JP3891192B2 - Dielectric barrier discharge lamp irradiation device - Google Patents

Description

  The present invention relates to an irradiation apparatus including a dielectric barrier discharge lamp using dielectric barrier discharge.

  FIG. 13 is a schematic explanatory view of a conventional dielectric barrier discharge lamp. 13A is a vertical front view of the lamp, FIG. 13B is a vertical side view of the lamp, and FIG. 13C is a perspective view illustrating a detailed structure of a power feeding unit of the lamp. The lamp includes a discharge vessel 10 made of a light-transmitting dielectric material having a double cylindrical tubular shape, and a net-like first electrode 11 on the outer surface 15 of an outer cylindrical portion 101 of the discharge vessel 10 and the discharge vessel 10. The second electrode 12 having a semi-cylindrical shape disposed via a dielectric constituting the inner cylindrical portion 102, and the spring property for tightly fixing the second electrode 12 to the inner cylindrical portion 102 of the discharge vessel 10 A dielectric barrier discharge lamp having a copper feeding portion 31 connected to the second electrode holding component 16 having a copper feeding path, a copper feeding path 32 using a copper wire, and a copper connector 33 configured as a part of the feeding path. The inside of the discharge vessel 10 is filled with, for example, xenon as a discharge gas.

  The lamp generates a dielectric barrier discharge in the discharge vessel by applying a high frequency voltage between the electrodes 11 and 12, and the discharge excites the discharge gas to form excimer molecules. Excimer light specific to the composition of the discharge gas can be generated. The lamp is widely used as a light source for ultraviolet irradiation used in, for example, a semiconductor or liquid crystal light cleaning process, and as a light source for reading used through a phosphor.

  The dielectric barrier discharge lamp having the above-described configuration has a very high applied voltage during lighting operation and performs high-frequency lighting, and the dielectric barrier discharge generated in the discharge vessel under the high-voltage and high-frequency lighting conditions. In addition, a weak electric discharge, such as a corona discharge, occurs near the surface of the electrode in contact with the atmosphere or in the vicinity of the discharge vessel, and oxygen in the atmosphere is excited by the electric discharge to generate a trace amount of ozone. In general, ozone has strong oxidizing properties, and even if the amount of ozone generated by the electric discharge is very small, it may adversely affect peripheral devices and processing steps.

By appropriately selecting a discharge gas for the lamp, light having a short wavelength of 200 nm or less, so-called vacuum ultraviolet light can be generated. The vacuum ultraviolet light is absorbed by oxygen, as is generally known. When the lamp is lit in the atmosphere, most of the generated light is absorbed by oxygen, and the light output from the lamp is drastically reduced. For example, when xenon is selected as the discharge gas, the central emission wavelength is λ = 172 nm, the absorption coefficient of oxygen at the wavelength is as large as 15 cm ^−1, and the light emission intensity is about 3 mm from the lamp. Becomes about 1/2 to 1/3. Oxygen that has absorbed vacuum ultraviolet light becomes a source that generates a large amount of ozone, and may have a negative effect on peripheral devices and processing steps due to the strong oxidizing properties of ozone.

  The vacuum ultraviolet light is absorbed by oxygen and the light output is drastically reduced, a large amount of ozone is generated by the absorption, and furthermore, a trace amount generated by the electric discharge generated near the electrode surface or discharge vessel in contact with the atmosphere. In order to avoid problems associated with oxidation of the device due to ozone, the lamp is conventionally disposed in a lamp house having a window portion made of a light transmissive member for extracting light emitted from the lamp, Nitrogen gas was passed through the lamp house to replace it with the atmosphere, and the oxygen concentration in the lamp house was reduced as much as possible.

  For example, in Japanese Patent Application Laid-Open No. 7-288109, a dielectric barrier discharge lamp filled with a discharge gas mainly composed of xenon is placed in a casing that is covered at the front by a window member that extracts at least a part of flat ultraviolet excimer light. In a so-called lamp house, it is disclosed that it is arranged with at least one gas selected from helium, neon, krypton, argon, xenon, hydrogen and nitrogen.

