Claims 1-7. .

Best Mode for Carrying Out the Invention

Below. EMBODIMENT OF THE INVENTION The form for implementing this invention is demonstrated with reference to drawings.

1 to 3 show a first embodiment for implementing the short arc type discharge lamp lighting apparatus of the present invention, FIG. 1 is a circuit block diagram, and FIG. 2 is a front view of an ultra-high pressure mercury lamp as a short arc type discharge lamp. 3 is a waveform diagram of lamp power input to a short arc discharge lamp.

The short arc type discharge lamp lighting device of this embodiment includes a short arc type discharge lamp SHL and a lighting circuit OC.

[Short Arc Discharge Lamp (SHL)]

As shown in FIG. 2, the short arc discharge lamp SHL includes a transparent airtight container 1, a pair of electrodes 2K and 2A, external lead spheres 3 and 4, and a discharge medium.

The transparent airtight container 1 is formed from quartz glass etc. which have fire resistance, and is provided with the enclosure part 1a and the pair of sealing parts 1b and 1b, for example. The discharge space 1c is formed inside the enclosure 1a. The sealing part 1b seals the translucent hermetic container 1 by airtight, and seals and mounts the pair of electrodes 2K and 2A which are mentioned later in the discharge space 1c. More specifically, when the transparent airtight container 1 consists of quartz glass, the sealing part 1b is embed | buried hermetic metal foil (not shown), for example by airtight inside. In addition, the hermetically sealed metal foil is made of, for example, molybdenum foil, and in order to obtain a necessary current capacity, one sheet or a plurality of sheets are used in parallel.

The pair of electrodes 2K and 2A is made of a fire-resistant conductive metal such as tungsten (W), rhenium (Re) or a tungsten-renium alloy. In the case of direct current lighting, the cathode 2K and the anode 2A are constituted. Further, the pair of electrodes 2K and 2A are disposed so as to face each other with their front ends separated from each other so as to have a distance between electrodes smaller than the inner diameter of the surrounding portion 1a, for example, 2.8 mm.

As the discharge medium, a known discharge medium is sealed according to the configuration of the short arc discharge lamp SHL. However, when the short arc discharge lamp SHL is an ultra-high pressure mercury lamp, mercury and rare gas are mainly used. have. In addition, mercury evaporates at the time of lighting and shows an ultrahigh pressure mercury vapor state. The rare gas consists of argon gas, for example, and acts as a starting gas and a buffer gas.

The external lead spheres 3 and 4 are means for receiving electricity by connecting the pair of electrodes 2K and 2A to the lighting circuit. In addition, when the short arc mercury lamp SHL is mounted inside the ultraviolet irradiation device, the external lead spheres 3 and 4 can be used as mounting means. In this case, the external lead spheres 3 and 4 can adopt the clasp structure as shown.

In this embodiment, the short arc type discharge lamp is supported by supporting the bolt portion 3b protruding to the right in FIG. 2 from the clasp portion 3a of the external lead sphere 3 by using a nut (not shown). (SHL) can be mounted inside the ultraviolet irradiation device. At the same time, it is configured to connect to the cathode side of the output end of the lighting circuit.

On the other hand, the external lead sphere 4 is provided with the flexible cover conductor 4b which continues to the outside from the clasp part 4a. Moreover, the connecting terminal 4c is arrange | positioned at the front end of the covering conductor 4b. Although the external lead spheres 3 and 4 are not shown in the figure, one end thereof is continuously connected to the sealing portions 1b and 1b, and is welded to the sealing-mounted metal foil.

In this way, when the shot arc discharge lamp SHL is turned on, ultra-high pressure mercury vapor discharge is generated inside the translucent airtight container 1 to generate ultraviolet rays.

The short arc type discharge lamp SHL is allowed to add the following configurations as desired in addition to the above-described basic structure.

1. (About the negative electrode heat insulating film 5)

The negative electrode insulating film 5 is a means for insulating the negative electrode 2K in order to prevent the mercury from adhering to the negative electrode 2K. For example, it consists mainly of vapor deposition films, such as platinum, formed in the outer surface of the sealing part by the side of the cathode 2K. In addition, when mercury adheres to the cathode 2K, start-up voltage excess and poor lighting tend to occur.

2. (about the anode heat insulating film 6)

The positive electrode thermal insulation film 6 is a means for accelerating the temperature rise of the hermetic container 1. For example, it consists of vapor-deposited films, such as platinum formed in the outer surface of the airtight container 1 which mainly opposes the base end part of anode 2A. In addition, the speed of light starts faster by accelerating the temperature rise of the airtight container 1.

3. (About the trigger wire 7)

The trigger wire 7 is a means for improving the starting inclination of the short arc type discharge lamp SHL by increasing the potential gradient near the electrode at the start. For example, the base end is connected to the external lead sphere 3 on the side of the cathode 2K, the middle side is connected to the outer surface of the surrounding portion 1a, and the front end is sealed on the side of the anode 2A. It is wound around the site | part adjacent to the surrounding part 1a of the part 1b.

[Lighting circuit (OC)]

The lighting circuit OC is a circuit means for lighting the short arc-type discharge lamp SHL while intermittently changing the lamp power to be input. The intermittent operation is performed by alternately repeating the first period T1 for supplying relatively large power H and the second period T2 for supplying relatively small power L, as shown in FIG. 3. All. In the second period, the constant current control may be performed or the constant power control circuit may be used.

