CN100423177C

CN100423177C - Dielctric shielded discharging lamp and ultraviolet radiating device

Info

Publication number: CN100423177C
Application number: CNB2005100022567A
Authority: CN
Inventors: 吉川和彦; 铃木俊也; 铃木祐; 此上公浩; 山田哲夫; 鹤田胜善; 八岛诚
Original assignee: Harison Toshiba Lighting Corp
Current assignee: Toshiba Lighting and Technology Corp
Priority date: 2004-01-20
Filing date: 2005-01-20
Publication date: 2008-10-01
Anticipated expiration: 2025-01-20
Also published as: TWI264037B; KR100730818B1; CN1645557A; TW200535902A; KR20050076699A

Abstract

The present invention provides a dielectric barrier discharge lamp restrained from the generation of particles caused by the difference of thermal expansion, and provides an ultraviolet-ray irradiation device using the same. The dielectric barrier discharge lamp EXL comprises a slender tube-shaped airtight vessel 1 made of ultraviolet-ray transmissive material, an excimer generating gas sealed in the airtight vessel 1, a long inner electrode 2 arranged in the airtight vessel so as to generate the dielectric barrier discharge over whole axial direction, an external electrode OE generating the dielectric barrier discharge in the airtight vessel 1 in cooperation with the inner electrode 2, and a gap forming device S having a gap G of 0.05 to 1.0 mm between the airtight vessel 1 and the external electrode OE along axial direction of the airtight vessel 1.

Description

Dielectric barrier discharge lamp and ultraviolet lamp

Technical field

The ultraviolet lamp that the present invention relates to dielectric barrier discharge lamp and used it.

Background technology

Putting down in writing halide by making rare gas such as xenon or rare gas etc. in a lot of documents carries out silent discharge, is dielectric barrier discharge, thereby produce the radiation approach intrinsic monochrome excimers discharge lamp (Excimer discharge lamp), be dielectric barrier discharge lamp, thereby all be well-known all the time.In dielectric barrier discharge lamp, the electric current of the pulse type that flowing.Because the electric current of this pulse type has electron stream at a high speed, and it is intermittently more during (stopping), therefore make xenon etc. emit ultraviolet material and temporarily be combined into molecule state (excimers state), and when it turns back to ground state, emit effectively and absorb less short wavelength ultraviolet again.Moreover under the situation of xenon, carrying out with 172nm is the mulecular luminescence of width of the half value width of cloth of centre wavelength.The ultraviolet ray of wavelength 172nm, its energy be than big from the ultraviolet ray of Cooper-Hewitt lamp getable wavelength 185nm of institute or 254nm, and the while is big in conjunction with energy than the organic compound of wanting to decompose also.Therefore, by the ultraviolet ray of illumination wavelength 172nm, can cut off above-mentioned organic compound combination and with its decomposition, remove.And then, by in atmospheric environment, carrying out the ultraviolet irradiation of wavelength 172nm,, the oxygen in the atmosphere generates active oxygen because decomposing, be cut off the organic compound and the reactive oxygen species of combination, generate carbon dioxide (CO ₂) and water (H ₂O) etc., therefore be easy to carry out removing of organic compound.Thereby dielectric barrier discharge lamp is very effective as ultraviolet light source.

As dielectric barrier discharge lamp, the airtight container (gas-tight container) of known useful elongated tubulose carries out the dielectric barrier discharge lamp (with reference to patent documentation 1) of dielectric barrier discharge.The dielectric barrier discharge lamp that patent documentation 1 is put down in writing, constitute as follows, promptly, formation possesses elongated airtight container, internal electrode that direction of principal axis in airtight container extends and the luminous tube that is sealing into the excimers generation gas in the airtight container, to have refrigerating function and contact on the outer surface of airtight container as outer electrode with the lamp body of the aluminum that can cave in the mode of a part of tabling of the outer surface of airtight container, when the tube axial direction of airtight container produces same dielectric barrier discharge, luminous efficiency is maintained higher state thereby the heat of sending from luminous tube is promptly distributed.In addition, closely be connected mutually with airtight container, constitute both crimping in order to make outer electrode.

When carrying out ultraviolet irradiation, along with the large tracts of landization of shone thing, and then developed the dielectric barrier discharge lamp of long size, and used its effective length to surpass the lamp of 1m with above-mentioned this dielectric barrier discharge lamp in the past.If use the dielectric barrier discharge lamp of so long size, just can carry out the application of multiple industry such as the sclerosis of for example ashing of large-area liquid crystal substrate (ashing), photoresist and sterilization.

Patent documentation 1: the spy opens the 2003-197152 communique

; though the lamp length at dielectric barrier discharge lamp is under the situation of the such weak point below the 500mm; even if the structure that the outer electrode of above-mentioned aluminum closely is connected on the airtight container does not have problem yet; if but the effective length of lamp for example is the long length that surpasses 1m, just find to exist problem shown below.That is, be accompanied by flickering of dielectric barrier discharge lamp and on each several part, produce the influence of expanding, shrinking.The airtight container of dielectric barrier discharge lamp becomes about 30～hundred tens of ℃ when lighting a lamp (lighting).On the other hand, thus outer electrode because the cooling temperature that obtains by cold-producing medium rises is suppressed.But, owing to closely be connected the said external electrode of the outer surface of airtight container, because of forming with metal material, so coefficient of thermal expansion is bigger, therefore when the lighting a lamp of dielectric barrier discharge lamp, the temperature that temperature is accompanied by airtight container rises and rises and expansion, cools off and shrinks along with the temperature of lamp body when turning off the light.Relative therewith, because airtight container is made by coefficient of thermal expansion materials with smaller such as quartz glasss, it is less therefore to be accompanied by the expansion, the contraction that flicker.

The result of above formation is accompanied by flickering of dielectric barrier discharge lamp and produces friction (wiping moving) between airtight container and outer electrode.If the long 1m that surpasses of lamp, then position deviation between the two will reach 1mm or more than it.And, thereby because this friction outer electrode can be ground off the particle that just is easy to generate about particle diameter 0.1mm.In case produce such particle, then can form the black attachment attached to the surface of airtight container, thereby bring harmful effect for ultraviolet illumination and distribution thereof because of it, perhaps particle can drop on the shone thing and stained shone thing.

Summary of the invention

The object of the present invention is to provide a kind of dielectric barrier discharge lamp of the generation that has prevented the particle that causes by the friction between outer electrode and the airtight container (wipe moving) and the ultraviolet lamp that has used it.

In addition, concrete purpose of the present invention is to provide a kind of and prevents the generation of particle by possessing the gap formation device that forms the gap in the prescribed limit between airtight container and outer electrode, and forms the dielectric barrier discharge lamp of good dielectric barrier discharge ground formation and the ultraviolet lamp that has used it.

