JP4356776B2 - UV discharge lamp - Google Patents

UV discharge lamp Download PDF

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JP4356776B2
JP4356776B2 JP2007158653A JP2007158653A JP4356776B2 JP 4356776 B2 JP4356776 B2 JP 4356776B2 JP 2007158653 A JP2007158653 A JP 2007158653A JP 2007158653 A JP2007158653 A JP 2007158653A JP 4356776 B2 JP4356776 B2 JP 4356776B2
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lamp
cooling air
light emitting
seal portion
electrode
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JP2008311119A (en
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宏二 辻
一也 田中
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Ushio Denki KK
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Ushio Denki KK
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Priority to JP2007158653A priority Critical patent/JP4356776B2/en
Priority to TW097117829A priority patent/TWI405241B/en
Priority to KR1020080051991A priority patent/KR101129950B1/en
Priority to CNA2008101302412A priority patent/CN101325145A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/34—Double-wall vessels or containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • H01J61/366—Seals for leading-in conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • H01J61/366—Seals for leading-in conductors
    • H01J61/368—Pinched seals or analogous seals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H01J61/523—Heating or cooling particular parts of the lamp
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)

Description

本発明は、紫外線を放射する放電ランプに関する。   The present invention relates to a discharge lamp that emits ultraviolet rays.

紫外線を放射する放電ランプを用い、樹脂、接着剤、塗料、インク、フォトレジスト等に対して紫外線を照射し、硬化、乾燥、溶融あるいは軟化といったさまざまな処理を行うことが、各分野で幅広く行われている。   Using a discharge lamp that emits ultraviolet rays, the resin, adhesives, paints, inks, photoresists, etc. are irradiated with ultraviolet rays to perform various treatments such as curing, drying, melting or softening in various fields. It has been broken.

図５は、上記の目的に使用される、従来の棒状の紫外線放電ランプの構成の一例を示す図である。
同図に示すように、紫外線放電ランプは、大きくは、封体と呼ばれるガラス（石英）管内に一対の電極１ａが設けられた管本体部分と、管内部の電極１ａと外部の電極（リード線）5とをつなぐための金属箔（例えばモリブデン箔）１ｃが、埋設されたシール部Ｃとから構成されている。
シール部Ｃは、封体の石英を加熱し金属箔との間に空間（隙間）を残さないように封止して構成されている
そして、封体内には、水銀を始めとした一種もしくは複数種の金属が封入されている。 FIG. 5 is a diagram showing an example of the configuration of a conventional bar-shaped ultraviolet discharge lamp used for the above purpose.
As shown in the figure, the ultraviolet discharge lamp is roughly divided into a tube main body portion in which a pair of electrodes 1a are provided in a glass (quartz) tube called an envelope, an electrode 1a inside the tube, and an external electrode (lead wire). A metal foil (for example, molybdenum foil) 1c for connecting 5) and 5 is formed of an embedded seal portion C.
The sealing part C is configured by heating the sealing quartz so as not to leave a space (gap) between the metal foil and one or more of the sealing element including mercury. Seed metal is enclosed.

シール部Ｃの両端（ランプの長手方向の両外側）にはセラミックス製または金属製のベース１ｂが取付けられており、このベース１ｂから、外部の電極（リード線）5を介して電極１ａに電力が引き込まれる。
また、ランプを光照射器に取り付ける際には、光照射器に設けられたランプ保持部材が、このベース１ｂの部分を保持する。 A ceramic or metal base 1b is attached to both ends of the seal portion C (both outside in the longitudinal direction of the lamp), and electric power is supplied from the base 1b to the electrode 1a through an external electrode (lead wire) 5. Is drawn.
When the lamp is attached to the light irradiator, a lamp holding member provided in the light irradiator holds the portion of the base 1b.

管本体部分は、電極１ａ間である封体発光部Ａと、管径が徐々に細くなって封体発光部Ａとシール部Ｃをつなぐ管端部Ｂからなる。
本願において管端部Ｂとは、電極１ａの先端の部分から、シール部Cの、石英により金属箔１ｃが封止された部分の、電極１ａ側先端までの領域のことを言う。上記したように、シール部Ｃは金属箔が石英により封止された部分であり、内部には空間が存在しない部分である。これに対し、管端部Ｂは、封体発光部Ａとシール部Ｃとの間の、空間が存在する部分を言う。 The tube main body portion includes a sealed light emitting portion A between the electrodes 1a, and a tube end B connecting the sealed light emitting portion A and the seal portion C with a gradually decreasing tube diameter.
In the present application, the tube end portion B refers to a region from the tip portion of the electrode 1a to the tip portion of the seal portion C where the metal foil 1c is sealed with quartz by the side of the electrode 1a. As described above, the seal portion C is a portion where the metal foil is sealed with quartz, and is a portion where there is no space inside. On the other hand, the tube end portion B is a portion where a space exists between the envelope light emitting portion A and the seal portion C.

点灯時は、一対の電極１ａ間で放電が起き、管内に封入されている水銀を始めとする金属が蒸発し、該金属特有のスペクトルを発光する。この時、封体発光部Ａは発光領域になり、管端部Ｂは非発光領域となる。   At the time of lighting, discharge occurs between the pair of electrodes 1a, metal such as mercury enclosed in the tube evaporates, and a spectrum peculiar to the metal is emitted. At this time, the envelope light emitting portion A becomes a light emitting region, and the tube end portion B becomes a non-light emitting region.

