543074 A7 B7543074 A7 B7
五、發明説明（P 〔發明所屬之技術領域〕 本發明係有關放電燈及使用該放電燈之紫外線照射裝 (請先閲讀背面之注意事項再填寫本頁) 置。 〔習知技術〕 做爲發出紫外線之紫外線燈，揭示有種種之（電）介 質障壁放電燈，而如此之介質障壁（dielectric barrier)放 電燈係封入會生成（受激）準分子之放電介體（準分子生 成氣體）於氣密空間，且配設成對之電極於放電空間之內 側和外側，而施加高電壓於該等電極間來放電者。由該放 電，將會從放電介體發光成（放射）紫外線。 圖9係顯示習知之介質障壁放電燈之一例子的正面圖 。於該圖9中，101爲圓筒形之氣密容器，102係具 備導電性之外部電極，1 0 3爲具備導電性之內部電極， 1 0 4爲封閉部，1 0 5爲高頻產生電路。而在於氣密容 器1 0 1內部，封入有做爲準分子生成氣體的氙氣。 經濟部智慧財產局員工消費合作社印製 氣密容器1 0 1係由可透射紫外線之（電）介體材料 的例如石英等所形成。 外部電極1 0 2係纏繞成線圈狀來安裝於氣密容器 1 0 1的外周（圍）。 內部電極1 0 3係具有例如線圈狀、棒狀、線狀、板 狀等形狀的導電性構件，而連接於被固定於密封部1 〇 4 之引出線1 0 6。 高頻產生電路1 0 5係施加電壓於外部電極1 0 2和 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） - 4 _ 543074 A7 B7 五、發明説明（j 內部電極1 0 3之間，以供應所需要之電能於（電）介質 障壁放電。 (請先閱讀背面之注意事項再填寫本頁} 在於如此構造之介質障壁放電燈’當由局頻產生電路 1 0 5施加電壓於外部電極1 〇 2和內部電極1 〇 3間時 ，就會產生介質障壁放電於該等外部電極1 0 2和內部電 極1 0 3間。且由該介質障壁放電而使封入於氣密容器 1 0 1內部之氙等之準分子生成氣會暫時性地結合成分子 狀態（受激準分子狀態）。而從該分子狀態當要恢復成原 子之基性（正常）狀態時，會發光再吸收少之紫外線。如 此之狀況爲介質障壁放電燈之發光原理。 〔發明擬解決之課題〕 (外部電極之斷線） 如圖9所示，纏繞成線圏狀之外部電極1 0 2乃爲了 不妨礙透射氣密容器1 0 1之紫外線照射，而使用著細的 線直徑者。爲此，在通電時若流通過電流於外部電極 1 0 2時，外部電極1 0 2有可能產生斷線。 經濟部智慧財產局員工消費合作社印製 又如日本國專利特開平7 - 2 7 2 6 9 2號公報所記 載’使用著無縫（壓製）的圓筒金屬網。但做爲外部電極 使用圓筒金屬網時，會使外部電極之構造成爲複雜且高成 本。再者，做爲外部電氣使用圓筒金屬網時，所發光之紫 外線中被圓筒狀金屬網遮光之比率會增大，而會降低紫外 線之照射性能。 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） -5- 543074 A7 B7 五、發明説明（3 (介質障壁放電燈長軸方向之均勻度） (請先閲讀背面之注意事項再填寫本頁) 當纏繞外部電極1 0 2於氣密容器1 〇 1外周（圍） 時，將產生電感成分，該電感成分之產生，將引起阻抗之 變化而使氣密容器之長軸方向各部分會形成容易產生介質 障壁放電燈之部分和難以產生之部分，使得在沿著氣密容 器長軸方向之各部分形成不均勻（參產不齊）之紫外，線照 射量，因此，可降低在介質障壁放電燈長軸方向所照射之 光的均勻度。 〔介質障壁放電燈之電力（照度）〕 要提高介質障壁放電燈之電力來增進紫外線之照度， 有需要提高所要施加之電壓。但要提高所要施加之電壓， 必得變更設計介質障壁放電燈成高電壓用。 爲此，本發明之目的係要在不加大纏繞成線圈狀於氣 密容器外周之外部電極的線直徑下，可防止由過電流所引 起之外部電氣的斷線。 經濟部智慧財產局員工消費合作社印製 本發明之另一目的，係要增進在放電燈長軸方向所照 射之光的均句度。 本發明之再另一目的，係在不提高所施加之電壓下， 可提高放電燈之電力（功率），以增進紫外線之照度。 〔解決課題用之手段〕 有關申請專利範圍第1項（以下簡稱爲申請項1 ，下 同）所記載之發明的放電燈，其特徵爲具備有：主要由（ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 543074 A7 B7 五、發明説明（j (請先閱讀背面之注意事項再填寫本頁) 電）介質材料所形成之細長管狀的氣密容器；沿著前述氣 密容器內長軸方向所配置之內部電極；沿著前述氣密容器 長軸方向纏繞成線圈狀於外周圍之外部電極；接觸於前述 氣密容器外周面且沿著該氣密容器長軸方向所配置，而與 前述氣密容器一起纏繞前述外部電極，且具有較前述外部 電極之剖面積廣濶之剖面積的輔助電極；及封入於前述氣 密容器內之放電介體。 因此，當施加電壓於外部電極和內部電極時，就產生 放電於兩電極間。由而，封入有例如X e (氙）時，所封 入於氣密容器之放電介體會暫時性地結合成分子狀態（準 分子狀態），而從如此之分子狀態恢復成原子之正常（基 本性）狀態時，可有效地放出再吸收少之光，使得放電燈 會發光。所放出之光的波長帶乃依存於所封入於氣密容器 之放電介體的種類，而放出1 7 2 n m波長之紫外線。 經濟部智慧財產局員工消費合作社印製 當要構成爲不妨礙來自放電燈之照射光時，理想爲外 部電極做成爲細狀。但該外部電極做成細時，當流動過電 流時有可能產生斷線。倘若配設輔助電極，會使一部分電 流流至輔助電極而可防止流動過電流於外部電流，因此可 防止由過電流所引起之外部電極的斷線。 又纏繞外部電極於氣密容器外周時，會產生電感成分 ，該電感成分之產生可引起阻抗產生變化，使得會在氣密 容器長軸方向之各部分形成容易產生放電部分及難以產生 放電之部分，而會在沿著氣密容器長軸方向之各部分的光 照射量形成不均勻，使得會降低在放長燈長軸方向所照射 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 543074 A7 B7 五、發明説明（g (請先閱讀背面之注意事項再填寫本頁) 之光的均勻度。但由於沿著氣密容器長軸方向配設輔助電 極，使得線圈狀之外部電極成短路，而可防止電感成分產 生。由而可消除放電燈長軸方向之阻抗產生變化，且在氣 密容器長軸方向之整個區域可產生略均勻之放電，以致可 增進在放電燈長軸方向所照射之光的均勻度。 又放電燈以等效電路來表示時，乃由放電空間部分的 電阻成分“ R ”及氣密容器部分的電容成分“ C ”所形成 之電容性負載，當增加電容成分“ C ”時，可不必提高施 加電壓下，就可提高放電燈之功率，使得可增進從放電燈 所照射之光的照度。而該電容成分“ C ”乃以增大外部電 極及將成爲外部電極之一部分的輔助電極與氣密容器所接 觸之面積就可予以增大。亦即，由於配設輔助電極而在未 增高施加電壓下能予以增高放電燈之功率，因此，可增進 從放電燈所照射之光的照度。 於本發明之放電燈，當前述外部電極之線直徑大小爲 d 1mm，纏繞節距尺寸爲hmm時，乃規定爲1 〇 <h / d 1 < 1 〇〇之關係。 經濟部智慧財產局員工消費合作社印製 由於以如上述規定外部電極之線直徑尺寸（大小） d 1和外部電極之纏繞尺寸h，就可抑制從氣密容器所照 射之光由外部電極所引起之遮光率於1 〇 %以下，使得可 維持光之照射性能成爲良好。 另一方面，當外部電極之線直徑d 1做成〇 . 1 m m 時，若h / d 1成爲1 〇以下時，纏繞節距尺寸成爲1 m m以下，而外部電極就會大幅度地遮斷（遮住）來自放 ^紙張尺度適用中國國家標準（〇仰）八4規格（210'/297公釐） -8- 543074 A7 B7 五、發明説明（g 電電燈之照射光，使得無法獲得所需要之光。 (請先閱讀背面之注意事項再填寫本頁) 又外部電極之線直徑d 1做成0 . 1 m m，而h / d 1成爲1 0 0以上時，相鄰之外部電極間的距離成爲 1 0 m m以上之大間隔，以致要產生放電之沿面移動會成 爲困難。其結果，會產生所謂顯著地降低在放電燈之軸方 向所照射的光之均勻度。 於本發明之放電燈，予以形成收縮部於前述氣密容器 之兩端部，纏繞前述外部電極複數次於該收縮部。 因此，可防止纏繞於氣密容器外周（圍）之外部電氣 產生鬆驰，及可防止如此之鬆弛所引起之外部電極產生纏 繞節距尺寸之位錯。 在於本發明之放電燈，形成箍縮密封（pinch seal)之 密封部於前述氣密容器的兩端部，並形成粗面部於較前述 氣密容器兩端部之前述密封部爲內側並朝向前述密封部的 傾斜面部位（處）。 經濟部智慧財產局員工消費合作社印製 因此，纏繞於氣密容器外周之外部電極，將在朝向形 成於該兩端部的傾斜面處被纏繞於粗面部，使得由粗面部 之大的摩擦阻力而可防止所纏繞之外部電極沿傾斜面滑落 ，因而，可穩定外部電極的纏繞狀態。 於本發明之放電燈，前述內部電極係具有，配置於前 述氣密容器內之略中心軸上，且展延於該中心軸方向旳內 部供電體電極，及沿著前述氣密容器內周面形成環狀且配 置於沿著前述氣密容器中心軸方向略成等間隔位置並連接 於前述內部供電體電極的複數個導電性支承物（anchor )。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -9 - 543074 A7 B7 五、發明説明（） (請先閲讀背面之注意事項再填寫本頁) 因此，當內部供電體電極由自重（淨重）而要下垂時 ，導電性支承物會接觸於氣密容器內周面來支承，而可防 止內部供電體電極下垂很大。而由該防止下垂可防止內部 電極和外部電極之距離產生大的偏差，由而可防止所謂由 於內部電極和外部電極之距離所產生的大的偏差而形成之 i 容易產生放電部分和不容易產生放電部分之情事，以致在 氣密容器長軸方向整個區域可產生略均勻之放電，而可增 進在放電燈長軸方向所照射之光的均勻度。 又由於具有導電性支承物，而可縮短做爲內部電極之 一部分的導電性支承物和做爲（電）介體之氣密容器內周 面的距離，致使傳導氣密容器內周面之沿面放電容易產生 ，而可增進啓動性，因此，可意圖降低啓動電壓及降低維 持點燈之電壓。 於本發明之放電燈，前述外部電極之線直徑尺寸爲 d 1 mm，前述導電性支承物之節距尺寸爲Hmm時，予 以規定爲 100<H/dl<3 00。 經濟部智慧財產局員工消費合作社印製 由於規定外部電極之線直徑尺寸d 1和導電性支承物 之節距尺寸Η成如上述而使導電性支承物能以適當間隔來 配置，且可促進產生傳導氣密容器內周面之沿面放電，因 此，可穩定地產生放電。 另一方面，當外部電極之線直徑d 1做成0 . 1 m m ，而Η / d 1爲1 〇 〇以下時，導電性支承物之節距Η會 形成1 0 m m以下，以致在於導電性支承物間之導電性支 承物所佔有之比率增大，而增多做爲該導電性支承物部所 本紙張尺度逍用中國國家標準（CNS ) A4規格（210 X 297公釐） 543074 A7 ___B7 五、發明説明（g 佔有之區域的未放電部分變爲多，使得會產生降低照度及 照度不均勻。 (請先閱讀背面之注意事項再填寫本頁) 又在外部電極之線直徑d 1做成〇 . 1 m m，而Η / d 1爲3 0 0以上時，導電性支承物之節距Η會形成3 0 m m以上之大。因而，會引起沿面放電以外之針狀放電， 致使該部分引起照度不均勻，而無法保持在於軸方向所照 射的光之均勻度。 於本發明之放電燈，將配置前述輔助電極於存在於前 述氣密容器外周部之尖端部近旁。 因此，輔助電極或尖端部會成爲妨礙從氣密容器所照 射之光，但令該等尖端部和輔助電極配置於近旁，再使之 位於不需要照射光之一側，則可維持來自放電燈之照射光 成爲良好狀態。又該尖端部可做爲配設輔助電極時之定位 基準（參考）來利用。 在於本發明之放電燈，配設有複數之前述輔助電極。 經濟部智慧財產局員工消費合作社印製 因此，可更進一步地確實地防止流動過電流於外部電 極，可更進一步確實地防止由過電流所引起之外部電極的 斷線。 又可增大要成爲外部電極之一部分的輔助電極和氣密 容器之接觸面積，而增加放電燈以電容性負載之等效電路 表示時之電容成分“ C ” ，因此，可在未增大施加電壓下 ，更進一步地增進放電燈之功率，使得可更進一步地增進 從放電燈所照射之光的照度。 於本發明之放電燈，要通電於前述外部電極之引出線 ^紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）~~' -11 - 543074 A7 _____B7 五、發明説明（^ 乃連接於前述輔助電極。 (請先閲讀背面之注意事項再填寫本頁) 因此，可防止整個燈電流會在與引出線之連接部分， 全部僅流動於外部電極之情事，使得可防止由過電流所引 起之外部電極之斷線。 申請項2所記載之發明，乃在申請項1中之放電燈， 配設有以光透射性之材料所形成且覆蓋前述氣密容器之管 狀的外管爲其特徵。 因此’從热抬谷窃所照射之光可透射外管來照射。又 由於配設外部，可防止污穢附著於纏繞在氣密容器外周圍 的外部電極，及防止從外部電極所放出之金屬離子附著於 周圍之構件。 申請項3所記載之紫外線照射裝置，其特徵爲具備有 :申請專利範圍第2項所記載之複數個放電燈；及保持複 數個之前述放電燈朝各個中心軸成平行之方向接近用的保 持框體。 經濟部智慧財產局員工消費合作社印製 因此，依據該紫外線照射裝置，於申請項1所記載之 放電燈，以適當地選擇放電（電）介體來照射紫外線，可 發揮與對於該放電燈配設申請項2所記載之外管時同樣之 作用、效果。再者，因對於紫外線所照射之被照射物，放 電燈可直接面對面，因而能以良好之效率來進行對於被照 射物照射紫外線，又以改變複數之放電燈的配置位置時， 也可對於未形成平面狀之被照物，以良好之效率來照射紫 外線。 於本發明，除非予以特別指定之外，所用之語句的定 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） — -12- 543074 A7 B7 五、發明説明（^ 義及技術性意味係如下。 (氣密容器） 主女由（電）體材料所形成之氣密容器，一^般可使 用石英玻璃來製造。 (內部電極） 內部電極係由鎳、鎢、鉬等之耐熱性金屬、或不銹鋼 、欽等之金屬所形成。而其形狀雖可爲棒狀、線狀、板狀 等，但也可如前述，構成具有內部供電體電極和導電性支 承物的構造。 (外部電極） 外部電極係作用爲要與內部電極之間產生發電者，而 由其放電所生成之準分子來發光。做爲外部電極之構造乃 形成纏繞爲線圏狀於氣密容器外周圍。 該外部電極，理想爲其線直徑，纏繞節距形成可抑制 照射至氣密容器外之光的遮光率在於1 0 %以下。 如此之外部電極，可使用適當之金屬，例如不銹鋼、 鎳、銀、金、白金等來形成。 (輔助電極） 輔助電極係配置成朝氣密容器長軸方向且接觸於氣密 容器外周面，並與氣密容器一起纏繞有外部電極。輔助電 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇'〆297公釐） (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 -13 - 543074 A7 B7 五、發明説明（ (請先閱讀背面之注意事項再填寫本頁) 極和外部電極乃形成電性連接。輔助電極係具有大於外部 電極的剖面積，用於防止流動過電流於細的線直徑之外部 電極。又由於輔助電極和氣密容器之接觸面積愈大，可愈 增加以電容性負載之等效電路來表示放電燈時之電容成分 “ C ” ，因而，不提高施加電壓之狀態下，可提高放電燈 之功率（電力），而可增進從放電燈所照射之光的照度。 如此之輔助電極乃配置於不會妨礙照射到氣密容器外 之光一側。 如此之輔助電極係可使用適當之金屬，例如不銹鋼、 鎳、銀、金、白金等來形成。 做爲輔助電極之形狀，可爲圓棒狀、板狀、具有新月 狀剖面之板狀，理想爲能增大與氣密容器外周面之接觸面 積者。 又輔助電極之數量可爲1個，或可配設複數個。 〔放電介體〕 放電介體係施加電壓時可產生放電之介體（電介質） 經濟部智慧財產局員工消費合作社印製 ’做爲代表性之一例子可舉出（受激）準分子生成氣體。 準分子生成氣體，其主成分爲氙，而對於該氙可使用氪、 氬、氖等之稀有氣體單體，或混合稀有氣體及氟、氯 '溴 或碘等之鹵素的混合氣體。如此之放電介體之封入壓力會 賦予影響於紫外線輸出和啓動性。亦即，伴隨著放電介體 之封入壓力變大，可增大紫外線輸出之同時，可提高啓動 電壓及點燈電壓。做爲放電介體之封入壓力，以例如1 〇 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -14- 543074 A7 B7 五、發明説明（ 〜7 0 K P a之壓力爲適當壓力。 (請先閲讀背面之注意事項再填寫本頁) (外管） 外管係由具有光透射性之材料，例如石英玻璃所形成 。該外管係以包圍氣密容器之尺寸來形成。也可令氣密容 器外周面和外管內周面間之空間做爲冷卻介體，使用爲要 防止所照射之紫外線等之光由氧所吸收的介體之惰氣的流 道。 〔發明之實施形態〕 將依據圖1至圖3來說明本發明之第1實施形態。圖 1係顯示介質障壁放電燈之縱向剖面正面圖，圖2係其縱 向剖面側面圖，圖3 ( a ) ， （ b )係顯示氣密容器端部 之正面圖及平面圖。 如圖1所示，爲放電燈之介質障壁放電燈1係由氣密 容器2，內部電極3，連接於內部電極3之引出線4，外 部電極5，輔助電極6，外管7等所形成。 經濟部智慧財產局員工消費合作社印製 氣密容器2係由石英玻璃所形成，具備有外徑尺寸爲 1 2mm，內徑尺寸爲1 〇mm之細長圓筒狀之中空部 2 a，及形成於中空部2 a兩端之密封部2 b。密封部 2 b係形成埋設有鉬箔8之箍縮密封構造。 在氣密容器2之中空部2 a內部，封入有做爲準分子 生成氣體之主成分的氙。因應於所需也可封入氬或氖等之 稀有氣體5〜50%。該封入壓力爲10〜7〇KPa。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -15- 543074 A7 B7 五、發明説明（& (請先閱讀背面之注意事項再填寫本頁} 內部電極3乃由線直徑爲1 · 〇 m m之鎢所形成，其 長度尺寸“ L ”爲1 〇 〇 〇 m m。再者，做爲該內部電極 3之材料，除鎢外，也可使用鎳、鉬等之耐熱性金屬。內 部電極3乃配置於氣密容器2之略中心軸上且朝中心軸方 向展延，而其兩端部連接於鉬箔8之同時，由密封部2 b 予以密封固定。 外部電氣5係使線直徑“ d 1 ”爲〇 · 1 m m之不銹 鋼等之金屬，以纏繞節距尺寸“ h ”爲1〜2 m m節距來 纏繞成線圏狀安裝於氣密容器2外周圍。由而，“ h/dl”成爲10<h/dl<20，致使在氣密容器 2之未被外部電極5所覆蓋部分之比率（開口率）成爲 9 0 〜9 5 %。 在於氣密容器2兩端部，且在中空部2 a和密封部 2 b之界線處，形成有收縮部9 〔參照圖3 ( b )〕。該 收縮部9纏繞外部電極5端部複數次，由而可防止纏繞於 氣密容器外周之外部電極產生鬆開（變鬆），及可防止如 此之鬆開爲原因而外部電極5之纏繞節距尺寸形成位錯。 經濟部智慧財產局員工消費合作社印製 又爲氣密容器2之兩端部而從中空部2 a朝向密封部 2 b之部分形成傾斜面，在該傾斜面處形成有粗面部1 〇 (參照圖3 ( a ))。該粗面部1 0係以塗佈鋁粉，或實 施表面成爲粗糙處理來形成。由而，外部電極5即使纏繞 於該傾斜面處，該外部電極5可由與粗面部1 〇間之大的 摩擦阻力而可防止沿著傾斜面滑落之情事，因而’能穩定 地維持纏繞狀態。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -16- 543074 A7 B7 五、發明説明（）4 (請先閲讀背面之注意事項再填寫本頁) 輔助電極6係配設成沿著氣密容器2長軸方向（中心 軸方向）且接觸於氣密容器2外周面。再者，外部電極5 乃與氣密容器2 —齊也纏繞於輔助電極6，而輔助電極6 和外部電極5會沿著氣密容器2長軸方向在多數處成交叉 來成電性連接。輔助電極6乃使用線直徑爲1 . 0 m m者 ，具有較外部電極5之剖面積廣濶之剖面積。 在氣密容器2外周面，存在有在製造該氣密容器2時 ，用以排出內部之剩餘氣體或用於注入準分子生成氣體所 用之管部剩餘部的尖端部1 1。輔助電極6則配置於該尖 端部1 1近旁。 外管7係由外徑尺寸1 7 . 5mm之直管管狀之石英 玻璃所構成之構件，乃使用與氣密容器2外周面之間具有 間隙之大小者。該間隙部分乃做爲要流通將後述之氮氣或 氬氣等之惰氣的流道空間1 2。外部7兩端熔接有以收容 氣密容器2之狀態來密封外管7成氣密用之一對旋塞體 13a， 13b。而在一方旋塞體13a形成有要流入氮 經濟部智慧財產局員工消費合作社印製 氣至流道空間1 2內用之流入口 1 4，另一方旋塞體 1 3 b則形成有要從流道空間1 2內流出氮氣用之流出口 15。 流入口 1 4和流出口 1 5之間，乃連接有以所定之流 量來循環氮氣之惰氣循環機構（未圖示）。該惰氣循環機 構係連接於流入口 1 4和流出口 1 5間之配管，由配設於 該配管途中之要儲存氮氣之儲存槽、流體泵等所構成。 旋塞體13a、13b各安裝有插座16a ，16b I紙張尺度適用中國國家標準( CNS ) A4規格（210X297公釐7 -17- 543074 A7 B7 五、發明説明（^ (請先閲讀背面之注意事項再填寫本頁) 。內部電極3之引出線4配設成貫穿插座1 6 a、1 6 b ，而在一方之插座1 6 b，導通用於通電給予外部電極5 用的引出線1 7。再者，該引出線1 7端部因連接於輔助 電極6 ，因而，可防止燈之電流會在與引出線1 7的連接 部分僅朝外部電極5流之情事，因此，可防止由過電流所 引起之外部電極5之斷線。 在構成如此之結構時，當施加電壓於外部電極5和內 部電極3之間，就可產生介質障壁放電於兩電極3、5間 。由而，所封入於氣密容器2之準分子生成氣體會暫時性 地結合成分子狀態（準分子狀態），而從如此之分子狀態 恢復成原子之正常狀態時，會有良好效率來放出再吸收少 之紫外線，使得（電）介質障壁放電燈1產生發光。所放 出之紫外線波長帶乃依存於所封入之準分子生成氣體的種 類’例如封入較多之氙時，可放出1 7 2 n m波長之紫外 線。 經濟部智慧財產局員工消費合作社印製 倘若要做成不會妨礙來自介質障壁放電燈1之紫外線 照射，理想爲令外部電極5成爲細。然而，令外部電極5 變爲細時，就有可能流動過電流時產生斷線。但本發明之 介質障壁放電燈1因配設有輔助電極6，使得電流之一部 分會流至輔助電極6，因而可防止過電流整個會流於外部 電極5 ’因此，可防止由過電流所引起之外部電極的斷線 〇 又纏繞外部電極5於氣密容器2外周時，會產生電感 成分’而產生該電感成分會引起阻抗之變化，以致在氣密 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -18- 543074 A7 __ B7_ 五、發明説明（& (請先閲讀背面之注意事項再填寫本頁) 容器2長軸方向各部分會產生介質障壁放電容易部分及不 容易之部分，致使沿著氣密容器2長軸方向之各部分會產 生紫外線照射量形成不均勻，因此，會降低在介質障壁放 電燈1長軸方向所照射之紫外線的均勻度。但由於沿氣密 容器2長軸方向的輔助電極6，使得短路纏繞成線圈狀之 外部電極5而可防止產生電感成分。