Dielectric barrier discharge lamp of the present invention is characterized in that, possesses: the airtight container of being made by the material of ultraviolet permeability, be elongated tubulose; The excimers of being enclosed in the airtight container generate gas; Produce the internal electrode that the mode of dielectric barrier discharge sets endlong with the cardinal principle that in airtight container, spreads all over its tube axial direction; Thereby the outer electrode that works by the mode that in airtight container, produces dielectric barrier discharge with cooperating of internal electrode with the outer surface that is provided in airtight container along its tube axial direction; Between airtight container and outer electrode, form the gap formation device of the clearance G of the condition that satisfies mathematical expression 0＜G≤1.0 (mm of unit) along the tube axial direction of airtight container.

In the present invention, owing to possess above structure, though expand, shrink along with flickering between airtight container and outer electrode of lamp can produce, in the part of the effective length of lamp, can not produce friction at least between the two, can form good dielectric barrier discharge simultaneously.Therefore, even if the effective length of lamp surpasses 1m, thereby also can avoid outer electrode to be become the outside of atomic particle the time grinding off, perhaps because of falling on the light inlet window of ultraviolet lamp or do not having under the situation of light inlet window a generation of the such problem of on shone thing generation black attachment attached to airtight container by friction.

According to the present invention, can provide a kind of inhibition by the generation that with the thermal expansion difference is the outer electrode and the particle that the friction between the airtight container produces of cause, the ultraviolet lamp that forms the dielectric barrier discharge lamp of good dielectric barrier discharge simultaneously and used it.

Description of drawings

Fig. 1 is the part section front view that is used to implement the 1st form of dielectric barrier discharge lamp of the present invention.

Fig. 2 is the local disrumpent feelings front view of this luminous tube.

Fig. 3 is a local disrumpent feelings cross-section front view of showing the part of the support portion of this luminous tube and power supply.

Fig. 4 is the major part elevation cross-sectional view of showing the part of this liner and getter device.

Fig. 5 is its side cutaway view.

Fig. 6 is a side cutaway view of showing the 2nd form be used to implement dielectric barrier discharge lamp of the present invention.

Fig. 7 is a part section front view of showing the front view of the 3rd form be used to implement dielectric barrier discharge lamp of the present invention.

Fig. 8 is the part front at its both ends.

Fig. 9 is the profile with respect to the direction of tubular axis quadrature of the pars intermedia of its tube axial direction.

Figure 10 sees the part end view that these supporting mechanisms are seen from the direction of arrow of Fig. 8.

Figure 11 is in the 4th form that is used for implementing dielectric barrier discharge lamp of the present invention, has write down the table of the determination data of the pipe face illumination when expression changes clearance G.

The curve chart of the pipe face illumination of Figure 12 when to be that expression is above-mentioned change clearance G.

Figure 13 is a major part side cutaway view of showing the 4th form be used to implement dielectric barrier discharge lamp of the present invention.

Figure 14 is the major part profile of the tube axial direction of sealing container.

Figure 15 is the elevation cross-sectional view of showing as the ultraviolet cleaning device of a form that is used to implement ultraviolet lamp of the present invention.

Figure 16 is its upward view.

Figure 17 is the profile of above-mentioned XVII-XVII ' line along Fig. 6.

Figure 18 is the circuit diagram of its high-frequency lighting circuit.

Label declaration

1 airtight container, 2 internal electrodes

4 supply lines, 5 maintaining parts

7 suction holes, 8 centering arms

AA getter device EXL dielectric barrier discharge lamp

G gap HFI high-frequency lighting circuit

LT luminous tube OE outer electrode

The S gap forms device S1 liner

S2 luminous tube supporting mechanism

Embodiment

Below, be used to implement form of the present invention with reference to description of drawings.

The 1st form

Fig. 1 to Fig. 5, showed the 1st form that is used to implement dielectric barrier discharge lamp of the present invention, Fig. 1 is the part section front view of dielectric barrier discharge lamp, Fig. 2 is the local disrumpent feelings front view of luminous tube, Fig. 3 is a local disrumpent feelings cross-section front view of showing the part of the support portion of luminous tube and power supply, Fig. 4 is the major part elevation cross-sectional view of showing the part of liner and getter device, and Fig. 5 is this side cutaway view.In this form, dielectric barrier discharge lamp EXL forms gas, internal electrode 2, outer electrode OE and gap by airtight container 1, excimers and forms device S and constitute, and is loaded and lit a lamp by high-frequency lighting circuit HFI.Moreover airtight container 1, excimers form gas and internal electrode 2, by integrated and constitute luminous tube LT in advance.In addition, in this form, except that said structure, also possesses getter device AA.

＜about luminous tube LT 〉

Luminous tube LT except that above-mentioned structure, also has a pair of

power supply

3A, 3B and a pair of

support portion

5,5 at its two ends.

About airtight container 1

Airtight container 1 is made by the material of ultraviolet permeability, and forms elongated discharge space 1a in inside.For example, thus can adopt the sealed at both ends structure that forms columned discharge space 1a in inside with elongated pipe.In addition, also the 2nd form is such as described later, adopts sealed at both ends by with the coaxial and double-deck elongated pipe, thereby is ring-type and the structure that becomes elongated discharge space 1a ' cylindraceous along tube axial direction at inside formation section.As the material of ultraviolet permeability, generally use synthetic quartz glass to make.But, in the present invention,, can use any material to form airtight container as long as have permeability with respect to the ultraviolet ray of the wavelength that will utilize.

In addition, airtight container 1 though its diameter limits especially, strengthen ultraviolet ray output, preferably its diameter is made as 12mm or more than it.In addition, wall thickness can be located at below the 2mm, preferably about 0.3～1mm.Relative therewith, the length of airtight container 1, unrestricted fully under the situation of carrying out dielectric barrier discharge.Thereby.In the present invention, the ultraviolet irradiation length that airtight container can be as required, be the effective length of lamp, be set at desirable arbitrarily length.In addition, the present invention is effective especially at 1m or the situation more than it with respect to the effective length of lamp, for example can be made as the long body about 2m.

And then, in order to ensure the ultraviolet ray amount of needs a plurality of dielectric barrier discharge lamp EXL are disposed with narrower spacing parallel arranging ground under the situation about using allowing, the straight tube that airtight container 1 is preferably straight, even if but more or less bending also have no relations.In fact, what when forming elongated pipe, are easy to produce some bending,, can form about maximum 1mm or its following bending for example with respect to the about 1200mm of total length.But the bending of this degree is allowed to as straight tube substantially.Moreover, setting as described later under the situation that the gap that is made of liner S1 forms device S, when airtight container 1 is crooked as described above, be configured with the mode that liner S1 touches by part, be convenient to the clearance G between airtight container 1 and the outer electrode OE described later is limited in the prescribed limit with the back of the body of bending.Moreover, though because if the section shape of pipe is a circle then manufacturing cost is relatively low, thereby preferably circular, also can adopt desirable section shapes such as ellipse, quadrangle if desired.