このような紫外線放電ランプは、一例をあげれば、定格１８ｋＷものであって、電極１ａ間距離は約１１００ｍｍ、内容積が約４００ｃｍ３の封体内部に鉄、ヨウ化水銀、水銀などが封入されて、波長２２０ｎｍ〜４００ｎｍの光を放射する。このような複数種の金属を含むガスが封入された棒状の紫外線放電ランプとして例えば特許文献１がある。 For example, such an ultraviolet discharge lamp has a rating of 18 kW, and the distance between the electrodes 1a is about 1100 mm, and the inner volume is about 400 cm 3 , in which iron, mercury iodide, mercury, or the like is enclosed. Thus, light having a wavelength of 220 nm to 400 nm is emitted. For example, Patent Document 1 discloses a rod-shaped ultraviolet discharge lamp in which a gas containing a plurality of types of metals is enclosed.

図６は、上記した従来の棒状の紫外線放電ランプを用いた光照射器の構成の一例を示す図であり、同図は、ランプの長手方向に対して直交する方向からの断面図である。
１はランプ、２はランプハウスと呼ばれる灯具、２ａは断面が楕円形状である樋状のミラー、２ｂは風洞、２ｃは隔壁、２ｄは冷却風の吸い込み孔、３は吸引ファン、４はダクトである。 FIG. 6 is a view showing an example of the configuration of a light irradiator using the above-described conventional bar-shaped ultraviolet discharge lamp, and FIG. 6 is a cross-sectional view from a direction orthogonal to the longitudinal direction of the lamp.
1 is a lamp, 2 is a lamp called a lamp house, 2a is a bowl-shaped mirror having an elliptical cross section, 2b is a wind tunnel, 2c is a partition wall, 2d is a cooling air suction hole, 3 is a suction fan, 4 is a duct is there.

同図に示すように、光照射器は、ランプ１と、該ランプ１を収納するランプハウス２とを備え、ランプハウス２には、内部に冷却風を取り込むための吸引ファン３が、ダクト４を介して取り付けられている。   As shown in the figure, the light irradiator includes a lamp 1 and a lamp house 2 that houses the lamp 1, and a suction fan 3 for taking cooling air into the lamp house 2 includes a duct 4. Is attached through.

吸引ファン３が動作することにより、外部からランプハウス２内に冷却風が吸引され、棒状のランプ１の長手方向に直交するように冷却風が流れ、ランプ１およびミラー２ａを冷却する。ランプ１およびミラー２ａを冷却した冷却風は、隔壁２ｃに設けられたエアの吸い込み孔２ｄから風洞２ｂに引き込まれ、ダクト４から排気される。   When the suction fan 3 is operated, cooling air is sucked into the lamp house 2 from the outside, and the cooling air flows so as to be orthogonal to the longitudinal direction of the rod-shaped lamp 1 to cool the lamp 1 and the mirror 2a. The cooling air that has cooled the lamp 1 and the mirror 2 a is drawn into the air channel 2 b from the air suction hole 2 d provided in the partition wall 2 c and exhausted from the duct 4.

ランプ１は、断面が楕円形状を持つ樋状のミラー２ａの第１焦点に配置されており、上記ランプ１から放射される紫外線は、上記ミラー２ａの第２焦点付近に配置された被照射体Ｗ上に集光されて照射される。   The lamp 1 is disposed at the first focal point of the bowl-shaped mirror 2a having an elliptical cross section, and the ultraviolet rays emitted from the lamp 1 are irradiated on the irradiated object disposed near the second focal point of the mirror 2a. The light is condensed on W and irradiated.

図５に戻り、紫外線放電ランプにおいては、ランプ点灯時の封体発光部Ａおよび管端部Ｂとシール部Ｃの最適温度はそれぞれ異なる。各部の最適温度は、同図に示すように、封体発光部Ａおよび管端部Ｂは５５０℃〜９００℃である。
一方、シール部Ｃは、温度はできるだけ低いことが好ましく、上限の温度が決められている。上限温度はランプの種類（封入物や電力の違い）によって異なるが、おおむね３００℃〜４００℃以下である。 Returning to FIG. 5, in the ultraviolet discharge lamp, the optimum temperatures of the envelope light emitting portion A, the tube end portion B, and the seal portion C when the lamp is turned on are different. As shown in the figure, the optimum temperature of each part is 550 ° C. to 900 ° C. for the envelope light emitting part A and the tube end part B.
On the other hand, the temperature of the seal part C is preferably as low as possible, and the upper limit temperature is determined. The upper limit temperature varies depending on the type of lamp (the difference between the encapsulated material and the electric power), but is generally 300 ° C. to 400 ° C. or less.

ランプは処理時間短縮のため入力が大きくなる傾向があり、上記に例示した入力の大きなランプの場合、点灯時には自身の発生する熱により温度が高くなる。したがって、上記した各部がそれぞれ適切な温度になるようにランプを冷却する必要がある。
例えば、封体発光部Ａおよび管端部Ｂは、温度が９００℃以上になると、管の材料である石英が再結晶化して白濁（失透）し、封体発光部Ａからの光の透過率が悪くなり、照度の低下やランプの変形が生じる場合がある。 The lamp tends to have a large input for shortening the processing time. In the case of a lamp with a large input as exemplified above, the temperature rises due to the heat generated by the lamp when it is turned on. Therefore, it is necessary to cool the lamp so that each of the above-described parts has an appropriate temperature.
For example, when the temperature of the envelope light emitting portion A and the tube end portion B reaches 900 ° C. or higher, quartz that is the material of the tube recrystallizes and becomes white turbid (devitrified), and light from the envelope light emitting portion A is transmitted. The rate may deteriorate, and the illuminance may decrease and the lamp may be deformed.