In addition, the lighting circuit OC is supposed to perform constant current control of the lamp power to be supplied during at least the first period T1. For this reason, in this embodiment, the constant current obtained from the output end is supplied to the short arc type discharge lamp SHL using the DC constant current control circuit CCR for the lighting circuit OC. In the case where the constant power control circuit is implemented in the second period, in addition to the DC constant current control circuit (CCR), the constant power control circuits are arranged in parallel or in series, and such control circuits are switched for each period and shorted. It can be configured to be connected to the arc discharge lamp (SHL).

In addition, in order to supply DC power to the input end of the DC constant current control circuit CCR, the AC voltage obtained from the AC power source AC is rectified using the rectifier circuit RC.

In addition, the lighting circuit OC outputs the lamp current output from the DC constant current control circuit CCR using the control means CC in order to intermittently change the lamp power input to the short arc discharge lamp SHL. Is controlled so as to make the value required for each period. In addition, the said intermittent fluctuation period shall be set suitably by the object of ultraviolet irradiation. For example, the first and second periods may be set to about 10 seconds each.

[Operation of Short Arc Discharge Lamp Lighting Device]

In this embodiment, the short arc type discharge lamp SHL is supplied with an intermittently varying lamp power shown in FIG. 3, and continues lighting. In the relatively large power H put into the first period T1, the ultraviolet output of the short arc discharge lamp SHL increases. Therefore, when ultraviolet rays generated in the first period T1 are provided for the purpose of exposure or the like, ultraviolet irradiation with high efficiency can be performed in a short time.

In the relatively small electric power L put into the second period T2, the short arc type discharge lamp SHL decreases the ultraviolet output but maintains the lit state. Therefore, the 2nd period T2 can be made into the waiting period until next ultraviolet irradiation. As a result, power consumption in the atmosphere can be minimized.

However, as described above, the short arc discharge lamp SHL is depleted of the discharge medium, the electrodes 2K, 2A are gradually consumed and degraded by sputtering or the like, and the transmittance of the transmissive airtight container decreases according to the progress of the life. Ultraviolet illuminance of this cause decreases gradually.

When the electrode deteriorates, the distance between the electrodes between the pair of electrodes 2K and 2A gradually increases. As a result, the lamp voltage rises.

In contrast, the lighting circuit OC performs constant current control in the first period T1 to light the short arc discharge lamp SHL, so that the lamp current is kept constant. As a result, the lamp power input to the short arc discharge lamp SHL gradually increases with the progress of the life, and as a result, the amount of ultraviolet light emitted increases, and the ultraviolet illuminance is about to increase.

Accordingly, the decrease in the ultraviolet illuminance and the increase in the ultraviolet illuminance due to the constant current control cancel each other, and as a result, the decrease in the ultraviolet illuminance accompanying the progress of the lifetime is suppressed by the constant current control.

EXAMPLE

It is a 1st form shown in FIG.

Short arc type discharge lamp (ultra high pressure mercury lamp)

Transparent airtight container: inner diameter of enclosure 20mm

Pair of electrodes: distance between electrodes 2.8 mm

Discharge medium: mercury and Ar gas

Lighting circuit (Switches the following circuit.)

Constant current control circuit: Constant current control in the first period 20A

Constant Power Control Circuit: Constant Power Control for Second Period 700W

1st and 2nd period: 10 seconds each

[Comparative Example]

Short arc type discharge lamp: same as the embodiment.

Lighting circuit (switch the following circuit)

Electrostatic power control circuit: Constant power control in the first period 1000W, the second period 700W

1st and 2nd period: 10 seconds each

The maximum value (%) of the ultraviolet illuminance of wavelength 365nm was as showing in Table 1.

TABLE 1

Lighting time (hr) Example (%) Comparative example (%) 0 100 100 200 97 90 500 102 80 1000 100 75

As can be understood from Table 1, according to the embodiment (this invention), the fall of the ultraviolet illuminance accompanying the progress of the life of a short arc mercury lamp is significantly suppressed compared with a comparative example.

4 and 5 are graphs showing changes in lamp power and ultraviolet illuminance with respect to the lighting time of the short arc type discharge lamp. FIG. 4 is the present invention and FIG. 5 is a comparative example. In the drawings, the horizontal axis represents the lighting time (relative value), and the vertical axis represents the lamp power (relative a value) and the illuminance (relative value) on the right side, respectively. Ultraviolet illuminance is shown The comparative example lights the short arc type discharge lamp via the DC constant power control circuit CWR instead of the DC constant current control circuit CCR of the present invention.

In the present invention shown in FIG. 4, the lamp power gradually increases with the passage of the lighting time, and the ultraviolet illuminance is substantially constant.

On the other hand, in the comparative example shown in FIG. 5, although lamp electric power becomes constant, lamp electric power gradually falls with passage of lighting time.

Fig. 6 is a circuit block diagram showing a second embodiment for implementing the short arc discharge lamp lighting device of the present invention.

The short arc discharge lamp lighting device of this embodiment differs from the first embodiment in that it includes a direct current constant power control circuit CPR and a control means CC that gradually increases power.

That is, the DC constant power control circuit CPR replaces the constant current control circuit CCR in the first embodiment, but the single body has the same problem as in the comparative example.

Accordingly, in this embodiment, the constant power output from the DC constant power control circuit CPR is gradually increased by the control by the control means CC with the progress of the life of the short arc discharge lamp SHL. have. The above control can be realized by gradually increasing the reference potential in the constant power control.