  In this irradiation apparatus, the extreme attenuation of vacuum ultraviolet light due to the absorption of oxygen is eliminated, but some oxygen remains in the lamp house even after replacement with nitrogen, and a small amount of oxygen from the minute gap of the lamp house. A small amount of ozone of about 10 ppm or less is generated in the lamp house. Even with a small amount of ozone as described above, when the irradiation device is used for a long time, the feeding part of the lamp and the copper feeding member used in the feeding path are gradually oxidized and corroded by the ozone, There was a problem that the lamp could not be lit due to poor conductivity. In addition, there is a problem that a connector which is a part of a power feeding path connecting the lamp and the irradiation device cannot be disconnected due to oxidative corrosion.

  In addition, the irradiation device is provided with an electrical component storage section that is covered with a partition wall adjacent to the lamp house, and the electrical component storage section is used for a coil for generating a high-frequency voltage and an output monitor for the lamp. Electrical components such as circuits are stored. Each of the electrical components is mechanically fixed to a partition wall that separates the lamp house and the electrical component storage portion using screws or the like.

In addition, a power supply path for applying a high-frequency voltage to the lamp is taken in from the electrical component housing portion into the lamp house via a connector that forms part of the power supply path provided in the partition wall. A very small amount of ozone generated in the lamp house enters the electrical component housing portion through a very small gap such as an electrical component fixing screw portion, and gradually oxidizes and corrodes the power supply path member. There was a problem of going.
JP-A-7-288109

  An object of the present invention is to provide a dielectric barrier discharge lamp irradiation device that is stable even when the device is turned on for a long time by suppressing oxidative corrosion caused by ozone to a power supply path including a power supply portion and a connector portion of the lamp provided in the irradiation device. .

A dielectric barrier discharge lamp irradiation apparatus according to the present invention includes a discharge vessel at least partially made of a dielectric, a first electrode provided in the discharge vessel, and a second electrode disposed via the dielectric. A dielectric barrier discharge lamp having a power supply section connected to the first and second electrodes and a power supply path, and a light transmissive member for extracting light emitted from the dielectric barrier discharge lamp. A lamp house having a configured window,
On the lamp house, an electrical component storage unit is disposed adjacent to a partition wall, and an ozone resistant material is used or coated on at least the power supply unit and a part of the power supply path. .

  Ni, Ni alloy, or other ozone resistant metals can also be used as the ozone resistant material.

  According to the present invention, by using an ozone-resistant material for the high-frequency voltage power supply section and power supply path of the dielectric barrier discharge lamp, a very small amount of ozone generated in the lamp house even when the lamp is lit for a long time. Therefore, a stable dielectric barrier discharge lamp irradiating device can be provided even when used for a long time without being corroded by the power supply section and the power supply path.