由而可消除介質障壁 放電燈1長軸方向的阻抗變化，使得在氣密容器2長軸方 向整個區域可產生介質障壁放電略成爲均勻，因此，可增 進介質障壁放電燈1長軸方向所照射之紫外線的均勻度。 經濟部智慧財產局員工消費合作社印製 又介質障壁放電燈以等效電路來表示時，乃由放電空 間部分的電阻成分“ R ”及氣密容器2之部分的電容成分 “ C ”所形成之電容性負載，當增加電容成分“ C ”時， 可不必提高施加電壓下，就可提高介質障壁放電燈1之功 率，使得可增進從介質障壁放電燈1所照射之紫外線照度 。而該電容成分“ C ”乃以增大外部電極5及將成爲外部 電極之一部分的輔助電極6與氣密容器2的接觸面積就可 予以增大。亦即，由於配設輔助電極6而在未增高施加電 壓下，能予以增高介質障壁放電燈1之電力（功率），因 此，可增進從介質障壁放電燈所照射之紫外線照度。 接著，依據圖4來說明本發明之第2實施形態。再者 ，與在第1實施形態所說明之部分相同部分，將以同一符 號表示且也省略其說明（以下將說明之實施形態也相同） 。圖4係顯示（電）介質障壁放電燈1 a的縱向剖面側面 圖。 本紙張尺度適用中國國家標準（CNS ) A4規格（210Χ297公釐） -19- 543074 A7 B7 五、發明説明（h (請先閱讀背面之注意事項再填寫本頁) 本實施形態之介質障壁放電燈1 a的基本性構造係與 第1實施形態之介質障壁放電燈1之構造相同，相異之部 分爲所配設之輔助電極6之數量。於本實施形態，乃沿氣 密容器2長軸方向配設3條之輔助電極6形成接觸於氣密 容器2外周面，並纏繞外部電極5於該等氣密容器2和3 支輔助電極6周圍。3支輔助電極6各隔著略9 0 °之間 隔來配置，而中央之1支乃配置於尖端部1 1之近旁。 以如此之結構時，可由增加輔助電極6之數量而可更 進一步地確實地防止過電流會流於外部電極5，使得可更 進一步確實地防止由過電流引起之外部電極5的斷線。 又由於增加輔助電極6之數量而使將成爲外部電極之 一部分的輔助電極6和氣密容器2之接觸面積增大，以致 可增加由電容性負載之等效電路來表示介質障壁放電燈 1 a時之電容成分“ C ” ，使得不必提高施加電壓下，可 令介質障壁放電燈1 a之功率更進一步地提高，因此，可 更進一步地增進從介質障壁放電燈1 a所照射之紫外線照 度。 經濟部智慧財產局員工消費合作社印製 其次，將依據圖5至圖7來說明本發明之第3實施形 態。圖5係顯示（電）介質障壁放電燈1 b之縱向剖面正 面圖，圖6係其縱向剖面側面圖，圖7係放大其一部分來 顯示之縱向剖面正面圖。 本實施形態之（電）介質障壁放電燈1 b的基本性才冓 造係與第1實施形態之（電）介質障壁放電燈1相同，具 有相異之部分係內部電極1 8之構造。內部電極1 §係由 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -20 - 543074 A7 B7 五、發明説明（；)8 1支內部供電（饋電）體電極1 8 a和複數個之導電性支 承物（anchor )及連接線部1 8 c所構成。 內部供電體電極1 8 a乃使用鎳、鎢、鉬等之耐熱性 金屬，或不銹鋼、鈦等之金屬所形成之直徑〇 . 1 m m的 線材’以節距1 〇 〇 %來纏繞成外徑尺寸爲1 · 2 m m的 線圈狀所形成，而配置於沿氣密容器2長軸方向的略中心 軸上’且連接其兩端於鉬箔8之同時，由密封部2 b予以 密封固定。 導電性支承物1 8 b係由與內部供電體1 8 a同一材 質而直徑爲0 · 3 1 m m之線材所做成之外徑尺寸成爲 9 · 0 m m之環狀的圓形來形成，各導電性支承物1 8 b 乃各由連接線部1 8 c來連接於內部供電體電極1 8 a。 各導電性支承物1 8 b乃設定沿氣密容器2長軸方向之節 距尺寸“ Η ”爲1 2 m m。又如在第1實施形態所說明， 外部電極5之線直徑“ d 1 ”爲〇 · 1 m m，外部電極5 之纏繞節距“ h ”爲1〜2 m m。由而，規定外部電極5 之線直徑尺寸“ d 1 ”和導電性支承物之節距尺寸“ Η ” 之比率爲“H/dl=120” 。 如此之結構，內部電極1 8因由內部供電體電極 1 8 a和導電性支承物1 8 b及連接線部1 8 c所形成， 因而，當內部供電體電極1 8 a由自重或點燈時之熱膨脹 而要下垂時，導電性支承物1 8 b會接觸於氣密容器2之 內周面來支承，使得可防止內部供電體電極1 8 a大幅度 之垂下。再者，因形成內部供電體電極1 8 a成線圏狀， 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁)V. Description of the invention (P [Technical field to which the invention belongs] The present invention relates to a discharge lamp and an ultraviolet irradiation device using the discharge lamp (please read the precautions on the back before filling this page). [Knowledge Technology] As Ultraviolet light emitting ultraviolet light reveals various (barrier) dielectric barrier discharge lamps, and such dielectric barrier discharge lamps are sealed with discharge mediators (excimer-generating gases) that generate (excited) excimers. An airtight space, and a pair of electrodes are arranged inside and outside the discharge space, and a high voltage is applied between these electrodes to discharge. From this discharge, ultraviolet rays will be emitted from the discharge media. 9 is a front view showing an example of a conventional dielectric barrier discharge lamp. In FIG. 9, 101 is a cylindrical airtight container, 102 is an external electrode having conductivity, and 103 is an inner portion having conductivity The electrode, 104 is a closed part, and 105 is a high-frequency generating circuit. Inside the airtight container 101, xenon gas is enclosed as an excimer-generating gas. Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs The consumer cooperative printed airtight container 1 0 1 is formed of a UV-transmissive (electrical) dielectric material such as quartz. The external electrode 10 2 is wound in a coil shape to be mounted on the outer periphery of the airtight container 1 0 1. (Circle). The internal electrode 103 is a conductive member having a shape such as a coil shape, a rod shape, a line shape, or a plate shape, and is connected to a lead wire 106 fixed to the sealing portion 104. High frequency Generating circuit 1 0 5 is applied voltage to external electrode 1 2 and this paper size applies Chinese National Standard (CNS) A4 (210 X 297 mm)-4 _ 543074 A7 B7 V. Description of the invention (j Internal electrode 1 0 3, to supply the required electrical energy to the (electrical) dielectric barrier. (Please read the precautions on the back before filling this page} The dielectric barrier discharge lamp constructed in this way is applied by the local frequency generating circuit 1 0 5 When the voltage is between the external electrode 10 and the internal electrode 103, a dielectric barrier discharge occurs between the external electrodes 102 and the internal electrode 103. The dielectric barrier discharges and seals the gas barrier. The exact division of xenon and the like in the container 1 0 1 The generated gas will temporarily combine with the molecular state (excited excimer state). When the molecular state is restored to the atomic basic (normal) state, it will emit light and then absorb less ultraviolet rays. This state is a medium Luminous principle of the barrier discharge lamp. [Problems to be solved by the invention] (Disconnection of external electrodes) As shown in Fig. 9, the external electrodes 1 0 2 wound in a line shape are not to prevent the transmission of airtight containers 1 0 1 Ultraviolet rays are radiated and a thin wire diameter is used. For this reason, if an electric current is passed to the external electrode 102 when the current is applied, the external electrode 102 may be disconnected. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Another example is described in Japanese Patent Laid-Open Publication No. 7-2 7 2 6 92 2 ’A seamless (pressed) cylindrical metal mesh is used. However, when a cylindrical metal mesh is used as an external electrode, the structure of the external electrode becomes complicated and costly. Furthermore, when a cylindrical metal mesh is used as an external electrical device, the ratio of light emitted by the cylindrical metal mesh among the emitted ultraviolet rays will increase, which will reduce the ultraviolet radiation performance. This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) -5- 543074 A7 B7 V. Description of the invention (3 (uniformity of long axis direction of dielectric barrier discharge lamp) (Please read the note on the back first) Please fill in this page again) When the external electrode 1 2 is wound around the outer periphery (circle) of the airtight container 10, an inductance component will be generated. The generation of the inductance component will cause the impedance to change and make the long axis of the airtight container Each part of the direction will form a part that is prone to produce a dielectric barrier discharge lamp and a part that is difficult to produce, so that the part along the long axis direction of the airtight container forms uneven (uneven production) ultraviolet and linear irradiation. Therefore, It can reduce the uniformity of the light irradiated in the long axis direction of the dielectric barrier discharge lamp. [Power (illumination) of the dielectric barrier discharge lamp] To increase the power of the dielectric barrier discharge lamp to increase the ultraviolet illuminance, it is necessary to increase the voltage to be applied However, to increase the voltage to be applied, it is necessary to change the design of the dielectric barrier discharge lamp to a high voltage. For this reason, the object of the present invention is to not increase the winding into a coil. The outer diameter of the outer electrode of the airtight container can prevent the external electrical disconnection caused by overcurrent. Another objective of the present invention is to print the invention by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The uniformity of the light irradiated in the long axis direction. Another object of the present invention is to increase the power (power) of a discharge lamp without increasing the applied voltage to increase the illuminance of ultraviolet rays. Means] The discharge lamp of the invention described in item 1 of the scope of patent application (hereinafter referred to as application item 1, hereinafter the same) is characterized by having: (The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 543074 A7 B7 V. Description of the invention (j (please read the precautions on the back before filling this page) Electricity) Slim tube-shaped airtight container formed by dielectric material; along the long axis of the aforementioned airtight container Internal electrodes arranged in the direction; external electrodes wound in a coil shape around the outer axis along the long axis direction of the airtight container; contacting the outer peripheral surface of the airtight container and along the The airtight container is arranged along the long axis direction, and the auxiliary electrode is wound with the airtight container together with the external electrode and has a wider cross-sectional area than that of the external electrode; and a discharge enclosed in the airtight container Therefore, when a voltage is applied to the external electrode and the internal electrode, a discharge is generated between the two electrodes. Therefore, when X e (xenon) is enclosed, the discharge medium enclosed in the airtight container is temporarily Combined with the molecular state (excimer state), and returning from such a molecular state to the normal (basic) state of the atom, it can effectively emit less reabsorbed light so that the discharge lamp will emit light. The wavelength band of the emitted light Depending on the type of discharge media enclosed in the airtight container, it emits ultraviolet rays with a wavelength of 17 2 nm. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs When it is to be constructed so as not to hinder the light from the discharge lamp, it is desirable to make the external electrodes thin. However, when the external electrode is thin, disconnection may occur when a current flows. If an auxiliary electrode is provided, a part of the current will flow to the auxiliary electrode and an overcurrent can be prevented from flowing to the external current. Therefore, the disconnection of the external electrode caused by the overcurrent can be prevented. When the external electrode is wound around the outer periphery of the airtight container, an inductance component is generated. The generation of the inductance component can cause a change in impedance, so that parts that are prone to discharge and parts that are difficult to generate will be formed in each part of the airtight container in the long axis direction. However, the light irradiation amount in each part along the long axis direction of the airtight container will be uneven, which will reduce the irradiation in the long axis direction of the long lamp. The paper size applies the Chinese National Standard (CNS) A4 specification (210X 297) Mm) 543074 A7 B7 V. Description of the invention (g (Please read the notes on the back before filling this page) The uniformity of light. However, the auxiliary electrode is arranged along the long axis of the airtight container, making the coil shape The external electrode is short-circuited, which can prevent the generation of inductance components. As a result, the change in impedance in the long axis direction of the discharge lamp can be eliminated, and a slightly uniform discharge can be generated in the entire area of the long axis direction of the airtight container, which can improve the discharge lamp. The uniformity of the light irradiated in the long axis direction. When the discharge lamp is represented by an equivalent circuit, it is determined by the resistance component "R" of the discharge space and the gas. The capacitive load formed by the capacitive component "C" in the sealed container portion, when the capacitive component "C" is increased, the power of the discharge lamp can be increased without increasing the applied voltage, so that the light radiated from the discharge lamp can be improved. The capacitance component “C” is to increase the contact area between the external electrode and the auxiliary electrode which will be a part of the external electrode and the airtight container. That is, because the auxiliary electrode is provided in the The power of the discharge lamp can be increased without increasing the applied voltage, so the illuminance of the light radiated from the discharge lamp can be increased. In the discharge lamp of the present invention, when the wire diameter of the external electrode is d 1mm, the winding pitch size When it is hmm, it is defined as a relationship of 1 0 < h / d 1 &1; 100. It is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The winding size h of the external electrode can suppress the light emitted from the airtight container, and the light shielding rate caused by the external electrode is less than 10%, so that the light irradiation performance can be maintained. On the other hand, when the wire diameter d 1 of the external electrode is 0.1 mm, and if h / d 1 becomes 1 or less, the winding pitch size becomes 1 mm or less, and the external electrode greatly increases. Ground blocking (covering) comes from the paper size. Applicable to the Chinese national standard (O Yang) 8 4 specifications (210 '/ 297 mm) -8- 543074 A7 B7 V. Description of the invention (g The light from the electric lamp makes The required light cannot be obtained. (Please read the precautions on the back before filling in this page.) When the wire diameter d 1 of the external electrode is 0.1 mm and h / d 1 is 100 or more, the adjacent The distance between the external electrodes becomes a large interval of 10 mm or more, so that it is difficult to move along the surface to generate a discharge. As a result, the so-called uniformity of the light irradiated in the axial direction of the discharge lamp is significantly reduced. In the discharge lamp of the present invention, shrinkage portions are formed on both ends of the airtight container, and the external electrode is wound around the shrinkage portion several times. Therefore, it is possible to prevent slack in the external electrical wires wound around the outer circumference (perimeter) of the airtight container, and to prevent dislocations in the winding pitch dimension of the external electrodes caused by such slack. In the discharge lamp of the present invention, a seal portion forming a pinch seal is formed on both ends of the airtight container, and a rough surface is formed on the inner side facing the seal portion on both ends of the airtight container and facing the foregoing. The sloped area (office) of the seal. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Therefore, the external electrode wound around the outer periphery of the airtight container will be wound around the rough surface at the inclined surface formed at the two end portions, so that the frictional resistance caused by the rough surface is large. In addition, the wound external electrodes can be prevented from slipping along the inclined surface. Therefore, the wound state of the external electrodes can be stabilized. In the discharge lamp of the present invention, the internal electrode is provided on an approximately central axis in the airtight container, and extends in the direction of the central axis, the internal power supply electrode, and along the inner peripheral surface of the airtight container. A plurality of conductive supports that are formed in a ring shape, are arranged at substantially equal intervals along the central axis direction of the airtight container, and are connected to the internal power supply electrode. This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) -9-543074 A7 B7 V. Description of the invention () (Please read the precautions on the back before filling this page) Therefore, when the internal power supply electrode consists of When the self-weight (net weight) is to be drooped, the conductive support will contact the inner peripheral surface of the airtight container to support it, and the internal power supply electrode can be prevented from drooping greatly. The prevention of sagging can prevent large deviations in the distance between the internal electrode and the external electrode, thereby preventing the so-called i which is formed due to the large deviation caused by the distance between the internal electrode and the external electrode, which is liable to generate a discharge portion and is not easily generated The discharge part is such that a slightly uniform discharge can be generated in the entire area of the airtight container in the long axis direction, and the uniformity of the light irradiated in the long axis direction of the discharge lamp can be improved. Due to the conductive support, the distance between the conductive support as a part of the internal electrode and the inner peripheral surface of the airtight container as a (electric) mediator can be shortened, so that the surface of the inner surface of the conductive airtight container can be reduced. Discharge is easy to occur and the startability can be improved. Therefore, it is possible to reduce the start-up voltage and the voltage for maintaining the lighting. In the discharge lamp of the present invention, when the wire diameter dimension of the external electrode is d 1 mm and the pitch dimension of the conductive support is Hmm, 100 < H / dl < 3 00 is prescribed. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs because the wire diameter dimension d 1 of the external electrode and the pitch dimension of the conductive support are formed as described above, the conductive support can be arranged at an appropriate interval, and the production can be promoted. Since the discharge is conducted along the inner peripheral surface of the conductive airtight container, the discharge can be stably generated. On the other hand, when the wire diameter d 1 of the external electrode is made to 0.1 mm and Η / d 1 is 1000 or less, the pitch Η of the conductive support is formed to 10 mm or less, so that it is conductive. The ratio of the conductive support between the supports is increased, and the increase is used as the paper size of the conductive support. The Chinese standard (CNS) A4 specification (210 X 297 mm) 543074 A7 ___B7 5 、 Explanation of the invention (the undischarged part of the area occupied by g becomes more, which will reduce the illuminance and uneven illuminance. (Please read the precautions on the back before filling this page) and make it on the external electrode wire diameter d 1 0.1 mm and ， / d 1 is 300 or more, the pitch Η of the conductive support will be as large as 30 mm or more. Therefore, needle-shaped discharges other than creeping discharges may be caused, and this part may cause The illuminance is not uniform, and the uniformity of the light irradiated in the axial direction cannot be maintained. In the discharge lamp of the present invention, the aforementioned auxiliary electrode is arranged near the tip portion existing on the outer peripheral portion of the airtight container. Therefore, the auxiliary electrode or tip Ministry will become The light emitted from the airtight container is prevented, but if the tip portion and the auxiliary electrode are arranged close to each other and placed on the side that does not require irradiation light, the irradiation light from the discharge lamp can be maintained in a good state. The tip portion can be used as a positioning reference (reference) when the auxiliary electrode is provided. The discharge lamp of the present invention is provided with a plurality of the aforementioned auxiliary electrodes. It is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The ground prevents the overcurrent from flowing to the external electrode, which can prevent the disconnection of the external electrode caused by the overcurrent. It can also increase the contact area between the auxiliary electrode and the airtight container that are to be part of the external electrode, and Increasing the capacitance component "C" when the discharge lamp is represented by an equivalent circuit of a capacitive