また、シール部Ｃは、金属（モリブデン）箔と外部の電極（リード線）5が接続される部分の温度が上限（３００℃〜４００℃）を超えると、モリブデン箔１ｃの外気に接している部分が酸化し、箔切れによるランプの不点灯といった問題が発生する。したがって、封体発光部Ａやシール部Ｃには十分な量の冷却風を与え冷却する必要がある。   Further, when the temperature of the portion where the metal (molybdenum) foil and the external electrode (lead wire) 5 are connected exceeds the upper limit (300 ° C. to 400 ° C.), the seal portion C is in contact with the outside air of the molybdenum foil 1c. The portion is oxidized, and the problem of non-lighting of the lamp due to the foil breakage occurs. Therefore, it is necessary to cool the envelope light emitting part A and the seal part C with a sufficient amount of cooling air.

一方、冷却風が多すぎて、封体発光部Ａや管端部Ｂの温度が５５０℃以下になると、管内の蒸発している水銀やその他の金属が、温度が低くなった部分に吸い寄せられるように集まり、封体発光部Ａの金属成分の割合が変化する。
そのため、発光スペクトルの分布（発光分光分布）が正常に点灯している場合と変わったり、ランプが消えてしまったりする。このような現象を過冷却と呼ぶ。
したがって、ランプ点灯時は、ランプの上記各部分の温度が適切になるように、冷却風量を調整する必要がある。 On the other hand, if there is too much cooling air and the temperature of the envelope light emitting part A and the tube end B becomes 550 ° C. or less, the evaporated mercury and other metals in the tube are sucked to the part where the temperature is lowered. As a result, the ratio of the metal component of the envelope light emitting portion A changes.
For this reason, the emission spectrum distribution (emission spectrum distribution) is different from that when it is normally lit, or the lamp is turned off. Such a phenomenon is called supercooling.
Therefore, when the lamp is lit, it is necessary to adjust the cooling air volume so that the temperature of each part of the lamp is appropriate.

ところが、封体発光部Ａの温度を９００℃以下に、かつシール部Ｃを上限（３００℃〜４００℃）以下に保持されるように冷却風量を調整すると、両者の間にある管端部Ｂの温度が５５０℃以下になりやすく、特に電極１ａがモリブデン箔１ｃと接合される付近の温度が低くなって、電極１ａの後端とシール部Ｃの先端（石英により封止されている部分の電極側先端）との間にあるわずかな隙間に金属が入り込んで溜まり、過冷却の原因となるという問題があった。
そこで、この問題を防ぐために、特許文献２においては、紫外線ランプの管端部に遮風部材Ｄを設けることが示されている。 However, when the cooling air flow rate is adjusted so that the temperature of the envelope light emitting portion A is maintained at 900 ° C. or lower and the seal portion C is maintained at the upper limit (300 ° C. to 400 ° C.) or lower, the tube end portion B between the two. The temperature near the point where the electrode 1a is joined to the molybdenum foil 1c is lowered, and the rear end of the electrode 1a and the tip of the seal portion C (the portion sealed by quartz) There is a problem that metal enters and accumulates in a slight gap between the electrode and the tip on the electrode side, causing overcooling.
Therefore, in order to prevent this problem, Patent Document 2 shows that a wind shielding member D is provided at the tube end of the ultraviolet lamp.

特許公報第２８９５３４０号Japanese Patent No. 2895340 特開２００５−１１７４０公報JP 2005-11740 A

特許文献２の記載によれば、紫外線放電ランプに設ける遮風部材Dは、シール部Cの封体に固定されて支持されている。
しかし、シール部Cに遮風部材Dを固定すると、従来に比べてシール部Cの熱容量が大きくなり、シール部Cを適正に冷却する冷却条件が変化してしまう。
そのため、遮風部材Dをシール部Cに取付けると、適切な冷却条件、例えば冷却風の風量や風速を、再度実験等により求めて設定しなおす必要がある。 According to the description in Patent Document 2, the wind shielding member D provided in the ultraviolet discharge lamp is fixed to and supported by the sealing body of the seal portion C.
However, when the wind shielding member D is fixed to the seal portion C, the heat capacity of the seal portion C is increased as compared with the conventional case, and the cooling conditions for properly cooling the seal portion C are changed.
For this reason, when the wind shielding member D is attached to the seal portion C, it is necessary to obtain and set appropriate cooling conditions, for example, the amount and speed of the cooling air again through experiments.

本発明は、上記問題点を考慮してなされたものであって、本発明の目的は、遮風部材により管端部の過冷却を防ぐとともに、シール部の冷却も確実に行うことができ、またシール部の熱容量を従来に比べて大きくすることない紫外線放電ランプを提供することである。   The present invention has been made in consideration of the above-mentioned problems, and the object of the present invention is to prevent overcooling of the pipe end by the wind-shielding member and to reliably cool the seal portion, Another object of the present invention is to provide an ultraviolet discharge lamp that does not increase the heat capacity of the seal portion as compared with the conventional one.