In addition, with the stage before the airtight container sealing, the device as be used for enclosing excimers generation gas after the air of the discharge space 1a of the inside of airtight container 1 is discharged can be connected blast pipe (scheming not show) on the airtight container 1.In this case, blast pipe can be connected near a side the end of airtight container 1, and is on the side at the position of exposing to the outside from outer electrode OE described later.Moreover, if carried out exhaust, then excimers are generated gas and enclose in the airtight container 1, and, form exhaust unsolder portion thus blast pipe unsolder (weldering is disconnected) from blast pipe via blast pipe, airtight container 1 is sealed airtightly.When carrying out exhaust via a distolateral blast pipe that is formed on airtight container 1, be 1m or more than it under such long situation particularly at airtight container 1, have and will carry out sufficient exhaust then how much time understands some elongated such tendency.Therefore, if desired, also can constitute and near the two ends of airtight container 1, form a pair of blast pipe, thereby carry out exhaust simultaneously.Thereby, in this case, just form a pair of exhaust unsolder portion.

As an embodiment of this form, make the airtight container 1 that external diameter 18mm, internal diameter 16mm, long 1300mm and the sealing 1b at both ends possess the compression seal portion (clamping sealing) that has buried molybdenum foil underground.

Generate gas about excimers

Generate gas as excimers, can use one or more mixing or rare gas halide of xenon (Xe), krypton (Kr), argon (Ar) and helium rare gas such as (He), for example halogenation xenon (XeCl, KrCl) etc.Moreover, under the situation of enclosing rare gas halide, also rare gas and fluorine (F), chlorine (Cl), bromine (Br) or iodine halogens such as (I) can be enclosed, make it then to generate halide in the inside of airtight container 1.In addition, except that excimers generate gas, according to circumstances also allow not generate the gas of excimers, for example neon mixing such as (Ne).

And then excimers generate gas, can enclose with the pressure in the scope of 13.3～40kPa.Along with the increase of pressure, lamp efficient rises, thereby ultraviolet ray output increases.But lamp efficient can show saturated tendency with respect to the increase of pressure.

As an embodiment of this form, will generate gas by the excimers that xenon constitutes and enclose with the pressure of 20kPa.

About internal electrode 2

Internal electrode 2, the mode relative with outer electrode OE sets with the wall that clips airtight container 1.But internal electrode 2 also can be form any that is encapsulated in the form in the airtight container and for example is provided in the outside of discharge space 1a in the inboard of airtight container 1 in the mode of exposing to discharge space 1a.Under the situation of the latter's form, for example airtight container 1 is 2 layers of tubular construction, the outer surface of the wall of the tubular of internal electrode 2 on the central shaft side that is formed on airtight container 1 and setting.Thereby in the present invention, so-called internal electrode 2 is the meanings of electrode that relatively are provided in the inboard of airtight container 1 under the situation of seeing airtight container 1 from the outside.Moreover, in Fig. 1, Fig. 3, Fig. 4 and Fig. 5, omitted the diagram of internal electrode 2.

As can understanding from above explanation, in the present invention, internal electrode 2, so long as in the inside of airtight container 1, with the roughly total length that spreads all over its tube axial direction is the electrode that the mode that integrally causes dielectric barrier discharge of the effective length of lamp sets, be preferably electrode long on tube axial direction and get final product, all the other are that any structure can.Allow to select for example bar-shaped, tabular, latticed known various structures such as (mesh shapes) to use according to requiring arbitrarily.In addition, the material that constitutes internal electrode 2 does not limit especially, but can use for example metal of fire resistances such as tungsten, molybdenum and nickel.Because tungsten is relative with the nickel work function less, easy ejected electron, therefore very effective aspect making that starting voltage reduces.

Secondly, the preferred construction example to internal electrode shown in Figure 22 describes.That is, this internal electrode 2 is encapsulated in the airtight container 1, is the direction of principal axis decentralized configuration along airtight container 1 with a plurality of independently latticed part 2b, and the latticed of structure that free unoccupied place sets arranged at interval respectively around.In addition, a plurality of latticed part 2b become respectively via linking portion 2a and link and incorporate structure, are set with the state of the inside that is inserted into airtight container 1.By using such internal electrode 2, can relatively increase ultraviolet generating capacity.Moreover latticed part 2b both can be continuous with respect to Zhou Fangxiang, also can disconnect.

Thereby, in the present invention, becoming under the latticed situation at internal electrode 2, this latticed part 2b for example specifically allows to become independently ring-type or interconnective helical form or coiled type or mesh-shape etc. respectively respectively.

If narrate preferred construction example shown in Figure 2 in more detail, then a plurality of latticed part 2b, be constituted as by a plurality of linking portion 2a bindings and connection and certain intervals configuration conductively, and linking portion 2a is along the extension of central axis of airtight container 1 to stipulate.Therefore, because the integral body of internal electrode 2 is the possess a plurality of annular support body duplicating of (リ Application グア Application カ one) (being equivalent to latticed part) with the such form of filament of based on halogen bulb, therefore can continue to use the manufacturing equipment that duplicates with based on halogen bulb when making internal electrode 2, it is easy that the manufacturing of internal electrode 2 becomes.But, if desired, also can adopt the central shaft that departs from airtight container 1 and linking portion 2a directly is connected structure on the part of ring of latticed part 2b.In addition, linking portion 2a both can be the linearity of single line, also can become the internal diameter with respect to airtight container 1 in addition, and external diameter is 20% or coiled type below it.And then, preferably linking portion 2a is encapsulated with the tension force that appropriate value is arranged in effect on the central axis direction, the state that is preferably 2kg or the tension force more than it.Tension force is worked, then more suitable as if internal electrode 2 being formed coiled type.But,, the tension force of central axis direction is acted on the linking portion 2a even if be not coiled type.No matter what shape linking portion 2a is, by with its both end sides sealing and fixing on the flat sealing 1b at the both ends that are formed on airtight container 1, just be easy to make tension force to act on the linking portion 2a.But, if desired, also can by with the one end with linking portion 2a only sealing and fixing on a side of airtight container 1, and the other end is passed through proper device, for example the Support Level of filament is fixed on the sealing 1b, thereby tension force is acted on the linking portion 2a.