Specific examples of the present invention will be described below. FIG. 1A is an explanatory view showing a first embodiment of an irradiation apparatus provided with a dielectric barrier discharge lamp. As shown in FIG. 1 (a), the irradiation apparatus 1 provided with the dielectric barrier discharge lamp 4 includes a lamp house 2 and an electrical component storage unit 21, and the lamp house 2 is a light transmissive member. There is a window portion 3 made of quartz glass, and light emitted from the dielectric barrier discharge lamp 4 is reflected by the reflecting plate 5 and irradiated from the window portion 3. The lamp 4 is fixed to a lamp fixing block 6 made of aluminum which is an ozone-resistant material, and is electrically grounded through the fixing block 6. In addition, a high frequency voltage is applied to the second electrode of the lamp 4 through the power supply unit 13 and the power supply path 14 attached to the holding component. The power supply path 14 is connected to the high-frequency voltage generating coil 23 via a connector 8 that forms a part of the power supply path provided in the partition wall of the lamp house 2 in the electrical component storage portion 21 adjacent to the lamp house 2. Yes. In addition to the high-frequency voltage generating coil 23, the electrical component storage unit 21 stores a control circuit 22 such as an output monitoring circuit for the lamp. The control circuit 22 and the high-frequency voltage generating coil 23 are mechanically fixed by screws on a partition wall that separates the electrical component storage unit 21 and the lamp house 2. The lamp house 2 is provided with a gas inlet 9A and a gas outlet 9B for nitrogen gas replacement. When nitrogen gas is allowed to flow into the lamp house 2, the vicinity of the power supply path 14 and the connector 8 tends to accumulate due to the presence of the reflector 5 and the lamp fixing block 6, and the lamp is radiated from the lamp in the vicinity of the power supply path 14 and the connector 8. The ozone generated by the light and the like is difficult to flow in, and the ozone concentration tends to be low in the vicinity. Furthermore, since ozone (atomic weight is 48) is heavier than nitrogen (atomic weight is 28), it tends to accumulate below the lamp house 2 and the ozone concentration in the vicinity tends to be low. Therefore, if the electrical component storage unit 21 is on the partition wall of the lamp house 2, it is difficult for ozone to enter the electrical component storage unit 21, and oxidation and oxidative corrosion by the ozone of the power supply path 14 and the connector 8 can be prevented. The effect can be expected. In addition, Ni material or Ni alloy, which is an ozone resistant material, is used for the power supply unit 13 from the lamp and the power supply path 14. Further, the Ni material is coated on the connector 8 that forms part of the power supply path disposed on the lamp side and the irradiation device side. The lamp 4 installed in the irradiation apparatus has a discharge cylinder made of quartz glass having a double cylindrical tubular shape, and a xenon gas was used as a discharge gas and sealed at a sealing pressure of 40 kPa. When the lamp was turned on at a lighting frequency of about 20 kHz and an applied voltage of 6 kV, the power supply unit 13, the power supply path 14, and the connector 8 of the lamp were subjected to oxidation and oxidative corrosion by ozone even after long-time lighting. There were no inconveniences such as conductivity deterioration or connector disconnection.

  The irradiation apparatus shown as the second embodiment in FIG. 1 (b) has the same configuration as the above-described configuration, and introduces gas for the electrical component storage unit for nitrogen gas replacement into the electrical component storage unit adjacent to the lamp house. A port 9C and a gas discharge port 9D for electrical component storage are provided. Nitrogen gas was allowed to flow into the electrical component storage unit 21 from the periphery of the irradiation apparatus 1 so as to be 300 Pa pressure. By making the pressure of the electrical component storage part higher than the periphery of the irradiation device, it is possible to avoid ozone caught from the outside of the irradiation device. When the lighting frequency of the lamp installed in the irradiation device is about 20 kHz and the applied voltage is 6 kV, the lamp power supply unit 13, the power supply path 14, and the lamp of the irradiation device 1 even after long-time lighting. Each component such as the connector 8 forming a part of the power supply path connecting the irradiation device and the high-frequency voltage generating coil 23 in the electrical component storage unit 21 cannot be detached due to oxidation by ozone or oxidation corrosion. In addition, there were no problems such as the power supply path and the deterioration of the conductivity of each electrical component.

  As a third embodiment, FIG. 2 (a) shows an irradiation apparatus equipped with a plurality of dielectric barrier discharge lamps. The irradiation device 1 includes a plurality of dielectric barrier discharge lamps 4 in a lamp house 2 having a window portion 3 made of quartz glass. Each lamp is provided with a reflector 5 and is made of aluminum. It is installed on the fixing block 6 and nitrogen gas is allowed to flow from 10 l / min to 20 l / min from the gas inlet 9A. Further, a high-frequency voltage generating coil 23 and a control board 22 are disposed in the electrical component storage unit 21 adjacent to the lamp house. The high-frequency voltage generating coil 23 includes a power feeding unit 13, a power feeding path 14, and a power feeding path. A high frequency high voltage is supplied to the lamp 4 in the lamp house 2 through a connector 8 constituting a part. An Ni alloy, which is an ozone resistant material, is used for the power feeding portion 13 of the lamp 4 and the power feeding path 14 of the device arranged in the device, and the connector 8 is also covered with gold as an ozone resistant material. Therefore, there were no problems such as oxidation due to ozone, deterioration of conductivity due to oxidative corrosion, and failure to disconnect the connector. FIG. 2 (b) is a fourth embodiment, and in the dielectric barrier discharge lamp irradiating device having the same configuration as FIG. 2 (a), the gas introduction part 9C for the electric part storage part and the gas discharge for the electric part storage part. 9D is provided, and nitrogen gas is flowed at a flow rate of about 10 l / min to 20 l / min and pressurized using the gas introduction part 9C and the gas discharge part 9D. Thereby, the invasion of ozone into the electrical component storage unit 21 is suppressed. When the lighting frequency of the lamp installed in the irradiation device is about 20 kHz and the applied voltage of each lamp is 6 kV, the lamp power supply unit 13 of the irradiation device 1 and the irradiation device Each component such as the power supply path 14, the connector 8 that forms a part of the power supply path, and the high-frequency voltage generating coil 23 in the electrical component storage unit 21 includes a power supply path due to ozone oxidation and oxidative corrosion, and electrical conductivity of each electrical component. There were no problems such as deterioration or connector disconnection.