上記課題解決するため、本発明においては、遮風部材をシール部ではなくベースに固定する。
しかし、ベースに遮光部材を固定すると、そのままではシール部に冷却風が当たらなくなるで、遮光部材のシール部に相当する位置に２ヶ所の通風口を形成し、シール部を冷却するための冷却風の通風路を確保する。 In order to solve the above problems, in the present invention, the wind shielding member is fixed to the base instead of the seal portion.
However, if the light shielding member is fixed to the base, the cooling air will not be applied to the seal portion as it is, and two ventilation openings are formed at positions corresponding to the seal portion of the light shielding member to cool the sealing portion. Secure the ventilation path.

なお、シール部の金属箔の冷却を効率よく行なうためには、２ヶ所の通風口を結ぶ方向と金属箔の平面とが平行になるように構成することが望ましい。   In order to efficiently cool the metal foil in the seal portion, it is desirable that the direction connecting the two ventilation openings and the plane of the metal foil be parallel to each other.

本発明においては、遮風部材がベースに固定されているので、シール部の熱容量が従来に比べて変化しない。
したがって、ランプの冷却条件を再度求めなおす必要がなくなり、従来と同様の冷却条件でランプを冷却しつつ、管端部の過冷却を防ぐことができる。 In the present invention, since the wind shielding member is fixed to the base, the heat capacity of the seal portion does not change as compared with the conventional case.
Therefore, it is not necessary to re-determine the cooling condition of the lamp, and it is possible to prevent the tube end portion from being overcooled while cooling the lamp under the same cooling condition as the conventional one.

それに加えて遮風部材のシール部に相当する位置には通風口が設けられ、通風路が形成されているので、シール部を適切に冷却することができる。
また、２ヶ所の通風口を結ぶ方向とシール部の金属箔の平面とを平行にすることにより、金属箔を効率よく冷却し、外気と接触する部分の酸化を防ぐことができる。 In addition, since the ventilation port is provided at a position corresponding to the seal portion of the wind shielding member and the ventilation path is formed, the seal portion can be appropriately cooled.
Further, by making the direction connecting the two ventilation openings parallel to the plane of the metal foil of the seal portion, the metal foil can be efficiently cooled and oxidation of the portion in contact with the outside air can be prevented.

図１（ａ）は、本発明の紫外線放電ランプの構成を示す図である。ランプに対する冷却風は、同図において、下側から上側に向かって、ランプの長手方向に対して直交するように供給される。
紫外線ランプ１の両側には、管端部Ｂを覆う円筒上の遮風部材Ｄが設けられている。
図１（ｃ）は、遮風部材Ｄの斜視図であり、遮風部材Ｄは封体発光部Ａと同心で、ランプの長手方向に直角方向の断面は円形である。 Fig.1 (a) is a figure which shows the structure of the ultraviolet discharge lamp of this invention. In the figure, the cooling air for the lamp is supplied from the lower side to the upper side so as to be orthogonal to the longitudinal direction of the lamp.
On both sides of the ultraviolet lamp 1, a cylindrical wind shielding member D covering the tube end B is provided.
FIG.1 (c) is a perspective view of the wind-shielding member D, and the wind-shielding member D is concentric with the envelope light emission part A, and the cross section of the lamp at right angles to the longitudinal direction is circular.

遮風部材Ｄは厚さ約２ｍｍの、ランプ１の封体と同じ材質のガラスであり、一方がベース１ｂにセラミック系の接着剤Ｓにより固定されている。
他方、遮風部材Ｄの封体発光部Ａ側は、封体に対し１ｍｍ弱の隙間ｄを有して開放されている。遮風部材Ｄと封体との間に隙間ｄを持たせるのは、遮風部材Ｄが封体に接触すると、接触している部分の温度が低下し、発光の条件を異ならせる可能性があるためである。 The wind shielding member D is made of glass having a thickness of about 2 mm and made of the same material as the envelope of the lamp 1, and one is fixed to the base 1b with a ceramic adhesive S.
On the other hand, the envelope light emitting part A side of the wind shield member D is opened with a gap d of less than 1 mm with respect to the envelope. The gap d is provided between the wind shielding member D and the sealing body. When the wind shielding member D contacts the sealing body, the temperature of the contacted portion is lowered, and the light emission condition may be changed. Because there is.

また、遮風部材Dのシール部Ｃに相当する部分には、冷却風に対向する側とその反対側に貫通孔である通風口６１，６２が形成されている。
即ち、冷却風に対向する側に形成した貫通孔は冷却風取り入れ用の通風口（冷却風取り入れ口）６１となり、また、その反対側に形成した貫通孔は冷却風排気用の通風口（冷却風排気口）６２となり、シール部Ｃに対し冷却風の通風路が確保され、シール部Ｃは確実に冷却される。
なお、遮風部材Ｄの冷却風排気用の通風口６２は、図１（ｂ）に示すように、溝（スリット）形状であっても良い。 Further, in the portion corresponding to the seal portion C of the air shielding member D, vent holes 61 and 62 which are through holes are formed on the side facing the cooling air and on the opposite side.
That is, the through hole formed on the side facing the cooling air is a cooling air intake vent (cooling air intake) 61, and the through hole formed on the opposite side is a cooling air exhaust vent (cooling air intake). Wind exhaust port) 62 is provided, and a ventilation path for cooling air is secured to the seal portion C, so that the seal portion C is reliably cooled.
The cooling air exhaust vent 62 of the wind shielding member D may have a groove (slit) shape as shown in FIG.