In this manner, therefore, the lamp power gradually increases as the life progresses, and thus the same effect as in the first embodiment can be exhibited, and the decrease in the ultraviolet illuminance accompanying the progress of the life can be suppressed.

7 to 10 show a third embodiment for implementing the short arc discharge lamp device of the present invention, FIG. 7 is a front view of the entire short arc discharge lamp device, and FIG. 8 is an enlarged front view of the cathode. 9 is a front view and a side view showing enlarged anodes, and FIG. 10 is a waveform diagram of lamp power for explaining flash-up lighting. In addition, in each figure, the same code | symbol is attached | subjected about the same part as FIG. 2, and description is abbreviate | omitted.

In this embodiment, the short arc discharge lamp SHL includes the airtight container 1, the cathode 2K, the anode 2A, the discharge medium, the external lead conductors 3 and 4, and the thermal insulation films 5 and 6. DC lighting type equipped.

The hermetic container 1 is formed of, for example, quartz glass or the like, at least the main part of which transmits ultraviolet rays. The enclosure 1a and the pair of sealing parts 1b and 1b are provided. A discharge space is formed inside the enclosure 1a.

The enclosure 1a is allowed to have an appropriate shape, but has a long spindle shape in the tubular direction, for example. Moreover, the exhaust chip off part Ex is formed in a part of side surface of the surrounding part 1a. The exhaust chip off part Ex protrudes from the enclosure part 1a to the outside in a navel shape, and exhausts the inside of the enclosure part 1a and further includes a short arc discharge lamp (1). It is formed after opening the exhaust pipe welded in advance at the time of manufacture of SHL).

The pair of sealing parts 1b and 1b are connected in the tube axis direction from both ends in the tube axis direction of the enclosing part 1a, and seals the airtight container 1 with airtightness, and at the same time, a cathode 2K to be described later And the positive electrode 2A, which contributes to sealing mounting in the discharge space 1c.

More specifically, when the airtight container 1 consists of quartz glass, the sealing part 1b embed | buried hermetic sealing metal foil 1c in airtight inside, for example. In addition, the sealed metal foil 1c is preferably made of molybdenum foil, and in order to obtain a necessary current capacity, a plurality of sheets, for example, two sheets, are welded to the base end of the electrode.

The negative electrode 2K and the positive electrode 2A are formed of a fire-resistant, conductive metal such as tungsten (W), rhenium (Re), or a tungsten-renium alloy as a main component. Further, the cathodes 2K and 2A each have their front ends so that the distance between the electrodes smaller than the inner diameter of the enclosing portion 1a, for example, 2 mm, so that a short arc type discharge occurs between the electrodes. They are disposed to face each other apart from each other on the tube axis.

As shown in Figs. 8A and 8B, the cathode 2K includes a cathode main portion K1, an intermediate portion K2, a base end portion K3, and a coil portion Ck. It is composed. The cathode main portion K1 has a relatively small diameter, as is known, since the ion current flowing in during the lamp is small. In order to stabilize the cathode spot position during stable lighting, the front end portion is thinly formed, as is known. The intermediate portion K2 is an axial portion and integrally supports the cathode main portion K1 at its front end.

The base end part K3 is ground flat and it is easy to weld to the sealing mounting metal foil 1c.

The coil part Ck is a means added as desired, and is wound and attached to the intermediate | middle part K2 in the position which retracted by the suitable distance from the front end of the cathode main part K1. And it is formed by the thin line of the refractory metal which has electron radiation, for example, thorium tungsten, such as dope an electron radioactive substance. By providing such a coil part Ck, a cathode spot is formed in the coil part Ck only at the time of starting, and it can be comprised so that it may transition to the edge part of the cathode main part K1 after a suitable time passes. Thereby, consumption of the cathode 2K can be reduced. As the constituent metal of the cathode main portion K1 and the coil portion Ck, for example, the refractory metal doped with an electron-radioactive substance such as toria, alumina, magnesia or zirconia can be used.

In contrast, as shown in Figs. 9A and 9B, the anode 2A includes the anode main portion A1, the middle portion A2, and the base end portion A3. have. Since the anode main portion A1 has a large electron current flowing in while the lamp is turned on, it is configured to have a large diameter and to increase the surface area as is known in order to promote heat dissipation. The intermediate portion A2 is the shaft portion, and integrally supports the anode main portion A1 at the front end. The base end A3 is ground flat and is easy to weld to the sealing metal foil 1c.

In addition, the short arc discharge lamp SHL of the present invention lights up in a vertical state in which the cathode 2K is positioned above and the anode 2A is positioned below the cathode 2B. In the case of this aspect, in addition to the said structure, in order to improve the balance of the temperature distribution of the airtight container 1, the center P of the distance G between electrodes is an anode from the center position of the length in the tube axis direction of the surrounding part 1a. It is comprised so that it may be displaced and positioned within the range of predetermined distance to (2A) side.

The discharge medium is composed mainly of mercury and rare gases. Moreover, mercury shows the ultrahigh pressure mercury vapor state which evaporates at the time of lighting, for example, to become several tens of atmospheric pressure. The rare gas consists of argon gas, for example, and acts as a starting gas and a buffer gas.