  As a fifth embodiment, FIG. 3 (a) shows an irradiation apparatus having a structure not fixed to a lamp fixing block. The irradiation device 1 fixes both ends of a lamp in a lamp house 2 having a window portion 3 made of quartz glass, and radiates from the window portion. The light radiated to the side opposite to the window surface is also efficiently extracted using the reflector 5. Further, the electrical connection of the electrode 15 is grounded to the lamp house via the power supply path 14B and the terminal 18. Nitrogen gas is allowed to flow from 10 l / min to 20 l / min from the gas inlet 9A. Further, a high-frequency voltage generating coil 23 and a control board 22 are disposed in the electrical component storage unit 21 adjacent to the lamp house. The high-frequency voltage generating coil 23 includes a power feeding unit 13, a power feeding path 14 </ b> A, and a power feeding path. A high frequency high voltage is supplied to the lamp 4 in the lamp house 2 through a connector 8 constituting a part. Ni alloy, which is an ozone-resistant material, is used for the power feeding portion 13 of the lamp 4 and the power feeding paths 14A and 14B of the apparatus arranged in the apparatus, and a connector that forms part of the power feeding path 8. Since the terminal 8 was coated with a Ni material, there were no problems such as oxidation due to ozone, conductivity deterioration due to oxidative corrosion, and failure to disconnect the connector. FIG. 3 (b) is a sixth embodiment, and in the dielectric barrier discharge lamp irradiating apparatus having the same configuration as FIG. 3 (a), the gas introduction part 9C for the electric part storage part and the gas discharge for the electric part storage part. 9D is provided, and nitrogen gas is flowed at a flow rate of about 10 l / min to 20 l / min and pressurized using the gas introduction part 9C and the gas discharge part 9D. Thereby, the invasion of ozone into the electrical component storage unit 21 is suppressed. When the lighting frequency of the lamp installed in the irradiation device is about 20 kHz and the applied voltage of each lamp is 6 kV, the lamp power supply unit 13 of the irradiation device 1 and the irradiation device The parts such as the power supply paths 14A and 14B, the connector 8 and the terminal 18 forming a part of the power supply path, and the high-frequency voltage generating coil 23 in the electrical component storage unit 21 include the power supply path and each of the oxidation and oxidation corrosion caused by ozone. There were no problems such as the deterioration of the electrical conductivity of the electrical components or the connectors becoming disconnected.

  FIG. 4 shows a detailed configuration of the dielectric barrier discharge lamp arranged in the irradiation apparatus described in the first to fourth embodiments. 4A is a longitudinal front view of the lamp, FIG. 4B is a vertical side view, and FIG. 4C is a perspective view showing a detailed structure of a power feeding unit of the lamp. The dielectric barrier discharge lamp includes a double cylindrical tubular discharge vessel 10 made of a light transmissive dielectric, and a net-like first formed on an outer surface 15 of an outer cylindrical portion 101 of the discharge vessel 10. The electrode 11 and a semi-cylindrical second electrode 12 arranged via a dielectric constituting the inner cylindrical portion 102 of the discharge vessel 10, the first electrode 11 being a lamp mounting portion for fixing a lamp A power supply unit 13 that is grounded via a block or the like, and is attached to a second electrode holding component 16 having a spring property that tightly fixes the second electrode 12 to the inner cylindrical portion 102 of the discharge vessel 10; The power supply path 14 is electrically connected to the high-frequency voltage generating coil via a connector 8 that forms part of the power supply path. Ni or the like is used as the ozone-resistant material for the power supply unit 13 and the power supply path 14 on the second electrode 12 side and the connector 8. The discharge vessel 10 is filled with a rare gas such as xenon gas or a mixed gas of a rare gas and a halogen gas as a discharge gas, and is a dielectric between the first electrode 11 and the second electrode 12. In the case where a high frequency voltage is applied through the discharge vessel 10, the discharge gas constitutes excimer molecules by dielectric barrier discharge, and excimer light specific to the discharge gas, for example, xenon gas, is enclosed, the wavelength λ = A vacuum ultraviolet light of 172 nm is generated.

  FIG. 5 shows a detailed configuration of the dielectric barrier discharge lamp arranged in the irradiation apparatus according to the fifth and sixth embodiments of the irradiation apparatus. In the configuration equivalent to the configuration shown in FIG. 4, the electrical connection of the first electrode 11 is performed by grounding the lamp house via the power supply path 14 </ b> B and the terminal 18. Is used as an ozone resistant material.

  The dielectric barrier discharge lamp provided in the irradiation apparatus of the present invention is not limited to the embodiment shown in FIGS. 4 and 5, and various modifications can be made.

  For example, the shape of the discharge vessel at least partially made of a dielectric material may be a box shape, a flat plate shape, or other shapes. Further, the structure of the discharge vessel may be a discharge vessel having a single cylindrical tube structure as shown in FIGS. 6 and 7 in addition to the double cylindrical tube structure as shown in FIGS. Of the pair of electrodes 11, 12, one electrode 12 is disposed in the discharge vessel 10 and constitutes a dielectric barrier discharge lamp having a structure covered with a discharge gas filled in the discharge vessel 10. You can also.

  FIG. 6 is an example showing a form of a dielectric barrier discharge lamp having a discharge vessel having a single cylindrical tube structure, wherein (a) shows a longitudinal front view and (b) shows a longitudinal side view. In the figure, a discharge vessel 10 having a single cylindrical tube structure made of a light-transmitting dielectric, a net-like first electrode 11 disposed on the outer surface 15 of the discharge vessel 10, and a discharge inside the discharge vessel 10. A second electrode 12 disposed in a cavity filled with a working gas, and a power feeding unit 13 composed of an ozone resistant material connected to a part of the second electrode and an ozone resistant material. A dielectric barrier discharge lamp having a configured power feeding path 14 and a connector 8 forming a part of the power feeding path, the inside of the discharge vessel 10 being filled with xenon as a discharge gas, and the second electrode being Covered with discharge gas.

  FIG. 7 is a second example showing a form of a dielectric barrier discharge lamp having a discharge vessel having a single cylindrical tube structure, where (A) is a longitudinal front view and (B) is a longitudinal side view. is there. In the figure, a discharge vessel 10 made of a light-transmitting dielectric, a plate-like first electrode 11 formed on the outer surface 15 of the discharge vessel 10, and a discharge gas inside the discharge vessel 10. The second electrode 12 is disposed in a cavity filled with a feed portion 13 made of an ozone-resistant material connected to a part of the second electrode and the ozone-resistant material. A dielectric barrier discharge lamp having a power supply path 14 and a connector 8 forming a part of the power supply path, the discharge vessel 10 is filled with xenon as a discharge gas, and the second electrode 12 is discharged. Covered with gas. One end of the second electrode 12 is located inside the discharge vessel 10.

  In the dielectric barrier discharge lamp having a single cylindrical tube structure discharge vessel shown in FIGS. 6 and 7, the shape of the second electrode is not limited to that shown in the drawings.

  Further, the arrangement of the electrodes is not limited to the shape in which one electrode as shown in FIGS. 4 to 7 is arranged on the outer surface of the discharge vessel, but a pair of electrodes as shown in FIGS. A shape in which a pair of electrodes as shown in FIG. 10 is arranged on the outer surface of the discharge vessel, and a shape in which a plurality of electrodes as shown in FIG.

  FIGS. 8A and 8B are explanatory views showing the outline of a fifth example showing the form of the dielectric barrier discharge lamp in the present invention, where FIG. 8A is a longitudinal front view and FIG. 8B is a transverse side view. A first electrode 11 and a second electrode 12 are disposed inside a cylindrical discharge tube 10, and each of the electrodes is covered with a dielectric 10B.

  FIGS. 9A and 9B are explanatory views showing the outline of a sixth example showing the form of the dielectric barrier discharge lamp in the present invention. FIG. 9A is a longitudinal front view, and FIG. 9B is a transverse side view. A first electrode 11 and a second electrode 12 are arranged inside a cylindrical discharge tube 10, one of the electrodes is covered with a dielectric 10 B, and the other is covered with a rare gas sealed in the discharge tube. It has been broken.

  FIGS. 10A and 10B are explanatory views showing the outline of a seventh example showing the form of the dielectric barrier discharge lamp in the present invention. FIG. 10A is a longitudinal front view, and FIG. 10B is a transverse side view. The first electrode 11 and the second electrode 12 are disposed on the outer surface of the cylindrical discharge tube 10. Each of the electrodes is formed of a single plate electrode and is formed on the circumference of the discharge tube.

  FIG. 11 is an explanatory view showing the outline of an eighth example showing the form of the dielectric barrier discharge lamp in the present invention, where (A) is a longitudinal front view and (B) is a transverse side view. In the lamp, a plurality of electrodes are arranged inside the discharge tube 10, and a group constituting the first electrode 11 and a group constituting the second electrode 12 are alternately arranged in the discharge tube. . One group forming the electrode is covered with a dielectric 10B, and the other group is covered with a rare gas sealed in a discharge tube.

  As a dielectric material constituting the discharge vessel, in addition to quartz glass, for example, a material that transmits vacuum ultraviolet light such as sapphire, magnesium fluoride, and calcium fluoride, and a dielectric that does not have light transmittance in part are used. It may be used.

  As the discharge gas, a rare gas other than xenon gas, for example, krypton, argon or the like can be used. Further, a mixed gas of these rare gas and halogen gas can also be used.

  As a method of connecting the power supply path 14 and the electrode holding component 16 in the dielectric barrier discharge lamp, in addition to caulking directly to the electrode using a sleeve or the like, fixing with a screw or the like, brazing using an ozone-resistant metal, direct For example, the welding may be fixed by simply winding the power supply path 14. In addition, the power supply path 14 can be directly connected to the electrode by a similar method.

  The connector 8 forming a part of the power supply path to which the power supply path 14 is connected is not only a fitting type connector, but also fixed by a spring force, fixed by a screw using a crimping terminal, etc. There are those that directly fix 14 with screws, those that are indirectly fixed as shown in FIG. 12, and those that only wrap the power supply paths directly. Alternatively, the lamp electrode may be directly connected to the power supply path on the apparatus side.

  FIGS. 12A and 12B are explanatory views showing other shapes of the power feeding portion in the dielectric barrier discharge lamp of the present invention, where FIG. 12A is a front view and FIG. 12B is a transverse side view. The shape of the power feeding portion is such that the power feeding path 14 is sandwiched between plate-like members and the like and is electrically joined to the electrode of the lamp. In FIG. 12, a pair of metal plates with holes for screwing are used as the plate-like members, and the power supply path is fixed by screws.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic explanatory drawing which shows an example of a structure of the dielectric barrier discharge lamp irradiation apparatus in this invention, (A) is the 1st Example which used the ozone resistant material for the electric power feeding part and the electric power feeding path, (B) is the first. In addition to the first embodiment, it is a second embodiment in which a gas is flowed into the electrical component storage portion to increase the pressure. It is a schematic explanatory drawing which shows an example of a structure of the dielectric barrier discharge lamp irradiation apparatus in this invention, (A) is the 3rd implementation which arrange | positions this lamp | ramp and uses an ozone resistant material for a feed part and a feed path. For example, (b) is a fourth embodiment in which a gas is flowed into the electrical component storage section to pressurize in addition to the third embodiment. It is a schematic explanatory drawing which shows an example of a structure of the dielectric barrier discharge lamp irradiation apparatus in this invention, (A) is the 5th Example which does not use a block for fixation for the earthing | grounded electric power supply path, (B) is 5th. This is a sixth embodiment in which a gas is flowed into the electrical component storage section to pressurize it. BRIEF DESCRIPTION OF THE DRAWINGS It is explanatory drawing which shows the outline of a structure of the dielectric barrier discharge lamp in this invention, Comprising: (A) is a vertical front view, (B) is a cross-sectional side view, (C) is a perspective view which shows the detail of an electric power feeding part. . It is explanatory drawing which shows the outline of the 4th example which shows the form of the dielectric barrier discharge lamp in this invention, Comprising: (a) is a vertical front view, (b) is a cross-sectional side view. It is explanatory drawing which shows the outline of an example which shows the form of the dielectric barrier discharge lamp which has a discharge vessel of a single cylindrical tube structure, (a) is a vertical front view, (b) is a cross-sectional side view. It is explanatory drawing which shows the outline of the 2nd example which shows the form of the dielectric barrier discharge lamp which has the discharge container of a single cylindrical tube structure, Comprising: (a) is a vertical front view, (b) is a cross-sectional side view. It is explanatory drawing which shows the outline of the 5th example which shows the form of the dielectric barrier discharge lamp in this invention, Comprising: (a) is a vertical front view, (b) is a cross-sectional side view. It is explanatory drawing which shows the outline of the 6th example which shows the form of the dielectric barrier discharge lamp in this invention, Comprising: (a) is a vertical front view, (b) is a cross-sectional side view. It is explanatory drawing which shows the outline of the 7th example which shows the form of the dielectric barrier discharge lamp in this invention, Comprising: (a) is a vertical front view, (b) is a cross-sectional side view. It is explanatory drawing which shows the outline of the 8th example which shows the form of the dielectric barrier discharge lamp in this invention, Comprising: (a) is a vertical front view, (b) is a cross-sectional side view. It is the schematic which shows the other shape of the electric power feeding part in the dielectric barrier discharge lamp of this invention, (A) is a front view, (B) is a side view. It is explanatory drawing of an example which shows the structure of the conventional dielectric barrier discharge lamp, (A) is a vertical front view, (B) is a cross-sectional side view, and (C) is a perspective view showing details of a power feeding unit.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Irradiation device 2 Lamp house 3 Window part 4 Dielectric barrier discharge lamp 5 Reflector 6 Lamp fixing block 7 Light transmissive window member fixing part 8 Connector 9A Gas inlet 9B Gas outlet 9C Gas inlet for electrical component storage 9D Gas discharge port 10 for electrical component storage unit Discharge vessel 10B Dielectric material 101 covering electrode arranged in discharge tube Outer cylindrical portion 102 of discharge vessel Inner cylindrical portion 11 of discharge vessel 11 First electrode 12 Second electrode 13 Power supply Part 14 Feeding path 14A Feeding path 14B Grounded feeding path 15 Outer surface 16 of discharge vessel Second electrode holding part 18 Terminal 21 in fourth embodiment Electrical component storage part 22 Control board 23 For high frequency voltage generation Coil 31 Copper feeder 32 of a conventional dielectric barrier discharge lamp Copper feed path 33 of a conventional dielectric barrier discharge lamp Conventional dielectric barrier discharge lamp Copper connectors

Claims (2)

A discharge vessel having at least a portion made of a dielectric; a first electrode provided on the discharge vessel; and a second electrode disposed via the dielectric, the first and second A dielectric barrier discharge lamp having a power feeding portion connected to an electrode and a power feeding path, and a lamp house having a window portion made of a light transmissive member for extracting light emitted from the dielectric barrier discharge lamp. In the dielectric barrier discharge lamp irradiation apparatus,
On the lamp house, an electrical component storage unit is disposed adjacent to a partition wall, and an ozone resistant material is used or coated on at least the power supply unit and a part of the power supply path. Dielectric barrier discharge lamp irradiation device. The ozone-resistant material according to claim 1 is Ni, Ni alloy, or another ozone-resistant metal.

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