図２は、本発明の紫外線ランプの管端部Ｂ付近の拡大図であり、図２（ａ）は、冷却風取り入れ口６１側から見た断面図であり、図２（ｂ）は冷却風取り入れ口６１と冷却風排気口６２を結ぶ方向に沿った断面図である。なお、同図においては、図面が煩雑になるのを防ぐために、ベース１ｂを点線で示している。
同図に示すように、電極１ａは２枚のモリブデン箔１ｃにより挟まれて接合されている。なお、定格電力の大きなランプの場合、電極１ａは太く重くなるので、管端部Ｂにおいて、ビーズと呼ばれる部材により支持されることもあるが、本図では、このビーズ部材は省略して示している。 2 is an enlarged view of the vicinity of the tube end portion B of the ultraviolet lamp of the present invention, FIG. 2 (a) is a sectional view seen from the cooling air intake 61 side, and FIG. 2 (b) is the cooling air. FIG. 6 is a cross-sectional view along the direction connecting the intake 61 and the cooling air exhaust 62. In the figure, the base 1b is indicated by a dotted line in order to prevent the drawing from becoming complicated.
As shown in the figure, the electrode 1a is sandwiched and joined by two molybdenum foils 1c. In the case of a lamp with a large rated power, since the electrode 1a is thick and heavy, the tube end B may be supported by a member called a bead, but this bead member is not shown in the figure. Yes.

一方、２枚のモリブデン箔１ｃは、シール部Ｃにおいて、両箔間にガラス部材１１を挟んで両側から空間を残さないように封着され、ランプの外部に出ている。
そして、この外部に出ている２枚のモリブデン箔１ｃが外部電極（リード線）5と接合される。このモリブデン箔１ｃと外部電極（リード線）5の接合部分は、ベース１ｂにより覆われており、リード線５はベース１ｂの側面から外に出ている。
なお、本実施例では、２枚のモリブデン箔１ｃを使用する構造を示したが、モリブデン箔は１枚であっても良い。 On the other hand, the two molybdenum foils 1c are sealed so as not to leave a space from both sides with the glass member 11 sandwiched between the two foils in the seal portion C, and come out of the lamp.
Then, the two molybdenum foils 1c protruding to the outside are joined to the external electrode (lead wire) 5. The joint portion of the molybdenum foil 1c and the external electrode (lead wire) 5 is covered with the base 1b, and the lead wire 5 protrudes from the side surface of the base 1b.
In this embodiment, a structure using two molybdenum foils 1c is shown, but one molybdenum foil may be used.

ランプは電極１ａの先端間の放電により発光するので、放射される光を妨げないように、遮風部材Ｄは、電極１ａ先端より内側（発光部側）にかからないようにすることが望ましい。
一方、電極１ａ先端より外側（非発光部側）の管端部Ｂは、放電が生じていないので温度が低くなりやすく、遮風部材Ｄを設ける必要がある。 Since the lamp emits light by the discharge between the tips of the electrodes 1a, it is desirable that the wind shield member D is not placed on the inner side (light emitting part side) of the tips of the electrodes 1a so as not to disturb the emitted light.
On the other hand, the tube end B outside the tip of the electrode 1a (on the non-light emitting portion side) is not discharged, so the temperature tends to be low, and it is necessary to provide the wind shield member D.

特に、上記したように、電極１ａがモリブデン箔１ｃと接合される付近は、棒状の電極を平面状のモリブデン箔と接合するのであるから、構造的に空間（隙間）が生じやすい。そのため、図２（ａ）に示すように、電極１ａの後端とシール部Ｃの先端（石英により封止されている部分の電極側先端）との間には小さな空間（隙間）１２が形成される。
そして、この隙間１２は、封体発光部Ａから遠いことから温度が低くなりやすく、封体内の金属が冷えて溜まりやすい。それに加えて、いったんこの隙間に入り込んだ金属は温度が上がらないので再蒸発しにくい。
したがって、遮風部材Dは、電極１ａとモリブデン箔１ｃを接合する付近、即ち、電極１ａの後端とシール部Ｃの先端（石英により封止されている部分の電極側先端）との間の隙間１２を確実に遮風し保温するように形成する。 In particular, as described above, in the vicinity where the electrode 1a is joined to the molybdenum foil 1c, the rod-like electrode is joined to the planar molybdenum foil, so that a space (gap) is likely to occur structurally. Therefore, as shown in FIG. 2A, a small space (gap) 12 is formed between the rear end of the electrode 1a and the front end of the seal portion C (electrode side front end of the portion sealed with quartz). Is done.
And since this clearance gap 12 is far from the envelope light emission part A, temperature tends to become low and the metal in an envelope tends to cool and collect easily. In addition, once the metal has entered this gap, the temperature does not rise, so it is difficult to re-evaporate.
Therefore, the wind-shielding member D is in the vicinity where the electrode 1a and the molybdenum foil 1c are joined, that is, between the rear end of the electrode 1a and the tip of the seal portion C (electrode-side tip of the portion sealed with quartz). The gap 12 is formed so as to reliably shield and keep warm.