The external lead conductors 3 and 4 are connecting means for connecting the negative electrode 2K and the positive electrode 2A to the lighting circuit OC to receive electricity, and the negative electrode 2K with the sealed metal foil 1c interposed therebetween. And anode 2A. In addition, when the short arc mercury lamp SHL is mounted inside the ultraviolet irradiation device, the external lead conductors 3 and 4 can be used as mounting means. In this case, although the outer lead spheres 3 and 4 are not shown in figure, a clasp structure can be employ | adopted. By attaching this clasp structure part to the lamp socket (not shown) settled in the predetermined position, the shot arc mercury lamp SHL can be installed in the assembly apparatus, such as an ultraviolet irradiation device.

The heat insulating film 5 is formed of a coating film such as platinum or gold, and the outside of the airtight container 1 so that the lower part of the airtight container 1, on which the anode 2A is disposed, does not become low temperature as shown in FIG. It is formed on the surface. More specifically, the heat insulating film 5 of the airtight container 1 reaches from the front end of the anode 2A to the upper part of the lower sealing part 1b as shown in FIG. It is formed on the outer surface.

The heat insulating film 6 is formed on the outer surface of the exhaust chip off part Ex. The exhaust chip off part Ex protrudes outwardly from the enclosure part 1a in a navel shape. Therefore, since the exhaust chip off part is easy to cool and causes the temperature of the surrounding part 1a to fall, the heat insulation film 6 heats the exhaust chip off part Ex. The insulating film 6 can be formed by a coating film such as platinum or gold.

In addition to the above-described structure, the short arc discharge lamp SHL can be provided with a cathode insulating film (not shown) as desired. The negative electrode insulating film is a means for insulating the negative electrode 2K in order to prevent mercury from adhering to the negative electrode 2K. For example, it consists mainly of coating films, such as platinum, formed in the outer surface of the sealing part by the side of the cathode 2K. In addition, when mercury adheres to the cathode 2K, an excessive rise in starting voltage and poor lighting are likely to occur.

In addition, trigger wires can be arranged as desired. The trigger wire is a means for improving the starting inclination of the short arc type discharge lamp SHL by increasing the potential gradient near the electrode when starting. For example, the base end is connected to the outer lead sphere 3 on the side of the cathode 2K, the middle side is connected to the outer surface of the surrounding portion 1a, and the front end is sealed on the side of the anode 2A. It is wound around a portion adjacent to the enclosing portion 1a of the portion 1b.

Next, the lighting circuit OC will be described. The lighting circuit OC alternately alternates the first lamp power Wa and the second lamp power Wb to the cathode 2K and the anode 2A of the short arc discharge lamp SHL as shown in FIG. 10. It also supplies intermittently.

The first lamp power Wa is normally supplied to T2 at the time of lighting, and is a relatively small value. As an example, 700W is assumed. In addition, during normal lighting, T1 is generally a standby time period, which is a period for maintaining arc discharge during the standby time until ultraviolet irradiation is performed. In the present invention, the first lamp power Wa can be set within the range of 200 to 10000W.

The second lamp power Wb is supplied to T1 in addition to the first lamp power Wa at the time of flash-up lighting, so that the sum Wa + Wb of the first and second lamp powers becomes a relatively large value. As an example, when the second lamp power Wb is 300W, the sum Wa + Wb of the first and second lamp powers is 1000W. That is, during flash-up lighting, T1 is a period for performing high-power lighting in general in order to increase the ultraviolet output during the time of performing the ultraviolet irradiation work as an ultraviolet irradiation time zone. In this embodiment, the second lamp power Wb becomes smaller than the first lamp power Wa and can be set within the range of 100 to 5000 W. FIG.

Further, the ratio Wa / Wb of the first lamp power Wa to the second lamp power Wb, the time interval ratio T2 / T1 of T2 at the time of normal lighting and T1 at the time of flash-up lighting, and T2 at the time of normal lighting and the flash Although the time interval of T1 at the time of up lighting changes with the use of ultraviolet irradiation and the form of operation | work, it shows an approximate reference | standard below.

The ratio Wa / Wb of the first lamp power Wa and the second lamp power Wb is generally in the range of 1.8 to 4.0, and preferably in the range of 2.0 to 3.0.

The time interval ratio T2 / T1 of T2 at the time of normal lighting and T1 at the time of flash-up lighting is not particularly limited in the present invention, but is generally 0.1 to 10, preferably 0.15 to 7.0. In addition, T2 at the time of normal lighting and T1 at the time of flash-up lighting are generally 0.1 second-2 minutes, Preferably it is 0.1-10 second. In one embodiment, the normal lighting time T2 is 2 seconds and the flash up lighting time T1 is 10 seconds. As another example, the normal lighting time T2 and the flash up lighting time T1 are both 2 seconds.

The circuit configuration of the lighting circuit OC is a configuration in which constant current control is performed at least during flash-up lighting, or in a constant power control type in which the lamp power gradually increases with the life of a short arc discharge lamp.

Next, the operation of the short arc mercury lamp device of the present embodiment will be described. When the short arc discharge lamp SHL described above is turned on, an ultra-high pressure mercury vapor discharge is generated inside the translucent airtight container 1 and is mainly used. Ultraviolet rays with a wavelength of 365 nm are generated.