Relative therewith, become under helical form or the cancellous situation at latticed part 2b, the part of this spiral or mesh also works as linking portion 2a, and a plurality of latticed part 2b mechanically and conductively link mutually.But,, can give internal electrode 2 with better conformality by being welded on by the linking portion 2a that single or multiple clava constitutes on helical form or the cancellous latticed part 2b.If perhaps replace claval linking portion 2a ratchet (volume frame) is installed, and is utilized this ratchet to form helical form or cancellous latticed part 2b, then conformality can improve.Moreover ratchet can be any of insulating properties and conductivity.With respect to latticed part 2b, if adopt above-mentioned any structure, all can give the stability of the integral body of internal electrode 2, thereby make its processing become easy with shape.In addition, internal electrode 2 is according to constituting with the long-pending pP mode within the limits prescribed that excimers described later generate the pressure p (Pa) of gas with respect to axial spacing P (m) of its latticed part 2b.And then, even if thereby press in the inclosure that the excimers that raise as described later generate gas and to make under the situation that lamp efficient improves, also preferably the distance between the internal face of latticed part 2b and airtight container 1 is located at 3mm or below it.As long as above-mentioned distance is at 3mm or below it, just discharge can be kept under certain conditions that voltage is suppressed at 1000V or below it.

Secondly, supporting construction and electric power-feeding structure under the situation of the inside that internal electrode 2 is provided in the airtight container of being made by quartz glass 1 are described.Internal electrode 2 sealing and fixing in airtight container 1 time, as shown in Figure 2, can adopted the sealing and fixing structure of having used sealing and fixing metal forming 1b1.Promptly, wait the end 2c of the linearity that the two ends with the linking portion 2a of stretching internal electrode 2 form to be connected on the sealing and fixing metal forming 1b1 by welding, then after internal electrode 2 is inserted airtight container 1, the quartz glass of heated end portion, then under the state that makes it to soften, from the top compression seal of sealing and fixing metal forming 1b1.So, thus forming sealing 1b in the end of airtight container 1 is supported on internal electrode 2 on the position of regulation.

An embodiment as this form, internal electrode 2 used the tension force of about 2kg and be erected in the discharge space 1a of airtight container 1, wherein said internal electrode 2 be by the tungsten line that with line directly is 0.26mm wind up the external diameter that forms be the coil of 1.2mm form linking portion 2a, by be installed in the internal electrode that annular support body on the linking portion 2a has formed latticed part 2b with 15mm certain intervals at interval.

Power supply

3A, 3B

Power supply

3A, 3B are the parts that are configured for the feeder ear of the necessary lamp current of internal electrode 2 feeding medium barrier discharges.Moreover, can be according to expectation, with a side's of electrode 2 internally end or two sides' end or and middle simultaneously concurrently the mode of power supply set the power supply of any amount.That is, under the situation of an only end of electrode power supply internally, as long as at least only on this end, set power supply.In the power supply of two ends, as long as a pair of

power supply

3A, 3B are provided in dispersedly the both ends of airtight container 1.In addition, when the pars intermedia of airtight container 1 is also powered, also can set the power supply of desired number at the pars intermedia of airtight container 1.

In addition,

power supply

3A, 3B both can form as one with internal electrode 2 by internal electrode 2 is prolonged, and also the parts of preparing as monomer can be connected on the internal electrode 2 by methods such as welding, riveted joints.And then

power supply

3A, 3B allow to become multiple shapes such as wire, bar-shaped, button-like and pin shape.Moreover, also can only give either party power supply of

power supply

3A, 3B, and make the opposing party be in the electric state of unsettled (suspension) in advance.

An embodiment as this form,

form power supply

3A, 3B bar-shaped respectively, its the inner is welded on the molybdenum foil 1b1 in the sealing 1b at the two ends that are embedded in airtight container 1, its outer end is outstanding to the outside along tubular axis from the sealing 1b at the two ends that are formed on airtight container 1.In addition,

power supply

3A, 3B, its outer end is connected on the supply lines 4 by riveted joint respectively in the inside of support portion 5 described later.Moreover supply lines 4 is connected on the output of high-frequency lighting circuit HFI described later.

Support portion 5

Support portion 5 as shown in Figure 3, possesses lid 5a, banding ring 5b and the hold-down arm 5c of band round-ended cylinder shape.Lid 5a surrounds the end of luminous tube LT.And, have the inserting hole 5a1 of supply lines 4 in the bottom.Banding ring 5b is provided in the openend of lid 5a, by luminous tube LT is supported from its outside banding in the end of airtight container 1.Hold-down arm 5c from the side of lid 5a to figure the top outstanding, under the state on the centering arm shown in Figure 1 (centering position with arm/registration arm) 8 luminous tube LT is being installed on the standing part that figure do not show thereby touch at the upper surface of lid 5a.Moreover centering arm 8 extends to the end direction of airtight container 1 from the tube axial direction two ends of outer electrode OE, thus the installation site of regulation luminous tube LT and then airtight container 1.Thereby centering arm 8 is cooperated with support portion 5 and is constituted luminous tube supporting mechanism S2, and forms the clearance G of prescribed limit between the outer surface of airtight container 1 and outer electrode OE.Moreover, its detailed content is narrated in the back.

＜about outer electrode OE 〉

Outer electrode OE with at least on the part of the effective length of dielectric barrier discharge lamp EXL, keeps predetermined gap G ground to set along the mode of its tube axial direction extension on the outer surface of airtight container 1.And, outer electrode OE, across at least one wall of airtight container 1 and relative, and play a role with cooperating of internal electrode 2, make to cause that in the discharge space 1a of airtight container 1 wall with airtight container 1 is the dielectric barrier discharge of medium by outer electrode OE with internal electrode 2.

In addition, in the present invention, outer electrode OE possesses the structure of rigidity and possesses any of flexual structure.Under the situation of rigidity, allow by conductive metal make, thermal capacity is bigger, become block, the such outer electrode OE of diagram.Thereby, according to expectation, the parts that in the past were called lamp body directly can be used as outer electrode.In this case, the such structure of outer electrode OE that need not adopt between lamp body and airtight container 1 clamping to constitute by the thin plate of employed aluminum in the past.But,, also allow the outer electrode OE of filling thin plate between lamp body and luminous tube LT according to hope as long as externally form predetermined gap G between electrode OE and the airtight container 1.In addition, for the area part of the generation dielectric barrier discharge of coolant seal container 1, externally electrode OE goes up the additional cooling device 9 that sets.In this case, though cooling device 9 can be an any structure, be preferably in outer electrode OE and upward add the cooling water channel that is arranged on cold-producing mediums such as internal circulation water.In form shown in Figure 5, cooling device 9 is made of the cooling water channel of tubulose, and by constituting on the two sides that are welded on outer electrode OE.

And then outer electrode OE can become continuous planar or latticed any state.Moreover so-called latticed, what say is to become mesh-shape, punching shape, clathrate etc.