また、シール部Ｃに冷却風を供給するために遮風部材Ｄに形成する冷却風取り入れ口６１と冷却風排気口６２は、シール部Ｃのモリブデン箔１ｃの電極１ａ側端から、遮風部材Ｄをベース１ｂと接着する部分までの間に設ける。
ただし、冷却風取り入れ口６１は、シール部Ｃの先端（石英により封止されている部分の電極側先端）のぎりぎりまで開口していると、上記した確実に保温したい電極１ａの後端とシール部Ｃの先端との間にある隙間１２に冷却風が当たることが考えられる。 In addition, the cooling air intake 61 and the cooling air exhaust 62 formed in the wind shielding member D for supplying the cooling air to the seal portion C are connected to the wind shielding member from the electrode 1a side end of the molybdenum foil 1c of the seal portion C. D is provided up to the portion to be bonded to the base 1b.
However, if the cooling air intake 61 opens to the very end of the tip of the seal portion C (the tip on the electrode side of the portion sealed with quartz), the sealing air C and the rear end of the electrode 1a that is to be reliably kept warm are sealed. It is conceivable that the cooling air hits the gap 12 between the tip of the part C.

そのため、冷却風取り入れ口６１は、隙間１２に冷却風が当たらないように（隙間１２の温度が下がらないように）、シール部Ｃの途中からベース１ｂ側に向かって形成する。
また、冷却風取り入れ口６１と冷却風排気口６２を結ぶ方向と、モリブデン箔の平面とは、両者が平行になるように構成する。これはモリブデン箔１ｃが１枚で構成されたランプでも同様である。このように構成することで、冷却風がモリブデン箔１ｃの平面に沿って流れるので、できるだけ温度を低くしたいモリブデン箔１ｃが効率よく冷却される。 Therefore, the cooling air intake 61 is formed from the middle of the seal portion C toward the base 1b so that the cooling air does not strike the gap 12 (so that the temperature of the gap 12 does not decrease).
Further, the direction connecting the cooling air intake 61 and the cooling air exhaust 62 and the plane of the molybdenum foil are configured to be parallel to each other. The same applies to a lamp having a single molybdenum foil 1c. With this configuration, the cooling air flows along the plane of the molybdenum foil 1c, so that the molybdenum foil 1c whose temperature is desired to be lowered as much as possible is efficiently cooled.

なお、冷却風取り入れ口６１と冷却風排気口６２は、両者が同じ大きさ形状である必要はない。
上記したように、冷却風取り入れ口６１は、電極１ａとモリブデン箔１ｃの接合部付近に冷却風が当たることがないように、その大きさや形状を設計しなければならない Note that the cooling air intake 61 and the cooling air exhaust 62 do not have to be the same size and shape.
As described above, the size and shape of the cooling air intake 61 must be designed so that the cooling air does not hit the vicinity of the joint between the electrode 1a and the molybdenum foil 1c.

また、冷却風排気口６２の開口は、冷却風の流れを妨げないために、冷却風取り入れ口６１よりも大きくても良い。
また、その形状は、上記したように、貫通孔ではなく、封体発光部Ａからベース１ｂに向かって形成された溝（スリット）状の開口でも良い。 The opening of the cooling air exhaust port 62 may be larger than the cooling air intake port 61 so as not to disturb the flow of the cooling air.
Further, as described above, the shape may be a groove (slit) -shaped opening formed from the envelope light emitting portion A toward the base 1b instead of the through hole.

遮風部材Ｄの材質は、放電ランプの封体と同じ材質のガラスを使用することもできるが、絶縁性であることが望ましい。
遮風部材の材質が導電性である場合、遮風部材はランプ内部の電極と接近するため、ランプ点灯時に電極と遮風部材との間で放電し、電流が遮風部材からランプハウスに流れて地絡（グランドに対してショートすること）を起こす場合があるからである。
遮風部材として用いることができる絶縁性部材として、例えばセラミックスがあげられる。上記したように、管端部は非発光領域であるので、不透明な材料を用いても問題はない。 The material of the wind shielding member D can be the same glass as that of the envelope of the discharge lamp, but is preferably insulative.
When the material of the windshield member is conductive, the windshield member comes close to the electrode inside the lamp, so that discharge occurs between the electrode and the windshield member when the lamp is lit, and current flows from the windshield member to the lamp house. This may cause a ground fault (short circuit to ground).
Examples of the insulating member that can be used as the windshield member include ceramics. As described above, since the tube end portion is a non-light emitting region, there is no problem even if an opaque material is used.

図３に、本発明の紫外線放電ランプを光照射器に取り付けた図を示す。同図は、ランプの長手方向に沿った方向からの断面図である。なお、リード線５は省略している。
図６と同様に、１は棒状の紫外線放電ランプ、２はランプハウス、２ａは樋状のミラー、２ｂは風洞、２ｃは隔壁、２ｄは冷却風の吸い込み孔、３は吸引ファン、４はダクトであり、ランプハウス２の上部には、ダクト４を介して吸引ファン３が設けられている。 FIG. 3 shows a view in which the ultraviolet discharge lamp of the present invention is attached to a light irradiator. This figure is a cross-sectional view from a direction along the longitudinal direction of the lamp. Note that the lead wire 5 is omitted.
As in FIG. 6, 1 is a rod-shaped ultraviolet discharge lamp, 2 is a lamp house, 2a is a bowl-shaped mirror, 2b is a wind tunnel, 2c is a partition wall, 2d is a cooling air suction hole, 3 is a suction fan, 4 is a duct In the upper part of the lamp house 2, a suction fan 3 is provided via a duct 4.