The short arc discharge lamp SHL is intermittently flashed-up as shown in FIG. 10 by the lighting circuit OC. That is, in the time period T2 at which the first lamp power Wa is supplied from the lighting circuit OC, the first arc power discharge lamp SHL is supplied with the first lamp power, and the arc discharge is continued. small. However, at this time, if it is made into a standby state without performing light irradiation work, there will be no problem. Then, in the time zone T1, when the lamp power supplied from the lighting circuit OC is completely replaced and the second lamp power Wb is added to the first lamp power and the increased lamp power Wa + Wb is supplied, the short arc discharge lamp (SHL) instantaneously shifts to dimming lighting and performs flash-up lighting. As a result, since ultraviolet output increases, it becomes convenient to carry out light irradiation work.

In this embodiment, since the heat insulation films 5 and 6 are formed on the outer surface of the part which becomes low temperature during the lighting of the airtight container 1 of the short arc discharge lamp SHL, the temperature distribution of the airtight container 1 is favorable. In this case, thermal deformation is less likely to occur when flashing up, and the airtight container 1 is less likely to be damaged. Therefore, the short arc discharge lamp SHL and the lighting circuit OC can be miniaturized by flash-up lighting, and a short arc mercury lamp device with high reliability can be obtained.

Below, the other aspect for implementing this invention is demonstrated.

The 2nd form for implementing the short arc mercury lamp device of this invention is as follows. In other words, the short arc discharge lamp SHL of the fourth aspect is, in addition to the configuration of the first aspect, as shown in FIG. 1, the portion that is continuously connected to the sealed metal foil 1c of the cathode 2K. The length of the portion of D2 (mm) is set to D1 (mm) and the length of the portion subsequent to the sealing metal foil 1c of the anode 2A is set to Wa (W). When we made the second power to add at the time of flash up lighting to Wb (W),

Equation 1: Wa / 60 <D1 <(Wa + Wb) / 5

Equation 2: Wa / 50 < D2 < (Wa + Wb) / 4

The fourth aspect is suitable if the first lamp power Wa of the short arc discharge lamp SHL is 200 to 10000 W, and the first lamp power Wb is 100 to 5000 W. In addition, in this form and the form demonstrated below, D1 and D2 shall not contain the part welded by overlapping with the sealing mounting metal foil 1c.

In the above formulas 1 and 2, when the temperature is lower than the lower limit, the electrode temperature at the time of flash-up lighting is overheated, and the thermal deformation of the glass of the sealing portion 1b becomes large, and the airtight container 1 easily breaks. In addition, when the upper limit value or more is exceeded, the electrode 2K or 2A becomes too long, which causes an increase in the short arc discharge lamp SHL. If it is in the range of said Formula (1) and (2), even if flash-up lighting is performed, the temperature during lighting of the cathode 2K and the anode 2A will be in the permissible range, and consumption of the electrode 2K or 2A will be suppressed, and it will be airtight. The blackening of the container 1 is prevented, the life of the short arc discharge lamp SHL is long, and the damage of the airtight container 1 is prevented.

The fifth aspect for implementing the short arc type discharge lamp device of the present invention is as follows. That is, the short arc mercury lamp SHL of this form, in addition to the structure in the said 1st form in FIG. 7, has the length of the part connected continuously from the sealing metal foil 1c of the cathode 2K. When the length of the anode is set to D1 (mm), the length of the anode is set to D2 (mm), the first lamp power at the time of normal lighting is set to Wa, and the second power to be added at the time of flash-up lighting is set to Wb. ,

Equation 1: Wa / 60 <D1 <(Wa + Wb) / 12

Equation 2: Wa / 50 <D2 <(Wa + Wb) / 10

Equation 3: 200≤Wa≤1000

It is comprised so that Formula (4): 100 <= Wb <= 500 may satisfy | fill simultaneously, respectively.

In the above formulas 1 and 2, when the temperature is lower than the lower limit, the electrode temperature at the time of flash-up lighting is overheated, and the thermal deformation of the glass of the sealing portion 1b becomes large, and the airtight container 1 easily breaks. In addition, when the upper limit value or more is reached, the electrode 2K or 2A may become too long, which causes an increase in the short arc discharge lamp SHL. In the case of flash-up lighting with a relatively small lamp power prescribed by the formulas (3) and (4), if the flash-up lighting is performed within the range of the above formulas (1) and (2), the temperature during the lighting of the cathode 2K and the anode 2A is turned on. Within the allowable range, consumption of the electrode 2K or 2A is suppressed, blackening of the airtight container 1 is prevented, and the life of the short arc type discharge lamp SHL is long, and at the same time, Breakage is prevented.

Accordingly, the third aspect is a case where the first and second lamp powers Wa of the short arc discharge lamp SHL flash up relatively small short arc discharge lamps used in the ranges of Equations 3 and 4. It is the range generally applied.

The sixth aspect for implementing the short arc type discharge lamp device of this invention is as follows. That is, the short arc discharge lamp SHL of this embodiment, in addition to the configuration of the first embodiment in Fig. 7, the length of the cathode 2K is set to D1 (mm), and the anode 2A is formed. When the length of D2 (mm) is set, the first lamp power at the time of normal lighting is Wa, and the second power added at the time of flash-up lighting is Wb,

Equation 1: Wa / 70 <D1 <(Wa + Wb) / 20

Equation 2: Wa / 65 <D2 <(Wa + Wb) / 16

Equation 3: 1000≤Wa≤4000

Equation 4: 500 ≤ Wb ≤ 2000 are configured to satisfy each other at the same time.