Moreover outer electrode OE preferably possesses the curved surface with the recessed song of mode of the part of the certain degree of the periphery of surrounding airtight container 1.The curved surface of outer electrode OE, can about 60～300 ° of the periphery of airtight container 1, be preferably 90～240 °, be preferably and select the angular range that surrounds in 120～180 ° the scope.Thereby, not the setting outer electrode OE of airtight container 1 and the part exposed to the outside, just form to deduct the resulting angular range of encirclement angle from 360 °, from above-mentioned exposed portions serve to outside and spread all over along the long distance ground irradiation of the tube axial direction of luminous tube LT and seen through the ultraviolet ray of the wall of airtight container 1, thereby be used in various purposes.And, when outer electrode OE surrounds the angular range of a part of airtight container 1, the region generating dielectric barrier discharge that externally electrode OE is relative only, remaining zone of airtight container 1 plays a role as ultraviolet penetrating window.If outer electrode OE surrounds in the scope of angular range about 90～240 ° of airtight container 1, then by dielectric barrier discharge, the ultraviolet ray that can radiate relative more amount, and can be with the ultraviolet ray that comparatively ideal angular illumination was radiated.In addition, if the encirclement scope of outer electrode OE in 120～180 ° scope, then except that above-mentioned, the assembling between outer electrode OE and the airtight container 1 and the making of decomposition and outer electrode all become easy.Moreover the above-mentioned curved surface of outer electrode OE can be a ultraviolet reflection, and is also can right and wrong reflexive.

Moreover outer electrode OE can be with respect to airtight container 1 form and the form that can not load and unload any removably.And, outer electrode OE have with internal electrode 2 roughly over against the length of such tube axial direction.So, can produce dielectric barrier discharge along the tube axial direction of airtight container 1.

Moreover, the pars intermedia of the tube axial direction of electrode OE externally, for example central portion can form embeded slot 6 and the suction hole 7 of taking in liner S1 described later.Embeded slot 6 as Fig. 4 and shown in Figure 5, forms in the mode with respect to the tubular axis quadrature, to the lower surface opening of outer electrode OE.Suction hole 7 forms across embeded slot 6, and simultaneously with outer electrode OE up/down perforation.

As an embodiment of this form, outer electrode OE, thus the arc-shaped surface that utilizes lower surface to form spill becomes the aluminium block of water guide tubulose (watt shape of spill) and makes.

＜form device S about the gap 〉

The gap forms device S, be to spread all on the whole zone of tube axial direction of the effective length at least that becomes lamp of airtight container 1, between the outer surface and outer electrode OE of airtight container 1, the device of clearance G of the condition of mathematical expression 0＜G≤1.0 (mm of unit) is satisfied in formation, but in the present invention, concrete structure is not limited especially.Moreover, in this form, constitute the gap by liner S1 and luminous tube supporting mechanism S2 and form device S.

To clearance G with the reasons are as follows that the mode of the condition that satisfies mathematical expression 0＜G≤1.0 (mm of unit) limits.That is,,, and produce undesirable particle then owing to outer surface that can produce airtight container 1 and the friction between the outer electrode OE (wiping moving) if clearance G is 0mm, therefore inadvisable.On the contrary, if clearance G surpasses 1.0mm, then owing to the electrostatic capacitance that externally forms between electrode OE and the discharge space becomes too small, thus under rational voltage application, be difficult to produce stable dielectric barrier discharge, therefore inadvisable.In addition, produce dielectric barrier discharge even if apply very high voltage, the reduction of ultraviolet generation also can be excessive.Therefore, cause the cost of lamp circuit and ultraviolet lamp to increase.Relative therewith, as long as clearance G is in satisfying the scope of above-mentioned mathematical expression, then in the generation of the particle that the outer surface and the friction between the outer electrode OE that prevent because of airtight container 1 cause, also can guarantee desired ultraviolet generation.

In addition, clearance G is preferably the scope of the condition that satisfies mathematical expression 0.05≤G≤0.5 (mm of unit).That is, if clearance G at 0.05mm or more than it, then easily forms continuous certain clearance along the tube axial direction of airtight container 1.Relative therewith, if the gap less than 0.05mm, then exists by following tendency, that is, because the bending slightly of the airtight container 1 that on making, is difficult to avoid, so just become very difficult along the formation of the certain clearance G of tube axial direction.In addition, also because if clearance G will increase with next ultraviolet generation fully at 0.5mm or its.

And then clearance G preferably forms according to the space.But, allow according to hope, bring the influence of not expected can not for ultraviolet Illumination Distribution, and can not produce in the scope of particle along the tube axial direction on the surface of the direction of illumination of airtight container 1, form by the filling insulator.

Moreover, for outer electrode OE and airtight container 1 is fixing each other, can be on the part that is positioned at the end side that departs from out from the part of the effective length of lamp, the both ends of outer electrode OE and airtight container 1 are interfixed.For this is fixed, the part of the end of outer electrode OE contacts on the outer surface of airtight container 1, and this is allowed to according to following reason.That is,, but, therefore do not have problem owing to be part beyond the effective length of lamp even if because of the influence along the ultraviolet Illumination Distribution of tube axial direction with respect to the surface of the irradiation side of dielectric barrier discharge lamp has appearred in above-mentioned contact.

Liner S1, it is pars intermedia in the effective length of dielectric barrier discharge lamp EXL, for example at central portion, for the tube axial direction of the clearance G between airtight container 1 and the outer electrode OE along airtight container 1 remained in the aforementioned prescribed limit, add to be provided with according to hope.And, can utilize any formation of conductive material and megohmite insulant.As conductive material, stainless steel (SUS) is so because wear-resistant more suitable.In addition, as the insulating properties material, owing to quartz glass, pottery etc. are similarly wear-resistant, so more suitable.In order to stipulate the size of the clearance G between outer electrode OE and the airtight container 1 on demand, liner S1 is by the chimeric for example curved face part of airtight container 1 side of outer electrode OE that is installed in.But, be under the situation about forming at liner S1 by conductive materials such as SUS, should be so that the width dimensions of the tube axial direction of liner S1, be that wall thickness forms at 3mm or the mode below it.So, even if with state that outer electrode OE conductivity ground is connected under set liner S1, can not make the Illumination Distribution of tube axial direction change to undesirable degree because of the stronger dielectric barrier discharge of generation around liner S1 yet.Moreover this situation was confirmed by experiment.