吸引ファン３が動作することにより、外部からランプハウス２内に冷却風が吸引され、棒状のランプ1の長手方向に直交するように冷却風が流れ、ランプ１およびミラー２ａを冷却する。
ランプ１およびミラー２ａを冷却した冷却風は、隔壁２ｃに設けられたエアの吸い込み孔２ｄから風洞２ｂに引き込まれ、ダクト４から排気される。 When the suction fan 3 is operated, cooling air is sucked into the lamp house 2 from the outside, and the cooling air flows so as to be orthogonal to the longitudinal direction of the rod-shaped lamp 1 to cool the lamp 1 and the mirror 2a.
The cooling air that has cooled the lamp 1 and the mirror 2 a is drawn into the air channel 2 b from the air suction hole 2 d provided in the partition wall 2 c and exhausted from the duct 4.

封体発光部Ａには冷却風が吹き付けられて冷却されるが、管端部Ｂは、取り付けられた遮風部材Ｄにより、冷却風が直接吹きつけられることがなく、保温される。
遮風部材Ｄは冷却されて温度が低くなるが、遮風部材Ｄと管端部Ｂの封体には隙間が設けられているので、この隙間に存在する空気層の保温効果により、管端部Ｂの熱は遮風部材Ｄには伝わらず温度が下がらない。したがって管端部Ｂ過冷却が防止される。 Cooling air is blown onto the sealed light emitting part A to cool it, but the tube end B is kept warm by the attached wind shielding member D without being directly blown with cooling air.
Although the wind shield member D is cooled and the temperature is lowered, a gap is provided in the sealing body between the wind shield member D and the pipe end portion B. Therefore, due to the heat retaining effect of the air layer existing in this gap, the pipe end The heat of the part B is not transmitted to the wind shield member D, and the temperature does not decrease. Accordingly, overcooling of the tube end portion B is prevented.

また、遮風部材Ｄのシール部Ｃに相当する部分には冷却風の通風路が形成されているので、シール部Ｃの冷却は、遮風部材Ｄにより影響されることなく従来どおり行なうことができる。   Further, since a cooling air passage is formed in a portion corresponding to the seal portion C of the wind shield member D, the seal portion C can be cooled as before without being affected by the wind shield member D. it can.

図４に、本発明の遮風部材を取付けた場合と、取付けない従来の場合の、紫外線ランプの各部の温度を示す。
なお、このランプは上記した、定格１８ｋＷ、電極１ａ間距離は約１１００ｍｍ、内容積約４００ｃｍ３、封体内部に鉄、ヨウ化水銀、水銀などを封入したものであって、温度測定時の入力電力は１３０Ｗ／ｃｍである。
温度の測定点は、管端部Ｂの径の太い電極先端付近（径太部）、管端部Ｂの管径が細くなった部分（径細部）、電極１ａとモリブデン箔の接合部、およびシール部Ｃの４箇所の封体の表面である。それぞれ、封体の表面に熱電対を接着して温度測定を行った。 FIG. 4 shows the temperature of each part of the ultraviolet lamp when the wind-shielding member of the present invention is attached and when it is not attached.
The lamp is rated at 18 kW, the distance between the electrodes 1a is about 1100 mm, the internal volume is about 400 cm 3 , and iron, mercury iodide, mercury, etc. are sealed inside the envelope, and input during temperature measurement. The power is 130 W / cm.
The temperature measurement points are the vicinity of the electrode tip having a large diameter at the tube end portion B (diameter thick portion), the portion at which the tube diameter of the tube end portion B is thinned (diameter detail), the joint between the electrode 1a and the molybdenum foil, It is the surface of the four sealing bodies of the seal part C. Each was measured for temperature by attaching a thermocouple to the surface of the envelope.

同図に示されるとおり、遮光部材Ｄを設けない従来の場合、電極１ａとモリブデン箔１ｃの接合部の温度が４７７℃と、５５０℃以下であったものが、遮光部材Ｄを設けることによって６２９℃と温度が上昇し、この部分に金属が溜まるのを防ぐことができる。
一方、シール部Ｃの温度は、遮光部材Ｄを設けると３０２℃と、従来の２４０℃よりも高くなる。しかし、実際に酸化の可能性があるのは、この測定位置よりも、さらに発光部から離れたランプの長手方向両端の、外部のリード線と接合される部分であるので、この温度よりも数十度低くなると考えられ、この程度の温度であれば問題ない。 As shown in the figure, in the conventional case where the light shielding member D is not provided, the temperature at the joint between the electrode 1a and the molybdenum foil 1c was 477 ° C. and 550 ° C. or less. The temperature rises at ℃ and can prevent the metal from accumulating in this part.
On the other hand, when the light shielding member D is provided, the temperature of the seal portion C is 302 ° C., which is higher than the conventional 240 ° C. However, since there is a possibility that oxidation actually occurs at the ends of the lamp in the longitudinal direction farther away from the light emitting part than at this measurement position, it is a part that is joined to the external lead wire. It is considered that the temperature is lowered by 10 degrees, and there is no problem if the temperature is about this level.

本発明の紫外線放電ランプの構成を示す図である。It is a figure which shows the structure of the ultraviolet discharge lamp of this invention. 本発明の紫外線放電ランプの管端部付近の拡大図である。It is an enlarged view near the tube end part of the ultraviolet discharge lamp of the present invention. 本発明の紫外線放電ランプを用いた光照射器の構成を示す図である。It is a figure which shows the structure of the light irradiation device using the ultraviolet discharge lamp of this invention. 紫外線放電ランプの各部の測定温度を示す図である。It is a figure which shows the measured temperature of each part of an ultraviolet discharge lamp. 従来の紫外線放電ランプの構成を示す図である。It is a figure which shows the structure of the conventional ultraviolet discharge lamp. 従来の紫外線放電ランプを用いた光照射器の構成の一例を示す図である。It is a figure which shows an example of a structure of the light irradiation device using the conventional ultraviolet discharge lamp.