In the above formulas 1 and 2, when the temperature is lower than the lower limit, the electrode temperature at the time of flash-up lighting is overheated, and the thermal deformation of the glass of the sealing portion 1b becomes large, and the airtight container 1 easily breaks. In addition, when the upper limit value or more is reached, the electrode 2K or 2A may become too long, which causes an increase in the short arc discharge lamp SHL. In the case of flash-up lighting by the median lamp power prescribed in Equations 3 and 4, the temperature during lighting of the cathode 2K and anode 2A is allowed even if the flash-up lighting is performed within the range of Equations 1 and 2 above. It becomes in the range, consumption of the electrode 2K or 2A is suppressed, blackening of the airtight container 1 is prevented, and the life of a short arc type discharge lamp SHL becomes long, and the airtight container 1 is damaged. This is avoided.

Therefore, the sixth aspect flashes up the medium-sized short arc type discharge lamp SHL in which the first and second lamp power Wa of the short arc type discharge lamp SHL are used in the ranges of Equations 3 and 4. In general, the range of application.

A seventh aspect for implementing the short arc type discharge lamp device of the present invention is as follows. That is, the short arc mercury lamp SHL of this embodiment, in addition to the configuration of the first embodiment in Fig. 7, the length of the cathode is D1 (mm), and the length of the anode is D2 (mm). When the first lamp power at the time of normal lighting is Wa, and the second power is Wb,

Equation 1: Wa / 120 <D1 <(Wa + Wb) / 30

Equation 2: Wa / 100 <D2 <(Wa + Wb) / 25

Equation 3: 4000≤Wa≤10000

It is comprised so that Formula (4): 2000 <= Wb <5000 may satisfy | fill simultaneously, respectively.

In the above formulas 1 and 2, when the temperature is lower than the lower limit, the electrode temperature at the time of flash-up lighting is overheated, and the thermal deformation of the glass of the sealing portion 1b becomes large, and the airtight container 1 easily breaks. In addition, when the upper limit value or more is reached, the electrode 2K or 2A may become too long, which causes an increase in the short arc discharge lamp SHL. In the case of flash-up lighting with the large lamp power prescribed by the formulas 3 and 4, if the flash-up lighting is within the range of the above formulas 1 and 2, the temperature during the lighting of the cathode 2K and the anode 2A is allowed even if the flash-up lighting is performed. It becomes in the range, consumption of the electrode 2K or 2A is suppressed, blackening of the airtight container 1 is prevented, and the life of a short arc mercury lamp SHL becomes long, and damage of the airtight container 1 is carried out. This is avoided.

Therefore, the seventh aspect is the case of the large-sized short arc discharge lamp SHL in which the first and second lamp power Wa of the short arc discharge lamp SHL are used in the ranges of Equations 3 and 4. The generally applicable range of.

An eighth aspect for implementing the short arc discharge lamp device of the present invention is as follows. That is, the short arc discharge lamp SHL of the present embodiment, in addition to the configuration of any one of the third to seventh embodiments in FIG. 7, provides the first lamp power at the time of normal lighting. When Wa is used, the second electric power is Wb, and the weld section cross-sectional area of the cathode 2K and the anode 2A is S (mm 2),

Equation 1: 0.001 <S / (Wa + Wb) <0.45

Equation 2: 200≤Wa≤2000

It is comprised so that Formula (3): 100 <= Wb <= 1000 may satisfy | fill simultaneously, respectively.

In the eighth aspect, in FIG. 7, not only the welded metal foil 1c of one piece is welded by welding to the base end portions of the cathode 2K and the anode 2A, but also the two end portions are sandwiched between the base end portions. You may weld the sealing metal foil 1c of a sheet | seat on both surfaces of a base end part. To obtain the welded cross-sectional area S (mm2) of the cathode 2K and the anode 2A, measure the cross-sectional area at a substantially central position in the reduction direction of the joint surface of the sealed metal foil 1c and the sealed metal foil 1c. I shall do it.

In the above formula 1, when the lower limit value or less is reached, the temperature of the welded portion with the sealed metal foil 1c of the electrode 2K or 2A becomes excessive at the time of flash-up lighting, and the airtight container 1 is likely to be damaged. . Moreover, when it is more than an upper limit, the heat deformation of the glass of the sealing part 1b in the welding part of the electrode 2K or 2A and the sealing metal foil 1c at the time of flash-up lighting will become large, and the airtight container 1 will Becomes easy to break. If it is in the range of the said Formula 1, even if flash-up lighting is performed, the temperature during lighting in the welding part of the sealing metal foil 1c of the cathode 2K and the anode 2A will be in an allowable range, and the electrodes 2K, 2A ) Is suppressed, blackening of the airtight container 1 caused by the scattering of the electrode material or the compound thereof is prevented, and the life of the short arc discharge lamp SHL is long, and damage of the airtight container 1 is prevented. Is prevented.

A ninth aspect for implementing the short arc type discharge lamp device of the present invention is as follows. That is, the short arc type discharge lamp SHL of this embodiment, in addition to the configuration in any one of the third to eighth embodiments of FIG. 7, provides the first lamp power at the time of normal lighting. When Wa is set, the second electric power is Wb, the surface area of the cathode 2K is Sa (mm 2), and the surface area of the anode 2A is Sb (mm 2).

Equation 1: 0.5 <(Wa + Wb) / Sa <10

Equation 2: 0.08 <(Wa + Wb) / Sb <5

Equation 3: 200≤Wa≤2000

It is comprised so that Formula (4): 100 <= Wb <1000 may satisfy | fill simultaneously, respectively.