In addition, for the position of airtight container 1 is fixed in accordance with regulations with respect to outer electrode OE, thereby liner S1 preferably possesses and the chimeric concave shaped portion r with its maintenance of the periphery of airtight container 1.In order to realize this point, liner S1 can be made of following such parts, described parts be by the cutting of the part of sheet material is formed can chimeric airtight container 1 concave shaped portion r, or the metal parts by crooked strip forms the parts of concave shaped portion that can chimeric airtight container 1.Before use under the situation of the liner S1 of person's structure, externally form the embeded slot 6 with the tube axial direction quadrature on the curvature portion of the recessed song of electrode OE, be installed in this embeded slot 6 liner S1 is chimeric.In addition, be under the latter's the situation of structure at liner S1, can stick on by liner S1 on the curved surface of recessed song of outer electrode OE bending, with this liner S1 is installed.The position of facing mutually with airtight container 1 of liner S1, the outer surface that allows to constitute with airtight container 1 contacts, and perhaps forms a little gap and separates.

And then, liner S1, it sets quantity and does not limit especially, but should be the least possible quantity in the scope of the position that can limit airtight container 1 on demand.For example, as the reference value, as long as according to the interval about 500～800mm, make airtight container 1 comprise that the mode of fixing and remaining on the outer electrode OE because of the resulting maintenance of liner S1 constitutes, then the clearance G between outer electrode OE and the airtight container 1 is maintained and just becomes reliable in the prescribed limit.

Lamp supporting mechanism S2 is made of aforementioned a pair of

support portion

5,5 and centering arm 8.Centering arm 8, its two ends from the tube axial direction of outer electrode OE are extended a pair of highlightedly, and a pair of

support portion

5,5 is touched at its leading section.Its result, the both ends of airtight container 1 form on the both ends that aforementioned gap G simultaneously is supported on outer electrode OE via

support portion

5,5 and centering arm 8 one sides.

As an embodiment of this form, the clearance G between the outer surface of airtight container 1 and the outer electrode OE forms device S by the gap and is set to 0.35 ± 0.15mm.

＜about getter device AA 〉

Getter device AA, as Fig. 4 and shown in Figure 5, the exhaust passage (pipeline) that is not shown by suction hole 7 and figure constitutes.Owing to the embeded slot 6 of suction hole 7 across outer electrode OE forms, so the openend of lower end is separated to form in the gap both-side opening of the liner S1 of device S.Therefore, the air of the both sides of liner S1 is air-breathing well by suction hole 7.And, by in the suction hole 7 and, further discharged by outside to ultraviolet lamp by the exhaust passage by the air of discharging to the outside of outer electrode OE.Thereby, even if thereby hypothesis liner S1 and airtight container 1 friction are ground off liner S1, thus produce the particle of particulate and trace, and particle also can promptly be discharged to the outside by getter device AA with ambient air.

＜high-frequency lighting circuit HFI 〉

High-frequency lighting circuit HFI applies high frequency voltage between the internal electrode 2 of dielectric barrier discharge lamp EXL and outer electrode OE, thereby dielectric barrier discharge lamp EXL is loaded and makes it to light a lamp.In addition, high-frequency lighting circuit HFI constitutes based on shunt chopper (イ Application バ one ), its high frequency output, respectively its hot side is applied on the internal electrode 2 via a pair of power supply 3A, the 3B of the luminous tube LT among the dielectric barrier discharge lamp EXL through

supply lines

4,4 again, in addition electronegative potential (ground connection) side is applied on the outer electrode OE.

The action of lighting a lamp of＜dielectric barrier discharge lamp EXL 〉

Dielectric barrier discharge lamp EXL, owing to be connected on the high frequency output of high-frequency lighting circuit HFI as described above, therefore when input power supply that the figure of connection high-frequency lighting circuit HFI does not show, the output of the high frequency that is produced can be applied in internal electrode 2 and across the wall of airtight container 1 and between the outer electrode OE on the other side.Its result produces dielectric barrier discharge in the inside of airtight container 1.By this dielectric barrier discharge, being radiated with 172nm by the excimers of xenon is the vacuum-ultraviolet light of centre wavelength.Owing to derived to the outside after the wall of vacuum ultraviolet (VUV) light transmission airtight container 1, therefore can come it is used according to different separately purposes.

Below, the 2nd to the 4th form that is used to implement dielectric barrier discharge lamp of the present invention is described.In each form, the part identical with Fig. 1 to Fig. 6 is marked with identical label and omits explanation.

The 2nd form

Fig. 6 is a side cutaway view of showing the 2nd form be used to implement dielectric barrier discharge lamp of the present invention.This form is the luminous tube LT difference of dielectric barrier discharge lamp EXL.

That is, luminous tube LT, its airtight container 1 ' is 2 layers of tubular construction, the discharge space 1a ' that forms in inside becomes cylindric.Therefore, airtight container 1 ', its cross section becomes ring-type, can be regarded as the such shape of cylindric breaded fish stick (bamboo Wheels) that becomes in the food as a whole.

In addition, internal electrode 2 becomes cylindric and disposes with the intimate of airtight container 1 ' the interior side of airtight container 1 ' with being connected.And, utilize the sheet material or the grid material that constitute by conductive material to form.

Outer electrode OE becomes with the same structure of the 1st form and with respect to the configuration of airtight container 1.

The 3rd form

Fig. 7 to Figure 10 has showed the 3rd form that is used to implement dielectric barrier discharge lamp of the present invention, Fig. 7 is whole front view, Fig. 8 is the part front view at both ends, Fig. 9 is the profile with respect to the direction of tubular axis quadrature of the pars intermedia of tube axial direction, and Figure 10 sees the part end view that the lamp supporting mechanism is seen from the direction of arrow of Fig. 8.This form mainly is different with the 1st form with this point of coming the mode of Supporting Media impedance discharge lamp EXL integral body to constitute by suspention (suspension) outer electrode OE.

That is, come the both ends of supports outer electrode OE, simultaneously outer electrode OE and

suspension arm

11,11 conductings by a pair of

suspension arm

11,11 of the conductivity that is the word of falling L sigmoid.

Outer electrode OE, the cooling device 9 that constitutes by cooling water channel by direct formation such as for example extrusion moldings in the inside of its aluminium block.Moreover outer electrode OE is connected with earthing potential via

suspension arm

11,11.

Suspension arm 11, bottom in the drawings, supports outer electrode OE and luminous tube LT, and then support airtight container 1, upper end in the drawings is fixed on the earthing potential part such as ultraviolet lamp.In addition, suspension arm 11 especially as shown in Figure 8, is mounted with to insulation the power supply terminal 12 that is connected with internal electrode 2.

Power supply terminal 12, the output of the hot side of the high-frequency lighting circuit that has not shown with figure via having omitted illustrated insulation bonding conductor is connected.Moreover the output of the low potential side of high-frequency lighting circuit is connected on the earthing potential.In addition, power supply terminal 12 is via conductivity supporting bracket 13 and supply lines 4 and be connected on the internal electrode 2.

Centering arm 8 is fixed on by screw 8a on the end face of outer electrode OE.And, as Fig. 8 and shown in Figure 10, have the contacting part 8b that touches for support portion 5.