load, therefore, the power of the discharge lamp can be further improved without increasing the applied voltage, so that the capacity of the discharge lamp can be further improved. Illuminance of the irradiated light In the discharge lamp of the present invention, it is necessary to energize the lead wire of the aforementioned external electrode ^ Paper size is applicable to China Home Standard (CNS) A4 specification (210X297 mm) ~~ '-11-543074 A7 _____B7 V. Description of the invention (^ is connected to the aforementioned auxiliary electrode. (Please read the precautions on the back before filling this page) Therefore, you can Preventing the entire lamp current from flowing only to the external electrode in the connection part with the lead-out wire makes it possible to prevent the disconnection of the external electrode caused by the overcurrent. The invention described in application 2 is in application 1 The discharge lamp in the middle is equipped with a tubular outer tube formed of a light-transmitting material and covering the aforementioned airtight container. Therefore, the light irradiated from the heat can be transmitted through the outer tube. Due to the external arrangement, it is possible to prevent contamination from attaching to the external electrodes wound around the outside of the airtight container, and to prevent metal ions released from the external electrodes from attaching to surrounding components. The ultraviolet irradiation device according to claim 3 is provided with: a plurality of discharge lamps described in item 2 of the scope of patent application; and a holder for holding the plurality of discharge lamps approaching in parallel with each central axis. framework. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Therefore, according to the ultraviolet irradiation device, the discharge lamp described in the application item 1 can appropriately select a discharge (electric) medium to irradiate ultraviolet rays. The same functions and effects as in the case of the external control described in the application 2 are assumed. Furthermore, since the discharge lamp can directly face to face the object to be irradiated by the ultraviolet rays, it can perform ultraviolet irradiation on the object to be irradiated with good efficiency and change the position of the plurality of discharge lamps. Form a flat object and irradiate ultraviolet rays with good efficiency. In the present invention, unless specified otherwise, the final paper size of the sentences used is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) — -12- 543074 A7 B7 5. Explanation of the invention (^ Meaning and technical significance The system is as follows. (Airtight container) The airtight container made of (electrical) body material for the host and female can usually be made of quartz glass. (Internal electrode) The internal electrode is made of nickel, tungsten, molybdenum, etc. Metal, or stainless steel, or metal such as Chin. Although its shape can be rod-shaped, wire-shaped, plate-shaped, etc., it can also have a structure with an internal power supply electrode and a conductive support as described above. (External (Electrode) The external electrode is used to generate electricity between the internal electrode and the excimer generated by its discharge to emit light. The structure of the external electrode is formed into a coil wound around the airtight container. The external electrode is preferably a wire diameter, and the winding pitch is formed so that the light shielding rate of the light radiated to the outside of the airtight container is less than 10%. For such an external electrode, an appropriate metal can be used. It is made of stainless steel, nickel, silver, gold, platinum, etc. (Auxiliary electrode) The auxiliary electrode is arranged in the direction of the long axis of the airtight container and contacts the outer peripheral surface of the airtight container, and an external electrode is wound around the airtight container. This paper size applies Chinese National Standard (CNS) A4 specification (21〇'297 mm) (Please read the notes on the back before filling out this page) Order printed by the Intellectual Property Bureau Employee Consumer Cooperatives of the Ministry of Economics-13-543074 A7 B7 V. Description of the invention ((Please read the precautions on the back before filling this page) The electrode and the external electrode form an electrical connection. The auxiliary electrode has a larger cross-sectional area than the external electrode and is used to prevent overcurrent from flowing in thin wires. External electrode with a diameter. As the contact area between the auxiliary electrode and the airtight container is larger, the capacitance component "C" in the discharge lamp can be represented by an equivalent circuit of a capacitive load, so the state of the applied voltage is not increased. , Can increase the power (electricity) of the discharge lamp, and can increase the illuminance of the light irradiated from the discharge lamp. In this way, the auxiliary electrode is arranged so as not to hinder The light is radiated to the outside of the airtight container. Such an auxiliary electrode system can be formed using a suitable metal, such as stainless steel, nickel, silver, gold, platinum, etc. The shape of the auxiliary electrode can be round rod or plate The plate shape with a crescent-shaped cross section is ideal for those who can increase the contact area with the outer peripheral surface of the airtight container. The number of auxiliary electrodes can be one or more can be provided. [Discharge mediator] Discharge mediator A mediator (dielectric) that can generate a discharge when a voltage is applied to the system. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs as a representative example (excited) excimer generation gas. Excimer generation gas, its main The component is xenon, and for this xenon, a rare gas monomer such as krypton, argon, neon, or a mixed gas of a rare gas and a halogen such as fluorine, chlorine, bromine, or iodine can be used. The sealing pressure of such a discharge medium will affect the ultraviolet output and startability. That is, as the encapsulation pressure of the discharge medium becomes larger, the ultraviolet output can be increased, and the starting voltage and the lighting voltage can be increased. As the sealing pressure of the discharge medium, for example, 10 paper sizes are applicable to the Chinese National Standard (CNS) A4 specifications (210X297 mm) -14- 543074 A7 B7 V. Description of the invention (~ 7 0 KP a pressure is appropriate Pressure (Please read the precautions on the back before filling out this page) (Outer tube) The outer tube is made of a material with light transmission, such as quartz glass. The outer tube is formed in a size that surrounds the airtight container. The space between the outer peripheral surface of the airtight container and the inner peripheral surface of the outer tube can also be used as a cooling medium, and the inert gas flow channel of the medium to prevent the light such as ultraviolet rays from being irradiated by oxygen can be used. Embodiment] A first embodiment of the present invention will be described with reference to Figs. 1 to 3. Fig. 1 is a longitudinal sectional front view showing a dielectric barrier discharge lamp, Fig. 2 is a longitudinal sectional side view thereof, and Fig. 3 (a), (B) It is a front view and a plan view showing the end of the airtight container. As shown in FIG. 1, the dielectric barrier discharge lamp 1 which is a discharge lamp is composed of the airtight container 2, the internal electrode 3, and a lead wire connected to the internal electrode 3. 4, external electrode 5, auxiliary electrode 6, The outer tube 7 is formed. The airtight container 2 printed by the staff consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs is formed of quartz glass, and has an elongated cylindrical shape with an outer diameter of 12 mm and an inner diameter of 10 mm. The hollow part 2 a and the sealing part 2 b formed at both ends of the hollow part 2 a. The sealing part 2 b forms a pinch seal structure in which molybdenum foil 8 is embedded. Inside the hollow part 2 a of the airtight container 2, it is sealed Xenon is the main component of the excimer-generating gas. 5 ~ 50% of rare gas such as argon or neon can be sealed according to the requirements. The sealing pressure is 10 ~ 70KPa. The paper size is applicable to Chinese national standards ( CNS) A4 specification (210X297 mm) -15- 543074 A7 B7 V. Description of the invention (& Please read the notes on the back before filling this page} The internal electrode 3 is made of tungsten with a wire diameter of 1.0 mm It has a length dimension "L" of 1000 mm. In addition, as the material of the internal electrode 3, in addition to tungsten, heat-resistant metals such as nickel and molybdenum can also be used. The internal electrode 3 is disposed in the gas The tight container 2 is on the central axis and extends toward the central axis, and both ends The part is connected to the molybdenum foil 8 and is sealed and fixed by the sealing part 2 b. The external electrical 5 is a metal such as stainless steel with a wire diameter “d 1” of 0.1 mm, and the winding pitch dimension “h” is 1. ~ 2 mm pitch to be wound around the outside of the airtight container 2 in a coil-like shape. As a result, "h / dl" becomes 10 < h / dl < 20, resulting in the airtight container 2 being not covered by the external electrode 5. The ratio of the covering portion (opening ratio) is 90 to 95%. At both ends of the airtight container 2 and at the boundary between the hollow portion 2a and the sealing portion 2b, a shrinkage portion 9 is formed [refer to FIG. 3 ( b)]. The shrinking portion 9 is wound around the end of the external electrode 5 a plurality of times, thereby preventing loosening (loosening) of the external electrode wound around the outer periphery of the airtight container, and preventing the winding joint of the external electrode 5 from causing such loosening. The distance dimension forms dislocations. Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and for the two ends of the airtight container 2, an inclined surface is formed from the hollow portion 2a to the sealed portion 2b, and a rough surface 1 is formed at the inclined surface. Figure 3 (a)). The rough surface portion 10 is formed by applying aluminum powder or roughening the surface. Therefore, even if the external electrode 5 is wound around the inclined surface, the external electrode 5 can be prevented from slipping along the inclined surface by a large frictional resistance between the external electrode 5 and the rough surface 10. Therefore, the wound state can be stably maintained. This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) -16- 543074 A7 B7 V. Description of the invention () 4 (Please read the precautions on the back before filling this page) The auxiliary electrode 6 is configured as Along the long axis direction (central axis direction) of the airtight container 2 and contacting the outer peripheral surface of the airtight container 2. In addition, the external electrode 5 is wound around the auxiliary electrode 6 together with the airtight container 2, and the auxiliary electrode 6 and the external electrode 5 are electrically connected to each other at a plurality of locations along the long axis direction of the airtight container 2. The auxiliary electrode 6 uses a wire diameter of 1.0 mm and has a larger cross-sectional area than that of the external electrode 5. On the outer peripheral surface of the airtight container 2, there are tip portions 11 of the remaining portion of the tube portion used to exhaust the remaining gas inside or to inject the excimer-generating gas when the airtight container 2 is manufactured. The auxiliary electrode 6 is disposed near the pointed end portion 11. The outer tube 7 is a member composed of a straight tube-shaped quartz glass with an outer diameter of 17.5 mm, and is a member having a gap from the outer peripheral surface of the airtight container 2. This gap portion serves as a flow path space 12 through which an inert gas such as nitrogen or argon will be described later. One pair of cock bodies 13a, 13b for sealing the outer tube 7 to hermetically seal the outer tube 7 is fused to both ends of the outer portion 7. On the one side of the plug body 13a, there is an inlet 14 for flowing into the runner space 12 of the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, and the other side of the plug body 1 3b is formed on the other side. An outlet 15 for nitrogen gas flows out of the space 12. An inert gas circulation mechanism (not shown) is connected between the inflow port 14 and the outflow port 15 to circulate nitrogen at a predetermined flow rate. The inert gas circulation mechanism is a pipe connected between the inflow port 14 and the outflow port 15 and is composed of a storage tank, a fluid pump, and the like which are arranged in the middle of the piping to store nitrogen gas. The plug bodies 13a and 13b are respectively installed with sockets 16a and 16b. The paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm 7 -17- 543074 A7 B7. V. Description of the invention (^ (Please read the precautions on the back before (Fill in this page). The lead wires 4 of the internal electrode 3 are arranged to penetrate the sockets 16 a, 16 b, and one of the sockets 16 b is connected to the lead wires 17 used to energize the external electrodes 5. The end of the lead wire 17 is connected to the auxiliary electrode 6, so that the lamp current can be prevented from flowing only to the external electrode 5 at the connection part with the lead wire 17. Therefore, it can be prevented by the overcurrent. The disconnection of the external electrode 5. In such a structure, when a voltage is applied between the external electrode 5 and the internal electrode 3, a dielectric barrier discharge can be generated between the two electrodes 3 and 5. Therefore, it is enclosed in The excimer-generating gas of the airtight container 2 will temporarily combine with the molecular state (excimer state), and when recovering from such a molecular state to the normal state of the atom, there will be a good efficiency to emit less ultraviolet rays that reabsorb, so that (Electrical) dielectric barrier The discharge lamp 1 emits light. The emitted ultraviolet wavelength band depends on the type of the excimer-generating gas enclosed. For example, when a large amount of xenon is enclosed, ultraviolet rays with a wavelength of 17 2 nm can be emitted. Consumption by employees of the Intellectual Property Bureau of the Ministry of Economic Affairs Cooperative cooperative printing is ideal to make the external electrode 5 thin if it does not hinder ultraviolet irradiation from the dielectric barrier discharge lamp 1. However, when the external electrode 5 is made thin, disconnection may occur when an overcurrent flows. However, the dielectric barrier discharge lamp 1 of the present invention is provided with an auxiliary electrode 6, so that a part of the current will flow to the auxiliary electrode 6, so that the entire current can be prevented from flowing to the external electrode 5 '. Therefore, it can be prevented by the overcurrent The disconnection of the external electrode 〇 When the external electrode 5 is wound around the outer periphery of the airtight container 2, an inductance component will be generated, and the generation of the inductance component will cause the impedance change, so that the national standard (CNS ) A4 specification (210X297mm) -18- 543074 A7 __ B7_ V. Description of the invention (& Please read the notes on the back before filling this page) Each part of the long axis direction of the device 2 will generate the easy and not easy parts of the dielectric barrier discharge, causing the parts along the long axis direction of the airtight container 2 to generate uneven amounts of ultraviolet radiation, so the discharge at the dielectric barrier will be reduced. The uniformity of the ultraviolet rays radiated in the long axis direction of the lamp 1. However, the auxiliary electrode 6 along the long axis direction of the airtight container 2 can prevent the inductance component from being generated by winding the external electrode 5 in a short circuit in a coil. This can eliminate the medium The impedance change in the long axis direction of the barrier discharge lamp 1 makes the dielectric barrier discharge in the entire area of the long axis direction of the airtight container 2 slightly uniform. Therefore, the uniformity of the ultraviolet rays irradiated by the long axis direction of the dielectric barrier discharge lamp 1 can be improved. . Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and the dielectric barrier discharge lamp is represented by an equivalent circuit, it is formed by the resistance component "R" of the discharge space portion and the capacitance component "C" of the airtight container 2 For a capacitive load, when the capacitance component “C” is increased, the power of the dielectric barrier discharge lamp 1 can be increased without increasing the applied voltage, so that the ultraviolet illuminance irradiated from the dielectric barrier discharge lamp 1 can be increased. The capacitance component "C" is to increase the contact area between the external electrode 5 and the auxiliary electrode 6 which will be a part of the external electrode, and the airtight container 2 to increase it. That is, since the auxiliary electrode 6 is provided, the electric power (power) of the dielectric barrier discharge lamp 1 can be increased without increasing the applied voltage. Therefore, the ultraviolet illuminance irradiated from the dielectric barrier discharge lamp 1 can be increased. Next, a second embodiment of the present invention will be described with reference to FIG. 4. It should be noted that the same parts as those described in the first embodiment will be denoted by the same reference numerals and descriptions thereof will be omitted (the same applies to the embodiments described below). Fig. 4 is a longitudinal sectional side view showing a (dielectric) dielectric barrier discharge lamp 1a. This paper size applies Chinese National Standard (CNS) A4 specification (210 × 297 mm) -19- 543074 A7 B7 V. Description of the invention (h (Please read the precautions on the back before filling this page) The dielectric barrier discharge lamp of this embodiment The basic structure of 1 a is the same as the structure of the dielectric barrier discharge lamp 1 of the first embodiment, and the difference is the number of auxiliary electrodes 6 provided. In this embodiment, it is along the long axis of the airtight container 2 Three auxiliary electrodes 6 are arranged in contact with the outer peripheral surface of the airtight container 2 and are wound around the external electrodes 5 around the airtight containers 2 and three auxiliary electrodes 6. The three auxiliary electrodes 6 are each slightly separated by 90. It is arranged at intervals of °, and one branch in the center is arranged near the tip portion 11. With such a structure, the number of auxiliary electrodes 6 can be increased to prevent the overcurrent from flowing to the external electrode 5 more reliably. This makes it possible to more reliably prevent the disconnection of the external electrode 5 caused by an overcurrent. The contact area of the auxiliary electrode 6 and the airtight container 2 which will be part of the external electrode is increased by increasing the number of the auxiliary electrodes 6 The capacitance component "C" when the dielectric barrier discharge lamp 1a is represented by an equivalent circuit of a capacitive load can be increased, so that the power of the dielectric barrier discharge lamp 1a can be further increased without increasing the applied voltage. Therefore, It can further increase the ultraviolet illuminance irradiated from the dielectric barrier discharge lamp 1 a. It is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The third embodiment of the present invention will be described with reference to FIGS. 5 to 7. FIG. 6 is a longitudinal sectional front view showing a (dielectric) dielectric barrier discharge lamp 1 b, FIG. 6 is a longitudinal sectional side view thereof, and FIG. 7 is a longitudinal sectional front view showing a part thereof enlarged. (Dielectric) barrier barrier discharge in this embodiment The basic structure of the lamp 1 b is the same as that of the (dielectric) dielectric barrier discharge lamp 1 of the first embodiment, and has a different structure of the internal electrode 18. The internal electrode 1 § is applicable to the country of this paper. Standard (CNS) A4 specification (210X297 mm) -20-543074 A7 B7 V. Description of the invention (;) 8 1 internal power supply (feed) body electrode 1 8 a and multiple conductive 1 mm。 