符号の説明Explanation of symbols

１ 紫外線放電ランプ
１ａ 電極
１ｂ ベース
１ｃ モリブデン箔
１１ ガラス部材
１２ 空間（隙間）
２ ランプハウス
２ａ ミラー
２ｂ 風洞
２ｃ 隔壁
２ｄ 吸い込み口
３ 吸引ファン
４ ダクト
５ 外部電極（リード線）
６１ 冷却風取り入れ用の通風口（冷却風取り入れ口）
６２ 冷却風排気用の通風口（冷却風排気口）
Ａ 封体発光部
Ｂ 管端部
Ｃ シール部
Ｄ 遮風部材
Ｓ 接着剤
Ｗ 被照射体 DESCRIPTION OF SYMBOLS 1 Ultraviolet discharge lamp 1a Electrode 1b Base 1c Molybdenum foil 11 Glass member 12 Space (gap)
2 Lamp house 2a Mirror 2b Wind tunnel 2c Bulkhead 2d Suction port 3 Suction fan 4 Duct 5 External electrode (lead wire)
61 Cooling air intake vent (cooling air intake port)
62 Ventilation port for cooling air exhaust (cooling air exhaust port)
A Sealing light emitting part B Pipe end C Sealing part D Wind shielding member S Adhesive W Subject to be irradiated

Claims (1)

封体の内部に一対の電極を有するとともに金属が封入され、
発光領域である封体発光部と、上記電極と外部リード線とを金属箔を介して接続して封着
したシール部と、上記封体発光部と上記シール部とをつなぐ管端部と、上記シールの両側
に取り付けられたベースとを備え、上記電極を結ぶ方向に対して直交する方向に冷却風が
供給される棒状の紫外線放電ランプであって、
上記管端部には、一端が上記ベースに固定され、また上記シール部に相当する位置には冷
却風の通風路が形成されている、封体と間隙を有する遮風部材が設けられており、
上記遮風部材は筒状であり、
上記通風路は、上記筒状の遮風部材の軸対称の位置に形成された2ヶ所の通風口により構
成され、
上記２ヶ所の通風口を結ぶ方向と上記シール部の金属箔の平面とが、平行になるように構
成されていることを特徴とする紫外線放電ランプ。 A metal is enclosed with a pair of electrodes inside the envelope,
A sealed light emitting portion that is a light emitting region, a seal portion in which the electrode and the external lead wire are connected and sealed via a metal foil, a tube end portion that connects the sealed light emitting portion and the seal portion, A stick-shaped ultraviolet discharge lamp, comprising a base attached to both sides of the seal, and supplied with cooling air in a direction perpendicular to the direction connecting the electrodes,
The aforementioned pipe ends, one end fixed to the base, also at a position corresponding to the sealing portion ventilation path of the cooling air is formed, air shield member is provided with a sealing member and a gap ,
The windshield member is cylindrical,
The ventilation path is constituted by two ventilation openings formed at axially symmetric positions of the cylindrical air shielding member.
Made,
The direction in which the two ventilation openings are connected and the plane of the metal foil of the seal part are parallel to each other.
An ultraviolet discharge lamp characterized by being made.
JP2007158653A 2007-06-15 2007-06-15 UV discharge lamp Active JP4356776B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007158653A JP4356776B2 (en) 2007-06-15 2007-06-15 UV discharge lamp
TW097117829A TWI405241B (en) 2007-06-15 2008-05-15 Ultraviolet discharge lamp
KR1020080051991A KR101129950B1 (en) 2007-06-15 2008-06-03 Ultraviolet discharge lamp
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JP4752943B2 (en) * 2009-04-10 2011-08-17 ウシオ電機株式会社 Excimer discharge lamp
JP5652614B2 (en) * 2011-03-18 2015-01-14 ウシオ電機株式会社 Long arc type metal halide lamp
CN105513939B (en) * 2016-01-26 2017-07-04 尹刚 A kind of low temperature ultra-violet line lamp
KR102313624B1 (en) 2020-11-03 2021-10-18 (주)오성일렉코리아 Ultra Violet Discharge Lamp Having a Variable Control UV Irradiation Range

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JP4386555B2 (en) 2000-08-30 2009-12-16 株式会社オーク製作所 Discharge lamp and cooling method thereof
JP2004127665A (en) 2002-10-01 2004-04-22 Ushio Inc Short arc type discharge lamp
JP4023398B2 (en) * 2003-06-20 2007-12-19 ウシオ電機株式会社 Ultraviolet light emitting lamp and light irradiator using the same
JP2005111740A (en) * 2003-10-06 2005-04-28 Nakano:Kk Dry lacquer tone pencil
JP2006185656A (en) * 2004-12-27 2006-07-13 Harison Toshiba Lighting Corp Dielectric barrier discharge lamp and ultraviolet-ray irradiation device

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JP2008311119A (en) 2008-12-25
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TWI405241B (en) 2013-08-11
TW200908067A (en) 2009-02-16
KR101129950B1 (en) 2012-03-28

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