In Fig. 8, the support portion 5 on right side except lid 5a, banding ring 5b, hold-down arm 5c, also has insulator 5d, relay plate 5e and flat spring 5f.Insulator 5d is fixed on the hold-down arm 5c.Relay plate 5e is fixed on the insulator 5d to become the mode of insulation relation with hold-down arm 5c.Flat spring 5f, with mechanical supporting relation between relay plate 5e and conductivity supporting bracket 13.

The support portion 5 in the left side of Fig. 8, hold-down arm 5c directly is fixed on the flat spring 5f.Moreover, the power supply 3A in the left side that is connected with internal electrode 2 shown in Figure 2, not being formed by connecting with high-frequency power supply circuit is electric unsettled state.

And, luminous tube LT and then airtight container 1, the support portion 5 by above explanation is installed on the suspension arm 11.Under this state, luminous tube LT, and then airtight container 1 are pushed to outer electrode OE side elastic force ground by the elastic reaction of flat spring 5f, thereby touch with centering arm 8 and supported.Its result, the clearance G between the outer surface of airtight container 1 and the outer electrode OE satisfies aforementioned defined terms.Moreover, in Fig. 7 and Fig. 8, omitted the diagram of internal electrode 2.

Figure 11 and Figure 12 have showed the pipe face illumination when the 3rd form that is used for implementing dielectric barrier discharge lamp of the present invention changes clearance G, and Figure 11 is the table that has write down determination data, and Figure 12 is a curve chart.That is, be the chart of making according in the resulting data of measuring under the central portion of luminous tube LT when clearance G is changed by every 0.1mm from 0 to 0.6mm of pipe face illumination.Moreover in Figure 12, transverse axis is represented clearance G (mm), and the longitudinal axis represents with the non-existent state in gap, pipe face illumination when being gap 0mm to be 100% relative pipe face illumination (%).In addition, the condition of lighting a lamp of dielectric barrier discharge lamp EXL is modulating voltage 173.2V, lamp current 2.65A, lamp electric power 459W, and this fixes.

As understandable from Figure 11 and Figure 12, along with clearance G becomes big, pipe face illumination reduces, if clearance G at 0.5mm or below it, the pipe face illumination in the time of with respect to gap 0mm will be 80% or more than it.

The 4th form

Figure 13 and Figure 14 have showed the 4th form that is used to implement dielectric barrier discharge lamp of the present invention, and Figure 13 is the major part side cutaway view, and Figure 14 is the major part profile of the tube axial direction of airtight container.This form, in the 3rd form, additional be provided with on liner S1 and the getter device AA this point different.

That is, liner S1 is fixing by pawl (retainer) 15,15 in the mode that the bottom can not be fallen down.

Getter device AA also possesses exhaust collecting box 16, exhaust passage (pipeline) 17 except that suction hole 7.Exhaust collecting box 16 is provided in the upper surface among the figure of outer electrode OE, makes the atmosphere, the set of for example air that suck from suction hole 7, discharges from the exhaust outlet 16a that is formed on its top simultaneously.Exhaust passage 17, cardinal extremity is connected on the exhaust outlet 16a by pipe joint (coupling), and front end extends the exhaust position that does not show from the figure of dielectric barrier discharge lamp EXL separation.

Figure 15 to Figure 18 has showed that cleaning (washing) as the ultraviolet ray of a form that is used to implement ultraviolet lamp of the present invention installs, Figure 15 is an elevation cross-sectional view, Figure 16 is a upward view, Figure 17 is the profile along the XVII-XVII ' line of Figure 16, and Figure 18 is the circuit diagram of high-frequency lighting circuit.In each figure, the part identical with Fig. 1 to Fig. 5 is marked with identical label and omits explanation.Ultraviolet lamp UVW possesses ultraviolet lamp body 21, high-frequency lighting circuit 22 and a plurality of dielectric barrier discharge lamp EXL.

In the present invention, ultraviolet lamp UVW means ultraviolet all devices that utilization produces from dielectric barrier discharge lamp EXL.For example, semiconductor stepping exposure device (ステ Star パ one), light clean (washing) device, photo-hardening device and light drying device etc.In addition, ultraviolet lamp body 22 constitutes by removed the remaining part of dielectric barrier discharge lamp EXL and high-frequency lighting circuit 22 backs from ultraviolet lamp UVW.

Dielectric barrier discharge lamp EXL can use 1 root (in form shown in Figure 17, with many disposed adjacent) at the most as required.

High-frequency lighting circuit 22 upward makes it to light a lamp thereby the high frequency voltage that produces is applied to dielectric barrier discharge lamp EXL.Therefore, high-frequency lighting circuit 22 comprises the high frequency generation device, provides its needed High frequency power of lighting a lamp thereby produce high frequency voltage to dielectric barrier discharge lamp.Moreover, for high frequency produce 10kHz or more than it, be preferably the frequency of 100kHz～2MHz.And then high-frequency lighting circuit 22 applies about 3000V or its following, as to be preferably 1000～2500V high frequency voltage when being preferably in stable the lighting a lamp of dielectric barrier discharge lamp EXL.And then the starting voltage of dielectric barrier discharge lamp EXL is 2～6.0kVp-p, is elevated to starting voltage by the second open circuit voltage with high-frequency lighting circuit 22, can make its starting at an easy rate.In this case, if constitute based on shunt chopper as the high frequency generation device, then be easy to obtain higher step-up ratio, and, even if for example change because of the change outer electrode OE that causes dielectric barrier discharge lamp EXL and the electrostatic capacitance between the internal electrode 2 of the crimped status of outer electrode OE, also can not influence high frequency output, so the design of high-frequency lighting circuit 22 just becomes easily, so very suitable.And if the high frequency output waveform is sinusoidal wave, then the generation of noise can tail off when dielectric barrier discharge lamp EXL is lit a lamp.

But, as required, also can use in the lump with rising of separating mutually of high-frequency lighting circuit 22 and employ the pulse voltage generation device.Moreover, though preferably dielectric barrier discharge lamp EXL is configured on the mutually close position with high-frequency lighting circuit 22, as required, the also configurable position that is being separated from each other.Dielectric barrier discharge lamp EXL is different with general discharge lamp, there is no need the current-limiting apparatus that is connected in series.But for lamp current is adjusted to setting, the impedance of the appropriate value that can be connected in series is as required lit a lamp.In addition, when dielectric barrier discharge lamp EXL was linked to each other with high-frequency lighting circuit 22, if with outer electrode OE ground connection, then the noise generation can tail off.

High-frequency lighting circuit 22 so long as how getting final product of voltage pulse output need not manage remaining structure, but for example by using the inverter of output square wave, can obtain the pulse of square wave.But, also can be to use the inverter of sine wave output to obtain the structure of sinusoidal wave pulse.

And, in the present invention, owing to can avoid coming from the generation of the black attachment that the friction because of outer electrode OE and airtight container 1 of dielectric barrier discharge lamp EXL produces, so need not between shone thing and dielectric barrier discharge lamp EXL, set the light inlet window of making by synthetic quartz glass.Therefore, the ultraviolet loss that causes because of light inlet window disappears, and, can shorten irradiation distance, so when can improving ultraviolet illumination, can realize that also cost reduces with respect to shone thing.

, ultraviolet lamp body 21 becomes the case shape as a whole, and is inner by being divided into ultraviolet irradiation chamber 21a and power supply room 21b up and down.Ultraviolet irradiation chamber 21a and power supply room 21b are constituted as an end and can pass through hinge (hinge) 21c switch.

In the 21a of ultraviolet irradiation chamber, dispose a plurality of dielectric barrier discharge lamp EXL as described later side by side.A plurality of dielectric barrier discharge lamp EXL, its outer electrode forms as single piece.Thereby the curved surface of the recessed song of outer electrode OE is with adjacent that state disposes a plurality of side by side.In addition, ultraviolet irradiation chamber 21a is provided in the top of conveying device of the shone thing of cleaning device regularly, and open underneath, thus shone thing (figure does not show) the irradiation vacuum-ultraviolet light that passes through under below with extremely near position.Moreover, in Figure 16, draw the position that oblique line is arranged and represent effectively irradiation area of ultraviolet ray.In addition, though omitted diagram, at the upper surface of the outer electrode of a plurality of dielectric barrier discharge lamp EXL, be equipped with the exhaust collecting box that is communicated with the suction hole of separately dielectric barrier discharge lamp EXL, and connecting blast pipe via this exhaust collecting box.And the air of liner S1 periphery that constitutes via blast pipe the airtight container 1 that sucks from suction hole is by to outside exhaust.

Power supply room 21b, portion has taken in high-frequency lighting circuit 22 and has omitted illustrated control circuit within it, and can be pivot top rotation in Figure 15 with hinge 21c.Moreover 21b1 is used for the handle (handle) of controlling when the rotation of power supply room 21b, and 21b2 is the handle when carrying ultraviolet lamp body 21 or power supply room 21b, and 21b3 is the protective device (guard shield) of power supply wiring.

High-frequency lighting circuit 22 is accommodated in the power supply room 21b, and the power supply that the protective device 21b3 via power supply wiring is imported in the power supply room 21b carries out conversion and produces high frequency voltage, then to each power supply of a plurality of dielectric barrier discharge lamp EXL.

In addition, high-frequency lighting circuit 22 is a circuit structure shown in Figure 180.Promptly, high-frequency lighting circuit 22 constitutes based on inductance L, pair of switches element Q1, Q2, output transformer OT, resonating capacitor C1 and control circuit CC, possesses the shape inverter in parallel of the sub-t1 of direct-flow input end, t2, high frequency lead-out terminal t3, t4.The DC power supply that the sub-t1 of direct-flow input end, t2 are variable with output dc voltage by boost chopper (figure does not show) is connected.High frequency lead-out terminal t3, t4 are connected on the dielectric barrier discharge lamp.

In addition, the sub-t1 of direct-flow input end in series is connected via inductance L on the mid point of 1 coil pw1 of output transformer OT.The sub-t2 of direct-flow input end is connected on the tie point of pair of switches element Q1, Q2.Pair of switches element Q1, Q2 are connected in series, and are connected in parallel with respect to 1 coil pw1, pw2, the pw3 of output transformer OT.Output transformer OT possesses 3 groups of 1 coil pw1, pw2, pw3,3 groups of 2 coil sw1, sw2, sw3, excitation coil (De ライバ rolls up Line) fw and magnetic test coil dw.And 1 coil pw1, pw2, pw3 and 2 coil sw1, sw2, sw3 are paired.In addition, 1 coil pw1, pw2, pw3 connection parallel with one another.Relative therewith, 2 times coil sw1, sw2, sw3 are connected in series mutually, and its two ends are connected on high frequency lead-out terminal t3, the t4.Resonating capacitor C1 is connected in parallel on 1 coil pw1, pw2, the pw3.Excitation coil fw and magnetic test coil dw are connected on the control circuit CC described later.

Control circuit CC possesses exciting circuit DC and protective circuit PC.Exciting circuit DC, its input is connected on the excitation coil fw, sends pumping signal and offers switch element Q1, Q2.Thus, shunt chopper self-oscillation.Protective circuit PC, its input is connected on the magnetic test coil dw, if detect the starting of dielectric barrier discharge lamp EXL, just reduces high-frequency output voltage by for example controlling DC power supply etc.

And high-frequency lighting circuit 22 is lit a lamp dielectric barrier discharge lamp EXL starting by possessing above-mentioned circuit structure.And; can be by the detection voltage on the magnetic test coil dw of the present output transformer OT of protective circuit PC monitoring form; if high-frequency output voltage rises after starting, thereby then make its reduction make the protection action, in order to avoid the voltage that is applied on switch element Q1, the Q2 is withstand voltage above it.In addition, can cooperate the degree of high frequency output to regulate from the pumping signal of exciting circuit DC output.

, a plurality of medium barrier discharge light devices unit EX, with state configuration adjacent one another are in the 21a of ultraviolet irradiation chamber.But for the easy and maintenance of making, each is removably for required dielectric barrier discharge lamp EXL.

In addition, in order to make the externally cooling water channel circulation of electrode OE of cooling water, be combined with the pipe arrangement that is used to provide cooling water at its inflow entrance, and be combined with the pipe arrangement that is used for draining at flow export.

Claims

1. dielectric barrier discharge lamp is characterized in that possessing: the airtight container that is elongated tubular product such that is made of the material of ultraviolet permeability;

The excimers of being enclosed in the airtight container generate gas;

Produce the internal electrode that the mode of dielectric barrier discharge sets endlong with the cardinal principle that in airtight container, spreads all over its tube axial direction;

Be provided in the outer surface and the outer electrode of part of the effective length of lamp at least of airtight container to play a role by the mode that in airtight container, produces dielectric barrier discharge with cooperating of internal electrode with the state that leaves across space G along its tube axial direction; And

Between airtight container and outer electrode, form the space formation device of the space G of the condition that satisfies mathematical expression 0mm＜G≤1.0mm along the tube axial direction of airtight container.

2. a ultraviolet lamp is characterized in that possessing: the dielectric barrier discharge lamp that claim 1 is put down in writing;

Be equipped with the ultraviolet lamp body of dielectric barrier discharge lamp;

The high-frequency lighting circuit that dielectric barrier discharge lamp is lit a lamp.