Support (anchor) and connecting wire portion 1 8 c. Internal power supply electrode 1 8 a is the use of nickel, tungsten, molybdenum and other heat-resistant metals, or stainless steel, titanium and other metals formed diameter of 0.1 mm The wire is formed by winding at a pitch of 100% into a coil with an outer diameter of 1.2 mm, and it is arranged on the central axis along the major axis of the airtight container 2 and connects its two ends at At the same time as the molybdenum foil 8, it is sealed and fixed by the sealing portion 2b. The conductive support 1 8b is made of the same material as the internal power supply 1 8a and has a diameter of 0 · 3 1 mm. Each of the conductive supports 1 8 b is connected to the internal power-supply electrode 18 a by a connecting wire portion 1 8 c. Each conductive support 18 b is set to a pitch dimension ““ ”along the major axis direction of the airtight container 2 of 12 mm. As described in the first embodiment, the wire diameter “d 1” of the external electrode 5 is 0.1 mm, and the winding pitch “h” of the external electrode 5 is 1 to 2 mm. Therefore, the ratio of the wire diameter dimension “d 1” of the external electrode 5 to the pitch dimension “Η” of the conductive support is specified as “H / dl = 120”. With this structure, the internal electrode 18 is formed by the internal power supply electrode 18a, the conductive support 18b, and the connecting wire portion 18c. Therefore, when the internal power supply electrode 18a is weighted or lighted When thermal expansion is required to sag, the conductive support 1 8 b will contact the inner peripheral surface of the airtight container 2 for support, so that the internal power supply electrode 18 a can be prevented from drooping significantly. In addition, because the internal power supply electrode 1 8 a is formed into a wire shape, this paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page)
T 經濟部智慧財產局員工消費合作社印製 543074 A7 B7 五、發明説明（ (請先閲讀背面之注意事項再填寫本頁) 使得內部供電體電極1 8 a本身可吸收由熱膨脹所產生之 伸長，因此，可更進一步地防止由熱膨脹所引起之內部供 電體電極18 a的垂下。 由而，可防止內部電極1 8和外部電極5之距離形成 大的偏差（不均勻）’以致可防止內部電極1 8和外部電 極5之距離產生大的偏差爲原因而形成了放電容易產生之 部分及難以產生之部分，因此，可防止氣密容器2長軸方 向發生光分布之不均勻性，而可增進在氣密容器長軸方向 所照射之紫外線的均勻度。 又使導電性支承物1 8 b具有均勻之節距尺寸，致使 做爲內部電極1 8之一部分的導電性支承物1 8 b和（電 )介體之氣密容器2內周面之距離可縮短，及令導電性支 承物1 8 b和外部電極5之關係成爲一樣，使得容易產生 傳達氣密容器2內周面之介質障壁放電（沿面電介質障壁 放電），因此，可意圖增進啓動性，降低起動電壓及降低 點燈維持用電壓。 經濟部智慧財產局員工消費合作社印製 又因規定外部電極5之線直徑尺寸“ d 1 ”和導電性 支承物1 8 b之節距尺寸“ Η ”之比率爲“ H / d 1 = 12 0” ，使得導電性支承物1 8 b形成以適當間隔來配 置，因此，促進產生沿面介質障壁放電而可產生穩定之介 質障壁放電。 再者，於本實施形態，也與第1實施形態同樣，沿氣 密容器2長軸方向配置接置於氣密容器2外周面之輔助電 極6 ’因而，與第1實施形態同樣，由於配設輔助電極6 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） -22- 543074 A7 B7 五、發明説明（如 (請先閲讀背面之注意事項再填寫本頁) 所產生之作用、效果、具體地言時，可發揮防止由過電流 所引起之外部電極5的斷線，增進在介質障壁放電燈1 b 長軸方向所照射之紫外線均勻度，增進介質障壁放電燈 1 b的功率等。 其次’將依據圖8來說明本發明之第4實施形態。圖 8係顯¥紫外線照射裝置2 1的剖面圖。 該紫外線照射裝置2 1係由：複數支之（電）介質障 壁放電燈1 ;保持該等介質障壁放電燈1的保持框體2 2 ;要對於各介質障壁放電燈1施加電壓的高頻產生電路 2 3 ;及要循環氮氣於各介質障壁放電燈1之流道空間 1 2的惰氣循環機構（未圖示）等所構成。 保持框體2 2係由收容外殼2 4和冷卻部件2 5所形 成。冷卻部件2 5形成有複數之收容凹部2 6，而以各每 一支地嵌入介質障壁放電燈1於各收容凹部2 6。該等之 介質障壁放電燈1係以朝向各中心軸成平行之方向形成接 近來保持。具體地言時，外管7之外徑尺寸爲1 7 . 5 m m時’予以配置成相鄰之介質障壁放電燈1之間隔成爲 經濟部智慧財產局員工消費合作社印製 2 _ 5 m m。又形成要流動冷卻水之冷卻水流道2 7於收 容冷卻部件2 5。收容外殼2 4乃做爲接地用之導電構件 來使用’而構成爲在嵌入介質障壁放電燈1於收容凹部 2 6時，會導通插座1 6 b (參照圖1 )而可成爲接地之 結構。配置有紫外線所要照射之被照射物2 8於紫外線照 射裝置2 1之成相對向於來自複數支之介質障壁放電燈1 的紫外線放射方向的位置。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐) — 543074 A7 ___B7T Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 543074 A7 B7 V. Description of the invention ((Please read the precautions on the back before filling this page) so that the internal power supply electrode 1 8 a can absorb the elongation caused by thermal expansion, Therefore, it is possible to further prevent the internal power supply electrode 18 a from being caused to sag due to thermal expansion. As a result, it is possible to prevent the distance between the internal electrode 18 and the external electrode 5 from forming a large deviation (non-uniformity), so that the internal electrode can be prevented. The large deviation between the distance between the 18 and the external electrode 5 causes the parts that are easy to generate and the parts that are difficult to generate. Therefore, it is possible to prevent the unevenness of the light distribution in the longitudinal direction of the airtight container 2 and improve The uniformity of the ultraviolet rays irradiated in the long axis direction of the airtight container. The conductive support 1 8 b has a uniform pitch size, so that the conductive support 1 8 b as a part of the internal electrode 18 and ( The distance between the inner peripheral surface of the airtight container 2 of the mediator can be shortened, and the relationship between the conductive support 1 8 b and the external electrode 5 can be made the same, so that communication is easy to occur. The dielectric barrier discharge on the inner peripheral surface of the tight container 2 (discharge along the dielectric barrier) can be used to improve the startability, reduce the starting voltage, and reduce the voltage for maintaining the lighting. It is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs due to external regulations. The ratio of the wire diameter dimension “d 1” of the electrode 5 to the pitch dimension “Η” of the conductive support 1 8 b is “H / d 1 = 12 0” so that the conductive support 1 8 b is formed at an appropriate interval. Therefore, in this embodiment, the discharge along the dielectric barrier is promoted and a stable dielectric barrier discharge can be generated. Furthermore, in this embodiment, as in the first embodiment, it is arranged along the long axis of the airtight container 2 and placed in an airtight manner. The auxiliary electrode 6 'on the outer peripheral surface of the container 2 is therefore the same as the first embodiment. Since the auxiliary electrode 6 is provided, the paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -22- 543074 A7 B7 5 、 Instructions of the invention (such as (please read the precautions on the back before filling this page), the effect, effect, and specifically, can prevent the external electrode caused by overcurrent 5 The disconnection improves the uniformity of ultraviolet rays radiated in the long axis direction of the dielectric barrier discharge lamp 1 b, improves the power of the dielectric barrier discharge lamp 1 b, and the like. Next, a fourth embodiment of the present invention will be described with reference to FIG. 8. FIG. 8 This is a cross-sectional view of the ultraviolet irradiation device 21. The ultraviolet irradiation device 21 is composed of a plurality of (electric) dielectric barrier discharge lamps 1; a holding frame 2 2 for holding the dielectric barrier discharge lamps 1; A high-frequency generating circuit 2 3 to which a voltage is applied to each dielectric barrier discharge lamp 1; and an inert gas circulation mechanism (not shown) to circulate nitrogen in the channel space 12 of each dielectric barrier discharge lamp 1 and the like. 22 is formed by the housing case 24 and the cooling member 25. The cooling member 25 is formed with a plurality of accommodating recesses 26, and each of the dielectric barrier discharge lamps 1 is embedded in each accommodating recess 26. These dielectric barrier discharge lamps 1 are held in close proximity in a direction parallel to each central axis. Specifically, when the outer diameter of the outer tube 7 is 17.5 mm, the distance between the adjacent dielectric barrier discharge lamps 1 is arranged to be printed by the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 2_5 mm. In addition, a cooling water flow path 27 for cooling water to flow is formed in the containing cooling part 25. The housing case 24 is used as a conductive member for grounding, and is configured so that when the dielectric barrier discharge lamp 1 is embedded in the housing recess 26, the socket 16b (see FIG. 1) is turned on and can be grounded. A position to be irradiated with the ultraviolet rays to be irradiated 2 8 is arranged on the ultraviolet ray irradiating device 21 1 with respect to the direction of ultraviolet radiation from the plurality of dielectric barrier discharge lamps 1. This paper size applies to China National Standard (CNS) A4 (210X297 mm) — 543074 A7 ___B7