In the ninth aspect, the surface areas of the cathode 2K and the anode 2A refer to the surface area of the entire electrode.

In the above expressions 1 and 2, when the lower limit value or less is reached, the electrode temperature becomes excessive at the time of flash-up lighting, and thermal deformation becomes large, and the airtight container 1 is easily damaged. Moreover, when it is more than an upper limit, the electrode 2K or 2A will become large and a short arc type discharge lamp SHL will enlarge. If it is in the range of said Formula 1 and 2, even if flash-up lighting is performed, the temperature of the cathode 2K and the anode 2A will become in the tolerance range, the consumption of the electrodes 2K and 2A will be suppressed, and the airtight container 1 will Blackening is prevented, and the life of the short arc discharge lamp SHL is long, and damage to the airtight container 1 is prevented.

11 and 12 show one embodiment for implementing the ultraviolet irradiation device of the present invention, FIG. 11 is a front sectional view, and FIG. 12 is a left sectional view. In addition, in each figure, the same code | symbol is attached | subjected to the same part as FIG. 1, and description is abbreviate | omitted.

In this embodiment, the ultraviolet irradiation device includes an ultraviolet irradiation device main body 11 and a short arc type discharge lamp lighting device 12.

The ultraviolet irradiation device main body 11 consists of remaining parts except the short arc type discharge lamp lighting device 12 from the ultraviolet irradiation device. In this embodiment, the ultraviolet irradiation device main body 11 includes an optical system 11a, a light control mechanism 11b, an optical shutter 11c, a cooling mechanism 11d, an irradiation inlet 11e, a casing 11f, and the like. Consists of.

The optical system 11a consists of optical means for condensing the ultraviolet rays emitted from the short arc discharge lamp SHL downward and leading them out of the irradiation inlet 11e. The elliptical reflector 11a1, the first mirror 11a2, the light guide 11a3, and the second mirror 11a4 are formed. The ellipsoidal reflector 11a1 reflects the ultraviolet rays emitted from the short arc discharge lamp SHL on its reflection surface and focuses them downward. The first mirror 11a2 reflects the collected ultraviolet rays and bends them by 90 degrees to advance in the horizontal direction. The light guide 11a3 guides the ultraviolet-ray to the exterior of the casing 11f after the ultraviolet-ray which progressed in the said horizontal direction passes through the light control mechanism 11b and the optical shutter 11c which are mentioned later. The second mirror 11a4 reflects the ultraviolet rays derived from the other end of the light guide 11a3 and bends downward by 90 degrees. The ultraviolet-ray bent downwards is irradiated from the irradiation entrance 11a1 mentioned above, and irradiates the workpiece | work which is not shown in figure.

The dimming mechanism 11b adjusts the ultraviolet illuminance at the time of irradiating the workpiece | work which is derived from the irradiation entrance 11e and which is not shown in figure, as desired. Moreover, the light control mechanism 11b consists of a rotating disk which formed the concentric circular shape of many path | route which differs in opening area, and performs light control by rotating the rotating disk and selecting the opening area of a path | route as desired.

The optical shutter 11c passes (opens) the ultraviolet light passing through the light control mechanism 11b to enter the light guide 11a3 or to block (close) it so as not to enter the light guide 11a3. Therefore, it is set to open when irradiating ultraviolet rays to the work, and to close when not irradiating the work.

The cooling mechanism 11d exhausts the inside of the casing 11f and cools it, and exhausts the inside of the casing so that dust or the like is not discharged from the inside of the ultraviolet irradiation device and contaminates the atmosphere. Discharge to (13). Although not shown, air is blown into the outer surface of the transparent airtight container, preferably near the anode, of the short arc mercury lamp SHL to cool the short arc discharge lamp SHL as desired. A mechanism can be added.

The casing 11f stores each of the above means and the short arc type discharge lamp lighting device 12 in a predetermined position therein.

As the short arc type discharge lamp lighting device 12, any one of the first and second aspects for implementing the present invention shown in Figs. 1 and 2 can be used. In the short arc discharge lamp SHL, the tube axis is vertically suspended at the inner upper position of the casing 11f. Moreover, the mechanism 11g which adjusts the position of a tube axis, and adjusts an optical axis is arrange | positioned.

Next, one aspect for implementing the ultraviolet irradiation method of this invention using the above-mentioned ultraviolet irradiation apparatus is demonstrated. That is, in this embodiment, when the short arc type discharge lamp SHL reaches the first period T1, the optical shutter 11e is opened in synchronization, so that no ultraviolet light is shown from the irradiation inlet 11e. We check on work. Ultraviolet light irradiated from the irradiation port 11e in the first period T1 is suppressed from decreasing the ultraviolet illuminance through the life of the short arc discharge lamp SHL as described above, thereby changing the ultraviolet irradiation time or the like. Even if cumbersome control becomes unnecessary or control is performed as desired, the control becomes easy. Moreover, the gap of a process becomes small by ultraviolet irradiation, and the favorable ultraviolet irradiation effect can be acquired.

INDUSTRIAL APPLICABILITY The present invention can be applied to a treatment performed by irradiating ultraviolet rays such as semiconductor exposure, curing of ultraviolet curable resin, and light cleaning.

According to the present invention, it is possible to provide a short arc discharge lamp lighting device which compensates for the deterioration of ultraviolet illuminance accompanying the progress of the life of the short arc discharge lamp, the ultraviolet irradiation device and the ultraviolet irradiation method using the same. That is, in the first invention, when the front end of the electrode is consumed and the distance between the electrodes is increased and the lamp voltage rises with the progress of the life of the short arc discharge lamp, the lamp power input for the constant current control is increasing. It compensates for the deterioration of UV illuminance accompanying the progress of the life of a short arc discharge lamp. In addition, in the second invention, since the power supplied from the constant-voltage-controlled lighting circuit gradually increases with the progress of the life of the short arc type discharge lamp, the ultraviolet illuminance with the progress of the life of the short arc type discharge lamp is increased. To compensate for the decline.

Further, according to the present invention, in addition to the above, the structure of the short arc type discharge lamp is optimized, i.e., provided with a heat insulating film at a predetermined position, or subsequently for the first and second lamp powers in flash-up lighting. Since the length, the cross-sectional area or the surface area of the anode is set within a predetermined value range, the short arc discharge lamp lighting device which reduces the thermal deformation generated in the short arc discharge lamp when the flash-up lights and prevents damage to the airtight container, The ultraviolet irradiation device and the ultraviolet irradiation method used can be provided.

Claims (10)

A short arc lamp; Under the constant power control, the short arc discharge lamp is turned on while alternately repeating the first period of supplying relatively large power and the second period of supplying relatively small power, and at least in the first period. A short arc type discharge lamp lighting device, comprising: a lighting circuit configured to gradually increase the power supplied to the short arc type discharge lamp as the life progresses. 2. The short circuit according to claim 1, wherein the distance between the electrodes gradually increases with the progress of the life of the short arc discharge lamp, and the lamp power input to the short arc discharge lamp gradually increases. Arc type discharge lamp lighting device. 2. The short arc type discharge lamp according to claim 1, wherein the short arc type discharge lamp includes an enclosing portion for forming a discharge space therein and a pair of sealing portions integrally connected to both ends of the enclosing portion and sealed with a metal foil sealed therein. Ultraviolet-resistant airtight container provided, a cathode in which the base end is connected to a sealed mounting metal foil embedded in a sealing portion of the hermetic container, the front end protrudes in the enclosure, and the sealing mounting in which the base end is embedded in the sealing portion of the hermetic container. A portion of the positive electrode facing the metal foil and protruded into the enclosure and spaced apart from each other at a small interval to face the cathode; a discharge medium including mercury and rare gas enclosed in the hermetic container; A short arc type discharge lamp lighting device comprising a heat insulating film formed on an outer surface thereof. 4. The short arc discharge lamp of claim 3, wherein the length of the portion continuously connected to the metal foil of the negative electrode is set to D1 (mm), and the length of the portion continuously connected to the metal foil of the anode is set to D2 (mm). When the first lamp power at the time of normal lighting is set to Wa (W), and the second power added at the time of dimming lighting is set to Wb (W), Equation 1: Wa / 60 <D1 <(Wa + Wb) / 5 Equation 2: Wa / 50 <D2 <(Wa + Wb) / 4 Short arc discharge lamp lighting device, characterized in that to satisfy each of the same time. 4. The short arc discharge lamp of claim 3, wherein the length of the cathode is set to D1 (mm), the length of the anode is set to D2 (mm), and the first lamp power at the time of normal lighting is set to Wa. And when we made Wb the 2nd electric power to add at the time of the dimming lighting, Equation 1: Wa / 60 <D1 <(Wa + Wb) / 12 Equation 2: Wa / 50 <D2 <(Wa + Wb) / 10 Equation 3: 200≤Wa≤1000 Equation 4: 100≤Wb≤500 Short arc discharge lamp lighting device, characterized in that to satisfy each of the same time. 4. The short arc discharge lamp of claim 3, wherein the length of the cathode is set to D1 (mm), the length of the anode is set to D2 (mm), and the first lamp power at the time of normal lighting is set to Wa. And when we made Wb the 2nd electric power to add at the time of the dimming lighting, Equation 1: Wa / 70 <D1 <(Wa + Wb) / 20 Equation 2: Wa / 65 <D2 <(Wa + Wb) / 16 Equation 3: 1000≤Wa≤4000 Equation 4: 500≤Wb≤2000 Short arc discharge lamp lighting device, characterized in that to satisfy each of the same time. 4. The short arc discharge lamp of claim 3, wherein the length of the cathode is set to D1 (mm), the length of the anode is set to D2 (mm), and the first lamp power at the time of normal lighting is set to Wa. And when we made Wb the 2nd electric power to add at the time of the dimming lighting, Equation 1: Wa / 120 <D1 <(Wa + Wb) / 30 Equation 2: Wa / 100 <D2 <(Wa + Wb) / 25 Equation 3: 4000≤Wa≤10000 Equation 4: 2000≤Wb≤5000 Short arc discharge lamp lighting device, characterized in that to satisfy each of the same time. An ultraviolet irradiator main body; An ultraviolet irradiation device comprising the short arc type discharge lamp lighting device according to any one of claims 1 to 7 arranged in an ultraviolet irradiation device main body. The ultraviolet irradiation method of irradiating the workpiece | work with the ultraviolet-ray generate | occur | produced in the 1st period which supplies relatively large electric power of the short arc type discharge lamp lighting apparatus of any one of Claims 1-7. delete

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