五、發明説明（L (請先閲讀背面之注意事項再填寫本頁) 於如此之結構中，當由該紫外線照射裝置2 1來對於 被照射物2 8實施照射紫外線時，將如圖8所示，配置被 照射物2 8於成相對向於紫外線照射裝置2 1的介質障壁 放電燈1的位置，而驅動高頻產生電路2 3。 由於驅動高頻產生電路2 3，將會依據上述之發光原 理從介質障壁放電燈1照射紫外線，而由透射氣密容器2 和外管7之紫外線碰撞於被照射物2 8表面，使得可實施 洗淨該表面之處理。 而介質障壁放電燈1乃具備氣密容器2和外管7之雙 重管構造，因此，可防止污穢附著於外部電極5。又可防 止從外部電極5所飛出之金屬離子附著於被照射物2 8。 又可接近介質障壁放電燈1於被照射物，因此，能以良好 效率來對於被照射物2 8照射紫外線。 又該紫外線照射裝置2 1乃配置複數支之介質障壁放 電燈1成接近之狀態，使得紫外線照射量可在被照射物 2 8表面略成爲均勻，因此，可增進由紫外線所實施之洗 淨性能。 經濟部智慧財產局員工消費合作社印製 因形成有流道空間1 2於介質障壁放電燈1之氣密容 器2外周面和外管7內周面7之間，並流動有惰氣之氮氣 於該流道空間1 2，使得可由該氮氣從流道空間1 2內去 除大氣，因此，可防止由含於大氣中之氧吸收所照射之紫 外線的情事。又可由該氮氣來冷卻介質障壁放電燈1 ，使 得可防止由發光時之熱而上升溫度之情事，同時可防止伴 隨著溫度上升而會降低紫外線發光效率之情事，因此，可 本紙張尺度適用中國國家標準（CNS ) A4規格(210X29?公釐） · — " -24 - 543074 A7 ______B7 五、發明説明（七 維持高的發光效率。 又依據該紫外線照射裝置2 1 ，因對於被照射物2 8 (請先閱讀背面之注意事項再填寫本頁) 所照射之紫外線，介質障壁放電燈丨形成直接面對面，因 此，以配置複數支之介質障壁放電燈丨成倣效被照射物 2 8表面之凹凸形狀時，甚至對於未形成平面狀之被照射 物2 8也可由良好效率來照射紫外線。 再者’本實施形態之紫外線照射裝置2 1 ，以使用在 第1實施形態所說明之介質障壁放電燈1時爲例來說明， 但也可替代該介質障壁放電燈1，使用第2實施形態所說 明之介質障壁放電燈1 a ，或第3實施形態所說明之介質 障壁放電燈1 b。 〔發明之效果〕 經濟部智慧財產局員工消費合作社印製 依據申請項1記載之發明的放電燈，因具有沿氣密容 器長軸方向外周圍纏繞成線圈狀之外部電極，及朝氣密容 器長軸方向配置成接觸於其外周面之同時，與外部電極一 齊纒繞於氣密容器且具有較外部剖面積廣濶之剖面積的輔 助電極，因而外部電極雖爲了不妨礙來自放電燈之照射光 而形成爲細小，以致容易由過電流而產生斷線，但由於配 設輔助電極而可防止過電流會流於外部電極，使得可防止 由過電流而引起之外部電極的斷線。又纏繞外部電極於氣 密容器外周時，會產生電感而成爲降低氣密容器長軸方向 所照射之光的均勻度之原因，但以沿氣密容器長軸方向配 設輔助電極，就可短路線圈狀之外部電極而防止產生電感 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -25- 543074 A7 ___B7 五、發明説明（^ (請先閲讀背面之注意事項再填寫本頁) ’由而消除放電燈長軸方向的阻抗變化，而能在氣密容器 長軸方向的整個區域產生穩定放電，使得可增進在氣密容 器長軸方向所照射之光的均勻度。再者，放電燈若以等效 電路來表示時，係由放電空間部分之電阻成分“ R，，，及 氣密容器部分之電容部分“ C ”所形成之電容性成分，而 在增加電容成分“ C ”時，就可不需要提高施加電壓下來 提高放電燈之功率，使得可增進來自放電燈所照射之光的 照度，而以增大外部電極及成爲外部電極一部分之輔助電 極與氣密容器的接觸面積，就可增大該電容成分“ C ” ， 亦即，由於配設輔助電極，就可不必要提高所施加之電壓 下’可提高放電燈之功率，以致可增進從放電燈所照射之 光的照度。 經濟部智慧財產局員工消費合作社印製 依據本發明，於申請項1之放電燈中，外部電極之線 直徑尺寸爲d 1 m m，纏繞節距尺寸爲h m m時，因規定 爲1 0 < h / d 1 < 1 〇 〇之關係，因而，可抑制由外部 電極遮蔽從氣密容器所照射之光的遮光率於1 0 %以下， 而可良好地維持光的照射性能。又規定成如此時，可防止 外部電極之節距間隙形成過寬，使得可促進產生傳導氣密 容器內周面之沿面放電而可穩定地產生放電。 依據本發明，於申請項1之放電燈，形成收縮部於氣 密容器兩端部，因外部電極纏繞複數次於該收縮部，因而 ，可防止纏繞於氣密容器外周圍之外部電極鬆弛，及防止 鬆驰爲原因所形成之外部電極纏繞節距尺寸之位錯。 依據本發明，於申請項1之放電燈，形成箍縮密封於 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ~ ' -26 - 543074 A7 B7 五、發明説明（h 氣密容器兩端部，而在氣密容器之兩端部的朝向密封部之 傾斜面處形成有粗面部，因而，外部電極纏繞於朝向形成 於氣密容器兩端之密封部的傾斜面處之粗面部，也可由粗 面部之大的摩擦阻力而可防止外部電極沿著傾斜面產生滑 落之情事，因此，可穩定外部電極之纏繞狀態。 依據本發明，於申請項1之放電燈中，內部電極因具 有配置於氣密容器內之略中心軸上且朝該中心軸方向展延 之內部供電體電極，及沿氣密容器內周面形成環狀且沿氣 密容器中心軸方向配置於略等間隔之位置，而連接於內部 供電體電極之複數個導電性支承物，因而，當內部供電體 電極由自重等而要垂下時，導電性支承物會接觸於氣密容 器內周面而予以支承，因而，可防止內部供電體電極產生 大的垂下。而由於防止該垂下，可防止內部電極和外部電 極之距離產生大的偏差，使得可防止起因於內部電極和外 部電極之距離產生大的偏差所形成之容易產生放電部分和 難以產生放電部分的情事，由而可在氣密容器長軸方向之 整個區域成略均勻地產生放電，因此，可增進在氣密容器 長軸方向所照射之光的均勻度。又因具有導電性支承物而 可縮短做爲內部電極之一部分的導電性支承物和氣密容器 內周面之距離，以致傳達氣密容器內周面之沿面放電成爲 容易產生，故可增進啓動性，進而可意圖降低啓動電壓及 降低維持點燈之電壓。 依據本發明之放電燈，外部電極之線直徑尺寸爲d 1 m m，導電性支承物之節距尺寸爲H m m時，因規定爲 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) #- 經濟部智慧財產局員工消費合作社印製 -27- 543074 A7 _ B7_ 五、發明説明（心 (請先閲讀背面之注意事項再填寫本頁) 1 0 0 < H / d 1 < 3 0 0，而使導電性支承物形成能以 適當間隔來配置，使得可促進產生傳達氣密容器內周面之 沿面放電，而可產生穩定之放電。 依據本發明，於申請項1之放電燈，輔助電極因配置 於存在於氣密容器外周部的尖端部近旁，因而，輔助電極 或尖端部雖可妨礙從氣密容器所照射之光，但配置該等尖 端部和輔助電極於近旁且使之位於不需要照射光之一側時 ，可維持來自放電燈之光的观射成爲良好狀態。又該尖端 部可做爲要配設輔助電極時之定位基準（參考）來利用。 依據本發明，於申請項1之放電燈，因配設複數之輔 助電極，使得可更進一步確實地防止由過電流流動於外部 電極而產生外部電極之斷線，又由於成爲外部電極之一部 分的輔助電極和氣密容器之接觸面積成爲更大，使得可更 增加以電容性負載之等效電路表示放電燈時的電容成分“ C ” ，因此，能在不提高施加電壓之下，予以更進一步地 增進放電燈之功率，且可更進一步地增進從放電燈照射之 光的照度。 經濟部智慧財產局員工消費合作社印製 依據本發明，於申請項1之放電燈，因連接要通電於 外部電極之引出線於輔助電極，因而，可防止所有之燈電 流會在與引出線的連接部分僅流至外部電極之情事，因此 ，可防止由過電流所引起之外部電極的斷線。 依據申請項2之發明，於申請項1之放電燈中，因配 設有光透射性之材料所形成而覆蓋氣密容器之管狀外管， 使得可防止污穢附著至纒繞於氣密容器外周圍之外部電器 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） " -28- 543074 A7 ____B7 五、發明説明（^ ’及可防止從外部電極所放出之金屬離子附著於周圍之構 件。 (請先閱讀背面之注意事項再填寫本頁) 依據申§靑項3之紫外線照射裝置，具有申請項2所記 載之複數個放電燈及使該等放電燈各個中心軸成平行方向 成接近來保持的保持框體，因而，在申請項1或2記載之 放電燈，以適當地選擇放電（電）介體來照射紫外線，且 對於該放電燈可發揮與申請項2所記載之配設外管時同樣 的作用效果。再者，放電燈可對於要照射紫外線之被照射 物直接形成面對面，使得能以良好效率來對於被照射物照 射紫外線，又予以改變複數放電燈之配置位置，也可對於 未形成平面狀之被照射物，能以良好效率來進行紫外線照 射。 〔圖式之簡單說明〕 圖1係顯示本發明之第i實施形態的（電）介質障壁 放電燈之縱向剖面正面圖。 圖2係其縱向剖面側面圖。 經濟部智慧財產局員工消費合作社印製 圖3 ( a )係放大氣密容器端部來顯示之正面圖，（ b )爲其平面圖。 圖4係顯示本發明之第2實施形態的介質障壁放電燈 之縱向剖面側面圖。 圖5係顯示本發明之第3實施形態的介質障壁放電燈 之縱向剖面正面圖。 圖6係其縱向剖面側面圖。 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） -29- 543074 A7 B7 五、發明説明（\7 圖7係以放大一部分來顯示之縱向部面正面圖。 圖8係顯示本發明之第4實施形態的紫外線照射裝置 之剖面圖。 圖9係顯示習知例之（電）介質障壁放電燈的縱向剖 面正面圖。 〔符號之說明〕 1、Γ a、1 b :放電燈 2 b :密封部 5 :外部電極 7 :外管 10:粗面部 1 7 :引出線 18a :內部供電體電極 2 1 :紫外線照射裝置 2 :氣密容器 3 :內部電極 6 :輔助電極 9 :收縮部 1 1 :尖端部 1 8 :內部電極 1 8 b :導電性支承體 2 2 :保持框體 (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 -30- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）V. Description of the invention (L (please read the precautions on the back before filling this page) In such a structure, when the ultraviolet irradiation device 21 is used to irradiate the object 2 8 with ultraviolet rays, it will be as shown in Figure 8 As shown, the object to be irradiated 28 is arranged at a position opposite to the dielectric barrier discharge lamp 1 of the ultraviolet irradiation device 21, and the high-frequency generating circuit 2 3 is driven. Because the high-frequency generating circuit 2 3 is driven, it will be based on the above The light emission principle radiates ultraviolet rays from the dielectric barrier discharge lamp 1, and the ultraviolet rays transmitted through the airtight container 2 and the outer tube 7 collide with the surface of the illuminated object 28, so that the surface can be cleaned. The dielectric barrier discharge lamp 1 is Equipped with the double tube structure of the airtight container 2 and the outer tube 7, it can prevent dirt from adhering to the external electrode 5. It can also prevent metal ions flying out of the external electrode 5 from adhering to the irradiated object 28. It can also access the medium The barrier discharge lamp 1 is irradiated with the object to be irradiated, and therefore, the object to be irradiated can be irradiated with ultraviolet rays with good efficiency. The ultraviolet irradiation device 21 is configured so that a plurality of dielectric barrier discharge lamps 1 are in a close state. , So that the amount of ultraviolet radiation can be slightly uniform on the surface of the object to be irradiated, so that the cleaning performance by ultraviolet rays can be improved. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs due to the formation of a runner space 1 2 on the medium Between the outer peripheral surface of the airtight container 2 of the barrier discharge lamp 1 and the inner peripheral surface 7 of the outer tube 7, an inert nitrogen gas flows in the flow channel space 12 so that the nitrogen can be removed from the atmosphere from the flow channel space 12 Therefore, it is possible to prevent the ultraviolet rays irradiated by the oxygen contained in the atmosphere from being absorbed. The nitrogen barrier can also be used to cool the dielectric barrier discharge lamp 1 so that the temperature rise caused by the heat at the time of light emission can be prevented and the accompanying As the temperature rises, the luminous efficiency of ultraviolet rays will be reduced. Therefore, the Chinese paper standard (CNS) A4 (210X29? Mm) can be applied to this paper size. — — &Quot; -24-543074 A7 ______B7 5. Description of the invention (Seven maintenance High luminous efficiency. According to the ultraviolet irradiation device 2 1, because of the ultraviolet rays irradiated to the object 2 8 (please read the precautions on the back before filling this page), Barrier discharge lamps 丨 form directly facing each other, so when a plurality of dielectric barrier discharge lamps are arranged to imitate the concave and convex shape of the surface of the irradiated object 28, good efficiency can be achieved even for the irradiated object 28 that does not form a planar shape. Furthermore, the ultraviolet irradiation device 2 1 of this embodiment will be described using the dielectric barrier discharge lamp 1 described in the first embodiment as an example, but it can also be used instead of the dielectric barrier discharge lamp 1. The dielectric barrier discharge lamp 1 a described in the second embodiment, or the dielectric barrier discharge lamp 1 b described in the third embodiment. [Effects of the invention] Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs according to the application item 1 The discharge lamp of the invention has an external electrode wound in a coil shape around the long axis of the airtight container, and is arranged in contact with the outer peripheral surface of the airtight container in the long axis direction, and is wound around the airtight with the external electrode. The container has an auxiliary electrode with a wider cross-sectional area than the external cross-sectional area. Therefore, although the external electrode does not interfere with the light from the discharge lamp, It is small in size so that a disconnection is easily caused by an overcurrent, but an auxiliary electrode is provided to prevent an overcurrent from flowing to an external electrode, thereby preventing an external electrode from being disconnected due to an overcurrent. When the external electrode is wound around the outer periphery of the airtight container, inductance will be generated to reduce the uniformity of the light irradiated in the long axis direction of the airtight container. However, by providing an auxiliary electrode along the long axis direction of the airtight container, it can be short. Coiled external electrodes to prevent inductance. This paper size applies Chinese National Standard (CNS) A4 specifications (210X297 mm) -25- 543074 A7 ___B7 V. Description of the invention (^ (Please read the precautions on the back before filling in this (Page) 'The impedance change in the long axis direction of the discharge lamp is eliminated, and a stable discharge can be generated in the entire area of the long axis direction of the airtight container, so that the uniformity of the light irradiated in the long axis direction of the airtight container can be improved. Or, if the discharge lamp is represented by an equivalent circuit, it is a capacitive component formed by the resistance component "R," of the discharge space portion and the capacitance portion "C" of the airtight container portion, and the capacitance component is increasing " C ”, it is not necessary to increase the power of the discharge lamp by increasing the applied voltage, so that the illuminance of the light from the discharge lamp can be increased, and the external electrode and the formation can be increased. The contact area of the auxiliary electrode that is part of the external electrode and the airtight container can increase the capacitance component "C", that is, because the auxiliary electrode is provided, the applied voltage can be increased unnecessarily. Power, so that the illuminance of the light radiated from the discharge lamp can be increased. According to the present invention, in the consumer lamp of the Intellectual Property Bureau of the Ministry of Economic Affairs, in the discharge lamp of application item 1, the wire diameter of the external electrode is d 1 mm, wound When the pitch size is hmm, the relationship is defined as 1 0 < h / d 1 < 100. Therefore, the light shielding rate of shielding the light irradiated from the airtight container by the external electrode can be suppressed to 10% or less. The light irradiation performance can be maintained well. When it is stipulated in this way, the pitch gap of the external electrodes can be prevented from being too wide, so that the discharge along the inner peripheral surface of the conductive airtight container can be promoted and the discharge can be stably generated. According to the present invention, in the discharge lamp of the application item 1, the shrinkage portions are formed at both ends of the airtight container, and the external electrode is wound around the shrinkage portions several times, so that it can be prevented from being wound around the airtightness. The external electrodes around the device are loosened, and the dislocation of the external electrode winding pitch caused by slackness is prevented. According to the present invention, the discharge lamp in the application item 1 forms a pinch seal. Standard (CNS) A4 specification (210X297 mm) ~ '-26-543074 A7 B7 V. Description of the invention (h Both ends of the airtight container are formed on the inclined surfaces of the two ends of the airtight container facing the sealing portion There is a rough surface. Therefore, the outer electrode is wound on the rough surface facing the inclined surface formed at the sealing portion at both ends of the airtight container. The large frictional resistance of the rough surface can prevent the external electrode from sliding along the inclined surface. Therefore, the winding state of the external electrode can be stabilized. According to the present invention, in the discharge lamp of claim 1, the internal electrode has an internal power supply electrode disposed on a slightly central axis in the airtight container and extending toward the central axis, and along the inner peripheral surface of the airtight container. A plurality of conductive supports connected to the internal power supply electrode are formed in a ring shape and are arranged at equal intervals along the central axis of the airtight container. Therefore, when the internal power supply electrode is suspended by its own weight, etc., it conducts electricity. The flexible support is held in contact with the inner peripheral surface of the airtight container, so that the internal power supply electrode can be prevented from drooping. By preventing this sag, it is possible to prevent a large deviation in the distance between the internal electrode and the external electrode, so that it is possible to prevent the occurrence of a discharge-prone portion and a difficult-to-discharge portion caused by a large deviation in the distance between the internal electrode and the external electrode. Therefore, the discharge can be generated slightly uniformly in the entire area of the long-axis direction of the airtight container, and therefore, the uniformity of the light irradiated in the long-axis direction of the airtight container can be improved. Because of the conductive support, the distance between the conductive support which is a part of the internal electrode and the inner peripheral surface of the airtight container can be shortened, so that the discharge along the inner peripheral surface of the airtight container can be easily generated, which can improve the startability. , Which can further reduce the start-up voltage and the voltage for maintaining the lighting. According to the discharge lamp of the present invention, when the wire diameter dimension of the external electrode is d 1 mm and the pitch dimension of the conductive support is H mm, the Chinese National Standard (CNS) A4 specification (210X297 mm) is applied as the paper size. ) (Please read the notes on the back before filling this page) #-Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs-27- 543074 A7 _ B7_ V. Description of the invention (Please read the notes on the back before filling in this (Page) 1 0 0 < H / d 1 < 3 0 0 and the formation of the conductive support can be arranged at an appropriate interval, so as to promote the occurrence of creeping discharges that convey the inner peripheral surface of the airtight container, and to produce stability According to the present invention, in the discharge lamp of claim 1, since the auxiliary electrode is disposed near the tip portion of the outer periphery of the airtight container, the auxiliary electrode or the tip portion may obstruct the light radiated from the airtight container. However, when the tip portion and the auxiliary electrode are arranged nearby and located on the side that does not need to irradiate light, the observation of the light from the discharge lamp can be maintained in a good state. The tip portion can be used as an auxiliary device. According to the present invention, a plurality of auxiliary electrodes are provided in the discharge lamp of the application item 1 according to the present invention, so that it is possible to more reliably prevent the external electrode from being generated by an overcurrent flowing to the external electrode. If the wire is broken, the contact area between the auxiliary electrode and the airtight container, which is part of the external electrode, becomes larger, so that the capacitance component "C" when the discharge lamp is represented by an equivalent circuit of a capacitive load can be increased. Without increasing the applied voltage, the power of the discharge lamp can be further increased, and the illuminance of the light irradiated from the discharge lamp can be further improved. The Consumer Cooperative of the Intellectual Property Bureau, Ministry of Economic Affairs, printed according to the present invention, and applied for item 1 The discharge lamp is connected to the auxiliary electrode with the lead wire to be energized to the external electrode. Therefore, all the lamp current can be prevented from flowing to the external electrode only in the connection part with the lead wire. Therefore, it can be prevented by the overcurrent. The disconnection of the external electrode caused by the invention. According to the invention of claim 2, the discharge lamp of claim 1 is provided with light. A tubular outer tube formed of a radioactive material covering the airtight container to prevent dirt from adhering to external electrical appliances entangled around the outside of the airtight container. This paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm). " -28- 543074 A7 ____B7 V. Description of the invention (^ 'and can prevent metal ions released from external electrodes from adhering to surrounding components. (Please read the precautions on the back before filling this page) According to the application § 靑The ultraviolet irradiation device of 3 has a plurality of discharge lamps described in application 2 and a holding frame that holds the central axes of the discharge lamps in parallel and close to each other. Therefore, the discharge lamp described in application 1 or 2 In order to irradiate ultraviolet rays by appropriately selecting a discharge (electric) medium, the discharge lamp can exert the same effect as that when the outer tube is provided as described in the application item 2. In addition, the discharge lamp can directly face to face the object to be irradiated with ultraviolet rays, so that the object can be irradiated with ultraviolet rays with good efficiency, and the arrangement position of the plurality of discharge lamps can also be changed. The irradiation object can perform ultraviolet irradiation with good efficiency. [Brief Description of the Drawings] Fig. 1 is a front view showing a longitudinal section of a (dielectric) dielectric barrier discharge lamp according to an i-th embodiment of the present invention. Fig. 2 is a longitudinal sectional side view thereof. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Figure 3 (a) is a front view showing the end of the airtight container enlarged, and (b) is a plan view. Fig. 4 is a longitudinal sectional side view showing a dielectric barrier discharge lamp according to a second embodiment of the present invention. Fig. 5 is a longitudinal sectional front view showing a dielectric barrier discharge lamp according to a third embodiment of the present invention. Fig. 6 is a longitudinal sectional side view thereof. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -29- 543074 A7 B7 V. Description of the invention (\ 7 Figure 7 is a front view of the longitudinal section shown in an enlarged part. Figure 8 Series A sectional view of an ultraviolet irradiation device according to a fourth embodiment of the present invention is shown in Fig. 9. Fig. 9 is a front view of a longitudinal section of a conventional (dielectric) dielectric barrier discharge lamp. [Description of Symbols] 1. Γ a, 1 b: Discharge lamp 2 b: Sealing part 5: External electrode 7: Outer tube 10: Rough surface 1 7: Lead-out wire 18a: Internal power supply electrode 2 1: Ultraviolet irradiation device 2: Airtight container 3: Internal electrode 6: Auxiliary electrode 9 : Shrink portion 1 1: Tip portion 1 8: Internal electrode 1 8 b: Conductive support 2 2: Holder frame (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperative of Intellectual Property Bureau, Ministry of Economic Affairs -30- This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm)